WO2019181511A1 - Élément de contact et procédé de fabrication d'un élément de contact - Google Patents

Élément de contact et procédé de fabrication d'un élément de contact Download PDF

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Publication number
WO2019181511A1
WO2019181511A1 PCT/JP2019/008888 JP2019008888W WO2019181511A1 WO 2019181511 A1 WO2019181511 A1 WO 2019181511A1 JP 2019008888 W JP2019008888 W JP 2019008888W WO 2019181511 A1 WO2019181511 A1 WO 2019181511A1
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WO
WIPO (PCT)
Prior art keywords
contact
base metal
base
metal
manufacturing
Prior art date
Application number
PCT/JP2019/008888
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English (en)
Japanese (ja)
Inventor
文彦 草野
卓 関谷
悠馬 横井
幸司 比嘉
石川　寛
卓也 河本
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2020508171A priority Critical patent/JP6952872B2/ja
Priority to KR1020207026115A priority patent/KR102420675B1/ko
Priority to CN201980019379.1A priority patent/CN111868865B/zh
Priority to TW108109044A priority patent/TWI705865B/zh
Publication of WO2019181511A1 publication Critical patent/WO2019181511A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/06—Contacts characterised by the shape or structure of the contact-making surface, e.g. grooved
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
    • H01H11/04—Apparatus or processes specially adapted for the manufacture of electric switches of switch contacts
    • H01H11/06—Fixing of contacts to carrier ; Fixing of contacts to insulating carrier

Definitions

  • This invention relates to the contactor with which contactors, such as a circuit breaker and a switch, are provided, and the manufacturing method of a contactor.
  • Contactors such as circuit breakers and switches are provided with movable contacts and fixed contacts.
  • Each of the movable contact and the fixed contact is configured by a contact and a base metal on which the contact is provided.
  • brazing method a resistance welding method, and the like as a method of joining the contact to the base metal.
  • a flux for activating the metal interface is necessary, and a cleaning step after joining the contact to the base metal is necessary.
  • the contact and the base metal may be softened.
  • Patent Document 1 discloses a method for manufacturing a contact using an ultrasonic bonding method.
  • a plurality of grooves are provided on the contact-side surface of the base metal to prevent slippage between the contact point and the base metal when ultrasonic vibration is applied.
  • the end of the anvil on the base metal side is subjected to uneven knurling.
  • an uneven knurling process is applied to the end of the horn on the contact side. Yes.
  • the present invention has been made in view of the above, and an object of the present invention is to obtain a contactor capable of suppressing progress of wear of a contact connected to a base metal by ultrasonic welding.
  • the contact according to the present invention includes a base metal and a contact fixed to the base metal.
  • the contact is provided between the base metal and the contact, and includes a conductive member having a hardness lower than the contact hardness and capable of plastic flow.
  • the outer peripheral surface of the base metal is recessed in a direction perpendicular to the direction in which the base metal, the conductive member, and the contact are arranged, and a recess into which a jig provided on the movable part of the ultrasonic welding machine is fitted is formed. .
  • FIG. 1 is a diagram showing a configuration of a contact according to an embodiment of the present invention.
  • FIG. 2 is a diagram showing details of the configuration of the movable contact shown in FIG.
  • FIG. 1 shows a contactor 100 including a contact 1 according to an embodiment of the present invention.
  • the contactor 100 is a low-voltage or high-voltage circuit breaker or switch having a function of opening a contact when an overcurrent is generated in the distribution line.
  • the contact 1 includes a fixed contact 11, a movable contact 12, and a peeling mechanism 2.
  • the movable contact 12 is physically separated from the fixed contact 11 by the peeling mechanism 2 when an electric current of a certain level or more flows in the electric circuit in which the contactor 100 is provided. Thereby, the electric current which flows into the electric circuit where the contact 1 is connected is interrupted
  • the fixed contact 11 includes a rectangular first base 31 that is a conductive fixed piece fixed to a housing (not shown) constituting the contactor 100, a first contact 41 that is a fixed contact, A first intermediate member 61 that is a conductive member provided between the base 31 and the first contact 41 is provided.
  • the arrangement direction of the first base metal 31, the first intermediate member 61, and the first contact 41 is the X axis direction
  • the direction orthogonal to the X axis direction is the Y axis direction
  • the X axis A direction orthogonal to both the direction and the Y-axis direction is taken as a Z-axis direction.
  • Examples of the material of the first metal 31 include electrolytic copper and oxygen-free copper.
  • FIG. 1 shows a first end surface 3A, a second end surface 3B, a third end surface 3C, a fourth end surface 3D, and a sixth end surface 3F among the six end surfaces included in the first base metal 31.
  • the first end surface 3A of the first base metal 31 is an end surface of the first base metal 31 on the movable contact 12 side.
  • the second end surface 3B of the first base metal 31 is an end surface on the opposite side of the first base metal 31 from the movable contact 12 side.
  • the third end face 3C of the first base metal 31 is one of the two end faces in the Y-axis direction.
  • the fourth end surface 3D of the first base metal 31 is the other end surface of the two end surfaces in the Y-axis direction.
  • the sixth end surface 3F of the first base metal 31 is a first surface in a direction in which a normal line perpendicular to the surface including the first contact 41, the first intermediate member 61, and the first base metal 31 extends.
  • the direction in which the normal line extends is equal to the Z-axis direction.
  • a fifth end surface is formed on the opposite side of the first base 31 from the first surface.
  • the sixth end surface 3F of the first base 31 is provided with a recess 301 that is recessed from the sixth end surface 3F toward the fifth end surface.
  • a recess similar to the recess 301 is provided on the fifth end face side of the first base 31.
  • the first intermediate member 61 is in contact with the first end face 3A of the first base 31.
  • a conductive material whose hardness is lower than that of the first contact point 41 and capable of plastic flow is used. Examples of this conductive material include silver.
  • the first intermediate member 61 is, for example, a surface of the first contact 41 on the first metal base 31 side, which is separated by the difference in specific gravity of a plurality of materials constituting the first contact 41 when the first contact 41 is manufactured. It is formed by solidifying.
  • the first intermediate member 61 can be formed on the surface of the first contact 41 on the side of the first base metal 31 by a vacuum vapor deposition method, a plating method, or the like in addition to the separation due to the specific gravity difference.
  • the first contact point 41 is fixed to the first base 31 via the first intermediate member 61.
  • a sintered metal having a hardness higher than that of the first intermediate member 61 is used as the material of the first contact 41.
  • the sintered metal include silver tungsten alloy, tungsten carbide, a composite alloy of silver and copper, and silver graphite.
  • the movable contact 12 includes a rectangular second base 32 that is a conductive movable piece that is operated by the peeling mechanism 2, a second contact 42 that is a movable contact, a second base 32, and a second contact 42. 2nd intermediate member 62 which is an electroconductive member provided between these.
  • the same material as the material of the first metal 31 is used for the material of the second metal 32.
  • FIG. 1 shows a first end surface 3A, a second end surface 3B, a third end surface 3C, a fourth end surface 3D, and a fifth end surface 3E among the six end surfaces of the second base metal 32.
  • the first end surface 3A of the second base metal 32 is an end surface of the second base metal 32 on the fixed contact 11 side.
  • the second end face 3 ⁇ / b> B of the second base metal 32 is an end face opposite to the fixed contact 11 side of the second base metal 32.
  • the third end face 3C of the second base metal 32 is one of the two end faces in the Y-axis direction.
  • the fourth end surface 3D of the second base metal 32 is the other end surface of the two end surfaces in the Y-axis direction.
  • the fifth end surface 3E of the second base metal 32 is a first surface in a direction in which a normal line perpendicular to the surface including the second contact 42, the second intermediate member 62, and the second base metal 32 extends.
  • the direction in which the normal line extends is equal to the Z-axis direction.
  • the second base metal 32 is formed with a sixth end surface on the side opposite to the first surface side of the second base metal 32.
  • a recess 300 that is recessed from the fifth end surface 3E toward the sixth end surface is provided.
  • a recess similar to the recess 300 is provided on the sixth end face side of the second base metal 32.
  • the second intermediate member 62 is in contact with the first end face 3A of the second base metal 32.
  • a material similar to the material of the first intermediate member 61 is used as the material of the second intermediate member 62.
  • the second intermediate member 62 is, for example, a surface separated by the specific gravity difference of a plurality of materials constituting the second contact 42 when the second contact 42 is manufactured. It is formed by solidifying.
  • the second intermediate member 62 can be formed on the surface of the second contact 42 on the second metal base 32 side by a vacuum deposition method, a plating method, or the like, in addition to the separation by the specific gravity difference.
  • the second contact 42 is fixed to the second base metal 32 via the second intermediate member 62.
  • the same sintered metal as the material of the first contact 41 is used for the material of the second contact 42.
  • the fixed contact 11 and the movable contact 12 thus configured are arranged in the contactor 100 so that the first contact 41 faces the second contact 42.
  • the contactor 100 shown in FIG. 1 is provided with one fixed contact 11 and one movable contact 12, but the number of each of the fixed contact 11 and the movable contact 12 is limited to one. Instead, a plurality may be used according to the number of distribution lines connected to the contactor 100.
  • FIG. 2 the first side surface of the second metal base 32 viewed from the fifth end surface 3 ⁇ / b> E, the cross section of the second contact 42, the second intermediate member 62 and the second metal base 32, and the second side of the second metal base 32 are shown.
  • the second side surface viewed from the 6 end surface 3F is shown.
  • the cross section is a cross section taken along line AA shown in FIG.
  • Step part 300b and step part 301b are formed in the second base metal 32.
  • the step portion 300b corresponds to a boundary portion between the bottom surface 300a of the recess 300 and the fifth end surface 3E.
  • the step portion 301b corresponds to a boundary portion between the bottom surface 301a of the recess 301 and the sixth end surface 3F.
  • the dimensions of the movable contact 12 are set so as to satisfy t ′ ⁇ 0.5t, b ⁇ L ′ ⁇ L, b ⁇ L ′′ ⁇ L, W ′ ⁇ W, W ′′ ⁇ W.
  • T is the width of the second base metal 32 in the Z-axis direction.
  • t ′ is the width in the Z-axis direction from the bottom surface 300 a of the recess 300 to the bottom surface 301 a of the recess 301.
  • L is the width of the second base metal 32 in the Y-axis direction.
  • L ′ is the width of the bottom surface 300 a of the recess 300 in the Y-axis direction.
  • L ′′ is the width in the Y-axis direction of the bottom surface 301 a of the recess 301.
  • W is the width of the second base metal 32 in the X-axis direction.
  • W ′ is the width of the bottom surface 300 a of the recess 300 in the X-axis direction.
  • W ′′ is the width of the bottom surface 301 a of the recess 301 in the X-axis direction.
  • b is the width of the second contact 42 in the Y-axis direction.
  • each part of the movable contact 12 is t ′ ⁇ 2.5 mm, 8 mm ⁇ L ′ ⁇ 100 mm, 8 mm ⁇ L ′′ ⁇ 100 mm, W ′ ⁇ 20 mm, and W ′′ ⁇ 20 mm.
  • FIG. 3 is a diagram showing a manufacturing process of the movable contact 12 shown in FIG.
  • FIG. 4 is a diagram showing an ultrasonic welding machine used in the manufacturing process of the movable contact 12 shown in FIG.
  • FIG. 4 shows a front view of the ultrasonic welder 200 and a side view of the ultrasonic welder 200.
  • step 1 the second metal base 32 and the second contact 42 are manufactured. At this time, a recess 300 and a recess 301 are formed in the second base metal 32.
  • the concave portion 300 may be formed by cutting the fifth end surface 3E, or may be formed by applying pressure to the second base metal 32 by a press machine to plastically deform the fifth end surface 3E.
  • the recess 301 is formed by the same method as the recess 300.
  • Step 2 the second intermediate member 62 is formed on the surface of the second contact 42 on the second metal base 32 side.
  • Step 3 the second metal base 32 manufactured in Step 1 is installed in the fixing portion 6b provided in the fixing base 6 of the ultrasonic welding machine 200.
  • the first end face 3 ⁇ / b> A of the second base metal 32 is installed so as to face the pressing tool 8 of the ultrasonic welding machine 200.
  • Step 4 by moving the two movable parts 6a provided on the fixed base 6 in the direction indicated by the arrow A, the second base metal 32 is sandwiched between the two movable parts 6a. At this time, the fixed jig 6a1 provided in one movable portion 6a enters the recess 300, and the fixed jig 6a2 provided in the other movable portion 6a enters the recess 301.
  • each of the fixed jig 6a1 and the fixed jig 6a2 has a tapered shape with a tapered tip, for example.
  • the fixed jig 6a1 comes into contact with the corner portion between the step portion 300b and the fifth end surface 3E, and the fixed jig 6a1 comes into contact with the corner portion between the step portion 301b and the sixth end surface 3F. Therefore, the second base metal 32 can be firmly fixed.
  • step 5 the second contact 42 is installed on the second base metal 32.
  • Step 6 the second contact 42 is pushed in the vertical direction from the pressing tool 8 by the pressing tool 8 of the ultrasonic welding machine 200 moving in the direction indicated by the arrow B.
  • the pressure on the second contact 42 exceeds a certain value, ultrasonic vibration is applied to the second contact 42 from the pressing tool 8.
  • the first end surface 3A of the second base metal 32 and the end surface of the second intermediate member 62 on the second base metal 32 side are rubbed together, and the oxide existing on these mating surfaces is destroyed to generate a new surface.
  • the second contact 42 is joined to the second base metal 32 by the plastic flow of the second intermediate member 62.
  • the second contact 42 can be joined to the second base metal 32 without using a metal activator such as a flux for activating the metal interface or a brazing material.
  • a metal activator such as a flux for activating the metal interface or a brazing material.
  • the brazing material is unnecessary, even when the ambient temperature of the first contact 41 and the second contact 42 rises to the temperature at the time of brazing due to the shut-off operation, the brazing material at the joint is directed toward the second contact 42. Therefore, the temperature resistance of the movable contact 12 is improved.
  • the fixed jig 6a1 inserted into the recess 300 contacts the stepped portion 300b, and the fixed jig 6a2 inserted into the recessed portion 301 contacts the stepped portion 301b.
  • the second metal base 32 can be firmly fixed. Therefore, it is possible to suppress slippage between the second base metal 32 and the fixed portion 6b without using an anvil that has been knurled as in the prior art.
  • the first end surface 3A of the second base metal 32 and the end surface of the second intermediate member 62 on the second base metal 32 side can be sufficiently rubbed together, and a new surface can be generated reliably.
  • the second contact 42 can be reliably bonded to the second base metal 32, and high bonding quality can be ensured.
  • vibration energy is applied to the fixed jig 6a1 and the fixed jig 6a2.
  • the vibration operation stops before reaching the initially set condition, and the desired joint strength may not be ensured.
  • the second base metal 32 is firmly fixed by the fixed jig 6a1 and the fixed jig 6a2, vibration energy does not escape to the fixed jig 6a1 and the fixed jig 62a2, and a desired joining is achieved. Strength can be secured.
  • the second base 32 is replaced each time the second base 32 is replaced.
  • the fixed position of the gold 32 can be determined accurately. Accordingly, variations in manufacturing quality of the movable contact 12 are reduced.
  • the first contact 41 and the second contact by using a sintered metal whose hardness is higher than the hardness of the first intermediate member 61 and the second intermediate member 62 as the material of the first contact 41 and the second contact 42, the first contact 41 and the second contact by arc. The progress of wear of the contact 42 can be minimized.
  • the silver used for the second intermediate member 62 and the electric copper or oxygen-free copper used for the second base metal 32 are metals that are easy to plastically flow. Therefore, for example, when the second contact 42 is joined to the second base metal 32 by ultrasonic joining, the second intermediate member 62 and the second base metal 32 are plastically flowed to each other. The oxide present on the mating surface of the base metal 32 is easily destroyed. Furthermore, the joining strength of the second contact 42 to the second base metal 32 is improved by mixing the mating surfaces of the second intermediate member 62 and the second base metal 32.
  • FIG. 5 is a configuration diagram of a second base metal according to a modification of the embodiment of the present invention.
  • the number of recesses 300 formed in the fifth end surface 3E of the second base metal 32 is not limited to one, and may be two or more.
  • FIG. 5 shows an example in which a concave portion 300A and a concave portion 300B are formed on the fifth end surface 3E of the second base metal 32.
  • the tip shapes of the fixed jig 6a1 and the fixed jig 6a2 are shapes that can be inserted into the plurality of recesses.
  • the contact areas of the fixed jig 6a1 and the fixed jig 6a2 to the stepped portions forming the plurality of recesses are increased, and the second base metal 32 can be fixed more firmly.
  • the shape of the stepped portion 300b that forms the concave portion 300 may be a shape into which the fixed jig 6a1 enters, and may be a polygon other than a square or a circle.
  • the shape of the stepped portion 301b that forms the recess 301 is the same.
  • the shape of the recess 300 may be the same as or different from the shape of the recess 301.
  • the fixed jig contacts the stepped portion as compared with the case where the shape of each of the stepped portion 300b and the stepped portion 301b is a square. The area is increased, and the first base metal 31 or the second base metal 32 can be firmly fixed.
  • the shapes of the first base metal 31 and the second base metal 32 are not limited to a square shape, as long as the recesses 300A and the recesses 300B are formed, may be elliptical when viewed from the Z-axis direction, or may be in the Z-axis direction. From the perspective, it may be L-shaped.
  • the concave portions are provided on both the fifth end surface and the sixth end surface of the base metal.
  • a concave portion is provided on either the fifth end surface or the sixth end surface of the base metal. It may be provided.
  • the fixing jig can be fitted into the concave portion, and the base metal is processed as compared with the case where the concave portion is provided on both the fifth end surface and the sixth end surface of the base metal. Can be shortened.
  • the position of the concave portion on the fifth end surface or the sixth end surface of the base metal is not limited to the illustrated example, but the second contact 42 is projected toward the second base metal 32 as shown in FIG. It is desirable to provide it at a position that overlaps the region and can fix the base metal with a fixing jig.
  • the concave portion By providing the concave portion at such a position, the distance from the second contact 42 to the fixed jig is shortened, and the vibration of the second metal base 32 when the vibration is applied can be suppressed. Therefore, the plastic flow of the second intermediate member 62 is performed in a short time, and the bonding strength can be increased.
  • the configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Manufacture Of Switches (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Contacts (AREA)

Abstract

Selon la présente invention, un élément (12) de contact mobile comporte un second métal (32) de base et un second contact (42) fixé au second métal (32) de base. L'élément (12) de contact mobile est muni d'un second organe intermédiaire (62) qui est un organe conducteur placé entre le second métal (32) de base et le second contact (42), le second organe intermédiaire (62) présentant une dureté inférieure à celle du second contact (42) et étant capable d'un écoulement plastique. Sur la surface périphérique extérieure du second métal (32) de base est formée une partie en creux qui est en retrait dans une direction perpendiculaire à la direction d'agencement du second métal (32) de base, du second organe intermédiaire (62) et du second contact (42), et dans laquelle est inséré un montage placé dans une partie mobile d'une machine de soudure par ultrasons.
PCT/JP2019/008888 2018-03-20 2019-03-06 Élément de contact et procédé de fabrication d'un élément de contact WO2019181511A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020508171A JP6952872B2 (ja) 2018-03-20 2019-03-06 接触子及び接触子の製造方法
KR1020207026115A KR102420675B1 (ko) 2018-03-20 2019-03-06 접촉자 및 접촉자의 제조 방법
CN201980019379.1A CN111868865B (zh) 2018-03-20 2019-03-06 接触件及接触件的制造方法
TW108109044A TWI705865B (zh) 2018-03-20 2019-03-18 接觸子及接觸子的製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018052810 2018-03-20
JP2018-052810 2018-03-20

Publications (1)

Publication Number Publication Date
WO2019181511A1 true WO2019181511A1 (fr) 2019-09-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/008888 WO2019181511A1 (fr) 2018-03-20 2019-03-06 Élément de contact et procédé de fabrication d'un élément de contact

Country Status (5)

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JP (1) JP6952872B2 (fr)
KR (1) KR102420675B1 (fr)
CN (1) CN111868865B (fr)
TW (1) TWI705865B (fr)
WO (1) WO2019181511A1 (fr)

Citations (4)

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Publication number Priority date Publication date Assignee Title
JPS4920902B1 (fr) * 1966-11-04 1974-05-28
JPS5776703A (en) * 1980-10-30 1982-05-13 Tokyo Shibaura Electric Co Electric contactor
JPH1147956A (ja) * 1997-08-04 1999-02-23 Showa Alum Corp 金属容器の超音波接合方法
JP2016072305A (ja) * 2014-09-26 2016-05-09 富士電機株式会社 半導体装置の製造装置及び半導体装置

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JPH0338033A (ja) 1989-07-05 1991-02-19 Sony Corp 低温エッチング装置
TW200425192A (en) * 2003-01-09 2004-11-16 Hitachi Ltd Electrode for vacuum interrupter, vacuum interrupter using the same and vacuum circuit-breaker
WO2005112749A1 (fr) 2004-05-12 2005-12-01 Zoll Medical Corporation Procede de recommandation pour rythme ecg
JP5287866B2 (ja) * 2008-02-08 2013-09-11 富士電機機器制御株式会社 電気接触子の製造方法及び電気接触子の製造装置
CN102044347B (zh) * 2011-01-26 2013-02-13 浙江乐银合金有限公司 银铜镍陶瓷高抗熔焊合金触头材料的制备方法及其产品
WO2012105040A1 (fr) 2011-02-04 2012-08-09 トヨタ自動車株式会社 Véhicule et appareil d'alimentation externe
JP6156625B2 (ja) * 2013-03-13 2017-07-05 オムロン株式会社 金属部品どうしの接合構造及びその接合方法
JP6053612B2 (ja) * 2013-05-29 2016-12-27 三菱電機株式会社 遮断器用電気接触子およびその製造方法
JP5773001B2 (ja) * 2014-02-14 2015-09-02 オムロン株式会社 接点機構およびこれを用いたトリガースイッチ，電動工具
WO2017041242A1 (fr) * 2015-09-09 2017-03-16 上海长园维安电子线路保护有限公司 Fusible thermique pouvant subir une refusion

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4920902B1 (fr) * 1966-11-04 1974-05-28
JPS5776703A (en) * 1980-10-30 1982-05-13 Tokyo Shibaura Electric Co Electric contactor
JPH1147956A (ja) * 1997-08-04 1999-02-23 Showa Alum Corp 金属容器の超音波接合方法
JP2016072305A (ja) * 2014-09-26 2016-05-09 富士電機株式会社 半導体装置の製造装置及び半導体装置

Also Published As

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CN111868865B (zh) 2022-11-15
KR20200119300A (ko) 2020-10-19
JPWO2019181511A1 (ja) 2020-12-03
CN111868865A (zh) 2020-10-30
KR102420675B1 (ko) 2022-07-13
TW201940271A (zh) 2019-10-16
JP6952872B2 (ja) 2021-10-27
TWI705865B (zh) 2020-10-01

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