WO2020192116A1 - 双工件台柔性卷带曝光装置及曝光方法 - Google Patents

双工件台柔性卷带曝光装置及曝光方法 Download PDF

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Publication number
WO2020192116A1
WO2020192116A1 PCT/CN2019/114736 CN2019114736W WO2020192116A1 WO 2020192116 A1 WO2020192116 A1 WO 2020192116A1 CN 2019114736 W CN2019114736 W CN 2019114736W WO 2020192116 A1 WO2020192116 A1 WO 2020192116A1
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WIPO (PCT)
Prior art keywords
exposure
measurement
workpiece
stage
flexible
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PCT/CN2019/114736
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English (en)
French (fr)
Inventor
李志丹
陈勇辉
李会丽
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上海微电子装备（集团）股份有限公司
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Publication of WO2020192116A1 publication Critical patent/WO2020192116A1/zh

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

Definitions

  • the present invention relates to the technical field of photolithography, in particular to a dual-workpiece stage flexible tape exposure device and an exposure method.
  • the thin-film circuit substrates made of flexible tapes are widely used in mobile phones, liquid crystal screens, smart cards and other fields.
  • the process of making a thin film circuit substrate from a tape-shaped flexible tape usually includes: the process of coating a photoresist on the tape-shaped flexible tape, the exposure and development process of transferring the pattern on the photomask to the photoresist, and the photoresist The pattern is transferred to the etching process on the flexible tape.
  • the strip-shaped flexible reel is usually wound on a reel. In each process, the strip-shaped flexible reel is rolled out from the reel to the corresponding work table, processed accordingly, and then wound on the reel again after the processing is completed.
  • this exposure method is to perform alignment measurement, focus adjustment and exposure on a strip-shaped flexible reel in sequence. After the strip-shaped flexible reel is exposed, the next strip-shaped flexible reel can be measured and focused. Adjust and expose until the exposure of all belt-shaped flexible rolls is completed. That is, this exposure method adopts the mode of alignment measurement, focus adjustment, and exposure sequence, which takes a long time and results in low productivity, which is not conducive to mass production.
  • the purpose of the present invention is to provide a dual-workpiece-stage flexible tape-reel exposure device and an exposure method, which can reduce the process time of the exposure process and increase the productivity.
  • the present invention provides a dual-workpiece-stage flexible tape web exposure device, including:
  • Two workpiece tables are used to carry flexible tapes
  • each of the exposure modules corresponds to an exposure area
  • each of the workpiece stages can be moved to the exposure area
  • the exposure module includes an illumination unit, a mask stage, and an objective lens unit
  • the illumination unit emits A light beam
  • the light beam irradiates onto the flexible web carried by the workpiece table in the exposure area after passing through the mask and the objective lens unit carried on the masking table for exposure;
  • At least two measurement modules the two measurement modules respectively correspond to two measurement areas, the two workpiece tables can respectively move to the two measurement areas, and each measurement module is used for its corresponding Performing alignment measurement and/or focal plane measurement on the flexible web carried on the workpiece table in the measurement area;
  • Two transfer modules the two transfer modules respectively correspond to the two workpiece tables, and each transfer module is used to transfer the flexible web to its corresponding workpiece table;
  • the two workpiece tables can be respectively located in the exposure area and the measurement area to simultaneously perform measurement and exposure on the flexible webs in different positions; the two workpiece tables can be moved to be in the exposure area and the measurement area Switch; according to the measurement results obtained by each of the workpiece stages in the measurement area, when the workpiece stage is exposed in the exposure area, the carried flexible tape is within the focal depth range of the objective lens unit and/or can be realized Exposure alignment.
  • a first alignment mark is provided on the flexible web
  • Each of the measurement modules includes: a first light source, an alignment mark unit, a bearing platform for carrying the alignment mark unit, and a first image acquisition unit, and the alignment mark unit is provided with the first image acquisition unit.
  • the second alignment mark corresponding to the alignment mark;
  • the first light source is used to provide alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, reflecting the light Passing through the alignment mark unit to the first image acquisition unit to obtain alignment data.
  • each of the measurement modules further includes: a second light source, a projection lens unit, a detection mirror unit, and a second image acquisition unit.
  • the second light source is used to provide measurement light, and the measurement light is projected
  • the mirror unit irradiates the surface of the flexible web on the measurement area and is reflected, and the reflected light passes through the detection mirror unit and then reaches the second image acquisition unit to obtain focal plane measurement data.
  • the dual-stage flexible tape-reel exposure device further includes:
  • the mask adjustment module is configured to adjust the mask according to the measurement result of the measurement module so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.
  • the dual-stage flexible tape-reel exposure device further includes:
  • the control module is respectively signally connected to the measurement module, the photomask adjustment module and the transmission module, and is configured to control the photomask adjustment module to adjust the photomask according to the measurement result of the measurement module to make the photomask
  • the flexible web in the exposure area is within the focal depth range of the objective lens unit.
  • the dual-workpiece flexible web exposure device further includes an angular displacement sensor, the angular displacement sensor is used to acquire tilt data of the flexible web, and the control module is used to obtain data according to the measurement module The measurement result and the tilt data control the reticle adjustment module to adjust the reticle so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.
  • the photomask adjustment module includes a first photomask adjustment unit and a second photomask adjustment unit, and the first photomask adjustment unit adjusts the photomask to be perpendicular to the axis of the photomask according to the focal plane measurement data.
  • the surface of the workpiece table moves in a direction
  • the second mask adjusting unit adjusts the mask to move in a plane parallel to the surface of the workpiece table according to the alignment data.
  • the first mask adjustment unit includes: a first displacement sensor and at least one first adjustment unit, the first adjustment unit includes a first motor and a screw, and the first motor is used to drive the screw It moves in a direction perpendicular to the surface of the workpiece table, thereby driving the photomask fixed on the mask table to move, and the first displacement sensor is used to obtain displacement data of the mask table.
  • the second mask adjustment unit includes: a second displacement sensor and at least two second adjustment units, the second adjustment unit includes a second motor, a cam, and an elastic element, and the second motor is used for The cam is driven to rotate so that the elastic element drives the mask table to move, so that the mask fixed on the mask table moves in a plane parallel to the surface of the workpiece table.
  • the transfer module includes: an unwinding roll, a first intermediate guide roll, a second intermediate guide roll, and a rewinding roll
  • the control module is also used to control the flexible web to be transmitted from the unwinding roll
  • the first intermediate guide roller is introduced into the work table, and after being driven on the work table, the second intermediate guide roller is introduced to the winding roller.
  • the dual-stage flexible tape-reel exposure device further includes:
  • the workpiece table driving module includes a guide rail, a third motor, and a guide rod.
  • the two workpiece tables are both arranged on the guide rail.
  • the two transfer modules corresponding to each of the workpiece tables are connected by the guide rod.
  • the third motor is used to drive each of the workpiece tables to move on the guide rail, and make the transfer module corresponding to each of the workpiece tables move synchronously along the guide rod.
  • a buckle is provided on the guide rod, and the position of the buckle corresponds to the position of the exposure zone.
  • the workpiece stage moves to the exposure zone, the workpiece stage corresponds to the
  • the transmission module is fixed on the guide rod at a position corresponding to the exposure area by the buckle.
  • the dual-stage flexible tape-reel exposure device further includes:
  • the workpiece stage adjustment module is configured to adjust the workpiece stage according to the measurement result of the measurement module so that the flexible web of the exposure area is within the focal depth range of the objective lens unit.
  • the dual-stage flexible tape-reel exposure device further includes:
  • the control module is in signal connection with the measurement module, the workpiece stage adjustment module and the transmission module, and the control module is used to control the workpiece stage adjustment module to adjust the workpiece stage according to the measurement result of the measurement module
  • the flexible web of the exposure zone is within the focal depth range of the objective lens unit.
  • the workpiece table adjustment module is used to adjust the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, and the workpiece table adjustment module is also used to adjust the position according to the alignment
  • the data adjusts the movement of the workpiece table in a plane parallel to the surface of the workpiece table.
  • two measurement modules and one exposure module are provided on the same side of the workpiece table.
  • the dual-workpiece-stage flexible tape web exposure device includes two exposure devices and four measurement modules, and the four measurement modules face each other up and down to form two sets of measurement modules.
  • the modules respectively correspond to the two measurement areas, and the two exposure modules form a set of exposure modules facing up and down and correspond to one exposure area.
  • the two exposure modules are located on the upper and lower sides of the exposure area and are aligned with each other, and the two exposure modules on the upper and lower sides can achieve uniform exposure of the front and back of the flexible web at the same position.
  • the workpiece table has a frame structure or a plate structure.
  • the workpiece table is a rectangular frame, and a pressure plate is provided at the corner of the rectangular frame, and the pressure plate is used to fix the flexible tape.
  • the present invention also provides a dual-workpiece stage flexible tape exposure method, which includes the following steps:
  • the two workpiece stages are respectively located in the exposure area and the measurement area, and the measurement module performs alignment measurement and/or focal plane measurement on the flexible tape in the measurement area to obtain alignment data and/or focus.
  • Area measurement data the illumination unit emits a light beam, and the light beam passes through the mask and the objective lens unit and then irradiates the flexible web in the exposure area for exposure, so that the flexible web in the exposure area Perform exposure while performing measurement on the flexible web located in the measurement area;
  • the two workpiece stages move to switch between the measurement zone and the exposure zone and replace the exposed flexible tape, and the flexible roll carried by the workpiece stage in the exposure zone
  • the carried flexible tape is within the focal depth range of the objective lens unit and/or can be achieved Exposure alignment.
  • the flexible web is fixed by vacuum adsorption, and a pressure plate is provided on the surface of the flexible web to prevent the flexible web from moving; when the flexible web is transferred, the The flexible tape loosens.
  • the workpiece stage located in the exposure area moves to the idle measurement area, located in the The workpiece stage in the measurement area is moved to the exposure area to switch the working areas, and after switching the working areas, the exposed flexible tape on the workpiece stage in the measurement area is replaced and replaced with a new flexible tape.
  • the first flexible tape subunit before exposing the first flexible tape subunit, it further includes:
  • the first flexible web on a workpiece table located in the measurement area to perform alignment measurement and/or focal plane measurement.
  • the workpiece stage is moved from the measurement area to the exposure area, and during the movement of the workpiece stage, the photomask is adjusted according to the measurement result of the first flexible web to make the first flexible web
  • the belt subsequently reaches the exposure zone, it is within the focal depth range of the objective lens unit;
  • the first flexible web After the first flexible web reaches the exposure area, the first flexible web is exposed, and at the same time, the flexible web on another workpiece table in the measurement area is aligned Measurement and/or focal plane measurement.
  • a first alignment mark is provided on the flexible web;
  • the measurement module includes: a first light source, an alignment mark unit, a bearing platform for carrying the alignment mark unit, and a first image acquisition Unit, the alignment mark unit is provided with a second alignment mark corresponding to the first alignment mark;
  • the process of obtaining the alignment data includes:
  • the first light source provides alignment light, which irradiates the second alignment mark and the first alignment mark in sequence and is reflected by the flexible web on the measurement area, and the reflected light passes through From the alignment marking unit to the first image acquisition unit to obtain alignment data;
  • the photomask and/or the workpiece table are adjusted to move in a plane parallel to the surface of the workpiece table to achieve exposure alignment.
  • the measurement module further includes: a second light source, a projection mirror unit, a detection mirror unit, and a second image acquisition unit;
  • the process of obtaining focal plane measurement data includes:
  • the second light source provides measurement light, which is irradiated to the surface of the flexible web on the measurement area through the projection lens unit and is reflected, and the reflected light reaches the second image after passing through the detection mirror unit Acquisition unit to obtain focal plane measurement data;
  • Adjust the reticle or/and the workpiece table to move in a direction perpendicular to the surface of the workpiece table according to the focal plane measurement data, so that the flexible web of the exposure area is in the focal depth range of the objective lens unit Inside.
  • the dual-stage flexible web exposure method is used for single-sided exposure of the flexible web.
  • the dual-stage flexible web exposure method is used for double-sided exposure of the flexible web.
  • the control module controls the mask adjustment module to adjust the mask according to the alignment data and/or focal plane measurement data measured by the measurement module , And control the exposure module to expose the flexible tape in the exposure area after the flexible tape in the measurement area reaches the exposure area.
  • the present invention adopts the parallel mode of two workpiece stages.
  • the flexible tape on the workpiece stage in the measurement zone is used for alignment measurement and/or focal plane measurement
  • the flexible tape on the workpiece stage in the exposure zone is subjected to synchronous exposure.
  • the adjustment of the reticle is completed during the movement of the workpiece table to switch the working area, and the double workpiece table processes the flexible tape at the same time, so that the time is rationally used, the time-consuming of the exposure process is reduced, and the production capacity is improved.
  • Figure 1a is a schematic structural diagram of a dual-stage flexible tape web exposure device capable of double-sided exposure according to an embodiment of the present invention
  • FIG. 1b is another structural schematic diagram of a dual-stage flexible tape web exposure device capable of double-sided exposure according to an embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a measurement module in a dual-workpiece-stage flexible tape web exposure device provided by an embodiment of the present invention
  • FIG. 3 is a schematic diagram of the alignment measurement process of the measurement module in the dual-workpiece-stage flexible tape web exposure device provided by the embodiment of the present invention.
  • FIG. 4 is a schematic diagram of the focal plane measurement process of the measurement module of the dual-workpiece stage flexible web exposure device provided by the embodiment of the present invention.
  • FIG. 5 is a schematic structural diagram of a first mask adjustment unit of a dual-stage flexible tape web exposure device according to an embodiment of the present invention
  • FIG. 6 is a schematic structural view of a second mask adjustment unit of a dual-workpiece stage flexible tape web exposure device provided by an embodiment of the present invention.
  • FIG. 7 is a schematic structural view of a dual-work stage flexible tape-reel exposure device capable of single-sided exposure provided by an embodiment of the present invention.
  • FIG. 8 is a schematic flow diagram of a dual-workpiece stage flexible tape exposure method according to an embodiment of the present invention.
  • 11-workpiece table 111-measurement area; 112-exposure area;
  • M1-Photomask M2-Alignment mark unit; M21-Second alignment mark;
  • 40-mask adjustment module 41-first mask adjustment unit; 411-first motor; 412-screw; 413-first displacement sensor; 42-second mask adjustment unit; 421-second motor; 422- Cam; 423-elastic element; 424-second displacement sensor;
  • 61-Transfer module 611-Unwinding roll; 612-First intermediate guiding roll; 613-Second intermediate guiding roll; 614-Rewinding roll;
  • 01-Workpiece table drive module 011-guide rail; 012-third motor; 013-guide rod; 014-buckle.
  • the traditional exposure method is to perform alignment measurement, focus adjustment, and exposure on a strip-shaped flexible web in sequence. After all the above steps are completed for a strip-shaped flexible web, the next strip-shaped flexible web Performing alignment measurement, focus adjustment, and exposure. This mode of alignment measurement, focus adjustment, and exposure sequence takes a long time and results in low productivity.
  • the present invention adopts the parallel mode of two workpiece stages.
  • the flexible tape on the workpiece stage in the measurement zone is used for alignment measurement and/or focal plane measurement
  • the flexible tape on the workpiece stage in the exposure zone is subjected to synchronous exposure.
  • the adjustment of the reticle is completed during the movement of the workpiece table to switch the working area, and the double workpiece table processes the flexible tape at the same time, so that the time is rationally used, the time-consuming of the exposure process is reduced, and the production capacity is improved.
  • FIG. 1a and Figure 1b are schematic diagrams of a dual-stage flexible web exposure device capable of double-sided exposure. As shown in Figures 1a and 1b, this dual-stage flexible web capable of double-sided exposure Belt exposure device (also called double-sided dual-workpiece stage flexible tape exposure device), including: two workpiece stages 11, two conveying modules 61, four measuring modules 20, two exposure modules 30, and two The mask adjustment module 40, the work table driving module 01 and the control module 50. The control module 50 is respectively connected to the measurement module 20, the exposure module 30, the mask adjustment module 40, the workpiece table driving module 01, and the transmission module 61 in signal connection.
  • this dual-stage flexible web capable of double-sided exposure Belt exposure device also called double-sided dual-workpiece stage flexible tape exposure device
  • the control module 50 is respectively connected to the measurement module 20, the exposure module 30, the mask adjustment module 40, the workpiece table driving module 01, and the transmission module 61 in signal connection.
  • the dual-stage flexible tape-reel exposure device includes two measurement areas 111 and one exposure area 112. Each measurement area 111 is located at a position corresponding to a group of the measurement modules 20; the exposure area 112 is located at a position corresponding to a group of the exposure modules 30.
  • the two workpiece tables 11 are both located in the measurement area 111, both sides of each workpiece table 11 are aligned with one measurement module 20, and the exposure area 112 is located in the two measurement areas.
  • the distances between the measurement areas 111 and the distances between the two measurement areas 111 and the exposure area 112 are equal.
  • One measurement module 20 is provided on the upper and lower sides of the measurement area 111, and one exposure module 30 is provided on each of the upper and lower sides of the exposure area 112.
  • the exposure modules 30 on both sides of the exposure zone 112 can be aligned with each other, and calibration can be achieved during regular maintenance, so that the exposure modules 30 on the upper and lower sides can achieve consistent exposure of the front and back sides of the same position of the flexible web 80 during the production process. Sex.
  • the dual-workpiece-stage flexible tape exposure device performs double-sided exposure of the flexible tape 80, and the measurement module 20 and the exposure module 30 located above the workpiece stage 11 realize the alignment and exposure of the front side of the flexible tape 80; The measurement module 20 and the exposure module 30 under the workpiece table 11 realize the alignment and exposure of the back of the flexible web 80.
  • the flexible web is a strip-shaped flexible web, and all the strip-shaped flexible webs to be exposed can be connected together in sequence to form a continuous elongated structure.
  • the flexible web is, for example, a belt-shaped flexible web used to form a thin-film circuit board.
  • the workpiece table 11 adopts, for example, a frame structure, the belt-shaped flexible web is laid on the workpiece table 11, and the upper and lower surfaces of the belt-shaped flexible web are exposed.
  • the workpiece table 11 may be a rectangular frame.
  • a cross beam can be set in the center of the rectangular frame to better support the flexible roll.
  • a pressing plate 90 can also be provided at the corners of the rectangular frame, and the flexible web can be further fixed by the pressing plate 90 to prevent the flexible web from moving.
  • the number of the pressing plates 90 is, for example, six, which are distributed at the four corners of the rectangular frame and the junction between the beam and the rectangular frame.
  • each of the workpiece tables 11 corresponds to one transfer module 61
  • the transfer module 61 includes an unwinding roller 611, a first intermediate guide roller 612, a second intermediate guide roller 613, and a rewinding roller 614 arranged in parallel.
  • the control module 50 controls the strip-shaped flexible web to be transferred from the unwinding roller 611, introduced into the workpiece table via the intermediate guide roller 612, and then fixed 11, and released after completing the procedures of the corresponding station.
  • the flexible tape is guided to the winding roller 614 through the second intermediate guide roller 613.
  • the edge of the belt-shaped flexible web can be provided with a hole count to control the conveying length of the flexible web.
  • a displacement sensor can also be provided to monitor the conveying length of the belt-shaped flexible web.
  • the workpiece table driving module 01 includes a guide rail 011, a third motor 012, and a guide rod 013.
  • the guide rail 011 is laid on the moving paths of the two workpiece tables 11, and the two workpiece tables 11 They are all arranged on the guide rail 011, and the third motor 012 can drive the workpiece table 11 to move on the guide rail 011.
  • the unwinding roller 611 of the conveying module 61 corresponding to each workpiece table 11 is connected by the guide rod 013, and the winding roller 614 of the conveying module 61 corresponding to each workpiece table 11 also passes through the guide rod 013. Connected so that when the third motor 012 drives the workpiece table 11 to move, the corresponding conveying module 61 can move stably together.
  • each guide rod 013 is provided with a buckle 014, and the position of the buckle 014 corresponds to the position of the exposure module 30.
  • the buckle 014 can fasten the unwinding roller 611 and the rewinding roller 614 to prevent the workpiece table 11 from shifting during the exposure process.
  • the dual-workpiece-stage flexible web exposure device further includes a bearing platform 702 for bearing the alignment mark unit M2, and the alignment mark unit M2 is provided with the flexible web.
  • the first alignment mark corresponds to the second alignment mark M21.
  • the measurement module 20 includes a first light source 201 and a first image acquisition unit 202. Both the first light source 201 and the first image acquisition unit 202 are located on a side of the alignment marking unit M2 away from the workpiece table 11. side.
  • the first light source 201 is used to provide alignment light, which sequentially irradiates the second alignment mark M21 and the first alignment mark on the flexible web on the measurement area 111 and Reflected by the flexible web on the measurement area 111, the reflected light passes through the alignment mark unit M2 to the first image acquisition unit 202 to obtain alignment data.
  • the measurement module 20 also includes a second light source 203, a projection lens unit 204, a detection mirror unit 205, and a second image acquisition unit 206.
  • the second light source 203 provides measurement light for focal plane measurement, and the measurement light passes through
  • the projection mirror unit 204 reflects on the surface of the flexible web on the measurement area 111, and the reflected light passes through the detection mirror unit 205 and then to the second image acquisition unit 206 to obtain focal plane measurement data.
  • the surface measurement data is, for example, focal surface test data.
  • the mask adjustment module 40 includes a first mask adjustment unit 41 and a second mask adjustment unit 42.
  • the first mask adjusting unit 41 adjusts the mask M1 on the mask stage 701 to move in a direction perpendicular to the surface of the workpiece stage 11.
  • the first mask adjustment unit 41 includes a first displacement sensor 413 and at least one first adjustment unit.
  • the first adjustment unit includes a first motor 411 and a screw 412.
  • the first motor 411 drives the screw 412 perpendicular to The workpiece table 11 moves up and down in the direction of the surface, thereby driving the mask M1 fixed on the mask table 701 to move up and down in a direction perpendicular to the surface of the workpiece table 11.
  • the first displacement sensor 413 For detecting the movement of the mask stage 701 in a direction perpendicular to the surface of the workpiece stage 11, the first displacement sensor 413 is, for example, a grating ruler.
  • the first mask adjustment unit 41 includes two first adjustment units, which are respectively installed on both sides of the mask stage 701.
  • the second mask adjusting unit 42 is used to adjust the mask stage 701 to move in a plane parallel to the surface of the workpiece stage 11.
  • the second mask adjustment unit 42 includes a second displacement sensor 424 and at least two second adjustment units.
  • the mask stage 701 is, for example, rectangular, and each second adjustment unit is installed on one of the mask stages 701. On the corners, when there are two second adjustment units, they are installed on the opposite corners of the mask stage 701. When there are three second adjustment units, they are installed on any three corners of the mask stage 701.
  • Each of the second adjustment units includes a second motor 421, a cam 422, and an elastic element 423.
  • the second motor 421 drives the cam 422 to rotate so that the elastic element 423 drives the mask stage 701 to move.
  • the mask M1 fixed on the mask table 701 moves in a plane parallel to the surface of the workpiece table 11, for example, rotates.
  • the elastic element 423 is, for example, a spring, which acts as an elastic support.
  • each cam 422 is connected to the mask stage 701 through two elastic elements 423 distributed on both sides of the corner of the mask stage 701.
  • the elastic element 423 stretches to drive the mask stage 701 to rotate.
  • the second displacement sensor 424 detects the displacements in two mutually perpendicular directions (X direction and Y direction) in a plane parallel to the surface of the workpiece table 11, thereby obtaining rotation accuracy.
  • the mask stage 701 is, for example, rectangular, and adjacent rectangular sides are respectively arranged along the X direction and the Y direction.
  • the displacement sensor 424 is, for example, a grating ruler.
  • the exposure module 30 includes: a third light source 301, a mask stage 701 and a projection lens 302, the mask stage 701 is located between the third light source 301 and the projection lens 302, The mask M1 is fixed on the mask stage 701.
  • the direction of the optical axis of the third light source 301 is perpendicular to the surface of the moving workpiece table 11, and the workpiece table 11 is usually arranged horizontally. Therefore, the direction of the optical axis of the third light source 301 is usually a vertical direction.
  • the third light source 301 is used to provide exposure light, which irradiates the mask M1 on the mask stage 701, and focuses the light on the flexible roll of the exposure area 112 through the projection lens 302 Exposure is performed on the tape, more specifically, focusing on the photoresist on the surface of the flexible web to be exposed.
  • the light gathering point is the focal point
  • the focal point is the point where the best image appears after being focused by the projection lens 302
  • the horizontal plane where the focal point is located is the focal plane
  • the depth of focus (DOF) is the upper limit plane on both sides of the focal plane that can keep the focused image clear The distance of the lower limit plane.
  • the focus may not be exactly in the middle of the upper and lower surfaces of the photoresist, but the upper and lower surfaces of the photoresist are within the depth of focus (DOF), so that the entire thickness of the photoresist within the exposure range can be imaged clearly.
  • DOE depth of focus
  • the mask M1 on 701 reaches the depth of focus (DOF) range where the projection lens 302 focuses light, so that the photoresist on the surface of the flexible web on the exposure area 112 is continuously and clearly exposed.
  • DOE depth of focus
  • the two workpiece tables 11 move back and forth between the measurement area 111 and the exposure area 112 during the entire exposure process.
  • the workpiece table 11 on the left is at the measurement area 111 on the left.
  • the control module 50 is used to control the exposure module 30 to expose the flexible web on the exposure area 112, and at the same time control the measurement module 20 to align and/or measure the flexible web on the measurement area 111 (only When there is a workpiece stage 11 on the measurement area 111, the corresponding measurement module 20 will perform measurement.
  • the exposure module 30 will only perform exposure when there is a workpiece stage 11 on the exposure area 112); and control the two The work area of the workpiece stage 11 is switched (that is, each workpiece stage 11 is controlled to switch between the measurement area 111 and the exposure area 112).
  • the transfer module 61 is controlled to complete the exposure area 112
  • the exposed flexible web is replaced and replaced with a new flexible web.
  • control module 50 controls the photomask according to the alignment data and/or focal plane measurement data of the flexible web
  • the adjustment module 40 adjusts the mask M1; and controls the exposure module 30 to perform exposure after the flexible web on the measurement area 111 reaches the exposure area 112, and at the same time controls the measurement module 20 to The flexible web on the measurement area 111 performs alignment measurement and/or focal plane measurement.
  • the control module 50 is based on the alignment data and/or focus of the first flexible web.
  • the area measurement data controls the mask adjustment module 40 to adjust the mask M1; after the first flexible web reaches the exposure zone 112, the control module 50 controls the exposure module 30 to adjust the first One flexible web is exposed, and at the same time, the measurement module 20 is controlled to perform alignment measurement and/or measurement on the other flexible web on the measurement area 111.
  • the flexible web 80 is fixed by vacuum suction, and the surface of the flexible web 80 is provided with a pressure plate 90 to prevent the flexible web from moving; when the flexible web 80 is transferred, the The flexible web 80 is loosened.
  • the focal plane test data and the alignment data obtained by the measurement module 20 are coordinate converted by the control module 50, so that the second alignment mark M21 on the alignment mark unit M2 is The marks on M1 correspond and match exactly.
  • the control module 50 matches the corresponding focal plane compensation data and alignment deviation compensation data to control the mask adjustment module 40 to adjust the position In the mask stage 701, since the mask M1 is fixed on the mask stage 701, the mask M1 is finally adjusted by the mask adjustment module 40.
  • the mask M1 on the mask stage 701 is adjusted by the first mask adjustment unit 41 to move in a direction perpendicular to the surface of the workpiece stage 11, so that the flexible web on the exposure zone 112 is at the focal depth ( DOF) can be clearly exposed.
  • the second mask adjustment unit 42 adjusts the mask stage 701 to rotate in a plane parallel to the surface of the workpiece stage 11, so that the exposure process is accurately aligned.
  • the dual-workpiece stage flexible reel exposure device may also include: a work piece stage adjustment module for adjusting the work piece stage 11 according to the measurement result of the measuring module 20 so that the The flexible web of the exposure area 112 is within the focal depth range of the objective lens unit.
  • the workpiece stage adjustment module and the first mask adjustment unit 41 can be used alternatively.
  • the flexible web 80 may be inclined during the conveying process (for example, the edges on both sides of the flexible web in the conveying direction are not perpendicular to the axis of the first intermediate guide roller 612, and there is an offset) which can be measured by an angular displacement sensor. Tilt data of flexible tape. At this time, it is necessary to convert the tilt data through the control module 50 for coordinate conversion.
  • the control module 50 integrates the focal plane measurement data (for example, focal plane test data), alignment data, and tilt data to match the corresponding compensation data to control the mask
  • the adjustment module 40 adjusts the mask M1.
  • the error of the adjustment of the mask M1 in a plane parallel to the surface of the workpiece table 11 includes the deviation caused by the misalignment during the alignment and the tilt deviation of the flexible web during the conveying process.
  • the control module 50 adjusts the mask stage 701 to rotate in a plane parallel to the surface of the workpiece stage 11 through the second mask adjustment unit 42 so as to accurately align the exposure process.
  • the control module 50 adjusts the mask M1 on the mask stage 701 through the first mask adjustment unit 41 to move in a direction perpendicular to the surface of the workpiece stage 11, so that the flexible tape on the exposure area 112 is Clear exposure within the depth of focus (DOF) range.
  • DOE depth of focus
  • this type of double-sided dual-stage flexible tape-reel exposure device can actually perform single-sided exposure. Only the measurement module 20, the exposure module 30, and the mask adjustment module 40 on the same side above or below the workpiece stage 11 may be used. That is to say, the dual-stage flexible tape-reel exposure device can also be a device that can only perform single-sided exposure, so as to simplify the machine structure and reduce equipment manufacturing costs.
  • Figure 7 is a schematic structural diagram of a dual-stage flexible tape exposure device that can perform single-sided exposure.
  • this dual-stage flexible tape exposure device that can only perform single-sided exposure (also It may be referred to as a single-sided dual-workpiece stage flexible tape-reel exposure device), which includes two measurement modules 20, one exposure module 30, and one mask adjustment module 40, all of which are located on the workpiece stage 11 On the same side.
  • the dual-workpiece flexible tape web exposure device exposes the flexible tape 80 on one side.
  • the work table 11 of the single-sided double work table flexible tape web exposure device can adopt a flat plate structure or a frame structure.
  • this embodiment also provides a dual-stage flexible reel exposure method, as shown in Figures 1a and 8, the method is based on a dual-stage flexible reel exposure device, and the exposure process includes:
  • the control module 50 controls one of the workpiece tables 11 to move to the exposure area 112, and the other of the workpiece tables 11 to move to the measurement area 111, and the two workpiece tables are respectively located in the exposure area 112 and the measurement area.
  • the exposure module 30 is controlled to expose the flexible tape on the exposure area 112, and the control module 50 synchronously controls the measurement module 20 corresponding to the other workpiece stage 11 to the measurement area 111 Alignment measurement and/or measurement of flexible tape;
  • the control module 50 controls the workpiece table driving unit 01 drives the two workpiece tables 11 to move synchronously, moves the workpiece table 11 located in the exposure area 112 to the (idle) measurement area 111, and moves the workpiece table 11 located in the measurement area 111 to the Exposure area 112.
  • the conveying module 61 replaces the exposed flexible web and replaces it with a new flexible web.
  • the two workpiece tables 11 move synchronously, and the control module 50 is based on the flexible The alignment data and/or focal plane measurement data of the tape control the mask adjustment module 40 to adjust the mask M1.
  • the control module 50 again controls the measurement module 20 and the exposure module 30 to perform measurement and exposure simultaneously.
  • the first flexible tape before exposing the first flexible tape, it also includes:
  • the control module 50 controls the mask adjustment module 40 according to the alignment data and/or focal plane measurement data of the first flexible web during the transmission process. Adjust the mask M1;
  • control module 50 controls the exposure module 30 to expose the first flexible web, and at the same time controls the measurement module 20 to Alignment and/or measurement are performed on a flexible tape on the workpiece table.
  • the measurement module 20 includes a first light source 201 and a first image acquisition unit 202; the process of obtaining the alignment data includes: the first light source 201 provides alignment light, the The alignment light is sequentially irradiated to the second alignment mark M21 and the first alignment mark and is reflected by the flexible web on the measurement area. The reflected light passes through the alignment mark unit M2 to the first alignment mark.
  • An image acquisition unit 202 obtains alignment data; the control module 50 controls the mask adjustment module 40 to adjust the mask M1 on the mask stage 701 according to the alignment data of the latter flexible tape It moves in a plane parallel to the surface of the workpiece table 11.
  • the measurement module 20 also includes: a second light source 203, a projection lens unit 204, a detection mirror unit 205, and a second image acquisition unit 206; the process of obtaining focal plane measurement data includes: the second light source 203 is used to provide measurement light , The measurement light is irradiated to the surface of the flexible web on the measurement area 111 through the projection lens unit 204 and is reflected, and the reflected light passes through the detection mirror unit 205 and then reaches the second image acquisition unit 206 to obtain Focal plane measurement data; the control module 50 controls the mask adjustment module 40 to adjust the mask M1 on the mask stage 701 along the vertical to the focal plane measurement data of the latter flexible web The direction of the surface of the work table 11 moves.
  • the photomask adjustment module 40 includes a first photomask adjustment unit 41, and the first photomask adjustment unit 41 includes a first displacement sensor 413 and at least one first adjustment unit.
  • the first adjustment unit includes a first motor 411 and a screw 412, and the first motor 411 is used to drive the screw 412 to move in a direction perpendicular to the surface of the workpiece table 11, so as to drive fixed to the mask table.
  • the mask M1 on the 701 moves, and the first displacement sensor 413 is used to obtain displacement data of the mask stage 701.
  • the photomask adjustment module 40 further includes a second photomask adjustment unit 42, and the second photomask adjustment unit 42 includes: a second displacement sensor 424 and at least two second adjustment units
  • the second adjustment unit includes a second motor 421, a cam 422, and an elastic element 423, and the second motor 421 is used to drive the cam 422 to rotate so that the elastic element 423 drives the mask stage 701 to move,
  • the mask M1 fixed on the mask stage 701 moves in a plane parallel to the surface of the workpiece stage 11.
  • the flexible web 80 is a ribbon-shaped flexible web
  • the transfer module 61 includes an unwinding roller 611, a first intermediate guiding roller 612, a second intermediate guiding roller 613, and a winding roller 614 arranged in parallel.
  • the control module 50 controls the flexible web 80 to be transmitted from the unwinding roller 611, and is guided into the workpiece table 11 via the first intermediate guide roller 612 and fixed; the flexible web 80 is from the When the exposure area 112 passes out, it enters the winding roller 614 through the second middle guide roller guide 613.
  • the exposure module 30 includes a third light source 301, a mask stage 701, and a projection lens 302.
  • the mask stage 701 is located between the third light source 301 and the projection lens 302, so
  • the exposure process includes: the third light source 301 provides exposure light, the exposure light irradiates the mask M1 on the mask stage 701, and is focused on the exposure area 112 by the projection lens 302 On flexible tape for exposure.
  • each measurement area 111 is provided with one measurement module 20 on both sides (upper and lower), and each exposure area 112 is provided with one exposure module 30 on both sides (up and down).
  • one photomask adjustment module 40 the two measurement modules 20 on both sides of the measurement area 111 and the two exposure modules 30 on both sides of the exposure area 112 are facing each other; the exposure method is To perform double-sided exposure on the flexible web.
  • two measurement modules 20 are provided on the same side (of the workpiece table 11) (that is, one measurement module 20 is provided on the same side of the two measurement areas 111), one exposure
  • the module 30 and the mask adjustment module 40, the exposure method is used for single-sided exposure of the flexible web.
  • the present invention switches the working area through the dual-workpiece stage, and while exposing the exposure area, it performs alignment measurement and/or focal plane measurement on the measurement area.
  • the two-workpiece stage is performed in parallel; the dual-workpiece stage moves to In the process of switching the working area, the adjustment of the photomask is completed, and the double work stage processes the flexible tape at the same time, so that the time is rationally used, the process time of the exposure process is reduced, and the productivity is increased.

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Abstract

一种双工件台柔性卷带(80)曝光装置及曝光方法，两个工件台(11)分别位于曝光区(112)和测量区(111)时可以同步对柔性卷带(80)执行测量和曝光，完成测量和曝光后，两个工件台(11)移动以切换工作区，在工件台(11)移动的过程中控制模块(50)根据测量模块(20)测量的对位数据和/或焦面测量数据控制光罩调整模块(40)对光罩(M1)进行调整，并在测量区(111)的柔性卷带(80)到达曝光区(112)后控制曝光模块(30)对曝光区(112)的柔性卷带(80)进行曝光。采用双工件台(11)并行的模式，测量区(111)的工件台(11)上的柔性卷带(80)进行对位和/或焦面测量时，曝光区(112)的工件台(11)上柔性卷带(80)进行同步曝光，在切换工作区过程中，完成对光罩(M1)的调整，双工件台(11)同时对柔性卷带(80)进行处理，合理利用时间，减少曝光工序的耗时，有利于提高产能。

Description

双工件台柔性卷带曝光装置及曝光方法 技术领域
本发明涉及光刻技术领域，特别涉及一种双工件台柔性卷带曝光装置及曝光方法。
背景技术
由带状柔性卷带制成的薄膜电路基板广泛应用于移动电话、液晶荧幕以及智能卡等领域中。由带状柔性卷带制成薄膜电路基板的过程通常包括：在带状柔性卷带上涂布光阻的工序、将光罩上的图案转移到光阻上的曝光和显影工序、将光阻上的图案转移到带状柔性卷带上的蚀刻工序。带状柔性卷带通常缠绕在卷轴上，在各工序中，带状柔性卷带从卷轴上卷出至对应的工件台上，进行相应的加工，完成加工后再次卷绕在卷轴上。
目前，曝光工序所采用的工件台只有一个，在曝光过程中，先将带状柔性卷带移至工件台上，然后对所述带状柔性卷带进行对位和/或测量，接着根据对位和/或测量的数据调整工件台以对所述带状柔性卷带进行聚焦调整，从而确保所述带状柔性卷带调整至适宜曝光的状态，然后利用曝光模块对所述带状柔性卷带进行曝光。可见，这种曝光方法是对一个带状柔性卷带顺次进行对位测量、聚焦调整及曝光，这个带状柔性卷带完成曝光之后，才开始下一个带状柔性卷带对位测量、聚焦调整及曝光，直至完成所有带状柔性卷带的曝光。即，这种曝光方法是采用对位测量、聚焦调整及曝光先后串行的模式，耗时较长，导致产能较低，不利于大规模量产使用。
发明内容
本发明的目的在于提供一种双工件台柔性卷带曝光装置及曝光方法，减少曝光工序的制程时间，提高产能。
为解决上述技术问题，本发明提供一种双工件台柔性卷带曝光装置，包括：
两个工件台，均用于承载柔性卷带；
至少一个曝光模块，每个所述曝光模块对应一个曝光区，每个所述工件台能够移动至所述曝光区，所述曝光模块包括照明单元、掩模台及物镜单元，所 述照明单元出射光束，所述光束经过所述掩摸台上承载的光罩和所述物镜单元后照射至位于所述曝光区的所述工件台承载的柔性卷带上以进行曝光；
至少两个测量模块，两个所述测量模块分别对应两个测量区，两个所述工件台能够分别移动至两个所述测量区，每个所述测量模块用于对其对应的所述测量区上的所述工件台上承载的柔性卷带进行对位测量和/或焦面测量；
两个传送模块，两个所述传送模块分别对应两个所述工件台，每个所述传送模块用于向其对应的所述工件台传送所述柔性卷带；
两个所述工件台能够分别位于所述曝光区和所述测量区以同时对不同位置的所述柔性卷带分别执行测量和曝光；两个所述工件台能够移动以在曝光区和测量区切换；根据每个所述工件台在测量区得到的测量结果，使所述工件台在曝光区进行曝光时，所承载的柔性卷带处于所述物镜单元的焦深度范围内和/或能够实现曝光对准。
可选的，所述柔性卷带上设置有第一对位标记；
每个所述测量模块包括：第一光源、对位标记单元、用于承载所述对位标记单元的承载台和第一图像获取单元，所述对位标记单元上设置有与所述第一对位标记相对应的第二对位标记；
所述第一光源用于提供对位光线，所述对位光线依次照射至所述第二对位标记和所述第一对位标记并经所述测量区上的柔性卷带反射，反射光线穿过所述对位标记单元至所述第一图像获取单元以获得对位数据。
可选的，每个所述测量模块还包括：第二光源、投影镜单元、探测镜单元和第二图像获取单元，所述第二光源用于提供测量光线，所述测量光线经所述投影镜单元照射至所述测量区上的柔性卷带表面并被反射，反射光线经所述探测镜单元后至所述第二图像获取单元以获得焦面测量数据。
可选的，所述双工件台柔性卷带曝光装置还包括：
光罩调整模块，用于根据所述测量模块的测量结果调整所述光罩以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
可选的，所述双工件台柔性卷带曝光装置还包括：
控制模块，与所述测量模块、所述光罩调整模块和所述传送模块分别信号连接，用于根据所述测量模块的测量结果控制所述光罩调整模块调整所述光罩 以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
可选的，所述双工件台柔性卷带曝光装置还包括角位移传感器，所述角位移传感器用于获取所述柔性卷带的倾斜数据，所述控制模块用于根据所述测量模块的测量结果和所述倾斜数据控制所述光罩调整模块调整所述光罩以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
可选的，所述光罩调整模块包括第一光罩调整单元和第二光罩调整单元，所述第一光罩调整单元根据所述焦面测量数据调整所述光罩沿垂直于所述工件台表面的方向移动，所述第二光罩调整单元根据所述对位数据调整所述光罩在平行于所述工件台表面的平面内移动。
可选的，所述第一光罩调整单元包括：第一位移传感器和至少一个第一调整单元，所述第一调整单元包括第一马达和螺杆，所述第一马达用于驱动所述螺杆在垂直于所述工件台表面的方向上移动，从而带动固定于所述掩模台上的光罩移动，所述第一位移传感器用于获取所述掩模台的位移数据。
可选的，所述第二光罩调整单元包括：第二位移传感器和至少两个第二调整单元，所述第二调整单元包括第二马达、凸轮和弹性元件，所述第二马达用于驱动所述凸轮旋转以使所述弹性元件带动所述掩模台移动，从而使固定于所述掩模台上的光罩在平行于所述工件台表面的平面内移动。
可选的，所述传送模块包括：开卷滚、第一中间导滚、第二中间导滚和收卷滚，所述控制模块还用于控制所述柔性卷带从所述开卷滚传出、经所述第一中间导滚导入所述工件台，在所述工件台上传动后经所述第二中间导滚导入至所述收卷滚。
可选的，所述双工件台柔性卷带曝光装置还包括：
工件台驱动模块，包括导轨、第三马达及导杆，两个所述工件台均设置于所述导轨上，对应每个所述工件台的两个所述传送模块通过导杆连接，所述第三马达用于驱动每个所述工件台在所述导轨上移动，并使每个所述工件台对应的所述传送模块同步沿所述导杆移动。
可选的，所述导杆上设置有卡扣，所述卡扣的位置与所述曝光区的位置对应，当所述工件台移动至所述曝光区时，所述工件台对应的所述传送模块被所述卡扣固定在所述导杆上与所述曝光区对应的位置。
可选的，所述双工件台柔性卷带曝光装置还包括：
工件台调整模块，用于根据所述测量模块的测量结果调整所述工件台以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
可选的，所述双工件台柔性卷带曝光装置还包括：
控制模块，与所述测量模块、所述工件台调整模块和所述传送模块信号连接，所述控制模块用于根据所述测量模块的测量结果控制所述工件台调整模块调整所述工件台使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
可选的，所述工件台调整模块用于根据所述焦面测量数据调整所述工件台沿垂直于所述工件台表面的方向移动，所述工件台调整模块还用于根据所述对位数据调整所述工件台在平行于所述工件台表面的平面内移动。
可选的，所述工件台的同一侧设置有两个所述测量模块和一个所述曝光模块。
可选的，所述双工件台柔性卷带曝光装置包括两个所述曝光装置和四个所述测量模块，四个所述测量模块两两上下相对以形成两组测量模块，两组测量模块分别对应两个所述测量区，两个所述曝光模块形成上下相对的一组曝光模块并对应一个所述曝光区。
可选的，两个所述曝光模块位于所述曝光区的上下两侧并且相互对准，上下两侧的两个所述曝光模块能够实现对柔性卷带同一位置正面和反面曝光的一致性。
可选的，所述工件台为框架结构或板状结构。
可选的，所述工件台为矩形框架，并且所述矩形框架的角落处设置有压板，所述压板用于固定柔性卷带。
本发明还提供了一种双工件台柔性卷带曝光方法，包括如下步骤：
两个所述工件台分别位于所述曝光区和所述测量区，所述测量模块对所述测量区的柔性卷带进行对位测量和/或焦面测量以获得对位数据和/或焦面测量数据，所述照明单元出射光束，所述光束经过所述光罩和所述物镜单元后照射至所述曝光区的柔性卷带上进行曝光，以使位于所述曝光区的柔性卷带执行曝光，同时位于所述测量区的柔性卷带执行测量；
当完成测量和曝光后，两个所述工件台移动以在所述测量区和所述曝光区 切换并换下曝光完成的柔性卷带，且所述曝光区的所述工件台承载的柔性卷带曝光之前，根据所述工件台在测量区得到的测量结果，使所述工件台在曝光区进行曝光时，所承载的柔性卷带处于所述物镜单元的焦深度范围内和/或能够实现曝光对准。
可选的，完成曝光、对位测量和/或焦面测量时所述柔性卷带通过真空吸附固定，柔性卷带表面设置压板以防止柔性卷带移动；完成柔性卷带传送时，将所述柔性卷带松开。
可选的，当位于所述测量区的柔性卷带完成测量和位于所述曝光区的柔性卷带完成曝光后，位于所述曝光区的工件台移动至空闲的所述测量区，位于所述测量区的工件台移动至所述曝光区以切换工作区，且切换工作区后，将位于所述测量区的工件台上曝光完成的柔性卷带换下，并换上新的柔性卷带。
可选的，在对第一个柔性卷带子单元进行曝光前还包括：
将第一个柔性卷带固定于一个位于所述测量区的工件台上进行对位测量和/或焦面测量，所述第一个柔性卷带完成对位测量和/或焦面测量后，所述工件台从所述测量区移动至所述曝光区，在所述工件台移动的过程中根据所述第一个柔性卷带的测量结果调整所述光罩使所述第一个柔性卷带后续到达所述曝光区后处于所述物镜单元的焦深度范围内；
其中，所述第一个柔性卷带到达所述曝光区后，对所述第一个柔性卷带进行曝光，并同时对位于所述测量区的另一个工件台上的柔性卷带进行对位测量和/或焦面测量。
可选的，所述柔性卷带上设置有第一对位标记；所述测量模块包括：第一光源、对位标记单元、用于承载所述对位标记单元的承载台和第一图像获取单元，所述对位标记单元上设置有与所述第一对位标记相对应的第二对位标记；
获得所述对位数据的过程包括：
所述第一光源提供对位光线，所述对位光线依次照射至所述第二对位标记和所述第一对位标记并经所述测量区上的柔性卷带反射，反射光线穿过所述对位标记单元至所述第一图像获取单元以获得对位数据；
根据所述对位数据调整所述光罩和/或所述工件台在平行于所述工件台表面的平面内移动以实现曝光对准。
可选的，所述测量模块还包括：第二光源、投影镜单元、探测镜单元和第二图像获取单元；
获得焦面测量数据的过程包括：
所述第二光源提供测量光线，所述测量光线经所述投影镜单元照射至所述测量区上的柔性卷带表面并被反射，反射光线经所述探测镜单元后至所述第二图像获取单元以获得焦面测量数据；
根据所述焦面测量数据调整所述光罩或/和所述工件台沿垂直于所述工件台表面的方向移动，以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
可选的，所述双工件台柔性卷带曝光方法用于对所述柔性卷带进行单面曝光。
可选的，所述双工件台柔性卷带曝光方法用于对所述柔性卷带进行双面曝光。
本发明提供的双工件台柔性卷带曝光装置及曝光方法，两个工件台分别位于所述曝光区和所述测量区时可以同步对所述柔性卷带执行测量和曝光，完成测量和曝光后，两个所述工件台移动以切换工作区，在工件台移动的过程中控制模块根据所述测量模块测量的对位数据和/或焦面测量数据控制光罩调整模块对光罩进行调整，并在测量区的柔性卷带到达曝光区后控制曝光模块对曝光区的柔性卷带进行曝光。本发明采用双工件台并行的模式，测量区的工件台上的柔性卷带进行对位测量和/或焦面测量时，曝光区的工件台上柔性卷带进行同步曝光，在两个所述工件台移动以切换工作区过程中，完成对光罩的调整，双工件台同时对柔性卷带进行处理，合理利用时间，减少曝光工序的耗时，有利于提高产能。
附图说明
图1a是本发明实施例提供的可进行双面曝光的双工件台柔性卷带曝光装置的结构示意图；
图1b是本发明实施例提供的可进行双面曝光的双工件台柔性卷带曝光装置的另一结构示意图；
图2是本发明实施例提供的双工件台柔性卷带曝光装置中的测量模块的结构示意图；
图3是本发明实施例提供的双工件台柔性卷带曝光装置中的测量模块的对位测量过程的示意图；
图4是本发明实施例提供的双工件台柔性卷带曝光装置的测量模块的焦面测量过程的示意图；
图5是本发明实施例提供的双工件台柔性卷带曝光装置的第一光罩调整单元的结构示意图；
图6是本发明实施例提供的双工件台柔性卷带曝光装置的第二光罩调整单元的结构示意图；
图7是本发明实施例提供的可进行单面曝光的双工件台柔性卷带曝光装置的结构示意图；
图8是本发明实施例提供的双工件台柔性卷带曝光方法的流程示意图；
其中，附图标记如下：
11-工件台；111-测量区；112-曝光区；
M1-光罩；M2-对位标记单元；M21-第二对位标记；
20-测量模块；201-第一光源；202-第一图像获取单元；
203-第二光源；204-投影镜单元；205-探测镜单元；206-第二图像获取单元；
30-曝光模块；301-第三光源；302-投影透镜；
40-光罩调整模块；41-第一光罩调整单元；411-第一马达；412-螺杆；413-第一位移传感器；42-第二光罩调整单元；421-第二马达；422-凸轮；423-弹性元件；424-第二位移传感器；
50-控制模块；
61-传送模块；611-开卷滚；612-第一中间导滚；613-第二中间导滚；614-收卷滚；
701-掩模台；702-承载台；
80-柔性卷带；
90-压板；
01-工件台驱动模块；011-导轨；012-第三马达；013-导杆；014-卡扣。
具体实施方式
如背景技术所述，传统的曝光方法是对一个带状柔性卷带依次进行对位测量、聚焦调整及曝光，一个带状柔性卷带完成上述所有工序之后，才对下一个带状柔性卷带进行对位测量、聚焦调整及曝光，这种对位测量、聚焦调整、曝光先后串行的模式，耗时较长，导致产能较低。
本发明采用双工件台并行的模式，测量区的工件台上的柔性卷带进行对位测量和/或焦面测量时，曝光区的工件台上柔性卷带进行同步曝光，在两个所述工件台移动以切换工作区过程中，完成对光罩的调整，双工件台同时对柔性卷带进行处理，合理利用时间，减少曝光工序的耗时，有利于提高产能。
以下结合附图1a至8对本实施例提出的双工件台柔性卷带曝光装置及曝光方法作进一步详细说明。根据下面说明，本发明的优点和特征将更清楚。需说明的是，附图均采用非常简化的形式且均使用非精准的比例，仅用于方便、明晰地辅助说明本发明实施例的目的。
所述双工件台柔性卷带曝光装置可进行双面曝光，以提高曝光效率。图1a及图1b是一种可进行双面曝光的双工件台柔性卷带曝光装置的结构示意图，如图1a和图1b所示，这种能够进行双面曝光的双工件台柔性卷带曝光装置(也可称之为双面双工件台柔性卷带曝光装置)，包括：两个工件台11、两个传送模块61、四个测量模块20、两个曝光模块30、两个光罩调整模块40、工件台驱动模块01及控制模块50。所述控制模块50分别与所述测量模块20、所述曝光模块30、所述光罩调整模块40、工件台驱动模块01以及传送模块61信号连接。其中，四个测量模块20两两上下相对的以形成两组测量模块20，两个曝光模块30形成上下相对的一组曝光模块30。所述双工件台柔性卷带曝光装置包括两个测量区111和一个曝光区112。每个测量区111位于与一组所述测量模块20相对应的位置；曝光区112位于与一组所述曝光模块30相对应的位置。自然状态下，两个所述工件台11均位于所述测量区111，每个所述工件台11的两侧均与一个所述测量模块20对准，所述曝光区112位于两个所述测量区111之间，且两个所述测量区111与所述曝光区112之间的距离均相等。
所述测量区111的上下两侧各设置有一个所述测量模块20，所述曝光区112的上下两侧各设置有一个所述曝光模块30。所述曝光区112的两侧的曝光模块30可相互对准，定期维护期间可以实现校准，以便生产过程中能实现上下两侧的曝光模块30对柔性卷带80同一位置正面和反面曝光的一致性。本实施例中双工件台柔性卷带曝光装置对柔性卷带80进行双面曝光，位于工件台11上方的测量模块20和曝光模块30实现对柔性卷带80正面的对位和曝光；位于工件台11下方的测量模块20和曝光模块30实现对柔性卷带80背面的对位和曝光。
作为示例，所述柔性卷带为带状柔性卷带，所有要进行曝光的带状柔性卷带可以顺次连接在一起从而构成一个连续的长条状的结构。所述柔性卷带例如是用于形成薄膜电路基板的带状柔性卷带。
所述工件台11例如是采用框架结构，所述带状柔性卷带搭在所述工件台11上，所述带状柔性卷带的上下表面均被暴露出来。具体的，所述工件台11可以是一矩形框架。可在矩形框架的中央位置设置横梁，以更好地支撑柔性卷带。还可在矩形框架的角落处设置压板90，通过压板90可进一步固定柔性卷带，防止柔性卷带移动。所述压板90的数量例如是六个，分布于所述矩形框架的四个角落以及横梁与矩形框架的连接处。
作为示例，每个所述工件台11均对应一个所述传送模块61，所述传送模块61包括平行设置的开卷滚611、第一中间导滚612、第二中间导滚613和收卷滚614，所述控制模块50控制所述带状柔性卷带从所述开卷滚611传出、经所述中间导滚612导入所述工件台后11固定，完成相应工位的工序后松开，带状柔性卷带经第二中间导滚613导入至所述收卷滚614。具体的所述带状柔性卷带边缘可以设置孔洞计数控制柔性卷带的传送长度，在其它实施例中，也可以设置位移传感器监控带状柔性卷带的传送长度。
本实施例中，所述工件台驱动模块01包括导轨011、第三马达012及导杆013，所述导轨011铺设在两个所述工件台11移动的路径上，两个所述工件台11均设置于所述导轨011上，所述第三马达012能够驱动所述工件台11在所述导轨011上移动。进一步，每个所述工件台11对应的传送模块61的开卷滚611通过所述导杆013相连，每个所述工件台11对应的传送模块61的收卷滚614也通过所述导杆013相连，以使所述第三马达012驱动所述工件台11移动时， 其对应的传送模块61能够一起稳定的移动。可选的，每个所述导杆013上均设置有一卡扣014，所述卡扣014的位置与所述曝光模块30的位置对应，当所述工件台11从所述测量区111移动至所述曝光区后，所述卡扣014能够卡牢所述开卷滚611和收卷滚614，以防止在曝光过程中所述工件台11产生移位。
如图2至图4所示，双工件台柔性卷带曝光装置还包括用于承载对位标记单元M2的承载台702，所述对位标记单元M2上设置有与所述柔性卷带上的第一对位标记相对应的第二对位标记M21。所述测量模块20包括第一光源201和第一图像获取单元202，所述第一光源201和所述第一图像获取单元202均位于所述对位标记单元M2远离所述工件台11的一侧。所述第一光源201用于提供对位光线，所述对位光线依次照射至所述第二对位标记M21和所述测量区111上的柔性卷带上的所述第一对位标记并经所述测量区111上的柔性卷带反射，反射光线穿过所述对位标记单元M2至所述第一图像获取单元202以获得对位数据。
所述测量模块20还包括第二光源203、投影镜单元204、探测镜单元205和第二图像获取单元206，所述第二光源203提供用于焦面测量的测量光线，所述测量光线经所述投影镜单元204照射至所述测量区111上的柔性卷带表面反射，反射光线经所述探测镜单元205后至所述第二图像获取单元206以获得焦面测量数据，所述焦面测量数据例如是焦面测试数据。
如图5和图6所示，光罩调整模块40包括第一光罩调整单元41和第二光罩调整单元42。
如图5所示，第一光罩调整单元41调整掩模台701上的所述光罩M1沿垂直于所述工件台11表面的方向上移动。第一光罩调整单元41包括第一位移传感器413和至少一个第一调整单元，所述第一调整单元包括第一马达411和螺杆412，所述第一马达411驱动所述螺杆412在垂直于所述工件台11表面的方向上上下移动，从而带动固定于掩模台701上的所述光罩M1在竖直于所述工件台11表面的方向上上下移动，所述第一位移传感器413用于检测所述掩模台701在垂直于所述工件台11表面的方向上的移动，所述第一位移传感器413例如为光栅尺。优选地，第一光罩调整单元41包括两个第一调整单元，分别安装于所述掩模台701的两侧。
如图6所示，所述第二光罩调整单元42用于调整所述掩模台701在平行于所述工件台11表面的平面内移动。第二光罩调整单元42包括第二位移传感器424和至少两个第二调整单元，所述掩模台701例如为矩形，每个所述第二调整单元安装于所述掩模台701的一个角上，当第二调整单元为两个时，安装于所述掩模台701的对角上。当第二调整单元为三个时，安装于所述掩模台701的任意三个角上。每个所述第二调整单元包括第二马达421、凸轮422和弹性元件423，所述第二马达421驱动所述凸轮422旋转以使所述弹性元件423带动所述掩模台701移动，使固定于掩模台701上的所述光罩M1在平行于所述工件台11表面的平面内移动，例如为旋转。弹性元件423例如为弹簧，起弹性支撑作用。具体的，每个凸轮422通过分布于所述掩模台701角两侧的两个弹性元件423与所述掩模台701连接，所述凸轮422旋转时使其中一个弹性元件423压缩，另一个弹性元件423拉伸以驱动掩模台701旋转。第二位移传感器424分别检测平行于所述工件台11表面的平面内相互垂直的两个方向(X方向和Y方向)的位移，从而得到旋转精度。所述掩模台701例如为矩形，相邻的矩形边分别沿所述X方向和Y方向设置。所述位移传感器424例如为光栅尺。
继续参照图1a所示，所述曝光模块30包括：第三光源301、掩模台701和投影透镜302，所述掩模台701位于所述第三光源301与所述投影透镜302之间，所述光罩M1固定在所述掩模台701上。设置第三光源301的光轴方向垂直于移动过来的工件台11表面，工件台11通常水平设置，因此第三光源301的光轴方向通常为竖直方向。所述第三光源301用于提供曝光光线，所述曝光光线照射至所述掩模台701上的所述光罩M1，经所述投影透镜302将光线聚焦在所述曝光区112的柔性卷带上进行曝光，更具体的是聚焦到所述待曝光的柔性卷带表面的光阻上。光线聚集点为焦点，焦点是经投影透镜302聚焦后出现最佳图像的点，焦点所在水平面为焦平面，焦深度(DOF)为能使聚焦图像保持清晰的位于焦平面两侧的上限平面到下限平面的距离。光刻工艺中，焦点可能不是正好位于光阻的上下表面的中间，但是光阻上下表面处于焦深度(DOF)内，这样才能保证曝光范围内整个厚度的光阻均成像清晰。
本实施例通过调整光罩M1在垂直于所述工件台11表面的方向上移动，使位于所述曝光区112上的柔性卷带表面的光阻上下表面均在曝光光线经所述掩 模台701上的所述光罩M1到达所述投影透镜302将光线聚焦的焦深度(DOF)范围内，以使所述曝光区112上的柔性卷带表面的光阻连续清晰的曝光。
本实施例中两个工件台11在整个曝光过程中在所述测量区111和所述曝光区112之间不断来回移动，例如图1b中，左方的工件台11在左边的测量区111处向右移动到达中间的所述曝光区112，曝光完成后，又向左移动返回左边的测量区111。所述控制模块50用于控制所述曝光模块30对曝光区112上的柔性卷带进行曝光，同时控制所述测量模块20对测量区111上的柔性卷带进行对位和/或测量(只有测量区111上存在工件台11时，其对应的测量模块20才会进行测量，同样的，只有曝光区112上存在工件台11时，曝光模块30才会进行曝光)；并控制两个所述工件台11工作区的切换(即控制每个工件台11在测量区111和曝光区112之间切换)，每执行一次测量和曝光后，控制所述传送模块61将所述曝光区112上完成曝光的所述柔性卷带换下并更换上新的柔性卷带，在传送的过程中所述控制模块50根据所述柔性卷带的对位数据和/或焦面测量数据控制所述光罩调整模块40对所述光罩M1进行调整；并在所述测量区111上的柔性卷带到达所述曝光区112后控制所述曝光模块30进行曝光，同时控制所述测量模块20对所述测量区111上的柔性卷带进行对位测量和/或焦面测量。
应当理解，对于第一个柔性卷带，将第一个柔性卷带固定在任一个所述工件台11上进行对位测量和/或焦面测量，完成对位测量和/或焦面测量后将所述第一个柔性卷带自测量区111移动至所述曝光区112，在工件台11移动的过程中所述控制模块50根据所述第一个柔性卷带的对位数据和/或焦面测量数据控制所述光罩调整模块40对光罩M1进行调整；所述第一个柔性卷带到达所述曝光区112后，所述控制模块50控制所述曝光模块30对所述第一个柔性卷带进行曝光，同时控制所述测量模块20对另一个所述测量区111上的柔性卷带进行对位测量和/或测量。
完成曝光、对位测量和/或焦面测量时所述柔性卷带80通过真空吸附固定，柔性卷带80表面设置压板90以防止柔性卷带移动；完成柔性卷带80传送时，将所述柔性卷带80松开。
所述测量模块20获得的所述焦面测试数据和所述对位数据通过所述控制模块50进行坐标转换，使得对位标记单元M2上的所述第二对位标记M21与所述 光罩M1上的标记精确对应与匹配，根据所述焦面测试数据和所述对位数据所述控制模块50匹配相应的焦面补偿数据和对位偏差补偿数据控制所述光罩调整模块40调整所述掩模台701，因光罩M1固定在掩模台701上，故通过光罩调整模块40最终调整光罩M1。通过第一光罩调整单元41调整掩模台701上的所述光罩M1沿垂直于所述工件台11表面的方向上移动，以使所述曝光区112上的柔性卷带在焦深度(DOF)范围内能清晰曝光。通过第二光罩调整单元42调整所述掩模台701在平行于所述工件台11表面的平面内旋转，使曝光过程精确对位。在本申请的其他实施例中，所述双工件台柔性卷带曝光装置也可以包括：工件台调整模块，用于根据所述测量模块20的测量结果调整所述工件台11以使所述曝光区112的柔性卷带处于所述物镜单元的焦深度范围内。其中，所述工件台调整模块和所述第一光罩调整单元41可以择一使用。
进一步的，柔性卷带80在传送过程中可能会有倾斜(例如传送方向的柔性卷带两侧边缘与第一中间导滚612的轴线不垂直，有偏移)可通过角位移传感器测量，获得柔性卷带倾斜数据。此时，需要将倾斜数据通过所述控制模块50进行坐标转换，控制模块50综合所述焦面测量数据(例如是焦面测试数据)、对位数据以及倾斜数据匹配相应的补偿数据控制光罩调整模块40调整所述光罩M1。所述光罩M1在平行于所述工件台11表面的平面内调整的误差包括所对位时相错开引起的偏差和柔性卷带在传送过程中的倾斜偏差。控制模块50通过第二光罩调整单元42调整所述掩模台701在平行于所述工件台11表面的平面内旋转，使曝光过程精确对位。控制模块50通过第一光罩调整单元41调整掩模台701上的所述光罩M1沿垂直于所述工件台11表面的方向上移动，以使所述曝光区112上的柔性卷带在焦深度(DOF)范围内能清晰曝光。
应理解，这种双面双工件台柔性卷带曝光装置，实际上也可以进行单面曝光。仅使用工件台11上方或下方在同一侧的所述测量模块20、曝光模块30以及光罩调整模块40即可。即所述双工件台柔性卷带曝光装置也可是一种只能进行单面曝光的装置，以简化机台结构，降低设备制造成本。图7是一种可进行单面曝光的双工件台柔性卷带曝光装置的结构示意图，如图7所示，这种仅能进行单面曝光的双工件台柔性卷带曝光装置(也可称之为单面双工件台柔性卷带曝光装置)，包括两个所述测量模块20、一个所述曝光模块30以及一个所述 光罩调整模块40，且均位于所述工件台11的同一侧。本实施例中双工件台柔性卷带曝光装置对柔性卷带80进行单面曝光。单面双工件台柔性卷带曝光装置的工件台11可采用平板结构或框架结构。
基于此，本实施例还提供一种双工件台柔性卷带曝光方法，如图1a和图8所示，该方法基于双工件台柔性卷带曝光装置，曝光过程包括：
控制模块50控制一个所述工件台11移动至所述曝光区112，另一个所述工件台11移动至所述测量区111，两个所述工件台分别位于所述曝光区112和所述测量区111后，控制所述曝光模块30对位于所述曝光区112上的柔性卷带进行曝光，并且所述控制模块50同步控制另一个工件台11对应的测量模块20对所述测量区111的柔性卷带进行对位测量和/或测量；
位于所述曝光区112的工件台11上的柔性卷带完成曝光后且位于所述测量区111的工件台11上的柔性卷带完成测量后，所述控制模块50控制所述工件台驱动单元01驱动两个所述工件台11同步运动，将位于所述曝光区112的工件台11移动至(空闲的)所述测量区111，将位于所述测量区111的工件台11移动至所述曝光区112，此时所述传送模块61将完成曝光的所述柔性卷带换下并换上新的柔性卷带，两个所述工件台11同步运动，所述控制模块50根据所述柔性卷带的对位数据和/或焦面测量数据控制光罩调整模块40对光罩M1进行调整。当两个所述工件台11切换好工作区后，所述控制模块50再次控制测量模块20及曝光模块30同步执行测量和曝光。
进一步的，在对第一个柔性卷带进行曝光前还包括：
将第一个柔性卷带固定在一个所述工件台11上，所述第一个柔性卷带完成对位和/或测量后，将所述第一个柔性卷带对应的工件台11自所述测量区111移动至所述曝光区112，在传送的过程中所述控制模块50根据所述第一个柔性卷带的对位数据和/或焦面测量数据控制所述光罩调整模块40对光罩M1进行调整；
其中，所述第一个柔性卷带到达所述曝光区112后，所述控制模块50控制所述曝光模块30对所述第一个柔性卷带进行曝光，同时控制所述测量模块20对另一个所述工件台上的柔性卷带进行对位和/或测量。
如图1a和图2所示，所述测量模块20包括第一光源201和第一图像获取单元202；获得所述对位数据的过程包括：所述第一光源201提供对位光线，所述对位光线依次照射至所述第二对位标记M21和所述第一对位标记并经所述测量区上的柔性卷带反射，反射光线穿过所述对位标记单元M2至所述第一图像获取单元202以获得对位数据；所述控制模块50根据所述后一个柔性卷带的所述对位数据控制所述光罩调整模块40调整所述掩模台701上的光罩M1在平行于所述工件台11表面的平面内移动。
所述测量模块20还包括：第二光源203、投影镜单元204、探测镜单元205和第二图像获取单元206；获得焦面测量数据的过程包括：所述第二光源203用于提供测量光线，所述测量光线经所述投影镜单元204照射至所述测量区111上的柔性卷带表面并被反射，反射光线经所述探测镜单元205后至所述第二图像获取单元206以获得焦面测量数据；所述控制模块50根据所述后一个柔性卷带的所述焦面测量数据控制所述光罩调整模块40调整所述掩模台701上的光罩M1沿垂直于所述工件台11表面的方向移动。
如图1a和图5所示，所述光罩调整模块40包括第一光罩调整单元41，所述第一光罩调整单元41包括：第一位移传感器413和至少一个第一调整单元，所述第一调整单元包括第一马达411和螺杆412，所述第一马达411用于驱动所述螺杆412在垂直于所述工件台11表面的方向上移动，从而带动固定于所述掩模台701上的光罩M1移动，所述第一位移传感器413用于获取所述掩模台701的位移数据。
如图1a和图6所示，所述光罩调整模块40还包括第二光罩调整单元42，所述第二光罩调整单元42包括：第二位移传感器424和至少两个第二调整单元，所述第二调整单元包括第二马达421、凸轮422和弹性元件423，所述第二马达421用于驱动所述凸轮422旋转以使所述弹性元件423带动所述掩模台701移动，从而使固定于所述掩模台701上的光罩M1在平行于所述工件台11表面的平面内移动。
如图1a所示，所述柔性卷带80为带状柔性卷带，所述传送模块61包括平行设置的开卷滚611、第一中间导滚612、第二中间导滚613和收卷滚614；所述控制模块50控制所述柔性卷带80从所述开卷滚611传出，并经所述第一中 间导滚612导入所述工件台11并固定；所述柔性卷带80自所述曝光区112传出时，经所述第二中间导滚导613入至所述收卷滚614。
如图1a所示，所述曝光模块30包括：第三光源301、掩模台701及投影透镜302，所述掩模台701位于所述第三光源301与所述投影透镜302之间，所述曝光过程包括：所述第三光源301提供曝光光线，所述曝光光线照射至所述掩模台701上的所述光罩M1，经所述投影透镜302聚焦在位于所述曝光区112的柔性卷带上以进行曝光。
继续如图1a所示，每个所述测量区111的(上下)两侧各设置有一个所述测量模块20、所述曝光区112的(上下)两侧各设置有一个所述曝光模块30以及一个所述光罩调整模块40，所述测量区111两侧的两个所述测量模块20及所述曝光区112两侧的两个曝光模块30彼此相互正对；所述曝光方法是用于对所述柔性卷带进行双面曝光。
如图7所示，(所述工件台11的)同一侧设置有两个所述测量模块20(即两个测量区111的同一侧各设置有一个所述测量模块20)、一个所述曝光模块30以及一个所述光罩调整模块40，所述曝光方法是用于对所述柔性卷带进行单面曝光。
终上，本发明通过双工件台切换工作区，在对曝光区进行曝光的同时，对测量区进行对位测量和/或焦面测量，双工件台并列进行；双工件台移动以切换工作区的过程中，完成对所述光罩的调整，双工件台同时对柔性卷带进行处理，合理利用时间，减少曝光工序制程时间，提高产能。
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。对于实施例公开的方法而言，由于与实施例公开的装置相对应，所以描述的比较简单，相关之处参见装置部分说明即可。
上述描述仅是对本发明较佳实施例的描述，并非对本发明范围的任何限定，本发明领域的普通技术人员根据上述揭示内容做的任何变更、修饰，均属于权利要求书的保护范围。

Claims (28)

  1. 一种双工件台柔性卷带曝光装置，其特征在于，包括：
    两个工件台，均用于承载柔性卷带；
    至少一个曝光模块，每个所述曝光模块对应一个曝光区，每个所述工件台能够移动至所述曝光区，所述曝光模块包括照明单元、掩模台及物镜单元，所述照明单元出射光束，所述光束经过所述掩摸台上承载的光罩和所述物镜单元后照射至位于所述曝光区的所述工件台承载的柔性卷带上以进行曝光；
    至少两个测量模块，两个所述测量模块分别对应两个测量区，两个所述工件台能够分别移动至两个所述测量区，每个所述测量模块用于对其对应的所述测量区上的所述工件台上承载的柔性卷带进行对位测量和/或焦面测量；
    两个传送模块，两个所述传送模块分别对应两个所述工件台，每个所述传送模块用于向其对应的所述工件台传送所述柔性卷带；
    两个所述工件台能够分别位于所述曝光区和所述测量区以同时对不同位置的所述柔性卷带分别执行测量和曝光；两个所述工件台能够移动以在曝光区和测量区切换；根据每个所述工件台在测量区得到的测量结果，使所述工件台在曝光区进行曝光时，所承载的柔性卷带处于所述物镜单元的焦深度范围内和/或能够实现曝光对准。
  2. 如权利要求1所述的双工件台柔性卷带曝光装置，其特征在于，所述柔性卷带上设置有第一对位标记；
    每个所述测量模块包括：第一光源、对位标记单元、用于承载所述对位标记单元的承载台和第一图像获取单元，所述对位标记单元上设置有与所述第一对位标记相对应的第二对位标记；
    所述第一光源用于提供对位光线，所述对位光线依次照射至所述第二对位标记和所述第一对位标记并经所述测量区上的柔性卷带反射，反射光线穿过所述对位标记单元至所述第一图像获取单元以获得对位数据。
  3. 如权利要求2所述的双工件台柔性卷带曝光装置，其特征在于，每个所述测量模块还包括：第二光源、投影镜单元、探测镜单元和第二图像获取单元，所述第二光源用于提供测量光线，所述测量光线经所述投影镜单元照射至所述 测量区上的柔性卷带表面并被反射，反射光线经所述探测镜单元后至所述第二图像获取单元以获得焦面测量数据。
  4. 如权利要求3所述的双工件台柔性卷带曝光装置，其特征在于，所述双工件台柔性卷带曝光装置还包括：
    光罩调整模块，用于根据所述测量模块的测量结果调整所述光罩以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
  5. 如权利要求4所述的双工件台柔性卷带曝光装置，其特征在于，所述双工件台柔性卷带曝光装置还包括：
    控制模块，与所述测量模块、所述光罩调整模块和所述传送模块分别信号连接，用于根据所述测量模块的测量结果控制所述光罩调整模块调整所述光罩以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
  6. 如权利要求5所述的双工件台柔性卷带曝光装置，其特征在于，所述双工件台柔性卷带曝光装置还包括角位移传感器，所述角位移传感器用于获取所述柔性卷带的倾斜数据，所述控制模块用于根据所述测量模块的测量结果和所述倾斜数据控制所述光罩调整模块调整所述光罩以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
  7. 如权利要求4所述的双工件台柔性卷带曝光装置，其特征在于，所述光罩调整模块包括第一光罩调整单元和第二光罩调整单元，所述第一光罩调整单元根据所述焦面测量数据调整所述光罩沿垂直于所述工件台表面的方向移动，所述第二光罩调整单元根据所述对位数据调整所述光罩在平行于所述工件台表面的平面内移动。
  8. 如权利要求7所述的双工件台柔性卷带曝光装置，其特征在于，所述第一光罩调整单元包括：第一位移传感器和至少一个第一调整单元，所述第一调整单元包括第一马达和螺杆，所述第一马达用于驱动所述螺杆在垂直于所述工件台表面的方向上移动，从而带动固定于所述掩模台上的光罩移动，所述第一位移传感器用于获取所述掩模台的位移数据。
  9. 如权利要求7所述的双工件台柔性卷带曝光装置，其特征在于，所述第二光罩调整单元包括：第二位移传感器和至少两个第二调整单元，所述第二调整单元包括第二马达、凸轮和弹性元件，所述第二马达用于驱动所述凸轮旋转 以使所述弹性元件带动所述掩模台移动，从而使固定于所述掩模台上的光罩在平行于所述工件台表面的平面内移动。
  10. 如权利要求5所述的双工件台柔性卷带曝光装置，其特征在于，所述传送模块包括：开卷滚、第一中间导滚、第二中间导滚和收卷滚，所述控制模块还用于控制所述柔性卷带从所述开卷滚传出、经所述第一中间导滚导入所述工件台，在所述工件台上传动后经所述第二中间导滚导入至所述收卷滚。
  11. 如权利要求1所述的双工件台柔性卷带曝光装置，其特征在于，所述双工件台柔性卷带曝光装置还包括：
    工件台驱动模块，包括导轨、第三马达及导杆，两个所述工件台均设置于所述导轨上，对应每个所述工件台的两个所述传送模块通过导杆连接，所述第三马达用于驱动每个所述工件台在所述导轨上移动，并使每个所述工件台对应的所述传送模块同步沿所述导杆移动。
  12. 如权利要求11所述的双工件台柔性卷带曝光装置，其特征在于，所述导杆上设置有卡扣，所述卡扣的位置与所述曝光区的位置对应，当所述工件台移动至所述曝光区时，所述工件台对应的所述传送模块被所述卡扣固定在所述导杆上与所述曝光区对应的位置。
  13. 如权利要求3所述的双工件台柔性卷带曝光装置，其特征在于，所述双工件台柔性卷带曝光装置还包括：
    工件台调整模块，用于根据所述测量模块的测量结果调整所述工件台以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
  14. 如权利要求13所述的双工件台柔性卷带曝光装置，其特征在于，所述双工件台柔性卷带曝光装置还包括：
    控制模块，与所述测量模块、所述工件台调整模块和所述传送模块信号连接，所述控制模块用于根据所述测量模块的测量结果控制所述工件台调整模块调整所述工件台使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
  15. 如权利要求13所述的双工件台柔性卷带曝光装置，其特征在于，所述工件台调整模块用于根据所述焦面测量数据调整所述工件台沿垂直于所述工件台表面的方向移动，所述工件台调整模块还用于根据所述对位数据调整所述工件台在平行于所述工件台表面的平面内移动。
  16. 如权利要求4或13所述的双工件台柔性卷带曝光装置，其特征在于，所述工件台的同一侧设置有两个所述测量模块和一个所述曝光模块。
  17. 如权利要求4或13所述的双工件台柔性卷带曝光装置，其特征在于，所述双工件台柔性卷带曝光装置包括两个所述曝光装置和四个所述测量模块，四个所述测量模块两两上下相对以形成两组测量模块，两组测量模块分别对应两个所述测量区，两个所述曝光模块形成上下相对的一组曝光模块并对应一个所述曝光区。
  18. 如权利要求17所述的双工件台柔性卷带曝光装置，其特征在于，两个所述曝光模块位于所述曝光区的上下两侧并且相互对准，上下两侧的两个所述曝光模块能够实现对柔性卷带同一位置正面和反面曝光的一致性。
  19. 如权利要求1所述的双工件台柔性卷带曝光装置，其特征在于，所述工件台为框架结构或板状结构。
  20. 如权利要求19所述的双工件台柔性卷带曝光装置，其特征在于，所述工件台为矩形框架，并且所述矩形框架的角落处设置有压板，所述压板用于固定柔性卷带。
  21. 一种采用如权利要求1～20中任一项所述的双工件台柔性卷带曝光装置的双工件台柔性卷带曝光方法，其特征在于，包括如下步骤：
    两个所述工件台分别位于所述曝光区和所述测量区，所述测量模块对所述测量区的柔性卷带进行对位测量和/或焦面测量以获得对位数据和/或焦面测量数据，所述照明单元出射光束，所述光束经过所述光罩和所述物镜单元后照射至所述曝光区的柔性卷带上进行曝光，以使位于所述曝光区的柔性卷带执行曝光，同时位于所述测量区的柔性卷带执行测量；
    当完成测量和曝光后，两个所述工件台移动以在所述测量区和所述曝光区切换并换下曝光完成的柔性卷带，且所述曝光区的所述工件台承载的柔性卷带曝光之前，根据所述工件台在测量区得到的测量结果，使所述工件台在曝光区进行曝光时，所承载的柔性卷带处于所述物镜单元的焦深度范围内和/或能够实现曝光对准。
  22. 如权利要求21所述的双工件台柔性卷带曝光方法，其特征在于，完成曝光、对位测量和/或焦面测量时所述柔性卷带通过真空吸附固定，柔性卷带表 面设置压板以防止柔性卷带移动；完成柔性卷带传送时，将所述柔性卷带松开。
  23. 如权利要求21所述的双工件台柔性卷带曝光方法，其特征在于，当位于所述测量区的柔性卷带完成测量和位于所述曝光区的柔性卷带完成曝光后，位于所述曝光区的工件台移动至空闲的所述测量区，位于所述测量区的工件台移动至所述曝光区以切换工作区，且切换工作区后，将位于所述测量区的工件台上曝光完成的柔性卷带换下，并换上新的柔性卷带。
  24. 如权利要求23所述的双工件台柔性卷带曝光方法，其特征在于，在对第一个柔性卷带子单元进行曝光前还包括：
    将第一个柔性卷带固定于一个位于所述测量区的工件台上进行对位测量和/或焦面测量，所述第一个柔性卷带完成对位测量和/或焦面测量后，所述工件台从所述测量区移动至所述曝光区，在所述工件台移动的过程中根据所述第一个柔性卷带的测量结果调整所述光罩使所述第一个柔性卷带后续到达所述曝光区后处于所述物镜单元的焦深度范围内；
    其中，所述第一个柔性卷带到达所述曝光区后，对所述第一个柔性卷带进行曝光，并同时对位于所述测量区的另一个工件台上的柔性卷带进行对位测量和/或焦面测量。
  25. 如权利要求21所述的双工件台柔性卷带曝光方法，其特征在于，所述柔性卷带上设置有第一对位标记；所述测量模块包括：第一光源、对位标记单元、用于承载所述对位标记单元的承载台和第一图像获取单元，所述对位标记单元上设置有与所述第一对位标记相对应的第二对位标记；
    获得所述对位数据的过程包括：
    所述第一光源提供对位光线，所述对位光线依次照射至所述第二对位标记和所述第一对位标记并经所述测量区上的柔性卷带反射，反射光线穿过所述对位标记单元至所述第一图像获取单元以获得对位数据；
    根据所述对位数据调整所述光罩和/或所述工件台在平行于所述工件台表面的平面内移动以实现曝光对准。
  26. 如权利要求25所述的双工件台柔性卷带曝光方法，其特征在于，所述测量模块还包括：第二光源、投影镜单元、探测镜单元和第二图像获取单元；
    获得焦面测量数据的过程包括：
    所述第二光源提供测量光线，所述测量光线经所述投影镜单元照射至所述测量区上的柔性卷带表面并被反射，反射光线经所述探测镜单元后至所述第二图像获取单元以获得焦面测量数据；
    根据所述焦面测量数据调整所述光罩或/和所述工件台沿垂直于所述工件台表面的方向移动，以使所述曝光区的柔性卷带处于所述物镜单元的焦深度范围内。
  27. 如权利要求21至26中任一项所述的双工件台柔性卷带曝光方法，其特征在于，所述双工件台柔性卷带曝光方法用于对所述柔性卷带进行单面曝光。
  28. 如权利要求21至26中任一项所述的双工件台柔性卷带曝光方法，其特征在于，所述双工件台柔性卷带曝光方法用于对所述柔性卷带进行双面曝光。
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