JPWO2021015039A1 - - Google Patents

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Publication number
JPWO2021015039A1
JPWO2021015039A1 JP2021533955A JP2021533955A JPWO2021015039A1 JP WO2021015039 A1 JPWO2021015039 A1 JP WO2021015039A1 JP 2021533955 A JP2021533955 A JP 2021533955A JP 2021533955 A JP2021533955 A JP 2021533955A JP WO2021015039 A1 JPWO2021015039 A1 JP WO2021015039A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021533955A
Other languages
Japanese (ja)
Other versions
JP7445993B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021015039A1 publication Critical patent/JPWO2021015039A1/ja
Application granted granted Critical
Publication of JP7445993B2 publication Critical patent/JP7445993B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/48—Electron guns
    • H01J29/485—Construction of the gun or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/04—Liquid electrodes, e.g. liquid cathode
    • H01J1/05—Liquid electrodes, e.g. liquid cathode characterised by material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/04—Liquid electrodes, e.g. liquid cathode
    • H01J1/06—Containers for liquid-pool electrodes; Arrangement or mounting thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/064—Details of the emitter, e.g. material or structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/04—Liquid electrodes, e.g. liquid cathode
    • H01J1/10—Cooling, heating, circulating, filtering, or controlling level of liquid in a liquid-pool electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3104—Welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
    • H01J9/042—Manufacture, activation of the emissive part

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2021533955A 2019-07-23 2020-07-13 電子銃装置 Active JP7445993B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019135618 2019-07-23
JP2019135618 2019-07-23
PCT/JP2020/027255 WO2021015039A1 (ja) 2019-07-23 2020-07-13 電子銃装置

Publications (2)

Publication Number Publication Date
JPWO2021015039A1 true JPWO2021015039A1 (https=) 2021-01-28
JP7445993B2 JP7445993B2 (ja) 2024-03-08

Family

ID=74193454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021533955A Active JP7445993B2 (ja) 2019-07-23 2020-07-13 電子銃装置

Country Status (6)

Country Link
US (1) US11295925B2 (https=)
EP (1) EP3923313B1 (https=)
JP (1) JP7445993B2 (https=)
KR (1) KR102425178B1 (https=)
CN (1) CN113678224B (https=)
WO (1) WO2021015039A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116083860A (zh) * 2022-11-15 2023-05-09 福建兆元光电有限公司 一种黄金颗粒自动预熔方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7573601B2 (ja) * 2020-04-21 2024-10-25 デンカ株式会社 電子源及びその製造方法、並びにエミッター及びこれを備える装置
TWI773093B (zh) * 2021-01-19 2022-08-01 京元電子股份有限公司 滴定模組、測試設備及滴定接觸角之量測方法
CN119993802A (zh) * 2022-02-18 2025-05-13 西湖大学 一种电子发射装置以及电子装置
US12340969B2 (en) 2022-03-18 2025-06-24 Kla Corporation Electron gun and electron microscope
CN115148561A (zh) * 2022-07-08 2022-10-04 西湖大学 一种电子发射装置以及电子装置
US20250125114A1 (en) * 2023-10-11 2025-04-17 Fei Company Dry electron source environment
CN117943494B (zh) * 2024-03-22 2024-06-18 常州富丽康精密机械有限公司 一种具有力反馈功能的冷轧丝杠生产用轧制设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838905A (ja) * 1981-09-02 1983-03-07 Toppan Printing Co Ltd 固体撮像素子用色分解フイルタ
JPS5846542A (ja) * 1981-09-11 1983-03-18 Nippon Telegr & Teleph Corp <Ntt> 電界放出型液体金属アルミニウムイオン銃及びその製造方法
JPS62140340A (ja) * 1985-12-14 1987-06-23 Denki Kagaku Kogyo Kk 電界放射型イオン源
JPH02195640A (ja) * 1989-01-23 1990-08-02 Toshiba Corp 電子銃による加熱装置および同位体分離装置
JPH03233826A (ja) * 1989-10-25 1991-10-17 Denki Kagaku Kogyo Kk 電界放出型イオン源
JPH03272500A (ja) * 1990-03-22 1991-12-04 Toshiba Corp 電子銃

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1574611A (en) * 1976-04-13 1980-09-10 Atomic Energy Authority Uk Ion sources
JPS5838905B2 (ja) * 1981-09-03 1983-08-26 日本電子株式会社 金属イオン源
EP0204297B1 (en) * 1985-06-04 1991-01-23 Denki Kagaku Kogyo Kabushiki Kaisha Charged particle emission source structure
JPH05205680A (ja) * 1992-01-27 1993-08-13 Hitachi Ltd 電気流体力学的イオン源、それを用いたフッ素イオンの放出方法、二次イオン質量分析装置、それを用いた質量分析方法、加工装置及びそれを用いた加工方法
JP2002025421A (ja) * 2000-07-10 2002-01-25 Matsushita Electric Ind Co Ltd 電子銃及びその製造方法、及びその電子銃を用いたカラー受像管、カラー受像システム
CN101630623B (zh) * 2003-05-09 2012-02-22 株式会社荏原制作所 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法
JP4685115B2 (ja) * 2007-02-20 2011-05-18 株式会社アドバンテスト 電子ビーム露光方法
JP5595199B2 (ja) 2010-09-23 2014-09-24 株式会社ニューフレアテクノロジー 電子銃および電子銃を用いた電子ビーム描画装置
EP2680294B1 (en) * 2011-02-25 2015-09-09 Param Corporation Electron gun and electron beam device
JP2017201609A (ja) * 2016-05-06 2017-11-09 株式会社Ｐａｒａｍ 電子銃

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5838905A (ja) * 1981-09-02 1983-03-07 Toppan Printing Co Ltd 固体撮像素子用色分解フイルタ
JPS5846542A (ja) * 1981-09-11 1983-03-18 Nippon Telegr & Teleph Corp <Ntt> 電界放出型液体金属アルミニウムイオン銃及びその製造方法
JPS62140340A (ja) * 1985-12-14 1987-06-23 Denki Kagaku Kogyo Kk 電界放射型イオン源
JPH02195640A (ja) * 1989-01-23 1990-08-02 Toshiba Corp 電子銃による加熱装置および同位体分離装置
JPH03233826A (ja) * 1989-10-25 1991-10-17 Denki Kagaku Kogyo Kk 電界放出型イオン源
JPH03272500A (ja) * 1990-03-22 1991-12-04 Toshiba Corp 電子銃

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116083860A (zh) * 2022-11-15 2023-05-09 福建兆元光电有限公司 一种黄金颗粒自动预熔方法

Also Published As

Publication number Publication date
KR20210114535A (ko) 2021-09-23
KR102425178B1 (ko) 2022-07-27
CN113678224B (zh) 2025-01-28
US11295925B2 (en) 2022-04-05
CN113678224A (zh) 2021-11-19
JP7445993B2 (ja) 2024-03-08
WO2021015039A1 (ja) 2021-01-28
US20220051866A1 (en) 2022-02-17
EP3923313B1 (en) 2023-09-27
EP3923313A1 (en) 2021-12-15
EP3923313A4 (en) 2022-05-18

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