WO2020189717A1 - 被覆金型、被覆金型の製造方法、および硬質皮膜形成用ターゲット - Google Patents
被覆金型、被覆金型の製造方法、および硬質皮膜形成用ターゲット Download PDFInfo
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D37/00—Tools as parts of machines covered by this subclass
- B21D37/10—Die sets; Pillar guides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21K—MAKING FORGED OR PRESSED METAL PRODUCTS, e.g. HORSE-SHOES, RIVETS, BOLTS OR WHEELS
- B21K5/00—Making tools or tool parts, e.g. pliers
- B21K5/20—Making working faces of dies, either recessed or outstanding
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D37/00—Tools as parts of machines covered by this subclass
- B21D37/01—Selection of materials
Definitions
- the present invention relates to a coating mold coated with a hard film, a method for manufacturing a coating mold, and a target for forming a hard film.
- galling means that a chemically active surface is formed on the working surface of either or both of the sliding members, and the surface is strongly adhered to or fixed to the other side. This refers to the phenomenon in which the constituent substances on the surface of the surface are torn off and transferred to the surface on the other side. Therefore, dies used for bending dies and drawing dies are required to have a particularly high level of strength and galling resistance.
- TRD method molten salt immersion method
- CVD method chemical vapor deposition method
- PVD method physical vapor deposition method
- the TRD method and the CVD method are used by performing treatment at a temperature close to the quenching temperature of a mold using steel as a base material and then tempering (some are re-quenched before that), but at a high temperature. In some cases, deformation or dimensional change of the mold due to processing becomes a problem.
- the TRD method and the CVD method form a film using carbon in the steel material of the mold base material, so that the carbon near the surface of the mold is reduced when the treatment is repeated. This may result in a decrease in hardness and a decrease in adhesion to the film.
- the PVD method since the coating temperature is lower than the tempering temperature of steel among various coating forming means, the mold is less likely to be softened by the coating, and the mold is less likely to be deformed or dimensionally changed.
- a Ti-based film such as TiN, TiCN, TiAlN, a Cr-based film such as CrN, CrAlN, AlCrN, a V-based film such as VCS, VC, etc. have been conventionally implemented. Has been done.
- Patent Document 1 the applicant uses AlCrSi nitride and V nitride for the purpose of improving sliding characteristics such as abrasion resistance and galling resistance in a sliding environment with a work material.
- Patent Document 2 for the purpose of improving the abrasion resistance and galling resistance of the mold, the applicant a1 in which the metal portion of the film is made of a nitride or a carbonitride having an atomic ratio of 30% or more of chromium.
- a coating member having excellent sliding characteristics which includes a layer B made of a nitride or carbonitride having a value of 60% or more.
- the covering tool described in Patent Document 1 or 2 described above contains a V nitride having excellent sliding characteristics in a hard film, and further reduces the convex portion of the film surface which is a starting point for attacking the work material to be smooth. It discloses an excellent technology that has a film structure and is excellent in sliding characteristics. However, regarding the reduction of droplets, only smoothing the surface of the film is described, and there is no description or suggestion regarding the reduction of droplets in the film, so there is still room for consideration for further improvement in durability. .. In view of the above problems, it is an object of the present invention to provide a coating mold which can exhibit good sliding characteristics and has excellent durability by further reducing droplets.
- one aspect of the present invention is a coating mold having a hard film on the working surface.
- the hard film is a Cr-based nitride a1 layer having a thickness of 100 nm or less and (V 1-a M a ) (M is at least one selected from Mo and W) or carbonitride, and the atomic ratio a of M to the sum of V and M is 0.05 or more and 0.
- V is at least one selected Mo, from W
- M consists nitride or carbonitride
- V and M Further includes a layer B having a thickness of 0.1 ⁇ m or more and an atomic ratio a of M of 0.05 or more and 0.45 or less.
- the Young's modulus of the A layer of the hard film is 250 GPa or more, and the nanoindentation hardness is 25 GPa or more.
- Another aspect of the present invention is a method for manufacturing a coating mold having a hard film on the working surface.
- A1 layer with a thickness of 100 nm or less which is a Cr-based nitride, (V 1-a M a ) (M is at least one selected from Mo and W), and a hard film formation in which the atomic ratio a of M to the total of V and M is 0.05 or more and 0.45 or less.
- the upper layer of the A layer (V 1-a M a) (M is Mo, at least one selected from W) consists, atomic ratio a of M to the sum of V and M is 0.05 or more is coated with a hard film-forming target is 0.45 or less, a nitride or a carbonitride of (V 1-a M a), the atomic ratio a of M to the sum of V and M is 0.
- Another aspect of the present invention comprises (V 1-a M a ) (M is at least one selected from Mo and W), and the atomic ratio a of M to the total of V and M is 0.05 or more. It is a target for forming a hard film, which is 0.45 or less.
- a coating mold having a hard film which can exhibit good sliding characteristics and has excellent durability by reducing droplets.
- a suitable target for forming the hard film can be provided.
- FIG. 6A is a schematic side view showing when the circular plate-shaped portion is separated from the sample
- FIG. 6B is a schematic side view showing when the circular plate-shaped portion is in contact with the sample.
- the coating mold of the present embodiment has a hard film on the work surface.
- the hard film, the thickness 100nm following a1 layer is Cr-based nitride, a nitride or a carbonitride of (V 1-a M a) ( at least one M is selected Mo, from W) ,
- the Cr-based nitride film (hereinafter, also referred to as CrN-based film) which is the a1 layer of the present embodiment is excellent in heat resistance and abrasion resistance, and contributes to the improvement of the mold life in a high load environment.
- This CrN-based film shows a film in which Cr is contained in an atomic ratio of 30% or more in the metal portion containing a semimetal. If Cr is 30% or more, at least one or more of Group 4 transition metal, Group 5 transition metal, Group 6 transition metal, Al, Si, and B are contained in addition to Cr as long as the effect of the a1 layer is not impaired. It may be. Of course, Cr may be 100%.
- the CrN-based film can improve wear resistance in a high temperature region by selecting from CrN, CrTiN, CrVN, CrSiN, CrBN, CrSiBN, CrTiSiN, CrVSiN, AlCrN, AlTiCrN, AlVCrN, AlCrSiN, AlTiCrSiN, and AlVCrSiN. It is preferable because it can be done.
- V is contained in the a1 layer
- the content of V contained in the CrN-based film is preferably less than 50%. More preferably, AlCrSiN is applied.
- the Cr content is lower than 30%, it tends to be difficult to obtain the above-mentioned effect of improving heat resistance and abrasion resistance.
- the upper limit of the Cr content is not particularly limited, and can be appropriately changed depending on the type and application of the film.
- the Cr content may be set to 80% or less in terms of atomic ratio in order to easily obtain the effect of improving heat resistance and abrasion resistance.
- a fragile hexagonal structure becomes a main component by controlling so that 20 ⁇ x ⁇ 70, 30 ⁇ y ⁇ 75, and 0 ⁇ z ⁇ 10 in the composition formula of AlxCrySiz. It is preferable because it mainly has a cubic crystal structure and can stably improve wear resistance and heat resistance.
- the above crystal structure can be confirmed by, for example, an X-ray diffraction method, and if the peak of the cubic structure has the maximum intensity, the cubic structure can be regarded as the main body even if other crystal structures are included. ..
- A2 layer in this embodiment be (V 1-a M a) (M is at least one selected Mo, from W) consisting of nitride or carbonitride (hereinafter, also referred to as VMN based coating) It is one of the important features.
- the VMN-based film is appropriately oxidized during processing to form an oxide layer, and forms a low melting point double oxide containing a component to be processed. Therefore, it is possible to prevent adhesion from the work material and suppress local galling and adhesion wear at the initial stage of processing.
- V has a lower thermal conductivity than other metal elements used for hard coatings
- a large micromelt pool due to arc discharge to the V target is large during arc ion plating using a target of V alone. Since it is easy to form deeply, it was confirmed that the number of droplets generated is large and the size of the droplets tends to be large. Therefore, in the present embodiment, by adopting the VMN-based film as described above, it is possible to suppress droplets and improve the durability of the film without impairing the excellent sliding characteristics.
- M selects at least one of Mo and W.
- the Young's modulus in the A layer of the hard film is 250 GPa or more and the nanoindentation hardness is 25 GPa or more, the above-mentioned durability improving effect can be more easily obtained, which is preferable.
- the more preferable Young's modulus is 300 GPa or more, and the indentation hardness of the more preferable name is 30 GPa or more.
- the atomic ratio a of M is 0.05 or more and 0.45 or less.
- the film formation rate tends to decrease, which is not preferable.
- V in the alloy is reduced, there is a possibility that the effect of suppressing adhesive wear cannot be sufficiently exhibited.
- the atomic ratio of M is less than 0.05, the effect of V is the main effect, and the effect of suppressing droplets cannot be obtained.
- at least one or more of Group 4 transition metals, Group 5 transition metals, Group 6 transition metals, Al, Si, and B may be contained as long as the effects of the present invention are not impaired.
- the upper limit of the preferable atomic ratio a of M is 0.40, and the lower limit of the preferable atomic ratio a of M is 0.1.
- the upper limit of the more preferable atomic ratio a of M is 0.35, and the lower limit of the more preferable atomic ratio a of M is 0.15.
- the atomic ratio of nitrogen elements in the film is 45% or more and 55% or less when the total of metal elements and non-metal elements in the entire film is defined as 100%. It is preferable to have. By controlling nitrogen within the above range, it is possible to further improve the heat resistance of the film.
- the hard film of the present embodiment has a structure in which the above-mentioned a1 layer and a2 layer are alternately laminated.
- the wear resistance and heat resistance of the CrN-based film and the galling resistance and adhesion resistance of the VMN-based film can be effectively exhibited without interfering with each other.
- the individual film thickness of the a1 layer is 100 nm or less and the individual film thickness of the a2 layer is 80 nm or less because the above characteristics can be exhibited in a well-balanced manner.
- the individual film thicknesses of the a1 layer and the a2 layer which are more preferable, are 30 nm or less.
- film thickness of the a1 layer and the a2 layer is more preferably 20 nm or less, and even more preferably 15 nm or less. These film thicknesses can be adjusted by controlling the input power applied to the target, the chamber volume of the apparatus used for film formation, the table rotation speed, and the like. Further, in order to obtain the effect of improving the wear resistance more reliably, it is preferable to set the film thickness of the a1 layer and the a2 layer to 2 nm or more.
- the layers may be laminated at a constant film thickness or while varying the thickness.
- the a2 layer may be thicker than the a1 layer if sliding characteristics are important, and the a1 layer may be thicker than the a2 layer if wear resistance is important. It should be.
- the thickness is varied, it is possible to exert the effect even if it is inclined or stepwise, and it may be appropriately selected according to the purpose.
- stepwise when it is changed stepwise, it can be easily produced by a general PVD device, and when it is changed obliquely, the stress distribution inside the film is stabilized and peeling between layers is less likely to occur.
- gradient change means that at least one of the a1 layer and the a2 layer fluctuates from layer to layer.
- Stepwise change means that two or more layers having the same thickness are included in the a1 layer and the a2 layer. For example, if it is desired to improve the sliding characteristics of the covering tool in the initial stage of machining and improve the wear resistance after the middle stage of machining, the thickness of the a2 layer may be increased toward the surface layer side, and the thickness of the a1 layer may be increased. The thickness may be reduced toward the surface layer side.
- the CrN-based film is preferably a Cr-based nitride layer having the same components as the above-mentioned a1 layer because it is rational in industrial production, but a layer having a component different from that of the a1 layer may be used.
- the CrN-based film may have a single layer or a multi-layer structure (including an alternating laminated structure) having two or more layers depending on desired characteristics.
- cracks pass through the laminated interface when the film breaks, which complicates the crack growth path and suppresses rapid growth, resulting in the failure resistance of the film. It is preferable because the property can be improved.
- the b1 layer and the b2 layer are CrN, CrTiN, CrVN, CrSiN, CrBN, CrSiBN, CrTiSiN, CrVSin, It is possible to select from AlCrN, AlTiCrN, AlVCrN, AlCrSiN, AlTiCrSiN, and AlVCRSiN.
- the total thickness of the CrN-based film formed directly under the alternating laminated portion is preferably 0.5 ⁇ m or more, and preferably 50 ⁇ m or less.
- the more preferable thickness of the CrN-based film is 40 ⁇ m or less, and the more preferable thickness of the CrN-based film can be set to 30 ⁇ m or less, 20 ⁇ m or less, and 10 ⁇ m or less.
- the film thicknesses of the b1 layer and the b2 layer are preferably 0.002 ⁇ m to 0.1 ⁇ m, respectively.
- the CrN-based film formed immediately below the alternating laminated portion is preferably formed 1.2 times or more thicker than the a1 layer.
- the layer (V 1- ) is placed on the upper layer of the alternating laminated portion (layer A).
- a M a ) (M is at least one selected from Mo and W) and is composed of a nitride or a carbonitride, and the atomic ratio a of M to the total of V and M is 0.05 or more and 0.45 or less. It is preferable to form a B layer having a thickness of 0.1 ⁇ m or more.
- the B layer is also preferable because a VMN-based film layer having the same components as the a2 layer is rational in terms of industrial production, but is not limited to this, and a layer having a component different from that of the a2 layer may be used.
- the thickness of the B layer is preferably 0.1 ⁇ m or more, and more preferably 0.2 ⁇ m or more.
- the upper limit of the thickness is not particularly limited, but if the film thickness becomes too thick, it takes time to form a film and the productivity deteriorates, so that the thickness is preferably 8 ⁇ m or less.
- the abrasion resistance of the entire film may be lowered, so that the film thickness is more preferably 5 ⁇ m or less, and further preferably 3 ⁇ m or less.
- the B layer is preferably formed 1.2 times or more thicker than the a2 layer.
- the total thickness of the alternating laminated portion (layer A) of the present embodiment is preferably 1 ⁇ m to 50 ⁇ m. More preferably, it is 2 ⁇ m to 30 ⁇ m. If it is too thin, the wear resistance or adhesion resistance as described above cannot be sufficiently improved, and the film tends to wear early. If it is too thick, the dimensional tolerance of the mold is exceeded and the clearance on the molded surface is insufficient. This is because there is a possibility that the molding load will increase due to excessive drawing.
- the target of the present embodiment is substantially the same composition as the hard coating of the present invention, (V 1-a M a ) (M is at least one selected from Mo and W), and the atomic ratio a of M to the total of V and M is 0.05 or more and 0.45% or less, which is a target for forming a hard film.
- Mo molybdenum
- W molybdenum
- the molten pool area formed on the target surface tends to be smaller than that of the target of V alone, which contributes to the suppression of droplets.
- the droplet suppressing effect exhibited by incorporating Mo or W, which has a melting point and thermal conductivity higher than V, in the target depends on the concentration distribution of the additive element in the target. That is, when the target is manufactured by the powder metallurgy method, the additive elements are distributed in the target on a scale equal to or smaller than the molten pool (about 10 to 200 ⁇ m in the present invention) generated by arc discharge. The area containing only V is divided by the additive element, and the above effect is exhibited.
- the particle size of the additive element powder is changed to the particles of the V powder in order to improve the dispersibility of the additive element. It is preferable to make it smaller than the diameter.
- the V alloy target is produced by dissolving the metal, it is preferable to sufficiently diffuse the additive element.
- the concentration distribution of the additive element it is preferable to keep the scale of the V-only area to the same level or less as the scale of the molten pool (about 10 to 200 ⁇ m) formed on the target surface of V alone. ..
- the concentration distribution can be measured by line analysis using an electron probe microanalyzer (EPMA) or an element map, and evaluated by comparing with a molten pool.
- EPMA electron probe microanalyzer
- the content of other contained elements and impurity elements may be contained in a trace amount (0.1% to 1%).
- the impurity element include Fe, C, O, N and the like.
- the atomic ratio a of M to the total of V and M is 0.05 or more and 0.45 or less. By keeping it within this range, the difference between the film composition and the target composition can be reduced, and a film having desired characteristics can be stably formed.
- the atomic ratio a of M is more than 0.45, the film formation rate tends to decrease, which tends to reduce the productivity.
- the atomic ratio a of M is less than 0.05, a V-based film is formed, so that the effect of suppressing droplets cannot be obtained.
- the lower limit of the preferable atomic ratio a is 0.1, and the upper limit of the preferable atomic ratio a is 0.40.
- the (V 1-a M a ) alloy target of the present embodiment can be applied to an existing film forming method, but the coating treatment can be performed at a temperature lower than the tempering temperature of the mold, and the dimensions of the mold can be adjusted. It is preferably used in a physical vapor deposition method (PVD) such as an arc ion plating method and a sputtering method, which can suppress fluctuations. In particular, it is excellent in adhesion and adhesion to a sample, but it is more preferably used for arc ion plating in which droplets are easily formed.
- PVD physical vapor deposition method
- the (V 1-a M a ) alloy target of the present embodiment is preferably used for the a2 layer and the B layer of the hard coating film of the present embodiment, but other VMN-based single layer films and other than the present embodiment. It may be applied to the application of coating a VMN-based film on a multi-layer film.
- the method for producing a coating mold of the present invention is a method for producing a coating mold having a hard film on the work surface, which is a Cr-based nitride a1 layer having a thickness of 100 nm or less and (V 1-a Ma). ) (M is at least one selected from Mo and W) and has a thickness of 80 nm, wherein the atomic ratio a of M to the total of V and M is 0.05 or more and 0.45 or less.
- a layer B having a thickness of 0.1 ⁇ m or more is coated with a hard film forming target which is made of carbonitride and whose atomic ratio a of M to the total of V and M is 0.05 or more and 0.45 or less.
- This hard film forming method is a physical vapor deposition method such as an arc ion plating method or a sputtering method, which enables coating treatment at a temperature lower than the tempering temperature of the mold and suppresses fluctuations in the dimensions of the mold. It is preferable to select PVD). More preferably, the arc ion plating method in which droplets are easily formed is applied. Further, in order to obtain a hard film that is smoother and has excellent sliding characteristics, the surface of the hard film may be polished during or after coating.
- the material (base material, base material) used for the mold of the present invention is not particularly specified, but tool steel such as cold die steel, hot die steel, high-speed steel, or cemented carbide is appropriately used. be able to.
- the mold may be previously applied with a surface hardening treatment utilizing diffusion such as nitriding treatment or carburizing treatment. Further, a film different from the hard film may be formed on the surface of the mold as long as the effect of the hard film of the present invention described above is not impaired.
- Example 1 target materials as examples of the present invention and comparative examples were prepared.
- a powder was prepared.
- the obtained mixed powder was filled in a mild steel capsule, degassed and sealed, and then sintered by a hot hydrostatic press under the conditions of a temperature of 1250 ° C., a pressure of 120 MPa, and a holding time of 10 hours.
- the body was made.
- the V powder was a pulverized powder having a particle size of 150 ⁇ m or less and a D50 of 87 ⁇ m.
- the Cr, Fe, and Nb powders were pulverized powders having a particle size of 150 ⁇ m or less.
- the Mo powder was obtained by a hydrogen reduction method of molybdenum trioxide powder, and a particle size (Fisher diameter) of 4 to 6 ⁇ m was used.
- the W powder was produced by a chemical extraction method and had a particle size (Fisher diameter) of 0.6 to 1.0 ⁇ m.
- the obtained sintered body was machined to prepare a (V 1-a Ma) alloy target having a diameter of 105 mm and a thickness of 16 mm.
- the composition of the prepared target is shown in Table 1.
- Table 1 also shows the thermal conductivity and melting point of the additive element M (100V target is V thermal conductivity and melting point) extracted from the references (Revised 4th Edition Metal Data Book, Japan Institute of Metals, Maruzen, 2004). Shown.
- a SKH51 21 mm ⁇ 17 mm ⁇ 2 mm
- the prepared base material is surrounded by a plurality of targets. Installed in the device.
- An AlCrSi target Al60Cr37Si3 (at%) was used as the target for the a1 layer, and a prepared (V 1-a M a ) alloy target was used as the target for the a2 layer.
- the base material was degassed by heating at 450 ° C. in the apparatus, Ar gas was introduced, and the surface of the base material was subjected to plasma cleaning treatment (Ar ion etching). Subsequently, the sample No. which coated the base material after the plasma cleaning treatment. 1 to 6 were prepared.
- Example 2 Next, the amount of the additive element M (W, Mo) added, which had the effect of reducing droplets in Example 1, was examined.
- the target material comprising as Working Example composition formula in atomic ratio was prepared in the same manner as in Example 1 so that V 1-a M a.
- the composition of the prepared target is shown in Table 2.
- the same process as in Example 1 was carried out except for the material of the film, and the sample No. 7-Sample No. 13 was produced.
- the sample No. No. 8 is the sample No. of Example 1. 1
- sample No. No. 11 is the sample No. of Example 1. 2
- sample No. Reference numeral 13 is sample No. 13 of Example 1. The same as 6 was used.
- the cross section of the film in which the test piece was tilted 5 degrees with respect to the outermost surface of the hard film was adjusted by mirror polishing, and on the observation surface corresponding to the alternating laminated portion (layer A) in the cross section.
- the hardness was measured and the film components were quantitatively analyzed.
- the hardness of the observation surface (nanoindentation hardness) and Young's modulus were measured using a nanoindentation device manufactured by Bruker AXS.
- the hardness and elastic modulus were measured at 10 points with a pushing load of 5000 ⁇ N, and were obtained from the average value.
- Quantitative analysis of the film components was performed using an electron probe microanalyzer (EPMA; JXA-8900R manufactured by JEOL Ltd.). As the analysis value, spot measurements with an acceleration voltage of 15 kV were carried out at five locations, and the average value was used. From the measured values of Al, Cr, Si, V, Mo, W, and N, the amount of Mo and W in (V, M) was determined and used as the metal component composition of the a2 layer. The results are shown in Table 2. Although not shown in the table, it has been confirmed that the metal component ratio of the B layer is also the same level as the metal component ratio of the a2 layer. In addition, although not shown in the table, 50V-50Mo and 50V-50W were also examined as comparative examples. As a result, the arc discharge of each target was not stable as compared with the other examples, and it was difficult to form a film having a desired thickness, so the experiment was stopped.
- EPMA electron probe microanalyzer
- Example 3 Subsequently, a test was conducted to compare the sliding characteristics of the samples of the present invention example and the comparative example.
- the base material to be coated is a pre-hardened steel (15 mm x 10 mm x 10 mm) adjusted to 60 HRC, mirror-polished and degreased and cleaned, and an arc ion plating device with a structure in which the base material rotates around a center surrounded by multiple targets. Installed inside.
- An AlCrSi target Al60Cr37Si3 (at%)
- an alloy target or V target V80W20 (at%) was used as the target for the a2 layer.
- the base material was degassed by heating at 450 ° C. in the apparatus, Ar gas was introduced, and the surface of the base material was subjected to plasma cleaning treatment (Ar ion etching). Subsequently, the sample No. which coated the base material after the plasma cleaning treatment. 14 to 20 were prepared. Sample No. In No. 14, an AlCrSiN layer of 3.0 ⁇ m was formed on the base material, and a film (layer A: alternating laminated portion) having an alternating laminated structure of AlCrSiN (a1 layer) and VWN (a2 layer) was laminated by 9.3 ⁇ m. Manufactured. Sample No. In Nos.
- a CrN layer of 4.4 ⁇ m was formed on the substrate, and then a film having an alternating laminated structure of AlCrSiN and CrN was coated on the CrN layer by 2.8 ⁇ m, and then AlCrSiN (a1 layer).
- a layer: alternating laminated portion was coated with 2.4 ⁇ m of a film having an alternating laminated structure of VWN (a2 layer).
- Sample No. 17 to 20 were coated with a film having an alternating laminated structure of AlCrSiN (corresponding to a1 layer) and VN (corresponding to a2 layer) by 13 ⁇ m.
- the thickness of the a1 layer was about 9 nm
- the thickness of the a2 layer was about 12 nm.
- 5 is a top view of the test apparatus
- FIGS. 6A and 6B are side views of FIG.
- the test apparatus used in the present embodiment has a holding mechanism 11 including an arm portion 15 that attaches and holds the sample to the sample setting portion 14, and contacts and does not contact the sample while rotating. It includes a contact jig 10 that repeats contact, and a rotation mechanism (not shown) that rotatably holds the contact jig 10.
- the contact jig 10 is composed of a shaft portion 12 having a rotating shaft Ax1 and a circular plate-shaped portion 13 having a central shaft Ax2 eccentric from the rotating shaft Ax1.
- a storage hole for storing and holding the arm portion 15 so as to be able to move forward and backward is formed in the main body of the holding mechanism in which the arm portion is installed.
- a spring mechanism is installed so that the normal force applied to the sample in advance is kept constant during the test.
- a force sensor is incorporated in the main body of the holding mechanism, and the normal force applied to the sample and the frictional force applied in the horizontal direction during the sliding test can be measured in real time.
- the samples of the present invention and the comparative example were attached to the tip of the arm portion 15 described above, and a circular plate-shaped portion (corresponding to the work material) made of SKD61 having a hardness of 45 HRC was rotated at a rotation speed of 500 mm / s.
- the samples of the examples of the present invention and the comparative examples and the circular plate-shaped portion were slid 7,000 times.
- lubrication during sliding experiments in order to reproduce the oil film breakage in the actual usage environment, lubricating oil is applied to the sample surface when the friction coefficient ⁇ between the circular plate-shaped part and the sample reaches 0.25. The intermittent lubrication method was adopted.
- the coefficient of friction was determined in real time during the test as the ratio of the frictional force measured by the force sensor to the normal force.
- the test results of each sample are shown in Table 4.
- No. 1 which is an example of the present invention. 14-No. It was confirmed that the 16 samples had very good sliding characteristics, with no film breakage confirmed even when the number of sliding times reached 7,000, and a state in which further continuous tests were possible. On the other hand, No. 17-No. It was confirmed that the film fracture occurred in all of the 20 samples within 6000 sliding times, and that the larger the maximum friction work amount, the faster the fracture occurred. From the above, it was confirmed that the film of the example of the present invention can significantly improve the sliding characteristics as compared with the conventional film, and is effective in improving the life of the mold.
Abstract
Description
すなわち、本発明の一態様は、作業面に硬質皮膜を有する被覆金型であって、
前記硬質皮膜は、Cr系窒化物である厚さ100nm以下のa1層と、
(V1-aMa)(MはMo、Wから選択される少なくとも一種)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ80nm以下のa2層と、が交互に積層したA層を含む、被覆金型である。
好ましくは、該A層の上層に形成され、(V1-aMa)(MはMo、Wから選択される少なくとも一種)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ0.1μm以上のB層と、をさらに含む。
好ましくは、前記硬質皮膜のA層におけるヤング率が250GPa以上、ナノインデンテーション硬度が25GPa以上である。
Cr系窒化物である厚さ100nm以下のa1層と、
(V1-aMa)(MはMo、Wから選択される少なくとも一種)からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である硬質皮膜形成用ターゲットを用いて被覆され、(V1-aMa)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ80nm以下のa2層と、が交互に積層されたA層を被覆する工程を含む、被覆金型の製造方法である。
好ましくは、A層の上層に、(V1-aMa)(MはMo、Wから選択される少なくとも一種)からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である硬質皮膜形成用ターゲットを用いて被覆され、(V1-aMa)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ0.1μm以上のB層を被覆する工程と、をさらに含む。
本実施形態のa1層であるCr系窒化物皮膜(以下、CrN系皮膜とも記載する)は、耐熱性と耐摩耗性に優れ、高負荷環境における金型寿命の向上に寄与する。このCrN系皮膜は、Crが半金属を含む金属部分での原子比率において、30%以上含まれている皮膜を示す。Crが30%以上であればa1層の効果を阻害しない範囲で、Cr以外に4族遷移金属、5族遷移金属、6族遷移金属、Al、Si、Bの少なくとも一種または二種以上を含んでもよい。もちろん、Crが100%であっても良い。例えばCrN系皮膜は、CrN、CrTiN、CrVN、CrSiN、CrBN、CrSiBN、CrTiSiN、CrVSiN、AlCrN、AlTiCrN、AlVCrN、AlCrSiN、AlTiCrSiN、AlVCrSiNから選択することで高温領域での耐摩耗性を向上させることが出来るため好ましい。なおa1層にVを含有する場合、CrN系皮膜に含まれるVの含有量は50%未満であることが好ましい。より好ましくは、AlCrSiNを適用する。Crの含有量が30%よりも低い場合、上述した耐熱性や耐摩耗性の向上効果が得られにくくなる傾向にある。Cr含有量の上限は特に限定せず、皮膜の種類や用途によって適宜変更することが可能である。例えばAlCrSiNを適用した場合、耐熱性や耐摩耗性の向上効果を得られやすくするために、Crの含有量を原子比率で80%以下に設定してもよい。好ましくはAlCrSiNを適用する場合、AlxCrySizの組成式において、20≦x<70、30≦y<75、0<z<10となるように制御することで、脆弱な六方晶構造が主体となることを抑制して立方晶構造を主体とし、耐摩耗性や耐熱性を安定して向上させることができるため、好ましい。上記の結晶構造は例えばX線回折法により確認することができ、立方晶構造のピークが最大強度となっていれば、他の結晶構造を含んでいても立方晶構造が主体とみなすことができる。
例えば加工初期段階の被覆工具の摺動特性を向上させつつ、加工中期段階以降の耐摩耗性を向上させたい場合は、a2層の厚みを表層側に向かって増加させてもよく、a1層の厚みを表層側に向かって減少させてもよい。
本実施形態の硬質皮膜のa2層およびB層に用いられるVMN系皮膜を被覆するため、本実施形態のターゲットは、本発明の硬質皮膜とほぼ同じ組成となる、(V1-aMa)(MはMo、Wから選択される少なくとも一種)からなり、VとMとの合計に対するMの原子比aが0.05以上0.45%以下である、硬質皮膜形成用ターゲットである。
本実施形態のターゲットでは、M元素にMoまたはWの少なくとも一種を選択するので、V単独のターゲットよりもターゲット表面に形成される溶融プール面積が縮小する傾向にあり、ドロップレットの抑制に寄与する。すなわち、溶融プールが縮小することで、溶融プールから発生するドロップレットが小さくなり、ドロップレット個数も減少する。Vよりも融点、熱伝導率の高いMoやWをターゲットに含有させることにより発現するドロップレット抑制効果は、ターゲット中の添加元素の濃度分布に依存すると考えられる。つまり、ターゲットを粉末冶金法で製造する場合は、アーク放電により生成する溶融プール(本発明では10~200μm程度)と同程度か、それ以下のスケールでターゲット中に添加元素を分布させることにより、Vのみのエリアが添加元素によって分断され、上記効果が発揮される。このためには、主成分のV粉末の粒子径を上記溶融プールのスケールと同程度以下にすることに加え、添加元素の分散性を高めるために、添加元素粉末の粒子径をV粉末の粒子径に比べて小さくすることが好ましい。なお、金属を溶解してV合金ターゲットを製造する場合は、添加元素を十分拡散させることが好ましい。また、添加元素の濃度分布が発生する場合は、そのVのみのエリアのスケールを、V単独のターゲット表面に形成される溶融プールのスケール(10~200μm程度)と同程度以下に抑えることが好ましい。具体的には、電子プローブマイクロアナライザー(EPMA)を用いたライン分析や元素マップにより濃度分布を測定し、溶融プールと比較して評価することができる。
なお本発明の皮膜の特性を損なわない範囲であれば、他の含有元素の含有量および不純物元素を微量(0.1%~1%)含んでいてもよい。不純物元素は、例えばFe,C,O,N等が挙げられる。
まず本発明例および比較例となるターゲット材を作成した。それぞれ純度99.9%以上のV粉末とCr,Fe,Nb、Mo、W粉末を準備し、組成式が表1に示す原子比となるように秤量し、V型混合機により混合して混合粉末を作製した。次に、得られた混合粉末を軟鋼製のカプセルに充填し、脱気封止した後、温度1250℃、圧力120MPa、保持時間10時間の条件で熱間静水圧プレスによって焼結し、焼結体を作製した。なお、V粉末は粉砕粉で、粒径は150μm以下、D50は87μmのものを用いた。また、Cr,Fe,Nb粉末は粉砕粉で、粒径は150μm以下のものを用いた。Mo粉末は三酸化モリブデン粉末の水素還元法によるもので、粒径(フィッシャー径)は4~6μmのものを用いた。W粉末は化学抽出法によるもので、粒径(フィッシャー径)は0.6~1.0μmのものを用いた。得られた焼結体に機械加工を施し、直径105mm×厚さ16mmの(V1-aMa)合金ターゲットを作製した。作製したターゲットの組成を表1に示す。表1には、参考文献(改定4版金属データブック、日本金属学会、丸善、2004)から抽出した、添加元素Mの熱伝導率、融点(100VターゲットはVの熱伝導率、融点)を併せて示す。
被覆する基材にはSKH51(21mm×17mm×2mm)の鏡面研摩、脱脂洗浄済みのものを準備し、準備した基材を複数のターゲットが取り囲む中心で基材が回転する構造のアークイオンプレーティング装置内に設置した。a1層用のターゲットにはAlCrSiターゲット(Al60Cr37Si3(at%))を用い、a2層用のターゲットには作製した(V1-aMa)合金ターゲットを用いた。その後初期工程として、装置内にて基材を450℃で加熱脱ガスした後、Arガスを導入し、基材表面のプラズマクリーニング処理(Arイオンエッチング)を行った。続いて、プラズマクリーニング処理後の基材に被覆を行った試料No.1~6を作製した。それぞれの皮膜の構成は、AlCrSiN層を1μm形成した上にAlCrSiNと(V1-aMa)Nとの交互積層構造(以下、AlCrSiN/(V1-aMa)Nとも記載する。)からなる皮膜(A層:交互積層部)を17~20μm積層した後、最上層に0.5μmの(V1-aMa)N膜(B層)を成膜した。なお、試料No.6はV100%(a=0%)のものである。なお試料No.1~No.6において、a1層の厚みは約9nmであり、a2層の厚みは約12nmであった。
次に作製した試料に対して、硬質皮膜の最表面に対し試験片を5度傾けた皮膜断面を鏡面研磨にて調整し、その中の交互積層部(A層)に該当する観察面において、光学顕微鏡にて観察を行った。本発明例である試料No.2の写真を図1に、比較例である試料No.6の写真を図2に示す。図中の光学顕微鏡写真において、白色の斑点がドロップレットである。本発明例であるNo.1,2(M:Mo,W)のターゲットを用いて作製したA層においては、比較例であるNo.3~5(M:Cr,Fe,Nb)およびV100%(a=0%)のNo.6のターゲットを用いたものに比べて、ドロップレットは著しく低減しており、熱伝導率や融点の高い添加元素によりドロップレットを低減できることが示された。
次に、実施例1でドロップレット低減効果がみられた添加元素M(W、Mo)の添加量について検討した。本発明例となるターゲット材を原子比における組成式がV1-aMaとなるように実施例1と同じ要領で作成した。作製したターゲットの組成を表2に示す。被覆工程に関しても、皮膜の材質以外は実施例1と同じ工程で実施し、試料No.7~試料No.13を作製した。ここで試料No.8は実施例1の試料No.1と、試料No.11は実施例1の試料No.2と、試料No.13は実施例1の試料No.6と同じものを使用した。
次に作製した試料に対して、硬質皮膜の最表面に対し試験片を5度傾けた皮膜断面を鏡面研磨にて調整し、その中の交互積層部(A層)に該当する観察面において、硬さの測定と皮膜成分の定量分析を行った。ブルカーエイエックスエス社製のナノインデンテーション装置を用い、観察面の硬さ(ナノインデンテーション硬度)とヤング率を測定した。この硬さと弾性率の測定は、押込み荷重5000μNで10点測定し、その平均値から求めた。皮膜成分の定量分析は、電子プローブマイクロアナライザー(EPMA;日本電子(株)製JXA-8900R)を用いて分析した。分析値は、加速電圧15kVとしたスポット測定を5箇所実施し、その平均値とした。Al、Cr、Si、V、Mo、W、Nの測定値から(V,M)中に占めるMo,W量を求め、a2層の金属成分組成とした。結果を表2に示す。なお表には記載していないが、B層の金属成分比率も、a2層の金属成分比率と同じ水準であることを確認済みである。また、表には記載していないが、比較例として50V-50Mo、50V-50Wについても検討を行った。結果としていずれのターゲットも他の実施例に比べ、アーク放電が安定せず、所望の厚さの皮膜を形成させることが困難であったため、実験を中止した。
続いて、本発明例と比較例の試料の摺動特性を比較する試験を行った。被覆する基材は60HRCに調整したプリハードン鋼(15mm×10mm×10mm)の鏡面研摩、脱脂洗浄済みのものを準備し、複数のターゲットが取り囲む中心で基材が回転する構造のアークイオンプレーティング装置内に設置した。a1層用のターゲットにはAlCrSiターゲット(Al60Cr37Si3(at%))を用い、a2層用のターゲットには(V80W20(at%))合金ターゲットまたはVターゲットを用いた。その後初期工程として、装置内にて基材を450℃で加熱脱ガスした後、Arガスを導入し、基材表面のプラズマクリーニング処理(Arイオンエッチング)を行った。続いて、プラズマクリーニング処理後の基材に被覆を行った試料No.14~20を作製した。試料No.14は、基材上にAlCrSiN層を3.0μm形成した上に、AlCrSiN(a1層)とVWN(a2層)との交互積層構造からなる皮膜(A層:交互積層部)を9.3μm積層して製造した。試料No.15、16は、基材上にCrN層を4.4μm形成し、続いてCrN層の直上にAlCrSiNとCrNとの交互積層構造からなる皮膜を2.8μm被覆したうえに、AlCrSiN(a1層)とVWN(a2層)との交互積層構造からなる皮膜を(A層:交互積層部)を2.4μm被覆した。試料No.17~20は、AlCrSiN(a1層相当)とVN(a2層相当)との交互積層構造からなる皮膜を13μm被覆した。試料No.14~20において、a1層の厚みは約9nmであり、a2層の厚みは約12nmであった。
11:ワーク保持機構
12:軸部
13:板状部
14:試料設置部
15:アーム部
Ax1:回転軸
Ax2:板状部の中心軸
Claims (6)
- 作業面に硬質皮膜を有する被覆金型であって、
前記硬質皮膜は、Cr系窒化物である厚さ100nm以下のa1層と、
(V1-aMa)(MはMo、Wから選択される少なくとも一種)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ80nm以下のa2層と、が交互に積層されたA層を含む、被覆金型。 - 前記A層の上層に形成され、(V1-aMa)(MはMo、Wから選択される少なくとも一種)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ0.1μm以上のB層をさらに含む、請求項1に記載の被覆金型。
- 前記硬質皮膜のA層におけるヤング率が250GPa以上、ナノインデンテーション硬度が25GPa以上である、請求項1または2に記載の被覆金型。
- 作業面に硬質皮膜を有する被覆金型の製造方法であって、
Cr系窒化物である厚さ100nm以下のa1層と、
(V1-aMa)(MはMo、Wから選択される少なくとも一種)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ80nm以下のa2層と、が交互に積層されたA層を被覆する工程を含み、
前記a2層は、(V1-aMa)(MはMo、Wから選択される少なくとも一種)からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である硬質皮膜形成用ターゲットを用いる、、被覆金型の製造方法。 - 前記A層の上層に、(V1-aMa)(MはMo、Wから選択される少なくとも一種)の窒化物または炭窒化物からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である厚さ0.1μm以上のB層を被覆する工程
をさらに含み、
前記B層は、(V1-aMa)(MはMo、Wから選択される少なくとも一種)からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である硬質皮膜形成用ターゲットを用いる、請求項4に記載の被覆金型の製造方法。 - (V1-aMa)(MはMo、Wから選択される少なくとも一種)からなり、VとMとの合計に対するMの原子比aが0.05以上0.45以下である、硬質皮膜形成用ターゲット。
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