WO2019109712A1 - 阵列基板及制作方法、显示面板、显示装置 - Google Patents
阵列基板及制作方法、显示面板、显示装置 Download PDFInfo
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- WO2019109712A1 WO2019109712A1 PCT/CN2018/107092 CN2018107092W WO2019109712A1 WO 2019109712 A1 WO2019109712 A1 WO 2019109712A1 CN 2018107092 W CN2018107092 W CN 2018107092W WO 2019109712 A1 WO2019109712 A1 WO 2019109712A1
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 42
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- 238000005530 etching Methods 0.000 claims abstract description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 38
- 229910052802 copper Inorganic materials 0.000 claims description 38
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- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 abstract description 7
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
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Definitions
- the present disclosure relates to the field of display technologies, and in particular, to an array substrate and a manufacturing method thereof, a display panel, and a display device.
- TFT-LCD Thin Film Transistor Liquid Crystal Display
- a gate electrode Forming a gate electrode, a gate insulating layer, an active layer film layer, an ohmic contact layer film layer, and a copper metal film layer on the base substrate;
- the contact layer film layer and the active layer film layer remove patterns corresponding to the source drain and the conductive channel region;
- the ohmic contact layer film layer and the active layer film layer are etched in the conductive channel region with the source drain as an occlusion to form an ohmic contact layer and an active layer.
- the etching the copper metal film layer, the ohmic contact layer film layer, and the active layer film layer by using the first photoresist pattern comprises:
- the ohmic contact layer film layer and the active layer film layer with the first photoresist pattern as an occlusion Performing a first dry etch on the ohmic contact layer film layer and the active layer film layer with the first photoresist pattern as an occlusion, the ohmic contact layer film layer and the active layer
- the film layer removes a pattern corresponding to the source drain and the conductive channel region;
- Thinning the first photoresist pattern removing a pattern at the conductive channel region in the first photoresist pattern
- etching the ohmic contact layer film layer and the active layer film layer in the conductive channel region specifically including:
- the forming a pixel electrode in contact with the source and drain portions on the source and drain electrodes of the first photoresist layer specifically:
- the second photoresist layer on the pixel electrode is stripped.
- the method further includes:
- a passivation layer is formed on the pixel electrode.
- the method further includes:
- a common electrode is formed on the passivation layer.
- the method further includes:
- a common electrode is formed on the base substrate.
- An embodiment of the present disclosure further provides an array substrate fabricated by the above method, including:
- the gate insulating layer is located on the base substrate and covers the gate;
- An active layer the active layer being located on the gate insulating layer
- An ohmic contact layer located on the active layer
- the source drain is located on the ohmic contact layer, and the material is copper metal;
- a pixel electrode located on the source drain and in contact with the source drain portion.
- the method further includes: a passivation layer on the pixel electrode.
- the method further includes: a common electrode on the passivation layer.
- the method further includes: a common electrode; the common electrode is disposed in the same layer as the gate.
- the embodiment of the present disclosure further provides a display panel including the array substrate provided by any embodiment of the present disclosure.
- the embodiment of the present disclosure further provides a display device including the display panel provided by any embodiment of the present disclosure.
- FIG. 1 is a schematic flow chart of a method for fabricating an array substrate according to an embodiment of the present disclosure
- FIG. 2 is a schematic structural diagram of an array substrate according to an embodiment of the present disclosure
- 3( a ) to 3 ( i ) are schematic structural diagrams after completion of each step in a process for preparing an array substrate according to an embodiment of the present disclosure
- FIG. 4 is another schematic structural diagram of an array substrate according to an embodiment of the present disclosure.
- FIG. 5 is another schematic structural diagram of an array substrate according to an embodiment of the present disclosure.
- the active layer and the source and drain electrodes in the array substrate of the TFT-LCD are usually fabricated by using the same mask.
- the manufacturing steps include: (1) sequentially forming a gate electrode and a gate insulating layer on the substrate. , an active layer film layer, an ohmic contact layer film layer, and a source/drain film layer; (2) applying a photoresist (PR glue) on the source/drain film layer, and using a halftone mask (Half-tone Mask) Exposing the photoresist and then developing; (3) sequentially performing a first wet etching (ie, 1SD Wet Etch) on the source/drain film layer according to the developed photoresist, and the ohmic contact layer The film layer and the active layer film layer are subjected to a first dry etching (ie, 1SD Dry Etch); (4) the photoresist is thinned to remove the photoresist at the conductive channel region, and the source and drain film layers are subjected to Two we
- the source/drain film layer is usually an aluminum (Al) metal film layer. Copper (Cu) has a lower resistivity than Al. In order to increase the pixel aperture ratio, copper is selected as a source/drain film layer in the related art. If the photoresist on the source drain is wet-peeled in the above step (5), the copper ions diffuse into the conductive channel region of the TFT with the stripping solution due to the easy diffusion of the copper ions, thereby causing the conductive of the TFT. Channel area contamination.
- the photoresist on the source and drain electrodes is selected to be dry-peeled, but the dry stripping increases the time, reduces the productivity, and the Cu metal surface is easily caused during the dry stripping process. Oxidation forms CuO. Further, since the difference in resistivity between Cu and CuO is large, contact between the drain and the pixel electrode is liable to occur.
- the embodiment of the present disclosure provides an array substrate and a manufacturing method thereof, a display panel, and a display device.
- a method for fabricating an array substrate according to an embodiment of the present disclosure includes the following steps:
- the order of peeling off the first photoresist layer is changed, and in the step S106, the ohmic contact layer film layer and the active layer film layer are performed in the conductive channel region.
- step S104 Before etching (ie, performing conductive channel etching of the TFT) to form the ohmic contact layer and the active layer, performing step S104 to wet-peel the first photoresist layer on the source and drain electrodes, thus performing wet
- the conductive channel region is formed after the stripping, so that copper ions contaminate the conductive channel region of the TFT during wet stripping.
- the productivity can be improved relative to the first photoresist layer on the drain of the source by dry stripping, and the oxidation of the Cu metal surface where the source and drain electrodes are overlapped with the pixel electrode can be avoided.
- the step S103 uses a first photoresist pattern to etch the copper metal film layer, the ohmic contact layer film layer and the active layer film layer, which may be specifically include:
- the second photoresist pattern is used as a occlusion, and the copper metal film layer is subjected to a second wet etching, and a pattern corresponding to the conductive channel region is removed in the copper metal film layer to form a source and a drain.
- the etching of the ohmic contact layer film layer and the active layer film layer in the conductive channel region in step S106 may specifically include:
- a second dry etching is performed on the ohmic contact layer film layer and the active layer film layer, and patterns other than the conductive channel regions are removed in the ohmic contact layer film layer and the active layer film layer.
- the step S105 is performed on the source and drain electrodes of the first photoresist layer to form the pixel electrode in contact with the source and drain portions, and may specifically include:
- the transparent electrode layer is formed on the source and drain electrodes of the first photoresist layer; for example, the transparent electrode layer may be an indium tin oxide (ITO) film layer, which is not limited herein;
- ITO indium tin oxide
- the second photoresist layer on the pixel electrode is stripped.
- the method may further include:
- a passivation layer is formed on the pixel electrode, and the passivation layer can protect the covered TFT device and the pixel electrode.
- an embodiment of the present disclosure further provides an array substrate.
- the array substrate is fabricated by using the method for fabricating an array substrate according to an embodiment of the present disclosure.
- a gate insulating layer 13 is located on the substrate substrate 11 and covers the gate electrode 12;
- the active layer 14 is disposed on the gate insulating layer 13;
- An ohmic contact layer 15, an ohmic contact layer 15 is disposed on the active layer 14;
- the source and drain electrodes 16 and the source and drain electrodes 16 are located on the ohmic contact layer 15 and are made of copper metal;
- the pixel electrode 17 is located on the source and drain electrodes 16 and is in partial contact with the source and drain electrodes 16.
- the display panel including the above array substrate may be, for example, a twisted nematic (TN) mode LCD display panel.
- TN twisted nematic
- the above array substrate provided by the embodiment of the present disclosure may further include: a passivation layer 18 on the pixel electrode 17.
- the above array substrate provided by the embodiment of the present disclosure may further include: a common electrode 19 on the passivation layer 18 .
- the display panel including the above array substrate may be, for example, an Advanced Super Dimension Switch (ADS) mode LCD display panel.
- ADS Advanced Super Dimension Switch
- the above array substrate provided by the embodiment of the present disclosure may further include: a common electrode 19; the common electrode 19 is disposed in the same layer as the gate electrode 12.
- the display panel including the above array substrate may be, for example, an Advanced Super Dimension Switch (ADS) mode LCD display panel.
- ADS Advanced Super Dimension Switch
- Step 1 refer to FIG. 3 (a), sequentially forming a gate electrode 12, a gate insulating layer 13, an active layer film layer 141, an ohmic contact layer film layer 151 and a copper metal film layer 161 on the base substrate 11;
- Step 2 referring to FIG. 3 (b), forming a first photoresist layer on the copper metal film layer 161, and patterning the first photoresist layer to form a first photoresist pattern 162;
- Step 3 referring to FIG. 3(c), the first photoresist pattern 162 is used as a shield, and the copper metal film layer 161 is first wet etched, and the copper metal film layer 161 is removed corresponding to the source and drain electrodes and conductive. a pattern outside the channel region;
- Step 4 referring to FIG. 3(d), the first photoresist pattern 162 is used as an occlusion, and the ohmic contact layer film layer 151 and the active layer film layer 141 are firstly etched in the ohmic contact layer. 151 and the active layer film layer 141 remove patterns corresponding to the source drain and the conductive channel region;
- Step 5 referring to FIG. 3(e), thinning the first photoresist pattern 162, removing the pattern at the conductive channel region in the first photoresist pattern 162;
- Step 6 using the thinned first photoresist pattern 162 as a mask, performing a second wet etching on the copper metal film layer 161, removing a pattern corresponding to the conductive channel region in the copper metal film layer 161, Forming the source and drain electrodes 16, a schematic structural view thereof is shown in FIG. 3(f);
- Step 7 Referring to FIG. 3(g), the first photoresist layer 162 on the source and drain electrodes 16 is wet-peeled;
- Step 8 refer to FIG. 3 (h), forming a pixel electrode 17 in contact with the source and drain electrodes 16 on the source and drain electrodes 16 of the first photoresist layer 162;
- Step IX Referring to FIG. 3(i), the source drain 16 is used as a mask, and the ohmic contact layer film layer 151 and the active layer film layer 141 are subjected to a second dry etching (ie, 2SD Dry Etch) to Forming an ohmic contact layer 15 and an active layer 14;
- a second dry etching ie, 2SD Dry Etch
- Step 6 Referring to FIG. 2, a passivation layer 18 is formed on the pixel electrode 17.
- a method of fabricating an array substrate according to Embodiment 2 of the present disclosure further includes: forming a common electrode on the passivation layer.
- an embodiment of the present disclosure further provides a display panel including the array substrate provided by any embodiment of the present disclosure.
- an embodiment of the present disclosure further provides a display device, including the display panel provided by any embodiment of the present disclosure.
- the display device can be: a display panel of any product having a display function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator, and the like.
- the order of peeling off the first photoresist layer is changed, and the ohmic contact layer film layer and the active layer film layer are etched in the conductive channel region (ie, Performing wet stripping on the first photoresist layer on the source and drain electrodes before performing the conductive channel etching of the TFT to form the ohmic contact layer and the active layer, thus forming a conductive trench after performing wet stripping In the track region, it is possible to prevent copper ions from contaminating the conductive channel region of the TFT during wet stripping. Moreover, the productivity can be improved relative to the first photoresist layer on the drain of the source by dry stripping, and the oxidation of the Cu metal surface where the source and drain electrodes are overlapped with the pixel electrode can be avoided.
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Abstract
Description
Claims (13)
- 一种阵列基板的制作方法,其中,包括:在衬底基板上依次形成栅极、栅极绝缘层、有源层膜层、欧姆接触层膜层和铜金属膜层;在所述铜金属膜层上形成第一光刻胶层,并对所述第一光刻胶进行构图,形成所述第一光刻胶图案;采用所述第一光刻胶图案,对所述铜金属膜层、欧姆接触层膜层和有源层膜层进行刻蚀,以在所述铜金属膜层形成源漏极,在所述欧姆接触层膜层和有源层膜层去除对应于所述源漏极和导电沟道区域之外的图案;对所述第一光刻胶层进行湿法剥离;在剥离所述第一光刻胶层的源漏极上形成与所述源漏极部分接触的像素电极;以所述源漏极作为遮挡,在所述导电沟道区域对所述欧姆接触层膜层和所述有源层膜层进行刻蚀,以形成欧姆接触层和有源层。
- 根据权利要求1所述的方法,其中,所述采用所述第一光刻胶图案,对所述铜金属膜层、欧姆接触层膜层和有源层膜层进行刻蚀,具体包括:以所述第一光刻胶图案作为遮挡,对所述铜金属膜层进行第一道湿法刻蚀,在所述铜金属膜层去除对应于所述源漏极和导电沟道区域之外的图案;以所述第一光刻胶图案作为遮挡,对所述欧姆接触层膜层和所述有源层膜层进行第一道干法刻蚀,在所述欧姆接触层膜层和所述有源层膜层去除对应于所述源漏极和导电沟道区域之外的图案;减薄所述第一光刻胶图案,在所述第一光刻胶图案去除所述导电沟道区域处的图案;以减薄后的第一光刻胶图案作为遮挡,对所述铜金属膜层进行第二道湿法刻蚀,在所述铜金属膜层去除对应于所述导电沟道区域的图案,以形成所述源漏极。
- 根据权利要求2所述的方法,其中,在所述导电沟道区域对所述欧姆接触层膜层和所述有源层膜层进行刻蚀,具体包括:对所述欧姆接触层膜层和所述有源层膜层进行第二道干法刻蚀,在所述欧姆接触层膜层和所述有源层膜层去除对应于导电沟道区域之外的图案。
- 根据权利要求1所述的方法,其中,所述在剥离所述第一光刻胶层的源漏极上形成与所述源漏极部分接触的像素电极,具体包括:在剥离所述第一光刻胶层的源漏极上形成透明电极层;在所述透明电极层上形成第二光刻胶层,并对所述第二光刻胶层进行构图,形成第二光刻胶图案;采用第二光刻胶图案,对所述透明电极层进行刻蚀,以形成所述像素电极;剥离所述像素电极上的第二光刻胶层。
- 根据权利要求1所述的方法,其中,在所述形成欧姆接触层和有源层之后,该方法还包括:在所述像素电极上形成钝化层。
- 根据权利要求5所述的方法,其中,该方法还包括:在所述钝化层上形成公共电极。
- 根据权利要求1-5任一项所述的方法,其中,在形成所述栅极之前,该方法还包括:在所述衬底基板上形成公共电极。
- 一种采用如权利要求1-7任一项所述的方法制作的阵列基板,其中,包括:衬底基板;栅极,所述栅极位于所述衬底基板上;栅极绝缘层,所述栅极绝缘层位于所述衬底基板上且覆盖所述栅极;有源层,所述有源层位于所述栅极绝缘层上;欧姆接触层,所述欧姆接触层位于所述有源层上;源漏极,所述源漏极位于所述欧姆接触层上,且材质为铜金属;像素电极,所述像素电极位于所述源漏极上且与所述源漏极部分接触。
- 根据权利要求8所述的阵列基板,其中,还包括:位于所述像素电极上的钝化层。
- 根据权利要求9所述的阵列基板,其中,还包括:位于所述钝化层上的公共电极。
- 根据权利要求9所述的阵列基板,其中,还包括:公共电极;所述公共电极与所述栅极同层设置。
- 一种显示面板,其中,包括如权利要求8-11任一项所述的阵列基板。
- 一种显示装置,其中,包括如权利要求12所述的显示面板。
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KR102086411B1 (ko) * | 2018-06-04 | 2020-03-09 | 주식회사 코엠에스 | 반도체 기판용 보호필름 박리 여부 감시 장치 및 방법 |
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CN110854068B (zh) * | 2019-10-28 | 2022-06-07 | Tcl华星光电技术有限公司 | Tft阵列基板的制备方法及tft阵列基板 |
CN112309970B (zh) * | 2020-10-30 | 2022-11-08 | 成都中电熊猫显示科技有限公司 | 阵列基板的制作方法以及阵列基板 |
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