WO2021075308A1 - 圧電フィルムおよび圧電フィルムの製造方法 - Google Patents

圧電フィルムおよび圧電フィルムの製造方法 Download PDF

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Publication number
WO2021075308A1
WO2021075308A1 PCT/JP2020/037813 JP2020037813W WO2021075308A1 WO 2021075308 A1 WO2021075308 A1 WO 2021075308A1 JP 2020037813 W JP2020037813 W JP 2020037813W WO 2021075308 A1 WO2021075308 A1 WO 2021075308A1
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Prior art keywords
piezoelectric
layer
electrode
film
electrode layer
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PCT/JP2020/037813
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English (en)
French (fr)
Japanese (ja)
Inventor
裕介 香川
平口　和男
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Fujifilm Corp
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Fujifilm Corp
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Priority to CN202080070616.XA priority Critical patent/CN114521297A/zh
Priority to JP2021552334A priority patent/JP7390390B2/ja
Priority to EP20877551.0A priority patent/EP4047671A4/en
Priority to KR1020227011197A priority patent/KR20220056865A/ko
Publication of WO2021075308A1 publication Critical patent/WO2021075308A1/ja
Priority to US17/717,226 priority patent/US12575327B2/en
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/005—Piezoelectric transducers; Electrostrictive transducers using a piezoelectric polymer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Definitions

  • the present invention relates to a piezoelectric film used for an electroacoustic conversion film or the like, and a method for producing the piezoelectric film.
  • the speakers used in these thin displays are also required to be thinner and lighter. Further, in response to the development of a flexible display using a flexible substrate such as plastic, the speaker used for the flexible display is also required to be flexible.
  • the shape of the conventional speaker is generally a funnel-shaped so-called cone shape, a spherical dome shape, or the like.
  • a speaker if such a speaker is to be incorporated in the above-mentioned thin display, it cannot be sufficiently thinned, and there is a risk that the lightness and flexibility may be impaired.
  • the speaker when the speaker is attached externally, it is troublesome to carry it.
  • the Applicant has disclosed a piezoelectric film (electroacoustic conversion) as a piezoelectric film that is sheet-like, has flexibility, and can stably reproduce high-quality sound. Film) was proposed.
  • the piezoelectric film disclosed in Patent Document 1 is a polymer composite piezoelectric body (piezoelectric layer) in which piezoelectric particles are dispersed in a viscoelastic matrix made of a polymer material having viscoelasticity at room temperature, and a polymer composite. It has an electrode layer formed on both sides of the piezoelectric body and a protective layer formed on the surface of the electrode layer.
  • the piezoelectric film disclosed in Patent Document 1 has a (002) plane peak intensity and a (200) plane peak intensity derived from the piezoelectric particles when the polymer composite piezoelectric body is evaluated by an X-ray diffraction method.
  • the intensity ratio ⁇ 1 (002) surface peak intensity / ((002) surface peak intensity + (200) surface peak intensity) is 0.6 or more and less than 1.
  • Such a piezoelectric film functions as a piezoelectric speaker by, for example, maintaining it in a bent state. That is, by maintaining the piezoelectric film in a bent state and applying a driving voltage to the electrode layer, the polymer composite piezoelectric body expands and contracts due to the expansion and contraction of the piezoelectric particles, and vibrates to absorb the expansion and contraction. The piezoelectric film vibrates the air by this vibration and converts an electric signal into sound.
  • This piezoelectric film has a structure in which electrode layers are provided on both sides of the piezoelectric layer, and protective layers are provided on both sides thereof.
  • the piezoelectric layer is preferably, for example, 300 ⁇ m or less, and is very thin. Therefore, if the electrode layers formed on both sides of the piezoelectric layer protrude from the end of the piezoelectric layer, the electrodes on both sides of the piezoelectric layer will be short-circuited, and the piezoelectric film will not operate properly. ..
  • An object of the present invention is to solve such a problem of the prior art, and to prevent a short circuit caused by an electrode protruding from the piezoelectric layer in a piezoelectric film having an electrode layer and a protective layer on both sides of the piezoelectric layer. It is an object of the present invention to provide a piezoelectric film capable of being formed and a method for producing the piezoelectric film.
  • the present invention has the following configuration.
  • a laminated film having a piezoelectric layer, electrode layers provided on both sides of the piezoelectric layer, and a protective layer covering the electrode layers.
  • a piezoelectric film having an insulating end face coating layer that covers at least a part of the end face of the laminated film.
  • a conductive connecting member that penetrates the protective layer and connects to the electrode layer,
  • the piezoelectric film according to [1] or [2] which has an extraction electrode that is directly or indirectly electrically connected to a connecting member and extends to the outside in the plane direction of the laminated film.
  • the film manufacturing step includes a piezoelectric layer forming step of forming a piezoelectric layer on the surface of the electrode layer of the second laminated body having the protective layer and the electrode layer, and a piezoelectric layer forming step.
  • the present invention in a piezoelectric film having an electrode layer and a protective layer on both sides of the piezoelectric layer, it is possible to prevent a short circuit caused by an electrode protruding from the piezoelectric layer.
  • FIG. 1 is a cross-sectional view conceptually showing an example of the piezoelectric film of the present invention.
  • FIG. 2 is a diagram conceptually showing an example of a piezoelectric layer used in the piezoelectric film of the present invention.
  • FIG. 3 is a conceptual diagram for explaining a method for manufacturing the piezoelectric film shown in FIG.
  • FIG. 4 is a conceptual diagram for explaining a method for manufacturing the piezoelectric film shown in FIG.
  • FIG. 5 is a conceptual diagram for explaining a method for manufacturing the piezoelectric film shown in FIG.
  • FIG. 6 is a conceptual diagram for explaining a method for manufacturing the piezoelectric film shown in FIG.
  • FIG. 7 is a conceptual diagram for explaining a method for manufacturing the piezoelectric film shown in FIG. FIG.
  • FIG. 8 is a conceptual diagram for explaining a method for manufacturing the piezoelectric film shown in FIG.
  • FIG. 9 is a conceptual diagram for explaining a method for manufacturing the piezoelectric film shown in FIG.
  • FIG. 10 is a diagram conceptually showing another example of the piezoelectric film of the present invention.
  • FIG. 11 is a diagram conceptually showing another example of the piezoelectric film of the present invention.
  • FIG. 12 is a diagram conceptually showing another example of the piezoelectric film of the present invention.
  • FIG. 13 is a diagram conceptually showing another example of the piezoelectric film.
  • FIG. 14 is a diagram conceptually showing another example of the piezoelectric film.
  • FIG. 15 is a diagram conceptually showing another example of the piezoelectric film.
  • FIG. 16 is a diagram conceptually showing an example of a piezoelectric speaker using the piezoelectric film of the present invention.
  • the piezoelectric film of the present invention and the method for producing the piezoelectric film will be described in detail based on the preferred embodiments shown in the accompanying drawings.
  • the description of the constituent elements described below may be based on typical embodiments of the present invention, but the present invention is not limited to such embodiments.
  • the figures shown below are conceptual diagrams for explaining the present invention, and the thickness of each layer, the size of the constituent members, the positional relationship of the constituent members, and the like are actual objects. Is different.
  • the numerical range represented by using "-" means a range including the numerical values before and after "-" as the lower limit value and the upper limit value.
  • the piezoelectric film of the present invention has a structure in which electrode layers are provided on both sides of the piezoelectric layer, and the end faces of a laminated film in which both electrode layers are covered and protective layers are provided are covered with an end face coating layer.
  • a laminated film is also referred to as "a laminated film in which an electrode layer and a protective layer are laminated on both sides of a piezoelectric layer”.
  • Such a piezoelectric film of the present invention is used as an electroacoustic conversion film as an example.
  • the piezoelectric film of the present invention is used as a diaphragm of an electroacoustic converter such as a piezoelectric speaker, a microphone and a voice sensor.
  • an electroacoustic converter such as a piezoelectric speaker, a microphone and a voice sensor.
  • the piezoelectric film moves upward (sound radiation direction) in order to absorb the stretched portion.
  • the piezoelectric film shrinks in the plane direction due to the application of a voltage to the piezoelectric film, the piezoelectric film moves downward in order to absorb the shrinkage.
  • the electroacoustic converter converts vibration (sound) and an electric signal by vibration caused by repeated expansion and contraction of the piezoelectric film.
  • Such an electroacoustic converter for example, inputs an electric signal to a piezoelectric film, reproduces sound by vibration according to the electric signal, converts vibration of the piezoelectric film by receiving sound waves into an electric signal, and vibrates. It is used for giving a tactile sensation and transporting objects.
  • the electroacoustic converter using the piezoelectric film of the present invention is used for full-range speakers, tweeters, speakers such as squawkers and woofers, speakers for headphones, noise cancellers, microphones, and musical instruments such as guitars.
  • Examples include various acoustic devices such as pickups (sensors for musical instruments) used.
  • the piezoelectric film of the present invention is a non-magnetic material, it can be suitably used as a noise canceller for MRI among noise cancellers.
  • the electro-acoustic converter using the piezoelectric film of the present invention is thin, light and bendable, it has functions as wearable products such as hats, mufflers and clothes, thin displays such as televisions and digital signage, and audio equipment. It is suitably used for buildings, automobile ceilings, curtains, umbrellas, wallpapers, windows and beds.
  • FIG. 1 conceptually shows an example of the piezoelectric film of the present invention in a cross-sectional view.
  • hatching is omitted in order to simplify the drawing and clearly show the configuration.
  • the “cross section” refers to a cross section in the thickness direction of the piezoelectric film.
  • the thickness direction of the piezoelectric film is the stacking direction of each layer.
  • the piezoelectric film of the present invention has a configuration in which the end face of a laminated film in which an electrode layer and a protective layer are laminated on both sides of a piezoelectric layer is covered with an end face coating layer.
  • the laminated film is the piezoelectric layer 12, the first electrode layer 14 laminated on one surface of the piezoelectric layer 12, and the first protection laminated on the first electrode layer 14. It has a layer 18, a second electrode layer 16 laminated on the other surface of the piezoelectric layer 12, and a second protective layer 20 laminated on the second electrode layer 16.
  • the piezoelectric film 10 has a configuration in which the entire end surface of such a laminated film is covered with an insulating end face coating layer 30.
  • the piezoelectric film 10 has a through hole 18a through which the first protective layer 18 penetrates to the first electrode layer 14.
  • the through hole 18a is provided with a conductive first connecting member 32 connected to the first electrode layer 14.
  • a first extraction electrode 34 for connecting to the first connection member 32 and connecting the piezoelectric film 10 to an external power source is provided.
  • the second protective layer 20 also has a similar through hole 20a, and the through hole 20a is provided with a conductive second connecting member 33.
  • a second extraction electrode 36 for connecting to the second connection member 33 and connecting the piezoelectric film 10 to an external power source is provided.
  • the piezoelectric layer 12 is a polymer composite piezoelectric body containing piezoelectric particles 26 in a polymer matrix 24 containing a polymer material, as conceptually shown in FIG. Is preferable.
  • the polymer composite piezoelectric body (piezoelectric layer 12) preferably has the following requirements.
  • the normal temperature is 0 to 50 ° C.
  • Flexibility For example, when gripping in a state of being loosely bent like a document like a newspaper or a magazine for carrying, it is constantly subjected to a relatively slow and large bending deformation of several Hz or less from the outside. become. At this time, if the polymer composite piezoelectric body is hard, a correspondingly large bending stress is generated, and cracks are generated at the interface between the polymer matrix and the piezoelectric particles, which may eventually lead to fracture. Therefore, the polymer composite piezoelectric body is required to have appropriate softness.
  • the speaker vibrates the piezoelectric particles at a frequency in the audio band of 20 Hz to 20 kHz, and the vibration energy causes the entire diaphragm (polymer composite piezoelectric material) to vibrate as a unit, thereby reproducing the sound. To. Therefore, in order to increase the transmission efficiency of vibration energy, the polymer composite piezoelectric material is required to have an appropriate hardness.
  • the frequency characteristic of the speaker is smooth, the amount of change in sound quality when the minimum resonance frequency f 0 changes with the change in curvature also becomes small. Therefore, the loss tangent of the polymer composite piezoelectric material is required to be moderately large.
  • the minimum resonance frequency f 0 of the speaker diaphragm is given by the following equation.
  • s is the stiffness of the vibration system and m is the mass.
  • m is the mass.
  • the polymer composite piezoelectric material is required to behave hard against vibrations of 20 Hz to 20 kHz and soft against vibrations of several Hz or less. Further, the loss tangent of the polymer composite piezoelectric body is required to be appropriately large for vibrations of all frequencies of 20 kHz or less.
  • polymer solids have a viscoelastic relaxation mechanism, and large-scale molecular motion decreases (Relaxation) or maximizes loss elastic modulus (absorption) as the temperature rises or the frequency decreases.
  • Relaxation large-scale molecular motion decreases
  • absorption loss elastic modulus
  • main dispersion the relaxation caused by the micro-Brownian motion of the molecular chain in the amorphous region is called main dispersion, and a very large relaxation phenomenon is observed.
  • the temperature at which this main dispersion occurs is the glass transition point (Tg), and the viscoelastic relaxation mechanism appears most prominently.
  • the polymer composite piezoelectric body (piezoelectric layer 12), by using a polymer material having a glass transition point at room temperature, in other words, a polymer material having viscoelasticity at room temperature, for vibration of 20 Hz to 20 kHz.
  • a polymer composite piezoelectric material that is hard and behaves softly against slow vibrations of several Hz or less is realized.
  • the polymer material to be the polymer matrix 24 preferably has a maximum value of tangent Tan ⁇ at a frequency of 1 Hz by a dynamic viscoelasticity test of 0.5 or more at room temperature.
  • the polymer material to be the polymer matrix 24 preferably has a storage elastic modulus (E') at a frequency of 1 Hz as measured by dynamic viscoelasticity measurement of 100 MPa or more at 0 ° C. and 10 MPa or less at 50 ° C.
  • E' storage elastic modulus
  • the polymer material to be the polymer matrix 24 is more preferably having a relative permittivity of 10 or more at 25 ° C.
  • a voltage is applied to the polymer composite piezoelectric body, a higher electric field is applied to the piezoelectric particles in the polymer matrix, so that a large amount of deformation can be expected.
  • the polymer material has a relative permittivity of 10 or less at 25 ° C.
  • polymer material satisfying such conditions examples include cyanoethylated polyvinyl alcohol (cyanoethylated PVA), polyvinyl acetate, polyvinylidene chloride core acrylonitrile, polystyrene-vinyl polyisoprene block copolymer, polyvinyl methyl ketone, and polybutyl. Methacrylate and the like are preferably exemplified. Further, as these polymer materials, commercially available products such as Hybler 5127 (manufactured by Kuraray Co., Ltd.) can also be preferably used.
  • Hybler 5127 manufactured by Kuraray Co., Ltd.
  • the polymer material constituting the polymer matrix 24 it is preferable to use a polymer material having a cyanoethyl group, and it is particularly preferable to use cyanoethylated PVA. That is, in the piezoelectric film 10 of the present invention, it is preferable to use a polymer material having a cyanoethyl group as the polymer matrix 24 for the piezoelectric layer 12, and it is particularly preferable to use cyanoethylated PVA.
  • the above-mentioned polymer materials typified by cyanoethylated PVA are also collectively referred to as "polymer materials having viscoelasticity at room temperature".
  • polystyrene resin As these polymer materials having viscoelasticity at room temperature, only one type may be used, or a plurality of types may be used in combination (mixed).
  • a plurality of polymer materials may be used in combination in the polymer matrix 24 of the piezoelectric layer 12, if necessary. That is, in the polymer matrix 24 constituting the polymer composite piezoelectric body, in addition to the above-mentioned polymer material having viscoelasticity at room temperature for the purpose of adjusting dielectric properties and mechanical properties, if necessary, other Dielectric polymer material may be added.
  • dielectric polymer material examples include polyvinylidene fluoride, vinylidene fluoride-tetrafluoroethylene copolymer, vinylidene fluoride-trifluoroethylene copolymer, and polyvinylidene fluoride-trifluoroethylene copolymer.
  • fluoropolymers such as polyvinylidene fluoride-tetrafluoroethylene copolymer, vinylidene cyanide-vinyl acetate copolymer, cyanoethyl cellulose, cyanoethyl hydroxysaccharose, cyanoethyl hydroxycellulose, cyanoethyl hydroxypurrane, cyanoethyl methacrylate, cyanoethyl acrylate, cyanoethyl.
  • Cyano groups such as hydroxyethyl cellulose, cyanoethyl amylose, cyanoethyl hydroxypropyl cellulose, cyanoethyl dihydroxypropyl cellulose, cyanoethyl hydroxypropyl amylose, cyanoethyl polyacrylamide, cyanoethyl polyacrylate, cyanoethyl pullulan, cyanoethyl polyhydroxymethylene, cyanoethyl glycidol pullulan, cyanoethyl saccharose and cyanoethyl sorbitol
  • polymers having a cyanoethyl group synthetic rubbers such as nitrile rubber and chloroprene rubber, and the like are exemplified.
  • a polymer material having a cyanoethyl group is preferably used.
  • these dielectric polymer materials are not limited to one type, and a plurality of types may be added.
  • thermoplastic resins such as vinyl chloride resin, polyethylene, polystyrene, methacrylic resin, polybutene and isobutylene, and phenol resin for the purpose of adjusting the glass transition point Tg of the polymer matrix 24.
  • Urea resin, melamine resin, alkyd resin, thermosetting resin such as mica and the like may be added.
  • a tackifier such as rosin ester, rosin, terpene, terpene phenol, and petroleum resin may be added.
  • the amount of the polymer material other than the polymer material having viscoelasticity at room temperature is not limited, but the ratio to the polymer matrix 24 is 30% by mass. It is preferably as follows. As a result, the characteristics of the polymer material to be added can be exhibited without impairing the viscoelastic relaxation mechanism in the polymer matrix 24, so that the dielectric constant is increased, the heat resistance is improved, and the adhesion to the piezoelectric particles 26 and the electrode layer is increased. Preferred results can be obtained in terms of improvement and the like.
  • the polymer composite piezoelectric body to be the piezoelectric layer 12 contains the piezoelectric particles 26 in such a polymer matrix.
  • the piezoelectric particles 26 are dispersed in a polymer matrix, and are preferably uniformly (substantially uniform) dispersed.
  • the piezoelectric particles 26 are preferably made of ceramic particles having a perovskite-type or wurtzite-type crystal structure. Examples of the ceramic particles constituting the piezoelectric particles 26 include lead zirconate titanate (PZT), lead lanthanate lanthanate titanate (PLZT), barium titanate (BaTIO 3 ), zinc oxide (ZnO), and zinc oxide (ZnO). Examples thereof include a solid solution (BFBT) of barium titanate and bismuth ferrite (BiFe 3).
  • the particle size of the piezoelectric particles 26 may be appropriately selected according to the size and application of the piezoelectric film 10.
  • the particle size of the piezoelectric particles 26 is preferably 1 to 10 ⁇ m.
  • the amount ratio of the polymer matrix 24 and the piezoelectric particles 26 in the piezoelectric layer 12 is required for the size and thickness of the piezoelectric film 10 in the plane direction, the use of the piezoelectric film 10, and the piezoelectric film 10. It may be set as appropriate according to the characteristics and the like.
  • the volume fraction of the piezoelectric particles 26 in the piezoelectric layer 12 is preferably 30 to 80%, more preferably 50 to 80%.
  • the thickness of the piezoelectric layer 12 is not limited, and may be appropriately set according to the size of the piezoelectric film 10, the application of the piezoelectric film 10, the characteristics required for the piezoelectric film 10, and the like. Good.
  • the thickness of the piezoelectric layer 12 is preferably 8 to 300 ⁇ m, more preferably 8 to 200 ⁇ m, further preferably 10 to 150 ⁇ m, and particularly preferably 15 to 100 ⁇ m.
  • the piezoelectric layer 12 is preferably polarized (polled) in the thickness direction.
  • the polarization treatment will be described in detail later.
  • the piezoelectric layer 12 contains the piezoelectric particles 26 in the polymer matrix 24 made of a polymer material having viscoelasticity at room temperature such as cyanoethylated PVA as described above.
  • the polymer composite piezoelectric material is not limited. That is, in the piezoelectric film 10 of the present invention, various known piezoelectric layers can be used as the piezoelectric layer.
  • a high content containing similar piezoelectric particles 26 in a matrix containing a dielectric polymer material such as the above-mentioned polyvinylidene fluoride, vinylidene fluoride-tetrafluoroethylene copolymer and vinylidene fluoride-trifluoroethylene copolymer described above.
  • a molecular composite piezoelectric material, a piezoelectric layer made of polyvinylidene fluoride, a piezoelectric layer made of a fluororesin other than polyvinylidene fluoride, and a piezoelectric layer obtained by laminating a film made of poly-L lactic acid and a film made of poly-D lactic acid, etc. Is also available.
  • the laminated film of the piezoelectric film 10 shown in FIG. 1 has a second electrode layer 16 on one surface of such a piezoelectric layer 12, a second protective layer 20 on the surface of the second electrode layer 16, and is piezoelectric. It has a structure having a first electrode layer 14 on the other surface of the body layer 12 and a first protective layer 18 on the surface of the first electrode layer 14.
  • the first electrode layer 14 and the second electrode layer 16 form an electrode pair.
  • both sides of the piezoelectric layer 12 are sandwiched between electrode pairs, that is, the first electrode layer 14 and the second electrode layer 16, and further, the first protective layer 18 is sandwiched between the electrode pairs.
  • the first protective layer 18 is sandwiched between the electrode pairs. It has a structure sandwiched between the second protective layer 20 and the second protective layer 20. In this way, the region held by the first electrode layer 14 and the second electrode layer 16 is driven according to the applied voltage.
  • the first and second elements in the first electrode layer 14 and the second electrode layer 16 and the like are added for convenience in order to explain the piezoelectric film 10 of the present invention. Therefore, the first and second piezoelectric films 10 of the present invention have no technical meaning and are irrelevant to the actual usage state.
  • the piezoelectric film 10 of the present invention has, for example, a sticking layer for sticking an electrode layer and a piezoelectric layer 12, and a sticking layer for sticking an electrode layer and a protective layer. It may have a layer.
  • the adhesive may be an adhesive or an adhesive.
  • a polymer material obtained by removing the piezoelectric particles 26 from the piezoelectric layer 12, that is, the same material as the polymer matrix 24 can also be preferably used.
  • the sticking layer may be provided on both the first electrode layer 14 side and the second electrode layer 16 side, or may be provided on only one of the first electrode layer 14 side and the second electrode layer 16 side. Good.
  • the first protective layer 18 and the second protective layer 20 have a role of covering the first electrode layer 14 and the second electrode layer 16 and imparting appropriate rigidity and mechanical strength to the piezoelectric layer 12. Is responsible for. That is, in the piezoelectric film 10 of the present invention, the piezoelectric layer 12 containing the polymer matrix 24 and the piezoelectric particles 26 exhibits extremely excellent flexibility with respect to slow bending deformation. Depending on the application, the rigidity and mechanical strength may be insufficient.
  • the piezoelectric film 10 is provided with a first protective layer 18 and a second protective layer 20 to supplement the piezoelectric film 10.
  • the second protective layer 20 and the first protective layer 18 have the same configuration except for the arrangement position. Therefore, in the following description, when it is not necessary to distinguish between the second protective layer 20 and the first protective layer 18, both members are collectively referred to as a protective layer.
  • various sheet-like materials can be used.
  • various resin films are preferably exemplified.
  • PET polyethylene terephthalate
  • PP polypropylene
  • PS polystyrene
  • PC polycarbonate
  • PPS polyphenylene sulfide
  • PMMA polymethylmethacrylate
  • PEI Polyetherimide
  • PEI Polystyrene
  • PA Polyethylene
  • PEN Polyethylene Naphthalate
  • TAC Triacetyl Cellulose
  • Cyclic Olefin Resin and the like. ..
  • the thickness of the protective layer there is no limit to the thickness of the protective layer. Further, the thicknesses of the first protective layer 18 and the second protective layer 20 are basically the same, but may be different. If the rigidity of the protective layer is too high, not only the expansion and contraction of the piezoelectric layer 12 is restricted, but also the flexibility is impaired. Therefore, the thinner the protective layer is, the more advantageous it is, except when mechanical strength and good handleability as a sheet-like material are required.
  • the thicknesses of the first protective layer 18 and the second protective layer 20 are each twice or less the thickness of the piezoelectric layer 12, it is a preferable result in terms of ensuring both rigidity and appropriate flexibility. Can be obtained.
  • the thickness of the piezoelectric layer 12 is 50 ⁇ m and the second protective layer 20 and the first protective layer 18 are made of PET, the thickness of the second protective layer 20 and the first protective layer 18 is preferably 100 ⁇ m or less, respectively. , 50 ⁇ m or less is more preferable, and 25 ⁇ m or less is further preferable.
  • the first electrode layer 14 is between the piezoelectric layer 12 and the first protective layer 18, and the second electrode layer is between the piezoelectric layer 12 and the second protective layer 20. 16 are formed respectively.
  • the first electrode layer 14 and the second electrode layer 16 are provided to apply an electric field to the piezoelectric film 10 (piezoelectric layer 12).
  • the first electrode layer 14 and the second electrode layer 16 partially have portions (burrs 14a and burrs 16a) protruding from the piezoelectric layer 12 (laminated film) in the plane direction. Have. This point will be described in detail later.
  • the second electrode layer 16 and the first electrode layer 14 are basically the same except that the positions are different. Therefore, in the following description, when it is not necessary to distinguish between the second electrode layer 16 and the first electrode layer 14, both members are collectively referred to as an electrode layer.
  • the material for forming the electrode layer is not limited, and various conductors can be used. Specifically, carbon, palladium, iron, tin, aluminum, nickel, platinum, gold, silver, copper, chromium, molybdenum, alloys thereof, indium tin oxide, and PEDOT / PPS (polyethylene dioxythiophene-polystyrene sulfone). Conductive polymers such as acid) are exemplified. Among them, copper, aluminum, gold, silver, platinum, and indium tin oxide are preferably exemplified. Among them, copper is more preferable from the viewpoint of conductivity, cost, flexibility and the like.
  • the method of forming the electrode layer which is a method of forming a film by a vapor phase deposition method (vacuum film forming method) such as vacuum vapor deposition and sputtering, a film forming by plating, and a method of attaching a foil formed of the above materials.
  • a vapor phase deposition method vacuum film forming method
  • various known methods such as a coating method can be used.
  • a thin film of copper or aluminum formed by vacuum vapor deposition is preferably used as an electrode layer because the flexibility of the piezoelectric film 10 can be ensured.
  • a copper thin film produced by vacuum deposition is preferably used.
  • the thickness of the first electrode layer 14 and the second electrode layer 16 There is no limitation on the thickness of the first electrode layer 14 and the second electrode layer 16. Further, the thicknesses of the first electrode layer 14 and the second electrode layer 16 are basically the same, but may be different.
  • the protective layer described above if the rigidity of the electrode layer is too high, not only the expansion and contraction of the piezoelectric layer 12 is restricted, but also the flexibility is impaired. Therefore, the thinner the electrode layer is, the more advantageous it is, as long as the electric resistance does not become too high.
  • the piezoelectric film 10 of the present invention is suitable because if the product of the thickness of the electrode layer and Young's modulus is less than the product of the thickness of the protective layer and Young's modulus, the flexibility is not significantly impaired.
  • the thickness of the electrode layer is It is preferably 1.2 ⁇ m or less, more preferably 0.3 ⁇ m or less, and even more preferably 0.1 ⁇ m or less.
  • the piezoelectric film 10 has a structure in which the piezoelectric layer 12 is sandwiched between the first electrode layer 14 and the second electrode layer 16, and the first protective layer 18 and the second protective layer 20 are further sandwiched.
  • Such a piezoelectric film 10 preferably has a maximum value at room temperature at which the loss tangent (Tan ⁇ ) at a frequency of 1 Hz by dynamic viscoelasticity measurement is 0.1 or more.
  • the piezoelectric film 10 preferably has a storage elastic modulus (E') at a frequency of 1 Hz as measured by dynamic viscoelasticity measurement of 10 to 30 GPa at 0 ° C. and 1 to 10 GPa at 50 ° C.
  • E' storage elastic modulus
  • the piezoelectric film 10 can have a large frequency dispersion in the storage elastic modulus (E') at room temperature. That is, it can behave hard for vibrations of 20 Hz to 20 kHz and soft for vibrations of several Hz or less.
  • the product of the thickness and the storage elastic modulus (E') at a frequency of 1 Hz measured by dynamic viscoelasticity is 1.0 ⁇ 10 6 to 2.0 ⁇ 10 6 N / m at 0 ° C. , It is preferably 1.0 ⁇ 10 5 to 1.0 ⁇ 10 6 N / m at 50 ° C.
  • the piezoelectric film 10 can be provided with appropriate rigidity and mechanical strength as long as the flexibility and acoustic characteristics are not impaired.
  • the piezoelectric film 10 preferably has a loss tangent (Tan ⁇ ) of 0.05 or more at 25 ° C. and a frequency of 1 kHz in the master curve obtained from the dynamic viscoelasticity measurement.
  • Ton ⁇ loss tangent
  • the frequency characteristics of the speaker using the piezoelectric film 10 are smoothed, and the amount of change in sound quality when the minimum resonance frequency f 0 changes with the change in the curvature of the speaker (piezoelectric film 10) can be reduced.
  • the piezoelectric film 10 has a through hole 18a through which the first protective layer 18 penetrates to the first electrode layer 14.
  • the through hole 18a is provided with a conductive first connecting member 32 connected to the first electrode layer 14.
  • a first extraction electrode 34 for connecting to the first connection member 32 and connecting the piezoelectric film 10 to an external power source is provided.
  • the second protective layer 20 also has a similar through hole 20a, and the through hole 20a is provided with a conductive second connecting member 33 connected to the second electrode layer 16.
  • a second extraction electrode 36 for connecting to the second connection member 33 and connecting the piezoelectric film 10 to an external power source is provided.
  • the first extraction electrode 34 and the second extraction electrode 36 are provided at different positions in the plane direction of the piezoelectric film 10 (laminated film) (see FIG. 10 and the like). In FIG. 1, the first extraction electrode 34 and the second extraction electrode 36 are provided at different positions in the direction orthogonal to the paper surface in the drawing.
  • first extraction electrode 34 and the second extraction electrode 36 are drawn out in the same direction.
  • the present invention is not limited to this, and various configurations can be used.
  • the first extraction electrode 34 and the second extraction electrode 36 may be drawn out in opposite directions, or the first extraction electrode 34 and the second extraction electrode 36 may be drawn out so as to be orthogonal to each other.
  • the through hole 18a (through hole 20a) is formed in the first protective layer 18 (second protective layer 20) in order to form the first connecting member 32 that connects the first electrode layer 14 and the first extraction electrode 34. It is a through hole to be made.
  • the size of the through hole 18a is not limited, and is sufficient depending on the material for forming the first electrode layer 14 and the first extraction electrode 34, the size of the first extraction electrode 34, the size of the piezoelectric film 10, and the like.
  • the size at which the first connecting member 32 capable of obtaining continuity can be formed may be appropriately set.
  • the through hole 18a As a method for forming the through hole 18a, various known methods can be used depending on the material for forming the first protective layer 18. As an example, a method of removing the first protective layer 18 by burning (ablation) with a laser beam such as a laser beam having a wavelength of 10.6 ⁇ m by a carbon dioxide gas laser to form a through hole 18a is exemplified.
  • the through hole 18a may be formed at a desired position of the first protective layer 18 by scanning the formation position of the through hole 18a in the first protective layer 18 with a laser beam.
  • the through hole 18a having a desired thickness can be formed by adjusting the intensity of the laser beam, the scanning speed, and the like.
  • the adjustment of the scanning speed is, that is, the adjustment of the processing time by the laser beam.
  • a method of forming the through hole 18a by dissolving the first protective layer 18 with an organic solvent can also be used.
  • the first protective layer 18 is PET
  • a through hole 18a can be formed by using hexafluoroisoppanol or the like.
  • a through hole 18a may be formed at a desired position by using a mask or the like as in the case of etching in photolithography or the like.
  • the through hole 18a having a desired thickness can be formed by adjusting the treatment time, the concentration of the organic solvent, and the like.
  • the through hole 18a is provided with a first connecting member 32 (second connecting member 33).
  • the first connecting member 32 electrically connects the first electrode layer 14 and the first extraction electrode 34.
  • various types of the first connecting member 32 made of a conductive material that can be inserted into the through hole 18a can be used. Specifically, a metal paste in which metal particles such as silver, copper and gold are dispersed in a binder made of a thermosetting resin such as epoxy resin or polyimide, and similar metal particles are cured at about room temperature such as acrylic resin.
  • Examples thereof include a metal paste dispersed in a binder made of a resin, a metal paste that is thermoset by a metal alone with a complex metal, a metal tape such as a copper foil tape, and a metal member that can be inserted into a through hole 18a.
  • the first extraction electrode 34 (second extraction electrode 36) is a wiring that is electrically connected to the first connection member 32 and is for electrically connecting the external power supply and the piezoelectric film 10. Therefore, the first extraction electrode 34 extends to the outside in the surface direction of the laminated film in which the piezoelectric layer 12, the electrode layer, and the protective layer are laminated.
  • the first extraction electrode 34 is also not limited, and known metal foils such as copper foil and various metal wirings used for wiring that electrically conducts the electrode or the like with the power supply and the external device can be used. Various types are available.
  • the length of the first extraction electrode 34 outside the surface direction of the laminated film is appropriately set according to the application of the piezoelectric film 10, the equipment to which the piezoelectric film 10 is connected, the installation position of the piezoelectric film 10, and the like. Just do it.
  • the first extraction electrode 34 and the first connecting member 32 may be attached to each other.
  • the first extraction electrode 34 and the first connecting member 32 may be attached by a known method.
  • a method using a conductive adhesive adheresive, adhesive
  • a method using a conductive double-sided tape, and the like are exemplified.
  • a metal paste such as silver paste for the connecting member 32 and using the first drawing electrode 34 for the copper foil and the conductive wire, the first drawing electrode 34 and the first connecting member are provided with adhesiveness.
  • a method of sticking with 32 is also available.
  • a through hole is formed in the protective layer, an electrode connecting member is provided in the through hole, and the electrode connecting member is provided as a preferable embodiment in which the end face coating layer 30 described later is easily formed on the entire end surface of the laminated film.
  • the piezoelectric film of the present invention is not limited to this, and various configurations can be used for drawing out the electrodes.
  • a rod-shaped or sheet-shaped (film-shaped, plate-shaped) lead-out wiring is provided between the protective layer and the piezoelectric layer, or between the electrode layer and the protective layer, and the lead-out wiring is provided.
  • the extraction electrode may be connected.
  • the wiring for drawing out may be used as it is as a drawing electrode.
  • a part of the protective layer and the electrode layer may be projected from the piezoelectric layer in the plane direction, and the protruding electrode layer may be used as wiring for drawing out, and a drawing electrode may be connected here.
  • the piezoelectric film 10 of the present invention has the piezoelectric layer 12, the first electrode layer 14 and the second electrode layer 16 provided on both sides of the piezoelectric layer 12, and the first protection formed on the surface of the electrode layer. It has a structure in which the entire end face of the laminated film composed of the layer 18 and the second protective layer 20 is covered with an insulating end face coating layer 30.
  • the material for forming the end face coating layer 30 is not limited, has insulating properties, and has sufficient heat resistance against a short circuit between the first electrode layer 14 and the second electrode layer 16 for removing burrs, which will be described later. As long as it is a material, various known materials can be used. As an example, polyimide, heat-resistant polyethylene terephthalate and the like are exemplified.
  • the thickness of the end face coating layer 30 is also not limited, and the thickness that can be sufficiently embedded with burrs (burrs 14a and burrs 16a) of the first electrode layer 14 and the second electrode layer 16 described later to shield from air is increased. It may be set as appropriate.
  • the method for forming the end face covering layer 30 on the end face of the laminated film is not limited, and a known forming method (film forming method) according to the forming material of the end face covering layer 30 can be used.
  • a method of attaching an insulating adhesive tape a method of applying a liquid in which a material to be an end face coating layer 30 is dissolved and drying, and a method of applying a liquid obtained by heating and melting a material to be an end face coating layer 30 and curing it.
  • Examples thereof include a method of dissolving the resin to be the end face coating layer 30 in a solvent, applying the resin, and drying the resin.
  • the insulating adhesive tape include an adhesive tape made of polyimide, polyethylene terephthalate, or the like.
  • the method for applying the liquid at this time is not limited, and various known methods can be used. As an example, spray coating, immersion coating and the like are exemplified. Further, if necessary, the end face covering layer 30 may be formed up to the main surface of the first protective layer 18 and / or the second protective layer 20. For example, the end face covering layer 30 may be formed by attaching a polyimide single-sided tape from the main surfaces of the first protective layer 18 and the second protective layer 20 so as to wrap the end faces. The main surface is the maximum surface of a sheet-like material (layer, film, plate-like material).
  • the piezoelectric film 10 of the present invention is a laminated body of the piezoelectric film 10 as described later, after forming the laminated body of the piezoelectric film 10, the end face covering layer 30 is similarly formed on the end face of the laminated film. You may.
  • the water vapor permeability of the end face coating layer 30 may be set to 100 g / (m 2 ⁇ day) or less, and the end face covering layer 30 may be provided with a gas barrier property.
  • the end face coating layer 30 is set to a certain degree of hardness, and the end face coating layer 30 is set to the piezoelectric layer 12, the first electrode layer 14, and the second electrode layer 16. It may act as a protective layer of.
  • the piezoelectric film 10 of the present invention has a structure in which the end face of a laminated film in which an electrode layer and a protective layer are laminated on both surfaces of the piezoelectric layer 12 is covered with such an end face coating layer 30, so that the first electrode layer is formed. A short circuit (short circuit) between the 14 and the second electrode layer 16 is prevented.
  • the piezoelectric film 10 (laminated film) uses a laminate of a protective layer and an electrode layer, a piezoelectric layer 12 is formed on this laminate, and a similar laminate is formed on the piezoelectric layer. It is manufactured by laminating.
  • the piezoelectric film 10 in order to produce the piezoelectric film 10 having a desired shape including the size, it is necessary to cut (punch) the laminate of the protective layer and the electrode layer into a cut sheet having a desired shape. At the time of this cutting, the electrode layer is pulled out due to the ductility of the metal and protrudes from the protective layer, resulting in so-called burrs.
  • the direction of burrs on the electrode layer is often unknown when the piezoelectric film 10 is manufactured. Therefore, in the laminated first electrode layer 14 and the second electrode layer 16, the burrs 14a and burrs 16a protruding from the laminated film may be bent in a direction close to each other and face each other. As mentioned above, the piezoelectric layer 12 is very thin. As a result, the burrs 14a and the burrs 16a facing each other come into contact with each other, the first electrode layer 14 and the second electrode layer 16 are short-circuited, and the piezoelectric film does not operate properly (see FIG. 9).
  • the piezoelectric layer 12 has a thickness of about 8 to 300 ⁇ m and is very thin.
  • the burrs 14a of the first electrode layer 14 and the burrs 16a of the second electrode layer 16 may come into contact with each other and cause a short circuit.
  • the direction of the burrs is changed by receiving an external force or the like, and the burrs 14a of the first electrode layer 14 and the burrs 16a of the second electrode layer 16 are formed. In some cases, they bend in the direction of proximity and face each other, making contact with each other.
  • the piezoelectric film 10 of the present invention has an insulating end face coating layer 30 on the end face of the laminated film in which the electrode layer and the protective layer are laminated on both sides of the piezoelectric layer 12.
  • the piezoelectric film 10 of the present invention has a burr of the first electrode layer 14 by short-circuiting the first electrode layer 14 and the second electrode layer 16 in advance at the time of manufacture. The contact between the 14a and the burr 16a of the second electrode layer 16 is eliminated to prevent a short circuit between the first electrode layer 14 and the second electrode layer 16 in the produced piezoelectric film 10.
  • FIGS. 3 to 9 conceptually show an example of the method for producing the piezoelectric film of the present invention.
  • a second laminated body 42 having a second electrode layer 16 formed on the surface of the second protective layer 20 is prepared.
  • the second laminated body 42 may be produced by forming a copper thin film or the like as the second electrode layer 16 on the surface of the second protective layer 20 by vacuum deposition, sputtering, plating or the like.
  • the first laminated body 40 may be produced by forming a copper thin film or the like as the first electrode layer 14 on the surface of the first protective layer 18 by vacuum deposition, sputtering, plating or the like.
  • a commercially available product in which a copper thin film or the like is formed on the protective layer may be used as the second laminated body 42 and / or the first laminated body 40.
  • the second laminated body 42 and the first laminated body 40 may be the same or different.
  • a protective layer with a separator temporary support
  • PET or the like having a thickness of 25 to 100 ⁇ m can be used.
  • the separator may be removed after thermocompression bonding of the electrode layer and the protective layer.
  • the piezoelectric layer 12 is formed on the second electrode layer 16 of the second laminated body 42, and the piezoelectric laminated body 46 in which the second laminated body 42 and the piezoelectric layer 12 are laminated is laminated. (Piezoelectric layer forming step).
  • the piezoelectric layer 12 may be formed by a known method.
  • the piezoelectric layer in which the piezoelectric particles 26 are dispersed in the polymer matrix 24 shown in FIG. 2, as an example, the piezoelectric layer is produced as follows. First, a polymer material such as the above-mentioned cyanoethylated PVA is dissolved in an organic solvent, and piezoelectric particles 26 such as PZT particles are added and stirred to prepare a coating material.
  • the organic solvent is not limited, and various organic solvents such as dimethylformamide (DMF), methylethylketone, and cyclohexanone can be used.
  • the paint is cast (coated) on the second laminate 42 to evaporate and dry the organic solvent.
  • a piezoelectric laminate 46 having a second electrode layer 16 on the second protective layer 20 and a piezoelectric layer 12 laminated on the second electrode layer 16 is produced. To do.
  • the method of casting the paint there is no limitation on the method of casting the paint, and all known methods (coating devices) such as a bar coater, a slide coater, and a doctor knife can be used.
  • the polymer material is a material that can be melted by heating
  • the polymer material is heated and melted to prepare a melt obtained by adding piezoelectric particles 26 to the polymer material, and the melt is formed by extrusion molding or the like to show the third
  • the piezoelectric laminate 46 as shown in FIG. 8 may be produced by extruding the two laminates into a sheet shape and cooling the laminate 42.
  • a polymer piezoelectric material such as PVDF may be added to the polymer matrix 24 in addition to the polymer material having viscoelasticity at room temperature.
  • the polymer piezoelectric materials to be added to the coating material may be dissolved.
  • the polymer piezoelectric material to be added may be added to the polymer material having viscoelasticity at room temperature and melted by heating.
  • a calendar treatment may be performed if necessary.
  • the calendar treatment may be performed once or multiple times.
  • the calendar treatment is a treatment in which the surface to be treated is pressed while being heated by a heating press, a heating roller, or the like to perform flattening or the like.
  • the piezoelectric layer 12 of the piezoelectric laminated body 46 having the second electrode layer 16 on the second protective layer 20 and forming the piezoelectric layer 12 on the second electrode layer 16 is subjected to polarization treatment ( Polling).
  • polarization treatment There is no limitation on the method of polarization treatment of the piezoelectric layer 12, and known methods can be used. For example, electric field polling in which a DC electric field is directly applied to an object to be polarized is exemplified.
  • the first electrode layer 14 may be formed before the polarization treatment, and the electric field polling treatment may be performed using the first electrode layer 14 and the second electrode layer 16. .
  • the piezoelectric film 10 of the present invention is produced, the polarization treatment performs polarization in the thickness direction of the piezoelectric layer 12 instead of the plane direction.
  • the first laminated body 40 prepared in advance is directed to the piezoelectric layer 12 side of the piezoelectric laminated body 46 subjected to the polarization treatment, and the first electrode layer 14 is directed toward the piezoelectric layer 12.
  • Lamination (lamination process) Further, the laminate is thermocompression-bonded using a heating press device, a heating roller, or the like so as to sandwich the second protective layer 20 and the first protective layer 18, and the piezoelectric laminate 46 and the first laminate 40 are heat-bonded. And paste together.
  • the piezoelectric layer 12, the first electrode layer 14 and the second electrode layer 16 provided on both sides of the piezoelectric layer 12, and the first protective layer 18 and the second protective layer 20 formed on the surface of the electrode layer.
  • a laminated film composed of the above is produced (film production process).
  • the piezoelectric film 10 of the present invention produced by performing such a production step is polarized in the thickness direction instead of the plane direction, and a large piezoelectric property can be obtained without stretching treatment after the polarization treatment. .. Therefore, the piezoelectric film 10 of the present invention has no in-plane anisotropy in the piezoelectric characteristics, and when a driving voltage is applied, it expands and contracts isotropically in all directions in the plane direction.
  • the end face covering layer 30 is formed on the entire end face of the laminated film (coating layer forming step). If necessary, the laminated film may be cut into a desired shape before forming the end face covering layer 30.
  • a through hole 18a is formed in the first protective layer 18, and a through hole 20a is formed in the second protective layer 20 (through hole forming step).
  • a first connecting member 32 is formed in the through hole 18a to connect the first extraction electrode 34
  • a second connecting member 33 is formed in the through hole 20a to form the second extraction electrode. 36 are connected (connection portion forming step, electrode forming step).
  • the method for forming the end face covering layer 30, the through hole 18a and the through hole 20a, the first connecting member 32 and the second connecting member 33, and the first extraction electrode 34 and the second extraction electrode 36 is as described above. ..
  • the first extraction electrode 34 and the second extraction electrode 36 are connected to a power source to energize the first electrode layer 14 and the second electrode layer 16 (energization step). ).
  • energization step the contact between the burrs 14a of the first electrode layer 14 and the burrs 16a of the second electrode layer 16 is eliminated, and short-circuiting between the first electrode layer 14 and the second electrode layer 16 in the produced piezoelectric film 10 is prevented. To do.
  • the burrs 14a of the first electrode layer 14 and the burrs 16a of the second electrode layer 16 may be in contact with each other.
  • the burr 14a of the first electrode layer 14 and the burr 16a of the second electrode layer 16 are omitted.
  • the burr 14a of the first electrode layer 14 and the burr 16a of the second electrode layer 16 are in contact with each other and energized, the first electrode layer 14 and the second electrode layer 16 are short-circuited.
  • the end face of the laminated film is covered with the end face covering layer 30.
  • the burrs 14a of the first electrode layer 14 and the burrs 16a of the second electrode layer 16 are not in contact with air. Further, the first electrode layer 14 and the second electrode layer 16 are very thin. Therefore, due to this short circuit, the contact portion between the burr 14a of the first electrode layer 14 and the burr 16a of the second electrode layer 16 is burnt out, and the so-called flying state disappears. As a result, as shown in the lower part (FIG. 1) of FIG. 9, the burr 14a of the first electrode layer 14 and the burr 16a of the second electrode layer 16 are completely separated from each other.
  • the piezoelectric film 10 of the present invention can suitably prevent short circuits caused by burrs 14a of the first electrode layer 14 and burrs 16a of the second electrode layer 16.
  • the electric power that is energized to short-circuit the first electrode layer 14 and the second electrode layer 16 by the burr there is no limit to the electric power that is energized to short-circuit the first electrode layer 14 and the second electrode layer 16 by the burr.
  • the voltage for short-circuiting the first electrode layer 14 and the second electrode layer 16 in the energization step is preferably 150 to 200 V. ..
  • the end face covering layer 30 is formed on the entire end face of the laminated film in which the electrode layer and the protective layer are laminated on both sides of the piezoelectric layer 12.
  • the present invention is not limited to this.
  • the end face covering layer 30 is formed only on the end faces that need to be prevented from short circuits. You may.
  • the end face coating layer 30 is preferably formed on the entire end face of the laminated film in that a short circuit between the first electrode layer 14 and the second electrode layer 16 due to burrs can be more reliably prevented.
  • interlayer insulation is provided between the piezoelectric layer 12 and the first electrode layer 14 and / or between the piezoelectric layer 12 and the second electrode layer 16 at the end in the plane direction.
  • a member may be provided.
  • the piezoelectric film of the present invention has the end face coating layer 30 on the end face of the laminated film, so that the first electrode layer 14 and the second electrode layer 14 are caused by the burrs 14a of the first electrode layer 14 and the burrs 16a of the second electrode layer 16.
  • a short circuit with the electrode layer 16 can be suitably prevented.
  • the interlayer insulating member it is possible to more preferably prevent a short circuit between the first electrode layer 14 and the second electrode layer 16 due to burrs in the electrode layer.
  • FIG. 10 shows an example thereof.
  • the piezoelectric film 10A shown in FIG. 10 has a rectangular frame-shaped interlayer insulating member 50 corresponding to the entire end portion of the piezoelectric layer 12 in the vicinity of the end portion between the first electrode layer 14 and the piezoelectric layer 12. ..
  • the burrs 14a of the first electrode layer 14 are repelled to suppress the direction toward the second electrode layer 16 side, and the burrs 14a and the second of the first electrode layer 14 are suppressed. It is possible to more preferably prevent a short circuit between the first electrode layer 14 and the second electrode layer 16 due to the burr 16a of the electrode layer 16.
  • the position of the end portion of the interlayer insulating member 50 in the plane direction may coincide with the end portion of the piezoelectric layer 12 (first electrode layer 14). However, it is preferable that at least a part of the interlayer insulating member 50 protrudes from the piezoelectric layer 12 in the plane direction.
  • the protrusion of the interlayer insulating member 50 may be a part, but as shown in FIG. 10, it is preferable that the entire area of the interlayer insulating member 50 protrudes from the end portion of the piezoelectric layer 12. In this regard, the same applies to the interlayer insulating member 52 shown in FIG. 11, which will be described later.
  • the thickness of the interlayer insulating member 50 may be appropriately set to a thickness that does not hinder the contact between the piezoelectric layer 12 and the first electrode layer 14 and can prevent the contact between burrs.
  • the thickness of the interlayer insulating member 50 is preferably 5 to 30 ⁇ m, more preferably 5 to 15 ⁇ m.
  • the width of the interlayer insulating member 50 in the plane direction is appropriately set to a thickness that does not hinder the contact between the piezoelectric layer 12 and the first electrode layer 14 and can prevent the contact between burrs. Good.
  • the width of the interlayer insulating member 50 in the plane direction is preferably 0.2 to 10 mm, more preferably 0.5 to 5 mm.
  • the width in the plane direction referred to here is the in-plane width of the piezoelectric layer 12 that does not include the protrusion from the piezoelectric layer 12.
  • the interlayer insulating member 50 preferably protrudes from the end portion of the piezoelectric layer 12. There is no limit to the amount of protrusion of the interlayer insulating member 50 from the end of the piezoelectric layer 12, and if the interlayer insulating member 50 protrudes slightly from the end of the piezoelectric layer 12, the effect of preventing contact between the interlayer insulating members 50 burrs is improved. it can.
  • the amount of protrusion of the interlayer insulating member 50 from the end of the piezoelectric layer 12 is preferably 0.05 to 5 mm, more preferably 0.1 to 2 mm.
  • the interlayer insulating member 52 of the piezoelectric film 10B shown in FIG. 11 is also the same.
  • the interlayer insulating member 50 is provided on the piezoelectric layer 12 side, and the piezoelectric layer 12 and the first electrode layer 14 are laminated, but the present invention is not limited to this. That is, in the present invention, the interlayer insulating member 50 may be provided on the first electrode layer 14 side, and the piezoelectric layer 12 and the first electrode layer 14 may be laminated. Further, in the example shown in FIG. 10, the interlayer insulating member 50 is provided between the piezoelectric layer 12 and the first electrode layer 14, but the present invention is not limited thereto.
  • the interlayer insulating member 50 may be provided between the piezoelectric layer 12 and the second electrode layer 16, or between the piezoelectric layer 12 and the first electrode layer 14, and between the piezoelectric layer 12 and the piezoelectric layer 12. Interlayer insulating members 50 may be provided on both sides of the second electrode layer 16. In that the short circuit due to burrs can be more preferably prevented, the interlayer insulating member 50 is provided between the piezoelectric layer 12 and the first electrode layer 14 and between the piezoelectric layer 12 and the second electrode layer 16. It is preferable to provide both. Regarding the above points, the same applies to the interlayer insulating member 52 of the piezoelectric film 10B shown in FIG.
  • FIG. 11 conceptually shows another example of a piezoelectric film having an interlayer insulating member.
  • the interlayer insulating member 52 is provided only at the end portions on the formation side of the first extraction electrode 34 and the second extraction electrode 36. That is, in this example, the interlayer insulating member 52 is provided at the end of the electrode drawn out from the piezoelectric film (laminated film).
  • the burrs 14a of the first electrode layer 14 and the burrs 14a coincides with the burr 16a of the second electrode layer 16.
  • the through hole 18a and the through hole 20a are formed, the first connection member 32 and the second connection member 33 are formed, and the second During various processing processes such as the formation of the 1-drawer electrode 34 and the 2nd drawer electrode 36, it receives vibration, external force, bending, etc. from the outside.
  • the burrs 14a of the first electrode layer 14 and the burrs 16a of the second electrode layer 16 are in close proximity to each other. It may bend and come into contact with it.
  • the interlayer insulating member 52 is located at the end of the first extraction electrode 34 and the second extraction electrode 36 on the formation side between the first electrode layer 14 and the piezoelectric layer 12.
  • the interlayer insulating member 52 also protrudes from the end of the piezoelectric layer 12, as in the above-mentioned interlayer insulating member 50 shown in FIG.
  • FIG. 12 conceptually shows another example of the piezoelectric film of the present invention.
  • the piezoelectric film 10C shown in FIG. 12 has a first electrode insulating member 56 between the first extraction electrode 34 and the first protective layer 18, and between the second extraction electrode 36 and the second protective layer 20.
  • Both the first electrode insulating member 56 and the second electrode insulating member 58 are insulating members provided between the extraction electrode and the protective layer (laminated film) and projecting from the end of the protective layer.
  • the first extraction electrode 34 and the second extraction electrode 36 are often flexible. At this time, the extraction electrode located on the upper side in the vertical direction may hang down and come into contact with the burr on the other electrode layer side. For example, when the first extraction electrode 34 is on the upper side, the first extraction electrode 34 may hang down and come into contact with the burr 16a or the like of the second electrode layer 16. In addition, the extraction electrode may be bent and come into contact with the burr on the other electrode layer side. On the other hand, by having the first electrode insulating member 56 and the second electrode insulating member 58, even if one of the extraction electrodes hangs down or is bent, it does not come into contact with the burr of the electrode layer. Since it is an electrode insulating member, it will not be short-circuited.
  • the thickness of the first electrode insulating member 56 and the second electrode insulating member 58 there is no limitation on the thickness of the first electrode insulating member 56 and the second electrode insulating member 58. That is, the thickness of the first electrode insulating member 56 and the second electrode insulating member 58 may be appropriately set so as to obtain sufficient insulating properties according to the forming material.
  • the thickness of the first electrode insulating member 56 and the second electrode insulating member 58 is preferably 0.01 to 1 mm, more preferably 0.02 to 0.1 mm.
  • the thickness of the first electrode insulating member 56 and the second electrode insulating member 58 may be the same or different from each other.
  • the amount of protrusion of the first electrode insulating member 56 and the second electrode insulating member 58 from the laminated film depends on the thickness of the piezoelectric layer 12 and the like, and the contact between the extraction electrode and the burr of the other electrode layer and the burr. , The length that can prevent contact with the other extraction electrode may be appropriately set.
  • the amount of protrusion of the first electrode insulating member 56 and the second electrode insulating member 58 from the laminated film is preferably 0.01 to 10 mm, more preferably 0.05 to 5 mm.
  • the amount of protrusion of the first electrode insulating member 56 and the second electrode insulating member 58 from the laminated film may be the same or different from each other.
  • the piezoelectric film 10C shown in FIG. 12 preferably has both a first electrode insulating member 56 corresponding to the first extraction electrode 34 and a second electrode insulating member 58 corresponding to the second extraction electrode 36.
  • the present invention is not limited to this. That is, the piezoelectric film of the present invention may have only one of the first electrode insulating member 56 corresponding to the first extraction electrode 34 and the second electrode insulating member 58 corresponding to the second extraction electrode 36. Good.
  • the materials for forming the above-mentioned interlayer insulating member and electrode insulating member are not limited, and various materials used for known insulating members used for performing electrical insulation can be used. As an example, the materials exemplified in the end face covering layer 30 described above can be used. Further, the interlayer insulating member and the electrode insulating member may be formed by a known method depending on the forming material to be used.
  • the interlayer insulating member By having the above-mentioned interlayer insulating member, it is possible to prevent the burrs 14a of the first electrode layer 14 from coming into contact with the burrs 16a of the second electrode layer 16 without having the end face coating layer 30. Further, by having the electrode insulating member described above, it is possible to prevent the extraction electrode from coming into contact with the burr of the other electrode layer without having the end face coating layer 30. That is, the piezoelectric layer 12, the first electrode layer 14 and the second electrode layer 16 provided on both sides of the piezoelectric layer 12, and the first protective layer 18 and the second protective layer 20 formed on the surface of the electrode layer. As conceptually shown in FIGS.
  • the piezoelectric film having the laminated film made of the first electrode layer 14 has the above-mentioned interlayer insulating member even if the end face coating layer 30 is not provided. It is possible to prevent the burrs 14a from coming into contact with the burrs 16a of the second electrode layer 16. Further, the piezoelectric film having this laminated film does not have the end face covering layer 30 as conceptually shown in FIG. 15 by having the electrode insulating member described above even if it does not have the end face covering layer 30. However, it is possible to prevent the extraction electrode from coming into contact with the burr of the other electrode layer.
  • FIG. 16 shows a conceptual diagram of an example of a flat plate type piezoelectric speaker using the piezoelectric film 10 of the present invention.
  • the piezoelectric speaker 60 is a flat plate type piezoelectric speaker that uses the piezoelectric film 10 of the present invention as a diaphragm that converts an electric signal into vibration energy.
  • the piezoelectric speaker 60 can also be used as a microphone, a sensor, or the like.
  • the piezoelectric speaker 60 includes a piezoelectric film 10, a case 62, a viscoelastic support 64, and a frame body 68.
  • the case 62 is a thin housing made of plastic or the like and having one side open. Examples of the shape of the housing include a rectangular parallelepiped shape, a cubic shape, and a cylindrical shape.
  • the frame body 68 is a frame material that has a through hole having the same shape as the open surface of the case 62 in the center and engages with the open surface side of the case 62.
  • the viscous elastic support 64 has appropriate viscosity and elasticity, supports the piezoelectric film 10, and applies a constant mechanical bias to any part of the piezoelectric film, thereby moving the piezoelectric film 10 back and forth without waste. It is for converting into motion (movement in the direction perpendicular to the surface of the film).
  • a non-woven fabric such as wool felt and wool felt containing PET and the like, glass wool and the like are exemplified.
  • a decompressed or pressurized gas can be used instead of the viscoelastic support.
  • the piezoelectric speaker 60 accommodates the viscoelastic support 64 in the case 62, covers the case 62 and the viscoelastic support 64 with the piezoelectric film 10, and surrounds the periphery of the piezoelectric film 10 with the frame body 68 to form the upper end surface of the case 62.
  • the frame body 68 is fixed to the case 62 in a state of being pressed against.
  • the height (thickness) of the viscoelastic support 64 is thicker than the height of the inner surface of the case 62. Therefore, in the piezoelectric speaker 60, the viscoelastic support 64 is held in a state of being thinned by being pressed downward by the piezoelectric film 10 at the peripheral portion of the viscoelastic support 64. Similarly, in the peripheral portion of the viscoelastic support 64, the curvature of the piezoelectric film 10 suddenly fluctuates, and the piezoelectric film 10 is formed with a rising portion that becomes lower toward the periphery of the viscoelastic support 64. Further, the central region of the piezoelectric film 10 is pressed by the viscoelastic support 64 having a square columnar shape to form a flat surface (substantially flat shape).
  • the piezoelectric speaker 60 when the piezoelectric film 10 is stretched in the plane direction by applying a driving voltage to the second electrode layer 16 and the first electrode layer 14, the viscoelastic support 64 acts to absorb the stretched portion.
  • the rising portion of the piezoelectric film 10 changes its angle in the rising direction.
  • the piezoelectric film 10 having the flat portion moves upward.
  • the piezoelectric film 10 contracts in the plane direction due to the application of the driving voltage to the second electrode layer 16 and the first electrode layer 14
  • the rising portion of the piezoelectric film 10 collapses in order to absorb the contracted portion. Change the angle in the direction (the direction closer to the plane).
  • the piezoelectric film 10 having the flat portion moves downward.
  • the piezoelectric speaker 60 generates sound by the vibration of the piezoelectric film 10.
  • the conversion from the expansion / contraction motion to the vibration can also be achieved by holding the piezoelectric film 10 in a curved state. Therefore, the piezoelectric film 10 of the present invention can function as a flexible piezoelectric speaker by simply holding it in a curved state instead of the rigid flat piezoelectric speaker 60 as shown in FIG. ..
  • the piezoelectric speaker using the piezoelectric film 10 of the present invention can be stored in a bag or the like by, for example, being rolled or folded, taking advantage of its good flexibility. Therefore, according to the piezoelectric film 10 of the present invention, it is possible to realize a piezoelectric speaker that can be easily carried even if it has a certain size. Further, as described above, the piezoelectric film 10 of the present invention is excellent in flexibility and flexibility, and has no in-plane piezoelectric property anisotropy. Therefore, the piezoelectric film 10 of the present invention has little change in sound quality regardless of the direction in which it is bent, and also has little change in sound quality with respect to a change in curvature.
  • the piezoelectric speaker using the piezoelectric film 10 of the present invention has a high degree of freedom in the installation location, and can be attached to various articles as described above.
  • a so-called wearable speaker can be realized.
  • the piezoelectric film of the present invention is attached to a flexible display device such as a flexible organic EL display device and a flexible liquid crystal display device to obtain a display device. It can also be used as a speaker.
  • the piezoelectric film 10 of the present invention expands and contracts in the surface direction when a voltage is applied, and vibrates favorably in the thickness direction due to the expansion and contraction in the surface direction. It exhibits good acoustic characteristics that can output sound with sound pressure.
  • the piezoelectric film 10 of the present invention which exhibits such good acoustic characteristics, that is, high expansion / contraction performance due to piezoelectricity, can be used as a piezoelectric vibrating element that vibrates a vibrating body such as a diaphragm by laminating a plurality of sheets. It works.
  • a speaker in which a laminate of the piezoelectric films 10 is attached to a diaphragm and the diaphragm is vibrated by the laminate of the piezoelectric films 10 to output sound may be used. That is, in this case, the laminated body of the piezoelectric film 10 acts as a so-called exciter that outputs sound by vibrating the diaphragm.
  • the laminated body of the piezoelectric film 10 acts as a so-called exciter that outputs sound by vibrating the diaphragm.
  • the expansion and contraction of the laminate of the piezoelectric film 10 in the surface direction causes the diaphragm to which the laminate is attached to bend, and as a result, the diaphragm vibrates in the thickness direction.
  • the vibration in the thickness direction causes the diaphragm to generate sound.
  • the diaphragm vibrates according to the magnitude of the drive voltage applied to the piezoelectric film 10, and generates a sound according to the drive voltage applied to the piezoelectric film 10. Therefore, at this time, the piezoelectric film 10 itself does not output sound.
  • the rigidity of the piezoelectric film 10 for each sheet is low and the elastic force is small, the rigidity is increased by laminating the piezoelectric film 10, and the elastic force of the laminated body as a whole is increased.
  • the laminated body of the piezoelectric film 10 even if the diaphragm has a certain degree of rigidity, the diaphragm is sufficiently flexed with a large force to sufficiently vibrate the diaphragm in the thickness direction. Sound can be generated in the diaphragm.
  • the number of laminated piezoelectric films 10 is not limited, and the number of sheets capable of obtaining a sufficient amount of vibration may be appropriately set according to, for example, the rigidity of the vibrating diaphragm. It is also possible to use one piezoelectric film 10 of the present invention as a similar exciter (piezoelectric vibrating element) as long as it has sufficient stretching force.
  • the diaphragm vibrated by the laminated body of the piezoelectric film 10 of the present invention is not limited, and various sheet-like materials (plate-like materials, films) can be used.
  • various sheet-like materials plate-like materials, films
  • examples thereof include a resin film made of a resin material such as polyethylene terephthalate (PET), foamed plastic made of expanded polystyrene, a paper material such as corrugated cardboard, a glass plate, and wood.
  • PET polyethylene terephthalate
  • foamed plastic made of expanded polystyrene
  • a paper material such as corrugated cardboard
  • a glass plate and wood.
  • a device such as a display device may be used as the diaphragm as long as it can be sufficiently bent.
  • the laminate of the piezoelectric films 10 it is preferable to attach the adjacent piezoelectric films to each other with a sticking layer (sticking agent). Further, it is preferable that the laminate of the piezoelectric film 10 and the diaphragm are also attached by the attachment layer.
  • the adhesive layer may be made of an adhesive or an adhesive.
  • an adhesive layer made of an adhesive is used, which gives a solid and hard adhesive layer after application. The same applies to the above points in the laminated body formed by folding back the long piezoelectric film 10 described later.
  • the polarization direction of the piezoelectric film 10 of the present invention is the polarization direction in the thickness direction. Therefore, in the laminated body of the piezoelectric films 10, the polarization directions may be the same for all the piezoelectric films 10, and there may be piezoelectric films having different polarization directions.
  • the piezoelectric films 10 in the laminated body of the piezoelectric films 10, it is preferable to laminate the piezoelectric films 10 so that the polarization directions of the adjacent piezoelectric films 10 are opposite to each other.
  • the polarity of the voltage applied to the piezoelectric layer 12 depends on the polarization direction. Therefore, regardless of whether the polarization direction is from the first electrode layer 14 to the second electrode layer 16 or from the second electrode layer 16 to the first electrode layer 14, all the piezoelectric films 10 to be laminated have the first electrode.
  • the polarity of the layer 14 and the polarity of the second electrode layer 16 are made the same.
  • the laminate of the piezoelectric films 10 may be configured to laminate a plurality of piezoelectric films 10 by folding back the long piezoelectric film 10 once or more, preferably a plurality of times.
  • the structure in which the long piezoelectric film 10 is folded back and laminated has the following advantages. That is, in a laminated body in which a plurality of cut sheet-shaped piezoelectric films 10 are laminated, it is necessary to connect the first electrode layer 14 and the second electrode layer 16 to the drive power source for each piezoelectric film. On the other hand, in the configuration in which the long piezoelectric film 10 is folded back and laminated, the laminated body can be formed only by one long piezoelectric film 10.
  • the long piezoelectric film 10 is folded back and laminated, only one power source is required for applying the driving voltage, and the electrode may be pulled out from the piezoelectric film 10 at one place. Further, in the configuration in which the long piezoelectric films 10 are folded back and laminated, the polarization directions of the adjacent piezoelectric films 10 are inevitably opposite to each other.
  • the present invention is not limited to the above-mentioned examples, and various improvements and changes are made without departing from the gist of the present invention. Of course, it is also good.
  • Piezoelectric film 12 Piezoelectric layer 14 1st electrode layer 14a, 16a Beauty 16 2nd electrode layer 18 1st protective layer 18a, 20a Through hole 20 2nd protective layer 24
  • Polymer matrix 26 Piezoelectric particles 32 1st connection member 33 2nd connection member 34 1st lead electrode 36 2nd lead electrode 40 1st laminate 42 2nd laminate 46 Piezoelectric laminate 50, 52 Interlayer insulation member 56 1st electrode Insulation member 58 2nd electrode Insulation member 60 Piezoelectric speaker 62 Case 64 Viscoelastic support 68 Frame

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  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
PCT/JP2020/037813 2019-10-16 2020-10-06 圧電フィルムおよび圧電フィルムの製造方法 Ceased WO2021075308A1 (ja)

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CN202080070616.XA CN114521297A (zh) 2019-10-16 2020-10-06 压电薄膜及压电薄膜的制造方法
JP2021552334A JP7390390B2 (ja) 2019-10-16 2020-10-06 圧電フィルムおよび圧電フィルムの製造方法
EP20877551.0A EP4047671A4 (en) 2019-10-16 2020-10-06 PIEZOELECTRIC FILM AND METHOD OF MAKING A PIEZOELECTRIC FILM
KR1020227011197A KR20220056865A (ko) 2019-10-16 2020-10-06 압전 필름 및 압전 필름의 제조 방법
US17/717,226 US12575327B2 (en) 2019-10-16 2022-04-11 Piezoelectric film capable of preventing short circuit caused by electrode protruding from piezoelectric layer, and method of producing piezoelectric film

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KR102867807B1 (ko) * 2020-12-09 2025-10-01 엘지디스플레이 주식회사 장치
KR102904853B1 (ko) * 2020-12-22 2025-12-24 엘지디스플레이 주식회사 진동 장치 및 이를 포함하는 장치
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KR20230103751A (ko) * 2021-12-31 2023-07-07 엘지디스플레이 주식회사 장치 및 이를 포함하는 운송 장치

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