KR102725222B1 - 보관 장치 - Google Patents

보관 장치 Download PDF

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Publication number
KR102725222B1
KR102725222B1 KR1020227019126A KR20227019126A KR102725222B1 KR 102725222 B1 KR102725222 B1 KR 102725222B1 KR 1020227019126 A KR1020227019126 A KR 1020227019126A KR 20227019126 A KR20227019126 A KR 20227019126A KR 102725222 B1 KR102725222 B1 KR 102725222B1
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KR
South Korea
Prior art keywords
pair
attachment
support
mounting
extension
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227019126A
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English (en)
Korean (ko)
Other versions
KR20220097964A (ko
Inventor
코카이 조
신지 오니시
켄 이나다
Original Assignee
무라다기카이가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20220097964A publication Critical patent/KR20220097964A/ko
Application granted granted Critical
Publication of KR102725222B1 publication Critical patent/KR102725222B1/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/14—Stack holders or separators
    • H01L21/67769—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
    • B65D21/08—Containers of variable capacity
    • B65D21/086—Collapsible or telescopic containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02—Internal fittings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/20—External fittings
    • B65D25/24—External fittings for spacing bases of containers from supporting surfaces, e.g. legs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2069—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere
    • B65D81/2076—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas in a special atmosphere in an at least partially rigid container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
    • F16M11/20—Undercarriages with or without wheels
    • H01L21/67393—
    • H01L21/67775—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408—Docking arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Valve Device For Special Equipments (AREA)
  • Vehicle Body Suspensions (AREA)
KR1020227019126A 2019-11-12 2020-09-10 보관 장치 Active KR102725222B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2019-204470 2019-11-12
JP2019204470 2019-11-12
PCT/JP2020/034269 WO2021095341A1 (ja) 2019-11-12 2020-09-10 保管装置

Publications (2)

Publication Number Publication Date
KR20220097964A KR20220097964A (ko) 2022-07-08
KR102725222B1 true KR102725222B1 (ko) 2024-10-31

Family

ID=75912250

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227019126A Active KR102725222B1 (ko) 2019-11-12 2020-09-10 보관 장치

Country Status (8)

Country Link
US (1) US12159801B2 (https=)
EP (1) EP4059869A4 (https=)
JP (1) JP7375827B2 (https=)
KR (1) KR102725222B1 (https=)
CN (1) CN114521184B (https=)
IL (1) IL292063B2 (https=)
TW (1) TWI849255B (https=)
WO (1) WO2021095341A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7740211B2 (ja) * 2022-11-24 2025-09-17 株式会社ダイフク 物品収納棚

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019011179A (ja) 2017-06-30 2019-01-24 株式会社ダイフク 物品支持棚
JP2019038647A (ja) * 2017-08-24 2019-03-14 株式会社ダイフク 保管棚
JP2019112160A (ja) 2017-12-21 2019-07-11 株式会社ダイフク 物品収納設備

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5381738A (en) * 1993-07-19 1995-01-17 Meyer; Klaus Adjustable work table assembly
US5592886A (en) * 1994-01-31 1997-01-14 Amco Corporation Adjustable wall-mounted system for shelves
US5775655A (en) * 1996-09-23 1998-07-07 Schmeets; Harold H. Colllapsible and adjustable support means for attachment to a building structure
JPH10181810A (ja) * 1996-12-19 1998-07-07 Daifuku Co Ltd 自動倉庫
JP4519473B2 (ja) 2004-01-28 2010-08-04 株式会社岡村製作所 棚支持用ブラケット装置
US9433114B2 (en) * 2014-03-28 2016-08-30 International Business Machines Corporation Service shelf for electronic cabinet
JP6540221B2 (ja) 2015-05-18 2019-07-10 村田機械株式会社 パージ装置及びパージストッカ
JP6409716B2 (ja) 2015-09-02 2018-10-24 株式会社ダイフク 保管棚
JP6551240B2 (ja) * 2016-01-06 2019-07-31 株式会社ダイフク 物品収納棚、及び、それを備えた物品収納設備
US9888603B1 (en) * 2016-02-29 2018-02-06 EMC IP Holding Co. LLC Slider arm assembly for cable carrier
JP6693356B2 (ja) * 2016-09-09 2020-05-13 株式会社ダイフク 物品搬送装置
WO2018066208A1 (ja) * 2016-10-04 2018-04-12 村田機械株式会社 保管棚
US10470565B1 (en) * 2019-06-11 2019-11-12 Rom Acquisition Corporation Foldable shelving construction
US11457735B1 (en) * 2021-08-04 2022-10-04 Lucio D'Isep Storage system
US11641942B1 (en) * 2022-02-08 2023-05-09 Ken Rockley Pty Ltd. Storage rack system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019011179A (ja) 2017-06-30 2019-01-24 株式会社ダイフク 物品支持棚
JP2019038647A (ja) * 2017-08-24 2019-03-14 株式会社ダイフク 保管棚
JP2019112160A (ja) 2017-12-21 2019-07-11 株式会社ダイフク 物品収納設備

Also Published As

Publication number Publication date
EP4059869A1 (en) 2022-09-21
JP7375827B2 (ja) 2023-11-08
IL292063B2 (en) 2026-01-01
CN114521184B (zh) 2024-06-25
US12159801B2 (en) 2024-12-03
EP4059869A4 (en) 2023-11-22
TWI849255B (zh) 2024-07-21
JPWO2021095341A1 (https=) 2021-05-20
CN114521184A (zh) 2022-05-20
IL292063A (en) 2022-06-01
IL292063B1 (en) 2025-09-01
KR20220097964A (ko) 2022-07-08
WO2021095341A1 (ja) 2021-05-20
TW202126558A (zh) 2021-07-16
US20220415689A1 (en) 2022-12-29

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