WO2021045385A3 - 금속 질화물 박막의 형성 방법 - Google Patents
금속 질화물 박막의 형성 방법 Download PDFInfo
- Publication number
- WO2021045385A3 WO2021045385A3 PCT/KR2020/009806 KR2020009806W WO2021045385A3 WO 2021045385 A3 WO2021045385 A3 WO 2021045385A3 KR 2020009806 W KR2020009806 W KR 2020009806W WO 2021045385 A3 WO2021045385 A3 WO 2021045385A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- metal nitride
- thin film
- metal
- nitride thin
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
본 발명의 일 실시예에 의하면, 금속 질화물 박막의 형성 방법은, 기판에 금속 전구체를 공급하여 상기 기판의 표면에 선택적으로 증착시키는 증착 단계; 상기 기판에 할로젠 가스를 공급하여 상기 기판의 표면에 금속 할로젠 화합물을 형성하는 할로젠 처리 단계; 그리고 상기 기판에 질소 소스를 공급하여 상기 금속 할로젠 화합물과 반응시키고 금속 질화물을 형성하는 질화 단계를 포함한다.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/640,330 US20220333243A1 (en) | 2019-09-03 | 2020-07-24 | Method for forming metal nitride thin film |
CN202080062228.7A CN114341396A (zh) | 2019-09-03 | 2020-07-24 | 金属氮化物薄膜的形成方法 |
JP2022514271A JP2022546822A (ja) | 2019-09-03 | 2020-07-24 | 金属窒化物薄膜の形成方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2019-0108609 | 2019-09-03 | ||
KR1020190108609A KR20210027770A (ko) | 2019-09-03 | 2019-09-03 | 금속 질화물 박막의 형성 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2021045385A2 WO2021045385A2 (ko) | 2021-03-11 |
WO2021045385A3 true WO2021045385A3 (ko) | 2021-05-20 |
Family
ID=74852027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2020/009806 WO2021045385A2 (ko) | 2019-09-03 | 2020-07-24 | 금속 질화물 박막의 형성 방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220333243A1 (ko) |
JP (1) | JP2022546822A (ko) |
KR (1) | KR20210027770A (ko) |
CN (1) | CN114341396A (ko) |
WO (1) | WO2021045385A2 (ko) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000024977A (ko) * | 1998-10-07 | 2000-05-06 | 닛폰 파이오닉스 가부시키가이샤 | 질화막의 제조방법 |
JP2007231354A (ja) * | 2006-02-28 | 2007-09-13 | Phyzchemix Corp | 多元金属化合物膜の作製方法及び多元金属化合物膜作製装置 |
KR20100075597A (ko) * | 2007-10-04 | 2010-07-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 금속유기 화학기상증착 및 하이드라이드 기상 에피택시를 이용한 ⅲⅴ 질화물 필름의 성장 중에 기생형 입자의 형성을 억제하는 방법 |
KR101721931B1 (ko) * | 2015-09-30 | 2017-04-03 | (주)아이작리서치 | 원자층 증착 장치 및 원자층 증착 방법 |
KR20170073947A (ko) * | 2015-12-21 | 2017-06-29 | 삼성전자주식회사 | 탄탈럼 화합물과 이를 이용한 박막 형성 방법 및 집적회로 소자의 제조 방법 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR0312064A (pt) | 2002-06-26 | 2005-08-09 | Du Pont | Genes que codificam proteìnas com atividade pesticida |
-
2019
- 2019-09-03 KR KR1020190108609A patent/KR20210027770A/ko not_active IP Right Cessation
-
2020
- 2020-07-24 US US17/640,330 patent/US20220333243A1/en not_active Abandoned
- 2020-07-24 WO PCT/KR2020/009806 patent/WO2021045385A2/ko active Application Filing
- 2020-07-24 CN CN202080062228.7A patent/CN114341396A/zh not_active Withdrawn
- 2020-07-24 JP JP2022514271A patent/JP2022546822A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000024977A (ko) * | 1998-10-07 | 2000-05-06 | 닛폰 파이오닉스 가부시키가이샤 | 질화막의 제조방법 |
JP2007231354A (ja) * | 2006-02-28 | 2007-09-13 | Phyzchemix Corp | 多元金属化合物膜の作製方法及び多元金属化合物膜作製装置 |
KR20100075597A (ko) * | 2007-10-04 | 2010-07-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 금속유기 화학기상증착 및 하이드라이드 기상 에피택시를 이용한 ⅲⅴ 질화물 필름의 성장 중에 기생형 입자의 형성을 억제하는 방법 |
KR101721931B1 (ko) * | 2015-09-30 | 2017-04-03 | (주)아이작리서치 | 원자층 증착 장치 및 원자층 증착 방법 |
KR20170073947A (ko) * | 2015-12-21 | 2017-06-29 | 삼성전자주식회사 | 탄탈럼 화합물과 이를 이용한 박막 형성 방법 및 집적회로 소자의 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
CN114341396A (zh) | 2022-04-12 |
WO2021045385A2 (ko) | 2021-03-11 |
JP2022546822A (ja) | 2022-11-09 |
US20220333243A1 (en) | 2022-10-20 |
KR20210027770A (ko) | 2021-03-11 |
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