CN102254764B - 器件承载装置 - Google Patents
器件承载装置 Download PDFInfo
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- CN102254764B CN102254764B CN 201110152913 CN201110152913A CN102254764B CN 102254764 B CN102254764 B CN 102254764B CN 201110152913 CN201110152913 CN 201110152913 CN 201110152913 A CN201110152913 A CN 201110152913A CN 102254764 B CN102254764 B CN 102254764B
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- 230000003068 static effect Effects 0.000 claims abstract description 43
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- Elimination Of Static Electricity (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110152913 CN102254764B (zh) | 2011-06-08 | 2011-06-08 | 器件承载装置 |
US13/254,166 US8961693B2 (en) | 2011-06-08 | 2011-08-03 | Component supporting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110152913 CN102254764B (zh) | 2011-06-08 | 2011-06-08 | 器件承载装置 |
Publications (2)
Publication Number | Publication Date |
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CN102254764A CN102254764A (zh) | 2011-11-23 |
CN102254764B true CN102254764B (zh) | 2013-03-27 |
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ID=44981948
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Application Number | Title | Priority Date | Filing Date |
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CN 201110152913 Expired - Fee Related CN102254764B (zh) | 2011-06-08 | 2011-06-08 | 器件承载装置 |
Country Status (1)
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CN (1) | CN102254764B (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103484819B (zh) * | 2012-06-11 | 2017-08-04 | 赛恩倍吉科技顾问(深圳)有限公司 | 顶出装置 |
WO2014015485A1 (zh) * | 2012-07-25 | 2014-01-30 | 深圳市华星光电技术有限公司 | 器件承载装置 |
CN102897462B (zh) * | 2012-11-02 | 2015-02-18 | 深圳市华星光电技术有限公司 | 堆垛机及仓储系统 |
US9839106B2 (en) * | 2014-07-23 | 2017-12-05 | Moxtek, Inc. | Flat-panel-display, bottom-side, electrostatic-dissipation |
CN104669221A (zh) * | 2015-03-17 | 2015-06-03 | 合肥京东方光电科技有限公司 | 一种绝缘机台、设备及消除静电的方法 |
US10524341B2 (en) | 2015-05-08 | 2019-12-31 | Moxtek, Inc. | Flowing-fluid X-ray induced ionic electrostatic dissipation |
CN106154607B (zh) * | 2016-08-26 | 2019-03-29 | 京东方科技集团股份有限公司 | 一种升降机构 |
CN107329289A (zh) * | 2017-07-19 | 2017-11-07 | 武汉华星光电技术有限公司 | 去静电剥离装置及液晶面板制作设备 |
CN108279552B (zh) * | 2018-01-26 | 2021-04-27 | 京东方科技集团股份有限公司 | 基板载台和曝光机 |
CN109068467A (zh) * | 2018-09-18 | 2018-12-21 | 张家港康得新光电材料有限公司 | 一种除静电装置及除静电方法 |
CN111081589A (zh) * | 2018-10-19 | 2020-04-28 | 北京北方华创微电子装备有限公司 | 反应腔室及半导体加工设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1542940A (zh) * | 2003-03-17 | 2004-11-03 | 株式会社瑞萨科技 | 具有半导体晶片载置台的半导体处理装置 |
CN101752209A (zh) * | 2008-12-19 | 2010-06-23 | 中芯国际集成电路制造(上海)有限公司 | 减少球状缺陷的方法及其装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100785620B1 (ko) * | 2005-03-15 | 2007-12-12 | 오므론 가부시키가이샤 | 제전 방법, 제전 장치, 유리 기판의 대전 방지 방법 및유리 기판의 대전 방지 장치 |
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2011
- 2011-06-08 CN CN 201110152913 patent/CN102254764B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1542940A (zh) * | 2003-03-17 | 2004-11-03 | 株式会社瑞萨科技 | 具有半导体晶片载置台的半导体处理装置 |
CN101752209A (zh) * | 2008-12-19 | 2010-06-23 | 中芯国际集成电路制造(上海)有限公司 | 减少球状缺陷的方法及其装置 |
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CN102254764A (zh) | 2011-11-23 |
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