WO2020192423A1 - Dispositif et procédé d'atténuation de charges statiques - Google Patents

Dispositif et procédé d'atténuation de charges statiques Download PDF

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Publication number
WO2020192423A1
WO2020192423A1 PCT/CN2020/078792 CN2020078792W WO2020192423A1 WO 2020192423 A1 WO2020192423 A1 WO 2020192423A1 CN 2020078792 W CN2020078792 W CN 2020078792W WO 2020192423 A1 WO2020192423 A1 WO 2020192423A1
Authority
WO
WIPO (PCT)
Prior art keywords
air gap
static charges
platform
stubs
upper object
Prior art date
Application number
PCT/CN2020/078792
Other languages
English (en)
Inventor
Kek Hing Kow
Original Assignee
Esd Technology Consulting & Licensing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Esd Technology Consulting & Licensing Co., Ltd. filed Critical Esd Technology Consulting & Licensing Co., Ltd.
Priority to CN202080001314.7A priority Critical patent/CN111989988A/zh
Publication of WO2020192423A1 publication Critical patent/WO2020192423A1/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices

Definitions

  • the present application relates to static charge mitigating technique, and more specific, to a device and method for mitigating static charges.
  • static charge neutralizing devices 10 like air ionizers are used to blow at the TFT-glass 30 from above the platform 20 as shown in Fig.1.
  • D1 (CN201510117646.2) has disclosed a static electricity elimination method comprising steps of generating ion wind via a static electricity elimination device when a substrate is separated from a machine platform body; directing the ion wind to the substrate through vent holes of the machine platform body; and eliminating the static electricity on the substrate by means of the ion wind. Accordingly, D1 uses air ionizer as a reative approach in neutralizing static charge. When the substrate is separated from the insulator body, static charge will be generated due to tribo-charging. In dry ambient environment, the static charge is high.
  • the air ionizer is used to bring down the static charge AFTER it is being generated to a risky high level causing ESD damage to ESD-sensitive microchip. Furthermore, very limited surface area of static charge mitigation can be obtained when substrate rest on the platform body
  • D2 (CN201610326493.7) has disclosed a fabric steam box including a box 7 which is divided into a steam cavity 13 and a heating cavity 19 through a partition 6 which prevents the water 8 in the steam cavity 13 from entering the heating cavity 19 to damage the electric heating rod 3 during use; wherein the heating cavity 19 is provided with an electric heating rod 3 during use for heating the water 8 in the steam cavity 13, and a steam plate 9 is arranged inside the steam cavity 13, in particular, the upper surface of the steam plate 9 is supported by a support 10 with a number of rollers 16 for supporting the textile 14 when in use, and these rollers 16 can prevent the textile 14 from sagging and rubbing with the box 7, thus preventing the damage of the fiber structure due to the rubbing. Accordingly, D2 just teaches only heated steam system coming from the bottom of the textile can be used for improving the tension, strength and hand feeling of textile raw materials and the rollers can just be used for preventing the damage of the fiber structure.
  • a device for mitigating static charges comprising an air gap forming unit arranged between an upper object and a platform for forming an air gap between the upper object and the platform; a humid air generator for generating humid airflow; and a delivery component connecting the humid air generator for delivering the humid airflow to the air gap for mitigating static charges; wherein the air gap forming unit at least comprises a stub arranged between the upper object and the platform, wherein the delivery component is arranged on at least one side of the platform with an air outlet facing the air gap for delivering the humid airflow into the air gap.
  • the air gap forming unit further comprises a flat sheet arranged on the platform, wherein a plurality of stubs are arranged on a top surface of the flat sheet; wherein the air gap is formed between a top surface of the flat sheet and a bottom surface of the upper object.
  • the flat sheet has a size matching that of the platform and the plurality of stubs spread evenly across the top surface of the flat sheet, wherein the plurality of stubs are arranged in multiple lines and each two stubs have same distance between each other.
  • the platform comprises a moveable surface and the flat sheet comprises a plurality of flat strips arranged on the moveable surface, and the plurality of stubs spread evenly across a top surface of each flat strip.
  • the moveable surface is a top surface of a conveyer belt
  • the plurality of flat strips are attached on the conveyer belt by an adhesive tape with an equal interval
  • the plurality of flat strips are provided with clamping structures at their both sides for clamping both sides of the conveyer belt.
  • each flat strip is provided with a female matching part and a male matching part for combined together.
  • the platform comprises a conveyer belt and a plurality of stubs are attached on the conveyer belt by an adhesive tape; wherein the air gap is formed between a top surface of the conveyer belt and a bottom surface of the upper object.
  • the air gap forming unit further comprises a hollow block arranged on the platform, wherein a plurality of stubs and air outlets are arranged on a top surface of the hollow block, and an inlet opening is arranged on a side surface of the hollow block; wherein the air gap is formed between a top surface of the hollow block and a bottom surface of the upper object.
  • the hollow block is a cover removably mounted on the platform.
  • the plurality of stubs and air outlets spread evenly across the top surface of the hollow block.
  • the plurality of stubs are arranged in multiple lines and each two stubs have same distance between each other; the plurality of air outlets are also arranged in multiple lines and each two stubs have same distance between each other.
  • the delivery component is connected between the humid air generator to the inlet opening of the hollow block for delivering the humid airflow into the hollow block, wherein the humid airflow flows into the air gap between the top surface of the hollow block and the bottom surface of the upper object through the air outlets and hits on the bottom surface of the upper object for mitigating static charges.
  • the stub is provided with a rotatable upper portion for minimizing static charge generation by eliminating rubbing at contact surfaces between the upper object and the stub.
  • the stub comprises a cylindrical upper portion supported by two vertical stands at its both ends, wherein the cylindrical upper portion is rotatable along its horizontal axis.
  • a method for mitigating static charges by using a device for mitigating static charges discussed above comprising: S1. fabricating an air gap forming unit with a stub; S2. mounting the air gap forming unit on a platform and placing an upper object above the air gap forming unit and supporting the upper object by the stub; S3. delivering humid airflow into an air gap formed by the stub between the upper object and the platform for mitigating static charges.
  • the humid airflow delivered from the humid air generator moves freely below the bottom surface of the upper object, which may be a TFT-glass or a semiconductor chip, and hits onto the bottom surface of the upper object. Then the humid airflow that stays in the air gap between the upper object and the platform forms a column of slow-moving humid airflow passage that continuously moves horizontally along the air passage way until it moves out of the air gap into the surrounding ambient environment. It is discovered that the static charge that resides on the static laden TFT-glass is surprisingly reduced.
  • Fig. 1 is a diagram showing a traditional method for mitigating static charges.
  • Fig. 3 is a diagram showing a preferable embodiment of the air gap forming unit.
  • Fig. 4 is a diagram showing a further preferable embodiment of the air gap forming unit.
  • Fig. 5 is a structural diagram of the device for mitigating static charges according to a second embodiment of the present application.
  • Fig. 6 is a diagram showing the preferable embodiment of the hollow block.
  • Fig. 7 is a diagram showing the assembly of the hollow block on the platform according to a preferable embodiment of the present application.
  • Fig. 8 is a diagram showing the blowing out of the humid airflow.
  • Fig. 9 is a structural diagram of the device for mitigating static charges according to a third embodiment of the present application.
  • Fig. 10A-10E are diagrams showing further preferable embodiments of the air gap forming unit.
  • Fig.11 shows static charge mitigating results of the prior art and the present application.
  • Fig.12 is a flow diagram of the method for mitigating static charges according to a first embodiment of the present application.
  • the present application relates to a device and method for mitigating static charges, which employs a specially designed air gap forming unit to form an air passage way between the upper object and the platform.
  • the humid airflow delivered from the humid air generator moves freely below the bottom surface of the upper object, which may be a TFT-glass or a semiconductor chip, and hits onto the bottom surface of the upper object. Then the humid airflow that stays in the air gap between the upper object and the platform forms a column of slow-moving humid airflow passage that continuously moves horizontally along the air passage way until it moves out of the air gap into the surrounding ambient environment. It is discovered that the static charge that resides on the static laden TFT-glass is surprisingly reduced.
  • Fig. 2 is a structural diagram of the device for mitigating static charges according to a first embodiment of the present application.
  • the device for mitigating static charges comprises an air gap forming unit arranged between an upper object 300 and a platform 500 for forming an air gap U between the upper object 300 and the platform 500; a humid air generator 400 for generating humid airflow; and a delivery component 200 connecting the humid air generator 400 for delivering the humid airflow to the air gap U for mitigating static charges.
  • the air gap forming unit comprises a stub 110 and a flat sheet 600 arranged between the upper object 300 and the platform 500.
  • a plurality of stubs 110 are arranged on the upper surface of the flat sheet 600.
  • the air gap U is formed between the top surface of the flat sheet 600 and a bottom surface of the upper object 300.
  • the delivery component 200 is arranged at one side of the platform 600 with holes 210 facing the air gap U for delivering the humid airflow into the air gap U.
  • the humid airflow flows in the air gap and hits on the bottom surface of the upper object 300 for mitigating static charges.
  • the humid airflow (shown by arrow D) can be blown out at a 45 degree inclined downwards partially moves into the air gap U and partially moves on the top of the upper object 300 (shown by arrow A).
  • the delivery component 200 can be arranged at any position with any shape, as if it can deliver the humid airflow into the air gap U.
  • the holes 210 can be replaced by other air outlets such as narrow slot and so on.
  • the upper object 300 can comprises such as PCBA (assembled PCB) and any object of big surface area, or any object that can rest on or supported by the stub(s), such as but not limited to TFT-glass, etc..
  • the platform 500 can be static platform having a flat surface which has the same or similar size as that of the upper object 300, just as shown in Fig.2.
  • the platform 500 can have a movable surface, such as a top surface of a conveyer belt, and the flat sheet comprises a plurality of flat strips arranged on the moveable surface, and the plurality of stubs spread evenly across the top surface of each flat strip.
  • the flat strips are narrow strips with a length similar or equal to the width of the moveable surface.
  • the flat sheet 600 can be omitted.
  • the air gap forming unit can just comprise stubs arranged between the upper object 300 and the platform 500.
  • the shape and amount of the stubs 110 can be determined according to actual requirement, as if an appropriate air gap can be formed between the upper object 300 and the platform 500.
  • the stubs 110 can be arranged directly on the platform 500 by any known manner for supporting the upper object 300.
  • the stubs can be arranged on the flat sheet 600 or the platform 500 by any possible way, such as clamping structures, adhesive, bolt or screw and so on. In a preferable embodiment, U-shape clamping structures, dovetail grooves and corresponding dovetail projections, or 3M strong double sided adhesive tape can be employed.
  • the flat sheet 600 can be rectangular shaped and the plurality of stubs 110 spread evenly across the flat sheet 600 in multiple lines and each two stubs 110 have same distance between each other.
  • the flat sheet 600 is made of plastic, metal, wood, rubber, or any combination of these materials.
  • the flat sheet 600 can be round, oval, regular or irregular.
  • the air gap forming unit comprises a rectangular shaped flat sheet 600 and a plurality of stubs 110 which spread evenly across the flat sheet 600.
  • the stub 110 is provided with a rotatable upper portion for minimizing static charge generation by eliminating rubbing at contact surfaces between the upper object and the stub 110.
  • each stub 110 comprises a cylindrical upper portion 111 supported by two vertical stands 112 at its both ends, wherein the cylindrical upper portion 111 is rotatable along its horizontal axis.
  • the stub 110 may have different design, such as just have one vertical stand for supporting a roller arranged above. This rotatable stub design provides a good means to minimize static charge generation at the contact surfaces between the flat sheet and the stub by friction reduction (less friction, less static charge generation) whenever there is a movement between the flat sheet and the stub.
  • the device for mitigating static charges employs a specially designed air gap forming unit to form an air passage way between the upper object and the platform.
  • the humid airflow delivered from the humid air generator moves freely below the bottom surface of the upper object, which may be a TFT-glass, and hits onto the bottom surface of the upper object.
  • the humid airflow that stays in the air gap between the upper object and the platform forms a column of slow-moving humid airflow passage that continuously moves horizontally along the air passage way until it moves out of the air gap into the surrounding ambient environment. It is discovered that the static charge that resides on the static laden TFT-glass is surprisingly reduced.
  • Fig. 5 is a structural diagram of the device for mitigating static charges according to a second embodiment of the present.
  • the device for mitigating static charges comprises an air gap forming unit arranged between a TFT-glass 300 and a platform 500.
  • the air gap forming unit comprises a hollow block 100 arranged with a stub 110 on its top surface for supporting the TFT-glass 300, a hole 120 on its top surface and an inlet opening 130 on one of its side walls.
  • a humid air generator 400 for generating humid airflow and a delivery component 200 connects the humid air generator 400 to the inlet opening 130 of the hollow block 100 for delivering the humid airflow into the hollow block 100.
  • the humid airflow generated by the humid air generator 400 flows into an air gap between the top surface of the hollow block 100 and a bottom surface of the TFT-glass 300 through the hole 120 and hits on the bottom surface of the TFT-glass 300 for mitigating static charges.
  • the hollow block 100 can have any shape, such as a cuboid shape, a cylinder shape, or any other regular or irregular shape.
  • the shape of the hollow block 100 matches that of the TFT-glass 300 and/or the platform 500.
  • the hollow block 100 is a rectangular-shaped cover removably mounted on the platform 500.
  • the hollow block 100 can have a specially designed top-surface perforated with a plurality of holes 120 and arranged with a plurality of protruded stubs 110 both spread evenly across its top surface.
  • the plurality of holes 120 are arranged in multiple lines and each two holes have same distance between each other.
  • the plurality of stubs 110 are arranged in multiple lines and each two stubs 110 have same distance between each other.
  • the stubs 110 and the holes 120 can be arranged randomly or in different rules, which depend on the actual requirements.
  • the size of the holes 120, the height of the stubs 110, and the amounts of both the holes 120 and the stubs 110 can be arranged according to actual requirements.
  • the holes 120 can be replaced by other air outlets such as narrow slot and so on.
  • the hollow block 100 can be mounted on the platform 500 by conventional mechanical or adhesive means or just rest on it with its own weight.
  • the hollow block 100 can have a size smaller than that of the platform 500, so it can just rest on the platform 500 as shown in Fig.6.
  • This simple portable cover design allows easy installation or removal from the platform 500.
  • the TFT-glass 300 With the protruded stubs 110 on the hollow block 100 that is resting on the platform 500, the TFT-glass 300 now will not have a chance to rest on the platform 500, rather it will rest on the protruded stubs 110 instead.
  • Such new design is creating an air gap beneath the bottom surface of the TFT-glass 300, providing a means for the humid airflow to moves freely below the bottom surface of the TFT-glass 300.
  • This is unique as such structural design will allow humid air generator like a humid air generator or an air ionizer to deliver a column of humid airflow for neutralizing the static charge on the TFT-glass 300 from below along its bottom surface.
  • the TFT-glass 300 is placed flat on the top of the stubs 110 and charged up with a static gun to different level of voltages.
  • the platform 500 is arranged with a surface arranged with pin tips 510 upward.
  • the humid air inside the hollow compartment of the hollow block 100 moves spontaneously via the many small holes120 on the top surface of the hollow block 100, in present embodiment on the inside roof of the perforated rectangular-shaped cover, and finally flows out of the cover hitting onto the bottom surface of the TFT-glass 300.
  • the humid air that stays between the bottom surface of the TFT-glass 300 and the top surface of the hollow block 100 forms a column of slow-moving humid air passage that continuously moves horizontally along the air passage way until it moves out of the air gap into the surrounding ambient environment as illustrated in Fig.8.
  • Fig. 9 is a structural diagram of the device for mitigating static charges according to a third embodiment of the present application.
  • the device for mitigating static charges comprises an air gap forming unit arranged between an upper object 300 and a platform 500 for forming an air gap between the upper object 300 and the platform 500; a humid air generator for generating humid airflow; and a delivery component 200 connecting the humid air generator 400 for delivering the humid airflow to the air gap for mitigating static charges.
  • the air gap forming unit comprises a plurality of stubs 110 and a plurality of flat strips 610.
  • the platform 500 is a platform supporting a conveyer belt 530 moving along the direction shown by the arrows
  • the upper object 300 is a semiconductor chip with a relatively small size.
  • the platform 500 may comprises other moveable surface, and the upper object 300 can be other subjects.
  • the plurality of flat strips 610 are arranged on the top surface of the conveyer belt 530 and perpendicular to the transmission direction of the conveyer belt 530. As shown in Fig.
  • the flat strips 610 can be attached on the conveyer belt by an adhesive tape with an equal interval, and the plurality of stubs 110 are arranged on each flat strip 610 with equal distances in a line.
  • the flat strips 610 are narrow rectangle strips with a length equal to the width of the conveyer belt 530.
  • Figs. 10A-10E are diagrams showing further preferable embodiments of the air gap forming unit.
  • the flat strip 610 can be arranged with a female matching part 611 at one end and a male matching part 612 at the other end, in such way, two flat strips 610 can be combined together as shown in Fig. 10C.
  • the female matching part 611 and the male matching part 612 also can be arranged at the left and/or right sides of the flat strip 610 for forming a wider flat strip as shown in Fig. 10B.
  • the female matching part 611 can be a dovetail groove and the male matching part 612 can be a corresponding dovetail projection.
  • the flat strip 610 can be provided with clamping structures 616 at both sides for clamping both sides of the conveyer belt 530.
  • the clamping structures 616 can have a U-shape.
  • the flat strip 610 can be provided with adhesives, such as 3M strong double sided adhesive tape on its bottom surface for attaching on the top surface of the conveyer belt 530.
  • the flat strip 610 can be omitted, such that the plurality of stubs 110 are directly arranged on the top surface of the conveyer belt 530, such as via adhesives, especially via 3M strong double sided adhesive tape.
  • the plurality of stubs 110 can have a truncated cone shape.
  • the plurality of stubs 110 can have other shapes, such as a cone shape, a cylinder shape or other shape.
  • the device for mitigating static charges removed and replaced by an conventional air ionizer static charge mitigation process with our stubs of blowing directly onto the TFT-glass that is resting on an anodized aluminum block, the amount of static charge reduction falls to the range of approximately 30% to 60% of its original value respectively.
  • Fig.12 is a flow diagram of the method for mitigating static charges according to a first embodiment of the present application.
  • step S1 an air gap forming unit with a stub is fabricated.
  • step S2 the air gap forming unit is mounted on a platform and an upper object is placed above the air gap forming unit and supported by the stub.
  • step S3 humid airflow is delivered into an air gap formed by the stub between the upper object and the platform for mitigating static charges.
  • the method for mitigating static charges according to the present application can be implemented by the device for mitigating static charges discussed above, and would not be repeated for concise.

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  • Elimination Of Static Electricity (AREA)

Abstract

La présente invention concerne un dispositif d'atténuation de charges statiques qui utilise une unité de formation d'espace d'air spécialement conçue pour former une voie de passage d'air entre l'objet supérieur (300) et la plateforme (500). L'invention concerne un procédé d'atténuation de charges statiques à l'aide du dispositif. Le flux d'air humide délivré par le générateur d'air humide (400) se déplace librement sous la surface inférieure de l'objet supérieur (300) et frappe la surface inférieure de l'objet supérieur (300). Ensuite, le flux d'air humide qui reste dans l'espace d'air (U) entre l'objet supérieur (300) et la plateforme (500) forme une colonne de passage d'écoulement d'air humide à déplacement lent qui se déplace en continu horizontalement le long de la voie de passage d'air jusqu'à ce qu'il se déplace hors de l'espace d'air (U) dans l'environnement ambiant alentour. Il est découvert que la charge statique qui réside sur l'objet supérieur (300) est étonnamment réduite.
PCT/CN2020/078792 2019-03-28 2020-03-11 Dispositif et procédé d'atténuation de charges statiques WO2020192423A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202080001314.7A CN111989988A (zh) 2019-03-28 2020-03-11 抑制静电电荷的装置和方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/CN2019/080108 WO2020191715A1 (fr) 2019-03-28 2019-03-28 Dispositif et procédé pour atténuer des charges statiques
CNPCT/CN2019/080108 2019-03-28

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Publication Number Publication Date
WO2020192423A1 true WO2020192423A1 (fr) 2020-10-01

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PCT/CN2019/080108 WO2020191715A1 (fr) 2019-03-28 2019-03-28 Dispositif et procédé pour atténuer des charges statiques
PCT/CN2020/078792 WO2020192423A1 (fr) 2019-03-28 2020-03-11 Dispositif et procédé d'atténuation de charges statiques

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WO (2) WO2020191715A1 (fr)

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Publication number Priority date Publication date Assignee Title
GB1315201A (en) * 1970-03-20 1973-05-02 Kodak Ltd Method of removing static from photographic supports
JP2012064395A (ja) * 2010-09-15 2012-03-29 Toppan Forms Co Ltd 水クラスターを用いた除電方法及びその装置
CN202217652U (zh) * 2011-07-26 2012-05-09 北京京东方光电科技有限公司 一种模块化基板载物台及其应用设备
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JP2016062755A (ja) * 2014-09-18 2016-04-25 株式会社キーエンス 除電装置
CN207166842U (zh) * 2017-06-26 2018-03-30 大科防静电技术咨询（深圳）有限公司 气流静电消除器
CN208084957U (zh) * 2018-02-08 2018-11-13 青岛软盛塑业有限公司 一种水雾除静电的吹塑机
CN108728922A (zh) * 2018-08-14 2018-11-02 安徽和邦纺织科技有限公司 一种生物质纤维纺丝机的静电无损去除装置

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CN111989988A (zh) 2020-11-24

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