WO2019078052A1 - 摺動部材およびピストンリング - Google Patents

摺動部材およびピストンリング Download PDF

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Publication number
WO2019078052A1
WO2019078052A1 PCT/JP2018/037593 JP2018037593W WO2019078052A1 WO 2019078052 A1 WO2019078052 A1 WO 2019078052A1 JP 2018037593 W JP2018037593 W JP 2018037593W WO 2019078052 A1 WO2019078052 A1 WO 2019078052A1
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WO
WIPO (PCT)
Prior art keywords
film
sliding member
less
hit
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/037593
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
和也 亀田
雄一 石田
博史 丸山
琢磨 関矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Riken Corp
Original Assignee
Riken Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=66174345&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2019078052(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Riken Corp filed Critical Riken Corp
Priority to CN201880058600.XA priority Critical patent/CN111065757A/zh
Priority to CN202411641158.7A priority patent/CN119615055A/zh
Priority to EP18867341.2A priority patent/EP3660180B1/en
Priority to US16/499,927 priority patent/US11168790B2/en
Publication of WO2019078052A1 publication Critical patent/WO2019078052A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02F—CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
    • F02F5/00—Piston rings, e.g. associated with piston crown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J9/00—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
    • F16J9/26—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction characterised by the use of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16N—LUBRICATING
    • F16N15/00—Lubrication with substances other than oil or grease; Lubrication characterised by the use of particular lubricants in particular apparatus or conditions
    • F16N15/02—Lubrication with substances other than oil or grease; Lubrication characterised by the use of particular lubricants in particular apparatus or conditions with graphite or graphite-containing compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00—Sliding-contact bearings for exclusively rotary movement
    • F16C17/02—Sliding-contact bearings for exclusively rotary movement for radial load only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
    • F16C2206/02—Carbon based material
    • F16C2206/04—Diamond like carbon [DLC]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2240/00—Specified values or numerical ranges of parameters; Relations between them
    • F16C2240/40—Linear dimensions, e.g. length, radius, thickness, gap
    • F16C2240/60—Thickness, e.g. thickness of coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/22—Internal combustion engines

Definitions

  • the present invention relates to a sliding member having a hard carbon film which achieves both high peel resistance and high abrasion resistance, and a piston ring made of the sliding member.
  • the present invention even when the thickness is 3 ⁇ m or more, it is possible to obtain a sliding member having a hard carbon film in which high peel resistance and high abrasion resistance are compatible. Further, according to the present invention, a piston ring composed of the sliding member can be obtained.
  • HIT it is preferable to make HIT into 15 GPa or more and 50 GPa or less. If it is 15 GPa or more, sufficient strength can be obtained. Moreover, if it is 50 GPa or less, there is no possibility that the film exhibits brittle characteristics, and a film excellent in abrasion resistance can be obtained.
  • HM is preferably 6 GPa or more and 20 GPa or less. If it is 6 GPa or more, the compactness can be increased, and thus a film excellent in peel resistance can be obtained. If the thickness is 20 GPa or less, there is no risk of the film peeling even if the film thickness is increased.
  • indentation hardness (HIT)” and “martens hardness (HM)” in the present specification are based on the nano-indentation hardness test method defined in the international standard ISO14577. Specifically, a diamond indenter whose tip shape is a regular triangular pyramid (Berkobitch type) is pressed into the surface of the film, and the load applied to the indenter and the displacement of the indenter are continuously acquired at that time to obtain a "load-displacement curve". . After that, the indentation hardness (HIT) and the Martens hardness (HM) are determined based on the calculation method described in ISO14577.
  • An intermediate layer of one or more materials selected from nitrides may be provided.
  • the thickness of the intermediate layer is preferably 0.01 ⁇ m or more and 0.6 ⁇ m or less, and more preferably 0.02 ⁇ m or more and 0.5 ⁇ m or less. If it is 0.01 ⁇ m or more, the adhesion of the hard carbon film can be enhanced, and if it is 0.6 ⁇ m or less, the intermediate layer is less likely to cause plastic flow during sliding, and the hard carbon film is less likely to peel off. is there.
  • the intermediate layer can be formed on the substrate, for example, by suitably using any or known PVD (physical vapor deposition) method.
  • sliding member 100 sliding member 10 base 12 hard carbon film (DLC film) 12A Sliding surface 200 Piston ring 20 Outer peripheral surface 22 Inner peripheral surface 24A, 24B Upper and lower surfaces 30 Drum 32 Test piece

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Vapour Deposition (AREA)
  • Pistons, Piston Rings, And Cylinders (AREA)
  • Sliding-Contact Bearings (AREA)
PCT/JP2018/037593 2017-10-20 2018-10-09 摺動部材およびピストンリング Ceased WO2019078052A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201880058600.XA CN111065757A (zh) 2017-10-20 2018-10-09 滑动构件和活塞环
CN202411641158.7A CN119615055A (zh) 2017-10-20 2018-10-09 滑动构件和活塞环
EP18867341.2A EP3660180B1 (en) 2017-10-20 2018-10-09 Sliding member and piston ring
US16/499,927 US11168790B2 (en) 2017-10-20 2018-10-09 Sliding member and piston ring

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-203898 2017-10-20
JP2017203898A JP6533818B2 (ja) 2017-10-20 2017-10-20 摺動部材およびピストンリング

Publications (1)

Publication Number Publication Date
WO2019078052A1 true WO2019078052A1 (ja) 2019-04-25

Family

ID=66174345

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/037593 Ceased WO2019078052A1 (ja) 2017-10-20 2018-10-09 摺動部材およびピストンリング

Country Status (5)

Country Link
US (1) US11168790B2 (enExample)
EP (1) EP3660180B1 (enExample)
JP (1) JP6533818B2 (enExample)
CN (2) CN111065757A (enExample)
WO (1) WO2019078052A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021161728A1 (ja) * 2020-02-13 2021-08-19 日産自動車株式会社 摺動機構
DE102020124180A1 (de) * 2020-09-16 2022-03-17 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring
EP4206455A4 (en) * 2021-09-30 2024-02-21 TPR Co., Ltd. SLIDING ELEMENT
JP7093899B1 (ja) 2022-03-02 2022-06-30 Ｔｐｒ株式会社 高耐摩耗性被膜を備えた摺動部材

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006250348A (ja) 2005-02-14 2006-09-21 Riken Corp 摺動部材
JP2008081522A (ja) 2006-09-26 2008-04-10 Hitachi Ltd 摺動部材
JP2017101279A (ja) * 2015-12-01 2017-06-08 日本アイ・ティ・エフ株式会社 アーク式成膜装置および成膜方法

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DE102004041235A1 (de) 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
JP2009035658A (ja) * 2007-08-03 2009-02-19 Honda Motor Co Ltd 湿式摩擦係合装置用摺動部材
JP2009035667A (ja) * 2007-08-03 2009-02-19 Honda Motor Co Ltd 湿式摩擦係合装置用摺動部材
JP2010234597A (ja) * 2009-03-31 2010-10-21 Mitsubishi Materials Corp 切断ブレード、切断ブレードの製造方法及び切断加工装置
EP2369031B1 (de) * 2010-03-18 2016-05-04 Oerlikon Trading AG, Trübbach Beschichtung auf nial2o4 basis in spinellstruktur
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CN102080207B (zh) * 2010-12-25 2012-07-25 深圳市广大纳米工程技术有限公司 一种DLC/TiAlN/CrN/Cr多层超硬膜涂层及其制备方法
DE102011003254A1 (de) 2011-01-27 2012-08-02 Federal-Mogul Burscheid Gmbh Gleitelement, insbesondere Kolbenring, mit einer Beschichtung sowie Verfahren zur Herstellung eines Gleitelements
JP5865014B2 (ja) * 2011-06-24 2016-02-17 株式会社リケン ピストンリング
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JP6599251B2 (ja) 2016-01-25 2019-10-30 株式会社リケン 摺動部材及びその製造方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006250348A (ja) 2005-02-14 2006-09-21 Riken Corp 摺動部材
JP2008081522A (ja) 2006-09-26 2008-04-10 Hitachi Ltd 摺動部材
JP2017101279A (ja) * 2015-12-01 2017-06-08 日本アイ・ティ・エフ株式会社 アーク式成膜装置および成膜方法

Also Published As

Publication number Publication date
EP3660180A1 (en) 2020-06-03
JP2019077904A (ja) 2019-05-23
EP3660180A4 (en) 2021-05-05
US11168790B2 (en) 2021-11-09
CN119615055A (zh) 2025-03-14
EP3660180B1 (en) 2023-04-12
JP6533818B2 (ja) 2019-06-19
CN111065757A (zh) 2020-04-24
US20200284346A1 (en) 2020-09-10

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