WO2020230821A1 - 溝加工装置及び溝加工方法 - Google Patents
溝加工装置及び溝加工方法 Download PDFInfo
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- WO2020230821A1 WO2020230821A1 PCT/JP2020/019132 JP2020019132W WO2020230821A1 WO 2020230821 A1 WO2020230821 A1 WO 2020230821A1 JP 2020019132 W JP2020019132 W JP 2020019132W WO 2020230821 A1 WO2020230821 A1 WO 2020230821A1
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- Prior art keywords
- laser beam
- polygon mirror
- condensing portion
- condensing
- grooving
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/18—Sheet panels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/02—Iron or ferrous alloys
- B23K2103/04—Steel or steel alloys
Definitions
- the present invention relates to a grooving apparatus and a grooving method for forming a groove in an object by a laser.
- the present application claims priority based on Japanese Patent Application No. 2019-091044 filed in Japan on May 14, 2019, and these contents are incorporated herein by reference.
- a polygon mirror has been used to irradiate the surface of a steel sheet with a laser beam in a direction that intersects the through direction of the steel sheet (scanning direction) to periodically form grooves on the surface of the steel sheet, resulting in iron loss.
- Grooving devices that improve the characteristics are known (see, for example, Patent Document 1).
- the laser beam LB incident on the polygon mirror 10 of the grooving apparatus is not a point light source but has a predetermined radius ⁇ .
- the laser beam LB reflected from the polygon mirror 10 is one of the surfaces of the steel plate 20 via the condenser lens 12.
- the light is collected at the location, and a groove is formed at the location on the surface of the steel plate 20.
- the laser beam LB when the laser beam LB is incident on the corner portion of the polygon mirror 10 that straddles the two adjacent surfaces, the laser beam LB is reflected from each of the two adjacent surfaces. It is divided into two laser beams LB1 and LB2.
- the divided laser beams LB1 and LB2 are focused on the surface of the steel plate 20 via the condenser lens 12.
- the ends of the grooves in the scanning direction are machined with laser beams LB1 and LB2 with insufficient energy densities. Therefore, the end of the groove becomes shallow, and a uniform groove cannot be formed.
- the divided laser beams LB1 and LB2 are irradiated in a direction different from that of the laser beam LB. Therefore, there is a possibility that a position different from the position where the groove on the surface of the steel sheet 20 should be formed, or another device other than the surface of the steel sheet 20 may be erroneously processed.
- the present invention has been made in view of the above problems, and an object of the present invention is to provide a grooving apparatus and a grooving method that realize uniform grooving and grooving depth without contaminating optical parts.
- the grooving device is a grooving device that forms a groove on the surface of an object by a laser beam, and is a light source device that outputs the laser beam and outputs from the light source device.
- a light condensing unit that collects light on the surface of the object and a laser beam that is provided outside the light condensing unit and is reflected from a corner portion that straddles two adjacent surfaces of the polygon mirror are passed through the object.
- the non-condensing portion does not have to have a focal point.
- the non-condensing portion may diverge the laser beam reflected from the corner portion of the polygon mirror.
- a shielding plate may be provided in the optical path of the laser beam that has passed through the non-condensing portion.
- the grooving method according to the embodiment of the present invention is a grooving method for forming a groove on the surface of an object by a laser beam, and is an output step for outputting the laser beam by a light source device and a polygon.
- a reflection step that reflects the laser beam output from the light source device by the mirror, and the laser beam reflected from one surface of the polygon mirror are passed through a condensing unit and condensed on the surface of the object.
- the laser beam reflected from the light collecting portion passing step and the corner portion straddling two adjacent surfaces of the polygon mirror is passed through a non-condensing portion provided outside the light collecting portion to pass the object.
- non-condensing portion passing step that does not condense light on the surface.
- the non-condensing portion does not have to have a focus in the step of passing through the non-condensing portion.
- the laser beam may be diverged in the non-condensing portion in the non-condensing portion passing step.
- the laser beam that has passed through the non-condensing portion in the non-condensing portion passing step is passed through the non-condensing portion, and the optical path of the laser beam is passed.
- a shielding step for shielding by using a shielding plate provided in the above may be further provided.
- a groove is not formed on the surface of the object.
- FIG. 2 schematically shows a configuration in which the grooving apparatus 100 according to the embodiment of the present invention is viewed from the rolling direction of the steel plate 20.
- the grooving apparatus 100 is an apparatus for periodically forming grooves on the surface of the steel plate 20 which is an object to be processed by a laser.
- the steel sheet 20 is made of, for example, a well-known grain-oriented electrical steel sheet material.
- the position in the width direction of the steel plate 20 is set based on the length and position of the groove formed on the surface of the steel plate 20, and the steel plate 20 is set based on the dimensions of the grooving apparatus 100.
- the position in the longitudinal direction of the steel sheet 20 is set.
- the width direction of the steel sheet 20 is the scanning direction, which is the left-right direction of the paper surface in FIG. 2.
- the longitudinal direction of the steel sheet 20 is, for example, the rolling direction of the steel sheet 20. ,
- the grooving apparatus 100 includes a polygon mirror 10, a light source apparatus 11, a collimator 11A, and a lens 13.
- the polygon mirror 10 has, for example, a regular polygonal prism, and a plurality of (N) plane mirrors are provided on each of a plurality of side surfaces constituting the regular polygonal prism.
- the laser beam LB is incident on the polygon mirror 10 from the light source device 11 via the collimator 11A in one direction (horizontal direction) and reflected by the plane mirror (reflection step).
- the polygon mirror 10 can be rotated around the rotation axis O1 by being driven by a motor (not shown), and the incident angle of the laser beam LB with respect to the plane mirror changes sequentially according to the rotation angle of the polygon mirror 10. As a result, the reflection direction of the laser beam LB is sequentially changed, and the laser beam LB can be scanned in the width direction of the steel plate 20.
- FIGS. 1A to 1B, FIGS. 2, 3, 5, 5A to 5E, 7 and 8 show an example in which the polygon mirror 10 has eight plane mirrors, the polygon mirror 10 constitutes the polygon mirror 10.
- the number of plane mirrors is not particularly limited.
- the light source device 11 outputs a laser beam by a predetermined irradiation method (for example, continuous irradiation method or pulse irradiation method) under the control of a control unit (not shown) (output step).
- a predetermined irradiation method for example, continuous irradiation method or pulse irradiation method
- the collimator 11A is connected to the light source device 11 via an optical fiber cable 15.
- the collimator 11A adjusts the radius of the laser beam output from the light source device 11 and outputs the adjusted laser beam LB.
- the laser beam LB has a laser diameter having a predetermined radius ⁇ , and the laser diameter has a circular shape, but may be an elliptical shape. In that case, the condensing shape can be made elliptical by inserting a cylindrical lens or a cylindrical mirror between the collimator 11A and the polygon mirror 10 to change the beam radius of one axis (for example, the scanning direction).
- the lens 13 is an optical system provided in the optical path of the laser beam reflected from the polygon mirror 10, and is manufactured by subjecting a piece of glass to processing such as grinding and polishing.
- the lens 13 has a condensing portion 13A and a non-condensing portion 13B integrally provided on the outer side (outer circumference) of the condensing portion 13A.
- the lens 13 may be configured by using a plurality of sets of lenses.
- a mirror may be adopted instead of the lens 13.
- the condensing unit 13A is located in the optical path of the laser beam LB reflected from one plane mirror of the polygon mirror 10.
- the condensing unit 13A constitutes a condensing optical system having a radius rc and a focal length f.
- the laser beam LB reflected from the polygon mirror 10 passes through the condensing portion 13A and is condensed on the surface of the steel plate 20 (condensing portion passing step), whereby a groove is formed on the surface of the steel plate 20.
- the non-condensing unit 13B is located in the optical path of the laser beams LB1 and LB2 that are divided and reflected from the corners of the polygon mirror 10 that straddle the two adjacent plane mirrors, and pass the divided laser beams LB1 and LB2. (Step through non-condensing part).
- the non-focusing unit 13B has no focal point because the focal length is infinite.
- the laser beams LB1 and LB2 that have passed through the non-condensing portion 13B irradiate the surface of the steel sheet 20, but the energy density does not increase because the light is not focused, and grooves are not formed on the surface of the steel sheet 20. Further, even when the laser beams LB1 and LB2 are not irradiated on the surface of the steel sheet 20, the laser beams LB1 and LB2 deviating from the steel sheet 20 may erroneously process the device or the like around the steel sheet 20. Absent.
- the grooving apparatus 100 may include a supply nozzle (not shown) for injecting an assist gas for blowing off the melt.
- the rotation angle ⁇ (°) of the polygon mirror 10 is defined by the central angle with respect to the reference position for each plane mirror constituting the polygon mirror 10.
- the maximum angle at which the incident laser beam LB fits on one surface (one plane mirror) of the polygon mirror 10 is defined as the critical angle ⁇ c. That is, the critical angle ⁇ c is the center LBc of the laser beam LB when the laser beam LB is totally reflected by one plane mirror without being divided by the corners straddling the two adjacent plane mirrors of the polygon mirror 10. Is the maximum angle at which is located. Assuming that the radius (circumscribed radius) of the circumscribed circle C1 of the polygon mirror 10 is R and the radius of the laser beam LB incident on the polygon mirror 10 is ⁇ , the critical angle ⁇ c is defined as in the equation (1).
- the laser beam LB incident on the plane mirror 101 is reflected downward from the plane mirror 101 (direction toward the surface of the steel plate 20), and the condensing portion 13A. Condenses on the surface of the steel sheet 20.
- the rotation angle ⁇ 0 °, as shown in FIG. 5A, the laser beam LB incident on the plane mirror 101 is in the vertical direction (direction perpendicular to the surface of the steel plate 20) from the plane mirror 101. It is reflected, passes through the center of the condensing portion 13A, and condenses on the surface of the steel plate 20.
- the laser beam LB is kept focused on the surface of the steel plate 20 as the polygon mirror 10 rotates.
- the position where the laser beam LB is reflected will change.
- a groove is formed on the surface of the steel sheet 20 in the width direction (scanning direction).
- the laser beam LB reflected from the plane mirror 101 passes through the first end portion 131 of the condensing portion 13A and reaches the surface of the steel plate 20. Condensing.
- the incident laser beam LB is reflected by the two plane mirrors 101 and 102, respectively, and is divided into two laser beams LB1 and LB2. ..
- the two laser beams LB1 and LB2 pass through the non-condensing portion 13B and irradiate the surface of the steel plate 20 and the devices around it.
- the laser beam LB reflected from the plane mirror 102 is on the opposite side of the first end portion 131 of the condensing portion 13A. It passes through the two end portions 132 and collects light on the surface of the steel plate 20.
- the laser beam LB incident on the plane mirror 102 is reflected downward from the plane mirror 102 (direction toward the surface of the steel plate 20), and the condensing portion 13A is moved. As it passes, it collects light on the surface of the steel plate 20.
- the laser beam LB reflected from the plane mirror 101 passes through the light collecting portion 13A and is focused on the surface of the steel plate 20.
- the range of the rotation angle ⁇ is - ⁇ 0 ⁇ ⁇ ⁇ - ⁇ c or + ⁇ c ⁇ ⁇ + ⁇ 0
- the laser beams LB1 and LB2 reflected from the corners of the plane mirror 101 and the adjacent plane mirror are not focused.
- the surface of the steel sheet 20 is irradiated through the portion 13B, but the light is not collected and the energy density does not increase.
- the dotted line shown in FIG. 6 represents the scanning direction of the laser beam.
- the laser beam LB reflected from the plane mirror 101 is minute on the surface of the steel plate 20.
- the light is collected by the circular spot S1.
- the spot S1 moves in one direction (left side in FIG. 6).
- the laser beam LB is 2 as described above. It is divided into two laser beams LB1 and LB2.
- the two laser beams LB1 and LB2 irradiate the surface of the steel sheet 20 via the non-condensing portion 13B to form two spots S2 and S3 corresponding to each. Since the laser beams LB1 and LB2 are not focused on the surface of the steel plate 20, each of the spots S2 and S3 has a larger area than the spot S1.
- the amount of light of the laser beam LB1 reflected from the plane mirror 101 is larger than the amount of light of the laser beam LB2 reflected from the plane mirror 102, so that the spot S2 Has a larger area than the spot S3.
- the light amount of the laser beam LB1 and the light amount of the laser beam LB2 are equal. Therefore, the area of the spot S2 and the area of the spot S3 are the same.
- the amount of light of the laser beam LB2 reflected from the plane mirror 102 is larger than the amount of light of the laser beam LB1 reflected from the plane mirror 101, so that the spot S3 has a larger area than spot S2.
- the laser beam LB reflected from the plane mirror 102 is formed by a minute circular spot S1 on the surface of the steel plate 20. It is focused. As the rotation angle ⁇ approaches 0 °, the spot S1 moves in one direction (left side in FIG. 6).
- the divided laser beams LB1 and LB2 form the non-condensing portion 13B.
- the light is not focused on the surface of the steel sheet 20 and the energy density is not increased, so that a groove is not formed on the surface of the steel sheet 20.
- the end of the groove in the scanning direction does not become shallow, uniform groove processing and groove depth can be realized, and a product having excellent iron loss characteristics can be produced. Can be done.
- the device or the like around the steel plate 20 is not accidentally processed.
- the non-condensing portion 13B of the lens 13 is a planar optical system having no focal point, but an optical system that diverges the divided laser beams LB1 and LB2 (FIG. 7) may be adopted.
- FIG. 7 shows a configuration in which the grooving apparatus 200 as a modification 1 of the present embodiment is viewed from the rolling direction of the steel plate 20.
- the grooving apparatus 200 includes a lens 17 in place of the lens 13 of the grooving apparatus 100 shown in FIGS. 2 and 5A to 5E.
- the lens 17 is an optical system provided in the optical path of the laser beam reflected from the polygon mirror 10, and is manufactured by subjecting a piece of glass to processing such as grinding and polishing.
- the lens 17 has a condensing portion 17A and a non-condensing portion 17B integrally provided on the outside (outer circumference) of the condensing portion 17A.
- the condensing unit 17A is located in the optical path of the laser beam LB reflected from one plane mirror of the polygon mirror 10 and constitutes a condensing optical system having a focal length f, like the condensing unit 13A of the lens 13.
- the non-condensing unit 17B is located in the optical path of the laser beams LB1 and LB2 divided and reflected from the corners of the polygon mirror 10, and passes through the divided laser beams LB1 and LB2.
- the non-condensing portion 17B is thick toward the peripheral portion, the surface on the polygon mirror 10 side is a concave spherical surface toward the polygon mirror 10, and the surface on the steel plate 20 side is a flat surface.
- the surface of the non-condensing portion 17B on the steel plate 20 side may also be a spherical surface concave toward the steel plate 20.
- the boundary portion between the condensing portion 17A and the non-condensing portion 17B may have a slightly flat portion.
- the laser beams LB1 and LB2 reflected from the corners of the polygon mirror 10 are diverged through the non-condensing portion 17B and are irradiated on the surface of the steel plate 20.
- the spots formed on the surface of the steel sheet 20 by the laser beams LB1 and LB2 passing through the non-condensing portion 17B have a larger area than the spots S2 and S3 shown in FIG. Therefore, the irradiation intensity of the laser beams LB1 and LB2 on the surface of the steel sheet 20 is weaker than that of the embodiments of FIGS. 2 to 6, and grooves are less likely to be formed on the surface of the steel sheet 20. Therefore, more uniform grooving and grooving depth can be realized.
- FIG. 8 shows a configuration in which the grooving apparatus 300 as the second modification of the present embodiment is viewed from the rolling direction of the steel plate 20.
- the grooving apparatus 300 includes a shielding plate 19 such as a mask in the optical path of the laser beams LB1 and LB2 that have passed through the non-condensing portion 13B (shielding step).
- the laser beams LB1 and LB2 are blocked by the shielding plate 19.
- the laser beams LB1 and LB2 that have passed through the non-condensing portion 13B have a weaker irradiation intensity than the laser beams LB1 and LB2 that have passed through the condensing lens 12 of FIG. 1B. Therefore, even if the shielding plate 19 is irradiated with the laser beams LB1 and LB2 that have passed through the non-condensing portion 13B, the shielding plate 19 is not damaged much.
- a mirror may be used instead of the lens as the optical system constituting the grooving apparatus.
- the present invention it is possible to provide a grooving apparatus and a grooving method that realize uniform grooving and grooving depth without contaminating optical parts. Therefore, the present invention has extremely high industrial applicability.
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Abstract
Description
(1)本発明の一実施形態に係る溝加工装置は、レーザビームによって対象物の表面に溝を形成する溝加工装置であって、前記レーザビームを出力する光源装置と、前記光源装置から出力された前記レーザビームを反射するポリゴンミラーと、前記ポリゴンミラーから反射された前記レーザビームの光路に設けられた光学系であって、前記ポリゴンミラーの一面から反射された前記レーザビームを通過させ、前記対象物の表面に集光させる集光部と、前記集光部の外側に設けられ、前記ポリゴンミラーの隣接する二面にまたがる角部から反射された前記レーザビームを通過させ、前記対象物の表面に集光させない非集光部と、を有する光学系と、を備える。
(2)上記(1)に記載の溝加工装置において、前記非集光部は焦点を有さなくてよい。
(3)上記(1)に記載の溝加工装置において、前記非集光部は、前記ポリゴンミラーの前記角部から反射された前記レーザビームを発散させてよい。
(4)上記(1)から(3)の何れか1項に記載の溝加工装置において、前記非集光部を通過した前記レーザビームの光路に遮蔽板を備えてよい。
(5)本発明の一実施形態に係る溝加工方法は、レーザビームによって対象物の表面に溝を形成する溝加工方法であって、光源装置により、前記レーザビームを出力する出力ステップと、ポリゴンミラーにより、前記光源装置から出力された前記レーザビームを反射する反射ステップと、前記ポリゴンミラーの一面から反射された前記レーザビームを集光部に通過させ、前記対象物の表面に集光する、集光部通過ステップと、前記ポリゴンミラーの隣接する二面にまたがる角部から反射された前記レーザビームを、前記集光部の外側に設けられた非集光部に通過させ、前記対象物の表面に集光させない非集光部通過ステップと、を備える。
(6)上記(5)に記載の溝加工方法において、前記非集光部通過ステップでは、前記非集光部が焦点を有さなくてよい。
(7)上記(5)に記載の溝加工方法において、前記非集光部通過ステップでは、前記非集光部において、前記レーザビームを発散させてよい。
(8)上記(5)から(7)に記載の何れか1項に溝加工方法において、前記非集光部通過ステップにおいて前記非集光部を通過した前記レーザビームを、前記レーザビームの光路に設けた遮蔽板を用いて遮る遮蔽ステップを更に備えてよい。
本実施形態において、ポリゴンミラー10の回転角度θ(°)は、ポリゴンミラー10を構成する平面鏡毎に、基準位置に対する中心角によって定義するものとする。図3に示すように、ポリゴンミラー10の回転軸O1から平面鏡101に垂線PLを下した位置を基準位置(θ=0°)とする。ポリゴンミラー10の回転角度θは、基準位置(θ=0°)に対して、各平面鏡上に入射したレーザビームLBの中心LBcの位置がなす角度(中心角)である。図3において、基準位置(θ=0°;垂線PL)に対して反時計回りの角度を正の角度、時計回りの角度を負の角度としている。
rc=L×tan2θc+φ/cos2θc …(2)
r0=L×tan2θ0+φ/cos2θ0 …(3)
レーザビームLBの半径φ:6mm;
ポリゴンミラー10を構成する平面鏡の数N:8;
外接半径R:140mm.
これにより、θ0=22.5°、臨界角θc=19.9°となる。
距離L=50mmとすると、式(2)及び式(3)より、rc=49.4mm、r0=58.5mmとなる。
例えば、溝加工装置を構成する光学系として、レンズの代わりにミラーを採用してもよい。
11 光源装置
11A コリメータ
13、17 レンズ
13A、17A 集光部
13B、17B 非集光部
15 光ファイバケーブル
19 遮蔽板
20 鋼板
100、200、300 溝加工装置
101、102 平面鏡
C1 外接円
LB レーザビーム
O1 回転軸
PL 垂線
Claims (8)
- レーザビームによって対象物の表面に溝を形成する溝加工装置であって、
前記レーザビームを出力する光源装置と、
前記光源装置から出力された前記レーザビームを反射するポリゴンミラーと、
前記ポリゴンミラーから反射された前記レーザビームの光路に設けられた光学系であって、前記ポリゴンミラーの一面から反射された前記レーザビームを通過させ、前記対象物の表面に集光させる集光部と、前記集光部の外側に設けられ、前記ポリゴンミラーの隣接する二面にまたがる角部から反射された前記レーザビームを通過させ、前記対象物の表面に集光させない非集光部と、を有する光学系と、
を備える、溝加工装置。 - 前記非集光部は焦点を有さない、請求項1に記載の溝加工装置。
- 前記非集光部は、前記ポリゴンミラーの前記角部から反射された前記レーザビームを発散させる、請求項1に記載の溝加工装置。
- 前記非集光部を通過した前記レーザビームの光路に遮蔽板を備える、請求項1から請求項3の何れか1項に記載の溝加工装置。
- レーザビームによって対象物の表面に溝を形成する溝加工方法であって、
光源装置により、前記レーザビームを出力する出力ステップと、
ポリゴンミラーにより、前記光源装置から出力された前記レーザビームを反射する反射ステップと、
前記ポリゴンミラーの一面から反射された前記レーザビームを集光部に通過させ、前記対象物の表面に集光する、集光部通過ステップと、
前記ポリゴンミラーの隣接する二面にまたがる角部から反射された前記レーザビームを、前記集光部の外側に設けられた非集光部に通過させ、前記対象物の表面に集光させない非集光部通過ステップと、
を備える溝加工方法。 - 前記非集光部通過ステップでは、前記非集光部が焦点を有さない、請求項5に記載の溝加工方法。
- 前記非集光部通過ステップでは、前記非集光部において、前記レーザビームを発散させる、請求項5に記載の溝加工方法。
- 前記非集光部通過ステップにおいて前記非集光部を通過した前記レーザビームを、前記レーザビームの光路に設けた遮蔽板を用いて遮る遮蔽ステップを更に備える、請求項5から請求項7の何れか1項に記載の溝加工方法。
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