JPWO2021015039A1 - - Google Patents
Info
- Publication number
- JPWO2021015039A1 JPWO2021015039A1 JP2021533955A JP2021533955A JPWO2021015039A1 JP WO2021015039 A1 JPWO2021015039 A1 JP WO2021015039A1 JP 2021533955 A JP2021533955 A JP 2021533955A JP 2021533955 A JP2021533955 A JP 2021533955A JP WO2021015039 A1 JPWO2021015039 A1 JP WO2021015039A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/48—Electron guns
- H01J29/485—Construction of the gun or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/04—Liquid electrodes, e.g. liquid cathode
- H01J1/05—Liquid electrodes, e.g. liquid cathode characterised by material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/04—Liquid electrodes, e.g. liquid cathode
- H01J1/06—Containers for liquid-pool electrodes; Arrangement or mounting thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/064—Details of the emitter, e.g. material or structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/04—Liquid electrodes, e.g. liquid cathode
- H01J1/10—Cooling, heating, circulating, filtering, or controlling level of liquid in a liquid-pool electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3104—Welding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
- H01J9/042—Manufacture, activation of the emissive part
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019135618 | 2019-07-23 | ||
JP2019135618 | 2019-07-23 | ||
PCT/JP2020/027255 WO2021015039A1 (ja) | 2019-07-23 | 2020-07-13 | 電子銃装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2021015039A1 true JPWO2021015039A1 (ja) | 2021-01-28 |
JP7445993B2 JP7445993B2 (ja) | 2024-03-08 |
Family
ID=74193454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021533955A Active JP7445993B2 (ja) | 2019-07-23 | 2020-07-13 | 電子銃装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11295925B2 (ja) |
EP (1) | EP3923313B1 (ja) |
JP (1) | JP7445993B2 (ja) |
KR (1) | KR102425178B1 (ja) |
CN (1) | CN113678224A (ja) |
WO (1) | WO2021015039A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4131327A4 (en) * | 2020-04-21 | 2023-07-05 | Denka Company Limited | ELECTRON SOURCE, METHOD FOR THE MANUFACTURE, TRANSMITTER, AND DEVICE COMPRISING THEM |
CN114512378A (zh) * | 2022-02-18 | 2022-05-17 | 西湖大学 | 一种电子发射装置以及电子装置 |
US20230298847A1 (en) * | 2022-03-18 | 2023-09-21 | Kla Corporation | Electron gun and electron microscope |
CN115148561A (zh) * | 2022-07-08 | 2022-10-04 | 西湖大学 | 一种电子发射装置以及电子装置 |
CN117943494B (zh) * | 2024-03-22 | 2024-06-18 | 常州富丽康精密机械有限公司 | 一种具有力反馈功能的冷轧丝杠生产用轧制设备 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1574611A (en) * | 1976-04-13 | 1980-09-10 | Atomic Energy Authority Uk | Ion sources |
JPS5838905B2 (ja) * | 1981-09-03 | 1983-08-26 | 日本電子株式会社 | 金属イオン源 |
JPS5846542A (ja) * | 1981-09-11 | 1983-03-18 | Nippon Telegr & Teleph Corp <Ntt> | 電界放出型液体金属アルミニウムイオン銃及びその製造方法 |
JPS62140340A (ja) * | 1985-12-14 | 1987-06-23 | Denki Kagaku Kogyo Kk | 電界放射型イオン源 |
DE3677062D1 (de) * | 1985-06-04 | 1991-02-28 | Denki Kagaku Kogyo Kk | Quelle geladener teilchen. |
JPH02195640A (ja) * | 1989-01-23 | 1990-08-02 | Toshiba Corp | 電子銃による加熱装置および同位体分離装置 |
JP2688261B2 (ja) * | 1989-10-25 | 1997-12-08 | 電気化学工業株式会社 | 電界放出型イオン源 |
JPH03272500A (ja) * | 1990-03-22 | 1991-12-04 | Toshiba Corp | 電子銃 |
JPH05205680A (ja) * | 1992-01-27 | 1993-08-13 | Hitachi Ltd | 電気流体力学的イオン源、それを用いたフッ素イオンの放出方法、二次イオン質量分析装置、それを用いた質量分析方法、加工装置及びそれを用いた加工方法 |
JP3272500B2 (ja) | 1993-07-30 | 2002-04-08 | オリンパス光学工業株式会社 | 球面測定装置 |
JP3233826B2 (ja) | 1995-09-13 | 2001-12-04 | 新日本製鐵株式会社 | スポット溶接部の遅れ破壊特性の優れた高強度pc鋼棒およびその製造方法 |
JP2002025421A (ja) * | 2000-07-10 | 2002-01-25 | Matsushita Electric Ind Co Ltd | 電子銃及びその製造方法、及びその電子銃を用いたカラー受像管、カラー受像システム |
CN1820346B (zh) | 2003-05-09 | 2011-01-19 | 株式会社荏原制作所 | 基于带电粒子束的检查装置及采用了该检查装置的器件制造方法 |
JP4685115B2 (ja) * | 2007-02-20 | 2011-05-18 | 株式会社アドバンテスト | 電子ビーム露光方法 |
JP5595199B2 (ja) | 2010-09-23 | 2014-09-24 | 株式会社ニューフレアテクノロジー | 電子銃および電子銃を用いた電子ビーム描画装置 |
WO2012114521A1 (ja) * | 2011-02-25 | 2012-08-30 | 株式会社Param | 電子銃および電子ビーム装置 |
JP5846542B2 (ja) | 2011-09-21 | 2016-01-20 | トヨタ自動車株式会社 | 燃料電池システム |
JP5838905B2 (ja) | 2012-03-14 | 2016-01-06 | 株式会社Jvcケンウッド | ヘッドホン |
JP2017201609A (ja) * | 2016-05-06 | 2017-11-09 | 株式会社Param | 電子銃 |
-
2020
- 2020-07-13 JP JP2021533955A patent/JP7445993B2/ja active Active
- 2020-07-13 KR KR1020217027088A patent/KR102425178B1/ko active IP Right Grant
- 2020-07-13 WO PCT/JP2020/027255 patent/WO2021015039A1/ja unknown
- 2020-07-13 EP EP20843228.6A patent/EP3923313B1/en active Active
- 2020-07-13 US US17/434,833 patent/US11295925B2/en active Active
- 2020-07-13 CN CN202080017998.XA patent/CN113678224A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
KR102425178B1 (ko) | 2022-07-27 |
EP3923313A4 (en) | 2022-05-18 |
US20220051866A1 (en) | 2022-02-17 |
US11295925B2 (en) | 2022-04-05 |
EP3923313B1 (en) | 2023-09-27 |
CN113678224A (zh) | 2021-11-19 |
WO2021015039A1 (ja) | 2021-01-28 |
KR20210114535A (ko) | 2021-09-23 |
JP7445993B2 (ja) | 2024-03-08 |
EP3923313A1 (en) | 2021-12-15 |
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