WO2021015039A1 - 電子銃装置 - Google Patents

電子銃装置 Download PDF

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Publication number
WO2021015039A1
WO2021015039A1 PCT/JP2020/027255 JP2020027255W WO2021015039A1 WO 2021015039 A1 WO2021015039 A1 WO 2021015039A1 JP 2020027255 W JP2020027255 W JP 2020027255W WO 2021015039 A1 WO2021015039 A1 WO 2021015039A1
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WO
WIPO (PCT)
Prior art keywords
liquid
electron gun
electron
cover tube
gun device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/027255
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English (en)
French (fr)
Japanese (ja)
Inventor
安田　洋
義久 大饗
達哉 柴岡
英一 村田
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PARAM CORP
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PARAM CORP
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Filing date
Publication date
Application filed by PARAM CORP filed Critical PARAM CORP
Priority to US17/434,833 priority Critical patent/US11295925B2/en
Priority to EP20843228.6A priority patent/EP3923313B1/en
Priority to JP2021533955A priority patent/JP7445993B2/ja
Priority to KR1020217027088A priority patent/KR102425178B1/ko
Priority to CN202080017998.XA priority patent/CN113678224B/zh
Publication of WO2021015039A1 publication Critical patent/WO2021015039A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H01J29/485—Construction of the gun or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/04—Liquid electrodes, e.g. liquid cathode
    • H01J1/05—Liquid electrodes, e.g. liquid cathode characterised by material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/04—Liquid electrodes, e.g. liquid cathode
    • H01J1/06—Containers for liquid-pool electrodes; Arrangement or mounting thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/04—Liquid electrodes, e.g. liquid cathode
    • H01J1/10—Cooling, heating, circulating, filtering, or controlling level of liquid in a liquid-pool electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3104—Welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
    • H01J9/042—Manufacture, activation of the emissive part

Definitions

  • the present invention relates to an electron gun device used in an electron beam drawing device, an X-ray generator, an electron beam welder, an electron microscope, and the like.
  • An electron gun is a source that generates an electron beam and is used for the following purposes.
  • Electron beam drawing equipment Used for pattern formation on glass dry plates in semiconductor manufacturing factories or mask manufacturing factories of light exposure equipment. Since there is no other technology that can generate patterns, an electron gun that generates an electron beam is indispensable. The world market is about 20 units a year.
  • Electron beam pattern direct drawing device for research and development Electron beam direct drawing is used for various purposes. Used for semiconductor trials and fine MEMS prototypes. It is about several hundred units a year.
  • MEMS is an abbreviation for the English word “Micro Electrical Mechanical Systems,” which means “micro electromechanical system,” and is used for semiconductor silicon substrates, glass substrates, organic materials, and sensors and actuators for mechanical element parts.
  • Electron guns are indispensable for various medical and industrial X-ray generators.
  • X-ray equipment is used in many fields such as human body transmission photography in hospitals, CT equipment, testing of the internal structure of devices for industrial use, and inspection of baggage.
  • Electron beam welder or three-dimensional molding equipment Used in precision welding for applications such as joining metals of different materials inside a vacuum. In recent years, electron beams have been used in three-dimensional molding devices and the like.
  • Electron microscope It is used as an electron gun for various electron microscopes for semiconductor inspection and observation and for various research and development. There is a market of hundreds of billions of yen for the entire equipment. However, it is considered that the electron gun device of the present disclosure may not be applicable to an inexpensive device of several million yen or less.
  • Tungsten electron guns are inexpensive (about 1000 yen each) and can be used easily, but they have a lifespan of 1000 hours, and the brightness is as low as 104 A / cm 2 steradian at 50 kV.
  • the operating temperature is around 2500 ° C.
  • the LaB6 electron gun is expensive at 200,000-500,000 yen per piece, but the brightness is as high as 106 A / cm 2 steradian at 50 kV.
  • the evaporation rate of this material varies depending on the operating temperature, and since there is evaporation consumption of several tens of ⁇ m in 1000 hours at 1550 ° C to 1600 ° C, it is important that the higher the brightness, the shorter the life. Had a lot of drawbacks.
  • the LaB6 crystal which is an electron emitting material
  • the temperature of the LaB6 crystal becomes high the evaporation of the LaB6 material accumulates on the surface of the heater for heating, and the resistance value of the heater decreases.
  • the temperature of the LaB6 crystal decreases. There is also the problem of doing.
  • Patent Document 1 Patent No. 5595199
  • the LaB6 crystal at the tip of the electron gun is consumed and the tip surface changes from a flat surface to a round mound-like shape.
  • the uniformity distribution of the irradiated electron beam changes. It has been pointed out that doing so is the biggest problem.
  • the present inventors have had the same problem for more than 30 years.
  • the electron gun according to the present invention is an electron gun device that emits an electron beam by heating it to a high temperature in a vacuum, and the surface of the material that emits the electron beam is a hydride metal of a liquid that is melted during high temperature operation.
  • the liquid hydride is stored as a hydride or pre-hydrogenated liquid metal in a hollow cover tube container that is solid during high temperature operation, and is heated to a high temperature together with the cover tube container to produce hydrogen.
  • the liquefied liquid metal is exposed from the cover tube container, forms a liquid surface in which gravity, electric field, and surface tension of the liquid surface are balanced, and emits electron beams from the exposed hydride liquid metal surface.
  • the electron gun according to the present invention preferably has the following configuration.
  • the material for emitting the electron beam is a liquid that is melted during high-temperature operation and is a metal hydride.
  • the electron emission intensity is increased, and the oxidation of the material when exposed to the atmosphere or oxygen gas is suppressed.
  • Liquid metal hydride is stored in a hollow cover tube container that is solid during high-temperature operation, and is heated to a high temperature together with the container.
  • the hollow cover tube container is made of a material that does not dissolve by chemically reacting with the liquid hydride of the electron beam emitting material at the same high temperature, and the hollow cover tube container has conductivity.
  • 3) Liquid metal By binding hydrogen atoms, atoms reduce the inherent work function of liquid metal atoms and increase electron radioactivity.
  • the vapor pressure of the liquid metal to vacuum at high operating temperatures ranges from 10-6 pascal to 1 pascal.
  • the surface of the hydride liquid metal has a normal vector that coincides with the direction of gravity, and is approximately by gravity and electric field. A horizontal static plane is formed and 5) thermion or field-applied thermion emission is performed in the direction of gravity or in the direction opposite to gravity.
  • the present invention it is possible to increase the brightness of the electron gun, stabilize the heater temperature, and extend the life of the electron gun at the same time.
  • It is a substantially plane of the liquid of the liquid electron emission material when the electron gun in the downward direction of gravity is tilted at an angle of about 45 degrees, and is a diagram showing that there is almost no change from the vertical state, and is an enlarged view of a main part. ..
  • the reason for using gas is that it is easy to control from the outside by the pressure and flow rate of the gas.
  • the type of gas is methane gas CH4. This is the simplest hydrocarbon gas.
  • the LaB6 single crystal usually requires a high temperature of 1500 ° C. or higher, but if the LaB6 crystal is left at 1200 ° C. and methane gas is allowed to flow at 10 -4 pascal so as to fill the inside of the vacuum chamber of the electron gun, it takes 5 hours. Later, it became possible to realize an electron generation intensity of about 1500 ° C. for a LaB6 single crystal.
  • the work function of LaB6 usually drops significantly from 2.1 to 2.0 eV when left at 1200 ° C., so that the electron generation efficiency increases 100 to 1000 times. It means that the temperature can be lowered by 300 ° C.
  • lanthanum Since lanthanum is easily oxidized, when taken out into the atmosphere, the thin hydrogenated lanthanum layer on the LaB6 crystal easily reacts with oxygen in the atmosphere to become lanthanum oxide. Since the work function of lanthanum oxide is as large as 3.5 eV, the efficiency of electron generation is poor even if it is evacuated again.
  • the present inventors have a low work function of the lantern solution due to the steady flow of methane at 1200 ° C. It was determined that it was due to the hydrogenated lantern LaHx by dissolving the lanthanum hydrogen reagent in a hollow cover tube container and confirming that the work functions match.
  • LaHx as used herein refers to one having 1 to 3 hydrogens per lantern. X means that the value cannot be determined.
  • the present inventors heated the ingot mass of the lantern in a vacuum in a tungsten boat and placed it in a hollow cover tube container to liquefy the lantern. Even if this was operated in an electron gun chamber in which hydrogen gas was passed, the same work function 2.1 to 2.0 eV as that of a hydrogenated lantern could be obtained.
  • the liquid level does not change the shape of the liquid surface as the electron emitting substance evaporates, only the total amount of liquid changes.
  • the upper liquid level is controlled to be constant so as to compensate for the decrease in the total amount of evaporating liquid. If a mechanism is provided, the liquid surface can be made a horizontal plane and its height can be kept unchanged.
  • the liquid hydrogenated lantern is stored inside a solid hollow cover tube container. There are holes on the tip electron emission surface of the cover tube container.
  • the cover tube has a substantially cylindrical shape or a trapezoidal cylindrical shape with a tapered tip.
  • the liquid metal material adheres to the side surface of the hollow cover tube container by capillarity when heated at a high temperature, so that the liquid flows downward even though the lowermost surface of the tip of the cover tube is open. It never comes.
  • a lantern liquid as an electron gun
  • the total amount of liquid metal that balances gravity is determined, and a liquid surface due to surface tension, which is a static approximate plane, is created in the open opening on the lowermost surface of the cover tube. ..
  • a voltage can be applied to the electrodes, a voltage can be applied to the liquid surface, and electron emission can be emitted from the liquid surface by heating.
  • the present inventors have no means for preventing the evaporation of the LaB6 crystal at the operating temperature, and cannot escape from the change in the shape of the surface of the solid electron gun, and are finite. Focusing on the unavoidable life of the electron gun, I came up with the idea of liquefying the electron emission surface of the electron gun. If liquefied, it can maintain a constant shape against evaporation of the electron gun surface. The life is usable until the total amount of liquid is exhausted.
  • FIG. 1A and 1B are views showing the first embodiment of the present invention.
  • FIG. 1A describes a liquid electron emission plane electron gun (the liquid surface of the liquid electron emission material 108 is perpendicular to the gravity direction (gravity vector)) that emits an electron beam in the direction opposite to gravity (opposite gravity direction).
  • the liquid electron emitting material 108 is heated by the gripping tool 103 through which an electric current flows and the PG heater 110, and is liquefied at a high temperature of 1000 ° C. to 1600 ° C.
  • the liquid electron gun material is installed by the hollow cover tube container 102 so as not to leak to the outside.
  • Thermoelectrons or thermofield emission currents are emitted as electron beams 107 from the exposed surface above the liquid electron emitting material.
  • the emission current passes through the Wenert electrode 104, which controls the amount of electron emission, and is accelerated by the anode 101 to become the electron beam 107.
  • the liquid electron emitting material evaporates, so that the total amount of liquid decreases.
  • the gear 105 rotates periodically and pushes up the spur gear 113 that meshes with the 105 to move the 111 piston up and down. As a result, the support component 112 of the piston of 111 is pushed up.
  • the potential of the Wenert electrode may be positive or negative. However, the potential of the anode is plus 1 kV to 100 kV or more in order to accelerate the electrons.
  • Reference numeral 114 is a ceramic disk of an electric insulator for fixing the gripping tool 103, 106 is the lower part of the Wenert electrode for controlling the amount of electron emission, and 109 is the direction of gravity.
  • FIG. 1B describes a liquid electron emission plane electron gun that emits an electron beam in the forward direction of gravity (the liquid surface of the liquid electron emission material 108 is perpendicular to the gravity direction (gravity vector)).
  • the liquid electron emitting material 125 is heated by a gripper 117 through which an electric current flows and a PG heater 118, and is liquefied at a high operating temperature of 1000 ° C. to 1600 ° C.
  • the liquid electron gun material is installed by the hollow cover tube container 124 so as not to leak to the outside.
  • Thermoelectrons or thermofield emission currents are emitted as electron beams 120 from the exposed surface below the liquid electron emitting material.
  • the emission current passes through the lower part 116 of the Wenert electrode that controls the amount of electron emission, and is accelerated by the anode 119 to become the electron beam 120.
  • the hollow cover tube container is made of a refractory material having a contact angle with liquid metal of 90 degrees or less when heated at high temperature, and the hollow cover tube is a side surface of an electron beam emitting material whose shape is oriented in the direction of the axis of gravity.
  • the outer shape is a square pillar, a cylinder, or a conical trapezoidal shape with the direction of gravity as the central axis
  • the inner shape is a square pillar, or a cylinder, or an elliptical pillar, or a long cylinder with the direction of gravity as the central axis.
  • the total amount of liquid decreases as the liquid electron emitting material evaporates over time.
  • the shape of the lower surface of the liquid does not change.
  • the statically balanced liquid metal liquid level is formed by the gravity applied to the liquid metal, the electrostatic electric force generated by the surface electric force of the electrode for extracting electrons, and the surface tension of the cover tube container and the liquid metal for a long period of time. A constant electron emitting surface is maintained.
  • the total amount of the liquid electron emitting material 125 has a lower limit and an upper limit.
  • Minimum limit value of the volume of liquid metal when the average radius of the cylindrical or prismatic constituting the bottom of the inner surface of the hollow of the cover tube and R, 4 ⁇ R 3/3, i.e. have a sphere or a capacity that can be attached to the inner surface
  • the amount of liquid is determined so that liquid does not drip from the opening of the bottom cover tube container.
  • the upper limit is that when the maximum radius of the innermost cross section of the inner cross section of the cover tube container is r (cm), the contact angle between the cover tube material and the liquid metal material for electron emission is ⁇ (degrees), and the liquid metal
  • the surface tension is ⁇ LG (dyne / cm)
  • the liquid metal density is ⁇ (5 to 10 with water as 1)
  • the acceleration is 980 (g ⁇ cm / s 2 : cgs unit system), the capacity of the liquid metal.
  • the innermost diameter portion of the cover tube container has a radius of 0.1 mm to 1 mm.
  • the upper surface of the liquid metal is oriented in the direction of gravity, and the liquid surface is perpendicular to gravity.
  • the lower surface of the liquid metal has a plane along the tip cross section of the hollow cover tube, i.e. the cover tube shaft, because the surface tension is dominant in this case as a result of the balance of gravity, electric field and surface force at that position. It becomes a vertical plane. This is true until the cover tube is tilted plus or minus 60 degrees with respect to gravity.
  • a solid high melting point material is used as a bulk material.
  • the bulk material indicates that it is not a thin film of 5 ⁇ m or less.
  • Bulk materials must not chemically react with liquid electron emitting materials such as hydrogenated lanthanum liquids.
  • the lantern liquid forms a compound with the cover tube container material and changes in quality, which changes the work function and significantly reduces the electron emission capacity.
  • the thickness of the hollow cover tube container becomes thinner and thinner, and at the end there is a hole, and the hydrogenated lanthanum liquid leaks to an unexpected surface, forming droplets, and also from these droplets.
  • electrons are emitted, it becomes an electron gun that emits a veryly large amount of electrons.
  • the electrons emitted from the hydrogenated lantern solution that came out of this unexpected hole are electron streams that cannot be used in normal applications.
  • the material of the hollow cover tube container should not be cracked.
  • a material having a high melting point of 2000 ° C. or higher is required.
  • the tensile strength, bending strength, etc. are as high as 500 MPacal or more at high temperatures up to 2000 ° C, and the hardness is 6 or more in Mohs hardness. Hardness is desirable.
  • Materials having such a high melting point that can be used include tungsten, rhenium, tantalum, molybdenum, titanium diboronized, zirconium diboronized, and tungsten boborated.
  • a mixed sintered product of titanium diboride (TiB 2 ), boron nitride (BN) and aluminum nitride (AlN) may be used.
  • borides (borones), nitrides, and oxides (excluding Al 2 O 3 alumina) of metals or transition metals can be used as cover tube container materials. Therefore, these substances can be mainly composed.
  • the bulk material is a conductor, but if it is an insulating substance, it is necessary to attach a conductive film to the outer surface, the bottom surface, the upper surface, and the inner surface of the cover tube.
  • the thickness of the conductive film is 1 ⁇ m to 5 ⁇ m. Since the film on the inner surface comes into contact with the lantern liquid, it may break. Therefore, the lantern liquid must be a bulk (thick and having a constant volume) of a hollow cover tube container to prevent liquid leakage.
  • a single crystal of titanium diboron, zirconium diboron, or hafnium diboron, or tantalum boride or yttrium diboron has the best performance when used as a cover tube. Demonstrated.
  • the life can be extended by 25 times or more and the life can be extended by 5 years or more.
  • 122 is a ceramic disk of an electric insulator that fixes the grip 117, 115 is the upper part of the Wenert electrode for controlling the amount of electron emission, and 121 is the direction of gravity.
  • FIG. 2 is a diagram illustrating the lifetime of the solid LaB6 crystal of the comparative example.
  • the LaB6 crystal 207 before use in FIG. 2 has an irradiation distribution 208 of uniform intensity when heated and an acceleration voltage is applied to emit electrons.
  • the electron gun material evaporates and is consumed, the plane area of the tip portion becomes small, and the outer cylindrical portion becomes a thin LaB6 crystal 215.
  • the irradiation distribution 219 of the electron gun emission has a high intensity only in the center, but the area of the uniform irradiation distribution becomes very small.
  • the electron gun emission distribution changes in this way, it must be said that this electron gun has reached the end of its life.
  • 201 is the upper part of the Wenert electrode for controlling the amount of electron emission
  • 202 is the lower part of the Wenert electrode for controlling the amount of electron emission
  • 203 is a metal gripper through which a heating current flows
  • 204 is a PG (pyrolic graphite) heater
  • 205 is an anode.
  • 206 is a ceramic disk of an electrical insulator that fixes 203
  • 207 is a LaB6 single crystal at the start of use
  • 208 is an electron emission distribution at the start of use
  • 209 is the upper part of the Wenert electrode for controlling the amount of electron emission
  • 210 is an electron emission.
  • the lower part of the Wenert electrode for quantity control, 211 is a metal gripper through which a heating current flows, 212 is a PG (pyroritic graphite) heater, 213 is an anode, 214 is a ceramic disk of an electrical insulator that fixes 211, and 215 is.
  • the LaB6 crystal part sandwiched between the heaters, 216 is the evaporation of the LaB6 crystal that accumulates on the PG heater and reduces the heater resistance value and causes the temperature to drop, 217 is the shape of the LaB6 single crystal that is sublimated and depleted due to high temperature, and 218 is.
  • the shape of the LaB6 single crystal without consumption at the start of use, 219 indicates the electron emission distribution after the electron emission distribution at the start of use changes due to the depletion of the LaB6 single crystal, and 220 indicates the electron emission distribution at the start of use.
  • FIG. 3 is a diagram showing a decrease in the total amount of liquid due to evaporation of the liquid electron gun electron emitting material when the electron emitting surface of the present embodiment faces the direction of gravity.
  • the hydrogenated lantern surface which is a liquid electron emission material, emits electrons from a substantially plane determined by gravity, an electric field, and surface tension. Since the shape of the liquid surface is kept completely unchanged, high brightness and long life are maintained. This is a very good point of this embodiment.
  • the liquid electron emitting material hydrogenated lanthanum 308 at the start of use evaporates into a vacuum at a constant vapor pressure. After a lapse of a certain period of time, the liquid level of the liquid electron emitting material 319 in the upper direction 318 is lowered. Eventually, the total amount of liquid will be exhausted in about 3 months. This is the true life of a liquid electron gun.
  • the life can be extended by 25 times or more. The life can be extended by 5 years or more.
  • 301 is the upper part of the Wenert electrode for controlling the amount of electron emission
  • 302 is the lower part of the Wenert electrode for controlling the amount of electron emission
  • 303 is a metal gripper through which a heating current flows
  • 304 is a PG (pyrolic graphite) heater
  • 305 is hollow.
  • Cover tube container 306 is the electrode
  • 307 is the ceramic disk of the electrical insulator that fixes 303
  • 308 is the direction in which the liquid electron emitting material evaporates from the back surface of the cover tube container
  • 309 is the liquid electron emitting material
  • 310 is the gravity
  • 311 is the upper part of the Wehnelt electrode for controlling the amount of electron emission
  • 312 is the lower part of the Wenert electrode for controlling the amount of electron emission
  • 313 is a metal gripper through which a heating current flows
  • 314 is PG (pyrolic graphite).
  • Heater 315 is a hollow cover tube container, 316 is an electrode, 317 is a ceramic disk of an electrical insulator that fixes 313, 318 is the direction in which the liquid electron emitting material evaporates from the back surface of the cover tube container, and 319 evaporates over time.
  • the liquid electron emitting material in which the total amount of liquid is reduced, 320 indicates an electron beam emitted in the direction of gravity.
  • FIG. 4 is a diagram for explaining the capillary phenomenon and surface tension.
  • surface tension acts in the direction of the angle ⁇ , ⁇ is 90 degrees or less, and water 402 adheres to the glass substrate 401 in the form of droplets.
  • ⁇ is called a contact angle, and when the contact angle is 90 degrees or less, the wettability is good, and when the contact angle is 90 degrees or more, the wettability is poor and the water repellency is said.
  • the contact angle is 90 degrees or more, and the wettability is poor.
  • the mercury surface 416 in the glass tube is lower than the mercury surface 412 of the mercury container 413.
  • the glass tube 415 when the glass tube 415 is raised, the glass tube that is emptied when pulled away from the mercury container, such as 417, the glass tube with a tactile angle of more than 90 degrees and mercury become wet.
  • Mercury does not remain in the tube in the glass capillarity.
  • the liquid electron emitting material adheres to the side surface of the inner wall inside the cover tube container, and the liquid electron emitting material is the cover tube even if there is an opening on the lowermost surface. It does not leak from the container and forms a stable, substantially flat liquid surface suspended by gravity, electric field, and surface tension. It is important to be able to stably emit electrons in the direction of gravity from the liquid surface on a substantially flat surface of this liquid.
  • 407 is the water surface other than the glass tube of the water container
  • 408 is the glass tube
  • 409 is the capillary phenomenon
  • 410 Indicates a glass substrate
  • 412 indicates a mercury liquid surface other than the glass tube
  • 414 indicates mercury.
  • Table 1 is a table explaining the limit value of the liquid height of the liquid electron gun due to the capillary phenomenon, that is, "the limit height of the lantern liquid".
  • the limit height of the lantern liquid is the height of the liquid allowed for the diameter of the opening of the cover member, which indicates the height of the liquid of water, lantern and cerium that can adhere to the inside of the cylindrical capillary due to the capillary phenomenon.
  • the surface tension of water is calculated as 72.75 dyn / cm.
  • lantern and cerium are also divided by the amount of high density when they become liquid with the same surface tension as water. In fact, both lantern and cerium are said to have a surface tension of 10 times or more at 1,000 ° C or higher.
  • the inner diameter of the cover tube is 0.5 mm, the liquid level of water is 56 mm, and when the lantern density is 6, it is 9.3 mm. Height is acceptable. This is always a satisfying condition as it is longer than the actual electron gun cover tube container length of 3 mm. It is known that the average inner diameter of the thickest part of the cover tube container and the limit height are inversely proportional to each other. Therefore, unless the cover tube container is made thicker than this, the lantern liquid will not drip in the direction of gravity by itself from the cover tube opening. Since the density of cerium is 6.5, this condition hardly changes. Further, according to the experiments of the present inventors, the surface tension of the refractory metal and the metal boride with the lantern is sufficiently strong, and especially at 1000 ° C.
  • the wettability has never been a problem experimentally. It was. If the actual required operating temperature of 1000 ° C to 1600 ° C, the brightness, and the required value of the life can be determined, the inner diameter of the hollow cover tube container can be determined by design.
  • FIG. 5A and 5B are diagrams illustrating an electron emitting material of a liquid electron gun.
  • An electron beam 605 is emitted from the hydrogenated lantern through the opening at the tip of the cover tube container shown in FIG. 5B.
  • FIG. 5A is a diagram illustrating a case where a lantern liquid is used.
  • it is necessary to flow hydrogen gas into the electron gun chamber to hydrogenate it to reduce the work function.
  • it oxidizes in the atmosphere in about 10 minutes, reacts with moisture, and starts hydroxylating. Since it is difficult to use this as an electron gun again, it is necessary to react the lantern atom 603 with the hydrogen atom 606 to prepare a hydrogenated lantern as shown in FIG. 5B.
  • 601 is a diagram of the entire liquid electron gun
  • 602 is an electron beam emitted in the direction of gravity
  • 603 is a lantern atom which is a liquid emitting material
  • 604 is a diagram of the entire liquid electron gun
  • 605 is an electron emitted in the direction of gravity.
  • the beam, 606, indicates a hydrogen atom that has penetrated into the lantern atom liquid.
  • FIG. 6 is a diagram for explaining the relationship between the electron gun heating temperature and the generated current value.
  • the horizontal axis is the temperature of the electron gun (° C), and the vertical axis is the intensity of the emitted current (current ( ⁇ A)).
  • 703 represents the emission current of the hydrogenated lanthanum.
  • 704 represents the electron emission current of the solid LaB6 single crystal. From this, it can be seen that at the same temperature, the emission current intensity of the hydrogenated lanthanum is 100 to 1000 times higher than the emission current intensity of the LaB6 single crystal. That is, the hydrogenated lanthanum can obtain the same strength at a temperature 300 ° C. lower than the operating temperature of the LaB6 single crystal.
  • the hydrogenated lanthanum is a liquid, the liquid level is stably determined by gravity, an electric field, and surface tension, and the lanthanum can be used until the amount of the liquid is exhausted, so that the actual life is 10 to 100 times longer.
  • 705 indicates the electron emission intensity of the tungsten electron gun. Tungsten is used at a temperature exceeding 2000 ° C., and a filament of 100 ⁇ m ⁇ evaporates and cuts in about 100 hours, so that the life is very short.
  • Table 2 is a table for examining the types of elements that are candidates for liquid electron emitting materials, and examines the suitability of various elements and substances as liquid electron emitting materials. It shows the name of the material suitable for use, the melting point, the boiling point, and the vapor pressure indicating the degree of liquefaction at 1000 ° C to 1500 ° C or the degree of evaporation in that temperature range.
  • the one that has been widely used in the past is LaB6 single crystal, which has been used at 1500 ° C to 1600 ° C.
  • lanthanum and cerium were 10-3 pascal at 1300 ° C., which were the most suitable elements.
  • gadolinium has 10 -1 pasccal at 1300 ° C
  • praseodymium has 1 pasccal at 1500 ° C
  • terbium has 1 pascal at 1516 ° C. , Not at all unusable. From such an examination, lanthanum and cerium can be proposed as the optimum elements.
  • FIGS. 7A and 7B are explanatory views for the installation of a photocatalyst necessary for cleaning carbon atoms contained inside a liquid electron emitting material (reference numerals 901 and 906 indicate a diagram of the entire liquid electron gun). .. Carbon atoms have been shown to significantly reduce the electron emission efficiency of hydrogenated lanthanum. Therefore, there is a possibility of forming a compound with an electron emitting material by a carbon atom contained in the material of a hollow cover tube container, for example, a lanthanum or a lanthanum atom of a hydrogenated lanthanum.
  • Titanium dioxide which is a photocatalyst by ultraviolet light, which is well known to activate residual oxygen in lantern liquid or residual oxygen in an electron gun chamber
  • tungsten trioxide which is a photocatalyst by visible light, are used to prevent this. It is used for the purpose of removing carbon components in lantern liquid by carbon monoxide formation.
  • Powder 902 of titanium dioxide TiO 2 and tungsten trioxide WO 3 is mixed into 903 in a hydrogenated lanthanum solution.
  • an oxide film 907 of titanium dioxide or tungsten trioxide is adhered and formed on the inner surface of the hollow cover tube container as a photocatalyst. Since the electron gun emits at least visible light or more at 1000 ° C. or higher by the PG heater, it is possible to remove carbon impurities by oxidation using the light energy emitted by itself.
  • Reference numerals 904 and 909 are the back covers of the cover tube container for preventing the hydrogenated lanthanum from evaporating from the back surface of the electron gun emitting surface.
  • Reference numerals 905 and 910 are hollow cover tube containers.
  • the powder 903 and 908 are hydrogenated lanterns. According to the explanation in this figure, it is possible to keep the emission current of the liquid electron gun constant even when the hollow cover tube container contains a very small amount of carbon component of 0.1% or less. However, if the carbon impurities in the cover tube container can be reduced, the photocatalyst may be unnecessary, but carbon contamination from the inside of the electron gun chamber is considered, so it is desirable to use the photocatalyst for safety. Since titanium dioxide may use a natural oxide film of metallic titanium and tungsten trioxide may use a natural oxide film of metallic tungsten, the powder 902 or oxide film 907 used is metallic titanium or metallic tungsten. You may.
  • FIG. 8 is a diagram illustrating a mode in which hydrogen gas flows into a vacuum electron gun chamber in which a liquid electron gun is installed.
  • the hydrogen gas flows from the hydrogen gas cylinder 1020 into the electron gun chamber 1022 through the hydrogen gas adjusting mass flow controller 1021.
  • the turbo molecular pump 1011a opens the valve 1010 to evacuate the inside of the electron gun chamber.
  • the load on the turbo molecular pump 1011a is not so much, but for example, when you want to hydrogenate the lantern in a short time, the hydrogen gas partial pressure May be tempted to flow into the electron gun chamber for more than 10 -3 gascal.
  • the valve 1010 is closed and the second stage column 1019 is evacuated by the turbo molecular pump 1011b. By doing so, the hydrogen partial pressure of the electron gun chamber is maintained high, and the load on the turbo molecular pump is reduced.
  • the circular hole of the vacuum partition 1012 between the second stage column and the third stage column is small, so that a difference in hydrogen gas partial pressure can be generated between the electron gun chamber and the second stage column.
  • the electron beam 1008 passes through the vacuum partition wall 1013, and the electron beam inside the third stage column 1016 in which the electron beam irradiation work is performed using the electron beam deflection electrode 1017 and the electron beam convergence magnetic field lens 1018 is irradiated.
  • the work substrate is 1015, which is subjected to electron beam observation, electron beam drawing, or electron beam welding, and is irradiated with an electron beam to perform a required work.
  • the hydrogen gas partial pressure is highest in the electron gun chamber, followed by the second-stage column and the third-stage column in that order.
  • 1002 is a hollow cover tube container
  • 1003 is a liquid surface of the opening at the tip of the open cover tube container of the liquid electron gun material (a part of a substantially flat surface or a spherical surface having a large radius is formed by surface tension).
  • 1004 is a Wenert electrode for controlling the amount of electron emission
  • 1005a and 1005b are metal grippers through which a heating current flows
  • 1006a and 1006b are PG (pyrolic graphite) heaters
  • 1009 is a ceramic circle of an electrical insulator that fixes the gripper.
  • Plates 1011a, 1011b, 1011c indicate turbo molecular pumps
  • 1014 indicates roughing dry pumps.
  • FIG. 9 is a diagram illustrating a first method of filling a hollow cover tube container with a liquid electron emitting material.
  • the hollow cover tube container 1102 is lifted by a mechanical device 1101 for holding the hollow cover tube container and moving it in the lateral and vertical directions.
  • the lantern liquid 1107 which is a liquid metal
  • the lantern liquid 1107 is heated to a high temperature by the liquid metal melting heater 1111 and liquefied in the pot or the boat 1103 for containing the liquid metal.
  • the hollow cover tube container 1102 mechanically descends until it comes into contact with the lantern liquid 1107, and the lantern liquid 1107 is sucked up inside the hollow cover tube container 1102 by capillarity.
  • the inside of the cover tube container 1102 is evacuated, and the entire cover tube container is filled with the lantern liquid 1107.
  • 1104 is a power supply for a heater for melting liquid metal
  • 1105 is a transmission line from a power supply for a heater for melting liquid metal to a heater
  • 1108 is a vacuum pump
  • 1109 is a mass flow controller for adjusting the flow rate of hydrogen gas
  • FIG. 10 is a diagram illustrating a second method of filling a hollow cover tube container with a liquid electron emitting material.
  • the hollow cover tube container 1207 faces downward 1204 with respect to gravity.
  • Hydrogenated lantern powder is stored in the container 1205 that stores hydrogenated lantern powder from the back side of the cover tube container, and by tilting it diagonally, the hydrogenated lantern powder is filled from the back side of the hollow cover tube container.
  • the filled hydrogenated lantern powder 1208 is heated to a high temperature by heating the heater 1203 in the vacuum chamber 1213 to become a liquid hydrogenated lantern 1212.
  • the vacuum chamber 1213 is evacuated by the vacuum pump 1214, and if necessary, hydrogen gas flows from the hydrogen gas cylinder 1215 from the flow rate control mass flow controller 1216 in a timely or continuous manner. As a result, the inside of the hollow cover tube container is filled with the hydrogenated lantern.
  • 1201 is a ceramic disk of an electric insulator for fixing the gripping tool
  • 1202 is a metal gripping tool through which a heating current flows
  • 1206 is a lantern hydride powder stored in a hollow cover tube container
  • 1209 is gravity
  • 1210 is a transmission line from the heater power supply for melting the liquid metal to the heater
  • 1211 is the heater power supply for melting the liquid metal
  • 1217 is the direction of gravity.
  • FIG. 11 is a diagram showing a state in which a hydrogen storage alloy containing a large amount of hydrogen, which is mixed in a powder inside a liquid electron emitting material, supplies hydrogen.
  • Hydrogen storage encloses royal gold in the cover tube container together with the liquid metal material.
  • the hydrogen storage alloy 1301 mixed in the hydrogenated lanthanum liquid stores a large amount of hydrogen molecules 1302. When the pressure is reduced and heated in the vacuum chamber, the hydrogen storage alloy releases hydrogen molecules 1303, and hydrogen atoms increase in the hydrogenated lanthanum liquid. In this way, the amount of hydrogen atoms in the hydrogenated lanthanum liquid can be controlled.
  • the hydrogen storage alloy 1301 is a hydrogen storage alloy containing palladium, titanium, zirconium, vanadium, or nickel as a main component.
  • FIGS. 12A and 12B are diagrams for explaining an electron gun in which a member having a large number of openings of a thin film is installed on an electron emitting surface of one cover tube to emit a large number of electrons to form a multi-beam.
  • FIG. 12A is an overall view of the electron gun.
  • FIG. 12B is an enlarged view of the tip of the multi-electron source.
  • the electron gun for multi-beam is a hollow cover tube container 1410 provided with a plate-shaped member 1411 formed of a thin refractory conductive material having a large number of round or square holes on the open end surface. ..
  • the liquid of the hydrogenated lanthanum is exposed on the surface of all the multiple round or square holes. Electrons are emitted in parallel into a vacuum from the exposed hydrogenated lanthanum liquid.
  • a plurality of electron beams 1406 accelerated by the anode 1405 are emitted through the Wenert electrode 1404.
  • 1401 is the upper part of the Wenert electrode for controlling the amount of electron emission
  • 1402 is a metal gripper through which a heating current flows
  • 1403 is a PG (pyrolic graphite) heater
  • 1407 is a ceramic disk of an electrical insulator that fixes the gripper.
  • 1408 represent the back cover of a hollow cover tube container for preventing unnecessary evaporation of the liquid electron emitting material
  • 1409 represents the hydride lantern which is the liquid electron emitting material.
  • FIG. 13A and 13B are explanatory views for forming a required large-area electron-emission surface by bundling a plurality of hollow cover tube containers as a large number of capillaries when the required electron-emission area is large.
  • FIG. 13A is an overall view of the electron gun.
  • FIG. 13B is an enlarged view of the tip portion.
  • An electron beam 1506 is emitted from each exposed surface of the hydrogenated lanthanum liquid.
  • the reason why a plurality of fine cover tube containers are bundled without using a cover tube container having a large area in this way is that the amount of liquid that can be held in the capillaries is limited to a certain amount due to the capillary phenomenon. That is, since the height of the liquid level of the liquid capillary phenomenon is inversely proportional to the circumferential distance of the inner diameter of the capillary tube, a smaller capillary tube can form a higher liquid level.
  • a multi-beam can also be formed by this method.
  • 1501 is the upper part of the field electron emission control Wenelt electrode
  • 1502 is a metal gripper through which a heating current flows
  • 1503 is a PG (pyrolic graphite) heater
  • 1504 is the lower part of the field electron emission control Wenelt electrode
  • 1505 is an anode.
  • 1507 indicate a ceramic disk of electrical insulation that secures the grip
  • 1510 indicates the back cover of a hollow cover tube container for preventing unwanted field emission of liquid electron emitting material.
  • FIG. 14 is a diagram showing a method of periodically dropping a solid electron emitting material into a hollow cover tube container in order to compensate for the consumption of the electron emitting material of the liquid electron gun.
  • the liquid hydrogenated lantern 1613 evaporates and the liquid level becomes low. Therefore, it is necessary to supplement the new solid hydrogenated lantern 1601.
  • a plurality of solid hydrogenated lanterns 1601 are dropped one by one on the upper surface of the sheath by the periodic rotation of the belt conveyor of the periodic solid supply mechanism 1603. It shows a solid hydrogenated lantern on which 1605a, 1605b, 1605c fall.
  • the dropped solid hydrogenated lantern is dissolved by contacting with the liquid hydrogenated lantern 1613 heated above the melting point by the PG (pyrolytic graphite) heater 1608. In this way, the amount of consumption of the liquid hydrogenated lantern can be compensated.
  • FIG. 14 supplements by supplying a solid hydrogenated lantern to the cover tube container.
  • the hydrogenated liquid metal material is filled in the form of powder, solid, or liquid from the side of the hollow cover tube container facing the electron beam emitting side.
  • the liquid hydrogenated lantern may be supplemented from the back surface of the cover tube container through a pipe that does not come into electrical contact.
  • the direction of gravity 1602 is the direction in which the solid falls.
  • the solid hydrogenated lantern may be a powder.
  • 1604 is a ceramic disk of an electric insulator for fixing a gripping tool
  • 1606 is an upper part of a Wenelt electrode for controlling an electron emission amount
  • 1607 is a metal gripping tool through which a heating current flows
  • 1609 is a lower part of a Wenert electrode for controlling an electron emission amount.
  • 1610 is an anode
  • 1611 is an electron beam emitted in the direction of gravity
  • 1612 is a hollow cover tube container.
  • the exposed surface of the liquid of the liquid electron emitting material when the electron gun in the downward direction of gravity (direction of the gravity vector) is tilted at an angle of about 45 degrees is a substantially flat surface 1702. Even if this surface is tilted by 45 degrees, it is almost unchanged from the vertical direction. That is, the surface perpendicular to the central axis of the cover tube is maintained by the surface attached to the opening on the side surface of the cover tube by surface tension.
  • the upper surface of the liquid metal is oriented in the direction of gravity, and the liquid surface is perpendicular to gravity.
  • the lower surface of the liquid metal is plane along the tip cross section of the hollow cover tube, or perpendicular to the cover tube axis, as a result of the balance of gravity, electric field and surface tension at that position, in this case surface tension dominates. It becomes a flat surface. This is true until the cover tube is tilted plus or minus 60 degrees with respect to gravity.
  • the present inventors have confirmed that the function of the liquid electron gun is almost normally satisfied if the emission direction of the electron beam is within the range of plus or minus 60 degrees from the direction of gravity 1701 (inside the cone). Therefore, an electron gun using a liquid electron emitting material can be used downward at plus or minus 60 degrees.
  • the liquid when the liquid is directed in the direction perpendicular to the direction of gravity, the liquid moves laterally in the capillary tube, so that the exposed surface of the liquid hydrogenated lantern is not formed at the tip of the cover tube container. In order to prevent this, it is considered necessary to apply horizontal pressure to the liquid hydrogenated lantern.
  • the metal material to be hydrogenated is limited to several kinds of elements such as lanthanum and cerium, but other elements can be used as long as they can be used as a liquid electron emitting material that can be used as a liquid electron emitting material that can be hydrogenated and the electron generation efficiency is remarkably increased. Needless to say.
  • the liquid metal of the hydride liquid metal may be a lanthanoid series metal, such as lanthanum, or cerium, or gadolinium, or terbium, or placeodium. Hydrogenation of these metals can be realized by flowing hydrogen gas inside the vacuum chamber.
  • the liquid electron gun there is a conventional one that uses a zirconium liquid as a tailor cone on the sharp tip of tungsten and uses it as an electron emission surface. With this electron gun, zirconium evaporates and disappears after a certain period of time, and it is necessary to liquefy the zirconium again. That is, in this embodiment, a plane perpendicular to the direction of gravity of a stable liquid is used as a high-intensity electron gun that is stable over time, whereas a zirconium liquid electron gun that uses a Taylor cone has a form as well. The purpose and operating principle are completely different.
  • a pressure is applied from the rear of the hollow cover tube container to apply an electric field to the tip to release a liquid or gas, which is then sprayed using a spray nozzle to form a film or solid, or to carve a target work object.
  • the spray nozzle is similar in shape to the hollow cover tube container of this embodiment. However, in this embodiment, the fluid under pressure is not constantly flowed through the hollow cover tube container.
  • This embodiment statically holds hydrogenated lanthanum, which is a liquid electron emitting material that does not flow at all, emits high-intensity electrons from the electron emitting surface, and realizes long-term stability. It's completely different. Therefore, there is no reason to be pointed out that the spray nozzle could be easily constructed by those skilled in the art.
  • the electron gun of the present embodiment is far superior to the conventional electron gun, has high brightness and long life, and can be usually used for an electron beam drawing device in order to stably emit electrons.
  • liquid electron gun is used in this embodiment, even if the evaporation material on the electron radiation surface at the tip evaporates, the height and shape of the electron gun plane do not change at all, so that the electrons are ultra-stable and highly accurate. A gun can be formed. This point completely overcomes the drawbacks of conventional electron guns. For this reason, we have achieved an innovative extension of the life of conventional electron guns.
  • an electron gun suitable for a multi-electron beam drawing device can be realized. It can also be used for X-ray source electron guns. Further, if the diameter of the tip opening of the cover tube container is manufactured to be 10 ⁇ m or less, it can be used as an electron gun of a scanning electron microscope or a transmission electron microscope having high brightness and long life. When hydrogen gas is flowed, it can be used even at a low vacuum degree, so that it can be used as an electron gun even in a three-dimensional electron beam welding molding machine using an electron beam.
  • the tip of the electron gun cover tube container is sharpened and the opening is a minute opening, it is also suitable for use in an ultrafine pattern drawing device or an electron microscope for observation.
  • the electron gun since the electron gun achieves high brightness and long life, the electron gun according to the present embodiment includes an electron beam drawing device, an electron beam microscope, an electron beam inspection device, an X-ray generator, and the like, and is based on the electron gun. Makes a great contribution to the overall field of electron beam application equipment industry.
  • the electron beam drawing apparatus it is required to increase the brightness from one electron gun to 10 times or more that of the conventional LaB6 or CeB6 electron gun. It is required brightness of 10 7 A / cm 2 steradian at 50 kV. For this reason, it is necessary to raise the normal operating temperature of the conventional LaB6 or CeB6 electron gun from 1500 ° C. to 1600 ° C. before use. In this way, the life of the electron gun is shortened, and it is sublimated and consumed by about 70 ⁇ m in one month. For this reason, the vacuum chamber leaked to the atmosphere about once a month, and it was necessary to replace the electron gun.
  • the electron gun of the present embodiment can be operated for one year or more without maintenance, and can achieve an electron beam intensity 10 times or more that of the conventional one. Since the electron gun of the present embodiment can have a maintenance time of one day a year, the maintenance cost can be reduced.
  • the electron gun of this embodiment can also be used as an X-ray emitting device, and exhibits great power as all X-ray electron guns as a high-brightness, large-current, long-life electron gun.
  • X-ray emission devices have a huge market for dangerous goods detection devices in transportation and for medical examinations for diagnosing cancer, cerebral hemorrhage, cerebral infarction, etc.
  • the electron gun of this embodiment contributes as the core of a huge industry of 5 trillion yen or more.
  • Glass substrate 411 For example, mercury 412 Mercury liquid level other than glass tube 413 Mercury container 414 Mercury 415 Glass tube 416 Lowered upper surface of mercury inside the glass tube 417 Empty glass tube when separated from the mercury container. A glass tube with a contact angle of more than 90 degrees and mercury are not wettable, and mercury does not remain in the tube due to capillarity.

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Cited By (2)

* Cited by examiner, † Cited by third party
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JP2025506065A (ja) * 2022-02-18 2025-03-05 ウェストレイク ユニバーシティ 電子放出装置および電子装置
JP2025521964A (ja) * 2022-07-08 2025-07-10 西湖大学 電子放出装置および電子装置

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