WO2020029786A1 - 上位机、机台控制系统及方法 - Google Patents

上位机、机台控制系统及方法 Download PDF

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Publication number
WO2020029786A1
WO2020029786A1 PCT/CN2019/097084 CN2019097084W WO2020029786A1 WO 2020029786 A1 WO2020029786 A1 WO 2020029786A1 CN 2019097084 W CN2019097084 W CN 2019097084W WO 2020029786 A1 WO2020029786 A1 WO 2020029786A1
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Prior art keywords
machine
instruction
entry
unit
function flow
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PCT/CN2019/097084
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English (en)
French (fr)
Inventor
董祥威
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北京北方华创微电子装备有限公司
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Priority to JP2021506398A priority Critical patent/JP7179960B2/ja
Priority to KR1020217002197A priority patent/KR102484610B1/ko
Priority to US17/262,652 priority patent/US11776830B2/en
Publication of WO2020029786A1 publication Critical patent/WO2020029786A1/zh
Priority to US18/463,961 priority patent/US20240069919A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
    • G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
    • G05B19/0423—Input/output
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by programme execution
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/23—Pc programming
    • G05B2219/23258—GUI graphical user interface, icon, function bloc editor, labview
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/23—Pc programming
    • G05B2219/23304—Download program from host
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32142—Define device, module description using xml format file
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45212—Etching, engraving, sculpturing, carving
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the invention relates to the field of machine control, in particular to a host computer, a machine control system and method.
  • etching machine various functions are included, such as checking the leak rate of the chamber and manually performing dry cleaning.
  • the specific content of these functions or the internal processes are solidified to the etching machine.
  • the specific execution mode of this function is defined by the lower machine of the machine in a process way, and then the lower machine provides this process as a service to the upper machine for Visit, the upper computer then designs a specific operation interface for the user to execute the process.
  • the present invention aims to solve at least one of the technical problems existing in the prior art, and proposes a host computer, a machine control system and method, which can realize the editable function of the machine function flow, thereby improving the machine function flow. Addition / modification flexibility, convenience, and degree of automation, which can save labor and time costs.
  • a host computer which includes a control unit, a service configuration unit, and a function flow unit, wherein the control unit is used to control the entry of the function flow of the machine performed by the lower computer; the service configuration unit The action instruction information for executing the function flow of the machine is configured and can interact with the control unit; the function flow unit stores an entry of the function flow of the machine edited by a user and can communicate with the control unit.
  • the control unit interacts.
  • the host computer further includes an automatic editing unit, and the control unit interacts with the service configuration unit through the automatic editing unit.
  • the host computer further includes an automatic management unit, and the control unit interacts with the functional process unit through the automatic management unit.
  • the format of the functional process unit storage file includes XML; and / or, the format of the service configuration unit configuration file includes XML.
  • the present invention also provides a machine control system, including:
  • the lower computer is configured to receive a service and parameters of the service sent by the upper computer, and execute an entry of a function flow of the machine according to the service and the parameters.
  • the present invention also provides a machine control method.
  • the above-mentioned upper computer provided by the present invention is used to edit the function flow of the machine; the machine control method includes:
  • the functional flow unit When necessary, the functional flow unit is turned on, and the control unit is caused to control the lower computer to execute the stored function flow entry of the machine.
  • the machine control method further includes:
  • an entry of the function flow of the machine includes an action command service and / or a logic instruction
  • the logic instruction is used to control an execution sequence, an execution time, and / or an execution condition of an entry of a functional flow of the machine.
  • the logic instruction includes a wait instruction, and when the function flow of the machine executes the wait instruction, wait for a specified time before executing the next entry; or,
  • the logic instruction further includes a loop start instruction and a loop end instruction
  • the logic instruction further includes a start instruction and an end instruction
  • the logic instructions further include a start instruction, an intermediate instruction, and an end instruction;
  • the host computer includes a control unit, a service configuration unit, and a function flow unit, wherein the control unit is used to control the entry of the lower computer to execute the function flow of the machine ;
  • the service configuration unit is configured with action instruction information for executing the function flow of the machine and can interact with the control unit;
  • the function flow unit stores entries of the function flow of the machine edited by the user and can interact with the control unit .
  • the operator can choose to use the action instruction information of the function flow of the machine provided by the service configuration unit to edit the required function, that is, to complete the addition of the function.
  • the upper computer provided by the present invention can implement the editable function of the machine function flow, thereby improving the flexibility, convenience, and degree of automation of the machine function flow addition / modification, thereby saving labor and time costs.
  • FIG. 1 is a principle block diagram of a host computer according to an embodiment of the present invention
  • FIG. 2 is another schematic block diagram of a host computer according to an embodiment of the present invention.
  • FIG. 3 is a principle block diagram of a machine control system according to an embodiment of the present invention.
  • FIG. 4 is a flowchart of a machine control method according to an embodiment of the present invention.
  • the upper computer 1 includes a control unit 11, a service configuration unit 12, and a function flow unit 13, wherein the control unit 11 is configured to control the entry of the lower computer to execute the function flow of the machine.
  • the entry of this functional flow is the steps required to complete the process.
  • the service configuration unit 12 is configured with action instruction information for executing a function flow of the machine, and can interact with the control unit 11. The operator can choose the function required for editing the operation instruction information of the function flow of the machine provided by the service configuration unit 12, that is, the addition of the function is completed.
  • the motion instruction information may include advanced motion instruction services and basic motion instruction services, and may also include simple logic instructions and related parameters. In this way, the operator can edit the basic functions, advanced functions, and / or simple logic instructions of the machine, so that the machine functions can be added more flexibly and easily expanded.
  • the format of the configuration file of the service configuration unit 12 includes XML.
  • other formats that can store data can also be used.
  • the host computer further includes an automatic editing unit 14, and the control unit 11 interacts with the service configuration unit 12 through the automatic editing unit 14.
  • the automatic editing unit 14 is, for example, a class (code template) named AutoProConfig.
  • the function flow unit 13 stores entries of the function flow of the machine edited by the user, and can interact with the control unit 11. When the edited function needs to be executed, only the function flow unit 13 and the corresponding operation button need to be turned on to execute directly.
  • the host computer 1 further includes an automatic management unit 15, and the control unit 11 interacts with the function flow unit 13 through the automatic management unit 15.
  • the automatic management unit 15 is, for example, a class (code template) named AutoProManager.
  • the format of the file stored by the functional flow unit 13 includes XML.
  • XML XML
  • other formats that can store data can also be used.
  • the upper computer provided by the embodiment of the present invention can implement the editable function of the machine function flow, thereby improving the flexibility, convenience, and degree of automation of the machine function flow addition / modification, thereby saving manpower and time. cost.
  • an embodiment of the present invention further provides a machine control system, which includes an upper computer 1 and a lower computer 2, wherein the upper computer 1 uses the above-mentioned upper computer provided by the embodiment of the present invention.
  • the lower computer 2 is used to directly control the work of the machine and obtain the status of the machine.
  • the lower computer 2 is generally a PLC or a microcontroller.
  • Various actions in the lower computer 2 are opened to the upper computer 1 as a service for their access.
  • the upper computer 1 controls the lower computer by sending a service (ie, an action instruction) and parameters of the service to the lower computer 2.
  • a service ie, an action instruction
  • the lower computer 2 receives the service and parameters of the service sent by the upper computer 1, it executes the entry of the function flow of the machine.
  • the machine control system provided by the present invention can implement the edit function of the machine function flow by using the above-mentioned upper computer 1 and lower computer 2 provided in the embodiment of the present invention, thereby improving the flexibility of adding / modifying the machine function flow. Flexibility, convenience, and degree of automation, which can save labor and time costs.
  • an embodiment of the present invention also provides a machine control method, which uses the above-mentioned upper computer 1 provided by the embodiment of the present invention to edit the function flow of the machine.
  • Machine control methods include:
  • Step S1 Edit the entry of the function flow of the machine one by one according to the action instruction information for executing the function flow of the machine configured by the service configuration unit 12;
  • Step S2 storing the edited entry of the function flow in the function flow unit 13;
  • step S3 the function flow unit 13 is turned on when necessary, and the control unit 11 is caused to control the lower computer 2 to execute the entry of the function flow of the stored machine.
  • the machine control method provided by the embodiment of the present invention by using the above-mentioned upper computer provided by the embodiment of the present invention to edit the function flow of the machine, can increase the flexibility, convenience, and degree of automation of the function flow of the machine. , Which can save labor and time costs.
  • the function flow entry of the machine includes an action command service.
  • the motion command service may be a basic motion command service or an advanced motion command service.
  • the operator can choose to use the basic actions provided in the service configuration unit 12 to command the basic functions required for service editing. After the operator confirms that the editing of the basic function is started, the control unit 11 will request the operator to edit the process content of the basic function one by one. After the editing is completed, the operator can store the edited function flow in the function flow unit 13 and When the function flow unit 13 is started, the function flow is executed.
  • an edited basic function can also be used as an independent advanced motion instruction service and the basic motion instruction service for the operator to edit advanced functions.
  • the control unit 11 will request the operator to edit the process content of the advanced function one by one.
  • the operator may store the edited function flow in the function flow unit 13 and may When necessary, the functional flow unit 13 is turned on to execute the functional flow.
  • the machine control method provided by the embodiment of the present invention can implement the editing of basic functions and advanced functions of the machine by using the above-mentioned upper computer provided by the embodiment of the present invention, so that the addition of machine functions can be made more Flexible and easy to expand.
  • the operator can also modify the content of a process that has not been executed at the same time. You can also select whether an item that is not executed in the current execution process needs to be executed according to the execution status of each item to meet the needs of some production or experiments.
  • the machine control method further includes:
  • the operator can set the time interval between entries when editing the entries of the functional flow of the machine one by one.
  • the added item can also be a simple logical instruction provided by the system, so that the process can be executed on the basis of the sequence Implement simple logical operations similar to programming languages.
  • the entry of the function flow of the machine further includes a logic instruction, which is used to control an execution sequence, an execution time, and / or an execution condition of the entry of the function flow of the machine.
  • the logic instruction includes a wait instruction.
  • the wait instruction When the function flow of the machine reaches the wait instruction, it waits for a specified time before executing the next entry.
  • the logic instructions also include a cycle start instruction (whilestart) and a cycle end instruction (whilestop); when the function flow of the machine is executed to the cycle start instruction, the entries between the cycle start instruction and the cycle end instruction are automatically executed a predetermined number of times .
  • the function flow of the machine reaches the cycle start instruction, it is judged whether the execution conditions are met, and if so, the entries between the cycle start instruction and the cycle end instruction are executed a predetermined number of times.
  • the logic instruction also includes a start instruction (ifstart) and an end instruction (ifstop);
  • the function flow of the machine reaches the start instruction, it is judged whether the execution conditions are satisfied. If it is, the entry between the start instruction and the end instruction is executed; if not, the entry between the start instruction and the end instruction is not executed. .
  • the logic instruction further includes a start instruction (ifstart), an intermediate instruction (else), and an end instruction (ifstop);
  • the function flow of the machine reaches the start instruction, it is judged whether the execution conditions are satisfied. If so, the entry between the start instruction and the intermediate instruction is executed, and the entry between the intermediate instruction and the end instruction is not executed. If not, Then, the entry between the intermediate instruction and the end instruction is executed, and the entry between the start instruction and the intermediate instruction is not executed.
  • the present invention includes, but is not limited to, the several logic instructions listed above, and may also include logic instructions commonly used in the editing process.
  • Item 1 refers to: call the service of the lower computer, set the position value to 1000 for Pendulum and Valve.
  • Items 1 to 5 refer to: if any of the valves in HeValve1 and HeValve2 is closed, the valve opening service of the two valves is performed.
  • Item 6 means: set the temperature at the top position to 60 (° C).
  • Item 7 means that the time for waiting for temperature rise is 1000 ms.
  • Items 8 to 10 constitute a cycle.
  • the cycle judges whether the temperature at the top position reaches 60 (° C). If not, it continues to wait for 1000ms and sets a timeout period. If the temperature at the top position does not reach 60 (° C) after 60000ms , Then jump out of the loop between entries 8 to 10 and continue execution downwards.
  • Item 11 means: set the temperature of middle1 to 40 (° C).
  • Item 12 means that the time for waiting for temperature rise is 20000 ms.
  • Items 13 to 18 constitute a conditional judgment. If the temperature in the middle1 position does not reach 40 (° C), open the FastRough valve, otherwise open the SlowRough valve. Item 18 refers to closing the HeValve1 valve.
  • the higher-level machine will automatically process it and continue execution without human intervention; if it is a higher level that affects the machine Alarm, the upper computer will issue a warning to notify the operator to remind the operator to process and resume the execution of the process.

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Abstract

公开了一种上位机和机台控制系统及方法，该上位机(1)包括控制单元(11)、服务配置单元(12)和功能流程单元(13)，其中，控制单元(11)用于控制下位机执行机台的功能流程的条目；服务配置单元(12)配置有用于执行机台的功能流程的动作指令信息，且能够与控制单元(11)进行交互；功能流程单元(13)存储有由用户编辑的机台的功能流程的条目，且能够与控制单元(11)进行交互。该上位机(1)和机台控制系统及方法可以实现机台功能流程的可编辑功能，从而可以提高机台功能流程添加/修改的灵活性、便捷性、自动化程度，进而可以节省人力和时间成本。

Description

上位机、机台控制系统及方法 技术领域
本发明涉及机台控制领域，具体地，涉及一种上位机、机台控制系统及方法。
背景技术
在当今的信息化时代，信息技术飞速发展，各种电子设备层出不穷，在满足人们生活需求的同时，也极大刺激了半导体行业的发展，对半导体工艺的刻蚀设备提出了更高的要求。
在刻蚀机台的使用过程中，包含各种各样的功能，比如检查腔室漏率、手动执行干法清洗等，这些功能的具体内容或其内部的流程都是固化到刻蚀机台的控制软件中的，对于机台上的某一功能来说，此功能的具体执行方式由机台的下位机以流程的方式定义，然后下位机将此流程以服务的形式提供给上位机进行访问，上位机再设计具体的操作界面供用户执行流程使用。
然而，当机台设备发生更新或是工艺方式发生改变时，机台控制软件也需要完成相应的更新才能保证机台的正常使用，而且整个机台需要等待软件更新完成之后才能正常使用，而这一更新过程延长了实现功能的时间，将可能浪费一定的人力和时间成本。
发明内容
本发明旨在至少解决现有技术中存在的技术问题之一，提出了一种上位机、机台控制系统及方法，其可以实现机台功能流程的可编辑功能，从而可以提高机台功能流程添加/修改的灵活性、便捷性、自动化程度，进而可以节省人力和时间成本。
为实现本发明的目的而提供一种上位机，包括控制单元、服务配置单元和功能流程单元，其中，所述控制单元用于控制下位机执行机台的功能流程的条目；所述服务配置单元配置有用于执行所述机台的功能流程的动作指令信息，且能够与所述控制单元进行交互；所述功能流程单元存储有由用户编辑的机台的功能流程的条目，且能够与所述控制单元进行交互。
可选的，所述上位机还包括自动编辑单元，所述控制单元通过所述自动编辑单元与所述服务配置单元进行交互。
可选的，所述上位机还包括自动管理单元，所述控制单元通过所述自动管理单元与所述功能流程单元进行交互。
可选的，所述功能流程单元存储文件的格式包括XML；和/或，所述服务配置单元配置文件的格式包括XML。
作为另一个技术方案，本发明还提供一种机台控制系统，包括：
本发明提供的上述上位机；及
下位机，用于接收由所述上位机发送的服务以及该服务的参数，并根据所述服务和所述参数执行机台的功能流程的条目。
作为另一个技术方案，本发明还提供一种机台控制方法，采用本发明提供的上述上位机对机台的功能流程进行编辑；所述机台控制方法包括：
根据所述服务配置单元配置的用于执行所述机台的功能流程的动作指令信息，逐条编辑所述机台的功能流程的条目；
将编辑后的所述机台的功能流程的条目存储在所述功能流程单元中；
在需要时开启所述功能流程单元，且使所述控制单元控制所述下位机执行存储的所述机台的功能流程的条目。
可选的，在所述根据所述服务配置单元配置的用于执行所述机台的功能流程的动作指令信息，逐条编辑所述机台的功能流程的条目的步骤之后，且在所述将编辑后的所述机台的功能流程的条目存储在所述功能流程单元中的 步骤之前，所述机台控制方法还包括：
设定相邻的各条所述机台的功能流程的条目之间的时间间隔。
可选的，所述机台的功能流程的条目包括动作命令服务和/或逻辑指令；
所述逻辑指令用于对所述机台的功能流程的条目的执行顺序、执行时间和/或执行条件进行控制。
可选的，所述逻辑指令包括等待指令，当所述机台的功能流程执行到所述等待指令时，等待指定时间之后再执行下一条目；或，
当所述机台的功能流程执行到所述等待指令时，判断是否满足执行条件，或者判断等待时间是否达到指定时间，若是，则执行下一条目。
可选的，所述逻辑指令还包括循环开始指令和循环结束指令；
当所述机台的功能流程执行到所述循环开始指令时，自动循环执行所述循环开始指令和循环结束指令之间的条目预定次数；或，
当所述机台的功能流程执行到所述循环开始指令时，判断是否满足执行条件，若是，则循环执行所述循环开始指令和循环结束指令之间的条目预定次数。
可选的，所述逻辑指令还包括起始指令和结束指令；
当所述机台的功能流程执行到所述起始指令时，判断是否满足执行条件，若是，则执行所述起始指令和结束指令之间的条目；若否，则不执行所述起始指令和结束指令之间的条目；
或，
所述逻辑指令还包括起始指令、中间指令和结束指令；
当所述机台的功能流程执行到所述起始指令时，判断是否满足执行条件，若是，则执行所述起始指令和中间指令之间的条目，而不执行所述中间指令和所述结束指令之间的条目；若否，则执行所述中间指令和结束指令之间的条目，而不执行所述起始指令和所述中间指令之间的条目。
本发明具有以下有益效果：
本发明提供的上位机、机台控制系统及方法的技术方案中，该上位机包括控制单元、服务配置单元和功能流程单元，其中，控制单元用于控制下位机执行机台的功能流程的条目；服务配置单元配置有用于执行机台的功能流程的动作指令信息，且能够与控制单元进行交互；功能流程单元存储有由用户编辑的机台的功能流程的条目，且能够与控制单元进行交互。操作人员可以选择使用服务配置单元提供的机台的功能流程的动作指令信息编辑所需的功能，即完成功能的添加。在需要执行编辑好的功能时，仅需要开启功能流程单元和相应的操作按钮即可直接执行。由此，本发明提供的上位机，其可以实现机台功能流程的可编辑功能，从而可以提高机台功能流程添加/修改的灵活性、便捷性、自动化程度，进而可以节省人力和时间成本。
附图说明
图1为本发明实施例提供的上位机的一种原理框图；
图2为本发明实施例提供的上位机的另一种原理框图；
图3为本发明实施例提供的机台控制系统的原理框图；
图4为本发明实施例提供的机台控制方法的流程框图。
具体实施方式
为使本领域的技术人员更好地理解本发明的技术方案，下面结合附图来对本发明提供的上位机、机台控制系统及方法进行详细描述。
请参阅图1，本发明实施例提供的上位机1包括控制单元11、服务配置单元12和功能流程单元13，其中，控制单元11用于控制下位机执行机台的功能流程的条目。该功能流程的条目即为完成工艺所需的各个步骤。
服务配置单元12配置有用于执行机台的功能流程的动作指令信息，且能够与控制单元11进行交互。操作人员可以选择使用服务配置单元12提供 的机台的功能流程的动作指令信息编辑所需的功能，即完成功能的添加。
动作指令信息可以包括高级动作指令服务和基本动作指令服务，还可以包括简单的逻辑指令，以及相关的参数。这样，操作人员可以此为根据对机台的基础功能、高级功能和/或简单的逻辑指令进行编辑，从而可以使机台功能的添加更灵活和易于扩展。
可选的，服务配置单元12配置文件的格式包括XML。当然，也可以采用其他可以存储数据的格式。
可选的，如图2所示，上位机还包括自动编辑单元14，控制单元11通过自动编辑单元14与服务配置单元12进行交互。自动编辑单元14例如为名称为AutoProConfig的类(代码模板)。
功能流程单元13存储有由用户编辑的机台的功能流程的条目，且能够与控制单元11进行交互。在需要执行编辑好的功能时，仅需要开启功能流程单元13和相应的操作按钮即可直接执行。
可选的，上位机1还包括自动管理单元15，控制单元11通过自动管理单元15与功能流程单元13进行交互。自动管理单元15例如为名称为AutoProManager的类(代码模板)。
可选的，功能流程单元13存储文件的格式包括XML。当然，也可以采用其他可以存储数据的格式。
由此，本发明实施例提供的上位机，其可以实现机台功能流程的可编辑功能，从而可以提高机台功能流程添加/修改的灵活性、便捷性、自动化程度，进而可以节省人力和时间成本。
作为另一个技术方案，请参阅图3，本发明实施例还提供一种机台控制系统，其包括上位机1和下位机2，其中，上位机1采用本发明实施例提供的上述上位机。下位机2用于直接控制机台工作，并获取机台状况，下位机2一般是PLC或者单片机等。下位机2中的各种动作以服务的形式开放给上 位机1，以供其访问。
在本实施例中，上位机1对下位机的控制是通过向下位机2发送服务(即，动作指令)以及该服务的参数来实现的。下位机2在接收到由上位机1发送的服务以及该服务的参数时，执行机台的功能流程的条目。
本发明提供的机台控制系统，其通过采用本发明实施例提供的上述上位机1和下位机2，可以实现机台功能流程的可编辑功能，从而可以提高机台功能流程添加/修改的灵活性、便捷性、自动化程度，进而可以节省人力和时间成本。
作为另一个技术方案，请参阅图4，本发明实施例还提供一种机台控制方法，其采用本发明实施例提供的上述上位机1对机台的功能流程进行编辑。
机台控制方法包括：
步骤S1，根据服务配置单元12配置的用于执行机台的功能流程的动作指令信息，逐条编辑机台的功能流程的条目；
步骤S2，将编辑后的机台的功能流程的条目存储在功能流程单元13中；
步骤S3，在需要时开启功能流程单元13，且使控制单元11控制下位机2执行存储的机台的功能流程的条目。
本发明实施例提供的机台控制方法，其通过采用本发明实施例提供的上述上位机对机台的功能流程进行编辑，可以提高机台功能流程添加/修改的灵活性、便捷性、自动化程度，进而可以节省人力和时间成本。
可选的，机台的功能流程的条目包括动作命令服务。该动作命令服务可以是基本动作指令服务，也可以是高级动作指令服务。
在实际应用中，操作人员可以选择使用服务配置单元12中提供的基本动作命令服务编辑所需的基础功能。操作人员在确认开始编辑基础功能之后，控制单元11将请求操作人员逐条编辑基础功能的流程内容，编辑完成后，操作人员可以将编辑好的功能流程存储在功能流程单元13中，并可以在需要的 时候开启功能流程单元13执行该功能流程。
按上述方法可以完成基础功能流程的编辑，同时，一项已经编辑完成的基础功能，还可以作为一条独立的高级动作指令服务和基本动作指令服务一起供操作人员编辑高级功能。具体地，操作人员确认开始编辑高级功能之后，控制单元11将请求操作人员逐条编辑高级功能的流程内容，编辑完成后，操作人员可将编辑好的功能流程存储在功能流程单元13中，并可以在需要的时候开启功能流程单元13执行该功能流程。
由此，本发明实施例提供的机台控制方法，其通过采用本发明实施例提供的上述上位机，可以实现对机台的基础功能和高级功能进行编辑，从而可以使机台功能的添加更灵活和易于扩展。
在实际应用中，操作人员可以根据生产需要在特定的功能类型范围内选择基础动作指令服务或者高级指令服务，并在合理的范围内给定所需参数。
另外，在执行辑好的功能流程的过程中，操作人员还可以同时对未执行的某一流程内容进行修改。也可以根据各条目的执行状态选择当前执行流程中未执行的某一条目是否需要执行，以满足某些生产或者实验的需要。
可选的，在上述步骤S1之后，且在上述步骤S2之前，机台控制方法还包括：
设定相邻的各条机台的功能流程的条目之间的时间间隔。
这样，操作人员在逐条编辑机台的功能流程的条目时，可以设定条目之间的时间间隔。
在添加流程某一条目时，除了可以添加系统提供的高级动作指令服务和基本动作指令服务以外，所添加的条目还可以是系统提供的简单的逻辑指令，这样，可以在顺序执行流程的基础上实现类似于编程语言的简单的逻辑操作。
具体地，机台的功能流程的条目还包括逻辑指令，该逻辑指令用于对机台的功能流程的条目的执行顺序、执行时间和/或执行条件进行控制。
例如，逻辑指令包括等待指令(waitfor)，当机台的功能流程执行到等待指令时，等待指定时间之后再执行下一条目。
或者，当机台的功能流程执行到等待指令时，判断是否满足执行条件，或者判断等待时间是否达到指定时间，若是，则执行下一条目。
又如，逻辑指令还包括循环开始指令(whilestart)和循环结束指令(whilestop)；当机台的功能流程执行到循环开始指令时，自动循环执行循环开始指令和循环结束指令之间的条目预定次数。
或者，当机台的功能流程执行到循环开始指令时，判断是否满足执行条件，若是，则循环执行循环开始指令和循环结束指令之间的条目预定次数。
再如，逻辑指令还包括起始指令(ifstart)和结束指令(ifstop)；
当机台的功能流程执行到起始指令时，判断是否满足执行条件，若是，则执行起始指令和结束指令之间的条目；若否，则不执行起始指令和结束指令之间的条目。
还如，逻辑指令还包括起始指令(ifstart)、中间指令(else)和结束指令(ifstop)；
当机台的功能流程执行到起始指令时，判断是否满足执行条件，若是，则执行起始指令和中间指令之间的条目，而不执行中间指令和结束指令之间的条目；若否，则执行中间指令和结束指令之间的条目，而不执行起始指令和所述中间指令之间的条目。
本发明包括但不局限于上面列举出了几个逻辑指令，还可以包括编辑流程常用的逻辑指令。
下面对机台的功能流程的一个实施例进行详细描述。具体地，该功能流程包括以下条目：
条目1、Pendulum Valve,Set Position,position＝1000
条目1是指：调用下位机的服务，为Pendulum Valve设置position值为 1000
条目2、ifstart,condition:Helium Valve1 DO＝Close||Helium Valve2 DO＝Close。
条目3、OpenValve,valveId＝HeValve1
条目4、OpenValve,valveId＝HeValve2
条目5、ifstop。
条目1至条目5是指：若HeValve1和HeValve2中有任何一个阀的状态是关闭的，则执行两阀的开阀服务。
条目6、Temp Ctl SetTemp,pos＝top,temp＝60
条目6是指：设置top位置的温度为60(℃)。
条目7、waitfor,waittime＝1000ms
条目7是指：等待升温的时间为1000ms。
条目8、whilestart,condition:TCTemp<60,timeout＝60000ms
条目9、waitfor,waittime＝1000ms
条目10、whilestop
条目8至条目10构成一个循环，循环判断top位置的温度是否达到60(℃)，若否，则继续等待1000ms，同时设置有超时时间，若60000ms后top位置的温度仍未达到60(℃)，则跳出条目8至条目10之间的循环，继续向下执行。
条目11、TempCtl_SetTemp,pos＝middle1,temp＝40
条目11是指：设置middle1位置的temperature为40(℃)。
条目12、waitfor,waittime＝20000ms
条目12是指：等待升温的时间为20000ms。
条目13、ifstart,condition:MC1Temp<40
条目14、OpenValve,valveId＝FastRough
条目15、else
条目16、OpenValve,valveId＝SlowRough
条目17、ifstop
条目18、CloseValve,valveId＝HeValve1
条目13至条目18构成一个条件判断，若middle1位置的temperature没有达到40(℃)，则打开FastRough阀，否则打开SlowRough阀。条目18是指关闭HeValve1阀。
可选的，对于流程执行中的异常情况，如果是不影响机台运行结果的低级别报警，上位机会自动将其处理，继续执行，而无需人为干预；如果是影响机台运行的较高级别报警，上位机将会发出警告通知操作人员，以提醒操作人员进行处理，并恢复流程的执行。
可以理解的是，以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式，然而本发明并不局限于此。对于本领域内的普通技术人员而言，在不脱离本发明的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本发明的保护范围。

Claims (11)

  1. 一种上位机，其特征在于，包括控制单元、服务配置单元和功能流程单元，其中，所述控制单元用于控制下位机执行机台的功能流程的条目；所述服务配置单元配置有用于执行所述机台的功能流程的动作指令信息，且能够与所述控制单元进行交互；所述功能流程单元存储有由用户编辑的机台的功能流程的条目，且能够与所述控制单元进行交互。
  2. 根据权利要求1所述的上位机，其特征在于，所述上位机还包括自动编辑单元，所述控制单元通过所述自动编辑单元与所述服务配置单元进行交互。
  3. 根据权利要求1所述的上位机，其特征在于，所述上位机还包括自动管理单元，所述控制单元通过所述自动管理单元与所述功能流程单元进行交互。
  4. 根据权利要求1所述的上位机，其特征在于，所述功能流程单元存储文件的格式包括XML；和/或，所述服务配置单元配置文件的格式包括XML。
  5. 一种机台控制系统，其特征在于，包括：
    权利要求1-4任意一项所述的上位机；及
    下位机，用于接收由所述上位机发送的服务以及该服务的参数，并根据所述服务和所述参数执行机台的功能流程的条目。
  6. 一种机台控制方法，其特征在于，采用权利要求1-4任意一项所述的上位机对机台的功能流程进行编辑；所述机台控制方法包括：
    根据所述服务配置单元配置的用于执行所述机台的功能流程的动作指令信息，逐条编辑所述机台的功能流程的条目；
    将编辑后的所述机台的功能流程的条目存储在所述功能流程单元中；
    在需要时开启所述功能流程单元，且使所述控制单元控制下位机执行存储的所述机台的功能流程的条目。
  7. 根据权利要求6所述的机台控制方法，其特征在于，在所述根据所述服务配置单元配置的用于执行所述机台的功能流程的动作指令信息，逐条编辑所述机台的功能流程的条目的步骤之后，且在所述将编辑后的所述机台的功能流程的条目存储在所述功能流程单元中的步骤之前，所述机台控制方法还包括：
    设定相邻的各条所述机台的功能流程的条目之间的时间间隔。
  8. 根据权利要求6所述的机台控制方法，其特征在于，所述机台的功能流程的条目包括动作命令服务和/或逻辑指令；
    所述逻辑指令用于对所述机台的功能流程的条目的执行顺序、执行时间和/或执行条件进行控制。
  9. 根据权利要求8所述的机台控制方法，其特征在于，所述逻辑指令包括等待指令，当所述机台的功能流程执行到所述等待指令时，等待指定时间之后再执行下一条目；或，
    当所述机台的功能流程执行到所述等待指令时，判断是否满足执行条件，或者判断等待时间是否达到指定时间，若是，则执行下一条目。
  10. 根据权利要求8所述的机台控制方法，其特征在于，所述逻辑指令还包括循环开始指令和循环结束指令；
    当所述机台的功能流程执行到所述循环开始指令时，自动循环执行所述 循环开始指令和循环结束指令之间的条目预定次数；或，
    当所述机台的功能流程执行到所述循环开始指令时，判断是否满足执行条件，若是，则循环执行所述循环开始指令和循环结束指令之间的条目预定次数。
  11. 根据权利要求8所述的机台控制方法，其特征在于，所述逻辑指令还包括起始指令和结束指令；
    当所述机台的功能流程执行到所述起始指令时，判断是否满足执行条件，若是，则执行所述起始指令和结束指令之间的条目；若否，则不执行所述起始指令和结束指令之间的条目；
    或，
    所述逻辑指令还包括起始指令、中间指令和结束指令；
    当所述机台的功能流程执行到所述起始指令时，判断是否满足执行条件，若是，则执行所述起始指令和中间指令之间的条目，而不执行所述中间指令和所述结束指令之间的条目；若否，则执行所述中间指令和结束指令之间的条目，而不执行所述起始指令和所述中间指令之间的条目。
PCT/CN2019/097084 2018-08-10 2019-07-22 上位机、机台控制系统及方法 WO2020029786A1 (zh)

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