WO2019176962A1 - スパッタリングターゲット及び、スパッタリングターゲットの製造方法 - Google Patents
スパッタリングターゲット及び、スパッタリングターゲットの製造方法 Download PDFInfo
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- WO2019176962A1 WO2019176962A1 PCT/JP2019/010094 JP2019010094W WO2019176962A1 WO 2019176962 A1 WO2019176962 A1 WO 2019176962A1 JP 2019010094 W JP2019010094 W JP 2019010094W WO 2019176962 A1 WO2019176962 A1 WO 2019176962A1
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- Prior art keywords
- sputtering target
- molybdenum
- target according
- purity
- sputtering
- Prior art date
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- 238000005477 sputtering target Methods 0.000 title claims abstract description 66
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 57
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 36
- 239000011733 molybdenum Substances 0.000 claims abstract description 36
- 239000013078 crystal Substances 0.000 claims abstract description 18
- 239000002245 particle Substances 0.000 claims description 26
- 230000005855 radiation Effects 0.000 claims description 14
- 238000001513 hot isostatic pressing Methods 0.000 claims description 13
- 238000007731 hot pressing Methods 0.000 claims description 13
- 238000000462 isostatic pressing Methods 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 16
- 229910052721 tungsten Inorganic materials 0.000 description 16
- 239000010937 tungsten Substances 0.000 description 16
- 238000004544 sputter deposition Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 6
- 239000007772 electrode material Substances 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000001036 glow-discharge mass spectrometry Methods 0.000 description 4
- 230000007257 malfunction Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011362 coarse particle Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000005078 molybdenum compound Substances 0.000 description 1
- 150000002752 molybdenum compounds Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
- B22F3/15—Hot isostatic pressing
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/045—Alloys based on refractory metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2301/00—Metallic composition of the powder or its coating
- B22F2301/20—Refractory metals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2304/00—Physical aspects of the powder
- B22F2304/10—Micron size particles, i.e. above 1 micrometer up to 500 micrometer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
Definitions
- This specification discloses a technique relating to a sputtering target and a method for manufacturing the sputtering target.
- Patent Documents 1 and 2 disclose that “a tungsten sintered body sputtering target, the purity of tungsten is 5N (99.999%) or more, and the impurity carbon contained in tungsten is 3 wtppm or less.
- a tungsten sintered sputtering target characterized by the above has been proposed. According to this “tungsten sintered sputtering target”, it is said that “the tungsten film can stably reduce the electric resistance value”.
- Patent Document 3 states that “a molybdenum-containing aqueous solution is produced by dissolving metal molybdenum or a molybdenum compound, and the molybdenum-containing crystal is crystallized after the aqueous solution is purified.
- the high purity molybdenum powder is prepared by subjecting the crystals to solid-liquid separation, washing and drying, followed by heat reduction, and after the high purity molybdenum powder is pressure-molded and sintered, it is melted by electron beam to obtain high purity molybdenum.
- An ingot is produced, and thereafter the ingot is plastically processed and machined, and has a purity of 99.999% or more, an alkali metal content of 100 ppb or less, and a radioactive element content of 10 ppb or less.
- a method for producing a purity molybdenum target is described.
- the molybdenum film has a possibility of realizing a sufficiently low electric resistance value.
- the generation rate of particles is high during sputtering. There is a problem that the material yield decreases.
- This specification proposes a sputtering target that mainly contains molybdenum and can effectively reduce particles during sputtering, and a method for manufacturing the sputtering target, in order to solve the above-described problems.
- the sputtering target disclosed in this specification has a molybdenum content of 99.99% by mass or more, a relative density of 98% or more, and an average crystal grain size of 400 ⁇ m or less.
- the sputtering target manufacturing method disclosed in this specification is a method for manufacturing the above-mentioned sputtering target, comprising preparing a molybdenum powder and applying a load to the molybdenum powder at a temperature of 1350 ° C. to 1500 ° C. And a step of performing hot pressing at a temperature of 1300 ° C. to 1850 ° C. with respect to the molded body obtained by the hot pressing.
- molybdenum is mainly contained, particles during sputtering can be effectively reduced, and such a sputtering target can be effectively manufactured.
- the sputtering target according to one embodiment of the present invention has a molybdenum content of 99.99% by mass or more, a relative density of 98% or more, and an average crystal grain size of 400 ⁇ m or less.
- the radiation dose is preferably 0.03 cph / cm 2 or less.
- the sputtering target of this embodiment contains 99.99% by mass or more of molybdenum and is made of high-purity molybdenum of 4N or more.
- the purity of molybdenum is high, the generation rate of particles is significantly reduced.
- the purity of molybdenum is low, particles tend to increase. Therefore, from the viewpoint of particle reduction, the higher the purity of molybdenum, the better.
- the molybdenum content in the sputtering target is preferably 99.999% by mass or more (that is, 5N or more).
- the above-mentioned purity means that excluding indivisible homologous elements. That is, the indivisible element is tungsten.
- the ratio of the molybdenum content in the contents of the elements below the detection limit and all metal elements other than tungsten is defined as purity.
- Such a molybdenum content is measured and calculated by glow discharge mass spectrometry (GDMS).
- the relative density of the sputtering target is 98% or more. As the relative density is higher, particles are reduced, but when the relative density is low, the number of particles tends to increase. From this viewpoint, the relative density is preferably 99% or more, and more preferably 99.5% or more.
- the measured density is the density of the sputtering target measured by the Archimedes method using pure water as a solvent
- the theoretical density is the theoretical density when the molybdenum content is 100%.
- the average crystal grain size of molybdenum in the sputtering target is 400 ⁇ m or less, preferably 200 ⁇ m or less.
- the average crystal grain size may be, for example, 15 ⁇ m or more, typically 40 ⁇ m or more.
- the average crystal grain size is determined by observing the target surface with an optical microscope, drawing a straight line on the resulting structure photograph until the number of particles N ⁇ 200, and the number of particles existing on the straight line (N ⁇ 200). ) And the total length (L) of the straight line, it is calculated as L / N.
- This method for measuring the average crystal grain size is based on the cutting method defined in JIS G0551.
- the radiation dose of the sputtering target is 0.03 cph / cm 2 or less.
- the radiation amount of the sputtering target is preferably at 0.02cph / cm 2 or less, and still more preferably more 0.01cph / cm 2 or less.
- the above radiation dose uses LACS-4000M manufactured by Sumika Chemical Analysis Co., Ltd., P-10 gas (Ar—CH 4 10%), flow rate 100 ml / min, measurement time 99 kr, measurement area 203 cm 3 , counting efficiency Measure as 80%.
- molybdenum powder is prepared as a raw material.
- This molybdenum powder preferably has a particle diameter in the range of 0.1 ⁇ m to 10 ⁇ m, an average particle diameter of 1 ⁇ m to 5 ⁇ m, and a molybdenum purity of 4N or more. If the particle size of the molybdenum powder is too large, there is a concern of low density. On the other hand, if the particle size is too small, it becomes bulky, which increases the difficulty of handling and impairs productivity (that is, the bulkiness makes it difficult to fill a mold such as a hot press, etc. There is a risk that the number of production will decrease.
- the purity of the molybdenum powder is low, the molybdenum content of the sputtering target to be manufactured decreases. Therefore, it is preferable to use a molybdenum powder having a purity of molybdenum of 5N or higher. In order to reduce the radiation dose of the sputtering target to be manufactured, it is preferable to use 5N or more molybdenum powder as a raw material.
- the molybdenum powder is filled in a mold or other predetermined mold, and a predetermined load is applied while heating and maintaining the predetermined temperature.
- a load is applied while maintaining a temperature of 1350 ° C. to 1500 ° C. as the highest temperature reached by the raw material. If the temperature at this time is low, the relative density of the sputtering target cannot be made sufficiently high. On the other hand, if the temperature is high, there is a concern that the particle size increases due to the coarse particle size. Therefore, the temperature at the time of hot pressing is set to 1350 ° C. to 1500 ° C.
- the time for maintaining the temperature as described above is preferably 60 minutes to 300 minutes. If the holding time is too short, there is a concern that the density will be low, and if it is too long, there is a possibility of a coarse particle size.
- the magnitude of the load applied at this time is preferably 150 kg / cm 2 to 300 kg / cm 2, and more preferably 200 kg / cm 2 to 300 kg / cm 2 . If the load is too small, the possibility of low density cannot be denied. There is no particular inconvenience due to the excessive load. If the equipment such as dies can be withstood, an increase in load will lead to higher density. However, generally, the upper limit is often about 300 kg / cm 2 .
- the temperature is held for 30 minutes It is preferable.
- the sputtering target to be manufactured has a higher density.
- a load of 1300kg / cm 2 ⁇ 2000kg / cm 2 to act for 60 minutes to 300 minutes.
- the temperature should be 1400 ° C. to 1850 ° C.
- the load should be 1500 kg / cm 2 to 1900 kg / cm 2
- the time should be 60 minutes to 300 minutes.
- the sintered body obtained by hot isostatic pressing can be subjected to grinding or other shape processing to produce a sputtering target having a predetermined dimensional shape.
- the sputtering target manufactured in this way has a low generation rate of particles during sputtering and a low radiation dose, so that the possibility of malfunction of an electronic device having a molybdenum thin film formed thereby is low. It becomes.
- the present invention is not limited to the embodiments described above, and can be embodied by changing each component of the embodiments without departing from the scope of the invention.
- various aspects can be configured by appropriately combining a plurality of components included in each embodiment. It is also possible to delete some components from all the components included in the embodiment.
- Molybdenum powder having an average particle size of 5 ⁇ m and a predetermined purity was filled in a carbon die and subjected to a hot press by applying a load of 300 kgf / cm 2 at a predetermined temperature.
- the molded body thus obtained was subjected to hot isostatic pressing that applied a load of 1800 kgf / cm 2 at a predetermined temperature to obtain a sintered body. Thereafter, the sintered body was shaped to produce a sputtering target having a diameter of 164 mm and a thickness of 5 mm.
- Example 1 to 7 and Comparative Examples 1 and 2 as shown in Table 1, except that the maximum temperature of hot press (HP) and the maximum temperature of hot isostatic pressing (HIP) were changed.
- the sputtering target was manufactured by the same method.
- Comparative Examples 3 and 4 instead of the above-described hot press and hot isostatic pressing, hot sputtering was performed after forming with a hot press to produce a sputtering target.
- This hot rolling in Comparative Example 3, it passed through between rolls 5 times at a temperature of 1200 ° C. and in Comparative Example 4 at a temperature of 1200 ° C., and rolled to a thickness of 10 mm, respectively, and thereafter shape processing And finished to the above dimensions.
- sputtering was performed on a silicon substrate in an atmosphere filled with Ar gas to form a molybdenum film.
- the sputtering target was attached to a magnetron sputtering apparatus (C-3010 sputtering system manufactured by Canon Anelva) and sputtering was performed.
- the sputtering conditions were an input power of 0.5 kW, an Ar gas pressure of 0.5 Pa, and after pre-sputtering of 1.7 kWhr, a film having a thickness of 30 nm was formed on a 4-inch diameter silicon substrate.
- the number of particles having a particle diameter of 0.07 ⁇ m or more adhering to the substrate was measured with a surface foreign matter inspection apparatus (Candela CS920, manufactured by KLA-Tencor). The results are also shown in Table 1.
- Example 1 a sputtering target with high purity, high relative density, and small average crystal grain size was obtained by manufacturing by hot pressing and hot isostatic pressing under predetermined conditions. As a result, particles during sputtering can be effectively reduced.
- Comparative Example 1 the relative density was low due to the low temperature of the hot press.
- Comparative Example 2 the purity of the sputtering target was low due to the low purity of the raw molybdenum powder. Since Comparative Example 3 was low in purity and manufactured by rolling instead of hot isostatic pressing, the average crystal grain size was increased. In Comparative Examples 2 and 3, the radiation dose increased due to the influence of the molybdenum powder as a raw material.
- Comparative Example 4 the average crystal grain size was increased by producing by rolling instead of hot isostatic pressing. As a result, the particles increased in any of Comparative Examples 1 to 4.
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Abstract
Description
これに関して、モリブデン膜は十分に低い電気抵抗値を実現できる可能性があるが、特許文献3に記載された「LSI電極用高純度モリブデンターゲット」では、スパッタリング時にパーティクルの発生率が高く、それにより、材料歩留まりが低下するという問題がある。
また、この明細書で開示するスパッタリングターゲットの製造方法は、上記のスパッタリングターゲットを製造する方法であって、モリブデン粉末を準備する工程と、前記モリブデン粉末に対し、1350℃~1500℃の温度で荷重を作用させてホットプレスを行う工程と、前記ホットプレスにより得られる成形体に対し、1300℃~1850℃の温度で熱間等方圧加圧を行う工程とを含むものである。
この発明の一の実施形態のスパッタリングターゲットは、モリブデンの含有量が99.99質量%以上であり、相対密度が98%以上であり、平均結晶粒径が400μm以下であるものである。これらの構成に加えて、放射線量が0.03cph/cm2以下であることが好ましい。
これに対し、発明者は、高融点金属の成膜特性を検討した結果、高融点金属の一つであるモリブデン製の薄膜がタングステン製の薄膜に比して、より低い抵抗値を達成できる可能性があるとの知見を得た。
このようなスパッタリングターゲット及びその製造方法について以下に詳説する。
この実施形態のスパッタリングターゲットは、モリブデンを99.99質量%以上で含有し、4N以上の高純度のモリブデンからなるものである。モリブデンの純度が高いと、パーティクルの発生率が有意に低下し、この一方で、モリブデンの純度が低いと、パーティクルが増加する傾向にある。したがって、パーティクル低減の観点から、モリブデンの純度は高ければ高いほど望ましい。この観点より、スパッタリングターゲット中のモリブデンの含有量は、99.999質量%以上(すなわち5N以上)であることが好ましい。
この発明の実施形態では、スパッタリングターゲットの相対密度は98%以上である。相対密度は高いほどパーティクルが低減されるが、低いとパーティクルの増加を招く傾向がある。この観点から、相対密度は99%以上であることが好ましく、さらには99.5%以上であることが好ましい。
スパッタリングターゲットが含有するモリブデンの結晶粒径は、大きいとパーティクルが増加し、小さいとパーティクルが減少する傾向にある。
それ故に、スパッタリングターゲットのモリブデンの平均結晶粒径は400μm以下とし、好ましくは200μm以下とする。モリブデンの平均結晶粒径が小さすぎることによる不都合はないが、平均結晶粒径は、たとえば15μm以上、典型的には40μm以上になることがある。
スパッタリングターゲットの放射線量は、0.03cph/cm2以下とする。この放射線量が多い場合は、当該スパッタリングターゲットを用いて形成したモリブデンの薄膜を有する電子デバイスの誤作動の発生可能性が高まり、この一方で、放射線量が少ない場合は、そのような電子デバイスの誤作動の発生可能性が低くなる。それ故に、スパッタリングターゲットの放射線量は、0.02cph/cm2以下であることが好ましく、さらに0.01cph/cm2以下であることがより一層好ましい。
上述したようなスパッタリングターゲットを製造する方法の一例としては、次に述べるように、所定のモリブデン粉末に対し、ホットプレス(HP)と熱間等方圧加圧(HIP)を組み合わせた粉末冶金法を実施することを挙げることができる。
ここでは、原料の最高到達温度として、1350℃~1500℃の温度を保持しつつ荷重を作用させる。このときの温度が低いと、スパッタリングターゲットの相対密度を十分に高くすることができず、この一方で、温度が高いと、粗大粒径となってパーティクルが増加する懸念がある。それ故に、ホットプレスの際の温度は、1350℃~1500℃とする。
この際に作用させる荷重の大きさは、150kg/cm2~300kg/cm2とすることが好適であり、特に200kg/cm2~300kg/cm2とすることがより一層好ましい。荷重が小さすぎる場合は、低密度となる可能性が否めない。なお、荷重が大きすぎることによる不都合は特にない。ダイス等の備品が耐えられるのであれば荷重増は高密度化に繋がる。但し、一般には300kg/cm2程度が上限となることが多い。
熱間等方圧加圧の工程では、典型的には、1300℃~1850℃の温度下で、1300kg/cm2~2000kg/cm2の荷重を、60分~300分にわたって作用させる。このような温度、荷重及び時間の条件を満たさない場合は、低密度となる不都合がある。したがって、熱間等方圧加圧の際には、温度を1400℃~1850℃とすること、荷重を1500kg/cm2~1900kg/cm2とすること、時間を60分~300分とすることがそれぞれより一層好ましい。
熱間等方圧加圧で得られた焼結体に対し、必要に応じて、研削その他の形状加工を施して、所定の寸法形状を有するスパッタリングターゲットを製造することができる。
表1に示す純度は、スパッタリングターゲットのモリブデンの純度(質量%)を意味する。なお、スパッタリングターゲットの純度は、原料のモリブデン粉末の純度とほぼ同程度であった。
これにより、いずれの比較例1~4も、パーティクルが増加した。
Claims (12)
- スパッタリングターゲットであって、モリブデンの含有量が99.99質量%以上であり、相対密度が98%以上であり、平均結晶粒径が400μm以下であるスパッタリングターゲット。
- 放射線量が0.03cph/cm2以下である請求項1に記載のスパッタリングターゲット。
- 放射線量が0.02cph/cm2以下である請求項2に記載のスパッタリングターゲット。
- モリブデンの含有量が99.999質量%以上である請求項1~3のいずれか一項に記載のスパッタリングターゲット。
- 相対密度が99%以上である請求項1~4のいずれか一項に記載のスパッタリングターゲット。
- 平均結晶粒径が200μm以下である請求項1~5のいずれか一項に記載のスパッタリングターゲット。
- 請求項1~6のいずれか一項に記載のスパッタリングターゲットを製造する方法であって、
モリブデン粉末を準備する工程と、前記モリブデン粉末に対し、1350℃~1500℃の温度で荷重を作用させてホットプレスを行う工程と、前記ホットプレスにより得られる成形体に対し、1300℃~1850℃の温度で熱間等方圧加圧を行う工程とを含む、スパッタリングターゲットの製造方法。 - 前記ホットプレスを行う工程で、前記モリブデン粉末に作用させる荷重を、200kg/cm2~300kg/cm2とする、請求項7に記載のスパッタリングターゲットの製造方法。
- 前記ホットプレスを、60分~300分にわたって行う、請求項7又は8に記載のスパッタリングターゲットの製造方法。
- 前記熱間等方圧加圧を行う工程で、前記成形体に作用させる荷重を、1300kg/cm2~2000kg/cm2とする、請求項7~9のいずれか一項に記載のスパッタリングターゲットの製造方法。
- 前記熱間等方圧加圧を、60分~300分にわたって行う、請求項7~10のいずれか一項に記載のスパッタリングターゲットの製造方法。
- 前記モリブデン粉末を準備する工程で、純度が4N以上で平均粒径が1μm~5μmであるモリブデン粉末を準備する、請求項7~11のいずれか一項に記載のスパッタリングターゲットの製造方法。
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CN201980018192.XA CN111836914A (zh) | 2018-03-13 | 2019-03-12 | 溅射靶和溅射靶的制造方法 |
US16/979,697 US20210040601A1 (en) | 2018-03-13 | 2019-03-12 | Sputtering Target and Method for Producing Sputtering Target |
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