WO2021002572A1 - 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치 - Google Patents

디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치 Download PDF

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Publication number
WO2021002572A1
WO2021002572A1 PCT/KR2020/004967 KR2020004967W WO2021002572A1 WO 2021002572 A1 WO2021002572 A1 WO 2021002572A1 KR 2020004967 W KR2020004967 W KR 2020004967W WO 2021002572 A1 WO2021002572 A1 WO 2021002572A1
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WO
WIPO (PCT)
Prior art keywords
probe
display panel
unit
inspection
panel
Prior art date
Application number
PCT/KR2020/004967
Other languages
English (en)
French (fr)
Korean (ko)
Inventor
박노선
박진
조창제
이동인
Original Assignee
우리마이크론(주)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020190078763A external-priority patent/KR102097455B1/ko
Priority claimed from KR1020190078764A external-priority patent/KR102097456B1/ko
Application filed by 우리마이크론(주) filed Critical 우리마이크론(주)
Priority to CN202080045103.3A priority Critical patent/CN114424274B/zh
Priority to JP2021576972A priority patent/JP7250182B2/ja
Publication of WO2021002572A1 publication Critical patent/WO2021002572A1/ko

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K99/00—Subject matter not provided for in other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes

Definitions

  • the present invention relates to a probe block assembly for inspecting a display panel, a method for controlling the same, and an apparatus for inspecting a display panel.
  • OLEDs used as flat panel display devices have the advantage of having a wide viewing angle, excellent contrast, and fast response speed, and are thus widely used in smartphones and televisions.
  • an organic material layer for forming an organic light-emitting layer is deposited on a panel serving as a substrate, and thus, a pixel that emits light and color by an electrical signal is implemented.
  • the inspection was conducted in a face-down method, that is, with the one side of the deposition portion of the display panel requiring inspection facing downward.
  • the display panel can be manufactured in various sizes depending on the purpose of use, and is provided on the ledger panel during the manufacturing process.
  • the ledger panel is a single type or various sized display panels in which a plurality of display panels of the same size exist to increase chamfering efficiency. It may be a mixed type formed by mixing display panels.
  • a fishbone-type stage module is disposed with one side of the display panel on the ledger panel facing the bottom, and a fishbone-type stage module Is moved into the chamber for inspection after gripping the outer portion where the deposition portion is not formed among the one surface where the deposition portion exists while the deposition portion faces downward.
  • the other surface of the ledger panel without the evaporation part was adsorbed by the vacuum plate, moved to the place where the probe block of the probe unit was located, and then the contact pad of the display panel was brought into contact with the probe block. .
  • the conventional inspection method further causes the following problems in addition to the above-described problems.
  • the probe unit has no choice but to be equipped with a probe block to check whether one type of display panel is defective, and as a result, display panels of various sizes that need to be inspected exist on the ledger panel, which makes the display panel subject to inspection different. If so, it is inevitably necessary to replace it with a new probe unit.
  • the replacement work of the probe unit is performed manually by an operator, and accordingly, there is a problem that the time required for the replacement work is lengthened and the yield is lowered.
  • An object of the present invention is to increase the yield by allowing the inspection for defects of display panels of various sizes included in a large or small ledger panel in a face down or face up method without replacing a probe unit. And a probe block assembly for inspecting a display panel, a control method thereof, and an apparatus for inspecting a display panel to prevent safety accidents of workers.
  • the probe block assembly for inspecting a display panel includes a ledger panel-at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited on one surface of the ledger panel, and the display panel, Having a plurality of formed electrode pads-a plurality of probe blocks allowing the plurality of electrode pads of the display panel moved to the inspection position to be brought into contact with each other to conduct an inspection for a defect; And a probe unit supporting the plurality of probe blocks, wherein each of the plurality of probe blocks includes probe pins contacting each of the plurality of electrode pads, and to inspect the display panel, Each of the probe blocks may be selected from the probe blocks loaded in the probe block loading unit, and then carried out to be mounted at a predetermined position on the probe unit existing at a position where an inspection for a defect of the display panel is performed. .
  • the unnecessary or replacement probe of the probe block assembly may be selected from the probe unit and then taken out and loaded in the probe block loading unit.
  • the probe unit of the probe block assembly after the inspection of the display panel is completed, when an additional probe block is required for inspection of another display panel having a different size, the probe block is loaded in the probe block loading unit. After the additional probe unit is selected, it may be carried out to provide a mounting area in which the additional probe unit can be mounted.
  • the probe unit of the probe block assembly includes a plurality of mounting regions for individually mounting the probe blocks, and the mounting region for mounting the probe block among the plurality of mounting regions is an object of inspection. It may be characterized in that it is selected based on the number of electrode pads and formation positions of the displayed display panel.
  • the plurality of mounting regions of the probe block assembly according to the present invention may be characterized in that each includes a guide unit that interacts with a position fixing unit formed on the probe block to guide a position at which the probe block is mounted. .
  • the probe unit of the probe block assembly further includes a power applying unit configured to apply power to each of the probe blocks when the plurality of probe blocks are mounted on the probe unit, and the probe unit further includes:
  • the block includes a plurality of probe pins, a main body supporting the plurality of probe pins, a connection terminal for applying the power to the plurality of probe pins by electrical connection with the power supply unit, and the plurality of probe pins. It may be characterized in that it comprises a circuit pattern portion for electrically connecting the connection terminal.
  • connection terminals of the probe block assembly according to the present invention are formed in the same number as or less than the number of power supply terminals to which power is applied by the power supply unit, and the circuit pattern unit includes the number of the plurality of probe pins.
  • the circuit pattern unit includes the number of the plurality of probe pins.
  • the probe unit of the probe block assembly replaces at least one or more of the plurality of probe blocks mounted at the predetermined position without replacement, so that the display panel and the other display panel on which the inspection is performed are defective. It may be characterized in that the inspection as to whether or not to proceed.
  • FIG. 1 is a diagram illustrating a display panel inspected for defects by a display panel inspection facility according to the present invention.
  • FIG. 2 is a view for explaining various embodiments of combinations of display panels included in a ledger panel that can be mounted on a stage module provided in a display panel inspection facility according to the present invention.
  • FIG. 3 is a block diagram illustrating a display panel inspection facility according to the present invention.
  • FIG. 4 is a view for explaining a display panel inspection facility according to the present invention.
  • FIG. 5 and 6 are views for explaining the flow of air in the inspection process processing facility provided to the display panel inspection facility according to the present invention
  • FIG. 5 is a schematic cross-sectional view taken along line AA of FIG. 4
  • FIG. 6 is A schematic cross-sectional view taken along line BB in 4.
  • FIG. 7 is a flowchart illustrating a process in which the ledger panel is adsorbed to the vacuum adsorption module by the ledger panel transfer device provided to the display panel inspection facility according to the present invention.
  • FIG. 8 is a view for explaining a situation in which the ledger panel is seated in a normal state on the stage module provided in the ledger panel transfer apparatus according to the present invention.
  • FIG. 9 and 10 are diagrams for explaining a situation in which a ledger panel in a normal state is changed to an inverted state due to rotation of a stage module in the situation shown in FIG. 8;
  • FIG. 11 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention enters the stage module.
  • FIGS. 12 and 13 are views for explaining a situation in which a transfer module provided to the ledger panel transfer device according to the present invention adsorbs the ledger panel in a reversed state.
  • FIG. 14 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention is moved to a first position.
  • 15 and 16 are views for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is lowered to adsorb the ledger panel in a reversed state.
  • 17 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention is returned to its original position.
  • 18 is a view for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is raised to a second position.
  • 19 is a view for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is raised to a third position.
  • 20 is a view for explaining a display panel inspection apparatus provided in the display panel inspection facility according to the present invention.
  • 21 to 28 are views for explaining a situation in which a 65-inch display panel and a 55-inch display panel provided on a ledger panel are inspected for defects by the display panel inspection apparatus according to the present invention.
  • 29 is a view for explaining another method of applying power to a probe pin provided in a probe block.
  • 30 and 31 are views for explaining a method for fixing or separating a probe block on a probe unit.
  • the probe block assembly for inspecting a display panel includes a ledger panel-at least one type of display panel on which an organic material layer for forming an organic light emitting layer is deposited on one surface of the ledger panel, and the display panel, Having a plurality of formed electrode pads-a plurality of probe blocks allowing the plurality of electrode pads of the display panel moved to the inspection position to be brought into contact with each other to conduct an inspection for a defect; And a probe unit supporting the plurality of probe blocks, wherein each of the plurality of probe blocks includes probe pins contacting each of the plurality of electrode pads, and to inspect the display panel, Each of the probe blocks may be selected from the probe blocks loaded in the probe block loading unit, and then carried out to be mounted at a predetermined position on the probe unit existing at a position where an inspection for a defect of the display panel is performed. .
  • FIG. 1 is a diagram illustrating a display panel inspected for defects by a display panel inspection facility according to the present invention
  • FIG. 2 is a ledger that can be mounted on a stage module provided in a display panel inspection facility according to the present invention.
  • a pixel is implemented by depositing an organic material layer for forming an organic light-emitting layer on a panel serving as a substrate, and may be, for example, an LCD or OLED.
  • an inspection for defects may be performed.
  • the display panel DP includes a first electrode pad EP1 formed along a first side, a second electrode pad EP2 formed along a second side, and a third side to inspect whether a pixel is defective.
  • a third electrode pad EP3 formed along the side and a fourth electrode pad EP4 formed along the fourth side may be provided.
  • the number and formation positions of electrode pads may vary according to the characteristics of the panel.
  • the ledger panel MP After a plurality of display panels DP are formed on the ledger panel MP whose size is determined depending on the size of the stage module 110 (see FIGS. 3 and 4) during the manufacturing process, it will be manufactured through a process such as cutting.
  • the ledger panel MP may be a glass substrate that is a basis for production of the display panel DP.
  • the ledger panel MP is a single type or various sized display panel in which a plurality of display panels DP of the same size are present in order to increase the efficiency of defect inspection by minimizing empty space, that is, to increase chamfering efficiency. It may be a mixed type formed by mixing (DP).
  • the ledger panel MP is a mixed type of two 98-inch display panels as shown in Fig. 2(a), and three 65-inch display panels and a 32-inch display panel as shown in Fig. 2(b). 6 mixed types, 18 single types of 31.5 inch display panels as shown in FIG. 2(c), 2 mixed types of 49 inch display panels and 2 75 inch display panels as shown in FIG. 2(d) and As shown in 2(e), a mixed type of three 65-inch display panels and two 55-inch display panels may be used, but the present invention is not limited thereto, and a mixed type of display panels of various sizes may be applied.
  • the display panel inspection facility 1000 may inspect whether all display panels included in the mixed-type ledger panel MP of various combinations described above are defective.
  • the ledger panel is 65
  • the case of a mixed type in which three inch display panels and two 55 inch display panels are formed will be described as a representative example.
  • FIG. 3 is a block diagram illustrating a display panel inspection facility according to the present invention
  • FIG. 4 is a view illustrating a display panel inspection facility according to the present invention.
  • the display panel inspection facility 1000 includes a display panel DP of various sizes included in the ledger panel MP in a rear adsorption method, that is, a face down method. ) Defects can be performed without replacement of the probe unit (PU1, PU2, see Fig. 20), and is an inspection facility that can maximize the accuracy and speed of inspection for defects, and inspection process preparation equipment 1100 and inspection It may include a process progress facility 1200.
  • the ledger panel When the other side of MP is adsorbed to the stage module 110, the stage module 110 is rotated so that the ledger panel MP is in a reversed state in which the one side faces downward in the normal state, and then transferred.
  • the module 120 may be a facility for moving the ledger panel MP to a facility for a next process while maintaining the inversion state by receiving the ledger panel MP in the inverted state.
  • the inspection process progress facility 1200 is vacuum-adsorbed by moving the position of the picker module 130.
  • the electrode pad of the display panel DP becomes a probe of the display panel inspection apparatus 200 by moving the position of the vacuum adsorption module 140. It may be a facility for inspecting whether the display panel DP is defective by contacting the probe pin 3002 (see FIG. 22) of the block PB (see FIG. 22 ).
  • the ledger panel MP is seated on the stage module 110, and the ledger panel MP is mediated by the picker module 130 by the transfer module 120.
  • the component until adsorbed to the vacuum adsorption module 140 can be defined as the ledger panel transfer device 100, and the display adsorbed to the vacuum adsorption module 140 by the ledger panel transfer device 100
  • a process in which the panel DP is inspected for defects by the display panel inspection apparatus 200 including the probe block assembly 2000 and the probe block loading unit 3000 is performed with reference to FIGS. 20 to 28. It will be described in detail.
  • FIG. 5 and 6 are views for explaining the flow of air in the inspection process processing facility provided to the display panel inspection facility according to the present invention
  • FIG. 5 is a schematic cross-sectional view taken along line AA of FIG. 4
  • FIG. 6 is It is a schematic cross-sectional view taken along line BB in 4.
  • the inspection process processing facility 1200 includes electrode pads of the display panel DP and probe pins 3002 of the probe block PB (refer to FIG. 22 ).
  • Reference) photographing the first space unit 300 for performing an inspection for the defect of the display panel DP and the display panel DP to be inspected for the defect by photographing the A vision module 410 for checking the presence of spots or scratches on the display panel DP may include a second space part 400 installed to be movable, and the second space part 400 May be located under the first space part 300.
  • the vision module 410 may include, for example, four camera units, and the camera unit has a working distance (WD) that varies depending on the size of the display panel DP to be photographed, The position may be movable toward the top or bottom.
  • WD working distance
  • each of the four camera units since the four camera units must photograph the entire area of the display panel DP corresponding to the size of the display panel DP to be photographed, each of the four camera units is 1/4 of the display panel DP to be photographed. It should be located in the center of the area, and for this it can be moved forward or backward, left or right. In addition, if necessary, it may be rotated forward or reverse to correspond to the rotation of the display panel DP to be photographed.
  • the inspection of whether the display panel DP is defective in the inspection process preparation facility 1100 and the inspection process progress facility 1200 may be performed under a nitrogen atmosphere.
  • the nitrogen air in the first space unit 300 and the second space unit 400 must be circulated stably without congestion.
  • the inspection process processing facility 1200 is a forced circulation module 310 located at an upper part of the first space part 300, for circulation of the nitrogen air in the first space part 300
  • a first circulation duct module 320 connecting upper and lower portions and a second circulation duct module 420 connecting the first space part 300 and the second space part 400 may be included.
  • the second circulation duct module 420 allows the nitrogen air introduced into the second space part 400 from the first space part 300 to flow back into the first space part 300 to be circulated.
  • a forced suction module 430 may be positioned on the second circulation duct module 420.
  • the forced circulation module 310 and the forced suction module 420 are a kind of suction fan, and the forced suction module 420 is located on the second circulation duct module 410 so that the first space ( The nitrogen air introduced into the second space part 400 from 300 may be sucked and then discharged to the first space part 300.
  • the inspection process processing facility 1200 performs the inspection process of the display panel under a uniform nitrogen atmosphere.
  • the inspection process preparation facility 1100 and the inspection process progress facility 1200 require a worker to enter the interior during maintenance, so that the conversion to a clean dry air (CDA) atmosphere can be achieved.
  • CDA dry air
  • FIG. 7 is a flowchart illustrating a process in which the ledger panel is adsorbed to the vacuum adsorption module by the ledger panel transfer device provided in the display panel inspection facility according to the present invention.
  • the ledger panel transfer device 100 may include a stage module 110, a transfer module 120, a picker module 130, a vacuum adsorption module 140, and the like.
  • the stage module 110 is a component for adsorbing and fixing the other surface of the ledger panel MP in a normal state with one surface of the ledger panel MP facing upward, and one surface of the ledger panel MP is an organic emission layer. At least one type of display panel DP on which an organic material layer for formation is deposited may be provided.
  • the other surface of the ledger panel MP may be a non-deposited part as a whole.
  • the stage module 110 may be rotated so that the display panel is inspected in a face-down manner, and thus, the ledger panel (MP) disposed in the normal state and adsorbed by the stage module 110 ) May be a reversed state in which the one side faces downward.
  • MP ledger panel
  • the transfer module 120 adsorbs the other surface of the ledger panel MP whose state has changed from the normal state to the inverted state on the stage module 110, and then moves the ledger panel MP to the inverted state. While maintaining, it may be a component for moving to the first position for inspection for defects.
  • the picker module 130 adsorbs the other surface of the ledger panel MP moved to the first position by the transfer module 120, and then rises based on the first position while maintaining the reversing state.
  • a plate-shaped vacuum adsorption module 140 which will be described later, may adsorb the ledger panel MP in the reversed state.
  • the vacuum adsorption module 140 adsorbs the ledger panel MP while maintaining the smoothness in the reversed state.
  • the display panel DP is a component that inspects whether or not the display panel DP is defective by interacting with the probe pin 3002 of the probe block PB of the display panel inspection apparatus 200. I can.
  • the vacuum adsorption module 140 moves the ledger panel MP in the reversed state through position movement, The electrode pads of the display panel DP and the probe pins 3002 of the probe block PB are brought into contact with each other, so that the inspection for the defect of the display panel DP is performed in the reversed state.
  • the reason why the ledger panel MP must be finally adsorbed to the vacuum adsorption module 140 while maintaining the inverted state is to accurately control the position of the display panel DP to inspect whether the display panel DP is defective or not.
  • the ledger panel MP is adsorbed by other components other than the vacuum adsorption module 140 and moves to the display panel inspection device 200, the smoothness level This is because a problem has occurred in the back and the inspection for accurate defects cannot be guaranteed.
  • the ledger panel MP is disposed on the stage module 110 in a normal state.
  • FIG. 8 is a view for explaining a situation in which a ledger panel is seated in a normal state on a stage module provided in the ledger panel transfer apparatus according to the present invention.
  • the ledger panel MP after the ledger panel MP is disposed on the stage module 110 in a normal state (S10), it may be adsorbed.
  • the ledger panel MP represents one surface on which at least one display panel DP is provided in a shade for convenience of description.
  • the method of disposing the ledger panel MP on the stage module 110 is not specifically determined, and may be various, such as an automatic method by a robot device or a manual method by an operator in a nitrogen atmosphere.
  • the stage module 110 may include a plurality of stage units 112 for adsorbing the other surface SF2 of the ledger panel MP in the normal state, and the stage units 112 are separated from each other. So that the first space S1 is formed therebetween.
  • the stage unit 112 may be formed into nine as shown in FIG. 8, but is not limited thereto, and the ledger panel MP to be supported is not sagged by its own weight. The number can be changed as long as it can be supported stably.
  • Each of the stage units 112 may include adsorption means 114 such as adsorption pads for adsorbing the ledger panel MP, and the number of adsorption means 114 is not limited.
  • FIG. 9 and 10 are views for explaining a situation in which a ledger panel in a normal state is changed to a reverse state by rotation of a stage module in the situation shown in FIG. 8.
  • the stage module 110 may be rotated (R, S20) while adsorbing the ledger panel MP in a normal state, and the rotation direction is not limited.
  • a driving method for rotation of the stage module 110 is not specifically determined, and may be rotated using, for example, a known motor.
  • the state of the ledger panel MP which has been adsorbed in a normal state, is changed to an inverted state in which the one surface SF1 on which the deposition part is located is facing downward.
  • the ledger panel MP is continuously maintained in an inverted state while the inspection for defects is in progress, so that the display panel DP can perform an inspection for defects in a face down method. do.
  • FIG. 11 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention enters the stage module
  • FIGS. 12 and 13 are a transfer module provided to the ledger panel transfer device according to the present invention. It is a diagram for explaining a situation in which the ledger panel in a reversed state is adsorbed.
  • the transfer module 120 is a plurality of transfer units for adsorbing the other surface SF2 of the ledger panel MP that is inserted into the first space S1 provided by the stage unit 112 and disposed in a reversed state. (122) may be included.
  • the transfer units 122 may be disposed to be spaced apart from each other.
  • the transfer unit 122 may be formed in eight as shown in the drawing, but is not limited thereto.
  • the transfer unit 122 may adsorb the other surface SF2 of the ledger panel MP after entering the first space S1 provided by the ledger panel MP and the stage unit 112, and , If necessary for adsorption of the ledger panel MP, the position may be moved in the vertical direction.
  • Each of the transfer units 122 may be provided with adsorption means 124 such as adsorption pads for adsorbing the ledger panel MP, and the number of adsorption means 124 is not limited.
  • FIG. 14 is a view for explaining a situation in which the transfer module provided to the ledger panel transfer device according to the present invention has been moved to a first position.
  • the transfer module 120 may be moved to a first position for inspection for defects while maintaining the reversed state while adsorbing the ledger panel MP in a reversed state (S40). .
  • the first position may mean a position on the lower side of the ledger panel MP in the reverse state based on a position at which the vacuum adsorption module 140 and the picker module 130 are disposed, and the picker The module 130 may stably adsorb the ledger panel MP in the inverted state while maintaining the inverted state.
  • FIG. 15 and 16 are views for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is lowered to adsorb the ledger panel in a reversed state
  • FIG. 17 is a view showing a ledger panel transfer device according to the present invention. It is a diagram for explaining a situation in which the provided transfer module is returned to its original position.
  • the picker module 130 may move to the first position after passing through the vacuum adsorption module 140 by descending from the position in the third position, and by the transfer module 120
  • the ledger panel MP in the reversed state moved to the first position may be adsorbed (S50).
  • the picker module 130 may include a plurality of picker units 132 spaced apart from each other to prevent sagging by uniformly adsorbing the other surface SF2 of the ledger panel MP.
  • the transfer module 120 releases the adsorption as shown in FIG. 17 to be separated from the ledger panel MP and moved to its original position ( S60) can be.
  • the transfer module 120 which has been moved to its original position, can operate to inspect other display panels provided in other ledger panels.
  • FIG. 18 is a view for explaining a situation in which the picker module provided to the ledger panel transport apparatus according to the present invention is raised to a second position.
  • the picker module 130 adsorbs the ledger panel MP in a reversed state, it may be moved to a second position (S70) by ascending, whereby the vacuum adsorption module 140 is The ledger panel MP can be adsorbed (S80).
  • the second position may be a position raised to the vacuum adsorption module 140 by the picker module 130 based on the first position, and the vacuum adsorption module 140 is the picker module 130 As a result, it is possible to stably adsorb the ledger panel MP in a reversed state.
  • the vacuum adsorption module 140 may include a plurality of adsorption means such as adsorption pads for adsorbing the ledger panel MP.
  • 19 is a view for explaining a situation in which the picker module provided to the ledger panel transfer device according to the present invention is raised to a third position.
  • the picker module 130 releases the adsorption to release the ledger panel. After being separated from (MP), it may be raised and returned to the third position (S990).
  • an inspection for defects may be performed by the interaction between the vacuum adsorption module 140 and the display panel inspection apparatus 200.
  • the vacuum adsorption module 140 is moved to implement contact between the electrode pads of the display panel DP provided on the ledger panel MP and the probe pins 3002 of the probe block PB, This may mean that an inspection is performed on whether the display panel DP is defective.
  • 20 is a view for explaining a display panel inspection apparatus provided in a display panel inspection facility according to the present invention.
  • the display panel inspection device 200 is a device capable of inspecting LCD or OLED, etc., and is applied to all facilities that inspect display panels using probe units PU1 and PU2 and probe blocks PB. It can be possible.
  • the display panel inspection apparatus 200 can be applied not only to the equipment that inspects the face down method described with reference to FIGS. 1 to 19, but also to the equipment that inspects the face-up method. Can be applied.
  • the display panel inspection apparatus 200 may include a probe block assembly 2000 and a probe block loading unit 3000.
  • the probe block assembly 2000 is moved to the inspection position by moving the position of the vacuum adsorption module 140 for adsorbing the other surface of the ledger panel MP with one surface of the ledger panel MP facing downward.
  • the display panel DP is configured to perform an inspection for defects in the reversed state, and configured to support the probe block PB and the probe block PB in contact with the electrode pad of the display panel DP. It may include probe units PU1 and PU2.
  • the probe block assembly 2000 inspects for defects in the display panel DP moved to the inspection position by moving the position of the vacuum adsorption module adsorbing the ledger panel MP in a face-up method. It may be a configuration to allow the process to proceed.
  • the probe block loading unit 3000 has a configuration in which various types of probe blocks PB are loaded and stored, and it is possible to carry out and carry in the loaded probe blocks PB.
  • the probe block PB is selected while being loaded on the probe block loading unit 3000 in order to inspect the display panel DP, and then carried out to a predetermined position on the probe units PU1 and PU2. Can be mounted on.
  • the probe units PU1 and PU2 After the inspection of the first probe unit PU1 and the display panel DP for inspection of the display panel DP is completed, the probe units PU1 and PU2 have a second probe unit for inspection of other display panels having different sizes. It may include a probe unit (PU2).
  • PU2 probe unit
  • the first probe unit PU1 includes a 1-1 probe unit PU1-1 disposed in a horizontal direction D1, a 1-2 probe unit PU1-2 disposed in a vertical direction D2, and the It may include a 1-3th probe unit PU1-3 disposed in the longitudinal direction D2 and a 1-4th probe unit PU1-4 disposed in the horizontal direction D1.
  • the second probe unit PU2 includes a 2-1 probe unit PU2-1 disposed in a horizontal direction D1, a 2-2 probe unit PU2-2 disposed in a vertical direction D2, and the It may include a 2-3rd probe unit PU2-3 arranged in the longitudinal direction D2 and a 2-4th probe unit PU2-4 arranged in the horizontal direction D1.
  • the 1-1 probe unit (PU1-1) and the 2-1 probe unit (PU2-1) may be formed as a single unit as shown in the drawing.
  • the probe block PB loaded in the probe block loading unit 3000 may be carried out on the basis of the display panel DP to be inspected and mounted on the probe units PU1 and PU2, and the probe block PB
  • the carrying out and mounting of) may be implemented by carrying out and mounting means not shown.
  • the carrying-out and mounting means may be various known means such as a robot arm, and there is no particular limitation, such as including, for example, a belt or rail.
  • 21 to 28 are views for explaining a situation in which a 65-inch display panel and a 55-inch display panel provided on a ledger panel are inspected for defects by the display panel inspection apparatus according to the present invention.
  • the display panel inspection apparatus 200 detects that three 65-inch display panels and two 55-inch display panels are included in the ledger panel MP in a sensing unit (not shown).
  • the sensing unit may include an imaging unit and/or various sensor units using a camera, etc., and after the ledger panel MP is seated on the stage module 110, the ledger panel MP is The size of the display panel DP constituting the ledger panel MP before or during the movement to the position where the probe units PU and PU2 are disposed in the state of being adsorbed by the adsorption module 140, the display panel ( The number of electrode pads of DP) and the location of formation are detected.
  • the control unit determines which type of display panel to be inspected first. As described above, a situation in which a 65-inch display panel has been determined as an inspection target prior to a 55-inch display panel will be described as an example.
  • the control unit When the size and/or type of the display panel formed on the ledger panel MP is detected by the control unit, and the 65-inch display panel among the detected display panels is inspected first, the control unit is detected by the detection unit. Based on the number of electrode pads on the 65-inch display panel and the formation position, etc., among the probe blocks (PB) loaded in the probe block loading unit 3000, a probe block (PB) required for inspection is selected, and the probe unit (PU1, Among the mounting areas SR on PU2), the mounting area SR to which the selected probe block is to be mounted is selected and determined.
  • the mounting area SR is an area for individually mounting the probe blocks PB, and the probe units PU1 and PU2 may include a plurality of mounting areas SR, and the object of the inspection is The probe block may not be mounted in the specific mounting area SR depending on the type of display to be used, the location and number of electrode pads.
  • control unit controls the first probe unit PU1 when the above process is completed.
  • control unit is in a state in which the 1-1 probe unit PU1-1 is fixed, the 1-2 probe unit PU1-2, the 1-3 probe unit PU1-3, and At least one of the 1-4th probe units PU1-4 is moved so that the first probe unit PU1 is disposed at a position corresponding to an electrode pad provided on the 65-inch display panel.
  • the control unit is in a state in which the 1-1 probe unit PU1-1 is fixed on the support plate unit 210, the 1-2 probe unit PU1 -2), the 1-3th probe unit (PU1-3) and the 1-4th probe unit (PU1-4) may be moved on the support plate unit 210, and the positional movement is linear movement. It may be a position movement by.
  • the positional movement may be implemented using various known elements such as a linear motion guide, a motor, a ball screw and a ball nut, but this is only an example, and various known movement methods may be applied.
  • the 1-2 probe unit PU1-2 and the 1-3 probe unit PU1-3 may approach each other by a predetermined distance, and the 1-4 probe unit PU1-4 may be -1 A predetermined distance can be approached toward the probe unit (PU1-1).
  • the 1-4 probe unit (PU1-4) is to prevent interference with the 1-2 probe unit (PU1-2) and the 1-3 probe unit (PU1-3) when linearly moved.
  • Position movement may be implemented under the 1-2 probe unit PU1-2 and the 1-3 probe unit PU1-3.
  • the control unit transfers the selected probe block PB to the 1-1 probe unit PU1-1 by the carrying and mounting means. ), a predetermined mounting area SR on the 1-2th probe unit PU1-2, a predetermined mounting area SR on the 1-3th probe unit PU1-3, the 1- 4 Controls the carry-out and mounting means so as to be mounted on a predetermined mounting area SR on the probe unit PU1-4.
  • the top portions 3001 and 3003 may include a first position fixing portion 3001 formed by being recessed from the bottom surface of the probe block PB, and a second position fixing portion 3003 formed protruding from the bottom surface.
  • the guide parts 3005 and 3007 may include a first guide part 3005 protruding from the upper surface of the probe units PU1 and PU2 and a second guide part 3007 formed by being recessed from the upper surface. .
  • the first position fixing part 3001 is matched with the first guide part 3005, and the second position fixing part 3003 is matched with the second guide part 3007, It can be stably mounted on the mounting area SR on the probe units PU1 and PU2.
  • the mounting area SR on the probe units PU1 and PU2 is a guide that interacts with the position fixing portions 3001 and 3003 formed on the probe block PB to guide the position where the probe block PB is mounted.
  • a method for stably mounting the probe block PB on the probe units PU1 and PU2 may be provided with units 3005 and 3007, and other known methods may be applied in addition to the above method. .
  • the probe pin 3002 of the probe block PB may be powered by electrical connection between a connection terminal 3006 and a power supply unit 3009.
  • the power supply unit 3009 is a circuit board having a type of power supply terminal pattern that allows power to be applied to the probe block PB. Can be
  • the probe block PB is powered by an electrical connection with a probe pin 3002 in contact with an electrode pad of a display panel, a body 3004 supporting the probe pin 3002, and the power supply unit 3009.
  • a connection terminal 3006 to be applied to the probe pin 3002 and a circuit pattern part 3008 for electrically connecting the probe pin 3002 and the connection terminal 3006 may be included, and the circuit The pattern part 3008 may be a printed circuit board.
  • connection terminals 3006 may be formed in the same number or less than the number of power supply terminals to which power is applied by the power supply unit 3009, and the circuit pattern unit 3008 includes the probe pins ( When the number of 3002) is smaller than the number of the power supply terminals, it may be a printed circuit board capable of applying only a part of the power applied to the power supply terminals to the probe pin 3002.
  • the probe block PB mounted on the 1-4th probe unit PU1-4 is the probe block loading unit 3000 It is formed longer in the height direction D3 than the probe block PB which is carried out from the 1-2nd probe unit PU1-2 or the 1-3th probe unit PU1-3, and the first -2 Compensating the position of the 1-4 probe unit PU1-4 in the height direction D3 with respect to the probe unit PU1-2 and the 1-3 probe unit PU1-3 can do.
  • the display panel DP to be inspected is kept in a horizontal state.
  • the probe pins 3002 of the probe block PB must all be positioned at the same height in order to contact all electrode pads. do.
  • the The probe block PB that is longer in the height direction D3 than the probe block PB mounted on the 1-2 probe unit PU1-2 and the 1-3 probe unit PU1-3 should be mounted.
  • the control unit selects the probe block PB for position compensation in the height direction D3.
  • the probe block PB to be mounted on the 1-4 probe unit PU1-4 is combined with a separate component such as a spacer, so that the 1-2 probe unit PU1-2 and the first -3 It may be implemented longer in the height direction D3 than the probe block PB mounted on the probe unit PU1-3.
  • the probe block PB is mounted on the first probe unit PU1.
  • the probe block (PB) is mounted on the first probe unit (PU1)
  • the 65-inch display panel may be disposed at a position corresponding to the electrode pad.
  • the first probe unit PU1 is shown in the 25th. As described above, it is rotated 180 degrees by the rotation R of the support plate unit 210.
  • the electrode pad of the 65-inch display panel becomes the first probe unit PU1 due to the positional movement of the vacuum adsorption module 140. It is brought into contact with the probe pin 3002 of the probe block PB mounted on, and is inspected for a defect by applying power through the power supply unit 3009.
  • the second probe unit PU2 is operated by the control unit. Preparations are made for inspection for defects.
  • the control unit includes the 2-2 probe unit PU2-2, the 2-3 probe unit PU2-3, and the 2-4 probe unit while the 2-1 probe unit PU2-1 is fixed. At least one of the PU2-4 is moved so that the second probe unit PU2 is disposed at a position corresponding to the electrode pad provided on the 55-inch display panel.
  • control unit is in a state in which the 2-1 probe unit PU2-1 is fixed on the support plate unit 210, the 2-2 probe unit PU2 -2), the 2-3rd probe unit PU2-3 and the 2-4th probe unit PU2-4 may be moved on the support plate unit 210, and the positional movement is It may be a position movement by.
  • the positional movement may be implemented using various known elements such as a linear motion guide, a motor, a ball screw and a ball nut, but this is only an example, and various known movement methods may be applied.
  • the 2-2 probe unit PU2-2 and the 2-3rd probe unit PU2-3 may approach each other by a predetermined distance, and the 2-4 probe unit PU2-4 may be -1 A predetermined distance can be approached toward the probe unit PU2-1.
  • Position movement may be implemented under the 2-2 probe unit PU2-2 and the 2-3rd probe unit PU2-3.
  • the control unit transfers the selected probe block PB to the 2-1 probe unit PU2-1 by the carrying and mounting means. ), a predetermined mounting area SR on the 2-2 probe unit PU2-2, a predetermined mounting area SR on the 2-3rd probe unit PU2-3, the second 4 Controls the carry-out and mounting means so as to be mounted on a predetermined mounting area SR on the probe unit PU2-4.
  • the electrode pad of the 55-inch display panel becomes the second probe unit PU2 due to the positional movement of the vacuum adsorption module 140. It is brought into contact with the probe pin 3002 of the probe block PB mounted on, and is inspected for a defect by applying power through the power supply unit 3009.
  • the probe block (PB) mounted on the first probe unit (PU1) proceeds to a preparation mode for inspecting a display panel of another size, such as being moved to the probe block loading unit (3000) by a carrying-out and mounting means. And the above process is repeated.
  • the electrode pads of the display panel DP to be inspected are formed on all four side surfaces.
  • the electrode pads of the display panel DP to be inspected have some of the four side surfaces. It may be formed only on the side surface, and in this case, it will be natural that only a part of the probe unit required for inspection may be used.
  • the display panel inspection apparatus 200 performs an inspection on the display panel DP by selectively mounting a probe block PB required for inspection on the probe units PU1 and PU2, and This is a device that can improve the yield by performing the inspection more conveniently by replacing the probe block PB without replacing the probe units PU1 and PU2.
  • the display panel inspection apparatus 200 may include a probe block assembly 2000 and a probe block loading unit 3000, and the probe block assembly 2000 includes a plurality of probe blocks provided on the side of the display panel DP. It may include a plurality of probe blocks (PB) in contact with the electrode pad and probe units (PU1, PU2) supporting the plurality of probe blocks (PB).
  • PB probe blocks
  • the plurality of probe blocks PB are selected from each of the probe blocks PB loaded in the probe block loading unit 3000 to be inspected on the display panel DP, and then carried out to the display.
  • the panel DP is mounted at a predetermined position on the probe units PU1 and PU2, which are present at a position in which an inspection for a defect is performed.
  • the probe units PU1 and PU2 may have a plurality of mounting areas SR for individually mounting a probe block PB, and a probe block PB is mounted among the plurality of mounting areas SR.
  • the mounting area SR to be mounted is selected based on the number and formation position of electrode pads of the display panel DP to be inspected.
  • the probe units PU1 and PU2 may include a first probe unit PU1 and a second probe unit PU2, and on the first probe unit PU1 and the first probe unit PU1
  • the position of the first probe unit (PU1) and the second probe unit (PU2) is rotated to inspect other display panels having different sizes. Are exchanged with each other, so that the second probe unit PU2 and the probe block PB mounted on the second probe unit PU2 may inspect the other display panel.
  • the probe units PU1 and PU2 may be inspected for defects of the specific display panel and the other display panel without being replaced with other external probe units.
  • the first probe (PU1) or the second probe unit (PU1) is different from the display panel, which is currently inspected for defects only by replacing the probe block PB currently mounted for inspection without exchanging positions with each other. It is possible to perform an inspection for a defect in a sized display panel.
  • the above-mentioned probe block assembly 2000 is an assembly capable of performing inspection of the display panel DP by mounting a plurality of probe blocks PB required for inspection of the display panel DP on the probe unit as necessary. As such, it may be applicable to all devices for inspection of the display panel DP in a face down or face up method.
  • the control method of the probe block assembly 2000 includes at least one type of display panel included in the ledger panel MP-the display panel has a plurality of electrode pads formed along the side surfaces of the display panel.
  • the fourth step after the inspection of the first display panel is completed, when at least one of the probe blocks mounted in the mounting area is unnecessary or needs to be replaced for inspection of the second display panel having different sizes, the After selecting a probe block that is unnecessary or needs to be replaced, it may be carried out and loaded into the probe block loading unit.
  • the fourth step after the inspection of the first display panel is completed, when an additional probe block is required for inspection of a second display panel having a different size, the addition of the probe block loaded in the probe block loading unit After selecting a probe block, selecting a mounting area to which the additional probe block is to be mounted, and mounting the selected additional probe block to the selected mounting area.
  • the probe block assembly can perform inspection for defects of numerous types of display panels due to the replacement of the probe block.
  • 29 is a diagram illustrating another method of applying power to a probe pin provided in a probe block.
  • connection between the connection terminal 3106 of the probe block PB' and the power supply unit 3109 may be implemented by a method such as a socket.
  • the carrying-out and mounting means grips the main body 3104 and the connection terminal 3106, and then mounts the main body 3104 on the probe unit.
  • the connection terminal 3106 is inserted into the power supply unit 3109 while being seated in the region, so that the connection terminal 3106 and the power supply unit 3109 are electrically connected to each other.
  • 30 and 31 are diagrams for explaining a method for fixing or separating a probe block on a probe unit.
  • mounting regions of the probe unit may be partitioned from each other by a partition wall W, and the probe block PB is fixed in position by a first fixing means 3200 and a second fixing means 3300. And separating may be possible.
  • the first fixing means 3200 may be moved in position in the height direction D3, and when moved downward in the height direction D3, the second fixing means 3300 is rotated based on the hinge, and thus the probe block ( PB) can be separated.
  • the position of the probe block PB may be fixed and separated by the third fixing means 3400, and the probe block PB is pressed by the sliding of the third fixing means 3400.
  • the pressing means 3500 is rotated, so that the probe block PB can be separated.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Electroluminescent Light Sources (AREA)
  • Measuring Leads Or Probes (AREA)
PCT/KR2020/004967 2019-07-01 2020-04-13 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치 WO2021002572A1 (ko)

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CN202080045103.3A CN114424274B (zh) 2019-07-01 2020-04-13 用于检查显示面板的探针块组件、其控制方法及显示面板检查设备
JP2021576972A JP7250182B2 (ja) 2019-07-01 2020-04-13 ディスプレイパネル検査のためのプローブブロック組立体、この制御方法およびディスプレイパネル検査装置

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KR10-2019-0078764 2019-07-01
KR1020190078763A KR102097455B1 (ko) 2019-07-01 2019-07-01 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치
KR10-2019-0078763 2019-07-01
KR1020190078764A KR102097456B1 (ko) 2019-07-01 2019-07-01 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치

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JP2022539083A (ja) 2022-09-07
CN112180132A (zh) 2021-01-05
CN114424274A (zh) 2022-04-29
CN114424274B (zh) 2024-07-09
CN213068965U (zh) 2021-04-27

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