WO2019163600A1 - Dissipateur thermique, module de puissance et procédé de fabrication associé - Google Patents

Dissipateur thermique, module de puissance et procédé de fabrication associé Download PDF

Info

Publication number
WO2019163600A1
WO2019163600A1 PCT/JP2019/005059 JP2019005059W WO2019163600A1 WO 2019163600 A1 WO2019163600 A1 WO 2019163600A1 JP 2019005059 W JP2019005059 W JP 2019005059W WO 2019163600 A1 WO2019163600 A1 WO 2019163600A1
Authority
WO
WIPO (PCT)
Prior art keywords
fin
caulking
base
protruding wall
heat sink
Prior art date
Application number
PCT/JP2019/005059
Other languages
English (en)
Japanese (ja)
Inventor
泰之 三田
中島　泰
裕史 川島
林　建一
清文 北井
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2020501698A priority Critical patent/JP6937886B2/ja
Priority to CN201980013105.1A priority patent/CN111801789B/zh
Publication of WO2019163600A1 publication Critical patent/WO2019163600A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N

Definitions

  • the present invention relates to a heat sink, a power module, and a manufacturing method thereof.
  • Patent Document 1 discloses a heat sink including a substrate having heat conductivity and a plurality of fins.
  • the substrate includes a plurality of grooves and a plurality of protruding wall portions.
  • the plurality of fins are inserted into the plurality of grooves and are caulked and fixed to the substrate using the plurality of protruding wall portions.
  • the heat sink according to the first aspect of the present invention includes a fin base, a first fin, and a plurality of second fins.
  • the fin base includes an outer protruding wall portion, a first fin insertion groove, a plurality of second fin insertion grooves, a first caulking portion, and a plurality of second caulking portions.
  • the first fin insertion groove, the plurality of second fin insertion grooves, the first caulking portion, and the plurality of second caulking portions are formed in the inner region of the fin base.
  • the outer protruding wall portion is formed in the first outer region of the fin base.
  • the outer protruding wall portion includes an inner side surface facing the first fin insertion groove and an outer side surface opposite to the inner side surface.
  • the first fin is caulked and fixed to the fin base by the first caulking portion.
  • the plurality of second fins are caulked and fixed to the fin base by a plurality of second caulking portions.
  • the outer protruding wall portion includes a concave portion formed on the outer side surface and a raised portion that is continuous with the concave portion and has a convex curved surface.
  • the heat sink according to the second aspect of the present invention includes a fin base, a first fin, and a plurality of second fins.
  • the fin base includes an outer protruding wall portion, a first fin insertion groove, a plurality of second fin insertion grooves, a first caulking portion, and a plurality of second caulking portions.
  • the first fin insertion groove, the plurality of second fin insertion grooves, the first caulking portion, and the plurality of second caulking portions are formed in the inner region of the fin base.
  • the outer protruding wall portion is formed in the first outer region of the fin base.
  • the outer protruding wall portion includes an inner side surface facing the first fin insertion groove, an outer side surface opposite to the inner side surface, and a top surface connecting the inner side surface and the outer side surface.
  • the first fin is caulked and fixed to the fin base by the first caulking portion.
  • the plurality of second fins are caulked and fixed to the fin base by a plurality of second caulking portions.
  • the outer side surface includes a tapered surface extending to the top surface of the outer protruding wall portion. The tapered surface is inclined so that the outer protruding wall portion becomes tapered as the distance from the main surface increases.
  • the power module of the present invention includes the heat sink of the present invention and a power semiconductor element mounted on the main surface of the fin base.
  • the first fin and the plurality of second fins are respectively inserted into the first fin insertion groove and the plurality of second fin insertion grooves of the fin base.
  • the fin base includes an outer protruding wall portion, a first fin insertion groove, a plurality of second fin insertion grooves, a first caulking portion, and a plurality of second caulking portions.
  • the first fin insertion groove, the plurality of second fin insertion grooves, the first caulking portion, and the plurality of second caulking portions are formed in the inner region of the fin base.
  • the outer protruding wall portion is formed in the first outer region of the fin base.
  • the outer protruding wall portion includes an inner side surface facing the first fin insertion groove and an outer side surface opposite to the inner side surface.
  • the first press tool is used to deform the first caulking portion and the plurality of second caulking portions so that the first fin and the plurality of second fins are formed. It further comprises caulking and fixing to the fin base by a first caulking portion and a plurality of second caulking portions, respectively.
  • the method for manufacturing a heat sink according to the present invention further includes pressing the outer side surface toward the first fin using the second press tool.
  • the first fin and the plurality of second fins are respectively inserted into the first fin insertion groove and the plurality of second fin insertion grooves of the fin base.
  • the fin base includes an outer protruding wall portion, a first fin insertion groove, a plurality of second fin insertion grooves, a first caulking portion, and a plurality of second caulking portions.
  • the first fin insertion groove, the plurality of second fin insertion grooves, the first caulking portion, and the plurality of second caulking portions are formed in the inner region of the fin base.
  • the outer protruding wall portion is formed in the first outer region of the fin base.
  • the outer protruding wall portion includes an inner side surface facing the first fin insertion groove, an outer side surface opposite to the inner side surface, a top surface connecting the inner side surface and the outer side surface, and the outer side surface and the top surface. And formed outer corners.
  • the first press tool is used to deform the first caulking portion and the plurality of second caulking portions so that the first fin and the plurality of second fins are formed. It further comprises caulking and fixing to the fin base by a first caulking portion and a plurality of second caulking portions, respectively.
  • the manufacturing method of the heat sink of the present invention further includes pressing the outer corner portion of the outer protruding wall portion with the second tapered surface of the second press tool to form a tapered surface on the outer side surface.
  • the power module manufacturing method of the present invention uses the heat sink manufacturing method of the present invention.
  • the manufacturing method of the power module of this invention comprises mounting a power semiconductor element on the main surface of a fin base.
  • the heat dissipation performance of the heat sink can be improved without increasing the size of the heat sink.
  • the heat dissipation performance of the power module can be improved without increasing the size of the power module.
  • FIG. 1 is a schematic cross-sectional view of a heat sink according to Embodiment 1.
  • FIG. 2 is a schematic partial enlarged sectional view of a region II shown in FIG. 1 of the heat sink according to the first embodiment.
  • FIG. 3 is a schematic plan view showing one step in the method for manufacturing the heat sink according to Embodiment 1.
  • FIG. 4 is a schematic cross-sectional view taken along a cross-sectional line IV-IV shown in FIG. 3, of the process shown in FIG.
  • FIG. 10 is a schematic plan view of one step of a method for manufacturing a heat sink according to a modification of the first embodiment.
  • FIG. 5 is a schematic cross-sectional view showing a step subsequent to the step shown in FIGS.
  • FIG. 7 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 6 in the heat sink manufacturing method according to Embodiment 1.
  • FIG. 8 is a schematic partial enlarged cross-sectional view of a region VIII shown in FIG. 7 in the process shown in FIG. 7 of the method for manufacturing the heat sink according to the first embodiment.
  • FIG. 8 is a schematic plan view showing a step subsequent to the step shown in FIG. 7 in the heat sink manufacturing method according to Embodiment 1.
  • FIG. 10 is a schematic cross sectional view taken along a cross sectional line XX shown in FIG. 9 in the process shown in FIG. 9 in the method for manufacturing the heat sink according to the first embodiment.
  • FIG. 11 is a schematic partial enlarged cross-sectional view showing a step subsequent to the step shown in FIG. 10 in the heat sink manufacturing method according to Embodiment 1.
  • FIG. 10 is a schematic plan view of one step of a method for manufacturing a heat sink according to a modification of the first embodiment.
  • FIG. 10 is a schematic plan view of one step of a method for manufacturing a heat sink according to a modification of the first embodiment.
  • FIG. 10 is a schematic plan view of one step of a method for manufacturing a heat sink according to a modification of the first embodiment.
  • 4 is a schematic cross-sectional view of a heat sink according to Embodiment 2.
  • FIG. FIG. 16 is a schematic partial enlarged sectional view of a region XVI shown in FIG.
  • FIG. 15 of the heat sink according to the second embodiment. 10 is a schematic plan view showing one step of a method for manufacturing a heat sink according to Embodiment 2.
  • FIG. FIG. 18 is a schematic cross sectional view taken along a cross sectional line XVIII-XVIII shown in FIG. 17 in the process shown in FIG.
  • FIG. 19 is a schematic cross-sectional view showing a step subsequent to the step shown in FIGS. 17 and 18 in the heat sink manufacturing method according to Embodiment 2.
  • 5 is a schematic cross-sectional view of a heat sink according to Embodiment 3.
  • FIG. FIG. 21 is a schematic partial enlarged cross-sectional view of a region XXI shown in FIG. 20 of the heat sink according to the third embodiment.
  • FIG. 10 is a schematic cross-sectional view showing one step of a method for manufacturing a heat sink according to Embodiment 3.
  • FIG. 10 is a schematic partial enlarged cross-sectional view showing one step of a method for manufacturing a heat sink according to a modification of the third embodiment.
  • FIG. 10 is a schematic partial enlarged cross-sectional view showing one step of a method for manufacturing a heat sink according to a modification of the third embodiment.
  • FIG. 23 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 22 in the heat sink manufacturing method according to Embodiment 3.
  • 6 is a schematic cross-sectional view of a heat sink according to Embodiment 4.
  • FIG. 27 is a schematic partial enlarged sectional view of a region XXVII shown in FIG. 26 of the heat sink according to the fourth embodiment.
  • FIG. 10 is a schematic cross-sectional view showing one step of a method for manufacturing a heat sink according to Embodiment 4.
  • FIG. 29 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 28 in the heat sink manufacturing method according to Embodiment 4. It is a schematic sectional drawing of the heat sink which concerns on Embodiment 5 and Embodiment 6.
  • FIG. FIG. 31 is a schematic partial enlarged cross-sectional view of a region XXXI shown in FIG. 30 of the heat sink according to the fifth embodiment and the sixth embodiment.
  • FIG. 10 is a schematic cross-sectional view showing one step of a method for manufacturing a heat sink according to Embodiment 5.
  • FIG. 33 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 32 in the heat sink manufacturing method according to Embodiment 5.
  • FIG. 34 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 33 in the heat sink manufacturing method according to Embodiment 5.
  • FIG. 10 is a schematic cross-sectional view showing one step in a method for manufacturing a heat sink according to Embodiment 6.
  • FIG. 36 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 35 in the heat sink manufacturing method according to Embodiment 6.
  • FIG. 37 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 36 in the heat sink manufacturing method according to Embodiment 6.
  • FIG. 10 is a schematic side view of a heat sink according to a seventh embodiment. 10 is a schematic plan view of a panel included in a heat sink according to Embodiment 7.
  • FIG. 10 is a schematic cross-sectional view of a heat sink according to Embodiment 7.
  • FIG. FIG. 41 is a schematic partial enlarged sectional view of a region XLI shown in FIG. 40 of the heat sink according to the seventh embodiment.
  • FIG. 10 is a schematic cross-sectional view showing one step of a method for manufacturing a heat sink according to Embodiment 7.
  • FIG. 43 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 42 in the heat sink manufacturing method according to Embodiment 7.
  • FIG. 44 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 43 in the heat sink manufacturing method according to Embodiment 7.
  • FIG. 45 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 44 in the heat sink manufacturing method according to Embodiment 7.
  • FIG. 46 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 45 in the heat sink manufacturing method according to Embodiment 7.
  • FIG. 10 is a schematic cross-sectional view of a heat sink according to an eighth embodiment.
  • FIG. 48 is a schematic partial enlarged cross-sectional view of a region XLVIII shown in FIG. 47 of the heat sink according to the eighth embodiment.
  • FIG. 10 is a schematic cross-sectional view showing one step of a method for manufacturing a heat sink according to Embodiment 8.
  • FIG. 50 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 49 in the heat sink manufacturing method according to Embodiment 8.
  • FIG. 52 is a schematic cross-sectional view showing a step subsequent to the step shown in FIG. 50 in the heat sink manufacturing method according to Embodiment 8.
  • FIG. 10 is a schematic cross-sectional view of a power module according to a ninth embodiment.
  • FIG. 10 is a diagram illustrating a flowchart illustrating a method for manufacturing a power module according to a ninth embodiment.
  • Embodiment 1 FIG. With reference to FIG.1 and FIG.2, the heat sink 1 of Embodiment 1 is demonstrated.
  • the heat sink 1 mainly includes a fin base 6, a first fin 20a, and a plurality of second fins 20c.
  • the fin base 6 may be made of metal such as aluminum, aluminum alloy, copper, or copper alloy.
  • the fin base 6 includes a first outer protruding wall portion 7, a second outer protruding wall portion 8, a first fin insertion groove 16a, a plurality of second fin insertion grooves 16c, and a first caulking portion 17. And a plurality of second caulking portions 17c.
  • the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are opposite to the main surface 6m of the fin base 6. And in the inner region 6p of the fin base 6.
  • the first outer protruding wall portion 7 and the second outer protruding wall portion 8 are formed on the opposite side of the main surface 6 m and in the first outer region 6 q of the fin base 6.
  • the first outer region 6q is outside the inner region 6p in the first direction (x direction).
  • the inner region 6 p of the fin base 6 is between the first outer protruding wall portion 7 and the second outer protruding wall portion 8.
  • the first outer protruding wall portion 7 includes an inner side surface 7p facing the first fin insertion groove 16a and an outer side surface 7q opposite to the inner side surface 7p.
  • the first outer protruding wall portion 7 includes a concave portion 11 formed on the outer side surface 7q, and a raised portion 12 that continues to the concave portion 11 and has a convex curved surface 12a.
  • the first outer protruding wall portion 7 may include a base portion 7b and a tip portion 7c having a thickness smaller than that of the base portion 7b.
  • the outer side surface 7q includes the concave portion 11 and a part of the convex curved surface 12a of the raised portion 12.
  • the outer side surface 7q may include a step portion 10 that connects the base portion 7b and the tip portion 7c.
  • the recessed part 11 and the raised part 12 may be formed in the front-end
  • the width of the first outer protruding wall portion 7 (the width w 1 of the base portion 7b) or the width of the first outer region 6q may be, for example, 10.0 mm or less, or 8.0 mm or less.
  • the width of the first outer protruding wall portion 7 is defined as the length of the first outer protruding wall portion 7 in the first direction (x direction).
  • the width of the first outer region 6q is defined as the length of the first outer region 6q in the first direction (x direction).
  • the width of the first outer protruding wall portion 7 (the width w 1 of the base portion 7b) or the width of the first outer region 6q may be, for example, 1.5 mm or more, or 3.0 mm or more. Therefore, a decrease in the holding strength of the first fin 20a by the first outer protruding wall portion 7 can be suppressed.
  • the second outer protruding wall portion 8 is configured in the same manner as the first outer protruding wall portion 7, and includes a concave portion 11 and a raised portion 12 connected to the concave portion 11 and having a convex curved surface 12 a. Contains. However, the second outer protruding wall portion 8 is formed thicker than the first outer protruding wall portion 7 and does not have to include the concave portion 11 and the raised portion 12.
  • the first fin insertion groove 16 a is formed between the first outer protruding wall portion 7 and the first caulking portion 17.
  • the first fin insertion groove 16a and the plurality of second fin insertion grooves 16c are arranged in the first direction (x direction).
  • the first fin insertion groove 16a is outside the plurality of second fin insertion grooves 16c in the first direction (x direction).
  • the first fins 20a and the plurality of second fins 20c are arranged in the first direction (x direction).
  • the first fin 20a is located outside the plurality of second fins 20c in the first direction (x direction).
  • the first caulking portion 17 and the plurality of second caulking portions 17c are arranged in the first direction (x direction).
  • the first caulking portion 17 is outside the plurality of second caulking portions 17c in the first direction (x direction).
  • the first caulking portion 17 includes a first tip surface 17p and a pair of first protrusions 18 protruding from the first tip surface 17p.
  • the tip end of the first caulking portion 17 is divided into two forks.
  • the pair of first protrusions 18 are configured to be plastically deformable by a press load applied during caulking.
  • Each of the plurality of second caulking portions 17 c has the same configuration as that of the first caulking portion 17.
  • each of the plurality of second caulking portions 17c includes a second tip surface 17q and a pair of second protrusions 18c protruding from the second tip surface 17q.
  • Each tip of the plurality of second caulking portions 17c is divided into two forks.
  • the first fin 20a is inserted into the first fin insertion groove 16a.
  • the first fin 20 a is caulked and fixed to the fin base 6 by the first caulking portion 17.
  • the first fin 20 a is in surface contact with the inner side surface 7 p of the first outer protruding wall portion 7.
  • the first fin 20a has a second direction (y direction) orthogonal to the first direction (x direction) and a first direction ( x direction) and a third direction (z direction) orthogonal to the second direction (y direction).
  • the plurality of second fins 20c are inserted into the plurality of second fin insertion grooves 16c.
  • the plurality of second fins 20c are caulked and fixed to the fin base 6 by the plurality of second caulking portions 17c.
  • Each of the plurality of second fins 20c includes a second direction (y direction) and a third direction (z direction) orthogonal to the first direction (x direction) and the second direction (y direction). It extends to.
  • the first fin 20 a and the plurality of second fins 20 c may be harder than the fin base 6. Therefore, during the caulking process, the first caulking portion 17 and the second caulking portion 17c of the fin base 6 are in close contact with the first fin 20a and the plurality of second fins 20c.
  • the plurality of fins (the first fin 20a and the plurality of second fins 20c) are preferably arranged in parallel to each other.
  • the interval between the plurality of adjacent fins (the first fin 20a and the plurality of second fins 20c) is preferably constant.
  • a method for manufacturing the heat sink 1 of the present embodiment will be described with reference to FIGS.
  • the following description of the first outer protruding wall portion 7 also applies to the second outer protruding wall portion 8.
  • the method for manufacturing the heat sink 1 may include preparing the fin base 6.
  • the fin base 6 includes a first outer protruding wall portion 7, a first fin insertion groove 16a, a plurality of second fin insertion grooves 16c, a first caulking portion 17, and a plurality of second caulking portions 17c.
  • the first outer protruding wall portion 7 may include a base portion 7b and a tip portion 7c having a thickness smaller than that of the base portion 7b.
  • the outer side surface 7q may include a step portion 10 that connects the base portion 7b and the tip portion 7c.
  • the fin base 6 may be formed by machining, die casting, forging or extrusion.
  • the ratio w 2 / w 1 of the width w 2 of the tip 7c to the width w 1 of the base 7b may be, for example, 0.50 or more, and 0.60 or more. Also good. Therefore, a decrease in the holding strength of the first fin 20a by the first outer protruding wall portion 7 can be suppressed.
  • the ratio w 2 / w 1 may be 0.95 or less, for example, or 0.80 or less. Therefore, in the step of correcting the inclination of the first fin 20a using the second press tool 27 (see FIGS. 9 to 14), the press load applied from the second press tool 27 to the tip portion 7c is reduced. Can be done.
  • the height h 1 of the first tip surface 17p of the first caulking portion from the main surface 6m may be equal to or less than the height h 2 of the lower end (step portion 10) of the tip portion 7c from the main surface 6m. Therefore, the press load applied from the first press tool 25 to the first caulking portion 17 in the step of caulking the first caulking portion 17 using the first press tool 25 (see FIGS. 6 to 8). Can be reduced.
  • the height h 3 of the second tip surface 17q of the second caulking portion 17c from the main surface 6m may be equal to or less than the height h 2 of the lower end (step portion 10) of the tip portion 7c from the main surface 6m. . Therefore, in the step of caulking the second caulking portion 17c using the first press tool 25 (see FIGS. 6 to 8), the press load applied from the first press tool 25 to the second caulking portion 17c. Can be reduced.
  • the first length of the step portion 10 in the second direction (y direction) is the second direction ( It may be equal to the second length of the fin base 6 in the y direction).
  • the step portion 10 may extend over the entire fin base 6 in the second direction (y direction).
  • the first length L 1 of the step portion 10 in the second direction (y direction) is the second length It may be smaller than the second length L 2 of the fin base 6 in the direction (y direction).
  • the step portion 10 may extend over a part of the fin base 6.
  • the stepped portion 10 is formed only on a part of the first outer protruding wall portion 7, the holding strength of the first fin 20a by the first outer protruding wall portion 7 is reduced. Can be suppressed.
  • the plurality of stepped portions 10 and 10 b may be discretely formed along the second direction (y direction). As shown in FIG. 14, in a plan view of the fin base 6 from the side opposite to the main surface 6m, the stepped portion 10b may taper as it approaches the first fin insertion groove 16a.
  • the manufacturing method of the heat sink 1 includes a first fin 20a and a plurality of second fins 20c, and a first fin insertion groove 16a of the fin base 6, respectively. Inserting into the plurality of second fin insertion grooves 16c.
  • the manufacturing method of the heat sink 1 of the present embodiment uses the first press tool 25 to connect the first caulking portion 17 and the plurality of second caulking portions 17 c.
  • the first fin 20a and the plurality of second fins 20c are deformed and fixed to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the first protrusions 18 of the first caulking part 17 and the second protrusions 18c of the plurality of second caulking parts 17c are pressed by the first press tool 25 and plastically deformed.
  • the first protrusion 18 of the first caulking portion 17 is in close contact with the first fin 20a.
  • the first fin 20 a is sandwiched between the first outer protruding wall portion 7 and the first protruding portion 18 of the first caulking portion 17.
  • the first fin 20 a is in surface contact with the inner side surface 7 p of the first outer protruding wall portion 7.
  • the first protrusion 18 of the first caulking portion 17 and the second protrusion 18c of the second caulking portion 17c adjacent to the first caulking portion 17 are the second fins adjacent to the first fin 20a. It adheres closely to 20c.
  • the second fin 20c adjacent to the first fin 20a includes a first protrusion 18 of the first caulking part 17 and a second protrusion 18c of the second caulking part 17c adjacent to the first caulking part 17. It is pinched by.
  • the second protrusions 18c of the plurality of second caulking portions 17c that are not adjacent to the first caulking portion 17 are in close contact with the plurality of second fins 20c that are not adjacent to the first fin 20a.
  • the plurality of second fins 20 c that are not adjacent to the first fin 20 a are sandwiched by the second protrusions 18 c of the plurality of second crimping portions 17 c that are not adjacent to the first crimping portion 17.
  • a load is applied to the first outer protruding wall portion 7 through the first caulking portion 17 and the first fin 20a.
  • the width of the first outer protruding wall portion 7 is reduced and the number of the plurality of second fins 20c is increased. Is increasing.
  • the first outer protruding wall portion 7 is plastically deformed to the side opposite to the first caulking portion 17 (outside of the fin base 6), and the first outer protruding wall portion 7 is fixed to the fin base 6. There was a case of tilting outward (see FIGS. 7 and 8).
  • the amount of plastic deformation d 1 of the first projecting portion 18 outside the first caulking portion 17 is reached. However, it becomes larger than the plastic deformation amount d 2 of the first protrusion 18 inside the first caulking portion 17.
  • the distance between the first fin 20a and the second fin 20c adjacent to the first fin 20a is increased. Therefore, the speed of the refrigerant (for example, air) flowing between the first fin 20a and the second fin 20c is decreased, and the heat dissipation performance of the heat sink 1 is decreased.
  • the second press tool 27 is used to connect the outer side surface 7 q of the first outer protruding wall portion 7 to the first fin 20 a. And pressing toward.
  • the concave portion 11 is formed on the outer side surface 7q, and the concave portion 11 is formed on the first outer protruding wall portion 7.
  • a raised portion 12 having a convex curved surface 12a is formed.
  • the plastic deformation amount d 1 of the outer side of the first protrusion 18 of the first caulking portion 17, the The amount of plastic deformation d 2 of the first protrusion 18 inside the first caulking portion 17 is substantially equal.
  • the inclination of the tip 7c of the first outer protruding wall 7 and the inclination of the first fin 20a are corrected.
  • the distance between the first fin 20a and the second fin 20c adjacent to the first fin 20a is substantially equal to the distance between the second fins 20c adjacent to each other.
  • the first fin 20a is substantially parallel to the second fin 20c adjacent to the first fin 20a.
  • the speed of the refrigerant flowing between the first fin 20a and the second fin 20c adjacent to the first fin 20a is increased, and the heat dissipation performance of the heat sink 1 is improved. Further, sufficient surface pressure is applied between the first caulking portion 17 and the first fin 20 a and between the first fin 20 a and the first outer protruding wall portion 7. The thermal resistance between the first fin 20a and the fin base 6 is reduced, and the heat dissipation performance of the heat sink 1 is improved. Further, the holding strength of the first fin 20a by the fin base 6 increases.
  • pressing the outer side surface 7q using the second press tool 27 may include pressing the tip 7c using the second press tool 27.
  • the recessed part 11 and the raised part 12 may be formed in the front-end
  • the base 7b is thicker than the tip 7c. Even when the distal end portion 7 c is pressed using the second press tool 27, the base portion 7 b remains plastically deformed on the side opposite to the first caulking portion 17 (outside the fin base 6).
  • the outer side surface 7 q of the first outer protruding wall portion 7 may be pressed using a plurality of second press tools 27.
  • the width of each of the plurality of second press tools 27 in the second direction (y direction) may be shorter than the second length of the fin base 6 in the second direction (y direction).
  • the outer side surface 7q of the first outer protruding wall portion 7 may be pressed using one second press tool 27b.
  • the width in the second direction (y direction) of one second press tool 27b may be equal to or greater than the second length of the fin base 6 in the second direction (y direction).
  • the first length of the stepped portion 10 in the second direction (y direction) in which the first fin 20a extends is the same as that of the fin base 6 in the second direction (y direction). It may be smaller than the second length.
  • the step portion 10 shown in FIG. 13 can position the second press tool 27.
  • the stepped portion 10b in a plan view of the fin base 6 from the side opposite to the main surface 6m, the stepped portion 10b may be tapered toward the first fin insertion groove 16a.
  • the tip of the second press tool 27 slides on the side surface of the stepped portion 10b, and the stepped portion 10b can guide the second press tool 27 to a correct position in the second direction (y direction) (self-alignment function of the stepped portion 10b).
  • the step part 10b shown in FIG. 14 can improve the productivity of the heat sink 1.
  • the heat sink 1 includes a fin base 6, a first fin 20a, and a plurality of second fins 20c.
  • the fin base 6 includes a first outer protruding wall portion 7, a first fin insertion groove 16a, a plurality of second fin insertion grooves 16c, a first caulking portion 17, and a plurality of second caulking portions 17c.
  • the first fin insertion grooves 16a and the plurality of second fin insertion grooves 16c are arranged in the first direction (x direction).
  • the first fin insertion groove 16a is outside the plurality of second fin insertion grooves 16c in the first direction (x direction).
  • the first caulking portion 17 and the plurality of second caulking portions 17c are arranged in the first direction (x direction).
  • the first caulking portion 17 is outside the plurality of second caulking portions 17c in the first direction (x direction).
  • the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are opposite to the main surface 6m of the fin base 6.
  • the first outer protruding wall portion 7 is formed in the first outer region 6q of the fin base 6 on the side opposite to the main surface 6m.
  • the first outer region 6q is outside the inner region 6p in the first direction (x direction).
  • the first outer protruding wall portion 7 includes an inner side surface 7p facing the first fin insertion groove 16a and an outer side surface 7q opposite to the inner side surface 7p.
  • the first fin insertion groove 16 a is formed between the first outer protruding wall portion 7 and the first caulking portion 17.
  • the first fin 20a is inserted into the first fin insertion groove 16a.
  • the first fin 20a is in surface contact with the inner side surface 7p.
  • the first fin 20 a is caulked and fixed to the fin base 6 by the first caulking portion 17.
  • the plurality of second fins 20c are inserted into the plurality of second fin insertion grooves 16c.
  • the plurality of second fins 20c are caulked and fixed to the fin base 6 by the plurality of second caulking portions 17c.
  • the first outer protruding wall portion 7 includes a concave portion 11 formed on the outer side surface 7q, and a raised portion 12 that continues to the concave portion 11 and has a convex curved surface 12a.
  • the first fin 20a and the plurality of second fins 20c are respectively connected to the first fin insertion groove 16a and the plurality of second fin insertion grooves of the fin base 6. And 16c.
  • the fin base 6 includes a first outer protruding wall portion 7, a first fin insertion groove 16a, a plurality of second fin insertion grooves 16c, a first caulking portion 17, and a plurality of second caulking portions 17c.
  • the first fin insertion grooves 16a and the plurality of second fin insertion grooves 16c are arranged in the first direction (x direction).
  • the first fin insertion groove 16a is outside the plurality of second fin insertion grooves 16c in the first direction (x direction).
  • the first caulking portion 17 and the plurality of second caulking portions 17c are arranged in the first direction (x direction).
  • the first caulking portion 17 is outside the plurality of second caulking portions 17c in the first direction (x direction).
  • the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are opposite to the main surface 6m of the fin base 6.
  • the first outer protruding wall portion 7 is formed in the first outer region 6q of the fin base 6 on the side opposite to the main surface 6m.
  • the first outer region 6q is outside the inner region 6p in the first direction (x direction).
  • the first outer protruding wall portion 7 includes an inner side surface 7p facing the first fin insertion groove 16a and an outer side surface 7q opposite to the inner side surface 7p.
  • the first fin insertion groove 16 a is formed between the first outer protruding wall portion 7 and the first caulking portion 17.
  • the first press tool 25 is used to deform the first caulking portion 17 and the plurality of second caulking portions 17c so that the first fin 20a and the plurality of the first fins 20a are plural.
  • the second fin 20c is further caulked and fixed to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the first fin 20a is in surface contact with the inner side surface 7p.
  • the method for manufacturing the heat sink 1 according to the present embodiment further includes pressing the outer side surface 7q of the first outer protruding wall portion 7 toward the first fin 20a using the second press tool 27.
  • the heat sink 1 and the manufacturing method thereof even if the width of the first outer protruding wall portion 7 (the width w 1 of the base portion 7b) is decreased and the number of the plurality of second fins 20c is increased, The inclination of the first fin 20a is corrected, and the cooling efficiency of the refrigerant flowing between the first fin 20a and the second fin 20c adjacent to the first fin 20a is increased.
  • the first outer protruding wall portion 7 is in surface contact with the first fin 20a with sufficient surface pressure, and the thermal resistance between the first fin 20a and the fin base 6 is reduced. Therefore, the heat dissipation performance of the heat sink 1 can be improved without increasing the size of the heat sink 1.
  • FIG. 15 and FIG.16 the heat sink 1b of Embodiment 2 is demonstrated.
  • the heat sink 1b of the present embodiment has the same configuration as the heat sink 1 of the first embodiment and has the same effects, but is mainly different in the following points.
  • the outer side surface 7q of the first outer protruding wall portion 7 includes a tapered surface 13 connected to the recess portion 11 instead of the stepped portion 10.
  • the taper surface 13 is inclined so that the first outer protruding wall portion 7 becomes tapered as the distance from the main surface 6m increases.
  • the outer side surface 7q of the first outer protruding wall portion 7 includes a tapered surface 13, a concave portion 11, and a part of the convex curved surface 12a of the raised portion 12.
  • the first outer protruding wall portion 7 may include a base portion 7b and a tip portion 7c having a thickness smaller than that of the base portion 7b.
  • the taper surface 13, the recessed part 11, and the raised part 12 may be formed in the front-end
  • the tapered surface 13 may be at the lower end of the tip 7c.
  • the manufacturing method of the heat sink 1b of the present embodiment includes the same steps as the manufacturing method of the heat sink 1 of the first embodiment and has the same effects, but is mainly different in the following points.
  • the method for manufacturing the heat sink 1b of the present embodiment may include preparing the fin base 6.
  • the fin base 6 of the present embodiment has the same configuration as the fin base 6 of the first embodiment, but is mainly different in the following points.
  • the outer side surface 7 q of the first outer protruding wall portion 7 includes a tapered surface 13 instead of the stepped portion 10.
  • the taper surface 13 is inclined so that the first outer protruding wall portion 7 becomes tapered as the distance from the main surface 6m increases.
  • the ratio w 2 / w 1 of the minimum width w 2 of the distal end portion 7c to the width w 1 of the base portion 7b may be, for example, 0.50 or more and 0.60 or more. May be. Therefore, a decrease in the holding strength of the first fin 20a by the first outer protruding wall portion 7 can be suppressed.
  • the ratio w 2 / w 1 may be 0.95 or less, for example, or 0.80 or less. Therefore, in the step of correcting the inclination of the first fin 20a using the second press tool 27 (see FIG. 19), the press load applied from the second press tool 27 to the tip portion 7c can be reduced.
  • the height h 1 of the first tip surface 17p of the first caulking portion from the main surface 6m may be equal to or less than the height h 2 of the lower end of the tip portion 7c from the main surface 6m. For this reason, in the step of caulking the first caulking portion 17 using the first press tool 25 (see FIG. 19), the press load applied from the first press tool 25 to the first caulking portion 17 is reduced. obtain.
  • the height h 3 of the second tip surface 17q of the second caulking portion 17c from the main surface 6m may be equal to or less than the height h 2 of the lower end (step portion 10) of the tip portion 7c from the main surface 6m. . For this reason, in the step of caulking the second caulking portion 17c using the first press tool 25 (see FIG. 19), the press load applied from the first press tool 25 to the second caulking portion 17c is reduced. obtain.
  • the manufacturing method of the heat sink 1 b of the present embodiment includes the first fin 20 a and the plurality of second fins 20 c, respectively, and the first fin insertion groove 16 a of the fin base 6. Inserting into the plurality of second fin insertion grooves 16c.
  • the manufacturing method of the heat sink 1 b according to the present embodiment uses the first press tool 25 to deform the first caulking portion 17 and the plurality of second caulking portions 17 c. And caulking and fixing the first fin 20a and the plurality of second fins 20c to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the manufacturing method of the heat sink 1b of this Embodiment comprises using the 2nd press tool 27, pressing the outer side surface 7q of the 1st outer side protrusion wall part 7 toward the 1st fin 20a.
  • Pressing the outer side surface 7q using the second press tool 27 includes pressing the tapered surface 13 using the second press tool 27.
  • the concave portion 11 connected to the tapered surface 13 is formed on the outer side surface 7q, and the concave portion 11 is connected to the first outer protruding wall portion 7 and A raised portion 12 having a convex curved surface 12a is formed.
  • the heat sink 1b shown in FIGS. 15 and 16 is obtained.
  • the direction in which the tapered surface 13 is pressed using the second press tool 27 may be substantially the same as the direction in which the first caulking portion 17 is pressed using the first press tool 25.
  • the force F 2 that presses the first outer protruding wall portion 7 toward the main surface 6m is applied to the outer side surface 7q of the first outer protruding wall portion 7.
  • a force F 1 for pressing the first outer protruding wall portion 7 toward the first caulking portion 17 also acts. Therefore, the inclination of the tip 7c of the first outer protruding wall 7 and the inclination of the first fin 20a are corrected.
  • the first fin 20a is substantially parallel to the second fin 20c adjacent to the first fin 20a.
  • the speed of the refrigerant flowing between the first fin 20a and the second fin 20c adjacent to the first fin 20a is increased, and the heat dissipation performance of the heat sink 1b is improved. Further, sufficient surface pressure is applied between the first caulking portion 17 and the first fin 20 a and between the first fin 20 a and the first outer protruding wall portion 7. The thermal resistance between the first fin 20a and the fin base 6 is reduced, and the heat dissipation performance of the heat sink 1b is improved. Further, the holding strength of the first fin 20a by the fin base 6 increases.
  • the distal end portion 7c Since the tapered surface 13 is formed on the distal end portion 7c, the distal end portion 7c is thinner than the base portion 7b. Therefore, the press load applied from the second press tool 27 to the tip 7c in order to correct the inclination of the first fin 20a can be reduced. It is possible to suppress the first caulking portion 17 from being plastically deformed via the distal end portion 7c and the first fin 20a by pressing the distal end portion 7c using the second press tool 27. Since the base portion 7b is thicker than the tip portion 7c, even if the tip portion 7c is pressed using the second press tool 27, the base portion 7b is opposite to the first caulking portion 17 (outside of the fin base 6). ) Remains plastically deformed.
  • the taper surface 13 can be pressed using the second press tool 27.
  • the tapered surface 13 can improve the productivity of the heat sink 1b.
  • the pressing of the outer side surface 7q toward the first fin 20a using the second press tool 27 means that the first fin 20a and the plurality of second fins 20c are used using the first press tool 25. May be performed simultaneously with the caulking and fixing to the fin base 6.
  • the pressing of the outer side surface 7q toward the first fin 20a using the second press tool 27 means that the first fin 20a and the plurality of second fins 20c are used using the first press tool 25. May be performed after the caulking and fixing to the fin base 6 are completed.
  • the second press tool 27 is used to fix the outer side surface 7q. You may begin to press toward the 1st fin 20a.
  • FIG. 1c according to the third embodiment will be described with reference to FIGS.
  • the heat sink 1c of the present embodiment has the same configuration as the heat sink 1b of the second embodiment and has the same effects, but differs mainly in the following points.
  • the outer side surface 7q of the first outer protruding wall portion 7 includes a stepped portion 10 that connects the base portion 7b and the distal end portion 7c, a concave portion 11, and a convex curved surface 12a of the raised portion 12.
  • a portion and a tapered surface 13 are included.
  • the tapered surface 13 may be directly connected to the step portion 10.
  • the manufacturing method of the heat sink 1c of the present embodiment includes the same steps as the manufacturing method of the heat sink 1b of the second embodiment and has the same effects, but is mainly different in the following points.
  • the method for manufacturing the heat sink 1 c of the present embodiment may include preparing the fin base 6.
  • the fin base 6 of the present embodiment has the same configuration as the fin base 6 of the second embodiment, but is mainly different in the following points.
  • the outer side surface 7q of the first outer protruding wall portion 7 includes a stepped portion 10 that connects the base portion 7b and the distal end portion 7c, a concave portion 11, and a part of the convex curved surface 12a of the raised portion 12.
  • the tapered surface 13 may be directly connected to the step portion 10.
  • the outer side surface 7q of the distal end portion 7c of the first outer protruding wall portion 7 may include a concave curved surface 13b instead of the tapered surface 13.
  • the outer side surface 7q of the distal end portion 7c of the first outer protruding wall portion 7 may include a convex curved surface 13c instead of the tapered surface 13.
  • the first fin 20a and the plurality of second fins 20c are respectively connected to the first fin insertion groove 16a of the fin base 6. Inserting into the plurality of second fin insertion grooves 16c.
  • the manufacturing method of the heat sink 1c of the present embodiment uses the first press tool 25 to deform the first caulking portion 17 and the plurality of second caulking portions 17c. And caulking and fixing the first fin 20a and the plurality of second fins 20c to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the manufacturing method of the heat sink 1c of this Embodiment comprises using the 2nd press tool 27, pressing the outer side surface 7q of the 1st outer side protrusion wall part 7 toward the 1st fin 20a.
  • Pressing the outer side surface 7q using the second press tool 27 includes pressing the tapered surface 13 using the second press tool 27.
  • the concave portion 11 connected to the tapered surface 13 is formed on the outer side surface 7q, and the concave portion 11 is connected to the first outer protruding wall portion 7 and A raised portion 12 having a convex curved surface 12a is formed.
  • the heat sink 1c shown in FIGS. 20 and 21 is obtained.
  • the direction in which the tapered surface 13 is pressed using the second press tool 27 may be substantially the same as the direction in which the first caulking portion 17 is pressed using the first press tool 25.
  • the first outer protruding wall portion 7 includes a step portion 10 and a tapered surface 13. Therefore, the thickness of the tip portion 7c of the present embodiment is smaller than the thickness of the tip portion 7c of the second embodiment.
  • the press load applied from the second press tool 27 to the tip 7c can be further reduced. It is possible to further suppress the first caulking portion 17 from being plastically deformed through the tip portion 7c and the first fin 20a by pressing the tip portion 7c using the second press tool 27.
  • Embodiment 4 FIG. With reference to FIG. 26 and FIG. 27, the heat sink 1d of Embodiment 4 is demonstrated.
  • the heat sink 1d of the present embodiment has the same configuration as the heat sink 1b of the second embodiment and has the same effects, but mainly differs in the following points.
  • the first outer protruding wall portion 7 includes a top surface 7t that connects the inner side surface 7p and the outer side surface 7q.
  • the outer side surface 7q of the first outer protruding wall portion 7 includes a tapered surface 13 that extends to the top surface 7t of the first outer protruding wall portion 7.
  • the first outer protruding wall portion 7 may include a base portion 7b and a tip portion 7c having a thickness smaller than that of the base portion 7b.
  • the tapered surface 13 may be formed at the tip portion 7c.
  • the concave portion 11 and the raised portion 12 are not formed on the first outer protruding wall portion 7.
  • the fin base 6 may include a stepped portion 10 as in the fin base 6 of the first embodiment.
  • the manufacturing method of the heat sink 1d of the present embodiment includes the same steps as the manufacturing method of the heat sink 1b of the second embodiment and has the same effects, but is mainly different in the following points.
  • the method of manufacturing the heat sink 1d of the present embodiment may include preparing the fin base 6.
  • the fin base 6 of the present embodiment has a configuration similar to that of the fin base 6 of the second embodiment, but differs from the fin base 6 of the second embodiment in that the tapered surface 13 is not provided.
  • the first outer protruding wall portion 7 includes a top surface 7t connected to the inner side surface 7p and the outer side surface 7q.
  • the first outer protruding wall portion 7 includes an outer corner portion 7d formed by the outer side surface 7q and the top surface 7t. As shown in FIG.
  • the manufacturing method of the heat sink 1d of the present embodiment includes a first fin 20a and a plurality of second fins 20c, and a first fin insertion groove 16a of the fin base 6, respectively. Inserting into the plurality of second fin insertion grooves 16c.
  • the manufacturing method of the heat sink 1d of the present embodiment uses the first press tool 25 to connect the first caulking portion 17 and the plurality of second caulking portions 17c.
  • the first fin 20a and the plurality of second fins 20c are deformed and fixed to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the outer corner portion 7d of the first outer protruding wall portion 7 is pressed by the second tapered surface 27t of the second press tool 27.
  • the taper surface 13 is formed on the outer side surface 7q.
  • the direction in which the outer corner 7d is pressed by the second tapered surface 27t of the second press tool 27 is substantially the same as the direction in which the first caulking portion 17 is pressed using the first press tool 25. Also good.
  • the first outer protruding wall is formed on the outer side surface 7q of the first outer protruding wall 7. Not only a force F 2 that presses 7 toward the main surface 6 m but also a force F 1 that presses the first outer protruding wall portion 7 toward the first caulking portion 17 acts. Therefore, the inclination of the tip 7c of the first outer protruding wall 7 and the inclination of the first fin 20a are corrected.
  • the first fin 20a is substantially parallel to the second fin 20c adjacent to the first fin 20a.
  • the speed of the refrigerant flowing between the first fin 20a and the second fin 20c adjacent to the first fin 20a is increased, and the heat dissipation performance of the heat sink 1d is improved. Further, sufficient surface pressure is applied between the first caulking portion 17 and the first fin 20 a and between the first fin 20 a and the first outer protruding wall portion 7. The thermal resistance between the first fin 20a and the fin base 6 is reduced, and the heat dissipation performance of the heat sink 1d is improved. Further, the holding strength of the first fin 20a by the fin base 6 increases.
  • the outer corner portion 7d of the first outer protruding wall portion 7 is not subjected to the second press.
  • the tool 27 can be pressed by the second tapered surface 27t.
  • the second tapered surface 27t can improve the productivity of the heat sink 1d.
  • Pressing the outer corner 7d of the first outer protruding wall 7 with the second tapered surface 27t of the second press tool 27 uses the first press tool 25 and the first fin 20a and a plurality of second This may be performed simultaneously with the caulking and fixing of the two fins 20 c to the fin base 6. Pressing the outer corner 7d of the first outer protruding wall 7 with the second tapered surface 27t of the second press tool 27 uses the first press tool 25 and the first fin 20a and a plurality of second This may be performed after the second fin 20c is caulked and fixed to the fin base 6.
  • the second tapered surface 27t of the second press tool 27 (1) The outer corner 7d of the outer protruding wall 7 may start to be pressed.
  • Embodiment 5 FIG. With reference to FIG.30 and FIG.31, the heat sink 1e of Embodiment 5 is demonstrated.
  • the heat sink 1e of the present embodiment has the same configuration as the heat sink 1 of the first embodiment and has the same effects, but is mainly different in the following points.
  • the fin base 6 further includes a plurality of inner protruding wall portions 19 in the inner region 6p.
  • the plurality of inner protruding wall portions 19 and the plurality of second caulking portions 17c are alternately arranged in the first direction (x direction).
  • One second fin insertion groove 16c is formed.
  • the plurality of second fins 20 c are in surface contact with the plurality of inner protruding wall portions 19.
  • Each of the plurality of inner protruding wall portions 19 has a pair of side surfaces 19p and 19q that face each other in the first direction (x direction).
  • the plurality of second fins 20c are in surface contact with the side surface 19p or the side surface 19q, respectively.
  • the manufacturing method of the heat sink 1e of the present embodiment includes the same steps as the manufacturing method of the heat sink 1 according to the first embodiment and has the same effects, but is mainly different in the following points.
  • the method of manufacturing the heat sink 1e of the present embodiment may include preparing the fin base 6.
  • the fin base 6 of the present embodiment has the same configuration as the fin base 6 of the first embodiment, but is mainly different in the following points.
  • the fin base 6 further includes a plurality of inner protruding wall portions 19 in the inner region 6p.
  • the plurality of inner protruding wall portions 19 and the plurality of second caulking portions 17c are alternately arranged with being sandwiched in the first direction (x direction).
  • the manufacturing method of the heat sink 1e of the present embodiment includes a first fin 20a and a plurality of second fins 20c, and a first fin insertion groove 16a of the fin base 6, respectively. Inserting into the plurality of second fin insertion grooves 16c.
  • the manufacturing method of the heat sink 1e of the present embodiment uses the first press tool 25 to connect the first caulking portion 17 and the plurality of second caulking portions 17c.
  • the first fin 20a and the plurality of second fins 20c are deformed and fixed to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the first protrusions 18 of the first caulking part 17 and the second protrusions 18c of the plurality of second caulking parts 17c are pressed by the first press tool 25 and plastically deformed.
  • the first fin 20 a is in surface contact with the inner side surface 7 p of the first outer protruding wall portion 7.
  • the plurality of second fins 20 c are in surface contact with the side surfaces 19 p and 19 q of the plurality of inner protruding wall portions 19.
  • the number of the plurality of second caulking portions 17c included in the fin base 6 of the present embodiment is about half the number of the plurality of second caulking portions 17c included in the fin base 6 of the first embodiment. Therefore, using the first press tool 25, the first fin 20a and the plurality of second fins 20c are caulked to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively. In order to fix, the press load applied to the fin base 6 can be greatly reduced. When caulking and fixing the first fin 20a and the plurality of second fins 20c to the fin base 6 using the first press tool 25, a sealing resin (see FIG. 51) and a power semiconductor element (see FIG. 51) can be prevented from being damaged.
  • the first press tool 25 when used to caulk and fix the first fin 20a and the plurality of second fins 20c to the fin base 6,
  • the first outer protruding wall portion 7 may be plastically deformed to the side opposite to the first caulking portion 17 (outside of the fin base 6), and the first outer protruding wall portion 7 may be inclined to the outside of the fin base 6. (See FIG. 33).
  • the second press tool 27 is used so that the outer side surface 7q of the first outer protruding wall portion 7 faces the first fin 20a. Comprising pressing.
  • the concave portion 11 is formed on the outer side surface 7q, and the concave portion 11 is formed on the first outer protruding wall portion 7.
  • a raised portion 12 having a convex curved surface 12a is formed. The inclination of the tip 7c of the first outer protruding wall 7 and the inclination of the first fin 20a are corrected. In this way, the heat sink 1e shown in FIGS. 30 and 31 is obtained.
  • Embodiment 6 FIG. With reference to FIGS. 35 to 37, a method of manufacturing the heat sink 1e of the sixth embodiment will be described.
  • the manufacturing method of the heat sink 1e according to the present embodiment includes the same steps as the manufacturing method of the heat sink 1e according to the fifth embodiment and has the same effects, but is mainly different in the following points.
  • the manufacturing method of the heat sink 1e of the present embodiment may include preparing the fin base 6.
  • the fin base 6 of the present embodiment has the same configuration as the fin base 6 of the fifth embodiment, but is mainly different in the following points.
  • the plurality of inner protruding wall portions 19b taper as they move away from the main surface 6m.
  • Each of the plurality of inner protruding wall portions 19b has a pair of side surfaces 19p and 19q that face each other in the first direction (x direction).
  • the side surfaces 19p and 19q are tapered surfaces.
  • the inner side surface 7p of the first outer protruding wall portion 7 may include a tapered surface. The taper surface is inclined so that the first outer protruding wall portion 7 becomes tapered as the distance from the main surface 6m increases.
  • the first fin 20a and the plurality of second fins 20c are respectively connected to the first fin insertion groove 16a of the fin base 6. Inserting into the plurality of second fin insertion grooves 16c. Even if the positions of the plurality of second fins 20c are shifted in the first direction (x direction) with respect to the plurality of second fin insertion grooves 16c, the tips of the plurality of second fins 20c have a plurality of inner protrusions.
  • the side surfaces 19p and 19q of the plurality of inner protruding wall portions 19b can guide the plurality of second fins 20c to the correct positions in the first direction (x direction). Yes (self-alignment function of a plurality of tapered inner protruding wall portions 19b).
  • the plurality of tapered inner projecting wall portions 19b can improve the productivity of the heat sink 1e.
  • the first outer protruding wall portion in which the tip of the first fin 20a is a tapered surface. 7 can guide the first fin 20a to the correct position in the first direction (x direction).
  • the inner side surface 7p of the first outer protruding wall portion 7 that is a tapered surface can improve the productivity of the heat sink 1e.
  • the manufacturing method of the heat sink 1 e of the present embodiment uses the first press tool 25 to form the first caulking portion 17 and the plurality of second caulking portions 17 c.
  • the first fin 20a and the plurality of second fins 20c are deformed and fixed to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the first protrusions 18 of the first caulking part 17 and the second protrusions 18c of the plurality of second caulking parts 17c are pressed by the first press tool 25 and plastically deformed.
  • An oblique downward force F 3 shown in FIG. 36 acts on the lower end portion of the second fin 20c adjacent to the first fin 20a from the first protrusion 18 of the first caulking portion 17.
  • An oblique downward force F 4 shown in FIG. 36 acts on the lower ends of the plurality of second fins 20c from the second protrusions 18c of the plurality of second caulking portions 17c.
  • the plurality of second fins 20 c are harder than the fin base 6.
  • the plurality of second fins 20c are side surfaces 19p, 19q of the plurality of inner projecting wall portions 19b that are tapered surfaces from the base portions of the plurality of inner projecting wall portions 19b toward the tips of the plurality of inner projecting wall portions 19b.
  • the side surfaces 19p and 19q of the plurality of inner protruding wall portions 19b are not tapered side surfaces as shown in FIGS.
  • the plurality of second fins 20 c are in surface contact with the side surfaces 19 p and 19 q of the plurality of inner projecting wall portions 19 b and extend substantially perpendicular to the main surface 6 m of the fin base 6.
  • An oblique downward force F 5 shown in FIG. 36 is applied to the lower end portion of the first fin 20a from the first protrusion of the first caulking portion 17.
  • the first fin 20 a is in surface contact with the inner side surface 7 p of the first outer protruding wall portion 7.
  • the first fin 20 a is harder than the fin base 6.
  • the first fin 20a plastically deforms the lower portion of the inner side surface 7p of the first outer protruding wall portion 7 which is a tapered surface from the root portion of the first outer protruding wall portion 7.
  • the lower part of the inner side surface 7p of the first outer protruding wall 7 is not a tapered side surface.
  • the first outer protruding wall portion 7 is plastically deformed to the side opposite to the first caulking portion 17 (outside of the fin base 6), and the first outer protruding wall The portion 7 may be inclined to the outside of the fin base 6.
  • the upper part of the inner side surface 7p of the first outer protruding wall part 7 remains a tapered side surface, and there is a gap between the upper part of the inner side surface 7p of the first outer protruding wall part 7 and the first fin 20a. There was a thing.
  • the first fin 20a is located on the first caulking portion 17 side. There was a case of tilting toward the inside of the fin base 6 (see FIG. 36). The interval between the first fin 20a and the second fin 20c adjacent to the first fin 20a is reduced. The pressure loss of the refrigerant flowing between the first fin 20a and the second fin 20c increases, and the heat dissipation performance of the heat sink 1e decreases. Further, foreign matters such as dust are easily clogged between the first fin 20a and the second fin 20c adjacent to the first fin 20a. Therefore, the life of the heat sink 1e is shortened.
  • the second press tool 27 is used so that the outer side surface 7q of the first outer protruding wall portion 7 faces the first fin 20a. Comprising pressing.
  • the concave portion 11 is formed on the outer side surface 7q, and the concave portion 11 is formed on the first outer protruding wall portion 7.
  • a raised portion 12 having a convex curved surface 12a is formed.
  • the first fin 20a is harder than the fin base 6, by pressing the outer side surface 7q toward the first fin 20a using the second press tool 27, the first fin 20a is The upper part of the inner side surface 7p of the first outer protruding wall portion 7 is plastically deformed.
  • the upper part of the inner side surface 7p of the first outer protruding wall portion 7 is also not a tapered side surface, and becomes a surface extending substantially perpendicular to the main surface 6m of the fin base 6.
  • the inclination of the first fin 20a in contact with the inner side surface 7p of the first outer protruding wall portion 7 is corrected, and the first fin 20a extends substantially perpendicular to the main surface 6m of the fin base 6. . In this way, the heat sink 1e shown in FIGS. 30 and 31 is obtained.
  • the second press tool 27 By using the second press tool 27 to press the outer side surface 7q toward the first fin 20a, between the first fin 20a and the second fin 20c adjacent to the first fin 20a.
  • the first fin 20a is substantially parallel to the second fin 20c adjacent to the first fin 20a.
  • the pressure loss of the refrigerant flowing between the first fin 20a and the second fin 20c adjacent to the first fin 20a is reduced, and the heat dissipation performance of the heat sink 1e is improved. Further, foreign matters such as dust are less likely to be clogged between the first fin 20a and the second fin 20c adjacent to the first fin 20a. Therefore, the life of the heat sink 1e is extended.
  • Embodiment 7 FIG. With reference to FIGS. 38 to 41, the heat sink 1f of the seventh embodiment will be described.
  • the heat sink 1f of the present embodiment has the same configuration as the heat sink 1 of the first embodiment, but is mainly different in the following points.
  • the first fin 20a and the plurality of second fins 20c are larger in size than the fin base 6 in the wind path direction (second direction (y direction)). have.
  • the first fin 20 a and the plurality of second fins 20 c have a size larger than the opening 31 of the panel 30. .
  • the heat sink 1f of the present embodiment further includes a panel 30.
  • the panel 30 may be made of a metal material such as a galvanized steel plate or SUS, or may be made of a conductive resin material.
  • the panel 30 has a first surface 30m and a second surface 30n opposite to the first surface 30m.
  • the panel 30 has a size larger than that of the fin base 6 in the air passage direction (second direction (y direction)).
  • the panel 30 has a larger size than the first fin 20a and the plurality of second fins 20c in the air path direction (second direction (y direction)).
  • the panel 30 has an opening 31 that penetrates through the first surface 30m and the second surface 30n.
  • the opening 31 is smaller than the main surface 6m of the fin base 6 in a plan view from the side opposite to the main surface 6m of the fin base 6.
  • the opening 31 is larger than the inner region 6p and the first outer region 6q of the fin base 6 in a plan view from the side opposite to the main surface 6m of the fin base 6, and the second outer region 6r of the fin base 6. Smaller than.
  • the fin base 6 includes a recess 6k.
  • the recess 6 k is formed on the opposite side of the main surface 6 m of the fin base 6 and in the second outer region 6 r of the fin base 6.
  • the second outer region 6r is outside the first outer region 6q in the first direction (x direction).
  • the thickness of the fin base 6 in the second outer region 6r is smaller than the thickness of the fin base 6 in the first outer region 6q.
  • the first outer protruding wall portion 7, the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are the panel 30. In the opening 31.
  • the first surface 30m of the panel 30 is electrically connected to the first fin 20a and the plurality of second fins 20c.
  • the first surface 30m of the panel 30 is in contact with the end portion of the first fin 20a and the end portions of the plurality of second fins 20c.
  • the second surface 30n of the panel 30 is electrically connected to the recess portion 6k.
  • the second surface 30n of the panel 30 is in contact with the recess portion 6k.
  • the second surface 30n of the panel 30 may be in direct contact with the recess portion 6k, or may be in contact with the recess portion 6k via a conductive bonding member (not shown) such as solder.
  • the panel 30 is sandwiched between the recessed portion 6k of the fin base 6 and a plurality of fins (first fin 20a, a plurality of second fins 20c).
  • the panel 30 is thermally connected to the fin base 6 and a plurality of fins (the first fin 20a and the plurality of second fins 20c).
  • heat is also dissipated from the panel 30.
  • the panel 30 can improve the heat dissipation performance of the heat sink 1f.
  • the panel 30 prevents the coolant from flowing in the thickness direction of the fin base 6 (directions 33b and 33c). Therefore, the length of the plurality of fins (the first fin 20a and the plurality of second fins 20c) in the air path direction (second direction (y direction)) is the air path direction (second direction (y direction)).
  • the panel 30 allows the refrigerant to flow linearly along the air path direction (second direction (y direction)) indicated by the direction 33a even if it is larger than the length of the fin base 6 in)). .
  • the panel 30 can prevent the flow rate of the refrigerant between the plurality of fins (the first fin 20a and the plurality of second fins 20c) from decreasing, and can improve the heat dissipation performance of the heat sink 1f.
  • the height h 11 of the first surface 30m of the panel 30 from the main surface 6m of the fin base 6 is a fin insertion groove (first fin insertion from the main surface 6m of the fin base 6).
  • groove 16a may be higher than the bottom height of the portion h 12 of the second fin insertion groove 16c).
  • the height h 12 may be lower.
  • the thickness of the panel 30 is equal to the thickness of the fin base 6 in the region where the fin insertion grooves (the first fin insertion groove 16a and the second fin insertion groove 16c) are formed, and the fin base 6 in the recess portion 6k. It may be larger than the difference from the thickness of
  • first fin 20a and the plurality of second fins 20c it is possible to press a plurality of fins (the first fin 20a and the plurality of second fins 20c) against the first surface 30m of the panel 30.
  • the contact area between the first outer protruding wall portion 7 and the first fin 20a can be increased.
  • a plurality of fins (first fins 20 a and a plurality of second fins 20 c) can be brought into contact with the first surface 30 m of the panel 30.
  • the positions of the plurality of fins (the first fin 20a and the plurality of second fins 20c) in the thickness direction (third direction (z direction)) of the fin base 6 can be aligned.
  • the plurality of fins press the first surface 30 m of the panel 30 toward the main surface of the fin base 6, and the second surface of the panel 30. 30n can be reliably brought into contact with the recess 6k.
  • the heat dissipation performance of the heat sink 1f can be improved.
  • the panel 30 may be sandwiched between the recess portion 6k and a part of the first outer protruding wall portion 7. Specifically, the panel 30 may be sandwiched between the recess 6 k and the protrusion 14 of the first outer protrusion wall 7.
  • the projecting portion 14 projects from the outer side surface 7 q of the first outer projecting wall portion 7 to the outside of the fin base 6.
  • the protrusion 14 may be formed at the outer end portion of the stepped portion 10. The protrusion 14 presses the corner of the first surface 30 m of the panel 30 toward the main surface 6 m of the fin base 6.
  • the panel 30 can be fixed to the fin base 6.
  • the panel 30 and the fin base 6 are connected to each other with a small electric resistance.
  • the ground terminal connected to the ground (ground potential) can be locked to a hole (not shown) formed in the panel 30 instead of the fin base 6. It is not necessary to form a screwing portion for screwing the ground terminal on the fin base 6, and the fin base 6 can be miniaturized. Also, the impedance between the ground and the heat sink 1f can be reduced. The resistance of the heat sink 1f to electromagnetic noise can be improved.
  • the manufacturing method of the heat sink 1f of the present embodiment includes the same steps as the manufacturing method of the heat sink 1 of the first embodiment, but mainly differs in the following points.
  • the method of manufacturing the heat sink 1f of the present embodiment may include preparing the fin base 6.
  • the fin base 6 of the present embodiment has the same configuration as the fin base 6 of the first embodiment, but mainly differs in the following points.
  • the fin base 6 of the present embodiment includes a recess portion 6k.
  • the recess portion 6k is formed on the opposite side of the main surface 6m and in the second outer region 6r of the fin base 6.
  • the second outer region 6r is outside the first outer region 6q in the first direction (x direction).
  • the method of manufacturing the heat sink 1f of the present embodiment includes placing the panel 30 on the recess portion 6k of the fin base 6.
  • the panel 30 includes a first surface 30m, a second surface 30n opposite to the first surface 30m, and an opening 31 that penetrates through the first surface 30m and the second surface 30n. ing.
  • the opening 31 is larger than the inner region 6p and the first outer region 6q of the fin base 6 in a plan view from the side opposite to the main surface 6m of the fin base 6, and the second outer region 6r of the fin base 6. Smaller than.
  • the second surface 30n of the panel 30 is in contact with the recess portion 6k.
  • the first outer protruding wall portion 7, the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are openings. 31.
  • the first fin 20a and the plurality of second fins 20c are respectively connected to the first fin insertion groove 16a of the fin base 6. Inserting into the plurality of second fin insertion grooves 16c. End portions of the plurality of fins (first fins 20 a and second fins 20 c) are in contact with the first surface 30 m of the panel 30. The positions of the plurality of fins (the first fin 20a and the plurality of second fins 20c) in the thickness direction (third direction (z direction)) of the fin base 6 can be aligned.
  • the manufacturing method of the heat sink 1f of the present embodiment uses the first press tool 25 to connect the first caulking portion 17 and the plurality of second caulking portions 17c.
  • the first fin 20a and the plurality of second fins 20c are deformed and fixed to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the first protrusions 18 of the first caulking part 17 and the second protrusions 18c of the plurality of second caulking parts 17c are pressed by the first press tool 25 and plastically deformed.
  • the first press tool 25 when the first press tool 25 is used to caulk and fix the first fin 20a and the plurality of second fins 20c to the fin base 6,
  • the first outer protruding wall portion 7 is plastically deformed to the side opposite to the first caulking portion 17 (outside of the fin base 6), and the first outer protruding wall portion 7 is inclined to the outside of the fin base 6 (see FIG. 45). reference).
  • the panel 30 is sandwiched between the recess portion 6 k and a part of the first outer protruding wall portion 7. Specifically, the panel 30 may be sandwiched between the recess 6 k and the protrusion 14 of the first outer protrusion wall 7.
  • the projecting portion 14 projects from the outer side surface 7 q of the first outer projecting wall portion 7 to the outside of the fin base 6.
  • the protrusion 14 may be formed at the outer end portion of the stepped portion 10.
  • the second press tool 27 is used so that the outer side surface 7q of the first outer protruding wall portion 7 faces the first fin 20a. Comprising pressing.
  • the concave portion 11 is formed on the outer side surface 7q, and the concave portion 11 is formed on the first outer protruding wall portion 7.
  • a raised portion 12 having a convex curved surface 12a is formed. The inclination of the tip 7c of the first outer protruding wall 7 and the inclination of the first fin 20a are corrected.
  • the base portion 7b is thicker than the tip portion 7c, even if the tip portion 7c is pressed using the second press tool 27, the base portion 7b is opposite to the first caulking portion 17 (outside of the fin base 6). ) Remains plastically deformed.
  • the panel 30 remains sandwiched between the recess portion 6k and a part of the first outer protruding wall portion 7. In this way, the heat sink 1f shown in FIGS. 40 and 41 is obtained.
  • the effect of the heat sink 1f of this embodiment and the manufacturing method thereof will be described.
  • the heat sink 1f and the manufacturing method thereof according to the present embodiment have the following effects in addition to the effects of the heat sink 1 and the manufacturing method thereof according to the first embodiment.
  • the heat sink 1f of the present embodiment further includes a panel 30.
  • the panel 30 includes a first surface 30m, a second surface 30n opposite to the first surface 30m, and an opening 31 penetrating through the first surface 30m and the second surface 30n.
  • the fin base 6 includes a recess portion 6k.
  • the recess portion 6k is formed on the opposite side of the main surface 6m and in the second outer region 6r of the fin base 6.
  • the second outer region 6r is outside the first outer region 6q in the first direction (x direction).
  • the first outer protruding wall portion 7, the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are openings.
  • the first surface 30m is in contact with the end of the first fin 20a.
  • the second surface 30n is in contact with the recess 6k.
  • the manufacturing method of the heat sink 1f of the present embodiment further includes placing the panel 30 on the recess portion 6k of the fin base 6.
  • the recess portion 6k is formed on the opposite side of the main surface 6m and in the second outer region 6r of the fin base 6.
  • the second outer region 6r is outside the first outer region 6q in the first direction (x direction).
  • the panel 30 includes a first surface 30m, a second surface 30n opposite to the first surface 30m, and an opening 31 that penetrates through the first surface 30m and the second surface 30n. ing.
  • the first outer protruding wall portion 7, the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are openings. 31.
  • the first surface 30m is in contact with the end of the first fin 20a.
  • the second surface 30n is in contact with the recess 6k.
  • Panel 30 can prevent the flow rate of the refrigerant between the plurality of fins (the first fin 20a and the plurality of second fins 20c) from decreasing.
  • the heat can be dissipated from the panel 30 as well as the plurality of fins (the first fins 20a and the plurality of second fins 20c). According to the heat sink 1f and the manufacturing method thereof of the present embodiment, the heat dissipation performance of the heat sink 1f can be improved.
  • Embodiment 8 FIG.
  • the heat sink 1g according to the eighth embodiment will be described with reference to FIGS.
  • the heat sink 1g of the present embodiment has the same configuration as the heat sink 1f of the seventh embodiment, but is mainly different in the following points.
  • the panel 30 is sandwiched between the recess portion 6k and a part of the first outer protruding wall portion 7. Specifically, the panel 30 is sandwiched between the recess 6 k and the protrusion 14 of the first outer protrusion wall 7.
  • the projecting portion 14 projects from the outer side surface 7 q of the first outer projecting wall portion 7 to the outside of the fin base 6.
  • the protrusion 14 covers a part of the first surface 30 m of the panel 30.
  • the manufacturing method of the heat sink 1g of the present embodiment includes the same steps as the manufacturing method of the heat sink 1b of the second embodiment and has the same effects, but is mainly different in the following points.
  • the method for manufacturing the heat sink 1g according to the present embodiment may include preparing the fin base 6.
  • the fin base 6 of the present embodiment has the same configuration as the fin base 6 of the second embodiment, but differs mainly in the following points.
  • the fin base 6 of the present embodiment includes a recess portion 6k.
  • the recess portion 6k is formed on the opposite side of the main surface 6m and in the second outer region 6r of the fin base 6.
  • the second outer region 6r is outside the first outer region 6q in the first direction (x direction).
  • the manufacturing method of the heat sink 1g includes placing the panel 30 on the recessed portion 6k of the fin base 6.
  • the panel 30 includes a first surface 30m, a second surface 30n opposite to the first surface 30m, and an opening 31 that penetrates through the first surface 30m and the second surface 30n. ing.
  • the opening 31 is larger than the inner region 6p and the first outer region 6q of the fin base 6 in a plan view from the side opposite to the main surface 6m of the fin base 6, and the second outer region 6r of the fin base 6. Smaller than.
  • the second surface 30n of the panel 30 is in contact with the recess portion 6k.
  • the first outer protruding wall portion 7, the first fin insertion groove 16a, the plurality of second fin insertion grooves 16c, the first caulking portion 17, and the plurality of second caulking portions 17c are openings. 31.
  • the first fin 20a and the plurality of second fins 20c are respectively connected to the first fin insertion groove 16a of the fin base 6. Inserting into the plurality of second fin insertion grooves 16c. End portions of the plurality of fins (first fins 20 a and second fins 20 c) are in contact with the first surface 30 m of the panel 30. The positions of the plurality of fins (the first fin 20a and the plurality of second fins 20c) in the thickness direction (third direction (z direction)) of the fin base 6 can be aligned.
  • the manufacturing method of the heat sink 1g of the present embodiment uses the first press tool 25 to deform the first caulking portion 17 and the plurality of second caulking portions 17c. And caulking and fixing the first fin 20a and the plurality of second fins 20c to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the manufacturing method of the heat sink 1g of the present embodiment includes pressing the outer side surface 7q of the first outer protruding wall portion 7 toward the first fin 20a by using the second press tool 27.
  • Pressing the outer side surface 7 q using the second press tool 27 includes pressing the tapered surface 13 using the second press tool 27.
  • the direction in which the tapered surface 13 is pressed using the second press tool 27 may be substantially the same as the direction in which the first caulking portion 17 is pressed using the first press tool 25.
  • a force F 2 for pressing the first outer protruding wall portion 7 toward the main surface 6m also acts.
  • the first outer protruding wall portion 7 is plastically deformed to form the concave portion 11 and the protruding portion 14 on the outer side surface 7q, and the first outer protruding wall portion 7 is connected to the concave portion 11 and has a convex curved surface.
  • a raised portion 12 having 12a is formed.
  • the protrusion 14 protrudes to the outside of the fin base 6 from the outer side surface 7q.
  • the protrusion 14 covers a part of the first surface 30 m of the panel 30.
  • the panel 30 is sandwiched between the recess 6 k and the protrusion 14 of the first outer protrusion wall 7.
  • the heat sink 1g shown in FIGS. 47 and 48 is obtained.
  • the heat sink 1g and the manufacturing method thereof according to the present embodiment exhibit the effects of the heat sink 1b and the manufacturing method of the second embodiment and the effects of the heat sink 1f and the manufacturing method of the seventh embodiment.
  • Embodiment 9 FIG. With reference to FIG. 52, the power module 90 of Embodiment 9 will be described.
  • the power module 90 according to the present embodiment mainly includes the heat sink 1g according to the eighth embodiment, the power semiconductor elements 50 and 50b, and the sealing member 60.
  • the power module 90 may further include a support member 35 that supports and fixes the heat sink 1g.
  • the power semiconductor elements 50 and 50b may be, for example, insulated gate bipolar transistors (IGBTs) or MOS field effect transistors (MOSFETs).
  • the power semiconductor elements 50 and 50b may be mainly composed of a semiconductor material such as silicon (Si), or a wide band gap semiconductor material such as silicon carbide (SiC), gallium nitride (GaN), or diamond. It may be configured.
  • the power semiconductor elements 50 and 50 b are mounted on the main surface 6 m of the fin base 6.
  • the insulating sheet 40 is provided on the main surface 6 m of the fin base 6.
  • the insulating sheet 40 is a heat transfer sheet having electrical insulation.
  • Electrodes 42 and 42 b are provided on the insulating sheet 40.
  • the power semiconductor element 50 is bonded to the electrode 42 via the conductive bonding member 51.
  • the power semiconductor element 50b is bonded to the electrode 42b through the conductive bonding member 51b.
  • the electrode 42 is connected to the lead frame 52 via a conductive wire 55.
  • the electrode 42b is connected to the lead frame 52b through the conductive wire 55b.
  • the sealing member 60 seals the power semiconductor elements 50, 50 b and a part of the fin base 6.
  • the sealing member 60 has electrical insulation.
  • the sealing member 60 is not particularly limited, but may be made of an insulating resin material such as an epoxy resin.
  • the support member 35 may include a recess 36 serving as an air path.
  • the first fin 20 a and the plurality of second fins 20 c are accommodated in the recess 36.
  • the panel 30 is placed on the top surface of the support member 35.
  • the panel 30 may include a hole 30h such as a screw hole penetrating between the first surface 30m and the second surface 30n.
  • the panel 30 is fixed to the support member 35 by a fixing member 37 such as a screw inserted into the hole 30h. Therefore, the vibration resistance of the heat sink 1g is improved.
  • the method for manufacturing the power module 90 of the present embodiment includes placing the power semiconductor elements 50 and 50b on the main surface 6m of the fin base 6 (S1). Specifically, the insulating sheet 40 is provided on the main surface 6 m of the fin base 6. Electrodes 42 and 42 b are provided on the insulating sheet 40. The power semiconductor element 50 is bonded to the electrode 42 via the conductive bonding member 51. The power semiconductor element 50b is bonded to the electrode 42b through the conductive bonding member 51b. Further, the lead frame 52 may be connected to the electrode 42 via the conductive wire 55. The lead frame 52b may be connected to the electrode 42b through the conductive wire 55b.
  • the method for manufacturing the power module 90 of the present embodiment includes sealing the power semiconductor elements 50 and 50b and a part of the fin base 6 with the sealing member 60 (S2).
  • the fin base 6 on which the power semiconductor elements 50 and 50b are mounted, the lead frames 52 and 52b, and the conductive wires 55 and 55b are arranged in a mold.
  • the power semiconductor elements 50 and 50b and a part of the fin base 6 are sealed with the sealing member 60 by the tonlas fur mold method or the like.
  • the sealing member 60 may further seal part of the lead frames 52 and 52b and the conductive wires 55 and 55b.
  • the manufacturing method of the power module 90 of the present embodiment includes attaching the first fin 20a and the plurality of second fins 20c to the fin base 6 by the manufacturing method of the heat sink 1g of the eighth embodiment (S3).
  • the first press tool 25 is used to deform the first caulking portion 17 and the plurality of second caulking portions 17c, so that the first fin 20a and the plurality of second fins 20c Are caulked and fixed to the fin base 6 by the first caulking portion 17 and the plurality of second caulking portions 17c, respectively.
  • the second press tool 27 the outer side surface 7q of the first outer protruding wall portion is pressed toward the first fin 20a.
  • the method for manufacturing the power module 90 of the present embodiment includes fixing the panel 30 to the support member 35 (S4). Specifically, the fixing member 37 is inserted into the hole 30 h of the panel 30 to fix the panel 30 to the support member 35. Thus, the power module 90 of the present embodiment is obtained.
  • any one of the heat sinks 1, 1b, 1c, 1d, 1e, and 1f of the first to seventh embodiments and their modifications is provided. May be used.
  • the method for manufacturing the power module 90 supports the panel 30. The step (S4) of fixing to the member 35 may not be provided.
  • the power module 90 and the manufacturing method thereof according to the present embodiment have the following effects similar to those of the heat sink 1g and the manufacturing method thereof according to the first to eighth embodiments and modifications thereof. According to the power module 90 and the manufacturing method thereof of the present embodiment, the heat dissipation performance of the power module 90 can be improved without increasing the size of the power module 90.
  • Embodiments 1-9 and their modifications disclosed this time should be considered as illustrative in all points and not restrictive. As long as there is no contradiction, at least two of Embodiments 1-9 and their modifications disclosed this time may be combined.
  • the scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

L'invention concerne un dissipateur thermique (1) comprenant une base d'ailette (6), une première ailette (20a) et une pluralité de secondes ailettes (20c). La base d'ailette (6) comprend une première section de paroi saillante externe (7). La première section de paroi saillante externe (7) est formée dans une première région externe (6q) de la base d'ailette (6). La première ailette (20a) et la pluralité de secondes ailettes (20c) sont fixées à la base d'ailette (6) par agrafage. La première section de paroi saillante externe (7) comprend : une section évidée (11) formée dans la surface latérale externe (7q) de celle-ci ; et une section bombée (12) continue avec la section évidée (11) et ayant une surface convexe (12a). Par conséquent, les performances de rayonnement thermique du dissipateur thermique (1) sont améliorées sans augmenter la taille du dissipateur thermique (1).
PCT/JP2019/005059 2018-02-23 2019-02-13 Dissipateur thermique, module de puissance et procédé de fabrication associé WO2019163600A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020501698A JP6937886B2 (ja) 2018-02-23 2019-02-13 ヒートシンク及びパワーモジュール並びにそれらの製造方法
CN201980013105.1A CN111801789B (zh) 2018-02-23 2019-02-13 散热器、功率模块及其制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-031127 2018-02-23
JP2018031127 2018-02-23

Publications (1)

Publication Number Publication Date
WO2019163600A1 true WO2019163600A1 (fr) 2019-08-29

Family

ID=67688096

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/005059 WO2019163600A1 (fr) 2018-02-23 2019-02-13 Dissipateur thermique, module de puissance et procédé de fabrication associé

Country Status (3)

Country Link
JP (1) JP6937886B2 (fr)
CN (1) CN111801789B (fr)
WO (1) WO2019163600A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023194011A1 (fr) * 2022-04-06 2023-10-12 Lisa Dräxlmaier GmbH Barre omnibus à refroidissement actif
WO2023194012A1 (fr) * 2022-04-06 2023-10-12 Lisa Dräxlmaier GmbH Barre omnibus à refroidissement passif
US12027445B2 (en) 2021-02-02 2024-07-02 Jmj Korea Co., Ltd. System for cooling semiconductor component, method of manufacturing the same, and semiconductor package having the system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117481U (ja) * 1991-03-29 1992-10-21 株式会社東芝 冷却フイン装置
WO2015046040A1 (fr) * 2013-09-27 2015-04-02 三菱電機株式会社 Dissipateur thermique ondulé et module de puissance ayant un dissipateur thermique intégré
JP2016086134A (ja) * 2014-10-29 2016-05-19 三菱電機株式会社 ヒートシンク、ヒートシンク一体型パワーモジュールおよびそれらの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4881583B2 (ja) * 2005-06-27 2012-02-22 株式会社豊田自動織機 パワーモジュール用ヒートシンク
JP3140755U (ja) * 2008-01-21 2008-04-10 水谷電機工業株式会社 コルゲートフィン型放熱器
CN102668066B (zh) * 2009-11-17 2015-04-29 三菱电机株式会社 散热设备及散热设备的制造方法
JP6274709B2 (ja) * 2016-01-21 2018-02-07 株式会社Uacj 熱交換器用ヒートシンク及び該ヒートシンクを備えた熱交換器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04117481U (ja) * 1991-03-29 1992-10-21 株式会社東芝 冷却フイン装置
WO2015046040A1 (fr) * 2013-09-27 2015-04-02 三菱電機株式会社 Dissipateur thermique ondulé et module de puissance ayant un dissipateur thermique intégré
JP2016086134A (ja) * 2014-10-29 2016-05-19 三菱電機株式会社 ヒートシンク、ヒートシンク一体型パワーモジュールおよびそれらの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12027445B2 (en) 2021-02-02 2024-07-02 Jmj Korea Co., Ltd. System for cooling semiconductor component, method of manufacturing the same, and semiconductor package having the system
WO2023194011A1 (fr) * 2022-04-06 2023-10-12 Lisa Dräxlmaier GmbH Barre omnibus à refroidissement actif
WO2023194012A1 (fr) * 2022-04-06 2023-10-12 Lisa Dräxlmaier GmbH Barre omnibus à refroidissement passif

Also Published As

Publication number Publication date
CN111801789B (zh) 2024-05-07
JP6937886B2 (ja) 2021-09-22
JPWO2019163600A1 (ja) 2020-12-03
CN111801789A (zh) 2020-10-20

Similar Documents

Publication Publication Date Title
JP5418601B2 (ja) 放熱機器及び放熱機器の製造方法
US6204554B1 (en) Surface mount semiconductor package
US7813135B2 (en) Semiconductor device
JP6210818B2 (ja) 半導体装置およびその製造方法
US5886397A (en) Crushable bead on lead finger side surface to improve moldability
EP2557633B1 (fr) Borne engagee a la presse et module semi-conducteur
US8659147B2 (en) Power semiconductor circuit device and method for manufacturing the same
JP5432085B2 (ja) 電力半導体装置
KR20100061700A (ko) 열적으로 강화된 박형 반도체 패키지
US9870974B2 (en) Power conversion apparatus including wedge inserts
WO2019163600A1 (fr) Dissipateur thermique, module de puissance et procédé de fabrication associé
JP2000323593A (ja) 半導体装置
JP6580015B2 (ja) モールド樹脂封止型パワー半導体装置
JP4137840B2 (ja) 電力用半導体装置
US20160035657A1 (en) Semiconductor device and semiconductor module
US20230238297A1 (en) Semiconductor package and method of fabricating the same
CN110462820B (zh) 具有带有凹形弯曲部的底板的半导体模块
JP3833464B2 (ja) リードフレーム
EP3890009A1 (fr) Module de puissance de refroidissement double face avec des couches de connexion comprenant des éléments anti-inclinaison
CN114512462A (zh) 半导体装置及其制造方法
JP6844166B2 (ja) 半導体装置
JP6771502B2 (ja) 樹脂封止型半導体装置
WO2023139687A1 (fr) Dispositif à semi-conducteurs et procédé de production de dispositif à semi-conducteurs
JP2022077623A (ja) リードフレーム、半導体装置及び半導体装置の製造方法
JP2017201726A (ja) 半導体装置およびその製造方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19757357

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2020501698

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19757357

Country of ref document: EP

Kind code of ref document: A1