WO2020134250A1 - 用于清洗过滤器的自动清洗设备、控制系统及控制方法 - Google Patents

用于清洗过滤器的自动清洗设备、控制系统及控制方法 Download PDF

Info

Publication number
WO2020134250A1
WO2020134250A1 PCT/CN2019/108108 CN2019108108W WO2020134250A1 WO 2020134250 A1 WO2020134250 A1 WO 2020134250A1 CN 2019108108 W CN2019108108 W CN 2019108108W WO 2020134250 A1 WO2020134250 A1 WO 2020134250A1
Authority
WO
WIPO (PCT)
Prior art keywords
filter
automatic cleaning
lye
tank
cleaning device
Prior art date
Application number
PCT/CN2019/108108
Other languages
English (en)
French (fr)
Inventor
蒲健
朱建海
陈军
姚志伟
李本功
Original Assignee
聚灿光电科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 聚灿光电科技股份有限公司 filed Critical 聚灿光电科技股份有限公司
Priority to KR1020217019830A priority Critical patent/KR20210091815A/ko
Publication of WO2020134250A1 publication Critical patent/WO2020134250A1/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D41/00—Regeneration of the filtering material or filter elements outside the filter for liquid or gaseous fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/60—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor integrally combined with devices for controlling the filtration
    • B01D29/605—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor integrally combined with devices for controlling the filtration by level measuring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/60—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor integrally combined with devices for controlling the filtration
    • B01D29/608—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor integrally combined with devices for controlling the filtration by temperature measuring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/62—Regenerating the filter material in the filter
    • B01D29/66—Regenerating the filter material in the filter by flushing, e.g. counter-current air-bumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
    • B01D35/16—Cleaning-out devices, e.g. for removing the cake from the filter casing or for evacuating the last remnants of liquid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps

Definitions

  • the invention relates to an automatic cleaning device, a control system and a control method for cleaning filters, and particularly to an automatic cleaning device, a control system and a control method for cleaning MOCVD filters.
  • the filters used for MOCVD are manually cleaned and maintained, but the used filters have residual MO sources.
  • the unreacted MO sources come into contact with air and water, which is prone to chemical reactions, resulting in fire, which is very large. Security risks, so it is very unsafe.
  • the density of the residual waste ash on the filter is low, and it is easy to inhale or penetrate into the skin through the dust-free clothing during manual maintenance, thereby affecting the health of the person.
  • An object of the present invention is to provide an automatic cleaning device, a control system, and a control method for cleaning a filter.
  • the automatic cleaning device is more environmentally friendly, safe, and has higher efficiency.
  • an embodiment of the present invention provides an automatic cleaning device for cleaning a filter, the filter is used for MOCVD, wherein; the automatic cleaning device includes:
  • the lye tank for containing lye
  • the automatic cleaning equipment has two working states. In the first working state, the circulation pump pours the lye in the lye tank into the filter, and passes through the filter The lye is circulated into the lye tank; in the second working state, the circulation pump pours the water in the clean water tank into the filter, and circulates the water after passing through the filter to Inside the lye tank.
  • the automatic cleaning device further includes a heating system connected to the filter. After the filter is washed by the lye and water, the heating system is provided to purge the The heated compressed air of the filter.
  • the lye and heated compressed air may be selectively entered into the filter from the same inlet.
  • the alkaline solution includes sodium hydroxide, hydrogen peroxide, and water, and the ratio between the sodium hydroxide and water is 5% to 95%, and the ratio of the hydrogen peroxide to water The ratio is 5% to 95%.
  • a filter element is provided in the alkaline solution tank.
  • the automatic cleaning device further includes a drainage container, and the circulation pump can optionally discharge the alkali solution of the alkali solution tank into the drainage container.
  • another embodiment of the present invention also provides a control system for an automatic cleaning device according to the above technical solution, wherein the control system includes a control unit and a control unit connected to the control unit A plurality of control valves, the plurality of control valves are controlled in different modes, respectively, so that the automatic cleaning device is in a first working state or a second working state.
  • control system further includes a liquid level sensor provided in the alkaline liquid tank and electrically connected to the control unit.
  • control system further includes a heating rod and a temperature sensor provided in the lye tank, and the heating rod and the temperature sensor are both electrically connected to the control unit to connect the The temperature of the lye in the lye tank is controlled at 20°C to 80°C.
  • another embodiment of the present invention also provides a control method of the control system according to the above technical solution, wherein the control unit includes a relay and a timer, and the control method includes the following in order step:
  • the timer defines a first preset time range.
  • the control unit controls the plurality of control valves, and within the first preset time range, the circulation pump is used to transfer the alkaline liquid tank.
  • the lye in the tank is poured into the filter, and the lye after passing through the filter is circulated into the lye tank;
  • the timer defines a second preset time range
  • the control unit controls the plurality of control valves to change the automatic cleaning device to the second working state within the second preset time range
  • the circulation pump fills the water in the clean water tank into the filter, and circulates the water after passing through the filter into the alkaline liquid tank.
  • the automatic cleaning device further includes a heating system connected to the filter, and the following steps after steps a and b include the following steps: the heating system blows heated compressed air into the filter.
  • the beneficial effect of the present invention is that: the circulation pump can selectively fill the lye into the filter, and the lye reacts with the residual waste ash in the filter to dilute it, so that the residual metal on the filter Organic compound waste ash is absorbed.
  • the circulation pump pours water from the clean water tank into the filter to further clean the filter. Therefore, the cleaned filter can be reused, and the automatic cleaning device automatically cleans the filter without manual maintenance, preventing employees from inhaling or penetrating the skin through a dust-free suit, thereby affecting the health of the person, so the automatic Cleaning equipment is more environmentally friendly, safer and more efficient.
  • FIG. 1 is a schematic diagram of an automatic cleaning device in a specific embodiment of the present invention.
  • FIG. 2 is a schematic diagram of the automatic cleaning device in FIG. 1, when the automatic cleaning device is in the first working state;
  • FIG. 3 is a schematic diagram of the automatic cleaning device in FIG. 1, when the automatic cleaning device is in the second working state;
  • FIG. 4 is a schematic diagram of the automatic cleaning device in FIG. 1, when the automatic cleaning device is in the third working state;
  • FIG. 5 is a schematic diagram of the automatic cleaning device in FIG. 1, when the automatic cleaning device is in the fourth working state.
  • spatial relative position may be intended to include different orientations of the device other than those shown in the figures during use or operation. For example, if the device in the figure is turned over, units described as “below” or “beneath” other units or features will be “above” other units or features. Therefore, the exemplary term “below” can encompass both an orientation of above and below.
  • the device can be oriented in other ways (rotated 90 degrees or at other orientations) and interpret the spatially related descriptors used herein accordingly.
  • the preferred embodiment provided by the present invention discloses an automatic cleaning device 10.
  • the automatic cleaning device is used for cleaning the filter 10.
  • the filter 10 is a filter 10 for MOCVD.
  • MOCVD is a metal-organic compound chemical vapor deposition.
  • a source of MO that is, a residual metal-organic compound remains on the filter 10.
  • the filter 10 needs to be cleaned.
  • the automatic cleaning equipment includes an alkaline liquid tank 12 containing alkaline liquid, a clean water tank 14 containing clean water, and a circulation pump 16.
  • the automatic cleaning device has two working states, and the automatic cleaning device may be in the first working state or the second working state.
  • the circulation pump 16 pours the alkaline liquid in the alkaline liquid tank 12 into the filter 10, and circulates the alkaline liquid after passing through the filter 10 into the alkaline liquid tank 12;
  • the circulation pump 16 pours the water in the clean water tank 14 into the filter 10, and circulates the water after passing through the filter 10 into the lye tank 12.
  • the circulation pump 16 can selectively pour the lye into the filter 10, and the lye reacts with the residual waste ash in the filter 10 to dilute it, so that the residual metal organic compound waste ash on the filter 10 It is absorbed, and the circulation pump 16 pours the water in the clean water tank 14 into the filter 10 to further clean the filter 10. Therefore, the cleaned filter 10 can be reused, and the automatic cleaning device automatically cleans the filter 10 without manual maintenance, preventing employees from inhaling or penetrating the skin through a dust-free suit, thereby affecting the health of the person, so The automatic cleaning equipment is more environmentally friendly, safer and more efficient.
  • the automatic cleaning device further includes a heating system connected to the filter 10. After the filter 10 is cleaned by the lye and water, the heating system provides heated compressed air for purging the filter 10.
  • the automatic cleaning equipment is provided with an external port 18, which is used for docking the heating system.
  • the lye and heated compressed air can be selectively entered into the filter 10 from the same inlet. That is to say, when the circulation pump 16 fills the lye into the filter 10, the lye enters the filter 10 from the inlet. When the lye and clean water are both cleaned of the filter 10, the circulation pump 16 stops working and the heating system will The heated compressed air is blown into the filter 10 from the inlet.
  • the lye contains sodium hydroxide, hydrogen peroxide and water, the ratio between sodium hydroxide and water is 5% to 95%, and the ratio of hydrogen peroxide to water is 5% to 95%.
  • water: sodium hydroxide: hydrogen peroxide in the lye 4:1:1.
  • sodium hydroxide and hydrogen peroxide can also be designed in other ratios.
  • a filter element is provided in the lye tank 12.
  • the filter element is used to filter the alkali liquid poured into the filter 10.
  • the filtering accuracy of the filter element is 0.5 to 100um.
  • the automatic cleaning device further includes a drainage container 20, and the automatic cleaning device also has a third working state.
  • the circulation pump 16 can selectively discharge the alkaline solution from the alkaline solution tank 12 into the drainage container 20.
  • the alkaline liquid in the alkaline liquid tank 12 can be automatically discharged, so that the alkaline liquid discharged into the drainage container 20 can be recovered and refined by the MO source manufacturer for reuse, making it more safe and environmentally friendly .
  • the invention also provides a control system for the above automatic cleaning equipment.
  • the control system includes a control unit and a plurality of control valves connected to the control unit.
  • the plurality of control valves are controlled in different modes respectively, so that the automatic cleaning equipment is in The first working state or the second working state.
  • the control unit includes a relay (not shown) and a timer (not shown) to separately control the plurality of control valves, so that the automatic cleaning equipment is in the first working state, the second working state and the third working The status works separately for a predetermined period of time.
  • the control system further includes a liquid level sensor (not shown) provided in the alkaline liquid tank 12 and electrically connected to the control unit.
  • the liquid level sensor is used to sense the amount of lye in the lye tank 12, thereby reminding the operator whether it is necessary to add lye.
  • control system also includes a heating rod (not shown) and a temperature sensor (not shown) provided in the alkaline solution tank 12, both the heating rod and the temperature sensor are electrically connected to the control unit to connect the alkali in the alkaline solution tank 12
  • the temperature of the liquid is controlled at 20°C to 80°C.
  • the alkaline solution maintains a certain process temperature, and can better absorb waste ash on the filter 10.
  • An embodiment of the present invention further provides a control method of the above control system, wherein the control method sequentially includes the following steps:
  • the timer defines a first preset time range.
  • the control unit controls a plurality of control valves.
  • the circulation pump 16 fills the alkali liquid in the alkali liquid tank 12 into the filter 10 , And circulate the lye after passing through the filter 10 to the lye tank 12;
  • the timer defines a second preset time range.
  • the control unit controls a plurality of control valves to change the automatic cleaning equipment to the second working state.
  • the circulation pump 16 will clean the water tank 14 The water is poured into the filter 10, and the water after passing through the filter 10 is circulated into the lye tank 12.
  • the automatic cleaning device further includes a heating system connected to the filter 10, and after steps a and b, the following steps are also included: c.
  • the heating system blows heated compressed air into the filter 10.
  • steps b and c the following steps are further included between steps b and c: b1, the timer defines a fourth preset time range, and the control unit controls a plurality of control valves to change the automatic cleaning equipment to the fourth In the working state, within the fourth preset time range, the circulating pump 16 pumps the liquid remaining in the filter 10 into the alkaline liquid tank 12.
  • the circulation pump 16 has a first port 22 and a second port 24, the lye tank 12 has a first port 26, a second port 28, and a third port 30, and the filter 10 has an inlet and an outlet.
  • the water tank 14 has a clean water outlet 32, and the plurality of control valves includes a first control valve 34, a second control valve 36, and a third control valve 38 provided between the first port 22 and the inlet, and is provided at the second port 24 and the first
  • the fourth control valve 40 between the port 26, the fifth control valve 42 provided between the second port 24 and the clean water outlet, the sixth control valve 44 provided between the second port 28 and the first control valve 34,
  • a seventh control valve 46 provided between the fifth control valve 42 and the third control valve 38, one end of the seventh control valve 46 is connected to the fifth control valve 42 and the second port 24, the seventh control valve 46 The other end communicates between the second control valve 36 and the third control valve 38.
  • An eighth control valve 48 is also provided between the third port 30 and the outlet of the filter 10.
  • a ninth control valve 50 is provided between the first port 22 of the circulation pump 16 and the drain container 20.
  • both the fourth control valve 40 and the ninth control valve 50 are opened, the other control valves are closed, and the circulation pump 16 is in an open state
  • the automatic cleaning device is in the third working state, and the flow direction of the alkaline solution in the alkaline solution tank 12 is shown by the arrow shown in FIG. 4.
  • the lye in the lye tank 12 is recovered into the drainage container 20, and the newly replaced water in the lye tank 12 can be supplied by using another tap, or the water in the clean water tank 14, and then adding an appropriate amount of hydrogen Sodium oxide and hydrogen peroxide are sufficient.
  • the circulation pump 16 is in an on state to pump the liquid remaining in the filter 10 into the alkaline liquid tank 12, and the flow direction of the liquid is shown by the arrow in FIG. 5.
  • the control system also includes a tenth control valve 52 that controls compressed air.
  • a tenth control valve 52 that controls compressed air.
  • the tenth control valve 52, the second control valve 36, and the third control valve 38 are all opened, the other control valves are closed, and the circulation pump 16 is also closed at this time. In this state, the heated compressed air of the heating system enters the filter 10, and the filter 10 is purged.
  • the tenth control valve 52 is closed.
  • the first control valve 34 to the tenth control valve 52 are all driven ball valves, and the first control valve 34 to the tenth control valve 52 are integrated as a module on one disk surface.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

一种用于清洗过滤器（10）的自动清洗设备、控制系统及控制方法，该过滤器（10）用于金属有机化合物化学气相沉淀（MOCVD），自动清洗设备包括：容纳碱液的碱液槽（12）；容纳清水的清水槽（14）；循环泵（16），该自动清洗设备具有两个工作状态，第一工作状态时，循环泵（16）将碱液槽（12）内的碱液灌入过滤器（10）内，并将经过过滤器（10）后的碱液循环到碱液槽（12）内；第二工作状态时，循环泵（10）将清水槽（14）内的水灌入到过滤器（10）内，并将经过过滤器（10）后的水循环到碱液槽（12）内。控制系统包括控制单元、与控制单元相连接的复数个控制阀，复数个控制阀分别被控制于不同的模式，以使自动清洗设备处于第一工作状态或第二工作状态。控制方法依次包括如下步骤：a、定时器定义第一预设时间范围，在该时间范围内，使自动清洗设备处于第一工作状态；b、定时器定义第二预设时间范围，在该时间范围内，使自动清洗设备处于第二工作状态。

Description

用于清洗过滤器的自动清洗设备、控制系统及控制方法 技术领域
本发明涉及一种用于清洗过滤器的自动清洗设备、控制系统及控制方法，尤其涉及一种用于清洗MOCVD的过滤器的自动清洗设备、控制系统及控制方法。
背景技术
目前，用于MOCVD的过滤器都是采用人工清洗维护，但经使用的过滤器有残余的MO源，未反应完的MO源与空气和水接触，易产生化学反应，导致着火，存在非常大的安全隐患，因此很不安全。另外，过滤器上残余的废灰的密度较小，人工维护时，易吸入或通过无尘服渗透至皮肤上，从而影响人的身体健康。
发明内容
本发明的目的在于提供一种用于清洗过滤器的自动清洗设备、控制系统及其控制方法，该自动清洗设备更加环保、安全且效率较高。
为实现上述发明目的之一，本发明一实施方式提供一种用于清洗过滤器的自动清洗设备，所述过滤器用于MOCVD，其中；所述自动清洗设备包括：
容纳碱液的碱液槽；
容纳清水的清水槽；
循环泵，所述自动清洗设备具有两个工作状态，第一工作状态时，所述循环泵将所述碱液槽内的碱液灌入所述过滤器内，并将经过所述过滤器后的碱液循环到所述碱液槽内；第二工作状态时，所述循环泵将所述清水槽内的 水灌入到所述过滤器内，并将经过所述过滤器后的水循环到所述碱液槽内。
作为本发明实施方式的进一步改进，所述自动清洗设备还包括接入所述过滤器的加热系统，当所述过滤器被碱液和水清洗过后，所述加热系统提供用于吹扫所述过滤器的加热压缩空气。
作为本发明实施方式的进一步改进，所述碱液和加热压缩空气可被择一地从同一个入口进入到所述过滤器。
作为本发明实施方式的进一步改进，所述碱液包含氢氧化钠、过氧化氢和水，所述氢氧化钠与水之间的比例为5％～95％，所述过氧化氢与水的比例为5％～95％，。
作为本发明实施方式的进一步改进，所述碱液中水∶氢氧化钠∶过氧化氢＝4∶1∶1。
作为本发明实施方式的进一步改进，所述碱液槽中设有滤芯。
作为本发明实施方式的进一步改进，所述自动清洗设备还包括排水容器，所述循环泵可选择地能将所述碱液槽的碱液排出到所述排水容器中。
为解决上述发明目的之一，本发明另一实施方式还提供一种根据上述技术方案所述的自动清洗设备的控制系统，其中；所述控制系统包括控制单元、与所述控制单元相连接的复数个控制阀，所述复数个控制阀分别被控制于不同的模式，以使所述自动清洗设备处于第一工作状态或第二工作状态。
作为本发明实施方式的进一步改进，所述控制系统还包括设于所述碱液槽并与所述控制单元电连接的液位感应器。
作为本发明实施方式的进一步改进，所述控制系统还包括设置于所述碱液槽内的加热棒和温度传感器，所述加热棒和温度传感器均与所述控制单元电连接，以将所述碱液槽内碱液的温度控制于20℃～80℃。
为解决上述发明目的之一，本发明再一实施方式还提供一种根据上述技术方案所述的控制系统的控制方法，其中，所述控制单元包括继电器和定时器，所述控制方法依次包括如下步骤：
a、所述定时器定义了第一预设时间范围，首先所述控制单元控制所述复数个控制阀，在所述第一预设时间范围内，使所述循环泵将所述碱液槽内的碱液灌入所述过滤器内，并将经过所述过滤器后的碱液循环到所述碱液槽内；
b、所述定时器定义了第二预设时间范围，所述控制单元控制所述复数个控制阀，以使所述自动清洗设备变换至第二工作状态，在所述第二预设时间范围内，所述循环泵将所述清水槽内的水灌入到所述过滤器内，并将经过所述过滤器后的水循环到所述碱液槽内。
作为本发明实施方式的进一步改进，所述自动清洗设备还包括接入所述过滤器的加热系统，所述步骤a和b之后还包括如下步骤：所述加热系统将加热压缩空气吹入所述过滤器。
与现有技术相比，本发明的有益效果在于：循环泵可选择地将碱液灌入过滤器内，碱液与过滤器内残余的废灰产生反应稀释，从而将过滤器上残余的金属有机化合物废灰吸收掉，另外，循环泵再将清水槽内的水灌入过滤器内，进一步清洗过滤器。从而使得清洗过的过滤器能被再次利用，且该自动清洗设备自动清洗过滤器，不用人工维护，防止了员工吸入或通过无尘服渗透到皮肤上，从而影响人的身体健康，因此该自动清洗设备更加环保、安全且效率较高。
附图说明
图1是本发明具体实施方式中自动清洗设备的示意图；
图2是图1中自动清洗设备的示意图，此时自动清洗设备处于第一工作状态；
图3是图1中自动清洗设备的示意图，此时自动清洗设备处于第二工作状态；
图4是图1中自动清洗设备的示意图，此时自动清洗设备处于第三工作状态；
图5是图1中自动清洗设备的示意图，此时自动清洗设备处于第四工作状态。
具体实施方式
以下将结合附图所示的具体实施方式对本发明进行详细描述。但这些实施方式并不限制本发明，本领域的普通技术人员根据这些实施方式所做出的结构、方法、或功能上的变换均包含在本发明的保护范围内。
在本发明的各个图示中，为了便于图示，结构或部分的某些尺寸会相对于其它结构或部分夸大，因此，仅用于图示本发明的主题的基本结构。
本文使用的例如“上”、“上方”、“下”、“下方”等表示空间相对位置的术语是出于便于说明的目的来描述如附图中所示的一个单元或特征相对于另一个单元或特征的关系。空间相对位置的术语可以旨在包括设备在使用或工作中除了图中所示方位以外的不同方位。例如，如果将图中的设备翻转，则被描述为位于其他单元或特征“下方”或“之下”的单元将位于其他单元或特征“上方”。因此，示例性术语“下方”可以囊括上方和下方这两种方位。设备可以以其他方式被定向(旋转90度或其他朝向)，并相应地解释本文使用的与空间相关的描述语。
如图1所示，本发明提供的优选实施例公开了一种自动清洗设备10，自动清洗设备用于对过滤器10进行清洗。具体到本实施例中，过滤器10为用于MOCVD的过滤器10。MOCVD即金属有机化合物化学气相沉淀，通常，过滤器10被使用后，上面会残余MO源，即残余金属有机化合物。为了安全环保及过滤器10的再利用，需要清洗过滤器10。
具体的，自动清洗设备包括容纳碱液的碱液槽12、容纳清水的清水槽14和循环泵16。其中自动清洗设备具有两个工作状态，自动清洗设备可择一地处于第一工作状态或第二工作状态。如图2所示，第一工作状态时，循环泵16将碱液槽12内的碱液灌入过滤器10内，并将经过过滤器10后的碱液循 环到碱液槽12内；如图3所示，第二工作状态时，循环泵16将清水槽14内的水灌入到过滤器10内，并将经过过滤器10后的水循环到碱液槽12内。
本优选实施例中，循环泵16可选择地将碱液灌入过滤器10内，碱液与过滤器10内残余的废灰产生反应稀释，从而将过滤器10上残余的金属有机化合物废灰吸收掉，另外，循环泵16再将清水槽14内的水灌入过滤器10内，进一步清洗过滤器10。从而使得清洗过的过滤器10能被再次利用，且该自动清洗设备自动清洗过滤器10，不用人工维护，防止了员工吸入或通过无尘服渗透到皮肤上，从而影响人的身体健康，因此该自动清洗设备更加环保、安全且效率较高。
进一步的，自动清洗设备还包括接入过滤器10的加热系统，当过滤器10被碱液和水清洗过后，加热系统提供用于吹扫过滤器10的加热压缩空气。自动清洗设备设有外接端口18，外接端口18用于对接加热系统。另外，碱液和加热压缩空气可被择一地从同一个入口进入到过滤器10。也就是说，当循环泵16将碱液灌入过滤器10时，碱液从入口进入到过滤器10，当碱液和清水均清洗好过滤器10后，循环泵16停止工作，加热系统将加热压缩空气从入口吹入到过滤器10内。
碱液包含氢氧化钠、过氧化氢和水，氢氧化钠与水之间的比例为5％～95％，过氧化氢与水的比例为5％～95％。具体到本实施例中，碱液中水∶氢氧化钠∶过氧化氢＝4∶1∶1。当然，碱液中，水、氢氧化钠和过氧化氢三者之间也可以设计为其它比例。
进一步的，碱液槽12中设有滤芯。滤芯用于过滤灌入到过滤器10中的碱液。通常，滤芯的过滤精度为0.5～100um。
自动清洗设备还包括排水容器20，自动清洗设备还具有第三工作状态，第三工作状态时，循环泵16可选择地能将碱液槽12的碱液排出到排水容器20中。这样，当碱液槽12需要更换碱液时，能自动实现碱液槽12中碱液的排出，从而排出到排水容器20中的碱液可找MO源厂家回收提炼再用，使得 更加安全环保。
本发明还提供了一种上述自动清洗设备的控制系统，控制系统包括控制单元、与控制单元相连接的复数个控制阀，复数个控制阀分别被控制于不同的模式，以使自动清洗设备处于第一工作状态或第二工作状态。进一步的，控制单元包括继电器(未图示)和定时器(未图示)，以对复数个控制阀进行分别控制，从而使得自动清洗设备在第一工作状态、第二工作状态和第三工作状态分别工作预定的时间段。
控制系统还包括设于碱液槽12并与控制单元电连接的液位感应器(未图示)。液位感应器用于感应碱液槽12的碱液量，从而提醒操作者是否需要添加碱液。
另外，控制系统还包括设置于碱液槽12内的加热棒(未图示)和温度传感器(未图示)，加热棒和温度传感器均与控制单元电连接，以将碱液槽12内碱液的温度控制于20℃～80℃。从而使得碱液保持一定的工艺温度，能更好地与过滤器10上的废灰产生吸收反应。
本发明一实施方式还提供一种上述控制系统的控制方法，其中，控制方法依次包括如下步骤：
a、定时器定义了第一预设时间范围，首先控制单元控制复数个控制阀，在第一预设时间范围内，使循环泵16将碱液槽12内的碱液灌入过滤器10内，并将经过过滤器10后的碱液循环到碱液槽12内；
b、定时器定义了第二预设时间范围，控制单元控制复数个控制阀，以使自动清洗设备变换至第二工作状态，在第二预设时间范围内，循环泵16将清水槽14内的水灌入到过滤器10内，并将经过过滤器10后的水循环到碱液槽12内。
进一步的，自动清洗设备还包括接入过滤器10的加热系统，步骤a和b之后还包括如下步骤：c、加热系统将加热压缩空气吹入过滤器10。
优选的，进一步参照图3，在步骤b和c之间还包括如下步骤：b1、定时 器定义了第四预设时间范围，控制单元控制复数个控制阀，以使自动清洗设备变换至第四工作状态，在第四预设时间范围内，循环泵16将过滤器10内残留的液体泵入到碱液槽12内。
具体到本实施例中，循环泵16具有第一端口22和第二端口24，碱液槽12具有第一接口26、第二接口28和第三接口30，过滤器10具有入口和出口，清水槽14具有清水出口32，复数个控制阀包括设于第一端口22和入口之间的第一控制阀34、第二控制阀36和第三控制阀38，设于第二端口24和第一接口26之间的第四控制阀40，设于第二端口24和清水出口之间的第五控制阀42，设于第二接口28和第一控制阀34之间的第六控制阀44，设于第五控制阀42和第三控制阀38之间的第七控制阀46，第七控制阀46的一端均与第五控制阀42和第二端口24相连接，第七控制阀46的另一端连通于第二控制阀36和第三控制阀38之间。第三接口30和过滤器10的出口之间还设有第八控制阀48。
当第一控制阀34、第二控制阀36、第三控制阀38、第四控制阀40和第八控制阀48均开通，其它控制阀均关闭，且循环泵16处于开启状态时，自动清洗设备处于第一工作状态，碱液的流向如图2中所示箭头所示。
当第一控制阀34、第二控制阀36、第三控制阀38、第五控制阀42和第八控制阀48均开通，其它控制阀均关闭，且循环泵16处于开启状态时，自动清洗设备处于第二工作状态，清水的流向如图3中所示箭头所示。此时将清水泵入到过滤器10，并将经过过滤器10后的液体循环到碱液槽12中。
循环泵16的第一端口22与排水容器20之间设有第九控制阀50，当第四控制阀40和第九控制阀50均开通，其它控制阀均关闭，且循环泵16处于开启状态时，自动清洗设备处于第三工作状态，碱液槽12中碱液的流向如图4中所示箭头所示。此时将碱液槽12中的碱液回收到排水容器20中，碱液槽12中新更换的水可采用另外的水龙头供入，也可采用清水槽14中的水，然后加入适量的氢氧化钠和过氧化氢即可。
如图5所示，自动清洗设备的第四工作状态，此时，第三控制阀38、第七控制阀46、第一控制阀34和第六控制阀44均开通，其它控制阀均关闭，且循环泵16处于开启状态，以将过滤器10内残留的液体泵入到碱液槽12中，液体的流向如图5中箭头所示。
控制系统还包括控制压缩空气的第十控制阀52，当第十控制阀52、第二控制阀36和第三控制阀38均开通，其它控制阀均关闭，且此时循环泵16也处于关闭状态，加热系统的加热压缩空气进入到过滤器10，对过滤器10进行吹扫。当自动清洗设备处于第一至第四工作状态时，第十控制阀52均关闭。第一控制阀34至第十控制阀52均为驱动球阀，且第一控制阀34至第十控制阀52作为一个模组整合到一个盘面上。
应当理解，虽然本说明书按照实施方式加以描述，但并非每个实施方式仅包含一个独立的技术方案，说明书的这种叙述方式仅仅是为清楚起见，本领域技术人员应当将说明书作为一个整体，各实施方式中的技术方案也可以经适当组合，形成本领域技术人员可以理解的其他实施方式。
上文所列出的一系列的详细说明仅仅是针对本发明的可行性实施方式的具体说明，它们并非用以限制本发明的保护范围，凡未脱离本发明技艺精神所作的等效实施方式或变更均应包含在本发明的保护范围之内。

Claims (12)

  1. 一种用于清洗过滤器的自动清洗设备，所述过滤器用于MOCVD，其特征在于；所述自动清洗设备包括：
    容纳碱液的碱液槽；
    容纳清水的清水槽；
    循环泵，所述自动清洗设备具有两个工作状态，第一工作状态时，所述循环泵将所述碱液槽内的碱液灌入所述过滤器内，并将经过所述过滤器后的碱液循环到所述碱液槽内；第二工作状态时，所述循环泵将所述清水槽内的水灌入到所述过滤器内，并将经过所述过滤器后的水循环到所述碱液槽内。
  2. 根据权利要求1所述的自动清洗设备，其特征在于，所述自动清洗设备还包括接入所述过滤器的加热系统，当所述过滤器被碱液和水清洗过后，所述加热系统提供用于吹扫所述过滤器的加热压缩空气。
  3. 根据权利要求2所述的自动清洗设备，其特征在于，所述碱液和加热压缩空气可被择一地从同一个入口进入到所述过滤器。
  4. 根据权利要求3所述的自动清洗设备，其特征在于，所述碱液包含氢氧化钠、过氧化氢和水，所述氢氧化钠与水之间的比例为5％～95％，所述过氧化氢与水的比例为5％～95％，。
  5. 根据权利要求4所述的自动清洗设备，其特征在于，所述碱液中水∶氢氧化钠∶过氧化氢＝4∶1∶1。
  6. 根据权利要求5所述的自动清洗设备，其特征在于，所述碱液槽中设有滤芯。
  7. 根据权利要求1所述的自动清洗设备，其特征在于，所述自动清洗设备还包括排水容器，所述循环泵可选择地能将所述碱液槽的碱液排出到所述排水容器中。
  8. 根据权利要求1所述的自动清洗设备的控制系统，其特征在于；所述控制系统包括控制单元、与所述控制单元相连接的复数个控制阀，所述复数个控制阀分别被控制于不同的模式，以使所述自动清洗设备处于第一工作状态或第二工作状态。
  9. 根据权利要求8所述的控制系统，其特征在于，所述控制系统还包括设于所述碱液槽并与所述控制单元电连接的液位感应器。
  10. 根据权利要求8所述的控制系统，其特征在于，所述控制系统还包括设置于所述碱液槽内的加热棒和温度传感器，所述加热棒和温度传感器均与所述控制单元电连接，以将所述碱液槽内碱液的温度控制于20℃～80℃。
  11. 根据权利要求8所述的控制系统的控制方法，其特征在于，所述控制单元包括继电器和定时器，所述控制方法依次包括如下步骤：
    a、所述定时器定义了第一预设时间范围，首先所述控制单元控制所述复数个控制阀，在所述第一预设时间范围内，使所述循环泵将所述碱液槽内的碱液灌入所述过滤器内，并将经过所述过滤器后的碱液循环到所述碱液槽内；
    b、所述定时器定义了第二预设时间范围，所述控制单元控制所述复数个控制阀，以使所述自动清洗设备变换至第二工作状态，在所述第二预设时间范围内，所述循环泵将所述清水槽内的水灌入到所述过滤器内，并将经过所述过滤器后的水循环到所述碱液槽内。
  12. 根据权利要求11所述的控制系统的控制方法，其特征在于，所述自动清洗设备还包括接入所述过滤器的加热系统，所述步骤a和b之后还包括如下步骤：所述加热系统将加热压缩空气吹入所述过滤器。
PCT/CN2019/108108 2018-12-25 2019-09-26 用于清洗过滤器的自动清洗设备、控制系统及控制方法 WO2020134250A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020217019830A KR20210091815A (ko) 2018-12-25 2019-09-26 필터 세정용 자동 세정 장치, 제어 시스템 및 제어 방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201811591214.5 2018-12-25
CN201811591214.5A CN109432882A (zh) 2018-12-25 2018-12-25 用于清洗过滤器的自动清洗设备、控制系统及控制方法

Publications (1)

Publication Number Publication Date
WO2020134250A1 true WO2020134250A1 (zh) 2020-07-02

Family

ID=65537964

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/108108 WO2020134250A1 (zh) 2018-12-25 2019-09-26 用于清洗过滤器的自动清洗设备、控制系统及控制方法

Country Status (3)

Country Link
KR (1) KR20210091815A (zh)
CN (1) CN109432882A (zh)
WO (1) WO2020134250A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109432882A (zh) * 2018-12-25 2019-03-08 聚灿光电科技股份有限公司 用于清洗过滤器的自动清洗设备、控制系统及控制方法
CN110302584A (zh) * 2019-07-31 2019-10-08 苏州普耀光电材料有限公司 一种用于外延生长设备用滤芯的mo源回收处理装置
CN113426203B (zh) * 2021-08-06 2022-12-30 长春卓谊生物股份有限公司 一种除菌级滤芯的清洗方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151186A (en) * 1990-05-21 1992-09-29 Skc Limited Method for cleaning filter disks and system therefor
CN1078167A (zh) * 1992-03-14 1993-11-10 株式会社Skc 清洗过滤器组件的设备和方法
CN1676192A (zh) * 2004-04-01 2005-10-05 上海宏力半导体制造有限公司 应用在清洗液循环系统中可延长过滤器寿命的清洗装置
CN205145777U (zh) * 2015-11-17 2016-04-13 山东香驰健源生物科技有限公司 一种滤芯式过滤器清洗系统
CN208081993U (zh) * 2018-01-16 2018-11-13 河南神马尼龙化工有限责任公司 一种过滤器清洗系统
CN109432882A (zh) * 2018-12-25 2019-03-08 聚灿光电科技股份有限公司 用于清洗过滤器的自动清洗设备、控制系统及控制方法
CN209596732U (zh) * 2018-12-25 2019-11-08 聚灿光电科技股份有限公司 用于清洗过滤器的自动清洗设备及其控制系统

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151186A (en) * 1990-05-21 1992-09-29 Skc Limited Method for cleaning filter disks and system therefor
CN1078167A (zh) * 1992-03-14 1993-11-10 株式会社Skc 清洗过滤器组件的设备和方法
CN1676192A (zh) * 2004-04-01 2005-10-05 上海宏力半导体制造有限公司 应用在清洗液循环系统中可延长过滤器寿命的清洗装置
CN205145777U (zh) * 2015-11-17 2016-04-13 山东香驰健源生物科技有限公司 一种滤芯式过滤器清洗系统
CN208081993U (zh) * 2018-01-16 2018-11-13 河南神马尼龙化工有限责任公司 一种过滤器清洗系统
CN109432882A (zh) * 2018-12-25 2019-03-08 聚灿光电科技股份有限公司 用于清洗过滤器的自动清洗设备、控制系统及控制方法
CN209596732U (zh) * 2018-12-25 2019-11-08 聚灿光电科技股份有限公司 用于清洗过滤器的自动清洗设备及其控制系统

Also Published As

Publication number Publication date
KR20210091815A (ko) 2021-07-22
CN109432882A (zh) 2019-03-08

Similar Documents

Publication Publication Date Title
WO2020134250A1 (zh) 用于清洗过滤器的自动清洗设备、控制系统及控制方法
US20060042756A1 (en) Semiconductor manufacturing apparatus and chemical exchanging method
CN103047539A (zh) 化学药液供给系统
CN103398850A (zh) 发动机试机台架冷却液循环装置
CN204247638U (zh) 自动化cip装置
TWI615186B (zh) 光阻剝離液過濾器之洗淨液、洗淨裝置及洗淨方法
CN211585258U (zh) Mvr蒸发设备在线自动清洗装置
CN206783765U (zh) 一种废酸再生设备
CN211411652U (zh) 一种碱溶解及其在线添加系统
CN209596732U (zh) 用于清洗过滤器的自动清洗设备及其控制系统
CN208161354U (zh) 一种防止氯化氢气体泄漏的盐酸储存系统
JP2013521057A (ja) 洗濯機の抽出器及び方法
JP2005214600A (ja) 空気調和機の洗浄装置及び洗浄方法
JP5208907B2 (ja) 人工温泉装置
CN207057103U (zh) 一种用于一回路设备及部件的去污装置
CN109494179A (zh) 一种自动有机清洗机、清洗系统及清洗方法
CN205412859U (zh) 一种液体配置罐
IT201800005614A1 (it) Apparecchiatura di lavaggio adattata per applicazione nei centri di produzione farmaceutica e/o ricerca preclinica farmaceutica, per il lavaggio di parti e componentistica utilizzata nella produzione farmaceutica, e metodo di uso dell’apparecchiatura
JP2015191972A5 (zh)
CN209530560U (zh) 一种过滤器膜清洗结构
CN208579674U (zh) 一种管壳换热器清洗装置
CN209655034U (zh) 供液装置
TWI513504B (zh) 化學液混合裝置及方法
CN205551010U (zh) 洗瓶机自清洁系统
CN206298364U (zh) 一种强活性废弃液处理装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19906152

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20217019830

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19906152

Country of ref document: EP

Kind code of ref document: A1