WO2021044525A1 - X線発生装置およびx線撮影装置 - Google Patents
X線発生装置およびx線撮影装置 Download PDFInfo
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- WO2021044525A1 WO2021044525A1 PCT/JP2019/034640 JP2019034640W WO2021044525A1 WO 2021044525 A1 WO2021044525 A1 WO 2021044525A1 JP 2019034640 W JP2019034640 W JP 2019034640W WO 2021044525 A1 WO2021044525 A1 WO 2021044525A1
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- insulating member
- ray generator
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/04—Mounting the X-ray tube within a closed housing
- H05G1/06—X-ray tube and at least part of the power supply apparatus being mounted within the same housing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
- G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/20—Sources of radiation
Definitions
- the present invention relates to an X-ray generator and an X-ray imaging device.
- Patent Document 1 has an insulating container for accommodating an X-ray generating tube and a grounded storage container for accommodating an insulating container, and an insulating liquid is arranged between the insulating container and the storage container.
- the X-ray generator is described.
- the insulating component arranged between the X-ray generating portion and the storage container for accommodating the X-ray generating portion may have a shape such as a box shape or a tubular shape.
- a method of inexpensively manufacturing such an insulating component a method of joining a plurality of members with an adhesive material is advantageous.
- a discharge that penetrates the adhesive material can occur.
- the present invention provides an X-ray generator having an advantageous structure for suppressing the generation of electric discharge through an adhesive material.
- One aspect of the present invention relates to an X-ray generator, wherein the X-ray generator includes an X-ray generator, a storage container for accommodating the X-ray generator, an inner surface of the storage container, and the X-ray generator.
- the insulating component includes an insulating component arranged between at least a part of the portion, the insulating component includes a first insulating member and a second insulating member, and the first insulating member has a first surface.
- a step is formed by the first surface and the second surface, including a first portion and a second portion having a second surface, the second portion is thinner than the first portion, and the second portion is formed.
- the adhesive surface of the insulating member and the second surface of the first insulating member are bonded by an adhesive material, and the flatness of the second surface is better than the flatness of the first surface.
- the schematic diagram which shows the structure of the X-ray generator of one Embodiment The figure which shows typically the basic structure of the insulating component. The figure which shows the structure of the insulating component of 1st Embodiment. The figure which shows the structure of the insulating component of 2nd Embodiment. The figure which shows the structure of the insulating component of 3rd Embodiment. The figure which shows the structure of the insulating component of 4th Embodiment. The figure which shows the structure of the insulating component of 5th Embodiment. The figure which shows the structure of the insulating component of 6th Embodiment. The figure which shows the structure of the insulating component of 7th Embodiment. The figure which shows the structure of the X-ray image pickup apparatus of one Embodiment.
- FIG. 1 schematically shows the configuration of the X-ray generator 100 of one embodiment.
- the X-ray generator 100 is an insulator arranged between the X-ray generator 10, the storage container 20 for accommodating the X-ray generator 10, the inner surface of the storage container 20, and at least a part of the X-ray generator 10. It may include a component 50.
- the X-ray generation unit 10 may include an X-ray generation tube 12 and a voltage supply unit 14 that supplies a voltage to the X-ray generation tube 12 via a cable 16.
- the X-ray generator tube 12 may have a cathode 121 including an electron emitting part that emits electrons, and an anode 122 including a target that generates X-rays by collision of electrons emitted from the electron emitting part.
- the storage container 20 is grounded, and the anode 122 of the X-ray generating tube can be electrically connected to the storage container 20.
- the voltage supply unit 14 can supply a negative potential to the cathode 121 of the X-ray generation tube 12 via the cable 16.
- the cable 16 may include a conductive member and an insulating material that covers the conductive member, but may not have the insulating material.
- the space between the storage container 20 and the insulating component 50 and the space between the insulating component 50 and the X-ray generating unit 10 can be filled with an insulating liquid (for example, insulating oil).
- the cathode 121 of the X-ray generating unit 10 and the storage container 20 are electrically insulated from each other.
- the insulating component 50 can form a container that surrounds the X-ray generating unit 10.
- the insulating component 50 may include a first container 30 having a first opening and a second container 40 having a second opening.
- the second container 40 may be arranged so as to accommodate a part of the first container 30 in the second opening and to cover the first opening of the first container 30.
- the first container 30 may be configured by joining a plurality of insulating members 31, 32, 33 with an adhesive material AM.
- the second container 40 can be configured by joining a plurality of insulating members 41 and 42 with an adhesive material AM.
- the insulating members 31, 32, 33, 41, 42 are preferably resin-impregnated glass cloth laminates (for example, laminates, laminates) molded by heating and pressure molding.
- the resin-impregnated glass cloth laminate can be constructed, for example, by laminating or winding a member (prepreg) impregnated with a resin such as epoxy resin or phenol resin on a glass nonwoven fabric, and then performing heat and pressure molding. ..
- the insulating members 31, 32, 33, 41, 42 may be made of, for example, glass epoxy. Insulating members 31,32,33,41,42 preferably has a 1 ⁇ 10 5 ⁇ m or more insulating the volume resistivity at 25 ° C..
- the insulating member exemplified as the insulating member 31, 32, 33, 41, 42 may be a plate-shaped member or a tubular member.
- the plate-shaped member has two main surfaces parallel to the extending direction of the glass non-woven fabric and one or more end faces (square plate-shaped) parallel to the laminating direction of the glass non-woven fabric (direction orthogonal to the extending direction of the glass non-woven fabric).
- the member may have four end faces).
- the tubular member has two main surfaces (outer surface and inner surface) along the extending direction of the glass nonwoven fabric and two end faces parallel to the laminating direction of the glass nonwoven fabric (direction orthogonal to the extending direction of the glass nonwoven fabric). Can have.
- the extending direction of the glass nonwoven fabric is indicated by a double-headed arrow.
- FIG. 2 schematically shows the basic structure of the insulating component 50.
- the insulating component 50 may include a first insulating member 1210 and a second insulating member 1220 as a plurality of insulating members.
- the first insulating member 1210 has a second surface 1212 that forms a step between the first portion 1215 having the first surface 1211 and the first surface 1211, and is thinner than the first portion 1215.
- Two parts 1216 and may be included.
- the first surface may be, for example, a material surface of a commercially available Gala Epo.
- the adhesive surface of the second insulating member 1220 (end surface 1221 in the example of FIG. 2) and the second surface 1212 of the first insulating member 1210 are bonded by the adhesive material AM.
- the flatness of the second surface 1212 is better than the flatness of the first surface 1211.
- the flatness of the adhesive surface (end surface 1221) of the second insulating member 1220 is preferably better than the flatness of the first surface 1211 of the first insulating member 1210.
- the flatness of a surface means the magnitude of the deviation amount of the surface from the geometrically correct plane, and good flatness means that the magnitude indicating the flatness (the magnitude of the deviation amount). It means small.
- FIG. 3 shows the configuration of a part of the insulating component 50 of the first embodiment.
- the coupling structure of the insulating member 41 and the insulating member 42 is typically illustrated, but the example of this coupling structure can also be applied to the coupling structure of other insulating members.
- the insulating member 41 is referred to as a first insulating member and the insulating member 42 is referred to as a second insulating member for convenience.
- the insulating component 50 may include a first insulating member 41 and a second insulating member 42.
- the first insulating member 41 has a second surface 412 that forms a step between the first portion 415 having the first surface 411 and the first surface 411, and is thinner than the first portion 415. It may include a portion 416 and.
- the adhesive surface of the second insulating member 42 (end surface 429 in the example of FIG. 3) and the second surface 412 of the first insulating member 41 are bonded by the adhesive material AM.
- the flatness of the second surface 412 is better than the flatness of the first surface 411.
- the flatness of the adhesive surface (end surface 429) of the second insulating member 42 is preferably better than the flatness of the first surface 411 of the first insulating member 41.
- the insulating performance of the adhesive material AM is lower than the insulating performance of the first insulating member 41 and the second insulating member 42.
- the adhesive material AM may be, for example, an epoxy resin or a phenol resin, as long as it is an insulating solid at least in a cured state.
- the first surface 411 of the first insulating member 41 constitutes one main surface of the first insulating member 41.
- the first insulating member 41 is an insulating member that can be made of a resin-impregnated glass cloth laminate, and has a warp and / or a non-uniform thickness.
- the second surface 412 of the first insulating member 41 is formed by processing a material for manufacturing the first insulating member 41. Therefore, the flatness of the second surface 412 is better than the flatness of the first surface 411 forming the main surface of the first insulating member 41.
- the second surface 412 may be referred to as a notched surface.
- the end surface 429 which is an adhesive surface of the second insulating member 42, is formed by cutting a material for manufacturing the second insulating member 42. Therefore, the flatness of the end surface 429 of the second insulating member 42 is better than the flatness of the first surface 411 forming the main surface of the first insulating member 41.
- the configuration in which the second surface 412 of the first insulating member 41 and the adhesive surface (end surface 429) of the second insulating member 42 are bonded by the adhesive material AM is used to reduce the thickness of the adhesive material AM and to bond the adhesive material AM. It is advantageous for suppressing the mixing of air bubbles into the material AM. This has the effect of suppressing the discharge of the insulating component 50 via the adhesive material AM.
- a structure having a step between the first surface 411 and the second surface 412 is advantageous for increasing the creepage distance, which can contribute to improving the insulation performance.
- the adhesive material AM is used to compensate for the poor flatness of the first surface 411.
- the thickness needs to be increased, which can result in poor insulation performance. It can also induce the inclusion of air bubbles. Therefore, in such a comparative example, an electric discharge may occur via the adhesive material AM.
- FIG. 4 shows the configuration of a part of the insulating component 50 of the second embodiment.
- the coupling structure of the insulating member 41 and the insulating member 42 is typically illustrated, but the example of this coupling structure can also be applied to the coupling structure of other insulating members.
- the insulating member 41 is referred to as a first insulating member and the insulating member 42 is referred to as a second insulating member for convenience.
- the second embodiment is a modification of the first embodiment, and matters not mentioned as the second embodiment follow the first embodiment.
- the first insulating member 41 has a third surface 413 forming a step between the first portion 415 and the second portion 416 and the second surface 412, and is thicker than the second portion 416. It has three parts 417.
- the second portion 416 is arranged between the first portion 415 and the third portion 417 so as to form a recess of the first insulating member 41.
- FIG. 5 shows the configuration of a part of the insulating component 50 of the third embodiment.
- the configuration in which the insulating member 33 has four insulating members 33a, 33b, 33c, and 33d bonded by the adhesive material AM is illustrated.
- the insulating member 33a includes a first portion having a first surface 33a1 and a second portion having a second surface 33a2, and the adhesive surface (end surface) of the insulating member 33b and the first portion of the insulating member 33a.
- the two surfaces 33a2 are bonded by the adhesive material AM.
- the insulating member 33b includes a first portion having a first surface and a second portion having a second surface, and has an adhesive surface (end surface) of the insulating member 33c and a second surface of the insulating member 33b. Is bonded by the adhesive material AM.
- the insulating member 33c includes a first portion having a first surface and a second portion having a second surface, and has an adhesive surface (end surface) of the insulating member 33d and a second surface of the insulating member 33c. Is bonded by the adhesive material AM.
- the insulating member 33d includes a first portion having a first surface and a second portion having a second surface, and the adhesive surface (end surface) of the insulating member 33a and the second surface of the insulating member 33d. Is bonded by the adhesive material AM.
- FIG. 6 shows the configuration of a part of the insulating component 50 of the fourth embodiment.
- the configuration in which the insulating member 33 has four insulating members 33a, 33b, 33c, and 33d bonded by the adhesive material AM is illustrated.
- the insulating member 33a includes one first portion having the first surface 33a1 and two second portions having the second surface 33a2, and the adhesive surfaces of the insulating members 33b and 33d ( The end surface) and the two second surfaces 33a2 of the insulating member 33a are bonded by the adhesive material AM.
- the insulating member 33c includes one first portion having a first surface and two second portions having a second surface, and is insulated from the adhesive surface (end surface) of the insulating members 33b and 33d.
- the two second surfaces of the member 33c are joined by the adhesive material AM.
- the third and fourth embodiments can also be applied to the configuration of the insulating member 42.
- the insulating member 42 according to the first embodiment shown in FIG. 3 is configured by connecting four insulating members 33a, 33b, 33c, 33d with an adhesive material AM as shown in FIG. 5 or 6. It can be replaced with a frame-shaped insulating member.
- the end surface of the frame-shaped insulating member as the second insulating member 42 can be strongly pressed against the second surface 412 of the first insulating member 41 via the adhesive material AM. This is advantageous for reducing the thickness of the adhesive material AM and for suppressing the mixing of air bubbles into the adhesive material AM. This has the effect of suppressing the discharge of the insulating component 50 via the adhesive material AM.
- FIG. 7 shows the configuration of a part of the insulating component 50 of the fifth embodiment.
- the configuration in which the insulating member 33 has four insulating members 33a, 33b, 33c, and 33d bonded by the adhesive material AM is illustrated.
- the fifth embodiment can also be applied to the configuration of the insulating member 42.
- the insulating member 33a has one first portion having a first surface 33a1, two second portions having a second surface 33a2, and two third portions having a third surface 33a3.
- the adhesive surface (end surface) of the insulating members 33b and 33d and the two second surfaces 33a2 of the insulating member 33a are bonded by the adhesive material AM.
- the insulating member 33c includes one first portion having a first surface, two second portions having a second surface, and two third portions having a third surface, as in the second embodiment.
- the adhesive surface (end surface) of the insulating members 33b and 33d and the two second surfaces of the insulating member 33c are bonded by the adhesive material AM.
- FIG. 8 shows the configuration of a part of the insulating component 50 of the sixth embodiment.
- the coupling structure of the insulating member 31 and the insulating member 32 is typically illustrated, but the example of this coupling structure can also be applied to the coupling structure of other insulating members.
- the insulating member 31 is referred to as a first insulating member and the insulating member 32 is referred to as a second insulating member for convenience.
- the insulating component 50 may include a first insulating member 31 and a second insulating member 32.
- the first insulating member 31 may be a plate-shaped member having an opening through which the cable 16 passes.
- the second insulating member 32 may be a cylindrical member such as a cylindrical member.
- the first insulating member 41 has a first portion having a first surface 311 and a second portion having a second surface 312 forming a step between the first surface 311 and a thickness thinner than the first portion. Can be included.
- the adhesive surface of the second insulating member 42 (end surface 329 in the example of FIG. 8) and the second surface 312 of the first insulating member 31 are bonded by the adhesive material AM.
- the flatness of the second surface 312 is better than the flatness of the first surface 311.
- the flatness of the adhesive surface (end surface 329) of the second insulating member 32 is preferably better than the flatness of the first surface 311 of the first insulating member 31.
- the insulating performance of the adhesive material AM is lower than the insulating performance of the first insulating member 31 and the second insulating member 32.
- the adhesive material AM can be, for example, an epoxy resin or a phenol resin.
- the first surface 311 of the first insulating member 31 constitutes one main surface of the first insulating member 31.
- the first insulating member 31 is an insulating member that can be made of a resin-impregnated glass cloth laminate, and has a warp and / or a non-uniform thickness.
- the second surface 312 of the first insulating member 31 is formed by processing a material for manufacturing the first insulating member 31. Therefore, the flatness of the second surface 312 is better than the flatness of the first surface 311 constituting the main surface of the first insulating member 31.
- the end surface 329 which is an adhesive surface of the second insulating member 32, is formed by cutting a material for manufacturing the second insulating member 32. Therefore, the flatness of the end surface 329 of the second insulating member 32 is better than the flatness of the first surface 311 constituting the main surface of the first insulating member 31.
- the configuration in which the second surface 312 of the first insulating member 31 and the adhesive surface (end surface 329) of the second insulating member 32 are bonded by the adhesive material AM is used to reduce the thickness of the adhesive material AM and to bond the adhesive material AM. It is advantageous for suppressing the mixing of air bubbles into the material AM. This has the effect of suppressing the discharge of the insulating component 50 via the adhesive material AM.
- a structure having a step between the first surface 311 and the second surface 312 is advantageous for increasing the creepage distance, which can contribute to improving the insulation performance.
- FIG. 9 shows the configuration of a part of the insulating component 50 of the seventh embodiment.
- the coupling structure of the insulating member 31 and the insulating member 32 is typically illustrated, but the example of this coupling structure can also be applied to the coupling structure of other insulating members.
- the insulating member 31 is referred to as a first insulating member and the insulating member 32 is referred to as a second insulating member for convenience.
- the seventh embodiment is a modification of the sixth embodiment.
- the adhesive surface of the second insulating member 32 which is bonded to the second surface 312 of the first insulating member 31 by the adhesive member AM, is provided in the notch 327 provided in the second insulating member 32.
- the surface is 328.
- the flatness of the surface 328 is preferably better than the flatness of the first surface 311 of the first insulating member 31.
- the flatness of the surface 328 is preferably better than the flatness of the end surface 329 of the second insulating member 32.
- the configuration of the seventh embodiment may be applied to the first to fifth embodiments. That is, the adhesive surface may be arranged in the notch portion instead of the end surface of the second insulating member.
- FIG. 10 shows the configuration of the X-ray imaging apparatus 200 of one embodiment.
- the X-ray imaging device 200 may include an X-ray generator 100 and an X-ray detection device 210 that detects X-rays 192 emitted from the X-ray generator 100 and transmitted through the object 191.
- the X-ray imaging device 200 may further include a control device 220 and a display device 230.
- the X-ray detector 210 may include an X-ray detector 212 and a signal processing unit 214.
- the control device 220 can control the X-ray generator 100 and the X-ray detector 210.
- the X-ray detector 212 detects or images the X-ray 192 emitted from the X-ray generator 100 and transmitted through the object 191.
- the signal processing unit 214 may process the signal output from the X-ray detector 212 and supply the processed signal to the control device 220.
- the control device 220 can display an image on the display device 230 based on the signal supplied
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Abstract
Description
Claims (14)
- X線発生部と、
前記X線発生部を収納する収納容器と、
前記収納容器の内面と前記X線発生部の少なくとも一部との間に配置された絶縁部品と、を備え、
前記絶縁部品は、第1絶縁部材と、第2絶縁部材とを含み、前記第1絶縁部材は、第1面を有する第1部分と第2面を有する第2部分とを含み、前記第1面と前記第2面により段差が形成され、前記第2部分は前記第1部分よりも厚さが薄く、
前記第2絶縁部材の接着面と前記第1絶縁部材の前記第2面とが接着材料によって結合され、
前記第2面の平面度は、前記第1面の平面度よりも良い、
ことを特徴とするX線発生装置。 - 前記接着面の平面度は、前記第1面の平面度よりも良い、
ことを特徴とする請求項1に記載のX線発生装置。 - 前記第1絶縁部材は、前記第2面との間に段差を形成する第3面を有し前記第2部分よりも厚さが厚い第3部分を有し、前記第2部分は、前記第1絶縁部材の凹部を構成するように前記第1部分と前記第3部分との間に配置されている、
ことを特徴とする請求項1又は2に記載のX線発生装置。 - 前記第1絶縁部材は、板状部材である、
ことを特徴とする請求項1乃至3のいずれか1項に記載のX線発生装置。 - 前記第2絶縁部材は、板状部材である、
ことを特徴とする請求項1乃至4のいずれか1項に記載のX線発生装置。 - 前記第2絶縁部材は、筒状部材である、
ことを特徴とする請求項1乃至4のいずれか1項に記載のX線発生装置。 - 前記第1絶縁部材は、樹脂を含浸させたガラス布積層体で構成され、前記第2面は、前記ガラス布積層体の積層方向に直交している、
ことを特徴とする請求項1乃至6のいずれか1項に記載のX線発生装置。 - 前記第2絶縁部材は、樹脂を含浸させたガラス布積層体で構成され、前記接着面は、前記第2絶縁部材を構成する前記ガラス布積層体の積層方向と平行である、
ことを特徴とする請求項7に記載のX線発生装置。 - 前記X線発生部は、X線発生管を含み、前記X線発生管は、電子放出部を含む陰極、および、前記電子放出部から放射された電子が衝突することによってX線を発生するターゲットを含む陽極を有する、
ことを特徴とする請求項1乃至8のいずれか1項に記載のX線発生装置。 - 前記X線発生部は、前記X線発生管に電圧を供給する電圧供給部を更に含む、
ことを特徴とする請求項9に記載のX線発生装置。 - 前記接着材料は、エポキシ樹脂である、
ことを特徴とする請求項1乃至10のいずれか1項に記載のX線発生装置。 - 前記第2絶縁部材の前記接着面は、前記第2絶縁部材の端面である、
ことを特徴とする請求項1乃至11のいずれか1項に記載のX線発生装置。 - 前記第2絶縁部材は、切り欠き部を有し、前記第2絶縁部材の前記接着面は、前記切り欠き部に設けられた面である、
ことを特徴とする請求項1乃至11のいずれか1項に記載のX線発生装置。 - 請求項1乃至13のいずれか1項に記載のX線発生装置と、
前記X線発生装置から放射され物体を透過したX線を検出するX線検出装置と、
を備えることを特徴とするX線撮像装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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PCT/JP2019/034640 WO2021044525A1 (ja) | 2019-09-03 | 2019-09-03 | X線発生装置およびx線撮影装置 |
CN201980099916.8A CN114303222B (zh) | 2019-09-03 | 2019-09-03 | X射线产生装置及x射线拍摄装置 |
KR1020227008129A KR102496079B1 (ko) | 2019-09-03 | 2019-09-03 | X선 발생 장치 및 x선 촬영 장치 |
JP2020508068A JP6704100B1 (ja) | 2019-09-03 | 2019-09-03 | X線発生装置およびx線撮影装置 |
EP19944554.5A EP4006950A4 (en) | 2019-09-03 | 2019-09-03 | X-RAY GENERATOR AND X-RAY IMAGING DEVICE |
TW109129973A TWI746143B (zh) | 2019-09-03 | 2020-09-02 | X射線產生裝置及x射線拍攝裝置 |
US17/194,767 US11140763B2 (en) | 2019-09-03 | 2021-03-08 | X-ray generation apparatus and X-ray imaging apparatus |
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PCT/JP2019/034640 WO2021044525A1 (ja) | 2019-09-03 | 2019-09-03 | X線発生装置およびx線撮影装置 |
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US (1) | US11140763B2 (ja) |
EP (1) | EP4006950A4 (ja) |
JP (1) | JP6704100B1 (ja) |
KR (1) | KR102496079B1 (ja) |
CN (1) | CN114303222B (ja) |
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WO2023188335A1 (ja) * | 2022-03-31 | 2023-10-05 | キヤノンアネルバ株式会社 | X線発生装置およびx線撮像装置 |
JP7486694B1 (ja) | 2023-01-25 | 2024-05-17 | キヤノンアネルバ株式会社 | X線発生装置およびx線撮像装置 |
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JP7333884B1 (ja) * | 2022-03-31 | 2023-08-25 | キヤノンアネルバ株式会社 | 電気部品、x線発生装置およびx線撮像装置 |
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JPH10228875A (ja) * | 1997-02-14 | 1998-08-25 | Hitachi Medical Corp | 金属外囲器回転陽極x線管 |
JP2003142567A (ja) * | 2001-10-31 | 2003-05-16 | Kyocera Corp | ウエハ載置ステージ |
JP2016100290A (ja) | 2014-11-26 | 2016-05-30 | キヤノン株式会社 | X線発生装置及びそれを用いたx線撮影システム |
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DE19824008C2 (de) * | 1998-05-29 | 2000-04-13 | Juergen Ziehm | Röntgenstrahler |
EP2233607A1 (en) * | 2000-12-12 | 2010-09-29 | Konica Corporation | Dielectric coated electrode, and plasma discharge apparatus using the electrode |
US7145987B2 (en) * | 2003-07-24 | 2006-12-05 | Nikon Corporation | X-ray-generating devices and exposure apparatus comprising same |
JP2006202671A (ja) * | 2005-01-24 | 2006-08-03 | Ushio Inc | 極端紫外光光源装置及び極端紫外光光源装置で発生するデブリの除去方法 |
KR101289502B1 (ko) * | 2005-10-07 | 2013-07-24 | 하마마츠 포토닉스 가부시키가이샤 | X선관 및 비파괴 검사 장치 |
GB2517671A (en) | 2013-03-15 | 2015-03-04 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target and rotary vacuum seal |
JP6381269B2 (ja) * | 2014-04-21 | 2018-08-29 | キヤノン株式会社 | ターゲットおよび前記ターゲットを備えるx線発生管、x線発生装置、x線撮影システム |
JP6573380B2 (ja) * | 2015-07-27 | 2019-09-11 | キヤノン株式会社 | X線発生装置及びx線撮影システム |
JP6525941B2 (ja) * | 2016-10-28 | 2019-06-05 | キヤノン株式会社 | X線発生装置及び、x線撮影システム |
-
2019
- 2019-09-03 EP EP19944554.5A patent/EP4006950A4/en active Pending
- 2019-09-03 CN CN201980099916.8A patent/CN114303222B/zh active Active
- 2019-09-03 JP JP2020508068A patent/JP6704100B1/ja active Active
- 2019-09-03 KR KR1020227008129A patent/KR102496079B1/ko active IP Right Grant
- 2019-09-03 WO PCT/JP2019/034640 patent/WO2021044525A1/ja unknown
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2020
- 2020-09-02 TW TW109129973A patent/TWI746143B/zh active
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2021
- 2021-03-08 US US17/194,767 patent/US11140763B2/en active Active
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JPH10228875A (ja) * | 1997-02-14 | 1998-08-25 | Hitachi Medical Corp | 金属外囲器回転陽極x線管 |
JP2003142567A (ja) * | 2001-10-31 | 2003-05-16 | Kyocera Corp | ウエハ載置ステージ |
JP2016100290A (ja) | 2014-11-26 | 2016-05-30 | キヤノン株式会社 | X線発生装置及びそれを用いたx線撮影システム |
Non-Patent Citations (1)
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See also references of EP4006950A4 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023188335A1 (ja) * | 2022-03-31 | 2023-10-05 | キヤノンアネルバ株式会社 | X線発生装置およびx線撮像装置 |
JP7430296B1 (ja) | 2022-03-31 | 2024-02-09 | キヤノンアネルバ株式会社 | X線発生装置およびx線撮像装置 |
JP7486694B1 (ja) | 2023-01-25 | 2024-05-17 | キヤノンアネルバ株式会社 | X線発生装置およびx線撮像装置 |
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JP6704100B1 (ja) | 2020-06-03 |
TW202118353A (zh) | 2021-05-01 |
JPWO2021044525A1 (ja) | 2021-09-30 |
EP4006950A4 (en) | 2022-11-16 |
CN114303222B (zh) | 2022-07-08 |
US20210212188A1 (en) | 2021-07-08 |
EP4006950A1 (en) | 2022-06-01 |
KR102496079B1 (ko) | 2023-02-06 |
TWI746143B (zh) | 2021-11-11 |
KR20220037526A (ko) | 2022-03-24 |
US11140763B2 (en) | 2021-10-05 |
CN114303222A (zh) | 2022-04-08 |
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