WO2020008761A1 - スクリーン印刷装置およびスクリーン印刷方法 - Google Patents

スクリーン印刷装置およびスクリーン印刷方法 Download PDF

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Publication number
WO2020008761A1
WO2020008761A1 PCT/JP2019/021447 JP2019021447W WO2020008761A1 WO 2020008761 A1 WO2020008761 A1 WO 2020008761A1 JP 2019021447 W JP2019021447 W JP 2019021447W WO 2020008761 A1 WO2020008761 A1 WO 2020008761A1
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WO
WIPO (PCT)
Prior art keywords
work
carrier
works
mask plate
unit
Prior art date
Application number
PCT/JP2019/021447
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English (en)
French (fr)
Japanese (ja)
Inventor
萬谷　正幸
坂上　隆昭
裕介 森田
Original Assignee
パナソニックＩｐマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Priority to JP2020528722A priority Critical patent/JP7203307B2/ja
Priority to CN201980042857.0A priority patent/CN112334313B/zh
Priority to DE112019003351.4T priority patent/DE112019003351T5/de
Publication of WO2020008761A1 publication Critical patent/WO2020008761A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/14—Details
    • B41F15/16—Printing tables
    • B41F15/18—Supports for workpieces
    • B41F15/20—Supports for workpieces with suction-operated elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/08—Machines
    • B41F15/0881—Machines for printing on polyhedral articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41F—PRINTING MACHINES OR PRESSES
    • B41F15/00—Screen printers
    • B41F15/14—Details
    • B41F15/16—Printing tables
    • B41F15/18—Supports for workpieces
    • B41F15/26—Supports for workpieces for articles with flat surfaces

Definitions

  • the present disclosure relates to a screen printing apparatus and a screen printing method for printing a paste on a work such as a substrate.
  • screen printing is widely used as a method for printing cream solder, conductive paste, or the like on a substrate.
  • the work to be printed is a small-sized individual substrate
  • the printing operation is performed in a state where a plurality of individual substrates are arranged on a handling carrier.
  • a carrier used in such screen printing a carrier having a configuration in which a rectangular plate member has a work mounting portion for holding an individual substrate, which is a work, is known (for example, see Patent Document 1).
  • Patent Literature 1 First, a work to be printed among a plurality of works placed on a carrier (pallet) is raised from the carrier by a backup device. Next, position detection for correctly aligning the work with the opening of the screen mask is performed, and an alignment operation for aligning the work with the opening of the screen mask is performed based on the position detection result. Thereafter, the work is brought into contact with a screen mask to execute screen printing.
  • the present disclosure provides a screen printing apparatus and a screen printing method that can arrange a printed work on a carrier with correct positional accuracy.
  • the screen printing apparatus includes a mask plate, a carrier support unit, a backup unit, an elevating unit, an alignment unit, an overlapping unit, and a print head.
  • a plurality of arranged pattern holes are formed in the mask plate, and each of the pattern holes is composed of one or more pattern holes.
  • the carrier supporter supports a carrier provided with a plurality of first openings penetrating vertically.
  • a plurality of works are arranged on the carrier so as to cover each of the first openings.
  • the backup unit supports a plurality of works from below and has a plurality of work support parts each having a size that can be inserted into each of the plurality of first openings.
  • the elevating unit moves the carrier support unit and the backup unit up and down relatively.
  • the alignment unit aligns the carrier with the mask plate and aligns the plurality of works lifted by the plurality of work support units in accordance with the arrangement of the plurality of pattern hole groups.
  • the overlapping unit relatively moves the backup unit and the mask plate such that the plurality of works lifted by the plurality of work supporting units and the mask plate are aligned and overlapped.
  • the print head prints the paste on the plurality of works on the plurality of work supporting portions from the upper surface of the mask plate via the plurality of pattern hole groups.
  • the elevating unit raises the plurality of works from the carrier by inserting the plurality of work supports into the plurality of first openings from below by raising the backup unit relative to the carrier support unit, and lifting the plurality of works from the carrier.
  • the plurality of lifted works are returned to the carrier by relatively lowering the backup unit.
  • the screen printing method of the present disclosure includes a carrier loading step, a lifting step, an alignment step, an alignment step, a printing step, and a return step.
  • the carriers are arranged below the mask plate.
  • a plurality of arranged pattern hole groups are formed in the mask plate, and each of the pattern hole groups is formed of one or more pattern holes.
  • the carrier is provided with a plurality of first openings penetrating vertically, and a plurality of works are arranged so as to cover each of the plurality of first openings.
  • the lifting step the plurality of works are supported by the plurality of work supports and lifted from the carrier by inserting the plurality of work supports from below the plurality of first openings.
  • the carrier is positioned with respect to the mask plate, and the plurality of works lifted by the plurality of work supporting portions are aligned according to the arrangement of the plurality of pattern hole groups.
  • the plurality of work supporting portions and the mask plate are relatively moved so that the aligned plurality of works and the mask plate are aligned and overlapped.
  • the paste is printed on a plurality of aligned works through a plurality of pattern holes by moving a print head on the upper surface of the mask plate.
  • the plurality of works are returned to the carrier by pulling out the plurality of work supporting portions downward from the plurality of first openings.
  • a work after printing can be arranged on a carrier with correct positional accuracy.
  • FIG. 1 Front view of a screen printing device according to an embodiment of the present disclosure
  • Side view of the screen printing apparatus shown in FIG. 1 is a perspective view of a carrier holding a work to be printed by the screen printing apparatus shown in FIG. 1.
  • FIG. 2 is an explanatory view of suction holding of a work in a work supporting portion shown in FIG.
  • FIG. 2 is a block diagram showing a control configuration of the screen printing apparatus shown in FIG.
  • the posture of the work after printing is not always within a predetermined range, and the positional deviation often varies. For this reason, when returning the work after printing to the carrier, the work may not be properly stored in the work storage unit. In particular, when an inexpensive carrier as described above is employed, this problem also occurs remarkably.
  • the position of the loaded carrier is detected and the position is corrected to a correct posture.
  • the screen printing apparatus 1 has a function of printing paste such as cream solder on a work such as a substrate.
  • Support frames 11 are provided upright on both side ends in the X direction of the base 1a, and the following elements constituting the screen printing apparatus 1 are arranged between the pair of support frames 11.
  • the left-right direction in FIG. 1 that is, the work transfer direction for transferring the carrier 9 on which the work 10 to be printed is arranged is defined as the X direction
  • the direction orthogonal to the X direction is defined as Y direction. It is defined as a direction.
  • a pair of recognition marks 9a for position recognition are formed at diagonal positions on the upper surface of the rectangular carrier 9.
  • the recognition marks 9a are provided at both diagonal positions (four locations), but may be provided at two locations.
  • a plurality of work storage portions 9b for arranging the work 10 having a rectangular flat plate shape are arranged in a predetermined regular arrangement (here, a 2 ⁇ 4 lattice arrangement).
  • a pair of position recognition marks 10m are formed at diagonal positions together with a plurality of connection electrodes 10a.
  • the planar shape of the work storage portion 9b is set to be slightly larger than the external shape of the work 10 in order to facilitate the storage and removal of the work 10, and has a so-called "play". It has become. Due to the existence of such “play”, even when the workpiece 10 is displaced from the normal posture during the printing operation or the like, if the displacement is within the range of “play”, the work after printing may be performed. 10 can be accommodated in the work accommodating portion 9b.
  • a work receiving portion 9d is provided on the periphery of the opening in which the work storage portion 9b is opened on the upper surface, with which the lower surface of the work 10 abuts while the work 10 is stored.
  • a first opening 9c penetrating the carrier 9 up and down is provided inside the work receiving portion 9d.
  • One work 10 is arranged in each work storage section 9b so as to cover the first opening 9c. That is, the carrier 9 shown in the present embodiment has a plurality of first openings 9c vertically penetrated, and a plurality of works 10 are arranged so as to cover the respective first openings 9c.
  • the upper surface of the work 10 may be moved from the work storage section 9b. It does not matter even if it protrudes.
  • a printing stage 2 that is moved by a printing stage moving mechanism 3 is provided on the upper surface of the base 1 a between the pair of support frames 11.
  • the printing stage moving mechanism 3 has a printing stage table 3xy ⁇ and a second elevating mechanism 3z provided thereon.
  • the printing stage table 3xy ⁇ By driving the printing stage table 3xy ⁇ , the printing stage 2 moves horizontally along at least one of the X, Y, and ⁇ directions, and the printing stage 2 is raised and lowered by driving the second lifting mechanism 3z.
  • the ⁇ direction means a direction in which the printing stage table 3xy ⁇ rotates around a predetermined center.
  • moving in at least one of the X, Y, and ⁇ directions is referred to as moving in the XY ⁇ direction in the following description.
  • the print stage 2 supports a carrier 9 (see FIG. 3) on which a workpiece 10 to be printed is placed and is loaded from the upstream side, and is loaded by the carrier 9 and lifted by the workpiece support 5 a of the backup unit 5.
  • An alignment operation is performed in which the workpiece 10 is positioned and overlapped with a screen printing mechanism described below.
  • the printing stage table 3xy ⁇ constituting the printing stage moving mechanism 3
  • the work 10 is aligned with respect to the mask plate 22 in the XY ⁇ directions
  • the second lifting mechanism 3z is driven to drive the work 10.
  • the printing stage table 3xy ⁇ constitutes an alignment mechanism for moving the backup unit 5 in the XY ⁇ directions.
  • the screen printing mechanism includes the mask plate 22 and the print head 13. As shown in FIG. 15, a plurality of pattern hole groups 22A arranged in the mask plate 22 are formed. Each of the pattern hole groups 22A includes one or more pattern holes 22a.
  • the print head 13 performs a squeezing operation on the mask plate 22.
  • the printing stage 2 has a lifting table 4 coupled to the upper surface of the second lifting mechanism 3z. Support members 4a are provided upright at both ends of the upper surface of the lifting table 4. As shown in FIG. 2, holding blocks 4b extending in the X direction are respectively connected to upper ends of the support members 4a.
  • a printing stage conveyor 6b having a drive belt for transporting the work 10 is provided on each inner side surface of the holding block 4b.
  • the carry-in conveyor 6a and the carry-out conveyor 6c are arranged in the support frames 11 on the upstream side and the downstream side of the printing stage conveyor 6b, respectively, through the openings provided respectively.
  • the carrier 9 can be transported in conjunction with the print stage conveyor 6b, the carry-in conveyor 6a, and the carry-out conveyor 6c.
  • the carrier 9 carried in by the carry-in conveyor 6a (arrow a) is transferred to the printing stage conveyor 6b and held by the printing stage 2. After the screen printing on the work 10 is completed in the printing stage 2, the carrier 9 is delivered from the printing stage conveyor 6b to the unloading conveyor 6c and unloaded.
  • a backup unit 5 driven up and down by a first elevating mechanism 5b is arranged on the upper surface of the elevating table 4.
  • a plurality of work support sections 5a are provided in an arrangement corresponding to the arrangement of the work storage sections 9b in the carrier 9 (see FIG. 3).
  • the work supporting portion 5a has a planar size that supports the work 10 from below on the upper surface and can be inserted into the first opening 9c of the work storage portion 9b from below.
  • the first lifting mechanism 5b is driven to raise the backup unit 5, so that the work supporting unit 5a of the backup unit 5 is moved to the first opening 9c of the carrier 9. Is inserted from below.
  • the inserted work supporting portion 5a lifts the work 10 placed on the carrier 9 from the lower surface side and supports the work 10 at the printing height position by the above-described screen printing mechanism.
  • the first lifting mechanism 5b is driven again to lower the backup unit 5, and the plurality of lifted works 10 are returned to the carrier 9.
  • the first elevating mechanism 5b inserts the plurality of work supporting portions 5a into the plurality of first openings 9c from below by moving the carrier supporting portion supporting the carrier 9 and the backup portion 5 relatively up and down.
  • the plurality of works 10 are lifted from the carrier 9, and function as an elevating unit for returning the lifted works 10 to the carrier 9.
  • the side clamps 7 are provided on the upper surfaces of the pair of holding blocks 4b, respectively.
  • the side clamp 7 is openable and closable by a side clamp driving mechanism 7a (see FIG. 6).
  • the side clamp 7 performs a closing operation to perform printing.
  • the carrier 9 is clamped and supported with both side surfaces sandwiched by the side clamps 7.
  • the printing stage conveyor 6b on which the loaded carrier 9 is placed and the side clamp 7 that clamps the carrier 9 in this state are used as a carrier supporting portion that supports the carrier 9 having the configuration described above on the printing stage 2. It is functioning.
  • a plurality of works 10 are arranged in the work storage section 9b of the carrier 9 supported by the carrier support section with "play". Therefore, the positions of the plurality of works 10 are in a state of being shifted from the normal state. For this reason, in a work mode in which printing is performed collectively by the same mask plate 22 on a plurality of works 10 arranged on the same carrier 9 and simultaneously lifted by the plurality of work supporting portions 5a, the arrangement of the plurality of works 10 is performed. Is aligned with the arrangement of the pattern hole group 22A of the mask plate 22.
  • the screen printing apparatus 1 aligns the carrier 9 with the mask plate 22 and aligns the plurality of works 10 lifted from the carrier 9 by the work supporting portions 5a with the arrangement of the pattern holes 22a of the mask plate 22. It has an alignment unit that executes an alignment process for aligning according to. That is, the arrangement of the plurality of works 10 matches the arrangement of the pattern hole group 22A by the alignment unit.
  • a superposition operation is performed in which the plurality of workpieces 10 aligned in this manner and the pattern hole group 22A of the mask plate 22 are positioned and superimposed.
  • the upper surface of the mask plate 22 superimposed on the plurality of workpieces 10 aligned in this manner causes the print head 13 of the screen printing unit described below to perform a screen printing operation, thereby performing the plurality of workpiece supporters 5a.
  • the paste P is printed on the upper plurality of works 10 from the upper surface of the mask plate 22 by the print head 13 through the pattern holes 22a.
  • the work 10 is stored in the carrier 9 in a correct posture without protruding from the work storage section 9b.
  • a print head support beam 12 supporting a print head 13 is movably arranged in the Y direction via a linear motion guide mechanism 12a.
  • One end of the print head support beam 12 is coupled to one support frame 11 via a print head moving mechanism 14 having the configuration shown in FIG.
  • the print head moving mechanism 14 has a configuration in which a nut portion 14c to which a feed screw 14b rotationally driven by a print head motor 14a is screwed is coupled to the print head support beam 12.
  • the print head 13 has a pair of rear squeegees 13b and front squeegees 13c extending downward from the print head support beam 12.
  • the squeegee driving unit 13a provided on the upper surface of the print head support beam 12
  • one of the rear squeegee 13b and the front squeegee 13c descends according to the squeezing direction and slides on the mask plate 22.
  • the mask plate 22 has a pattern hole 22a for printing corresponding to a print pattern (see FIG. 15) on the work 10 to be printed.
  • a printing paste P is supplied to the upper surface of the mask plate 22.
  • the plurality of works 10 placed on the carrier 9 are lifted and supported by the work supporting portion 5a, and the work 10 to be printed is brought into contact with the lower surface of the mask plate 22.
  • a moving member 17 to which a first camera 18, a second camera 19, and a work pickup unit 20 are attached is disposed between the upper surface of the printing stage 2 and the lower surface of the mask plate 22.
  • a moving mechanism (corresponding to the camera moving mechanism 16 shown in FIG. 6) for moving the moving member 17 along the X direction and the Y direction is provided.
  • This moving mechanism includes a camera X-axis moving mechanism 16X and a camera Y-axis moving mechanism 16Y.
  • the camera X-axis moving mechanism 16X moves the moving member 17 in the X direction along the camera X-axis beam 15.
  • the camera Y-axis moving mechanism 16Y moves the camera X-axis beam 15 along the Y direction.
  • the above-described moving mechanism has the moving member 17 that moves in the space between the mask plate 22 and the printing stage conveyor 6b that is a carrier support, and the first camera 18, the second camera 19, and the work pickup 20 Is mounted on the moving member 17.
  • the camera X-axis moving mechanism 16X includes a camera X-axis motor 15a shown in FIG. 1, a feed screw 15b, and a nut 15d shown in FIG.
  • the moving member 17 coupled to the nut 15d moves along the X direction.
  • the illustration of the camera X-axis motor 15a is omitted.
  • the camera Y-axis moving mechanism 16Y includes a camera Y-axis motor 16a, a feed screw 16b, and a nut 16c coupled to the camera X-axis beam 15.
  • the camera Y-axis motor 16a By driving the camera Y-axis motor 16a, the camera X-axis beam 15 coupled to the nut 16c moves along the Y direction.
  • the first camera 18 is arranged with the imaging direction facing downward, and images the carrier 9 and the work 10 held by the carrier 9 on the printing stage 2.
  • the recognition marks 9a formed on the carrier 9 and the recognition marks 10m formed on the work 10 are the imaging targets.
  • the carrier 9 has a function of holding the work 10 and carrying it into the printing stage 2, and holding the work 10 after printing in the same manner and carrying it out. Therefore, it is necessary to position the carrier 9 with respect to the mask plate 22 so that the work 10 after printing can be correctly stored.
  • the carrier 9 is aligned with the mask plate 22 based on the position recognition result of the recognition mark 9a formed on the carrier 9.
  • the position of the carrier 9 is detected by recognizing the image obtained by the first camera 18 by the processing function of the carrier recognizing unit 33 (see FIG. 6). Therefore, the first camera 18 and the carrier recognizing unit 33 correspond to a carrier position detecting unit that detects a displacement of the loaded carrier 9. The image obtained by the imaging by the first camera 18 is recognized and processed by the processing function of the work recognition unit 34 (see FIG. 6). The position of 10a is detected.
  • the first camera 18 and the work recognizing unit 34 detect the positions of the plurality of works 10 on the plurality of work supporting units 5a by capturing the images with the first camera 18 and detect the ideal positions of the respective works 10 ( It corresponds to a work position detection unit that detects a positional deviation from a (set position to be arranged).
  • the second camera 19 is arranged with the imaging direction facing upward, and takes an image of the mask recognition mark 22m (see FIG. 15) formed on the mask plate 22.
  • the image obtained by this imaging is subjected to recognition processing by the processing function of the mask recognition unit 32 (see FIG. 6), whereby the position of the mask center MC and the position of the pattern hole 22a on the mask plate 22 are recognized (see FIG. 15). Therefore, the second camera 19 and the mask recognition unit 32 correspond to a mask position detection unit that detects a position by imaging the mask plate 22 with the second camera 19.
  • the mask recognition mark 22m is formed corresponding to the recognition mark 9a on the carrier 9. When aligning the carrier 9 with the mask plate 22, the position of the mask recognition mark 22m is referred to.
  • the work pickup unit 20 is a suction holding tool having a function of holding the work 10 by vacuum suction, and in the present embodiment, at least one of the plurality of works 10 supported by the work support unit 5a is attached to the work support unit 5a. Used to pick up from 5a. Accordingly, it is possible to perform a work alignment operation in which the work 10 placed in a misaligned state in the work supporting portion 5a is temporarily picked up and the work 10 in which the misalignment is corrected is returned to the work supporting portion 5a. ing.
  • This work alignment operation corrects the detected position shift state of the work 10 picked up by the work pickup unit 20 based on the position (position shift state) of the work 10 detected by the work position detection unit described above.
  • the printing stage 2 having the work supporting portion 5a is relatively moved in the horizontal direction by the printing stage table 3xy ⁇ by a correction amount necessary to perform the correction.
  • the printing stage table 3xy ⁇ for relatively moving the printing stage 2 in the horizontal direction relatively moves the printing stage 2 in the horizontal direction.
  • the printing stage table 3xy ⁇ functions as a work alignment mechanism that relatively moves the work pickup unit 20 and the work support unit 5a in the XY ⁇ direction based on the position shift of the work 10 detected by the work position detection unit described above. I have. Further, the printing stage table 3xy ⁇ moves the mask plate 22 and the carrier 9 supported by the carrier support described below in the XY ⁇ direction based on the displacement of the carrier 9 detected by the carrier position detector. It functions as a carrier alignment mechanism for moving the carrier.
  • the aligning unit aligns the carrier 9 with respect to the mask plate 22 and aligns the plurality of works 10 lifted by the work supporting unit 5a according to the arrangement of the pattern holes 22a of the mask plate 22.
  • the first camera 18 and the work pickup unit 20 are moved in the space between the mask plate 22 and the carrier support unit (the printing stage conveyor 6b and the side clamp 7) provided on the printing stage 2. It is necessary.
  • the camera moving mechanism 16 (see FIG. 6) including the camera X-axis moving mechanism 16X and the camera Y-axis moving mechanism 16Y described above moves the first camera 18 and the work pickup unit 20 between the mask plate 22 and the carrier supporting unit. It is a moving mechanism for moving the object.
  • a configuration is provided in which the moving member 17 is moved by the camera X-axis moving mechanism 16X and the camera Y-axis moving mechanism 16Y in the space between the mask plate 22 and the carrier support.
  • the camera 18 and the work pickup unit 20 are mounted on the moving member 17.
  • the backup unit 5 and the mask plate 22 are relatively moved. It includes a printing stage table 3xy ⁇ which is an alignment mechanism constituting the stage moving mechanism 3.
  • this alignment mechanism functions as the above-described work alignment mechanism. That is, here, the alignment mechanism also serves as the carrier alignment mechanism and the work alignment mechanism.
  • the existing mechanism is effectively used by using the print stage table 3xy ⁇ , which is the existing alignment mechanism for moving the print stage 2, as the carrier alignment mechanism and the work alignment mechanism having the above-described functions. It is possible to reduce equipment costs by utilizing it.
  • Examples of the configuration of the carrier alignment mechanism and the work alignment mechanism having the above-described functions include, in addition to the configuration example shown in this embodiment, a configuration example shown in this embodiment by appropriately adding a new function to an existing mechanism. Various variations realizing the same function as are possible.
  • an XY table of a print stage table 3xy ⁇ is used for the XY directions, and a print stage table is used for the ⁇ direction.
  • a 3xy ⁇ ⁇ table is used.
  • a moving mechanism (see the camera moving mechanism 16 shown in FIG. 6) that moves the moving member 17 is used in the XY directions, and the work pickup unit 20 is newly provided in the ⁇ direction.
  • the provided ⁇ rotation mechanism is used.
  • a moving mechanism (camera moving mechanism 16) that moves the moving member 17 is used in the XY direction in the same manner as in the configuration example (2), and the ⁇ table of the printing stage table 3xy ⁇ is used in the ⁇ direction.
  • the configuration example (4) the XY table of the printing stage table 3xy ⁇ is used for the XY directions as in the configuration example (1), and the ⁇ rotation mechanism newly provided in the work pickup unit 20 is used for the ⁇ direction. .
  • the plurality of work supporting portions 5a formed on the upper surface of the backup portion 5 are provided with suction paths 5c opened on the upper surface.
  • the suction path 5c contacts the lower surface of the work 10.
  • the suction paths 5c corresponding to the respective work storage sections 9b are connected to a negative pressure generation source 24 via a control valve 23.
  • the control valve 23 has a function of an on / off valve for connecting / disconnecting the suction circuit 25 between the negative pressure generating source 24 and the suction path 5c and a function as a vacuum breaking valve for introducing the atmosphere into the suction circuit 25 in a negative pressure state. ing.
  • the control unit 30 By individually controlling the control valve 23 by the control unit 30 (FIG. 6), it is possible to select introduction and interruption of the negative pressure to the suction path 5 c for each of the plurality of work storage units 9 b provided in the carrier 9. It has become.
  • the valve 23 and the negative pressure generation source 24 constitute a work suction unit that each of the work support units 5a has and holds the work 10 at a negative pressure.
  • the work suction unit is configured to be capable of selecting introduction and cutoff of a negative pressure for each work support unit 5a.
  • At least the work pickup unit 20 lifts the work 10 of the work support unit 5a from which the negative pressure has been cut off. With such a configuration, an arbitrary one of the plurality of works 10 placed and carried in each of the work storage sections 9b of the same carrier 9 and further collectively lifted by the work support section 5a is removed.
  • the work pick-up unit 20 lifts the work support unit 5a and returns the work support unit 5a to the work support unit 5a by suction.
  • the control unit 30 includes a print head 13, a print head moving mechanism 14, a first camera 18, a second camera 19, a work pickup unit 20, a camera moving mechanism 16, a control valve 23, and a first lifting / lowering unit.
  • the mechanism 5b, the second elevating mechanism 3z, the printing stage table 3xy ⁇ , the side clamp driving mechanism 7a, the printing stage conveyor 6b, the loading conveyor 6a, and the unloading conveyor 6c are connected.
  • the control unit 30 has an alignment processing unit 31, a mask recognition unit 32, a carrier recognition unit 33, a work recognition unit 34, and a print processing unit 35 as internal processing functions. Further, the control unit 30 has a storage unit 36 for storing information necessary for control processing by these.
  • the storage unit 36 has a mask pattern position storage unit 36a.
  • the mask pattern position storage unit 36a stores the position information of the mask recognition marks 22m and the pattern holes 22a on the mask plate 22.
  • the alignment processing unit 31 aligns the carrier 9 with the mask plate 22, and transfers the plurality of works 10 arranged on the carrier 9 held by the carrier holding unit provided on the printing stage 2 to the mask plate 22.
  • a process for correctly aligning the holes in accordance with the arrangement of the pattern holes 22a is performed.
  • the mask recognition section 32 detects the position of the mask recognition mark 22m and the pattern hole 22a by performing recognition processing on an image obtained by imaging with the second camera 19.
  • the carrier recognition unit 33 detects the position of the carrier 9 by performing a recognition process on an image obtained by imaging with the first camera 18.
  • the work recognition unit 34 detects the position of the work 10 placed on the carrier 9 by performing recognition processing on an image obtained by imaging with the first camera 18.
  • the print stage table 3xy ⁇ is driven based on the positional deviation of the work 10 detected by the work recognition unit 34 while the work 10 is lifted by the work pickup unit 20, thereby performing pickup.
  • a work alignment operation of moving the work supporting portion 5a of the backup unit 5 relative to the completed work 10 is executed.
  • the print processing unit 35 controls each unit of the screen printing apparatus 1 to perform screen printing on the plurality of works 10 held in the work supporting unit 5a.
  • the print processing unit 35 controls the control valve 23, the first lifting mechanism 5b, the second lifting mechanism 3z, the printing stage table 3xy ⁇ , the side clamp driving mechanism 7a, the printing stage conveyor 6b, the loading conveyor 6a, and the unloading conveyor 6c. Performs the following processes.
  • the carrier 9 on which the work 10 to be printed is arranged is carried into the printing stage 2.
  • the carrier 9 is held by the carrier supporting unit including the printing stage conveyor 6 b and the side clamp 7.
  • the plurality of works 10 lifted from the carrier 9 by the work supporting unit 5a of the backup unit 5 are superimposed on the mask plate 22.
  • the print head 13 and the print head moving mechanism 14 print the paste P on the work 10.
  • the screen printed carrier 9 is carried out. Each of these operations is performed.
  • a screen printing method executed by the screen printing apparatus 1 will be described with reference to the processing flow shown in FIG.
  • a mask recognition process is performed. That is, as shown in FIG. 8, the second camera 19 is moved by the camera moving mechanism 16 below the mask plate 22 (arrow b), and the mask recognition mark 22m (see FIG. 15) of the mask plate 22 is moved to the second position. An image is taken by the camera 19.
  • the position of the mask plate 22 and the arrangement of the pattern holes 22a are detected by recognizing the image obtained by the imaging by the mask recognition unit 32, and the detection result is stored in the mask pattern position storage unit 36a of the storage unit 36. .
  • the position coordinates of the mask center MC (see FIG. 15) of the mask plate 22 and the direction of the mask plate 22 in the ⁇ direction are detected and stored.
  • position correction of the carrier 9 and position adjustment of the work 10 are performed based on the position information of the mask plate 22 stored in the mask pattern position storage unit 36a.
  • the carrier is carried in (ST1).
  • the printing stage moving mechanism 3 is driven to move the printing stage 2 to the upstream side (arrow c), and the printing stage conveyor 6b is connected to the loading conveyor 6a.
  • the print stage conveyor 6b and the carry-in conveyor 6a are driven to transfer the carrier 9 on which the work 10 is placed and which has been in a standby state on the carry-in conveyor 6a in advance to the print stage conveyor 6b (arrow d).
  • the printing stage moving mechanism 3 is driven to move the printing stage 2 to the printing position at the center of the mask plate 22 (arrow e), and the carrier 9 on which the work 10 is placed is moved to the mask plate 22.
  • the carrier carrying-in step a plurality of first openings 9c vertically penetrating below the mask plate 22 in which the plurality of pattern holes 22a for printing are formed, and cover the respective first openings 9c.
  • Carrier 9 on which a plurality of works 10 are arranged as described above (see FIG. 4).
  • carrier holding is executed (ST2).
  • the carrier 9 is positioned in the transport direction by operating a carrier positioning mechanism (not shown) such as a transport stopper provided on the printing stage conveyor 6b, and the side clamp drive mechanism 7a (see FIG. 6) is driven.
  • the carrier 9 is clamped by the side clamp 7.
  • the carrier 9 is in a state of being held by the carrier supporting portion including the printing stage conveyor 6 b and the side clamp 7.
  • FIG. 12A shows the carrier 9 arranged in this manner.
  • the carrier 9 in which the work 10 is arranged so as to cover the first opening 9 c in the work storage portion 9 b of the carrier 9 is located above the backup portion 5. positioned.
  • Each work supporting portion 5a is located below the first opening 9c in the carrier 9.
  • the backup unit 5 is raised with respect to the carrier 9 whose position is held by the printing stage 2 (ST3). That is, as shown in FIGS. 11 and 12B, the first lifting mechanism 5b is driven to raise the backup portion 5 (backup portion rising: arrows f and h), and the plurality of first openings 9c (see FIG. 4). ) Are inserted from below. Thus, the plurality of works 10 are supported by the plurality of work supporting portions 5a and are lifted from the carrier 9 (lifting step: arrow i).
  • work suction is performed (ST4). That is, the negative pressure generating source 24 is driven to vacuum-suction from the suction path 5c (arrow j), thereby restraining the work 10 on the upper surface of the work supporting portion 5a by suction.
  • This alignment step is performed as follows. First, carrier position detection is performed (ST5). That is, the first camera 18 captures an image of the recognition mark 9a (see FIG. 3) of the carrier 9 held by the carrier supporting unit including the printing stage conveyor 6b and the side clamp 7. That is, as shown in FIG. 12B, the first camera 18 is moved above the carrier 9 (arrow k1), and an image of the recognition mark 9a (see FIG. 3) formed at the diagonal position of the carrier 9 is taken. Then, the image obtained by the imaging is recognized by the carrier recognition unit 33 to detect the position of the carrier 9.
  • carrier position detection is performed (ST5). That is, the first camera 18 captures an image of the recognition mark 9a (see FIG. 3) of the carrier 9 held by the carrier supporting unit including the printing stage conveyor 6b and the side clamp 7. That is, as shown in FIG. 12B, the first camera 18 is moved above the carrier 9 (arrow k1), and an image of the recognition mark 9a (see FIG. 3) formed at the diagonal position of the carrier 9 is taken. The
  • step 6 work position detection step. That is, as shown in FIG. 11, the camera moving mechanism 16 is driven to move the moving member 17 along the camera X-axis beam 15. Thereby, as shown in FIG. 12C, the first camera 18 is sequentially moved above the plurality of works 10 lifted by the plurality of work support portions 5a (arrow k2), and the two cameras formed on the work 10 are moved. An image of the recognition mark 10m (see FIG. 4) is taken. The image obtained by this imaging is subjected to recognition processing by the work recognizing unit 34, thereby detecting the position shift state of each of the works 10.
  • Carrier position correction is performed (ST7).
  • the position of the carrier 9 is corrected so that the positional relationship between the recognition mark 9a of the carrier 9 obtained by the carrier position detection in (ST5) and the mask recognition mark 22m of the mask plate 22 matches.
  • This position correction is performed by driving the print stage table 3xy ⁇ of the print stage moving mechanism 3 (arrow n1), as shown in FIG. 13A.
  • the carrier position is detected in (ST5) and the carrier position is corrected in (ST7) after lifting the work 10 by raising the backup unit in (ST3). Carrier position detection and carrier position correction may be performed.
  • FIG. 13B illustrates a work position correction (work alignment operation) that is executed after the work position detection is completed for the work 10 held in all of the plurality of work support units 5a of the backup unit 5. That is, in response to the detection result of the work position detection step shown in (ST6), the work position correction amount calculation described below is executed (ST8). Then, based on the result of the work position correction amount calculation, a work position correction (work alignment operation) (ST9) in which the arrangement of the works 10 in the backup unit 5 matches the arrangement of the pattern holes 22a in the mask plate 22 is performed.
  • the work pickup unit 20 picks up the work 10 from the work support unit 5a (arrow m), and calculates the work position correction amount of the work 10 based on the calculation result.
  • the position in the XY ⁇ direction is corrected (arrow n2) (position correcting step).
  • a placing step of placing and returning the work 10 picked up by the work pickup unit 20 to the work supporting unit 5a is performed.
  • FIG. 15A shows a plane of the mask plate 22.
  • the mask plate 22 is provided with a mask center MC indicating the center position of the mask surface and a pair of mask recognition marks 22m serving as a reference for the position on the mask plate 22.
  • a plurality of sets of pattern holes 22 a corresponding to the arrangement pattern of the electrodes 10 a in the work 10 to be printed are formed in the mask plate 22 in accordance with the number of the works 10 in the carrier 9.
  • a workpiece outer shape 10 * indicated by a broken line frame in FIG. 15A shows the outer shape of the workpiece 10 when the electrode 10a of the workpiece 10 is accurately aligned with the pattern hole 22a, and the pattern center 10 * c is The center of the workpiece outer shape 10 * is shown.
  • These mask pattern data are obtained in advance in the preparation stage before the operation is started, and are stored in the mask pattern position storage unit 36a.
  • FIG. 15B shows the result of executing the work position detection in this alignment step. That is, in the position detection of the work 10 by the first camera 18 shown in FIG. 12C, each of the works 10 is in a different state of displacement depending on the respective arrangement state on the carrier 9.
  • the center position of the work center 10c indicating the center of each work 10 is shifted with respect to the pattern center 10 * c, and the center of the work 10 is shifted in the plane.
  • a rotational position shift ⁇ indicating a shift angle of the work reference direction indicating the direction of the work 10 with respect to the mask reference direction is detected.
  • the work in the carrier 9 described above is required. It is necessary to perform an alignment operation to correct the center position shift and the rotational position shift of the ten.
  • the position correction amount required to correct the center position shift and the rotational position shift is individually obtained for each work 10 by the arithmetic processing function of the alignment processing unit 31.
  • ⁇ Circle around (c) ⁇ in FIG. 15 shows the arrangement state of the works 10 after the alignment processing in which the positions of the works 10 are individually corrected by applying the work position correction amounts thus obtained. That is, in this state, the arrangement of the workpieces 10 matches the pattern holes 22a, the workpiece center 10c of the workpiece 10 matches the pattern center 10 * c of the mask plate 22, and the distance between the workpieces 10 and the workpiece 10 And the mask reference direction of the mask plate 22 match.
  • An alignment state inspection is performed (ST10).
  • the alignment state of the workpieces 10 is inspected, that is, set, by sequentially imaging all the workpieces 10 placed and returned to the workpiece supporter 5a after the alignment process while moving the first camera 18. The amount of displacement from the position is detected.
  • alignment is performed. That is, the printing stage 2 provided with the work supporting portion 5a and the mask plate 22 are relatively moved to align the plurality of aligned works 10 and the mask plate 22, and the works 10 are overlaid on the mask plate 22 (alignment). Process). That is, as shown in FIG. 16, the printing stage moving mechanism 3 is driven to position the printing stage 2 in which the aligned works 10 are placed on the work supporting portion 5 a with respect to the mask plate 22.
  • the horizontal position of the printing stage 2 is adjusted by the printing stage table 3xy ⁇ . Thereby, the electrode 10a of the work 10 is aligned with the pattern hole 22a of the mask plate 22. Thereafter, the printing stage 2 is raised by the second lifting mechanism 3z (arrow o), and the work 10 is brought into contact with the lower surface of the mask plate 22.
  • screen printing is performed. That is, by moving the print head 13 on the upper surface of the mask plate 22, the paste P is printed on the plurality of aligned works 10 from the upper surface of the mask plate 22 through the pattern holes 22a (printing step).
  • a paste filling step of filling the pattern holes 22a with a paste and a plate separation for separating the work 10 from the mask plate 22 are executed (print head movement (paste filling step): ST15).
  • the print head 13 is positioned at a predetermined squeegee start position, and the squeegee driving unit 13a is driven to drive one of the two rear squeegees 13b and the front squeegee 13c (here In the example shown, the front squeegee 13c) is lowered with respect to the upper surface of the mask plate 22 to which the paste P is supplied (arrow p), and the lower end of the front squeegee 13c is slid on the mask plate 22.
  • the work 10 to be printed is in contact with the lower surface of the mask plate 22 in a state where the work 10 is received by the work supporting portion 5a.
  • the print head 13 is moved in the squeezing direction together with the print head support beam 12 as shown in FIG. 17B (arrow q).
  • the front squeegee 13 c slides while filling the pattern holes 22 a formed in the mask plate 22 with the front squeegee 13 c on the upper surface of the mask plate 22, and prints the paste P on the electrodes 10 a of the work 10.
  • plate separation for lowering the printing stage 2 is executed (ST16). That is, as shown in FIG. 18, the second lifting mechanism 3z of the printing stage moving mechanism 3 is driven to lower the printing stage 2 (arrow r). As a result, plate separation is performed to separate the printing surface on the upper surface of the work 10 from the lower surface of the mask plate 22. Then, the suction of the work 10 to the work supporting portion 5a is released by releasing the vacuum suction from the suction passage 5c in the work supporting portion 5a (ST17).
  • the backup unit 5 is lowered (arrow s) to release the lower receiving state of the work 10 (backup unit lowering) (ST18). That is, as shown in FIG. 19, the plurality of works 10 are returned to the work storage 9b of the carrier 9 by pulling out the plurality of work supports 5a from the plurality of first openings 9c (return step). In this return step, since the carrier 9 is aligned with the mask plate 22, the work 10 is correctly stored in the work storage section 9b. Next, the carrier holding is released by releasing the clamp of the carrier 9 by the side clamp 7 (ST19). As a result, the carrier 9 is held by the printing stage conveyor 6b.
  • the carrier is carried out (ST20). That is, as shown in FIG. 20, the printing stage moving mechanism 3 is driven to move the printing stage 2 to the downstream side (arrow t), and the printing stage conveyor 6b and the unloading conveyor 6c are connected. By driving the printing stage conveyor 6b and the unloading conveyor 6c in this state, the carrier 9 on which the plurality of works 10 after printing are arranged is transferred from the printing stage conveyor 6b to the unloading conveyor 6c (arrow u). Thus, the screen printing process for the carrier 9 on which the plurality of works 10 are arranged ends.
  • This alignment step includes a work position detection step (ST6), a work pickup step, a position correction step, and a placement step.
  • the work position detection step the positions of the plurality of works 10 on the plurality of work support portions 5a are detected, and the positional deviation from the set position of each work 10 is obtained.
  • the work pick-up step at least one work 10 that has completed the work position detection step is picked up by the work pick-up unit 20 from the work supporting unit 5a.
  • the position correcting step the work pickup unit 20 and the work supporting unit 5a are relatively moved based on the positional deviation of the work 10 detected in the work position detecting step.
  • the placement step after the position correction step, the work 10 picked up by the work pickup unit 20 is placed on the work supporting unit 5a.
  • the alignment step it is determined whether or not the displacement in the displacement detection step is within an allowable range, and the work pick-up step and the position correction step are skipped for the work 10 within the allowable range. As a result, it is possible to prevent a decrease in productivity due to performing an unnecessary position correction operation on the work 10 having a good positional deviation state.
  • the position deviation detection step for inspecting the alignment state of the work is executed again, and when the position deviation of all the works 10 is within the allowable range and it is determined that the work is acceptable, the processing shifts to the alignment step. If it is determined that the work is not acceptable, the alignment process is performed on the work 10 that is out of the allowable range. Accordingly, it is possible to limit the execution of the alignment operation for correcting the positional deviation to a rejected work whose positional deviation exceeds the allowable range.
  • a misalignment detection step for inspecting a work alignment state is performed after the alignment step, and based on the positions of the plurality of works 10 obtained in the misalignment detection step.
  • the work supporting portion 5a and the mask plate 22 are relatively moved. Thus, it is possible to prevent printing from being performed while the alignment state is poor, and to secure print quality.
  • the plurality of works 10 lifted by the plurality of work supporting portions 5a below the mask plate 22 are held.
  • the carrier 9 is positioned with respect to the mask plate 22 in which the pattern holes 22a for printing are formed, and the plurality of works 10 on the work supporting portion 5a are aligned according to the arrangement of the pattern holes 22a.
  • an alignment for relatively moving the work supporting portion 5a and the mask plate 22 is performed so that the aligned plurality of works 10 and the mask plate 22 are aligned.
  • the paste P is printed on the plurality of works 10 aligned from the upper surface of the mask plate 22 via the pattern holes 22a (the group of pattern holes 22A).
  • the work supporting portion 5a is lowered to return the plurality of works 10 to the carrier 9 in an aligned state.
  • the displacement is corrected for each individual work 10 and a ski requiring the most work time in the printing work.
  • the jing work can be performed on a plurality of works 10 at a time. Accordingly, high productivity can be secured while correcting the positional displacement of the work 10 placed on the carrier 9 and securing printing accuracy. Further, since the position of the carrier 9 on which the work 10 is placed is recognized and aligned with the mask plate 22, even if the positions of the individual carriers carried in vary, the work after printing may be changed. When returning to the carrier again, the work can be correctly arranged on the carrier.
  • the work 10 is lifted from the carrier 9 during printing, there are the following advantages as compared with the related art in which printing is performed while placed on the carrier.
  • the work 10 is completely lifted from the carrier 9, such a gap does not occur.
  • a dedicated movement mechanism for moving the work pickup unit 20 may be provided, and the movement mechanism dedicated to the work pickup unit 20 may be driven alone, or both the print stage table 3xy ⁇ may function as the above-described alignment mechanism.
  • the work pickup unit 20 may be attached to the cleaning mechanism. In this case, the cleaning mechanism performs all or a part of the function as the alignment mechanism.
  • FIG. 21 shows a carrier 9A and a backup unit 5A used in this modification.
  • the carrier 9A is used by arranging a plurality of works 10 and supporting a pair of opposing edges from below on the printing stage conveyor 6b as a carrier support.
  • the work 10 is the same as that shown in FIG. 4, and a plurality of connection electrodes 10a and a pair of position recognition marks 10m are formed on the upper surface.
  • a plurality of recognition marks 9a for position recognition and a plurality of work storage portions 9b for arranging the works 10 are formed in a predetermined arrangement on the upper surface of the carrier 9A, similarly to the carrier 9.
  • the work accommodating portion 9b has the same configuration as that shown in FIG. 4, and the work receiving portion 9b contacts the lower surface of the work 10 in a state where the work 10 is accommodated and arranged on the periphery of the opening where the work accommodating portion 9b is opened on the upper surface.
  • a portion 9d is provided.
  • the work receiving portion 9d is provided with a first opening 9c vertically penetrating the carrier 9.
  • One work 10 is arranged in each work storage portion 9b in a state of the work 10 covering the first opening 9c.
  • a plurality of second openings 9e are formed in the carrier 9A so as to penetrate the carrier 9A in the up-down direction so as to sandwich the respective work storage portions 9b from both sides.
  • the carrier 9A having the above configuration is used in combination with the backup unit 5A.
  • the backup unit 5A is moved up and down by the first elevating mechanism 5b, as in the case of the backup unit 5 in FIGS. 1 and 2 (arrow v).
  • a work supporting portion 5a having the same configuration as that provided on the upper surface of the backup portion 5 in FIG. 5 is provided corresponding to the arrangement of the work storage portions 9b in the carrier 9A.
  • the work supporting portion 5a is provided with a suction path 5c as in FIG. 5, so that the work 10 placed on the upper surface of the work supporting portion 5a can be sucked and held.
  • a mask plate supporting portion 5d is provided corresponding to the arrangement of the second opening 9e in the carrier 9A.
  • the mask plate supporting portion 5d is arranged at a position penetrating at least one second opening 9e vertically penetrating the carrier 9, and is formed in a shape and size capable of vertically penetrating the second opening 9e. I have.
  • the mask plate support 5d has a function of supporting a part of the lower surface of the mask plate 22 in the screen printing operation.
  • the height of the mask plate supporting portion 5d in the backup portion 5A which is a lifting base is higher than the height of the upper surface of the plurality of work supporting portions 5a by an amount corresponding to the thickness t of the work 10.
  • the difference ⁇ H is set (see FIG. 22A). That is, the screen printing apparatus 1 according to the present embodiment has at least one mask plate supporting portion 5d that supports at least a part of the lower surface of the mask plate 22 when the print head 13 performs printing on the work 10. .
  • FIG. 22A shows a state in which the carrier 9 in which the work 10 is placed in the work storage portion 9b so as to close the first opening 9c is positioned above the backup portion 5A.
  • the work 10 covering the first opening 9c is located above each of the work support portions 5a on the backup portion 5A.
  • a second opening 9e is located above the mask plate support 5d.
  • FIG. 22B shows a state where the backup unit 5A is raised (arrow x).
  • the work 10 is lifted by the work supporting portion 5a inserted through the first opening 9c, and the mask plate supporting portion 5d projects upward through the second opening 9e. That is, the mask plate supporting portion 5d and the plurality of work supporting portions 5a are mounted on the backup portion 5A as an elevating base which moves up and down relatively to the carrier supporting portion.
  • the plurality of work supports 5a lift the plurality of works 10 from the carrier 9A, the upper surface of the mask plate support 5d protrudes higher than the upper surface of the carrier 9A.
  • FIG. 22C shows the support state of the mask plate 22 when performing the printing operation collectively by the front squeegee 13c of the print head 13 on the plurality of works 10 lifted by the plurality of work supporting portions 5a.
  • the work 10 abuts on the lower surface of the mask plate 22, and at least during the printing step, the lower surface 22b of the mask plate 22 is supported by the mask plate support 5d.
  • the screen printing apparatus and the screen printing method of the present disclosure have an effect that a work after printing can be arranged on a carrier with correct positional accuracy, and are useful in the field of screen printing for printing a paste on a work such as a substrate. .
PCT/JP2019/021447 2018-07-04 2019-05-30 スクリーン印刷装置およびスクリーン印刷方法 WO2020008761A1 (ja)

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JP2020528722A JP7203307B2 (ja) 2018-07-04 2019-05-30 スクリーン印刷装置およびスクリーン印刷方法
CN201980042857.0A CN112334313B (zh) 2018-07-04 2019-05-30 丝网印刷装置以及丝网印刷方法
DE112019003351.4T DE112019003351T5 (de) 2018-07-04 2019-05-30 Schablonendruckvorrichtung und schablonendruckverfahren

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CN115817000A (zh) * 2023-01-10 2023-03-21 西北电子装备技术研究所(中国电子科技集团公司第二研究所) 一种生瓷片带框孔壁金属化的内外台机构
KR102528910B1 (ko) * 2022-07-27 2023-05-03 고혜영 스크린프린터의 일괄 얼라인장치 및 이를 이용한 일괄 얼라인 방법
JP7307124B2 (ja) 2020-06-22 2023-07-11 エーエスエムピーティー・エスエムティー・シンガポール・ピーティーイー・リミテッド ワークピースの位置合わせと印刷
EP4299319A3 (de) * 2022-06-23 2024-03-06 ASMPT SMT Singapore Pte. Ltd Ausrichtung vereinzelter substrate

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EP4299319A3 (de) * 2022-06-23 2024-03-06 ASMPT SMT Singapore Pte. Ltd Ausrichtung vereinzelter substrate
KR102528910B1 (ko) * 2022-07-27 2023-05-03 고혜영 스크린프린터의 일괄 얼라인장치 및 이를 이용한 일괄 얼라인 방법
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CN112334313B (zh) 2023-06-27

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