WO2020103262A1 - 一种表面平坦度测量装置及方法 - Google Patents

一种表面平坦度测量装置及方法

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Publication number
WO2020103262A1
WO2020103262A1 PCT/CN2018/122620 CN2018122620W WO2020103262A1 WO 2020103262 A1 WO2020103262 A1 WO 2020103262A1 CN 2018122620 W CN2018122620 W CN 2018122620W WO 2020103262 A1 WO2020103262 A1 WO 2020103262A1
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WO
WIPO (PCT)
Prior art keywords
measured
points
board
height measurement
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2018/122620
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English (en)
French (fr)
Inventor
张进朋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuhan China Star Optoelectronics Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Technology Co Ltd
Priority to US16/323,783 priority Critical patent/US10837764B2/en
Publication of WO2020103262A1 publication Critical patent/WO2020103262A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Definitions

  • FIG. 1 there is a schematic diagram of the existing measurement principle for measuring the flatness of the surface using a thin and thick ruler.
  • the measurement principle is as follows: the glass substrate 12 to be measured is placed on the marble platform 11 (the curved surface is downward), and a thin ruler 13 is inserted into the gap 14 between the glass substrate 12 to be measured and the marble platform 11. If the thickness gauge 13 can be inserted smoothly, then try to use a thicker thickness gauge 13 to repeat the insertion, until the thickness gauge 13 cannot pass through the gap 14, the maximum thickness of the thickness gauge 13 that can smoothly pass through the gap 14 is to be waited The measured surface flatness of the glass substrate 12. The principle of measuring the surface flatness of the polarizing plate is the same.
  • FIG. 2 a schematic diagram of the existing measurement principle of using a steel ruler to measure surface flatness.
  • the measuring principle is as follows: the polarizing plate 22 to be measured is placed on the marble platform 21 (the curved surface is upward), and the height of the most warped end of the polarizing plate 22 to be measured to the marble platform 21 is measured with a steel ruler 23 The measured height is the surface flatness of the polarizing plate 22 to be measured.
  • the principle of measuring the surface flatness of a glass substrate is the same.
  • This method of measuring the flatness of the surface using a thick or thin ruler or a steel ruler has a low measurement accuracy (about 0.1mm), and requires manual measurement and manual recording. The measurement error is large and the measurement data cannot be uploaded.
  • the object of the present invention is to provide a device and method for measuring surface flatness. Through laser non-contact measurement, the measurement accuracy can be improved and the measurement error can be reduced. At the same time, the measurement data can be automatically recorded and saved. The measurement accuracy of the degree measurement is low, which requires manual manual measurement and manual recording. The measurement error is large and the measurement data cannot be uploaded.
  • the present invention provides a surface flatness measuring device.
  • the device includes a measuring platform for placing a board to be tested, and a plurality of points to be measured are marked on the surface of the board to be tested.
  • the number of points is 8, the first 4 points to be measured are distributed on the surface of the board to be tested near the edge area, and the last 4 points to be measured are distributed on the surface of the board to be tested close to the center region; at least one laser Head, used to emit laser to a point to be measured and receive reflected light; a computer to control the laser head to move to a different point to be measured and control the laser head to emit laser to obtain all the points to be measured Height measurement value, the computer further determines a reference plane according to the points to be measured corresponding to the first 3 height measurement values of all the obtained height measurement values, and calculates the remaining 5 of all height measurement values respectively The distance value between the point to be measured corresponding to the height measurement value and the reference plane, and obtain the maximum value of all the distance values as the surface flatness measurement
  • the present invention also provides a surface flatness measurement device, which includes: a measurement platform for placing a board to be tested, and a plurality of points to be measured are marked on the surface of the board to be tested; at least one laser Head, used to emit laser to a point to be measured and receive reflected light; a computer to control the laser head to move to a different point to be measured and control the laser head to emit laser to obtain all the points to be measured Height measurement value, the computer further determines a reference plane according to the points to be measured corresponding to the three height measurement values of all the obtained height measurement values, and calculates the remaining height measurement values of all the height measurement values respectively The distance value between the point to be measured corresponding to the value and the reference plane, and the maximum value among all the distance values is obtained as the surface flatness measurement value of the board to be measured.
  • the invention adopts laser non-contact measurement, the measurement accuracy can reach 0.001mm, the measurement accuracy is high, the repeated measurement error can be controlled within 3um, and the measurement error is small, avoiding the low measurement accuracy and measurement caused by manual measurement in the prior art The problem of large errors.
  • the measurement data of the present invention can be automatically recorded and saved, and large batches of boards to be measured can be measured, which avoids the problem that the measurement data of the prior art needs to be manually recorded manually and the measurement data cannot be uploaded.
  • Figure 1 Schematic diagram of the existing measurement principle of measuring the flatness of the surface using a thick and thin ruler
  • Figure 2 Schematic diagram of the existing measurement principle using a steel ruler to measure surface flatness
  • Figure 3 a three-dimensional view of the surface flatness measuring device of the present invention.
  • FIG. 4 is a schematic diagram of points to be measured on the surface of the board to be tested according to the present invention.
  • FIG. 5 is a schematic diagram of the principle of surface flatness measurement of the present invention.
  • FIG. 6 is a flowchart of the surface flatness measurement method of the present invention.
  • the first feature “above” or “below” the second feature may include the direct contact of the first and second features, or may include the first and second features Contact not directly but through another feature between them.
  • the first feature is “above”, “above” and “above” the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the first feature is higher in level than the second feature.
  • the first feature is “below”, “below” and “below” the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the first feature is less horizontal than the second feature.
  • the invention mainly innovates from the measurement principle, solves the existing difficulties and technical defects of flatness measurement, calculates the difference in height in different areas of the board to be measured by the optical path difference from the laser to the board to be tested, and fits the plane, Calculate the maximum distance between the different points to be measured on the board to be measured and the fitting plane, so as to obtain the surface flatness of the board to be tested.
  • the device includes a measurement platform 31, at least one laser head 32, and a computer 33.
  • the measurement platform 31 is a platform that carries the object to be measured, and is used to place the board to be measured 39. A plurality of points to be measured are marked on the surface of the board to be tested 39.
  • the board to be tested 39 may be a liquid crystal panel assembly such as a glass substrate or a polarizing plate that needs to measure surface flatness.
  • the at least one laser head 32 is used to emit laser light to a point to be measured and receive reflected light. By moving the position of the laser head 32 at predetermined intervals and repeating the measurement multiple times, the measurement of all the points to be measured can be completed.
  • the device may also include a plurality of laser heads, each laser head corresponds to a point to be measured, and all laser heads simultaneously emit laser light to the corresponding point to be measured and receive reflected light, so that it can be completed by a single measurement Measurement of all points to be measured.
  • the computer 33 is used to control the laser head 32 to move to different points to be measured and control the laser head 32 to emit laser to obtain the height measurement values H1-Hn of all the points to be measured; the computer 33 further Obtain all the height measurement values H1-Hn of the three height measurement values corresponding to the point to be measured to determine a reference plane S0, respectively calculate the remaining height measurement values corresponding to the point to be measured For the distance value of the reference plane S0, the maximum value h of all the distance values is obtained as the surface flatness measurement value of the board to be measured 39.
  • the computer 33 is equipped with a CPU (Central Processing Unit, central processing unit), and the computer 33 can receive externally input control commands to control the laser head 32 to move to different points to be measured at preset intervals;
  • the computer 33 calculates the height measurement value Hi of the point to be measured in the CPU by acquiring the optical path difference from the laser head 32 to the point to be measured; the computer 33 further passes all the acquired values in the CPU
  • the three height measurement data in the height measurement values H1-Hn determine a reference plane S0, and respectively calculate the distance values between the point to be measured corresponding to the remaining height measurement values and the reference plane S0, and all distance values
  • the maximum value h in is the surface flatness of the board 39 to be measured.
  • the computer 33 is further used to record and save the acquired surface flatness measurement value of the board to be measured.
  • the acquired surface flatness measurement value of the board to be measured is saved in a public archive area.
  • FIG. 4 is a schematic diagram of the points to be measured on the surface of the board to be tested according to the present invention
  • FIG. 5 is a schematic diagram of the surface flatness measurement principle of the present invention.
  • the number of the points to be measured is 8 (as indicated by reference numbers 1-8 in the figure, the arrows indicate the measurement sequence), and the first 4 points to be measured (1-4) are distributed in the The surface of the board to be tested 39 is close to the edge area, and the last four points to be measured (5-8) are distributed on the surface of the board to be tested 39 near the center area.
  • the computer 33 further determines a reference plane S0 according to the to-be-measured points (1-3) corresponding to the first three height measurement values of all the obtained height measurement values, and then calculates the remaining values of all the height measurement values respectively The distance value between the point to be measured (4-8) corresponding to the 5 height measurement values to the reference plane S0, and then obtain the maximum value h of all the distance values as the surface flatness measurement value of the board to be measured 39 .
  • Step 1 Place the glass substrate to be measured on the measurement platform 31 of the surface flatness measurement device
  • Step 2 Start the computer 33, and the laser head 32 emits laser light to the surface of the glass substrate and reflects it back to obtain the height measurement value of the first point of the glass substrate;
  • the third step Repeat the measurement of the height value of the laser to different positions of the glass substrate, measuring a total of 8 points, and obtaining the height measurement values of 8 points;
  • the fourth step determine a reference plane S0 through the height measurement values of the previous three points, and calculate the distance values of the following five points to the reference plane S0 respectively.
  • Step 5 Obtain the maximum value of all distance values, which is the measured value of the surface flatness of the glass substrate to be measured, and save the measured value to the public archive area.
  • the method includes the following steps: S61: placing the board to be tested on the measurement platform, the surface of the board to be tested is marked with a plurality of points to be tested; S62: a computer controls a laser head to move to different points to be tested and controls the The laser head emits laser light to obtain height measurement values of all the points to be measured; S63: the computer determines a reference from the point to be measured corresponding to the three height measurement values among all the obtained height measurement values The plane, respectively calculating the distance value from the point to be measured corresponding to the remaining height measurement value to the reference plane; S64: obtaining the maximum value of all distance values as the to-be-measured by the computer Measurement of the surface flatness of the board.
  • step S62 further includes: controlling, by the computer, a plurality of laser heads to emit laser light to the plurality of points to be measured, so as to obtain height measurement values of all the points to be measured.
  • step S63 further includes: determining a reference plane by the computer according to the points to be measured corresponding to the first 3 height measurement values of all the obtained height measurement values Calculate the distance between the point to be measured and the reference plane corresponding to the remaining 5 height measurements among all the height measurements.
  • the method further includes: S65: recording and saving the acquired surface flatness measurement value of the board to be measured through the computer.
  • the acquired surface flatness measurement value of the board to be measured is saved in a public archive area.
  • the invention calculates the height difference of different regions of the board to be measured by the optical path difference from the laser to the board to be tested, and calculates the maximum distance from the different points to be fitted on the board to be measured by fitting the plane, thereby obtaining the The surface flatness of the board to be tested.
  • the invention adopts laser non-contact measurement, the measurement accuracy can reach 0.001mm, the measurement accuracy is high, the repeated measurement error can be controlled within 3um, and the measurement error is small, avoiding the low measurement accuracy and measurement caused by manual measurement in the prior art The problem of large errors.
  • the measurement data of the present invention can be automatically recorded and saved, and large batches of boards to be measured can be measured, which avoids the problem that the measurement data of the prior art needs to be manually recorded manually and the measurement data cannot be uploaded.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

一种表面平坦度测量装置及方法，该装置包括用于放置待测板（39）的测量平台（31）、至少一个激光头（32）和计算机（33），通过激光非接触式测量，测量精度可达到0.001mm，测量精度高，重复测量误差可控制在3um以内，测量误差小，避免了现有技术采用人工手动测量所造成的测量精度低、测量误差大的问题。同时，测量数据可以自动记录和保存，可进行大批次待测板（39）的测量，避免了现有技术测量数据需要人工手动记录，测量数据无法上传的问题。

Description

一种表面平坦度测量装置及方法 技术领域
本发明涉及测量技术领域，尤其涉及一种表面平坦度测量装置及方法。
 背景技术
液晶面板行业，偏光板和玻璃基板在制程过程中，由于上下膜层的应力不同，导致偏光板和玻璃基板易产生翘曲，影响产品最终的品质。为保证产品质量，需对偏光板和玻璃基板的表面平坦度进行监控，并严格控制在规格内。目前业内测量平坦度的方法主要有两种：一种是采用厚薄规尺测量，一种是采用钢尺测量。
参考图1，现有采用厚薄规尺测量表面平坦度的测量原理示意图。其测量原理为：将待测量的玻璃基板12放置在大理石平台11上（翘曲面向下），用厚薄规尺13插入待测量的玻璃基板12与大理石平台11之间的缝隙14中。如果厚薄规尺13能顺利插入，再尝试使用更厚的厚薄规尺13重复插入动作，直至厚薄规尺13无法通过缝隙14，则能顺利通过缝隙14的厚薄规尺13的最大厚度就是该待测量的玻璃基板12的表面平坦度。偏光板的表面平坦度测量原理亦如此。
参考图2，现有采用钢尺测量表面平坦度的测量原理示意图。其测量原理为：将待测量的偏光板22放置在大理石平台21上（翘曲面向上），用钢尺23测量该待测量的偏光板22翘曲最严重的一端到大理石平台21的高度，所测得的高度即为该待测量的偏光板22的表面平面度。玻璃基板的表面平坦度测量原理亦如此。
 技术问题
这种采用厚薄规尺或采用钢尺测量表面平坦度的方式都存测量精度较低（约为0.1mm），且需人工手动测量、手动记录，测量误差大、测量数据无法上传。
 技术解决方案
本发明的目的在于，提供一种表面平坦度测量装置及方法，通过激光非接触式测量，可提高测量精度，减小测量误差，同时测量数据可以自动记录和保存，解决现有技术中表面平坦度测量的测量精度较低，需人工手动测量、手动记录，测量误差大、测量数据无法上传的问题。
为实现上述目的，本发明提供了一种表面平坦度测量装置，所述装置包括：测量平台，用于放置待测板，所述待测板表面标记有多个待测点，所述待测点的数量为8个，前4个所述待测点分布在所述待测板表面靠近边缘区域，后4个所述待测点分布在所述待测板表面靠近中心区域；至少一激光头，用于发射激光至一所述待测点并接收反射光；计算机，用于控制所述激光头移动至不同待测点并控制所述激光头发射激光，以获取所有所述待测点的高度测量值，所述计算机进一步根据所获取的所有所述高度测量值中的前3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的5个高度测量值对应的待测点到所述基准平面的距离值，获取所有距离值中的最大值作为所述待测板的表面平坦度测量值；所述计算机进一步用于将所述表面平坦度测量值进行记录并保存。
为实现上述目的，本发明还提供了一种表面平坦度测量装置，所述装置包括：测量平台，用于放置待测板，所述待测板表面标记有多个待测点；至少一激光头，用于发射激光至一所述待测点并接收反射光；计算机，用于控制所述激光头移动至不同待测点并控制所述激光头发射激光，以获取所有所述待测点的高度测量值，所述计算机进一步根据所获取的所有所述高度测量值中的3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的高度测量值对应的待测点到所述基准平面的距离值，获取所有距离值中的最大值作为所述待测板的表面平坦度测量值。
为实现上述目的，本发明还提供了一种表面平坦度测量方法，所述方法包括如下步骤：（1）将待测板放置在测量平台上，所述待测板表面标记有多个待测点；（2）通过计算机控制一激光头移动至不同待测点并控制所述激光头发射激光，以获取所有所述待测点的高度测量值；（3）通过所述计算机根据所获取的所有所述高度测量值中的3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的高度测量值对应的待测点到所述基准平面的距离值；（4）通过所述计算机获取所有距离值中的最大值作为所述待测板的表面平坦度测量值。
 有益效果
本发明通过激光非接触式测量，测量精度可达到0.001mm，测量精度高，重复测量误差可控制在3um以内，测量误差小，避免了现有技术采用人工手动测量所造成的测量精度低、测量误差大的问题。同时，本发明测量数据可以自动记录和保存，可进行大批次待测板的测量，避免了现有技术测量数据需要人工手动记录，测量数据无法上传的问题。
 附图说明
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1，现有采用厚薄规尺测量表面平坦度的测量原理示意图；
图2，现有采用钢尺测量表面平坦度的测量原理示意图；
图3，本发明表面平坦度测量装置的三维图；
图4，本发明待测板表面标记的待测点示意图；
图5，本发明表面平坦度测量原理示意图；
图6，本发明表面平坦度测量方法的流程图。
 本发明的实施方式
下面详细描述本发明的实施方式，所述实施方式的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施方式是示例性的，仅用于解释本发明，而不能理解为对本发明的限制。
在本发明中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
下文的公开提供了许多不同的实施方式或例子用来实现本发明的不同结构。为了简化本发明的公开，下文中对特定例子的部件和设置进行描述。当然，它们仅仅为示例，并且目的不在于限制本发明。此外，本发明可以在不同例子中重复参考数字和/或参考字母，这种重复是为了简化和清楚的目的，其本身不指示所讨论各种实施方式和/或设置之间的关系。此外，本发明提供了的各种特定的工艺和材料的例子，但是本领域普通技术人员可以意识到其他工艺的应用和/或其他材料的使用。
本发明主要是从测量原理上进行创新，解决现有的平坦度测量难点及技术缺陷，通过激光到待测板的光程差，计算出待测板不同区域的高度差，通过拟合平面，计算出待测板上不同待测点到拟合平面的最大距离，从而得到该待测板的表面平坦度。
参考图3，本发明表面平坦度测量装置的三维图。所述装置包括：测量平台31、至少一激光头32以及计算机33。
所述测量平台31是承载被测量对象的平台，用于放置待测板39。所述待测板39表面标记有多个待测点。所述待测板39可以为玻璃基板或偏光板等需要测量表面平坦度的液晶面板组件。
所述至少一激光头32用于发射激光至一所述待测点并接收反射光。通过以预设的间隔移动激光头32的位置多次重复测量，即可完成所有待测点的测量。优选的，所述装置也可以包括多个激光头，每一激光头对应一待测点，所有激光头同时发射激光至相应的待测点并接收反射光，从而通过单次测量，即可完成所有待测点的测量。
计算机33，用于控制所述激光头32移动至不同待测点并控制所述激光头32发射激光，以获取所有所述待测点的高度测量值H1-Hn；所述计算机33进一步根据所获取的所有所述高度测量值H1-Hn中的3个高度测量值对应的待测点确定一个基准平面S0，分别计算出所有高度测量值中的剩下的高度测量值对应的待测点到所述基准平面S0的距离值，获取所有距离值中的最大值h作为所述待测板39的表面平坦度测量值。
就是说，所述计算机33具备CPU(Central Processing Unit，中央处理器)，所述计算机33可以接收外部输入的控制指令，控制所述激光头32以预设的间隔移动至不同待测点；所述计算机33通过获取所述激光头32到所述待测点的光程差，在CPU中计算出所述待测点的高度测量值Hi；所述计算机33进一步在CPU中通过所获取的所有所述高度测量值H1-Hn中的3个高度测量值数据确定一个基准平面S0，并分别计算出剩下的高度测量值对应的待测点到所述基准平面S0的距离值，所有距离值中的最大值h即为所述待测板39的表面平坦度。
优选的，所述计算机33进一步用于将所获取的所述待测板的表面平坦度测量值进行记录并保存。例如，将所获取的所述待测板的表面平坦度测量值保存至公共存档区。
本发明通过激光到待测板的光程差，计算出待测板不同区域的高度差，通过拟合平面，计算出待测板上不同待测点到拟合平面的最大距离，从而得到该待测板的表面平坦度。本发明通过激光非接触式测量，测量精度可达到0.001mm，测量精度高，重复测量误差可控制在3um以内，测量误差小，避免了现有技术采用人工手动测量所造成的测量精度低、测量误差大的问题。同时，本发明测量数据可以自动记录和保存，可进行大批次待测板的测量，避免了现有技术测量数据需要人工手动记录，测量数据无法上传的问题。
参考图4-5，其中，图4为本发明待测板表面标记的待测点示意图，图5为本发明表面平坦度测量原理示意图。在本实施例中，所述待测点的数量为8个（如图中标号1-8所示，箭头指示测量顺序），前4个所述待测点（1-4）分布在所述待测板39表面靠近边缘区域，后4个所述待测点（5-8）分布在所述待测板39表面靠近中心区域。所述计算机33进一步根据所获取的所有所述高度测量值中的前3个高度测量值对应的待测点（1-3）确定一个基准平面S0，然后分别计算出所有高度测量值中的剩下的5个高度测量值对应的待测点（4-8）到所述基准平面S0的距离值，之后获取所有距离值中的最大值h作为所述待测板39的表面平坦度测量值。
以下以测量玻璃基板的表面平坦度为例，对本发明平坦度测量方式过程进行说明说明：
第一步：将待测量的玻璃基板放置在表面平坦度测量装置的测量平台31上；
第二步：启动计算机33，激光头32发射激光至玻璃基板表面并反射回来，得到该玻璃基板第1个点位的高度测量值；
第三步：重复测量激光到玻璃基板不同位置的高度值，总共测量8点，获得8个点位的高度测量值；
第四步：通过前面3个点位的高度测量值确定一个基准平面S0，分别计算出后面的5个点位到该基准平面S0的距离值。
第五步：获取所有距离值中的最大值，该最大值即为待测量玻璃基板的表面平坦度测量值，并将该测量值保存至公共存档区。
参考图6，本发明表面平坦度测量方法的流程图。所述方法包括如下步骤：S61：将待测板放置在测量平台上，所述待测板表面标记有多个待测点；S62：通过计算机控制一激光头移动至不同待测点并控制所述激光头发射激光，以获取所有所述待测点的高度测量值；S63：通过所述计算机根据所获取的所有所述高度测量值中的3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的高度测量值对应的待测点到所述基准平面的距离值；S64：通过所述计算机获取所有距离值中的最大值作为所述待测板的表面平坦度测量值。
具体的，通过所述计算机获取所述激光头到所述待测点的光程差，计算出所述待测点的高度测量值。在本实施例中，通过以预设的间隔移动激光头的位置多次重复测量，即可完成所有待测点的测量。在其它实施例中，也可以提过设置多个激光头，每一激光头对应一待测点，所有激光头同时发射激光至相应的待测点并接收反射光，从而通过单次测量，即可完成所有待测点的测量。具体的，步骤S62进一步包括：通过所述计算机控制多个激光头发射激光至所述多个待测点，以获取所有所述待测点的高度测量值。
优选的，所述待测点的数量为8个，前4个所述待测点分布在所述待测板表面靠近边缘区域，后4个所述待测点分布在所述待测板表面靠近中心区域（如图4所示）；相应的，步骤S63进一步包括：通过所述计算机根据所获取的所有所述高度测量值中的前3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的5个高度测量值对应的待测点到所述基准平面的距离值。
优选的，所述方法进一步包括：S65：通过所述计算机将所获取的所述待测板的表面平坦度测量值进行记录并保存。例如，将所获取的所述待测板的表面平坦度测量值保存至公共存档区。
本发明通过激光到待测板的光程差，计算出待测板不同区域的高度差，通过拟合平面，计算出待测板上不同待测点到拟合平面的最大距离，从而得到该待测板的表面平坦度。本发明通过激光非接触式测量，测量精度可达到0.001mm，测量精度高，重复测量误差可控制在3um以内，测量误差小，避免了现有技术采用人工手动测量所造成的测量精度低、测量误差大的问题。同时，本发明测量数据可以自动记录和保存，可进行大批次待测板的测量，避免了现有技术测量数据需要人工手动记录，测量数据无法上传的问题。
 工业实用性
本申请的主题可以在工业中制造和使用，具备工业实用性。

Claims (12)

  1. 一种表面平坦度测量装置，其中，所述装置包括：测量平台，用于放置待测板，所述待测板表面标记有多个待测点，所述待测点的数量为8个，前4个所述待测点分布在所述待测板表面靠近边缘区域，后4个所述待测点分布在所述待测板表面靠近中心区域；至少一激光头，用于发射激光至一所述待测点并接收反射光；计算机，用于控制所述激光头移动至不同待测点并控制所述激光头发射激光，以获取所有所述待测点的高度测量值，所述计算机进一步根据所获取的所有所述高度测量值中的前3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的5个高度测量值对应的待测点到所述基准平面的距离值，获取所有距离值中的最大值作为所述待测板的表面平坦度测量值；所述计算机进一步用于将所述表面平坦度测量值进行记录并保存。
  2. 如权利要求1所述的装置，其中，所述装置进一步包括多个激光头，每一所述激光头对应一所述待测点，所有所述激光头用于发射激光至相应的待测点并接收反射光。
  3. 一种表面平坦度测量装置，其中，所述装置包括：测量平台，用于放置待测板，所述待测板表面标记有多个待测点；至少一激光头，用于发射激光至一所述待测点并接收反射光；计算机，用于控制所述激光头移动至不同待测点并控制所述激光头发射激光，以获取所有所述待测点的高度测量值，所述计算机进一步根据所获取的所有所述高度测量值中的3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的高度测量值对应的待测点到所述基准平面的距离值，获取所有距离值中的最大值作为所述待测板的表面平坦度测量值。
  4. 如权利要求3所述的装置，其中，所述装置进一步包括多个激光头，每一所述激光头对应一所述待测点，所有所述激光头用于发射激光至相应的待测点并接收反射光。
  5. 如权利要求3所述的装置，其中，所述待测点的数量为8个，前4个所述待测点分布在所述待测板表面靠近边缘区域，后4个所述待测点分布在所述待测板表面靠近中心区域。
  6. 如权利要求5所述的装置，其中，所述计算机进一步根据所获取的所有所述高度测量值中的前3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的5个高度测量值对应的待测点到所述基准平面的距离值，获取所有距离值中的最大值作为所述表面平坦度测量值。
  7. 如权利要求3所述的装置，其中，所述计算机进一步用于将所述表面平坦度测量值进行记录并保存。
  8. 一种表面平坦度测量方法，其中，所述方法包括如下步骤：（1）将待测板放置在测量平台上，所述待测板表面标记有多个待测点；（2）通过计算机控制一激光头移动至不同待测点并控制所述激光头发射激光，以获取所有所述待测点的高度测量值；（3）通过所述计算机根据所获取的所有所述高度测量值中的3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的高度测量值对应的待测点到所述基准平面的距离值；（4）通过所述计算机获取所有距离值中的最大值作为所述待测板的表面平坦度测量值。
  9. 如权利要求8所述的方法，其中，步骤（2）进一步包括：通过所述计算机控制多个激光头发射激光至所述多个待测点，以获取所有所述待测点的高度测量值。
  10. 如权利要求8所述的方法，其中，步骤（2）进一步包括：通过所述计算机获取所述激光头到所述待测点的光程差，计算出所述待测点的高度测量值。
  11. 如权利要求8所述的方法，其中，所述待测点的数量为8个，前4个所述待测点分布在所述待测板表面靠近边缘区域，后4个所述待测点分布在所述待测板表面靠近中心区域；步骤（3）进一步包括：通过所述计算机根据所获取的所有所述高度测量值中的前3个高度测量值对应的待测点确定一个基准平面，分别计算出所有高度测量值中的剩下的5个高度测量值对应的待测点到所述基准平面的距离值。
  12. 如权利要求8所述的方法，其中，所述方法进一步包括：（5）通过所述计算机将所述表面平坦度测量值进行记录并保存。
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