WO2019151340A1 - アクチュエータ及びワイヤボンディング装置 - Google Patents

アクチュエータ及びワイヤボンディング装置 Download PDF

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Publication number
WO2019151340A1
WO2019151340A1 PCT/JP2019/003217 JP2019003217W WO2019151340A1 WO 2019151340 A1 WO2019151340 A1 WO 2019151340A1 JP 2019003217 W JP2019003217 W JP 2019003217W WO 2019151340 A1 WO2019151340 A1 WO 2019151340A1
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WO
WIPO (PCT)
Prior art keywords
capillary
force
generation unit
carriage
drive shaft
Prior art date
Application number
PCT/JP2019/003217
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English (en)
French (fr)
Japanese (ja)
Inventor
洋平 内田
尚也 平良
Original Assignee
株式会社新川
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社新川 filed Critical 株式会社新川
Priority to JP2019569186A priority Critical patent/JP7002148B2/ja
Priority to KR1020207022535A priority patent/KR102420211B1/ko
Priority to CN201980010485.3A priority patent/CN111656502B/zh
Publication of WO2019151340A1 publication Critical patent/WO2019151340A1/ja

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors

Definitions

  • the present disclosure relates to an actuator and a wire bonding apparatus.
  • Patent Document 1 discloses a wire bonding apparatus.
  • the wire bonding apparatus has a capillary which is a bonding tool.
  • the wire bonding apparatus connects a wire to an electrode by applying heat or ultrasonic vibration to the wire using the capillary.
  • a manufacturing apparatus such as a wire bonding apparatus disclosed in Patent Document 1 requires a plurality of moving mechanisms.
  • the operation of the manufacturing apparatus includes movement of a processing target component to be processed and movement of a tool with respect to the processing target component. Therefore, the manufacturing apparatus requires an actuator for realizing the movement mode required for each of the component to be processed and the tool.
  • the present disclosure describes an actuator and a wire bonding apparatus capable of a plurality of operations.
  • An actuator includes a first force generation unit that generates a force in a positive direction along a first direction and a force in a negative direction opposite to the positive direction along the first direction. And a second force generator that is spaced apart in a second direction orthogonal to the first direction with respect to the first force generator, and that generates a force in the positive direction and a force in the negative direction, A control unit that controls the direction and magnitude of the force generated by the first force generation unit and the second force generation unit, and a moving body that is stretched over the first force generation unit and the second force generation unit. The unit translates the moving body along the first direction by matching the direction of the force generated by the first force generation unit and the direction of the force generated by the second force generation unit. By making the direction of the force generated by the generator opposite to the direction of the force generated by the second force generator , It is rotated about the center of gravity of the moving body.
  • the actuator includes a first force generator and a second force generator.
  • the force generated by each force generator is controlled by the controller.
  • the moving body can be moved along the first direction by matching the direction of the force of the first force generation unit and the direction of the force of the second force generation unit.
  • the torque around the center of gravity can be provided to the moving body by reversing the direction of the force of the second force generation unit with respect to the direction of the force of the first force generation unit.
  • the moving body can be rotated around the center of gravity.
  • the actuator can provide the moving body with a plurality of operations such as translation along the first direction and rotation around the center of gravity.
  • the first force generation unit and the second force generation unit may be arranged with the center of gravity of the moving body sandwiched along the second direction. According to this configuration, the moving body can be efficiently rotated.
  • the first force generation unit and the second force generation unit are connected to the control unit and include an ultrasonic generation unit that is controlled by the control unit, and a contact unit that extends in the first direction and contacts the moving body. And a drive shaft that is fixed to the ultrasonic wave generation unit and receives ultrasonic vibration generated by the ultrasonic wave generation unit.
  • the force generated by the first force generation part and the second force generation part may be a frictional force at the contact part.
  • the frictional force may be controlled by the ultrasonic frequency.
  • the table may have a main surface and a back surface.
  • One of the main surface and the back surface may include a contact portion.
  • a wire bonding apparatus includes a bonding tool that detachably holds a capillary, and a capillary replacement unit that attaches or detaches the capillary to or from the bonding tool, and the capillary replacement unit includes the actuator described above.
  • the capillary replacement unit includes the actuator described above.
  • This wire bonding apparatus includes a capillary replacement unit including the actuator described above.
  • This actuator can perform two operations, translation and rotation. Therefore, it is possible to suppress an increase in size of the capillary replacement part while providing a capillary replacement function to the wire bonding apparatus. Therefore, it is possible to achieve both high functionality and downsizing of the wire bonding apparatus.
  • an actuator and a wire bonding apparatus capable of a plurality of operations are described.
  • FIG. 1 is a perspective view showing a wire bonding apparatus according to an embodiment.
  • FIG. 2 is an enlarged perspective view showing the capillary exchange part of the wire bonding apparatus shown in FIG.
  • FIG. 3 is a perspective view showing a part of the capillary holding section in a cross-sectional view.
  • FIG. 4 is a diagram for explaining the operation of the capillary holder.
  • FIG. 5 is a perspective view showing a part of the capillary guide section in a cross-sectional view.
  • FIG. 6 is a diagram showing a capillary guide function played by the capillary holding part and the capillary guide part.
  • FIG. 7 is a diagram showing another guide function of the capillary played by the capillary holding part and the capillary guide part.
  • FIG. 1 is a perspective view showing a wire bonding apparatus according to an embodiment.
  • FIG. 2 is an enlarged perspective view showing the capillary exchange part of the wire bonding apparatus shown in FIG.
  • FIG. 3 is a
  • FIG. 8 is a plan view showing the main part of the actuator included in the capillary exchange part shown in FIG.
  • FIG. 9 is a diagram illustrating the operating principle of the actuator.
  • FIG. 10 is a diagram illustrating specific control of the actuator.
  • FIG. 11 is a diagram illustrating specific control of the actuator.
  • FIG. 12 is a diagram illustrating main operations of the capillary exchange unit.
  • FIG. 13 is a diagram showing the main operation of the capillary exchange unit following FIG.
  • FIG. 14 is a diagram showing the main operation of the capillary exchange unit following FIG.
  • FIG. 15 is a diagram showing the main operation of the capillary exchange unit following FIG.
  • FIG. 16 is a perspective view showing a cross section of a capillary holding part according to a modification.
  • the wire bonding apparatus 1 shown in FIG. 1 electrically connects, for example, an electrode provided on a printed board or the like and an electrode of a conductor element attached to the printed board using a thin metal wire.
  • the wire bonding apparatus 1 provides heat, ultrasonic waves or pressure to the wire in order to connect the wire to the electrode.
  • the wire bonding apparatus 1 includes a base 2, a bonding unit 3, and a transport unit 4.
  • the bonding unit 3 performs the above connection work.
  • the transport unit 4 transports a printed circuit board, which is a component to be processed, to a bonding area.
  • the bonding unit 3 includes the bonding tool 6, and an ultrasonic horn 7 is provided at the tip of the bonding tool 6.
  • a capillary 8 is detachably provided at the tip of the ultrasonic horn 7. The capillary 8 provides heat, ultrasound or pressure to the wire.
  • the direction in which the ultrasonic horn 7 extends is the X axis.
  • the direction in which the printed circuit board is conveyed by the conveyance unit 4 is defined as a Y axis (second direction).
  • the direction in which the capillary 8 moves when performing the bonding operation is taken as the Z-axis.
  • the wire bonding apparatus 1 includes a capillary exchange unit 9.
  • the capillary exchange unit 9 automatically exchanges the capillary 8 without any operator operation.
  • the capillary exchange unit 9 collects the capillary 8 attached to the ultrasonic horn 7. Further, the capillary exchange unit 9 attaches the capillary 8 to the ultrasonic horn 7.
  • the replacement operation of the capillary 8 includes an operation of collecting the capillary 8 and an operation of mounting the capillary 8.
  • the replacement operation of the capillary 8 is automatically performed when a preset condition is satisfied.
  • the condition may be the number of bonding operations. That is, every time a predetermined number of bonding operations are performed, the operation of replacing the capillary 8 may be performed.
  • the capillary exchange unit 9 includes a capillary holding unit 11, a capillary guide unit 12, and an actuator 13 as main components. Further, as an additional component, the capillary exchange unit 9 includes an attaching / detaching jig 15 and a jig driving unit 20 that drives the attaching / detaching jig 15.
  • the capillary holding unit 11 holds the capillary 8.
  • the capillary holder 11 is attached to the actuator 13 via the holder 14.
  • the shape of the capillary holding part 11 is a cylinder extending in the Z-axis direction.
  • the lower end of the capillary holder 11 is held by a holder 14.
  • a capillary 8 is detachably inserted into the upper end of the capillary holding part 11.
  • the capillary holding part 11 includes, as main components, an upper socket 16, a coil spring 17 (elastic part), a lower socket 18 (capillary base part), and an O-ring 19 (restraining part).
  • the upper socket 16, the coil spring 17, and the lower socket 18 are disposed on a common axis. Specifically, the upper socket 16, the coil spring 17, and the lower socket 18 are arranged in this order from the top.
  • the shape of the upper socket 16 is substantially a cylinder.
  • the upper socket 16 has a through hole 16h extending from the upper end surface 16a to the lower end surface 16b.
  • the upper socket 16 holds the tapered surface 8 a of the capillary 8.
  • the inner diameter of the through hole 16 h corresponds to the outer diameter of the tapered surface 8 a of the capillary 8.
  • the inner diameter of the through hole 16h is smaller than the outer diameter of the capillary body 8b.
  • a counterbore 16c for the O-ring 19 is provided on the upper end surface 16a side of the through hole 16h.
  • the counterbore 16c has a dimension that can accommodate the O-ring 19.
  • the depth of the counterbore 16c is approximately the same as the height of the O-ring 19.
  • the inner diameter of the counterbore 16c is approximately the same as the outer diameter of the O-ring 19.
  • the shape of the O-ring 19 is a so-called torus.
  • the O-ring 19 is in direct contact with the tapered surface 8 a of the capillary 8. That is, the O-ring 19 of the capillary holder 11 holds the capillary 8. This holding is performed by an adhesive layer formed on the surface of the O-ring 19.
  • the inner diameter of the O-ring 19 is approximately the same as the inner diameter of the through hole 16h.
  • the tapered surface 8 a of the capillary 8 is inserted into the O-ring 19.
  • the upper socket 16 has a step 16d provided on the outer peripheral surface. Accordingly, the outer diameter of the upper socket 16 on the upper end surface 16a side is different from the outer diameter of the upper socket 16 on the lower end surface 16b side. Specifically, the outer diameter on the lower end surface 16b side is slightly smaller than the outer diameter on the upper end surface 16a side. A coil spring 17 is fitted into the small diameter portion 16e on the lower end surface 16b side.
  • the shape of the lower socket 18 is substantially a cylinder.
  • the upper end surface 18 a of the lower socket 18 faces the lower end surface 16 b of the upper socket 16.
  • the outer shape of the lower socket 18 is the same as the outer shape of the upper socket 16.
  • a step 18 d is provided on the outer peripheral surface of the lower socket 18.
  • the upper socket 18a side of the lower socket 18 is a small diameter portion 18e.
  • a coil spring 17 is fitted into the small diameter portion 18e on the upper end surface 18a side.
  • the large diameter portion 18 f on the lower end surface 18 b side of the lower socket 18 is sandwiched by the holder 14.
  • the coil spring 17 is a compression spring.
  • the upper end side of the coil spring 17 is fitted into the small diameter portion 16 e of the upper socket 16.
  • the lower end side of the coil spring 17 is inserted into the small diameter portion 18 e of the lower socket 18.
  • the upper socket 16 and the coil spring 17 constitute the flexible part 10. Therefore, the upper socket 16 and the lower socket 18 are connected by the coil spring 17.
  • the coil spring 17 has elasticity along the direction of the axis 17A and elasticity along the direction intersecting the axis 17A. As a result, the upper socket 16 can change its position relative to the lower socket 18.
  • the capillary holding part 11 having the above configuration has a holding mode shown in FIG. Part (a) of FIG. 4 shows the capillary holding part 11 in the initial mode. Part (b) of FIG. 4 shows the capillary holding part 11 in the first modification. Part (c) of FIG. 4 shows the capillary holding part 11 in the second modification.
  • the axis 16A of the upper socket 16 overlaps with the axis 18A of the lower socket 18. Furthermore, the axis 8A of the capillary 8 also overlaps with the axes 16A and 18A.
  • the axis 16A of the upper socket 16 does not overlap the axis 18A of the lower socket 18.
  • the lower socket 18 is held by the holder 14 and its position is maintained.
  • the upper socket 16 moves in the X-axis and Y-axis directions with respect to such a lower socket 18.
  • the axis 16A of the upper socket 16 is parallel to the axis 18A of the lower socket 18.
  • the axis 16A of the upper socket 16 overlaps the axis 18A of the lower socket 18. That is, these configurations are the same as those in the first holding mode.
  • the axis 8A of the capillary 8 is inclined with respect to the axis 16A of the upper socket 16.
  • the O-ring 19 has a torus shape. Therefore, the inner peripheral surface into which the tapered surface 8a of the capillary 8 is inserted is a curved surface.
  • the cross-sectional shape of the O-ring 19 in a cross section parallel to the Z axis is a circle.
  • the contact mode between the O-ring 19 and the capillary 8 is a line contact that makes contact at an annular contact line CL (see FIG. 3).
  • the capillary 8 is allowed to tilt with respect to the axis 19 ⁇ / b> A of the O-ring 19.
  • the capillary guide portion 12 guides the capillary 8 when the capillary 8 is inserted into the hole 7 h (capillary holding hole) of the ultrasonic horn 7.
  • the capillary guide 12 is provided in the actuator 13. Therefore, the relative positional relationship between the capillary guide portion 12 and the parts constituting the actuator 13 is preserved.
  • the capillary guide portion 12 is a cantilever beam extending from the actuator 13 toward the ultrasonic horn 7.
  • FIG. 5 is a perspective view of the main part of the capillary guide portion 12 as a cross-sectional view.
  • a guide hole 12 h is provided in the free end portion of the capillary guide portion 12.
  • the guide hole 12 h receives the capillary body 8 b of the capillary 8.
  • the guide hole 12 h guides the capillary 8 to the hole 7 h of the ultrasonic horn 7.
  • the guide hole 12h is a through hole.
  • the guide hole 12h extends from the upper surface 12a of the capillary guide portion 12 to the lower surface 12b.
  • the guide hole 12h is also opened in the front end surface 12c of the capillary guide portion 12.
  • the guide hole 12h can receive the capillary 8 from the lower surface 12b and the front end surface 12c.
  • the guide hole 12h includes a tapered hole portion 12t and a parallel hole portion 12p.
  • the lower end of the tapered hole portion 12t opens to the lower surface 12b.
  • the upper end of the parallel hole 12p opens to the upper surface 12a.
  • the inner diameter of the tapered hole portion 12t on the lower surface 12b is larger than the inner diameter of the parallel hole portion 12p on the upper surface 12a.
  • This inner diameter is larger than the outer diameter at the upper end of the capillary 8. That is, the inner diameter of the guide hole 12h gradually decreases from the lower surface 12b toward the upper surface 12a.
  • the inner diameter of the guide hole 12h is minimum at a position where the tapered hole portion 12t and the parallel hole portion 12p are connected. This inner diameter is substantially the same as the outer diameter at the upper end of the capillary 8. And the internal diameter of the parallel hole part 12p is constant.
  • FIG. 6 shows how the capillary 8 is guided by the capillary guide 12.
  • the axis 7 ⁇ / b> A of the hole 7 h of the ultrasonic horn 7 overlaps the axis 12 ⁇ / b> A of the guide hole 12 h of the capillary guide 12.
  • the axis 8A of the capillary 8 held by the capillary holder 11 is shifted in parallel to the direction of the X axis with respect to the axes 7A and 12A.
  • the capillary holder 11 is moved in the Z-axis direction.
  • the upper end of the capillary 8 is in contact with the wall surface of the tapered hole portion 12t.
  • the capillary holding part 11 moves upward, the capillary 8 moves along the wall surface.
  • This movement includes a horizontal component (X-axis direction) in addition to an upward component (Z-axis direction).
  • the upper socket 16 moves relative to the lower socket 18 by the coil spring 17. That is, when the lower socket 18 is moved upward, the upper socket 16 is also moved in the horizontal direction by the coil spring 17 while being moved upward.
  • the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h.
  • the axis 8A of the capillary 8 overlaps with the axis 7A of the hole 7h. Accordingly, the capillary 8 is inserted into the hole 7 h of the ultrasonic horn 7.
  • the positional relationship between the ultrasonic horn 7 and the capillary guide portion 12 is ideal.
  • the axis 7 ⁇ / b> A of the hole 7 h of the ultrasonic horn 7 is inclined with respect to the axis 12 ⁇ / b> A of the capillary guide 12.
  • the capillary holding part 11 is capable of shifting the upper socket 16 with respect to the lower socket 18. Further, the capillary 8 can be inclined with respect to the axis 16 ⁇ / b> A of the upper socket 16. According to these actions, as shown in part (c) of FIG. 7, as the capillary holding part 11 is raised, the axis 8A of the capillary 8 gradually approaches the axis 7A of the hole 7h. Finally, the capillary 8 can be inserted into the hole 7h. That is, the capillary holding part 11 holds the capillary 8 flexibly. As a result, the displacement between the capillary 8 and the capillary guide 12 can be absorbed.
  • the displacement between the capillary 8 and the hole 7h of the ultrasonic horn 7 can be absorbed. Therefore, according to the capillary holding portion 11 and the capillary guide portion 12, the capillary 8 can be reliably attached to the ultrasonic horn 7.
  • the actuator 13 moves the capillary 8 to be replaced and the new capillary 8.
  • the actuator 13 holds the capillary 8 at a predetermined position and posture.
  • the actuator 13 reciprocates the capillary 8 along the direction of a predetermined translation axis (Z axis).
  • the translation axis is along the vertical direction (Z-axis). Therefore, the actuator 13 moves the capillary 8 upward and downward along the vertical direction.
  • the actuator 13 rotates the capillary 8 around the rotation axis (X axis).
  • the rotation axis is orthogonal to the vertical direction (Z axis). That is, the rotation axis is along the horizontal direction (X axis). Accordingly, the actuator 13 rotates the capillary 8 around the horizontal direction.
  • the actuator 13 includes an actuator base 21 (base portion), a pair of linear motors 22A and 22B (first force generating portion and second force generating portion), a linear guide 24, a carriage 26 (moving body), and a control device. 27 (control unit, see FIG. 1 and the like).
  • the shape of the actuator base 21 is a flat plate.
  • the actuator base 21 has a main surface 21a.
  • the normal direction of the main surface 21a is along the horizontal direction (X-axis direction).
  • Linear motors 22A and 22B, a linear guide 24, and a carriage 26 are arranged on the main surface 21a.
  • the linear motor 22A moves the carriage 26.
  • the linear motor 22A is an ultrasonic motor based on a so-called impact drive system.
  • the linear motor 22A includes a drive shaft 28A and an ultrasonic element 29A (ultrasonic wave generator).
  • the drive shaft 28A is a metal round bar.
  • the axis of the drive shaft 28 ⁇ / b> A is parallel to the main surface 21 a of the actuator base 21.
  • the carriage 26 moves along the drive shaft 28A. Accordingly, the length of the drive shaft 28A determines the movement range of the carriage 26.
  • the lower end of the drive shaft 28A is fixed to the ultrasonic element 29A.
  • the upper end of the drive shaft 28A is supported by the guide 31.
  • the guide 31 protrudes from the main surface 21 a of the actuator base 21.
  • the upper end of the drive shaft 28 ⁇ / b> A may be fixed to the guide 31. Further, the upper end of the drive shaft 28 ⁇ / b> A may contact the guide 31. That is, the lower end of the drive shaft 28A is a fixed end. The upper end of the drive shaft 28A is a fixed end or a free end.
  • the ultrasonic element 29A provides ultrasonic vibration to the drive shaft 28A.
  • the drive shaft 28A provided with the ultrasonic vibration vibrates slightly along the Z axis.
  • a piezoelectric element that is a piezoelectric element may be employed as the ultrasonic element 29A.
  • the piezo element is deformed according to the applied voltage. Therefore, when a high frequency voltage is applied to the piezoelectric element, the piezoelectric element is repeatedly deformed according to the frequency and the magnitude of the voltage. That is, the piezo element generates ultrasonic vibration.
  • the ultrasonic element 29A is fixed to a guide 32 protruding from the actuator base 21.
  • the control device 27 is electrically connected to the ultrasonic element 29A.
  • the ultrasonic element 29A receives a driving voltage generated by the control device 27.
  • the control device 27 controls the frequency and amplitude of the AC voltage provided to the ultrasonic element 29A.
  • the single motor configuration of the linear motor 22B is the same as that of the linear motor 22A.
  • the linear motor 22B is disposed away from the linear motor 22A in the direction of the Y axis that intersects the Z axis.
  • the drive shaft 28B of the linear motor 22B is parallel to the drive shaft 28A of the linear motor 22A.
  • the height of the upper end of the linear motor 22B is the same as the height of the upper end of the linear motor 22A.
  • the height of the lower end of the linear motor 22B is the same as the height of the lower end of the linear motor 22A.
  • the carriage 26 is a moving body.
  • the moving body is translated and rotated by the linear motors 22A and 22B.
  • the shape of the carriage 26 is a disk.
  • the carriage 26 is stretched between the linear motors 22A and 22B.
  • a linear guide 24 is provided between the actuator base 21 and the carriage 26 to guide the carriage 26 in the Z-axis direction.
  • the carriage 26 is guided in the Z-axis direction by the linear guide 24.
  • the linear guide 24 regulates the moving direction of the carriage 26.
  • the linear guide 24 does not provide the carriage 26 with a driving force in the Z-axis direction.
  • the carriage 26 has a front disk 33, a pressurized disk 34, and a rear disk 36.
  • the outer diameters of these disks are the same as each other. These disks are stacked along a common axis.
  • a shaft body 37 is sandwiched between the front disk 33 and the pressurized disk 34.
  • the outer diameter of the shaft body 37 is smaller than the outer diameters of the front disk 33 and the pressurized disk 34. Therefore, a gap is formed between the outer peripheral portion of the front disk 33 and the outer peripheral portion of the pressurized disk 34.
  • the shaft body 38 is also sandwiched between the rear disk 36 and the pressurized disk 34.
  • the outer diameter of the shaft body 37 is also smaller than the outer diameters of the rear disk 36 and the pressurized disk 34. Therefore, a gap is also formed between the outer peripheral portion of the rear disk 36 and the outer peripheral portion of the pressurizing disk 34.
  • the rear disk 36 is connected to the table 24a of the linear guide 24.
  • the rear disk 36 is rotatably connected to the table 24a.
  • the pressurized disk 34 and the front disk 33 are mechanically fixed to the rear disk 36. Therefore, the pressurized disk 34 and the front disk 33 do not rotate with respect to the rear disk 36. Therefore, the entire carriage 26 including the front disk 33, the pressurizing disk 34 and the rear disk 36 can rotate with respect to the table 24 a of the linear guide 24.
  • the drive shafts 28 ⁇ / b> A and 28 ⁇ / b> B are sandwiched in a gap G ⁇ b> 1 between the pressurizing disk 34 and the rear disk 36.
  • the pair of drive shafts 28 ⁇ / b> A and 28 ⁇ / b> B sandwich the center of gravity of the carriage 26.
  • the drive shafts 28 ⁇ / b> A and 28 ⁇ / b> B are in contact with the back surface 34 b of the pressurizing disk 34 and the main surface 36 a of the rear disk 36.
  • the drive shafts 28A and 28B do not contact the outer peripheral surface 38a of the shaft body 38.
  • the outer diameter of the gap G ⁇ b> 1 is smaller than the outer diameter of the pressurizing disk 34 and the outer diameter of the rear disk 36. Further, the outer diameter of the gap G ⁇ b> 1 is larger than the outer diameter of the shaft body 38. The difference between the outer diameter of the shaft body 38 and the outer diameter of the rear disk 36 is larger than the difference between the outer diameter of the drive shaft 28A and the outer diameter of the drive shaft 28B. Similarly, the difference between the outer diameter of the shaft body 37 and the outer diameter of the pressurizing disk 34 is larger than the difference between the outer diameter of the drive shaft 28A and the outer diameter of the drive shaft 28B.
  • the gap G1 is slightly smaller than the outer diameter of the drive shaft 28A and the outer diameter of the drive shaft 28B.
  • a gap G ⁇ b> 2 is formed between the front disk 33 and the pressurized disk 34.
  • FIG. 9 (a), FIG. 9 (b) and FIG. 9 (c) show the operating principle of the actuator 13.
  • FIG. 9 For convenience of explanation, in FIG. 9, one linear motor 22A and the carriage 26 are shown, and the other linear motor 22B and the like are not shown.
  • FIG. 9 (a) shows a mode in which the position of the carriage 26 is held.
  • the drive shaft 28 ⁇ / b> A of the carriage 26 is sandwiched between the pressurizing disk 34 and the rear disk 36.
  • the position of the carriage 26 is maintained by the pressurization resulting from this pinching. More specifically, the position of the carriage 26 is maintained by a frictional resistance force in which the applied pressure is a vertical drag.
  • the control device 27 does not provide a voltage to the ultrasonic element 29A. That is, as indicated by the voltage E1, the voltage value is zero. Note that the control device 27 may provide a direct current having a predetermined voltage value to the ultrasonic element 29A.
  • the position of the carriage 26 is maintained by the frictional resistance with the drive shaft 28A.
  • a mode of moving the drive shaft 28A a first mode in which the carriage 26 moves along with the drive shaft 28A, and a second mode in which the carriage 26 does not accompany the drive shaft 28A and continues to maintain the position due to its inertia.
  • the first mode or the second mode can be selected depending on the speed of moving the drive shaft 28A.
  • the speed at which the drive shaft 28A is moved is related to the frequency of the ultrasonic vibration. Therefore, as the mode of moving the drive shaft 28A, the first mode or the second mode can be selected according to the frequency of the ultrasonic vibration.
  • the carriage 26 moves along with the drive shaft 28A.
  • the frequency of ultrasonic vibration is a relatively low frequency (15 kHz to 30 kHz)
  • the carriage 26 moves along with the drive shaft 28A.
  • the frequency of ultrasonic vibration is a relatively high frequency (100 kHz to 150 kHz)
  • the carriage 26 maintains its position regardless of the drive shaft 28A.
  • FIG. 10 (a) shows an operation for maintaining the position of the carriage 26.
  • the control device 27 provides a constant voltage (see voltages E4 and E5 in part (a) of FIG. 10) to each of the ultrasonic element 29A and the ultrasonic element 29B.
  • FIG. 10B shows an operation for moving the carriage 26 upward.
  • the control device 27 provides the AC voltage indicated by the voltage E6 in part (b) of FIG. 10 to one ultrasonic element 29A.
  • the cycle of the voltage that moves the drive shaft 28A upward is longer than the cycle of the voltage that moves the drive shaft 28A downward.
  • the control device 27 provides the other ultrasonic element 29B with the alternating current indicated by the voltage E7 in part (b) of FIG.
  • the cycle of the voltage that moves the drive shaft 28B upward is longer than the cycle of the voltage that moves the drive shaft 28B downward. That is, the control device 27 provides the same AC voltage to the ultrasonic element 29A and the ultrasonic element 26B.
  • the control device 27 matches the timing for moving one drive shaft 28A upward with the timing for moving the other drive shaft 28B upward. That is, the control device 27 sets the phase of the voltage provided to one ultrasonic element 29A and the phase of the voltage provided to the other ultrasonic element 29A to have the same phase relationship. Therefore, the contact part P1 and the contact part P2 move upward by the same distance.
  • the contact portion P1 is a portion that is pressed by the pressurizing disk 34 and the rear disk 36 on one drive shaft 28A.
  • the contact portion P2 is a portion that is pressed by the pressurizing disk 34 and the rear disk 36 on the other drive shaft 28B.
  • the contact part P1 and the contact part P2 move upward while maintaining a parallel state. That is, the carriage 26 translates upward without rotating around the center of gravity.
  • FIG. 10 (c) shows an operation of moving the carriage 26 downward.
  • the control device 27 provides the alternating current indicated by the voltage E8 in part (c) of FIG. 10 to one ultrasonic element 29A.
  • the cycle of the voltage that moves the drive shaft 28A upward is shorter than the cycle of the voltage that moves the drive shaft 28A downward.
  • the control device 27 provides the other ultrasonic element 29B with the AC voltage indicated by the voltage E9 in part (c) of FIG.
  • the cycle of the voltage that moves the drive shaft 28B upward is shorter than the cycle of the voltage that moves the drive shaft 28B downward.
  • the contact portion P1 on one drive shaft 28A and the contact portion P2 on the other drive shaft 28B move downward by the same distance.
  • the contact part P1 and the contact part P2 move downward while maintaining a parallel state. That is, the carriage 26 translates downward without rotating around the center of gravity.
  • the translation for moving the carriage 26 upward and downward can be realized by a single linear motor 22A. Since the actuator 13 according to the embodiment includes the two linear motors 22A and 22B, the driving force can be increased as compared with the configuration including the single linear motor 22A.
  • the control device 27 provides the alternating current indicated by the voltage E10 in part (a) of FIG. 11 to one ultrasonic element 29A.
  • the cycle of the voltage that moves the drive shaft 28A upward is shorter than the cycle of the voltage that moves the drive shaft 28A downward.
  • the control device 27 provides the other ultrasonic element 29B with the alternating current indicated by the voltage E11 in part (a) of FIG.
  • the cycle of the voltage that moves the drive shaft 28B upward is longer than the cycle of the voltage that moves the drive shaft 28B downward. That is, the voltage provided to the ultrasonic element 29A is different from the voltage provided to the ultrasonic element 29B.
  • the control device 27 matches the timing for moving the one drive shaft 28A upward with the timing for moving the other drive shaft 28B downward. That is, the phase of the voltage provided to one ultrasonic element 29A is opposite to the phase of the voltage provided to the other ultrasonic element 29B. Then, the contact portion P1 of one drive shaft 28A moves downward and the contact portion P2 of the other drive shaft 28B moves upward. The contact part P1 and the contact part P2 move in opposite directions. If these movement amounts match, the carriage 26 rotates clockwise while maintaining the position in the Z-axis direction.
  • (B) part of FIG. 11 shows the operation
  • the control device 27 provides the AC voltage indicated by the voltage E12 in part (b) of FIG. 11 to one ultrasonic element 29A.
  • the cycle of the voltage that moves the drive shaft 28A upward is longer than the cycle of the voltage that moves the drive shaft 28A downward.
  • the control device 27 provides the other ultrasonic element 29B with the AC voltage shown in the voltage E13 reference in part (b) of FIG.
  • the cycle of the voltage that moves the drive shaft 28B upward is shorter than the cycle of the voltage that moves the drive shaft 28B downward.
  • the contact portion P1 of one drive shaft 28A moves upward, and the contact portion P2 of the other drive shaft 28B moves downward. That is, the contact parts P1 and P2 move in opposite directions. If these movement amounts match, the carriage 26 rotates counterclockwise while maintaining its position in the Z-axis direction.
  • the capillary exchange unit 9 includes a capillary stocker 39 and a capillary recovery unit 41 as additional components in addition to the capillary holding unit 11, the capillary guide unit 12, and the actuator 13.
  • the capillary stocker 39 accommodates a plurality of replacement capillaries 8N.
  • the capillary recovery unit 41 accommodates the used capillary 8U.
  • FIG. 12 (a) shows a state in which wire bonding work is being performed by, for example, a capillary 8U attached to the ultrasonic horn 7.
  • FIG. The capillary exchange unit 9 may be retracted to a position that does not interfere with the wire bonding operation.
  • (B) part of Drawing 12 shows the state of the 1st step in exchange operation.
  • the capillary exchange unit 9 causes the control device 27 to rotate the carriage 26 in the clockwise direction. This rotation corresponds to the operation shown in part (a) of FIG. By this rotation, the capillary holder 11 that has been retracted to a position that does not hinder the wire bonding operation is positioned below the capillary 8U.
  • Part (a) of FIG. 13 shows the state of the second step in the exchange operation.
  • the capillary exchange unit 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG. By this movement, the capillary holder 11 holds the capillary 8U attached to the ultrasonic horn 7.
  • (B) part of Drawing 13 shows the state of the 3rd step in exchange operation.
  • the capillary exchange unit 9 moves the carriage 26 downward by the control device 27. This movement corresponds to the operation shown in part (c) of FIG. By this movement, the capillary 8U held by the capillary holder 11 is removed from the ultrasonic horn 7.
  • FIG. 14 shows the state of the 4th step in exchange operation.
  • the capillary exchange unit 9 causes the control device 27 to rotate the carriage 26 in the clockwise direction. This movement corresponds to the operation shown in part (a) of FIG.
  • the capillary 8U held in the capillary holding part 11 is conveyed to the capillary recovery part 41. As a result, the capillary 8U is recovered as a used one.
  • FIG. 15 shows the state of the 6th step in exchange operation.
  • the capillary exchange unit 9 causes the control device 27 to rotate the carriage 26 in the clockwise direction. This movement corresponds to the operation shown in part (a) of FIG. By this movement, the new capillary 8N held in the capillary holding part 11 is positioned below the hole 7h of the ultrasonic horn 7.
  • (B) part of Drawing 15 shows the state of the 7th step in exchange operation.
  • the capillary exchange unit 9 moves the carriage 26 upward by the control device 27. This movement corresponds to the operation shown in part (b) of FIG.
  • the new capillary 8N held in the capillary holder 11 is inserted into the hole 7h of the ultrasonic horn 7.
  • the displacement between the capillary 8N and the capillary guide portion 12, and the hole 7h between the capillary 8N and the ultrasonic horn 7 are obtained.
  • the deviation is eliminated.
  • the capillary 8N can be securely attached to the hole 7h.
  • the actuator 13 includes a pair of linear motors 22A and 22B.
  • the force generated by each of the linear motors 22A and 22B is controlled by the control device 27.
  • the carriage 26 can be translated by matching the direction of the force generated by the pair of linear motors 22A and 22B.
  • the direction of the force generated by the linear motors 22A and 22B is made opposite to each other, whereby torque around the center of gravity can be provided to the carriage 26.
  • the carriage 26 can be rotated around the center of gravity. Therefore, the actuator 13 can provide the carriage 26 with a plurality of operations of translation and rotation.
  • the actuator 13 according to the present disclosure can perform translation and rotation. Furthermore, it is not necessary for the actuator 13 to prepare a drive mechanism only for translation and a drive mechanism only for rotation. Therefore, the actuator 13 can be reduced in size as compared with the configuration in which each of the translation drive mechanism and the rotation drive mechanism is prepared.
  • the wire bonding apparatus 1 includes a capillary exchange unit 9 including an actuator 13.
  • the actuator 13 can provide the carriage 26 with two operations of translation and rotation. Therefore, it is possible to provide the wire bonding apparatus 1 with a function of replacing the capillary 8 and to suppress an increase in the size of the capillary replacement unit 9. Therefore, it is possible to achieve both high functionality and downsizing of the wire bonding apparatus 1.
  • the capillary 8 held by the capillary holder 11 is inserted into the hole 7h while being guided by the capillary guide 12. Therefore, even if the capillary 8 is displaced with respect to the hole 7h, the displacement is corrected by the capillary guide portion 12.
  • the capillary holding portion 11 holds the flexible portion 10 including the upper socket 16 and the coil spring 17 so that the position of the capillary 8 can be displaced relative to the lower socket 18 fixed to the actuator 13.
  • the posture of the capillary 8 is such that the capillary 8 follows the capillary guide portion 12 and the hole 7h. Can be inserted while changing. Therefore, the new capillary 8 can be automatically attached to the wire bonding apparatus 1 regardless of the operator's hand.
  • the ultrasonic drive motor based on the principle of the impact drive method using the law of inertia is illustrated.
  • the first force generation unit and the second force generation unit are not limited to this configuration, and a mechanism capable of generating a force along a predetermined direction may be adopted as the first force generation unit and the second force generation unit.
  • a linear guide using a ball screw may be employed as the first force generation unit and the second force generation unit.
  • the capillary holding part only needs to hold the capillary 8 in such a manner that the posture of the capillary 8 can be flexibly changed. Therefore, it is not limited to the configuration of the capillary holding part.
  • FIG. 16 shows a capillary holder 11A according to a modification.
  • the capillary holding part 11A includes a metal pipe 42, a silicone resin tube 43, and a cap 44 as main components.
  • the shape of the pipe 42 is cylindrical.
  • the pipe 42 accommodates the tube 43 therein.
  • One end of the pipe 42 is closed by a cap 44.
  • One end of the tube 43 is closed by a cap 44.
  • the cap 44 is held by the holder 14.
  • An upper end 43 a (upper end opening edge) of the tube 43 substantially coincides with the upper end 42 a of the pipe 42.
  • the outer diameter of the tube 43 is smaller than the inner diameter of the pipe 42. That is, a slight gap is formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42.
  • the upper end 43 a of the tube 43 holds the tapered surface 8 a of the capillary 8.
  • the tube 43 of the capillary holding part 11A has a predetermined flexibility. Therefore, the capillary holding portion 11 ⁇ / b> A can change the attitude of the capillary 8 by the gap formed between the outer peripheral surface of the tube 43 and the inner peripheral surface of the pipe 42. Specifically, the capillary holding portion 11A can allow eccentricity and inclination in a direction intersecting the axis 42A of the pipe 42.
  • the capillary holding part 11 ⁇ / b> A includes only the tube 43, since the rigidity of the tube 43 is insufficient, the capillary 8 may not be held depending on the posture of the capillary 8. However, the pipe 42 having higher rigidity than the tube 43 exists outside the tube 43. Therefore, even when the rigidity of the tube 43 is insufficient, the displacement of the capillary 8 can be kept within an allowable range by the pipe 42.
  • the capillary 8 When the capillary 8 is inserted into the tube 43, the contact state between the inner peripheral edge of the upper end 43a and the tapered surface 8a is a line contact. Accordingly, the capillary 8 can be tilted and held in the same manner as the capillary holding portion 11A according to the present disclosure.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Wire Bonding (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
PCT/JP2019/003217 2018-01-30 2019-01-30 アクチュエータ及びワイヤボンディング装置 WO2019151340A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019569186A JP7002148B2 (ja) 2018-01-30 2019-01-30 アクチュエータ及びワイヤボンディング装置
KR1020207022535A KR102420211B1 (ko) 2018-01-30 2019-01-30 액추에이터 및 와이어 본딩 장치
CN201980010485.3A CN111656502B (zh) 2018-01-30 2019-01-30 致动器以及打线接合装置

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JP2018-013321 2018-06-15

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JP2005218202A (ja) * 2004-01-28 2005-08-11 Shinkawa Ltd アクチュエータ及びボンディング装置
JP2005218203A (ja) * 2004-01-28 2005-08-11 Shinkawa Ltd アクチュエータ及びボンディング装置
JP2010283614A (ja) * 2009-06-04 2010-12-16 Sekyurion Nijuyon Kk カメラ制御装置、撮影方向制御方法、カメラ装置

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KR100543176B1 (ko) * 2003-11-06 2006-01-20 한국기계연구원 나노 패터닝용 프린팅헤드 장치
JP2005150218A (ja) * 2003-11-12 2005-06-09 Tdk Corp 積層型電子部品の製造方法および製造装置
JP2005341632A (ja) * 2004-05-24 2005-12-08 Yaskawa Electric Corp ムービングマグネット形リニアスライダ
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JP4700570B2 (ja) * 2006-07-14 2011-06-15 株式会社新川 ボンディング装置並びにボンディングツール先端部の洗浄方法及びプログラム
JP4787104B2 (ja) * 2006-07-31 2011-10-05 株式会社新川 ボンディング装置
JP4411615B2 (ja) * 2006-10-05 2010-02-10 日本電気株式会社 ワイヤボンディング装置
JP5305380B2 (ja) * 2008-01-08 2013-10-02 Ｎｅｃトーキン株式会社 アクチュエータ、位置決め装置
KR20180124874A (ko) 2016-03-04 2018-11-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치, 그 제작 방법, 및 상기 반도체 장치를 포함하는 표시 장치
JP7321492B2 (ja) * 2018-01-30 2023-08-07 株式会社新川 ワイヤボンディング装置

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JPH0839375A (ja) * 1994-07-27 1996-02-13 Mitsutoyo Corp テーブル装置
JP2005218202A (ja) * 2004-01-28 2005-08-11 Shinkawa Ltd アクチュエータ及びボンディング装置
JP2005218203A (ja) * 2004-01-28 2005-08-11 Shinkawa Ltd アクチュエータ及びボンディング装置
JP2010283614A (ja) * 2009-06-04 2010-12-16 Sekyurion Nijuyon Kk カメラ制御装置、撮影方向制御方法、カメラ装置

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JP7002148B2 (ja) 2022-01-20
CN111656502A (zh) 2020-09-11
TW201939627A (zh) 2019-10-01
CN111656502B (zh) 2023-05-26
KR102420211B1 (ko) 2022-07-13
JPWO2019151340A1 (ja) 2021-01-07
KR20200103820A (ko) 2020-09-02
TWI722376B (zh) 2021-03-21

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