CN114150269B - 切削刀具涂层及其制备方法 - Google Patents
切削刀具涂层及其制备方法 Download PDFInfo
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- CN114150269B CN114150269B CN202111483921.4A CN202111483921A CN114150269B CN 114150269 B CN114150269 B CN 114150269B CN 202111483921 A CN202111483921 A CN 202111483921A CN 114150269 B CN114150269 B CN 114150269B
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- coating
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- 238000005520 cutting process Methods 0.000 title claims abstract description 108
- 238000000576 coating method Methods 0.000 title claims abstract description 99
- 239000011248 coating agent Substances 0.000 title claims abstract description 94
- 238000004519 manufacturing process Methods 0.000 title description 4
- 238000001704 evaporation Methods 0.000 claims abstract description 35
- 230000008020 evaporation Effects 0.000 claims abstract description 23
- 238000005516 engineering process Methods 0.000 claims abstract description 21
- 150000004767 nitrides Chemical class 0.000 claims abstract description 16
- 239000013077 target material Substances 0.000 claims abstract description 15
- 230000007704 transition Effects 0.000 claims abstract description 14
- 238000007747 plating Methods 0.000 claims abstract description 12
- 238000002360 preparation method Methods 0.000 claims abstract description 10
- 229910019974 CrSi Inorganic materials 0.000 claims abstract description 7
- 238000004140 cleaning Methods 0.000 claims description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 3
- 239000013078 crystal Substances 0.000 abstract description 9
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 10
- 229910000838 Al alloy Inorganic materials 0.000 description 8
- 229910010037 TiAlN Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 238000005299 abrasion Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000007514 turning Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000007781 pre-processing Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000005482 strain hardening Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009837 dry grinding Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000005501 phase interface Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 229910000601 superalloy Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111483921.4A CN114150269B (zh) | 2021-12-07 | 2021-12-07 | 切削刀具涂层及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202111483921.4A CN114150269B (zh) | 2021-12-07 | 2021-12-07 | 切削刀具涂层及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114150269A CN114150269A (zh) | 2022-03-08 |
CN114150269B true CN114150269B (zh) | 2024-03-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202111483921.4A Active CN114150269B (zh) | 2021-12-07 | 2021-12-07 | 切削刀具涂层及其制备方法 |
Country Status (1)
Country | Link |
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CN (1) | CN114150269B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116695062B (zh) * | 2023-05-09 | 2024-01-23 | 东莞市普拉提纳米科技有限公司 | 一种切削不锈钢用高熵复合刀具涂层及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002113604A (ja) * | 2000-08-03 | 2002-04-16 | Sumitomo Electric Ind Ltd | 切削工具 |
CN102817032A (zh) * | 2011-06-10 | 2012-12-12 | 现代自动车株式会社 | 模具基础材料的涂层结构 |
CN103789723A (zh) * | 2014-01-24 | 2014-05-14 | 四川大学 | 一种Cr/CrN/(Ti,Al,Si,Cr)N复合硬质涂层及其制备方法 |
CN106967977A (zh) * | 2017-05-03 | 2017-07-21 | 成都真锐科技涂层技术有限公司 | 工模具表面复合氮化物涂层制备工艺 |
CN110408903A (zh) * | 2019-09-16 | 2019-11-05 | 济南大学 | 刀具表面多元多层涂层制备方法 |
CN111349901A (zh) * | 2020-03-27 | 2020-06-30 | 中国科学院力学研究所 | 一种切削刀具用耐高温氧化铝厚膜涂层的制备方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7939172B2 (en) * | 2006-05-17 | 2011-05-10 | G & H Technologies, Llc | Wear resistant vapor deposited coating, method of coating deposition and applications therefor |
KR20230170147A (ko) * | 2019-03-20 | 2023-12-18 | 가부시키가이샤 프로테리아루 | 피복 금형, 피복 금형의 제조 방법 및 경질 피막 형성용 타깃 |
JP2022540076A (ja) * | 2019-07-11 | 2022-09-14 | ナイト アカジシャン ベー.ヴェー. | コーティングを含む鋸刃またはその他の切削工具 |
-
2021
- 2021-12-07 CN CN202111483921.4A patent/CN114150269B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002113604A (ja) * | 2000-08-03 | 2002-04-16 | Sumitomo Electric Ind Ltd | 切削工具 |
CN102817032A (zh) * | 2011-06-10 | 2012-12-12 | 现代自动车株式会社 | 模具基础材料的涂层结构 |
CN103789723A (zh) * | 2014-01-24 | 2014-05-14 | 四川大学 | 一种Cr/CrN/(Ti,Al,Si,Cr)N复合硬质涂层及其制备方法 |
CN106967977A (zh) * | 2017-05-03 | 2017-07-21 | 成都真锐科技涂层技术有限公司 | 工模具表面复合氮化物涂层制备工艺 |
CN110408903A (zh) * | 2019-09-16 | 2019-11-05 | 济南大学 | 刀具表面多元多层涂层制备方法 |
CN111349901A (zh) * | 2020-03-27 | 2020-06-30 | 中国科学院力学研究所 | 一种切削刀具用耐高温氧化铝厚膜涂层的制备方法 |
Non-Patent Citations (1)
Title |
---|
"刀具表面硬质涂层技术"专题序言;付德君;杨兵;;表面技术(第04期);第12-13页 * |
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CN114150269A (zh) | 2022-03-08 |
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Effective date of registration: 20240514 Address after: 610000 No. 10, Kehua street, Kehua North Road, Wuhou District, Chengdu, Sichuan Patentee after: Chengdu Chuanda technology transfer Group Co.,Ltd. Country or region after: China Address before: 610000 rooms 704, 705 and 706, block B, building 1, No. 200, Tianfu Fifth Street, Chengdu hi tech Zone, China (Sichuan) pilot Free Trade Zone, Chengdu, Sichuan Patentee before: Sichuan zhenruijingjia Technology Co.,Ltd. Country or region before: China |