WO2020158305A1 - Dispositif d'alimentation en suspension, dispositif de sablage humide et procédé d'alimentation en suspension - Google Patents

Dispositif d'alimentation en suspension, dispositif de sablage humide et procédé d'alimentation en suspension Download PDF

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Publication number
WO2020158305A1
WO2020158305A1 PCT/JP2020/000206 JP2020000206W WO2020158305A1 WO 2020158305 A1 WO2020158305 A1 WO 2020158305A1 JP 2020000206 W JP2020000206 W JP 2020000206W WO 2020158305 A1 WO2020158305 A1 WO 2020158305A1
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WO
WIPO (PCT)
Prior art keywords
slurry
supply device
liquid
tank
recess
Prior art date
Application number
PCT/JP2020/000206
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English (en)
Japanese (ja)
Inventor
神田　真治
Original Assignee
新東工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新東工業株式会社 filed Critical 新東工業株式会社
Priority to CN202080010929.6A priority Critical patent/CN113365782A/zh
Priority to KR1020217019635A priority patent/KR20210120993A/ko
Publication of WO2020158305A1 publication Critical patent/WO2020158305A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C11/00—Selection of abrasive materials or additives for abrasive blasts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C5/00—Devices or accessories for generating abrasive blasts
    • B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials
    • B24C5/04—Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0046—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a gaseous carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0084—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a mixture of liquid and gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Definitions

  • the present disclosure relates to a slurry supply device, a wet blast processing device, and a slurry supply method.
  • Blasting in which the abrasive is sprayed toward the object to be processed and the surface of the object is treated, is used for scale removal, descaling, rust removal, coating film removal, and ground treatment.
  • blasting dry blasting in which abrasive is injected as solid-gas two-phase flow with compressed gas to the object to be processed, and slurry containing abrasive is injected into object to be processed as solid-gas three-phase flow together with compressed gas. Wet blasting is known.
  • blasting is also used in the field of fine processing of members used for semiconductors, electronic parts, liquid crystals, etc., and it may be required to use it in a clean room in order to incorporate it into the production line.
  • dry blasting has a higher processing capability than wet blasting, wet blasting equipment must be used because abrasives may scatter and contaminate the clean room during equipment maintenance and opening/closing of the housing. There is.
  • Patent Document 1 discloses a suction-type wet blasting device. Specifically, in Patent Document 1, a tank for storing the slurry, a slurry suction pipe for sucking the slurry to be supplied to the nozzle from the tank, and a stirring liquid introduction pipe for introducing a stirring liquid into the tank. A device comprising is described. In this device, stable blasting is realized by sucking the slurry in the tank from the slurry suction pipe while introducing the stirring liquid from the stirring liquid introduction pipe.
  • Patent Document 2 discloses a tank for storing slurry, a pressurizing conduit for introducing air for pressurization into the tank, a stirring blade for stirring the slurry in the tank, a drive motor for rotating the stirring blade, and a slurry.
  • a wet blasting apparatus is disclosed that includes a nozzle that injects into a work together with compressed air. In this device, while stirring the slurry in the tank by the stirring blade, the pressure in the tank is pressurized to supply the slurry having a uniform concentration from the tank to the nozzle.
  • Patent Document 3 discloses a closed container for containing a slurry, a stop valve for closing a slurry containing portion of the closed container, a stirring conduit for supplying stirring air from the bottom of the closed container, and a pressurized air in the closed container.
  • a slurry supply apparatus including a pressurizing conduit for supplying the slurry and a slurry supply pipe for supplying the slurry to the injection gun.
  • the stop valve rises by supplying the stirring air from the lower part of the closed container, and the abrasive material and the liquid on the stop valve are stirred by the stirring air that has passed through the stop valve. Then, the stirred slurry is supplied to the injection gun from the slurry supply pipe.
  • the polishing efficiency of wet blasting depends on the ratio of abrasive to liquid in the slurry. Generally, when the ratio of the abrasive in the slurry increases, the amount of the abrasive injected to the object to be processed increases, so that the processing efficiency of the blasting increases. On the other hand, in the devices described in Patent Documents 1 to 3, since the slurry stirred in the tank is supplied to the nozzle, the slurry containing a small proportion of the abrasive is supplied to the nozzle, resulting in processing efficiency. Will decrease.
  • a slurry supply device that supplies a slurry containing an abrasive to a nozzle.
  • This slurry supply device includes a tank, rollers, a drive device, an injection unit, and a supply pipe.
  • the tank stores the slurry inside.
  • a supply port is formed at the bottom of the tank.
  • the roller is rotatable about a rotation axis and has a recessed portion that is filled with the slurry supplied from the supply port.
  • the drive device rotates the roller about the rotation axis.
  • the ejection unit ejects the high-pressure fluid onto the recess.
  • the supply pipe supplies the slurry extracted from the recess by the injection of the high-pressure fluid to the nozzle.
  • the slurry supplied from the supply port of the tank is filled in the concave portion of the roller. Since the abrasive has a large specific gravity and settles to the bottom of the tank over time, a slurry having a high proportion of the abrasive is formed at the bottom of the tank.
  • the supply port is provided at the bottom of the tank, the recess of the roller is filled with the slurry containing a high proportion of abrasive. The filled slurry is taken out from the recess by the injection of high-pressure fluid and supplied to the nozzle. Therefore, in the slurry supply device according to the above aspect, it is possible to supply the slurry having a high proportion of the abrasive to the nozzle, and as a result, it is possible to improve the processing efficiency of the wet blast processing.
  • the injection unit includes a liquid supply pipe and an air supply pipe.
  • the liquid supply pipe is connected to a liquid supply device that supplies a liquid.
  • the air supply pipe is connected to a compressed air supply device that supplies compressed air.
  • the injection unit may inject a mixed fluid containing the liquid from the liquid supply pipe and the compressed air from the air supply pipe into the recess.
  • the ratio of the abrasive and the liquid in the slurry supplied to the nozzle can be adjusted.
  • a valve that is provided between the liquid supply pipe and the liquid supply device and that adjusts the flow rate of the liquid flowing through the liquid supply pipe may be further provided.
  • the ratio of the liquid in the mixed fluid can be adjusted according to the opening degree of the valve, the ratio of the abrasive to the liquid in the slurry can be adjusted more closely.
  • the liquid may be cutting oil.
  • the recess is a groove extending in a direction parallel to the rotation axis or along the circumferential direction of the roller, and the injection unit injects the high-pressure fluid along the extending direction of the groove. It may be configured. In this embodiment, by injecting the high-pressure fluid along the extending direction of the groove, the slurry can be reliably taken out from the recess.
  • an auxiliary compressed air supply device that supplies auxiliary compressed air at a pressure lower than that of the high pressure fluid to the supply pipe may be further provided.
  • the difference between the pressure in the flow path through which the high-pressure fluid flows and the pressure in the supply pipe can be reduced, it is possible to prevent the slurry filled in the recess from being taken out regardless of the injection of the high-pressure fluid. can do. Thereby, the slurry can be stably supplied to the nozzle.
  • a pressurizing pipe for introducing pressurizing air into the tank may be further provided.
  • the inside of the tank is pressurized by the compressed air supplied from the pressurizing pipe, the slurry from the tank can be densely filled in the recess and the high-pressure fluid is prevented from flowing back to the tank. be able to.
  • a wet blasting apparatus includes the above-described slurry supply device and a nozzle that injects the slurry supplied from the slurry supply device. According to this blasting device, it is possible to inject the slurry having a high ratio of the abrasive material from the nozzle, so that the efficiency of the wet blasting process can be improved.
  • a slurry supply method for supplying a slurry to a nozzle using a slurry supply device.
  • This slurry supply device is a tank that stores a slurry containing an abrasive therein, the tank having a supply port formed at the bottom thereof and the tank capable of rotating around a rotation axis and having a recess formed on the outer peripheral surface thereof. And a roller.
  • the slurry supply method includes a step of causing the abrasive in the slurry to settle in the tank, a step of filling the recess into the recess from the supply port after the step of causing the abrasive to settle, and rotating the roller around the rotation axis.
  • the process includes a step, a step of ejecting a high-pressure fluid to the recess, and a step of supplying the slurry extracted from the recess by the injection of the high-pressure fluid to the nozzle.
  • the slurry supply method After the abrasive material in the slurry has settled, the slurry is filled in the concave portion through the supply port formed in the bottom of the tank, so that the concave portion is filled with the slurry having a high abrasive ratio Will be done.
  • the filled slurry is taken out from the recess by the injection of high-pressure fluid and supplied to the nozzle. Therefore, according to this method, the slurry having a high ratio of the abrasive can be supplied to the nozzle, and as a result, the efficiency of the wet blasting can be improved.
  • a mixed fluid containing liquid and compressed air may be ejected to the recess.
  • the ratio of the abrasive and the liquid in the slurry supplied to the nozzle can be adjusted.
  • the processing efficiency of wet blasting can be improved.
  • FIG. 1 is a diagram schematically showing a blast processing system according to an embodiment.
  • the blast processing system 1 shown in FIG. 1 includes a blast processing device 10, a recovery device 50, and a suction device 42.
  • the blast processing apparatus 10 is a wet blast processing apparatus that processes a target object W by injecting a slurry containing an abrasive and a liquid onto the target object. Examples of the processing of the object W to be processed include cutting processing, groove forming processing, and drilling processing, but any processing can be performed.
  • the blasting apparatus 10 shown in FIG. 1 is a so-called direct pressure type blasting apparatus, and supplies the abrasive in the tank to the nozzle by pressurizing the inside of the tank.
  • the blast processing device 10 includes a container 12 and a slurry supply device 60.
  • the container 12 includes an upper container 13 and a lower container 14.
  • the upper container 13 has an open lower part, and the lower container 14 has an open upper part.
  • a passage plate 23 is provided between the upper container 13 and the lower container 14.
  • the passage plate 23 is formed with a plurality of openings through which the slurry S described later can pass.
  • the upper container 13 defines the processing chamber 13s together with the passage plate 23.
  • a processing table 24 is provided in the processing chamber 13s.
  • the object W to be processed is placed on the processing table 24.
  • the workpiece W can be, for example, a hard and brittle material such as a ceramic material or a glass material, or a difficult-to-cut material such as a CFRP (Carbon Fiber Reinforced Plastics) material.
  • the processing table 24 is supported by the conveyor driving unit 26.
  • the conveyor drive unit 26 is provided on the passage plate 23.
  • the conveyor drive unit 26 is a moving mechanism such as an XY stage.
  • the conveyor drive unit 26 moves the object W placed on the processing table 24 relative to the nozzle 30.
  • the moving direction and the moving speed of the object W to be processed are appropriately set according to the size, shape, material, shape of the pattern to be processed, and the like of the object W to be processed.
  • a nozzle 30 is provided above the processing table 24.
  • the nozzle 30 is a blast nozzle for direct pressure blasting, and has a tip portion 30a and a base end portion 30b.
  • the tip portion 30a is provided in the processing chamber 13s so as to face the upper surface of the processing table 24.
  • the base end portion 30b is arranged outside the processing chamber 13s and is connected to one end of the supply pipe 68.
  • the nozzle 30 injects the slurry S supplied from the supply pipe 68, together with the compressed air, into the object W as a gas-liquid solid three-phase flow.
  • a nozzle drive unit 32 is provided above the upper container 13.
  • the nozzle drive unit 32 includes a connection mechanism that connects to the nozzle 30 and a motor that drives the connection mechanism.
  • the nozzle drive unit 32 drives the motor to move the horizontal position of the nozzle 30 relative to the object W placed on the processing table 24.
  • the moving direction and the moving speed of the nozzle 30 by the nozzle driving unit 32 are appropriately set according to the size, shape, material of the object W to be processed, the shape of the pattern to be processed, and the like.
  • one end of the recovery pipe 34 may be connected to the upper part of the upper container 13 so as to communicate with the processing chamber 13s.
  • the other end of the recovery pipe 34 is connected to the recovery device 50.
  • the recovery device 50 includes a cyclone 36 and a collector 38.
  • the other end of the recovery pipe 34 and one end of the cyclone conduit 40 are connected to the cyclone 36.
  • a suction device 42 is connected to the other end of the cyclone conduit 40.
  • the suction device 42 sucks air in the processing chamber 13s through the cyclone conduit 40 and the recovery pipe 34 to make the processing chamber 13s negative pressure. Due to the suction force of the suction device 42, an airflow is generated from the processing chamber 13s toward the recovery device 50.
  • a part of the slurry S sprayed from the nozzle 30 onto the object W to be processed and atomized is conveyed to the cyclone 36 through the recovery pipe 34.
  • the cyclone 36 separates the mist-like slurry S from the air and selectively collects the mist-like slurry S in the collector 38.
  • the air separated from the mist-like slurry S in the cyclone 36 is sucked into the suction device 42 through the cyclone conduit 40.
  • a shielding plate 44 may be provided above the processing chamber 13s.
  • the shielding plate 44 is arranged so as to be interposed between the nozzle 30 and one end of the recovery pipe 34, and collects the mist-like slurry S drifting in the processing chamber 13s.
  • the slurry S collected on the shielding plate 44 falls on the passing plate 23 as water droplets.
  • a lower container 14 is provided below the upper container 13.
  • the lower container 14 has a tapered side wall whose width narrows downward.
  • the lower container 14 defines a recovery space 14s together with the passage plate 23.
  • the collection space 14s communicates with the processing chamber 13s through a plurality of openings formed in the passage plate 23. Therefore, the slurry S sprayed from the nozzle 30 onto the object W to be processed is recovered in the recovery space 14 s of the lower container 14 through the plurality of openings formed in the passage plate 23.
  • a lower opening 14e for supplying the recovered slurry S to the slurry supplying device 60 is formed.
  • the slurry supply device 60 is provided below the lower container 14.
  • the slurry supply device 60 will be described with reference to FIG.
  • FIG. 2 is a partially cutaway perspective view schematically showing the slurry supply device 60.
  • the slurry supply device 60 is a device that supplies the slurry S containing the abrasive M to the nozzle 30.
  • the slurry supply device 60 includes a tank 62, rollers 65, a drive device 66, an injection unit 67, and a supply pipe 68.
  • the tank 62 is provided below the lower container 14.
  • the tank 62 defines a storage space 62s therein, and stores the slurry S in the storage space 62s.
  • the slurry S is a fluid containing the abrasive M and the liquid L, and has a viscosity according to the mixing ratio of the abrasive M and the liquid L.
  • the material of the abrasive M include, but are not limited to, alumina powder, pig iron grit, and mold grit.
  • the liquid L include, but are not limited to, water and cutting oil for machining.
  • the ratio of the abrasive M contained in the slurry S is expressed using "concentration".
  • a high concentration of the slurry S indicates that the ratio of the abrasive M to the amount of the liquid L is high, and a low concentration of the slurry S indicates that the ratio of the abrasive M to the amount of liquid L is low.
  • the tank 62 includes a top plate 62a and a side wall 62b.
  • the tank 62 has four side walls 62b.
  • Each of the four side walls 62b has an upper portion 62b1 arranged in parallel with the facing side wall 62b, and a lower portion 62b2 inclined so as to approach the facing side wall 62b as it goes downward. That is, the tank 62 has a side wall whose width becomes narrower as it goes downward.
  • the shape of the side wall 62b of the tank 62 is not limited to that of the embodiment shown in FIG. 2 as long as the slurry S can be stored therein, and the side wall 62b may have any shape.
  • An upper opening 70 for collecting the slurry S from the container 12 is formed in the top plate 62 a of the tank 62.
  • the upper opening 70 is located below the lower opening 14e of the lower container 14.
  • a valve body 72 is provided between the tank 62 and the lower container 14, more specifically, between the lower opening 14e and the upper opening 70.
  • the valve body 72 is, for example, a pressurizing valve, and is a pressurizing valve that opens and closes according to the pressure inside the tank 62. Specifically, the valve body 72 is closed when the pressure in the storage space 62s is higher than a predetermined pressure, and is opened when the pressure in the storage space 62s is equal to or lower than the predetermined pressure.
  • valve element 72 may be, for example, a triangular valve that raises and lowers a conical valve element by driving a dump valve, an air cylinder, or the like.
  • a lower opening 73 is formed at the bottom of the tank 62. More specifically, the lower opening 73 is formed at the lower end of the lower portion 62b2 of the side wall 62b.
  • the lower opening 73 functions as a supply port for supplying the slurry S in the tank 62 to the roller 65.
  • the stirring blades 74 may be provided inside the tank 62.
  • the stirring blade 74 is provided on the upper part of the storage space 62s and is rotated by the driving force of the motor.
  • the abrasive M in the slurry S has a larger specific gravity than the liquid L, the abrasive M settles to the bottom of the tank 62 over time.
  • the cutting powder of the object W to be processed and the fragments of the crushed abrasive M generated by the injection of the slurry S from the nozzle 30 have a small particle diameter, and thus float on the surface of the liquid L.
  • a discharge port 76 may be formed on the upper portion of the side wall 62b of the tank 62.
  • the discharge port 76 is connected to a discharge liquid tank 79 via a discharge pipe 78 (see FIG. 1).
  • the discharge port 76 collects the cutting powder of the workpiece W and the fragments of the abrasive M floating on the surface of the slurry S.
  • the cutting powder and the fragments of the abrasive material M collected from the discharge port 76 are discharged to the discharge liquid tank 79 through the discharge pipe 78.
  • FIG. 3 is a perspective view showing a peripheral portion of the roller 65 of the slurry supply device 60.
  • the roller 65 has a columnar shape and is rotatable around the rotation axis 65x.
  • a recess 65a is formed on the outer peripheral surface (side surface) of the roller 65.
  • the roller 65 is formed with a plurality of concave portions 65a, and between the plurality of concave portions 65a, a plurality of convex portions 65b forming the outer peripheral surface of the roller 65 are formed. There is.
  • the plurality of recesses 65a are arranged at substantially equal intervals along the circumferential direction of the roller 65.
  • the plurality of recesses 65a extend parallel to each other.
  • Each of the plurality of recesses 65a has a groove shape extending in a direction parallel to the rotating shaft 65x, and both ends thereof are open ends.
  • the recess 65a has a substantially rectangular shape when viewed from a cross section orthogonal to the rotation axis 65x.
  • the slurry S supplied from the lower opening 73 is filled in the plurality of recesses 65a. Since the settled abrasive material M has accumulated in the bottom portion of the tank 62, the high concentration slurry S is filled from the lower opening 73 into the concave portion 65a.
  • a drive device 66 is connected to the rotary shaft 65x of the roller 65 (see FIG. 1).
  • the drive device 66 is, for example, a motor and applies a driving force to the roller 65 to rotate the roller 65 around the rotation shaft 65x.
  • the drive device 66 receives a control signal from the control device CNT described later, and rotates the roller 65 at a rotation speed according to the control signal.
  • the slurry supply device 60 may further include a filling cylinder 64.
  • the filling cylinder 64 is provided between the lower opening 73 of the tank 62 and the roller 65. That is, the filling cylinder 64 is provided below the lower opening 73.
  • the filling cylinder 64 has a hollow cylindrical shape and has an upper end 64a and a lower end 64b.
  • the upper end 64a of the filling cylinder 64 is connected to the side wall 62b of the tank 62 so that the inside of the filling cylinder 64 communicates with the storage space 62s through the lower opening 73.
  • the tank 62 and the filling cylinder 64 may be integrally formed.
  • the lower end 64b of the filling cylinder 64 is curved along the outer peripheral surface of the roller 65 so as to approach or contact the outer peripheral surface of the roller 65. That is, the lower end 64b is arranged so as to cover the facing concave portion 65a from the radially outer side of the roller 65.
  • the lower end 64b of the filling cylinder 64 has a width in the direction parallel to the rotary shaft 65x that is the same as or larger than the width of the recess 65a along the direction parallel to the rotary shaft 65x.
  • the filling cylinder 64 fills the concave portion 65 a of the facing roller 65 with the slurry S supplied from the lower opening 73 of the tank 62.
  • An injection unit 67 is provided near the roller 65.
  • the ejection unit 67 has a function of ejecting the slurry S from the recess 65a by ejecting the high-pressure fluid onto the recess 65a of the roller 65.
  • the ejection unit 67 includes a liquid supply pipe 80 and an air supply pipe 82.
  • the liquid supply pipe 80 is connected to a liquid supply device 84 via a pipe 81 (see FIG. 1).
  • the liquid supply device 84 is a supply source of the liquid 80f, and supplies the liquid 80f pressurized by compressed air or a liquid pump to the liquid supply pipe 80 via the pipe 81.
  • the liquid 80f supplied from the liquid supply device 84 has the same components as the liquid L of the slurry S stored in the tank 62.
  • the liquid 80f is water or cutting oil.
  • the air supply pipe 82 is connected to the air supply device 86 via a pipe 83.
  • the air supply device 86 is a supply source of the compressed air 82f, and supplies the compressed air 82f to the air supply pipe 82 via the pipe 83.
  • the liquid supply pipe 80 and the air supply pipe 82 have a double pipe structure in which the liquid supply pipe 80 is arranged inside the air supply pipe 82.
  • the pipe 81 is provided with a valve 81a and a flow meter 81b. That is, the valve 81 a and the flow meter 81 b are provided between the liquid supply device 84 and the liquid supply pipe 80.
  • the valve 81a adjusts the flow rate of the liquid 80f supplied from the liquid supply device 84 and flowing through the liquid supply pipe 80.
  • the flowmeter 81b detects the flow rate of the liquid 80f supplied from the liquid supply device 84 and flowing through the liquid supply pipe 80.
  • the slurry supply device 60 further includes a pressurizing pipe 98.
  • One end of the pressurizing pipe 98 is connected to the upper portion of the tank 62.
  • the other end of the pressurizing pipe 98 is connected to the air supply pipe 82 between the tip portion 82t and the air supply device 86. Therefore, a part of the compressed air 82f supplied from the air supply device 86 to the air supply pipe 82 is branched and introduced into the tank 62 as the pressurizing air 98f via the pressurizing pipe 98.
  • the inside of the tank 62 is pressurized by supplying pressurized air 98f.
  • the valve body 72 is closed and the communication between the recovery space 14s of the lower container 14 and the storage space 62s of the tank 62 is cut off.
  • the compressed air 82f is supplied from the air supply device 86 at the timing when the slurry S is ejected from the nozzle 30, and accordingly the pressurizing air 98f is supplied into the tank 62. Good.
  • the pressurizing air 98f By supplying the pressurizing air 98f into the tank 62, the inside of the tank 62 is pressurized. Due to the pressure, the slurry S in the tank 62 is densely filled in the recess 65 a of the roller 65 through the lower opening 73.
  • the tip portion 80t of the liquid supply pipe 80 and the tip portion 82t of the air supply pipe 82 may have a tapered shape in which the diameter becomes smaller toward the tip.
  • the liquid 80f flowing through the liquid supply pipe 80 is atomized when ejected from the tip portion 80t of the liquid supply pipe 80, becomes a mist, and joins with the compressed air 82f flowing through the air supply pipe 82.
  • the combined liquid 80f and the compressed air 82f are jetted as a mixed fluid 88 from the tip portion 82t of the air supply pipe 82.
  • the mixed fluid 88 is a high-pressure fluid containing the liquid 80f and the compressed air 82f.
  • the injection unit 67 further includes an extraction pipe 90.
  • the extraction pipe 90 is connected to the tip end 82t side of the air supply pipe 82.
  • the take-out pipe 90 extends along a direction parallel to the extending direction of the recess 65 a and is arranged adjacent to the roller 65. Note that the take-out pipe 90 may be arranged at a position downstream of the roller 65 in the rotation direction and at a position where the slurry S filled in the recess 65a does not drop from the recess 65a.
  • the outlet pipe 90 is formed with a notch 92 in which the wall surface forming the pipeline is partially cut off and a part of the pipeline is opened.
  • the notch 92 is provided so as to oppose the outer peripheral surface of the roller 65, and has a width substantially the same as the recess 65a in the extending direction of the recess 65a.
  • the notch 92 is configured such that the two end faces of the take-out pipe 90 face the two protrusions 65b when the roller 65 is at the predetermined rotation position.
  • the two end surfaces of the take-out pipe 90 and the two convex portions 65b face each other, so that the inner wall surface of the take-out pipe 90 and the concave portion 65a of the roller 65 are provided between the take-out pipe 90 and the roller 65.
  • a defined flow path 93 is formed.
  • the mixed fluid 88 jetted from the tip portion 82t of the air supply pipe 82 flows into the flow passage 93 through the extraction pipe 90.
  • the slurry S filled in the recess 65 a forming the flow passage 93 is taken out from the recess 65 a. That is, the mixed fluid 88 discharged from the tip portion 82t of the air supply pipe 82 is jetted along the extending direction of the recess 65a.
  • the take-out pipe 90 is connected to the supply pipe 68.
  • the slurry S removed from the recess 65 a by the injection of the mixed fluid 88 is supplied to the supply pipe 68 along the flow of the mixed fluid 88.
  • the supply pipe 68 supplies the slurry S, which has been removed from the recess 65 a by the injection of the mixed fluid 88, to the nozzle 30.
  • an auxiliary compressed air supply device 94 may be connected to the supply pipe 68.
  • the auxiliary compressed air supply device 94 is, for example, a compressor, and supplies the auxiliary compressed air 94f to the supply pipe 68 via the auxiliary conduit.
  • the auxiliary compressed air supply device 94 may supply the auxiliary compressed air 94 f having a pressure lower than that of the mixed fluid 88 to the supply pipe 68.
  • the differential pressure between the auxiliary compressed air 94f and the compressed air 82f is set to be 0.01 Mpa or more and 0.1 Mpa or less.
  • the slurry S supplied to the nozzle 30 is sprayed on the object W to be processed.
  • a part of the slurry S sprayed onto the object to be processed W is recovered again in the recovery space 14s of the lower container 14 and is again supplied to the slurry supply device 60.
  • the blast processing apparatus 10 may further include the control device CNT.
  • the control device CNT is composed of, for example, a programmable computer, and controls the overall operation of the blast processing system 1.
  • the control device CNT is connected to, for example, the conveyor drive unit 26, the nozzle drive unit 32, the suction device 42, the drive device 66, the valve 81a, the liquid supply device 84, the air supply device 86, and the auxiliary compressed air supply device 94.
  • the control device CNT operates according to the input program and sends a control signal.
  • the control signal from the control device CNT By the control signal from the control device CNT, the moving direction and moving speed of the processing table 24, the moving direction and moving speed of the nozzle 30, the operation and stoppage of the operation of the suction device 42, the rotation speed of the roller 65, the liquid flowing through the liquid supply pipe 80 It is possible to control the activation and deactivation of the liquid supply device 84, the activation and deactivation of the air supply device 86, and the activation and deactivation of the auxiliary compressed air supply device 94 that adjust the flow rate of 80f. ..
  • FIG. 4 is a flowchart showing a wet blasting method according to one embodiment.
  • the slurry S is supplied from the slurry supply device 60 to the nozzle 30.
  • the slurry supply method in step ST1 will be described in detail with reference to FIG.
  • FIG. 5 is a flowchart showing a slurry supply method according to one embodiment. This slurry supply method is executed using, for example, the slurry supply device 60 shown in FIG. As shown in FIG. 5, the process ST1 includes processes ST11 to ST16. In the slurry supply method according to one embodiment, step ST11 is first performed.
  • step ST11 the inside of the tank 62 is pressurized by supplying the pressurizing air 98f into the tank 62 from the air supply device 86.
  • step ST12 the abrasive M in the slurry S is settled in the tank 62. Since the specific gravity of the abrasive M is larger than the specific gravity of the liquid L, the abrasive M in the slurry S settles on the bottom of the tank 62 by allowing the stirring blades 74 to stand for a predetermined time with the rotation thereof stopped. ..
  • Step ST13 is performed after the abrasive M in the tank 62 settles in step ST12.
  • the slurry S supplied from the lower opening 73 is filled in the recess 65a of the roller 65 by the filling cylinder 64. Since the abrasive M is settled at the bottom of the tank 62, the slurry S filled in the recess 65a in step ST13 is a high-concentration slurry having high viscosity.
  • step ST14 a driving force is applied to the roller 65 by the driving device 66, and the roller 65 is rotated around the rotation shaft 65x.
  • the slurry S filled in the recess 65 a moves downstream in the rotation direction of the roller 65 and is conveyed to a position facing the notch 92 of the extraction pipe 90.
  • the amount of the slurry S supplied to the nozzle 30 depends on the rotation speed of the roller 65.
  • step ST14 the number of the concave portions 65a filled with the slurry S per unit time increases by increasing the rotation speed of the roller 65.
  • the number of the concave portions 65a filled with the slurry S per unit time decreases. Therefore, the supply amount of the slurry S to the nozzle 30 can be controlled by changing the rotation speed of the roller 65.
  • step ST15 is performed.
  • the mixed fluid 88 containing the liquid 80f from the liquid supply pipe 80 and the compressed air 82f from the air supply pipe 82 is jetted to the recess 65a.
  • the mixed fluid 88 is jetted along the extending direction of the recess 65a.
  • the mixed fluid 88 thus jetted removes the slurry S filled in the concave portion 65a.
  • the amount of the liquid 80f contained in the mixed fluid 88 may be adjusted by adjusting the opening degree of the valve 81a before step ST15 is performed. By adjusting the amount of the liquid 80f contained in the mixed fluid 88, the concentration of the slurry S taken out from the concave portion 65a can be adjusted.
  • the abrasive M in the slurry S may accumulate on the object W to be processed.
  • the abrasive material M accumulated on the object to be processed W covers the surface of the object to be processed W and becomes a cause of hindering the progress of the blast processing.
  • the valve 81a to adjust the amount of the liquid 80f, it is possible to prevent the polishing material M from accumulating on the object W to be processed.
  • the amount of the liquid 80f contained in the mixed fluid 88 may be adjusted by adjusting the supply pressure of the liquid 80f of the liquid supply device 84.
  • the slurry S removed from the recess 65a in the process ST15 is supplied to the nozzle 30.
  • the auxiliary compressed air supply device 94 supplies the auxiliary compressed air 94f, and the slurry S is conveyed to the nozzle 30 by the auxiliary compressed air 94f.
  • step ST2 is performed after the slurry S is supplied to the nozzle 30 in step ST1.
  • the slurry S is jetted from the nozzle 30 to the object W to be processed.
  • the slurry S and the compressed air 82f are jetted from the nozzle as a gas-liquid solid three-phase flow.
  • the slurry S jetted from the nozzle 30 collides with the object W to be processed, and the object W to be processed is processed.
  • the object W to be processed is processed with high efficiency.
  • FIG. 6 is a diagram showing a slurry supply device 100 according to a modification.
  • the slurry supply device 100 includes a roller 102 instead of the roller 65.
  • the roller 102 has a columnar shape and is rotatable around the rotation shaft 102x.
  • a recess 102a extending along the circumferential direction of the roller 102 is formed.
  • a plurality of recesses 102a are arranged along a direction parallel to the rotating shaft 102x.
  • Each of the plurality of recesses 102a has a groove shape and is formed so as to circulate on the outer peripheral surface of the roller 102.
  • the plurality of recesses 102a extend parallel to each other.
  • the slurry supply device 100 includes an injection unit 110 instead of the injection unit 67.
  • the ejection unit 110 further includes an ejector 112 that ejects the mixed fluid 88 onto the roller 102.
  • a liquid supply pipe 80 and an air supply pipe 82 are connected to the injector 112.
  • a merging chamber 114 is formed inside the injector 112, in which the liquid 80f and the compressed air 82f supplied from the liquid supply pipe 80 and the air supply pipe 82 merge.
  • the injector 112 is formed with a plurality of openings 116 that communicate with the confluence chamber 114.
  • the plurality of openings 116 are formed at positions corresponding to the plurality of recesses 102a.
  • the liquid 80f and the compressed air 82f When the liquid 80f and the compressed air 82f are supplied from the liquid supply pipe 80 and the air supply pipe 82, the liquid 80f and the compressed air 82f join together in the joining chamber 114.
  • the combined liquid 80f and the compressed air 82f pass through the plurality of openings 116 and are jetted as the mixed fluid 88 toward the plurality of recesses 102a along the extending direction of the plurality of recesses 102a.
  • the mixed fluid 88 is jetted in a direction coinciding with the plurality of recesses 102a when viewed from the outer peripheral direction of the roller 102.
  • the slurry S filled in the plurality of recesses 102a is taken out from the plurality of recesses 102a.
  • the slurry S taken out from the plurality of recesses 102 a is collected in the recovery container 118 and sent to the supply pipe 68 through the opening provided at the bottom of the recovery container 118.
  • the slurry S sent to the supply pipe 68 is supplied to the nozzle 30 by the auxiliary compressed air 94f.
  • the present invention is not limited to the above-described embodiments, and various modified modes are configured without changing the gist of the invention. It is possible.
  • the recesses 65a and 102a have a groove shape, but the recesses 65a and 102a can have any shape as long as the slurry S can be filled.
  • the recesses 65a and 102a may be holes having a circular, elliptical, or polygonal planar shape.
  • at least one recess 65a, 102a may be formed in the rollers 65, 102, and a plurality of recesses may not necessarily be formed.
  • the slurry S is extracted from the recesses 65a and 102a using the mixed fluid 88 containing the liquid 80f and the compressed air 82f, but only one of the liquid 80f and the compressed air 82f is injected into the recesses 65a and 102a. By doing so, the slurry S may be taken out from the recesses 65a and 102a.
  • the slurry supply device 60 does not necessarily have to include the auxiliary compressed air supply device 94. In this case, the slurry S taken out from the recesses 65 a and 102 a is supplied to the nozzle 30 by the pressure caused by the mixed fluid 88.
  • the slurry supply device 60 may further include a recovery tank that recovers the slurry S that has overflowed from the recesses 65a and 102a and has not been filled.
  • the recovery tank is arranged below the roller 65, for example.
  • the depth of the recess 65a may be adjusted.
  • Example 1 In Experimental Example 1, the object W to be processed was blasted using the blasting apparatus 10 shown in FIG.
  • a dry film photoresist having a reverse pattern of holes formed thereon was placed on a glass substrate which was the object W to be processed, and the slurry S was sprayed from the nozzle 30 to perform the drilling process.
  • Alumina #600 was used as the abrasive M contained in the slurry S, and water was used as the liquid L.
  • the processing target W was processed according to the above processing conditions, and the depth of the hole formed in the processing target W was measured. As a result, the processing depth of the hole was 430 [ ⁇ m].
  • Comparative Experimental Example 1 the workpiece W was blasted using a dry suction blasting apparatus (EMS-4 type manufactured by Elfotech Co., Ltd.).
  • EMS-4 type manufactured by Elfotech Co., Ltd.
  • the same glass substrate as in Experimental Example 1 was used.
  • Alumina #600 was used as the abrasive.
  • the processing target W was processed according to the above processing conditions, and the depth of the hole formed in the processing target W was measured. As a result, the drilling depth of Experimental Example 1 was 38 [ ⁇ m].
  • Example 2 In Experimental Example 2, the object W to be processed was blasted using the blasting apparatus 10 shown in FIG. However, in this experimental example, as the slurry supply device, the slurry supply device 100 shown in FIG. 6 was used instead of the slurry supply device 60 shown in FIG. In the present experimental example, deburring was performed on the object W to be processed by injecting the slurry S. As the object W to be processed, a machined part made of SUS304 to which cutting oil was attached by machining was used. As the abrasive M contained in the slurry S, KUAMET-32 ⁇ m manufactured by Epson Atmix Co., Ltd. was used, and as the liquid L, cutting oil Moresco Sealmate BS-6S manufactured by MORESCO Co., Ltd. was used.
  • the blast processing apparatus 10 of one embodiment has a deburring processing capacity eight times that of the dry suction blast apparatus.
  • air supply pipe 82f... compressed air, 84... liquid supply device, 86... Air supply device, 88... Mixed fluid, 90... Extraction pipe, 92... Notch part, 93... Flow path, 94... Auxiliary compressed air supply device, 94f... Auxiliary compressed air, 98... Pressurizing pipe, 98f... Pressurizing Air, 100... Slurry supply device, 102... Roller, 102a... Recess, 102x... Rotating shaft, 112... Injector, CNT... Control device, L... Liquid, M... Abrasive material, S... Slurry, W... Object to be treated.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Weting (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

La présente invention concerne, selon un mode de réalisation, un dispositif d'alimentation en suspension qui fournit une suspension qui comprend un matériau abrasif vers une buse. Ce dispositif d'alimentation en suspension comprend un réservoir, un rouleau, un dispositif d'entraînement, une partie de pulvérisation et une tuyauterie d'alimentation. Une suspension est stockée dans le réservoir. Un orifice d'alimentation est formé dans une partie inférieure du réservoir. Le rouleau peut tourner autour d'un axe de rotation et a un évidement qui se remplit de la suspension qui est alimentée à partir de l'orifice d'alimentation. Le dispositif d'entraînement fait tourner le rouleau autour de l'axe de rotation. La partie de pulvérisation pulvérise un fluide haute pression au niveau de l'évidement. La tuyauterie d'alimentation alimente la suspension qui a été expulsée par soufflage hors de l'évidement par la pulvérisation d'un fluide haute pression vers une buse.
PCT/JP2020/000206 2019-02-01 2020-01-07 Dispositif d'alimentation en suspension, dispositif de sablage humide et procédé d'alimentation en suspension WO2020158305A1 (fr)

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CN202080010929.6A CN113365782A (zh) 2019-02-01 2020-01-07 浆料供给装置、湿式喷砂加工装置以及浆料供给方法
KR1020217019635A KR20210120993A (ko) 2019-02-01 2020-01-07 슬러리 공급 장치, 습식 블라스트 가공 장치 및 슬러리 공급 방법

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JP2019017103A JP6984623B2 (ja) 2019-02-01 2019-02-01 スラリー供給装置、湿式ブラスト加工装置及びスラリー供給方法

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TWI810427B (zh) 2023-08-01
KR20210120993A (ko) 2021-10-07

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