WO2021093264A1 - Appareil et procédé de détection de surface - Google Patents

Appareil et procédé de détection de surface Download PDF

Info

Publication number
WO2021093264A1
WO2021093264A1 PCT/CN2020/084704 CN2020084704W WO2021093264A1 WO 2021093264 A1 WO2021093264 A1 WO 2021093264A1 CN 2020084704 W CN2020084704 W CN 2020084704W WO 2021093264 A1 WO2021093264 A1 WO 2021093264A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
module
light beam
reflection
measured
Prior art date
Application number
PCT/CN2020/084704
Other languages
English (en)
Chinese (zh)
Inventor
刘亮
李仲禹
张濛园
韩晓荣
Original Assignee
上海精测半导体技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201911112590.6A external-priority patent/CN110763689B/zh
Priority claimed from CN201911112606.3A external-priority patent/CN110763690B/zh
Application filed by 上海精测半导体技术有限公司 filed Critical 上海精测半导体技术有限公司
Priority to KR1020217036540A priority Critical patent/KR20210151160A/ko
Priority to JP2021568020A priority patent/JP7304970B2/ja
Publication of WO2021093264A1 publication Critical patent/WO2021093264A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1047—Mechano-optical scan, i.e. object and beam moving with rotating optics and moving stage

Definitions

  • the embodiments of the present invention relate to the field of semiconductor technology, and in particular to a surface detection device and method.
  • Figure 1 is a schematic structural diagram of a typical measurement device for measuring the scattering of particles on the surface of a silicon wafer.
  • the measurement device includes a body 200, and the body 200 is provided with a silicon wafer to be measured.
  • the normal incident light ⁇ and oblique incident light ⁇ emitted by the transmitting unit 230 are irradiated on the surface of the silicon wafer 210 to be tested on the workpiece stage 220, and the measured light ⁇ and reflected light on the surface of the silicon wafer 210 to be tested are analyzed. Detection of particles on the surface of the silicon wafer 210.
  • the workpiece stage 220 is equipped with an x-direction moving platform and a y-direction moving platform, through the movement of the moving platform in the x-direction and y-direction, or a rotating platform rotating around the z-axis ( Figure 2), through While rotating around the z-axis, one-way movement along the x-axis realizes scanning and detection of the entire area of the silicon wafer 210 under test.
  • the present invention provides a surface detection device and method to achieve the effect of improving detection efficiency.
  • the embodiment of the present invention provides a surface detection device, the surface detection device includes: a rotating mechanism, a first reflection module and a light receiving module arranged in sequence along a light propagation path; the first reflection module and the light receiving module are fixed In the rotating mechanism;
  • the rotation mechanism is provided with a through hole, the through hole includes a vertical portion and an inclined portion; the first reflection module is provided in the vertical portion; the rotation mechanism rotates around a first rotation axis, and the first A rotation axis is parallel to the central axis of symmetry of the vertical part, and the first rotation axis is perpendicular to the plane where the surface of the measured object is located and intersects with the projection of the first reflection module on the plane where the surface of the measured object is located.
  • the first reflection module is configured to reflect the detection light beam incident along the vertical portion into a reflected light beam and then enter the surface of the measured object through the inclined portion;
  • the light receiving module is used for converting the scattered light beam formed after the reflected light beam is scattered by the surface of the object to be measured into a parallel light beam and then emitted.
  • the surface detection device further includes: a light concentrating module; the light concentrating module is disposed on the inclined portion; the first reflection module, the light concentrating module, and the light receiving module are sequentially along the light propagation path arrangement;
  • the focal point of the light collecting module coincides with the focal point of the light receiving module, and the focal point corresponds to a scanning point on the surface of the object to be measured.
  • the shape of the first reflection module includes any one of a pyramid or a pyramid; the central axis of the first reflection module is parallel to the first rotation axis; and the first reflection module has successively adjacent configurations At least a part of the outer side walls of the first reflection module is provided with a reflecting mirror, and the reflecting mirror is used to reflect the detection light beam.
  • the light receiving module includes a plurality of light receiving units.
  • the reflector is continuously arranged on the outer side wall of the first reflection module; the through hole includes one vertical part and a plurality of inclined parts; the light receiving unit and the inclined part One-to-one correspondence settings.
  • At least two of the plurality of light receiving units adopt optical elements with different optical characteristics; the optical elements with different optical characteristics include different lenses or different spherical mirrors.
  • the condensing module is fixed in the rotating mechanism
  • the through hole includes a vertical portion and a plurality of inclined portions
  • the first reflecting module includes a plurality of reflecting mirrors arranged adjacently in sequence, and each of the reflecting mirrors has a different angle with the plane where the object to be measured is located;
  • the concentrating module includes a plurality of concentrating units
  • the light receiving module includes a plurality of light receiving units
  • the number of the inclined portion, the reflecting mirror, the light collecting unit, and the light receiving unit are equal, and they are arranged in a one-to-one correspondence with each other;
  • Each light-collecting unit of the light-collecting module is arranged in an inclined portion corresponding to the light-collecting unit; the distance between the center point of each light-collecting unit of the light-collecting module and the first rotation axis is different, and The focal point of each light receiving unit coincides with the focal point of the corresponding light collecting unit;
  • the first reflection module reflects the detection light beam incident along the vertical portion into a reflected light beam through one of the mirrors, and the reflected light beam is condensed by the light collecting unit in the inclined portion corresponding to the mirror. It is incident on the surface of the object to be measured, and the scattered light beam formed after being scattered by the surface of the object to be measured is converted into a parallel light beam by the corresponding light receiving unit and then emitted.
  • the first reflecting module includes a first reflecting mirror and a second reflecting mirror
  • the light receiving module includes a first light receiving unit and a second light receiving unit
  • the first reflecting mirror and the first light receiving unit are arranged correspondingly, and the first light receiving unit is used to convert a first scattered light beam into a parallel light beam and then emit it, and the first scattered light beam is the first reflected light beam.
  • the reflected light beam of the mirror is a scattered light beam formed after being condensed by the light-concentrating unit corresponding to the first reflecting mirror and scattered by the surface of the object to be measured;
  • the second reflector and the second light receiving unit are arranged correspondingly, and the second light receiving unit is used to convert a second scattered light beam into a parallel light beam before exiting, and the second scattered light beam is the second reflection light beam.
  • the reflected light beam of the mirror is a scattered light beam formed after being condensed by the light-concentrating unit corresponding to the second reflecting mirror and scattered by the surface of the object to be measured;
  • the included angle between the first reflector and the plane where the measured object is located is smaller than the included angle between the second reflector and the plane where the measured object is located, and the center point of the first light-receiving unit is to the first
  • the distance of a rotation axis is greater than the distance from the center point of the second light receiving unit to the first rotation axis.
  • the first reflecting module includes a first reflecting mirror to an nth reflecting mirror arranged adjacently in order, and the included angle between the first reflecting mirror and the plane where the measured object is to the nth reflecting mirror
  • the light-receiving module includes a first light-receiving unit to an n-th light-receiving unit arranged in sequence, the i-th reflector is arranged corresponding to the i-th light-receiving unit, i is greater than or equal to 1 and less than or equal to n, and the The distance from the center point of a light-receiving unit to the first rotation axis to the distance from the center point of the n-th light-receiving unit to the first rotation axis are respectively L 1 , L 2 ... L n-1 and L n ;
  • L i -L i-1 K, where K is a fixed value.
  • the surface detection device further includes: a parabolic mirror and a photodetector; the first reflection module, the light receiving module, the parabolic mirror and the photodetector are arranged in sequence along the light propagation path; The symmetry axis of the parabolic mirror is parallel to the first rotation axis, and the photosensitive surface of the photodetector is arranged on the focal point of the parabolic mirror.
  • the symmetry axis of the parabolic mirror coincides with the first rotation axis
  • the photosensitive surface of the photodetector is located at the focal point of the parabolic mirror
  • the photosensitive surface of the photodetector is aligned with the parabolic mirror
  • the axis of symmetry is vertical.
  • the surface detection device further includes: a second reflection module and a photodetector; the second reflection module and the photodetector are fixed in the rotating mechanism; the first reflection module, the The light receiving module, the second reflection module and the photodetector are arranged in sequence along the light propagation path; the second reflection module is used to reflect the parallel light beam to the photodetector.
  • the surface detection device further includes: a second reflection module and a photodetector; the second reflection module and the photodetector are fixed in the rotating mechanism; the first reflection module, the The light receiving module, the second reflection module and the photodetector are arranged in sequence along the light propagation path; the second reflection module is used to reflect the parallel light beam to the photodetector;
  • the second reflection module and the photodetector each include a plurality of second reflection units and a plurality of photoelectron detectors, and the number of the second reflection units and the photoelectron detectors is the same as that of the inclined portion and the photoelectric detector.
  • the number of the reflecting mirror and the light receiving unit are equal, and they are arranged in a one-to-one correspondence with each other.
  • the surface detection device further includes: a workbench;
  • the reflected light beam reflected on the surface of the object to be measured completes scanning in a second direction, and the first direction crosses the second direction.
  • embodiments of the present invention also provide a surface detection method, which is implemented based on the above-mentioned surface detection device;
  • the surface detection method includes:
  • the scattered light beam formed after the reflected light beam is scattered by the surface of the object to be measured is converted into a parallel light beam and then emitted by the light receiving module.
  • the surface detection device further includes: a workbench; after S11, it further includes: controlling the workbench to move a preset distance in the first direction; or,
  • embodiments of the present invention also provide a surface detection method, which is implemented based on the above-mentioned surface detection device;
  • the surface detection method includes:
  • S21 Control the first reflection module to reflect the detection light beam incident along the vertical portion into a reflection light beam, and then pass through the condensing module of the inclined portion to be incident on the surface of the object to be measured;
  • the surface detection device further includes: a workbench;
  • the first reflecting module includes a first reflecting mirror and a second reflecting mirror, and the light receiving module includes a first light receiving unit and a second light receiving unit;
  • the first reflecting mirror and the first light receiving unit are arranged correspondingly, and the second reflecting mirror and the second light receiving unit are arranged correspondingly; the angle between the first reflecting mirror and the plane where the measured object is located Is smaller than the angle between the second reflector and the plane where the measured object is located, and the distance from the center point of the first light receiving unit to the first rotation axis is greater than the center point of the second light receiving unit to The distance of the first rotation axis;
  • the surface detection method includes:
  • the first scattered light beam is converted into a parallel light beam by the first light receiving unit and then emitted;
  • the reflected light beam reflected on the surface of the object to be measured completes scanning in a second direction, and the first direction crosses the second direction.
  • the first reflective module and the light receiving module are fixed on a rotating mechanism that rotates around the first rotation axis, because during scanning, the first reflective module and the light receiving module surround the first rotating mechanism together.
  • the rotation axis rotates, so that the incident light spot reflected by the first reflection module forms a scanning arc on the surface of the measured object, and further cooperates with the high-speed rotation of the rotating mechanism to achieve high-frequency scanning of the surface of the measured object, thereby achieving improvement The effect of detection efficiency.
  • Fig. 1 is a schematic structural diagram of a surface measuring device in the prior art
  • Figure 2 is a top view of a surface measuring device in the prior art
  • FIG. 3 is a schematic structural diagram of a surface detection device provided by an embodiment of the present invention.
  • FIG. 4 is a schematic diagram of a scanning path of a surface detection device for surface detection of an object to be measured according to an embodiment of the present invention
  • FIG. 5 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • FIG. 6 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • FIG. 7 is a schematic bottom view of the structure of a surface detection device provided by an embodiment of the present invention.
  • FIG. 8 is a schematic structural diagram of a first reflective module provided by an embodiment of the present invention.
  • FIG. 9 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • FIG. 10 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • FIG. 11 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • FIG. 12 is a flowchart of a surface detection method provided by an embodiment of the present invention.
  • FIG. 13 is a schematic structural diagram of still another first reflection module according to an embodiment of the present invention.
  • FIG. 14 is a schematic bottom view of another surface detection device provided by an embodiment of the present invention.
  • 15 is a schematic diagram of the position where the reflected light beam is reflected to the surface of the object under test when the angle between the reflector of the first reflector module and the plane where the object under test is located is different according to an embodiment of the present invention
  • 16 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • 17 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • FIG. 18 is a flowchart of another surface detection method provided by an embodiment of the present invention.
  • FIG. 19 is a flowchart of another surface detection method provided by an embodiment of the present invention.
  • FIG. 3 is a schematic structural diagram of a surface detection device provided by an embodiment of the present invention.
  • the surface detection device includes: a rotating mechanism 10, a first reflection module 20 and a light receiving module arranged in sequence along the light propagation path 40;
  • the first reflection module 20 and the light receiving module 40 are fixed on the rotation mechanism 10;
  • the rotation mechanism 10 is provided with a through hole 11, the through hole 11 includes a vertical portion 111 and an inclined portion 112 two parts structure, the first reflection module 20 Set in the vertical portion 111;
  • the rotating mechanism 10 rotates around the first rotation axis Z, the first rotation axis Z is parallel to the central symmetry axis of the vertical portion 111, and the first rotation axis Z is perpendicular to the surface of the measured object 50 Plane and overlap with the projection of the first reflection module 20 on the surface of the measured object 50;
  • the detection light beam a enters the first reflection module 20 along the vertical portion 111 of the through hole 11, and is reflected by the first reflection module 20 After forming the
  • the first reflection module 20 may include a flat mirror, for example, but the present embodiment is not limited to this, as long as the detection light beam a can be reflected to the surface of the object 50 to be measured.
  • the light receiving module 40 may include a lens, for example, but the embodiment is not limited to this, as long as the scattered light beam c formed after the reflected light beam b is scattered by the surface of the object 50 to be measured can be converted into a parallel light beam d and then emitted.
  • the rotating mechanism 10 rapidly rotates around the first rotation axis Z, thereby driving the first reflection module 20 and the light receiving module 40 to rotate around the first rotation axis Z.
  • the reflected light beam b reflected by the first reflection module 20 forms a scanning arc on the surface of the object 50 to be measured. If there is a defect on the surface of the measured object 50, the reflected light beam b incident on the surface of the measured object 50 is scattered to form a scattered light beam c. After the scattered light beam c passes through the light receiving module 40, it forms a parallel light beam d and exits.
  • the detection light beam a enters the first reflection module 20 along the vertical portion 111 of the through hole 11, is reflected by the first reflection module 20 to form a reflected light beam b, and then is incident on the surface of the measured object 50.
  • the rotating mechanism 10 rapidly rotates around the first rotation axis Z, and the first reflection module 20 is fixed on the rotation mechanism 10, the first reflection module 20 also rapidly rotates around the first rotation axis Z, thereby causing the first reflection module 20 to reflect
  • the reflected light beam b forms a scanning arc on the surface of the measured object 50, as shown in FIG. 4, which is a schematic diagram of the scanning path of a surface detection device provided by an embodiment of the present invention to detect the surface of the measured object.
  • the reflected light beam b incident on the surface of the measured object 50 is scattered to form a scattered light beam c.
  • the scattered light beam c passes through the light receiving lens 30, it forms a parallel light beam d and exits.
  • this technical solution can drive the first reflection module 20 to quickly rotate around the first rotation axis Z through the rapid rotation of the rotating mechanism 10, the reflected beam b reflected by the first reflection module 20 forms a scan on the surface of the object 50 to be measured.
  • the arc combined with the movement of the workpiece table 100, realizes the rapid scanning of the entire surface of the object 50 to be measured, and improves the scanning rate.
  • the first reflection module and the light-receiving module are fixedly arranged in the rotating mechanism that rotates around the first rotation axis, so that during scanning, the first reflection module and the light-receiving module surround the first rotation mechanism together with the rotation mechanism.
  • a rotation axis rotates, so that the incident light spot reflected by the first reflection module forms a scanning arc on the surface of the object to be measured, and further cooperates with the high-speed rotation of the rotating mechanism to achieve high-frequency scanning of the surface of the object to be measured. The effect of improving detection efficiency.
  • FIG. 5 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • the surface detection device further includes: a light-concentrating module 30, which is arranged in the inclined portion 112 of the through hole 11; the first reflecting module 20, the light-concentrating module 30, and the light-receiving module 40 follow the light
  • the propagation paths are arranged in sequence; the focal point of the light collecting module 30 coincides with the focal point of the light receiving module 40, and the two overlapping focal points Q are located on the surface of the measured object 50 and correspond to the scanning points on the surface of the measured object 50.
  • the light concentrating module 30 may include a lens, for example, but this embodiment is not limited to this, as long as the relative position of the scanning point on the surface of the object 50 to be measured and the light receiving module 40 can be kept unchanged.
  • the incident detection beam a coincides with the first rotation axis Z
  • the incident detection beam a passes through the vertical portion 111 of the through hole 11 to the first reflection module 20 and then the reflected beam b is directly focused on the measured object 50.
  • the incident detection beam a deviates from the first rotation axis Z (as shown in FIG.
  • the height of the light spot incident on the first reflection module 20 in the vertical direction (the direction perpendicular to the plane where the surface of the object 50 is located)
  • the value changes with the rotation of the rotating mechanism 10, so the position where the reflected light beam b reflected by the first reflection module 20 irradiates the surface of the measured object 50 will change relative to the light receiving module 40 during the scanning process, thereby affecting the light receiving
  • the collection effect of the module 40 on the scattered light beam c thereby affecting the detection result.
  • a light collecting module 30 is arranged in the inclined portion 112 of the through hole 11, the focal point of the light collecting module 30 coincides with the focal point of the light receiving module 40, and the two overlapping focal points Q It is located on the surface of the measured object 50, so that even if the incident detection beam a does not coincide with the first rotation axis Z, the reflected beam b is incident on the surface of the measured object 50 where the scanning point is located at the coincident focal point.
  • the detection beam deviating from the first rotation axis is focused on the reflected beam after being reflected by the first reflection module.
  • the relative position of the scanning point on the surface of the object and the light-receiving module remains unchanged, that is, the scanning point is located at the focal point where the light-collecting module and the light-receiving module overlap, which facilitates the formation of a parallel beam through the light-receiving module to be detected, thereby improving detection The accuracy of the results.
  • FIG. 6 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention
  • FIG. 7 is a bottom view of a surface detection device provided by an embodiment of the present invention
  • 8 is a schematic structural diagram of the first reflection module in FIG. 6.
  • the shape of the first reflection module 20 includes any one of a pyramid or a pyramid; the central axis of the first reflection module 20 and The first rotation axis Z is parallel; the first reflection module 20 has a plurality of outer side walls 21 adjacently arranged in turn, and at least a part of the outer side walls 21 of the first reflection module 20 is provided with a reflection mirror for reflecting the detection light beam a.
  • the first reflection module 20 includes any one of a pyramid or a prism, and its cross section is polygonal, for example, it may be a triangle. Accordingly, the first reflection module 20 has three outer sidewalls arranged adjacently in sequence (see FIG. 8) A reflector is provided on at least one of the three outer side walls. Preferably, mirrors are continuously arranged on the outer side wall of the entire circle of the first reflection module 20.
  • the first reflection module 20 is a triangular prism, and correspondingly, the first reflection module 20 has three outer sidewalls arranged adjacently in sequence, and the three outer sidewalls are all provided with mirrors.
  • the central axis of the triangular prism coincides with the first rotation axis Z, and the triangular prism rapidly rotates around its central axis. When the rotating mechanism 10 rotates once, three circular arcs can be scanned, which improves the scanning efficiency.
  • N is the number of mirrors provided on the first reflection module 20, which can be obtained by rough calculation, and the central angle corresponding to a section of scanning arc formed by reflection of one mirror is 2 ⁇ /N.
  • N is large enough, the central angle becomes very small, and the scanning arc will be close to a straight line.
  • N scans can be realized. Further cooperate with the high-speed rotation of the reflective drum to achieve high-frequency scanning of the surface of the measured object.
  • the shape of the first reflection module 20 is not limited to the above examples, and the cross section of the first reflection module 20 includes but is not limited to a triangle. Those skilled in the art can select the first reflection module 20 according to the product requirements.
  • the shape and the number of sides of the cross section are not specifically limited in the present invention.
  • Figures 6 and 8 only take the shape of the first reflection module 20 as a pyramid, and the cross section of the first reflection module 20 is three.
  • the polygon is illustrated as an example. In addition, the number of mirrors can be set as needed.
  • the shape of the first reflection module to any one of a pyramid or a prism, and at least a part of the outer side wall of the first reflection module is provided with a reflection mirror, it is possible to realize that when the rotating mechanism rotates once, multiple The scanning of arcs further improves the efficiency of scanning.
  • the light receiving module 40 includes a plurality of light receiving units 41. At least two light-receiving units 41 among the plurality of light-receiving units 41 adopt optical elements with different optical characteristics.
  • a reflector is continuously arranged on the outer side wall of the first reflector module.
  • the light receiving module 40 includes a plurality of light receiving units 41
  • the through hole 11 includes one
  • the vertical portion 111 and the plurality of inclined portions 112 and the light receiving unit 41 and the inclined portions 112 are arranged in one-to-one correspondence.
  • At least two light-receiving units 41 among the plurality of light-receiving units 41 adopt optical elements with different optical characteristics.
  • the three light receiving units 41 may include any one of a lens or a spherical mirror, for example.
  • the shape of the light receiving unit 41 may include, for example, a circle or a square, but the type and shape of the light receiving unit 41 are not limited to this, as long as it has a focusing function and can convert the scattered light beam c after passing through the object 50 to be parallel.
  • the beam d is sufficient.
  • each light receiving unit 41 is provided, but it is not limited to three.
  • the light-receiving characteristics of each light-receiving unit 41 may be the same or different, or different optical elements (not shown in the figure) may be provided in each light-receiving unit 41 to obtain different light-receiving characteristics.
  • At least two of the three light-receiving units 41 may adopt different optical designs, such as setting lenses with different apertures and cooperating with different apertures to achieve different light-receiving angles, and/or adopt different polarizations.
  • the detection plate realizes different polarization characteristics selection, and/or adopts different wavelength filters to realize different wavelength selection.
  • the first reflected light beam b is scattered by the surface of the object 50 to form a scattered light beam c of different angles, and the scattered light beam c is received by a plurality of light receiving units 41 having different light receiving characteristics.
  • light receiving units 41 of different optical designs are used.
  • the light receiving units of different optical designs can collect scattered light signals of different angles, different polarization characteristics, or different wavelengths, and then Different defects can be detected, and the inspection efficiency can be improved while the inspection quality is improved.
  • FIG. 9 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • the surface detection device further includes a parabolic mirror 71 (illustrated as a parabolic surface).
  • the tiny part of the mirror) and the photodetector 60, the first reflecting module 20, the light receiving module 40, the parabolic mirror 71 and the photodetector 60 are arranged in sequence along the light propagation path; the symmetry axis of the parabolic mirror 71 is parallel to the first rotation axis Z , And the photosensitive surface of the photodetector 60 is set on the focus of the parabolic mirror 71, so that the parallel beams d at different positions can be focused on the photodetector 60 after passing through the parabolic mirror 71, so as to realize the efficient and comprehensive detection of the scattered beam c;
  • FIG. 10 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention (the rotating mechanism is omitted).
  • the symmetry axis of the parabolic mirror 71 coincides with the first rotation axis Z
  • the photosensitive surface of the photodetector 60 is located at the focal point of the parabolic mirror 71, and the photosensitive surface of the photodetector 60 is perpendicular to the symmetry axis of the parabolic mirror 71.
  • the reflected beam b can scan a circular arc on the surface of the object 50 to be measured.
  • the scanning arc position of the reflected beam b on the surface of the measured object 50 is different, so that the scattered beam c formed after the scanning is converted into a parallel beam d by the light receiving module 40 and then focused by the parabolic mirror 71 and incident at a different angle
  • the photosensitive characteristics of the photodetector 60 are generally affected by the incident angle of the light, which in turn causes systematic errors.
  • the embodiment of the present invention adjusts the parabolic mirror 71 so that even if the position of the scanning arc is different, the scattered light beam c formed after scanning is converted into a parallel beam d by the light receiving module 40 and then passed through the parabolic mirror 71. It enters the photosensitive surface of the photodetector 60 at the same incident angle.
  • the symmetry axis of the parabolic mirror 71 coincides with the first rotation axis Z
  • the photosensitive surface of the photodetector 60 is located at the focal point of the parabolic mirror 71
  • the photosensitive surface of the photodetector 60 is perpendicular to the symmetry axis of the parabolic mirror 71.
  • the photosensitive surface of the photodetector 60 is located at the focal point of the parabolic mirror 71, and the photosensitive surface of the photodetector 60 and the parabolic surface
  • the symmetry axis of the mirror 71 is vertical, which removes the systematic error and reduces the error, thereby improving the inspection quality.
  • FIG. 11 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • the surface detection device further includes a second reflection module 72 and a photodetector 60.
  • the second reflection module 72 And the photodetector 60 are fixedly arranged in the rotating mechanism 10; the first reflection module 20, the light receiving module 40, the second reflection module 72 and the photodetector 60 are arranged in sequence along the light propagation path; the second reflection module 72 is used to The parallel light beam d is reflected to the photodetector 60.
  • the embodiment of the present invention provides that even if the position of the scanning arc is different, the scattered light beam c formed after scanning is converted into a parallel beam d by the light receiving module 40 through the second reflection module 72, and then passes through the second reflection module 72.
  • the incident angle enters the photosensitive surface of the photodetector 60, thereby improving the detection quality.
  • the surface detection device further includes: a transmitting module 80; the transmitting module 80 is located along the light propagation path, and the transmitting module 80 is used to emit the detection beam a.
  • the second reflection module in the present invention may be a reflection mirror.
  • the transmitting module 80 may include, for example, any one of a semiconductor laser, a fiber laser, a solid laser, or a gas laser.
  • the transmitting module 80 may emit a laser beam or a continuous-wavelength beam, which is not specifically limited in this embodiment. As long as the defects on the surface of the measured object 50 can be detected.
  • the surface detection device further includes a third reflection module 90, which is located along the light propagation path, and is used to reflect the detection beam a emitted by the transmission module 80 to the first reflection module 20 through the vertical portion 111 .
  • a third reflection module 90 is located along the light propagation path, and is used to reflect the detection beam a emitted by the transmission module 80 to the first reflection module 20 through the vertical portion 111 .
  • it further includes: a worktable 100; the measured object 50 is placed on the worktable 100, and the workpiece table 100 moves along the first direction X; wherein, the first reflected light beam b is reflected on the surface of the object 50 to complete scanning in the second direction Y, and the first direction X and the second direction Y cross.
  • the incident detection beam a is reflected by the rotating first reflection module 20 and the reflected beam b forms a scanning arc on the surface of the object 50 to be measured.
  • the scanning arc is in the second direction Y, and at the same time, it is placed in
  • the measured object 50 on the worktable 100 moves along the first direction X, and the scanning and detection of the entire area of the measured object 50 can be completed by repeating this.
  • the worktable 100 steps to the first direction X In the next column of scanning positions, repeating in this way can also complete the scanning detection of the entire area of the object 50 to be measured.
  • the worktable is controlled to move a preset distance in the first direction to complete the scanning of the entire area of the measured object. Detection.
  • FIG. 11 is a flowchart of a surface detection method provided by an embodiment of the present invention, as shown in FIG. 11 As shown, the surface detection method includes:
  • the scattered light beam formed after the reflected light beam is scattered by the surface of the object to be measured is converted into a parallel light beam and emitted by the light receiving module.
  • the first reflective module and the light receiving module are fixed on a rotating mechanism that rotates around the first rotation axis, because during scanning, the first reflective module and the light receiving module surround the first rotating mechanism together.
  • the rotation axis rotates, so that the incident light spot reflected by the first reflection module forms a scanning arc on the surface of the measured object, and further cooperates with the high-speed rotation of the rotating mechanism to achieve high-frequency scanning of the surface of the measured object, thereby achieving improvement The effect of detection efficiency.
  • the reflected light beam reflected on the surface of the object to be measured completes scanning in a second direction, and the first direction crosses the second direction.
  • the worktable is controlled to move a preset distance in the first direction to complete the scanning and detection of the entire area of the object to be measured.
  • FIG. 13 is a schematic structural diagram of another first reflection module provided by an embodiment of the present invention
  • FIG. 14 is a schematic bottom view structure of another surface detection device provided by an embodiment of the present invention, as shown in FIGS. 6, 13 and 14
  • the surface detection device includes: a rotating mechanism 10, a first reflecting module 20, a light collecting module 30, and a light receiving module 40 arranged in sequence along the light propagation path; a first reflecting module 20, a light collecting module 30, and a light receiving module 40 is fixed in the rotation mechanism 10; the rotation mechanism 10 is provided with a through hole 11, the through hole 11 includes a vertical portion 111 and a plurality of inclined portions 112; the first reflection module 20 includes a plurality of mirrors 21 arranged adjacently in turn
  • the light collecting module 30 includes a plurality of light collecting units 31; the light receiving module 40 includes a plurality of light receiving units 41; the number of the reflecting mirror 21, the inclined portion 112, the light collecting unit 31 and the light receiving unit 41 are equal, and mutually One-to-one correspondence arrangement; the
  • the focal point of the light unit 41 coincides with the focal point of the corresponding condensing unit 31; the rotating mechanism 10 rotates around a first rotation axis Z, the first rotation axis Z is parallel to the central symmetry axis of the vertical portion 111, and the first rotation axis Z is perpendicular to The plane where the surface of the measured object 50 is located overlaps with the projection of the first reflection module 20 on the plane where the surface of the measured object 50 is located.
  • the first reflection module 20 reflects the detection light beam a incident along the vertical portion 111 into a reflected light beam b through one of the mirrors 21, and the reflected light beam b passes through the condensing unit 31 in the inclined portion 112 corresponding to the mirror 21 After the light is collected, it is incident on the surface of the object 50 to be measured, and the scattered light beam c formed after being scattered by the surface of the object 50 is converted into a parallel light beam d by the corresponding light receiving unit 41 and then emitted.
  • the shape of the first reflection module 20 includes any one of a pyramid or a prism, and its cross section (a direction parallel to the plane where the measured object 50 is located) is polygonal, for example, it may be a quadrilateral, correspondingly the first reflection module 20 There are four reflecting mirrors 21 arranged adjacently one after another (see FIG. 13).
  • the light condensing unit 31 of the light concentrating module 30 may include a lens, for example, but the embodiment is not limited thereto.
  • the light receiving unit 41 of the light receiving module 40 may include, for example, at least one of a lens or a spherical mirror.
  • the shape of the light receiving unit 41 may include, for example, a circle or a square.
  • the scattered light beam c formed after being scattered by the surface of the object 50 to be measured is converted into a parallel light beam d and then emitted.
  • the first reflection module 20 is a quadrangular prism pedestal, as shown in FIG. 13, correspondingly, the first reflection module 20 has four reflection mirrors 21 arranged adjacently in sequence.
  • the central axis of the quadrangular pyramid coincides with the first rotation axis Z.
  • the rotating mechanism 10 rapidly rotates around the first rotation axis Z, thereby driving the first reflection module 20, the light concentrating module 30 and the light collection module 40 to rotate around the first rotation axis Z, that is, the quadrangular prism table rapidly rotates around its central axis.
  • the detection beam a When the detection beam a is incident on a mirror 21 of the first reflection module 20 along the vertical portion 111 of the through hole 11, after being reflected by the mirror 21, the formed reflected beam b is focused by the corresponding condensing unit 31
  • the scanning point on the surface of the measured object 50 is located at the focal position of the condensing unit 31, that is, at the focal point of the concentrating unit 41 corresponding to the concentrating unit 31, thereby ensuring that the detection beam a passes through each mirror 21 and its corresponding condensing unit 31, the relative position of the scanning point incident on the surface of the measured object 50 and the light receiving unit 41 corresponding to the above-mentioned reflector 21 and concentrating unit 31 is fixed, which is conducive to the formation of the scanning point
  • the scattered light beam c is converted into parallel light d for detection, which improves the detection accuracy.
  • a scanning arc is formed on the surface of the object 50 to be measured.
  • four arcs can be scanned to form a scanning unit AA (see FIG. 4), which can realize high-frequency scanning of the surface of the object 50 to be measured and improve the scanning efficiency.
  • FIG. 15 is a schematic diagram of the position where the reflected light beam is reflected to the surface of the object under test when the angle between the reflector of the first reflector module and the plane of the object under test is different according to an embodiment of the present invention.
  • Figure 4 Figure 13 and Figure 15, because the angle between each mirror 21 and the plane of the measured object 50 is different, that is, the mirror 211/21, the mirror 211/21, the mirror 213/21, and the mirror 214
  • the angles between /21 and the plane where the measured object 50 is located are respectively ⁇ 1 , ⁇ 2 , ⁇ 3 and ⁇ 4.
  • the detection beam a is reflected by each mirror 21 and is then focused by the corresponding condensing unit 31 to the measured object.
  • the positions of the scanning points on the surface of the object 50 are different, that is, the different scanning points formed on the surface of the measured object 50 are Q 1 , Q 2 , Q 3 and Q 4 , so that when the rotating mechanism 10 rotates one circle, the measured object Under the premise of 50 not moving, the scanning of four scanning arcs is realized, which avoids the limitation of the moving speed of the object 50 or the difference between the actual moving speed and the expected speed, which affects the scanning speed or accuracy, and further improves the scanning. Effect and precision.
  • the shape of the first reflection module 20 is not limited to the above examples, and the cross section of the first reflection module 20 includes but is not limited to a quadrangular shape. Those skilled in the art can choose the shape of the first reflection module 20 according to the product requirements. , And setting the number of sides of the cross section are not specifically limited in the present invention. Figures 3 and 4 only take the shape of the first reflection module 20 as a pyramid and the cross section of the first reflection module 20 as a quadrilateral for example. Sexual description.
  • the present invention fixes the first reflection module and the light-receiving module on a rotating mechanism that rotates around the first rotation axis, because the first reflection module includes a plurality of mirrors with different angles from the plane of the object to be measured. , Which makes the detection beam incident on the surface of the object under test have different scanning points, so that when the rotating mechanism rotates one circle, the scanning of multiple scanning arcs is realized under the premise that the object under test does not move, avoiding the scanning of the object under test.
  • the limitation of the movement speed or the difference between the actual movement speed and the expected speed which affects the scanning speed or accuracy, further improves the scanning efficiency and accuracy.
  • the condensing module in the inclined portion and making the focal points of the concentrating module and the receiving module coincide, it can be ensured that the detection beam deviated from the first rotation axis is focused on the object being measured by the reflected beam reflected by the first reflection module.
  • the relative position of the scanning point on the surface and the light receiving module remains unchanged, that is, the scanning point is located at the overlapping focal point, which facilitates the formation of a parallel beam through the light receiving module to be detected, thereby improving the accuracy of the detection result.
  • the first reflection module 20 includes a first reflection mirror 211/21 and a second reflection mirror 211/21
  • a light receiving module 40 includes a first light-receiving unit 411/41 and a second light-receiving unit 412/41; the first reflector 211/21 and the first light-receiving unit 411/41 are arranged correspondingly, and the first light-receiving unit 411/41 is used to The first scattered light beam c 1 is converted into a parallel light beam d and then emitted.
  • the first scattered light beam c 1 is formed by the reflection light beam b of the first reflector 211/21 after being condensed by the condenser module 30 and scattered by the surface of the measured object 50 Scattered light beam; the second reflector 212/21 and the second light receiving unit 412/41 are arranged correspondingly, and the second light receiving unit 412/41 is used to convert the second scattered light beam c 2 into a parallel light beam and then exit, the second scattered light beam c 2 is the reflected light beam b of the second reflector 212/21 which is condensed by the condenser module 30 and then scattered by the surface of the measured object 50; the first reflector 211/21 and the plane of the measured object 50 are scattered.
  • the included angle ⁇ 1 is smaller than the included angle ⁇ 2 between the second reflector 212/21 and the plane of the measured object 50, and the distance from the center point of the first light receiving unit 411/41 to the first rotation axis Z is greater than that of the second light receiving unit The distance from the center point of 412/41 to the first rotation axis Z.
  • the scanning spot incident on the surface of the object 50 to be measured has a different position on the surface of the object 50 to determine the position of the light-receiving unit 41. That is, the larger the angle between the reflecting mirror 21 and the plane where the object 50 is measured, the smaller the distance from the center point of the light receiving unit 41 corresponding to the first rotation axis Z.
  • the first reflecting module 20 includes a first reflecting mirror 211/21 and a second reflecting mirror 212/21
  • the light receiving module 40 includes a first light receiving unit 411/41 and a second light receiving unit 412/ 41, and the greater the angle between the mirror 21 and the plane where the object 50 is measured, the smaller the distance from the center point of the corresponding light receiving unit 41 to the first rotation axis Z, so that the detection beam a is incident on the object 50
  • the positions of the scanning points on the surface are different.
  • the rotating mechanism 10 rotates one circle, the scanning of multiple scanning arcs is realized on the premise that the measured object 50 does not move, which avoids the limitation or movement of the moving speed of the measured object 50
  • the actual speed is different from the expected speed, which affects the scanning speed or accuracy, and improves the scanning efficiency and accuracy.
  • the first reflecting module 20 includes a first reflecting mirror 21 to an nth reflecting mirror 21 arranged adjacently in sequence, and the first reflecting mirror 21 is connected to the first reflecting mirror 21 to the nth reflecting mirror 21.
  • the angle between the plane where the measured object 50 is located and the angle between the nth reflector 21 and the plane where the measured object 50 is located are ⁇ 1 , ⁇ 2 ...
  • the distance from the center point of each light receiving unit 41 to the first rotation axis Z is set according to the change of the angle between the reflector 21 and the plane of the object 50 to be measured.
  • This embodiment does not It is specifically limited, as long as the reflected beam b of the reflecting mirror 21 corresponding to the light receiving unit 41 is incident on the scanning point of the surface of the object 50 to be measured, and is located at the focal point of the corresponding light receiving unit 41.
  • the scattered light beam c at the point is converted into a parallel light beam d and then emitted.
  • the light collecting unit 31 of the light collecting module 30 it is also possible to configure the light collecting unit 31 of the light collecting module 30 to have different focusing parameters, so that the distance from the center point of the light collecting unit 41 corresponding to the light collecting unit 31 to the first rotation axis Z is different. If they are not the same, the present invention does not specifically limit this.
  • each light-receiving unit 41 may be the same or different, or different optical elements (not shown in the figure) can be provided in each light-receiving unit 41 to obtain different light-receiving characteristics. characteristic.
  • at least two light-receiving units in the light-receiving unit 41 may adopt different optical designs, such as setting lenses with different apertures and cooperating with different apertures to achieve different light-receiving angles, and/or use different polarization detection plates. Realize different polarization characteristic choices, and/or adopt different wavelength filters to realize different wavelength choices.
  • the light receiving units of different optical designs can collect scattered light signals of different angles, different polarization characteristics or different wavelengths, and then can detect different defects, improve the detection efficiency and improve the detection at the same time. quality.
  • the distance from the center point of the two adjacent light receiving units 41 to the first rotation axis Z increases or decreases sequentially, so that the scanning arc incident on the surface of the measured object 50 is at the position of the surface of the measured object 50
  • the distance between them is equal, that is, referring to Fig. 7, the distance between any two scanning arcs is ⁇ .
  • Fig. 7 the distance between any two scanning arcs is ⁇ .
  • L 4 -L 3 K
  • L 3 -L 2 K
  • L 2 -L 1 K
  • L 1 is the center point to the first light receiving unit 411/41
  • the distance of a rotation axis Z L 2 is the distance from the center point of the second light receiving unit 412/41 to the first rotation axis Z
  • L 3 is the distance from the center point of the third light receiving unit 413/41 to the first rotation axis Z
  • L 4 is the distance from the center point of the fourth light receiving unit 414/41 to the first rotation axis Z.
  • FIG. 16 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • the surface detection device further includes: a parabolic mirror 71 and a photodetector 60; a first reflection module 20, a light collecting module 30, a light receiving module 40, and a parabolic mirror 71
  • the photodetector 60 and the photodetector 60 are arranged in sequence along the light propagation path; the symmetry axis of the parabolic mirror 71 is parallel to the first rotation axis Z, and the photosensitive surface of the photodetector 60 is set on the focal point of the parabolic mirror 71. Therefore, the parallel light beams d at different positions can be focused on the photodetector 60 after passing through the parabolic mirror 71, so that efficient and comprehensive detection of the scattered light beam c is realized.
  • the symmetry axis of the parabolic mirror 71 coincides with the first rotation axis Z
  • the photosensitive surface of the photodetector 60 is located at the focal point of the parabolic mirror 71, and the photodetector 60
  • the photosensitive surface of is perpendicular to the axis of symmetry of the parabolic mirror 71.
  • the reflected beam b can scan multiple arcs on the surface of the object 50 to be measured.
  • the scanning arc position of the reflected beam b on the surface of the measured object 50 is different, so that the scattered beam c formed after the scanning is converted into a parallel beam d by the light receiving module 40 and then focused by the parabolic mirror 71 and incident at a different angle
  • the photosensitive characteristic of the photodetector 60 is generally affected by the incident angle of the light, which causes systematic errors.
  • the embodiment of the present invention adjusts the parabolic mirror 71 so that even if the position of the scanning arc is different, the scattered light beam c formed after scanning is converted into a parallel beam d by the light receiving module 40 and then passed through the parabolic mirror 71. It enters the photosensitive surface of the photodetector 60 at the same incident angle.
  • the symmetry axis of the parabolic mirror 71 coincides with the first rotation axis Z
  • the photosensitive surface of the photodetector 60 is located at the focal point of the parabolic mirror 71
  • the photosensitive surface of the photodetector 60 is perpendicular to the symmetry axis of the parabolic mirror 71.
  • the photosensitive surface of the photodetector 60 is located at the focal point of the parabolic mirror 71, and the photosensitive surface of the photodetector 60 and the parabolic surface
  • the symmetry axis of the mirror 71 is vertical, which removes the systematic error and reduces the error, thereby improving the inspection quality.
  • FIG. 17 is a schematic structural diagram of another surface detection device provided by an embodiment of the present invention.
  • the surface detection device further includes: a second reflection module 72 and a photodetector 60; the second reflection module 72 and the photodetector 60 are fixed in the rotating mechanism 10; A reflection module 20, a condensing module 30, a light receiving module 40, a second reflection module 72, and a photodetector 60 are arranged in sequence along the light propagation path; the second reflection module 72 is used to reflect the parallel light beam d to the photodetector 60.
  • the second reflection module 72 and the photodetector 60 each include a plurality of second reflection units and a plurality of photoelectron detectors, and the number of the second reflection units and the photoelectron detectors and the inclined portion, the mirror, the light collecting unit, and the light receiving unit The number of is equal, and set in one-to-one correspondence with each other.
  • the embodiment of the present invention provides that even if the position of the scanning arc is different, the scattered light beam c formed after scanning is converted into a parallel light beam d by the corresponding light receiving module 40 through the second reflection module 72, and then passes through the corresponding second reflection module. After 72, they all enter the photosensitive surface of the photodetector 60 at the same incident angle, thereby improving the detection quality.
  • the surface detection device further includes: a worktable 100; the measured object 50 is placed on the worktable 100, and the worktable 100 moves along the first direction X; The beam b is incident on the surface of the object 50 to complete scanning in the second direction Y, and the first direction X and the second direction Y cross.
  • the generated reflection light beam b is focused by the focusing module 30 to the surface of the object 50 to form a plurality of scanning arcs, and these scanning circles
  • the direction of the arc is the second direction Y.
  • the first reflection module 20 rotates one circle to realize the scanning of multiple arcs
  • the measured object 50 placed on the worktable 100 moves along the first direction X, and the alignment can be completed by repeating this procedure. Scanning detection of the entire area of the object 50 to be measured. In this solution, when the rotating mechanism 10 rotates one circle, the measured object 50 does not move.
  • the measured object 50 steps into the preset position, that is, the measured object 50 does not move to achieve multiple
  • the scanning of the scanning arc avoids the phenomenon that the moving speed of the object 50 is limited or the actual moving speed is different from the expected speed, which affects the scanning speed or accuracy, and further improves the scanning effect and accuracy.
  • FIG. 18 is a flowchart of another surface detection method provided by an embodiment of the present invention. As shown in FIG. 18, the surface detection method includes:
  • S21 Control the first reflection module to reflect the detection light beam incident along the vertical portion into a reflection light beam, and then pass through the condensing module of the inclined portion to be incident on the surface of the object to be measured;
  • the present invention fixes the first reflection module, the condensing module and the light collection module on a rotating mechanism that rotates around the first rotation axis. Since the first reflection module includes a plurality of mirrors with different angles to the plane of the object to be measured, Makes the detection beam incident on the surface of the object to be measured at different positions of the scanning point, so when the rotating mechanism rotates one circle, the scanning of multiple scanning arcs is realized on the premise that the object to be measured does not move, avoiding the movement of the object to be measured The speed limit or the actual speed of the movement is different from the expected speed, which affects the scanning speed or accuracy, and improves the scanning efficiency and accuracy.
  • the condensing module in the inclined portion and making the focal points of the concentrating module and the receiving module coincide, it can be ensured that the detection beam deviated from the first rotation axis is focused on the object being measured by the reflected beam reflected by the first reflection module.
  • the relative position of the scanning point on the surface and the light receiving module remains unchanged, that is, the scanning point is located at the overlapping focal point, which facilitates the formation of a parallel beam through the light receiving module to be detected, thereby improving the accuracy of the detection result.
  • FIG. 19 is a flowchart of another surface detection method provided by an embodiment of the present invention.
  • the first reflecting module includes a first reflecting mirror and a second reflecting mirror
  • the light receiving module includes a first light receiving unit and a second light receiving unit; the first reflecting mirror and the first light receiving unit are arranged correspondingly, and the second light receiving unit The reflecting mirror and the second light receiving unit are arranged correspondingly; the angle between the first reflecting mirror and the plane where the measured object is located is smaller than the angle between the second reflecting mirror and the plane where the measured object is located, and the center point of the first light receiving unit reaches the first The distance of the rotation axis is greater than the distance from the center point of the second light receiving unit to the first rotation axis;
  • the surface inspection methods include:
  • the first scattered light beam is converted into a parallel light beam by the first light receiving unit and then emitted;
  • the reflected light beam is reflected to the surface of the measured object to complete the scanning in the second direction, and the first direction crosses the second direction.

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

La présente invention concerne un appareil et un procédé de détection de surface. L'appareil de détection de surface comprend : un mécanisme de rotation (10), et un premier module de réflexion (20) et un module de réception de lumière (40) qui sont agencés en séquence le long d'un trajet de propagation de lumière. Le premier module de réflexion (20) et le module de réception de lumière (40) sont fixés sur le mécanisme de rotation (10). Un trou débouchant (11) est disposé à l'intérieur du mécanisme de rotation (10), et le trou débouchant (11) comprend une partie verticale (111) et une partie inclinée (112). Le premier module de réflexion (20) est disposé à l'intérieur de la partie verticale (111). Le mécanisme de rotation (10) tourne autour d'un premier axe de rotation, le premier axe de rotation est parallèle à l'axe de symétrie central de la partie verticale (111), et le premier axe de rotation est perpendiculaire au plan recevant une surface d'un objet testé (50) et chevauche la partie saillante du premier module de réflexion (20) sur le plan recevant la surface de l'objet testé (50). Le premier module de réflexion (20) est utilisé pour réfléchir un faisceau de détection incident le long de la partie verticale (111) en un faisceau réfléchi, qui est ensuite incident sur la surface de l'objet testé (50). Le module de réception de lumière (40) est utilisé pour convertir les faisceaux diffusés, qui sont formés par la diffusion du faisceau réfléchi à travers la surface de l'objet testé (50), en faisceaux parallèles, puis les émettre. L'appareil de détection de surface améliore l'efficacité de détection.
PCT/CN2020/084704 2019-11-14 2020-04-14 Appareil et procédé de détection de surface WO2021093264A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020217036540A KR20210151160A (ko) 2019-11-14 2020-04-14 표면 검출 장치 및 방법
JP2021568020A JP7304970B2 (ja) 2019-11-14 2020-04-14 表面検出装置及び方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CN201911112590.6A CN110763689B (zh) 2019-11-14 2019-11-14 一种表面检测装置及方法
CN201911112606.3A CN110763690B (zh) 2019-11-14 2019-11-14 一种表面检测装置及方法
CN201911112606.3 2019-11-14
CN201911112590.6 2019-11-14

Publications (1)

Publication Number Publication Date
WO2021093264A1 true WO2021093264A1 (fr) 2021-05-20

Family

ID=75911849

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/084704 WO2021093264A1 (fr) 2019-11-14 2020-04-14 Appareil et procédé de détection de surface

Country Status (3)

Country Link
JP (1) JP7304970B2 (fr)
KR (1) KR20210151160A (fr)
WO (1) WO2021093264A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115219512A (zh) * 2022-09-20 2022-10-21 常州树杰塑业有限公司 一种pe膜表面晶点检测设备

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1497696A (zh) * 2002-10-09 2004-05-19 ���տ���ʽ���� 表面检查的方法和设备
CN1696672A (zh) * 2004-05-10 2005-11-16 富士通株式会社 表面检测装置和表面检测方法
JP2012052998A (ja) * 2010-09-03 2012-03-15 Sigma Koki Kk 粗面を有する固体の屈折率を測定する光学測定方法及び光学測定装置
CN107449370A (zh) * 2016-05-27 2017-12-08 艾可有限公司 用于检测作为样品的平面物的表面的检测装置和检测方法
CN109724995A (zh) * 2019-01-21 2019-05-07 上海精测半导体技术有限公司 量测设备及其表面检测模块和检测方法
CN109935531A (zh) * 2019-04-16 2019-06-25 上海精测半导体技术有限公司 一种表面检测装置、系统及方法
CN110763689A (zh) * 2019-11-14 2020-02-07 上海精测半导体技术有限公司 一种表面检测装置及方法
CN110763690A (zh) * 2019-11-14 2020-02-07 上海精测半导体技术有限公司 一种表面检测装置及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4718713Y1 (fr) * 1971-06-07 1972-06-27
JPS57204509A (en) * 1981-06-11 1982-12-15 Bekutoronikusu Inc Scanning method and apparatus
JPS58147119A (ja) * 1982-02-26 1983-09-01 Toshiba Corp 規則パタ−ンの欠陥検出方式
JPH08178857A (ja) * 1994-12-21 1996-07-12 Nikon Corp 大型基板用異物検査装置
JPH09273068A (ja) * 1996-04-05 1997-10-21 Toyota Autom Loom Works Ltd 織布検反方法及び装置
JP2007263787A (ja) 2006-03-29 2007-10-11 Nix Inc リング状集中照射器具、および照射角度の調節装置
JP5120625B2 (ja) 2008-03-07 2013-01-16 アイシン精機株式会社 内面測定装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1497696A (zh) * 2002-10-09 2004-05-19 ���տ���ʽ���� 表面检查的方法和设备
CN1696672A (zh) * 2004-05-10 2005-11-16 富士通株式会社 表面检测装置和表面检测方法
JP2012052998A (ja) * 2010-09-03 2012-03-15 Sigma Koki Kk 粗面を有する固体の屈折率を測定する光学測定方法及び光学測定装置
CN107449370A (zh) * 2016-05-27 2017-12-08 艾可有限公司 用于检测作为样品的平面物的表面的检测装置和检测方法
CN109724995A (zh) * 2019-01-21 2019-05-07 上海精测半导体技术有限公司 量测设备及其表面检测模块和检测方法
CN109935531A (zh) * 2019-04-16 2019-06-25 上海精测半导体技术有限公司 一种表面检测装置、系统及方法
CN110763689A (zh) * 2019-11-14 2020-02-07 上海精测半导体技术有限公司 一种表面检测装置及方法
CN110763690A (zh) * 2019-11-14 2020-02-07 上海精测半导体技术有限公司 一种表面检测装置及方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115219512A (zh) * 2022-09-20 2022-10-21 常州树杰塑业有限公司 一种pe膜表面晶点检测设备

Also Published As

Publication number Publication date
JP2022532218A (ja) 2022-07-13
KR20210151160A (ko) 2021-12-13
JP7304970B2 (ja) 2023-07-07

Similar Documents

Publication Publication Date Title
TW571090B (en) Surface inspection system
EP0627643B1 (fr) Système optique de balayage à laser utilisant un axicon
US8160352B2 (en) Surface inspection method and surface inspection apparatus
US5929983A (en) Optical apparatus for determining the height and tilt of a sample surface
JP2018163175A (ja) 検出感度改善のための検査ビームの成形
KR20050056924A (ko) 스폿 그리드 어레이 이미징 시스템
JP5268061B2 (ja) 基板検査装置
JPH0815156A (ja) レーザスキャン光学系及びレーザスキャン光学装置
CN107580677A (zh) 用于二维点阵列倾斜入射扫描的系统和方法
CN110763690B (zh) 一种表面检测装置及方法
WO2021093264A1 (fr) Appareil et procédé de détection de surface
CN114778563A (zh) 高速线扫描激光暗场散射晶圆表面缺陷检测装置及其方法
CN1262885C (zh) 并行处理式光学测距仪
CN110763689B (zh) 一种表面检测装置及方法
JPH10318718A (ja) 光学式高さ検出装置
JP3783848B2 (ja) 表面検査装置
JP3360321B2 (ja) 面位置検出装置及び方法並びに露光装置及び方法
JPH1054805A (ja) 球体表面検査装置
JP7162954B2 (ja) レーザと同軸のイオン励起装置
KR100900684B1 (ko) 라인 빔 레이저 장치 및 이를 이용한 표면 측정 장치
JP2013205367A (ja) 検査装置、検査方法、およびデバイス製造方法
WO2021205650A1 (fr) Système optique d'éclairage et dispositif d'inspection de substrat
JP2000074648A (ja) 基板の表面評価装置
JP3507262B2 (ja) 表面検査装置
EP0631663A1 (fr) Procede et dispositif de mesure de rayonnements optiques

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20887628

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20217036540

Country of ref document: KR

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2021568020

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20887628

Country of ref document: EP

Kind code of ref document: A1