WO2019075857A1 - 掩膜板及其制作方法 - Google Patents

掩膜板及其制作方法 Download PDF

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Publication number
WO2019075857A1
WO2019075857A1 PCT/CN2017/113079 CN2017113079W WO2019075857A1 WO 2019075857 A1 WO2019075857 A1 WO 2019075857A1 CN 2017113079 W CN2017113079 W CN 2017113079W WO 2019075857 A1 WO2019075857 A1 WO 2019075857A1
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WO
WIPO (PCT)
Prior art keywords
mask
grooves
mask frame
locking
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2017/113079
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English (en)
French (fr)
Inventor
姜亮
李金川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to US15/580,150 priority Critical patent/US10784469B2/en
Publication of WO2019075857A1 publication Critical patent/WO2019075857A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B05C21/005—Masking devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Definitions

  • the present invention relates to the field of display technologies, and in particular, to a mask and a method of fabricating the same.
  • OLED Organic Light Emitting Display
  • OLED has self-illumination, low driving voltage, high luminous efficiency, short response time, high definition and contrast ratio, near 180° viewing angle, wide temperature range, and flexible display.
  • a large-area full-color display and many other advantages have been recognized by the industry as the most promising display device.
  • OLED can be divided into two types: passive matrix OLED (PMOLED) and active matrix OLED (AMOLED), namely direct addressing and thin film transistor (TFT) matrix addressing. class.
  • PMOLED passive matrix OLED
  • AMOLED active matrix OLED
  • TFT thin film transistor
  • the AMOLED has pixels arranged in an array, belongs to an active display type, has high luminous efficiency, and is generally used as a high-definition large-sized display device.
  • the OLED device generally includes a substrate, an anode disposed on the substrate, a hole injection layer disposed on the anode, a hole transport layer disposed on the hole injection layer, and a light-emitting layer disposed on the hole transport layer.
  • the principle of illumination of OLED devices is that semiconductor materials and organic luminescent materials are driven by electric fields, causing luminescence by carrier injection and recombination.
  • an OLED device generally uses an ITO pixel electrode and a metal electrode as an anode and a cathode, respectively.
  • electrons and holes are injected from the cathode and the anode to the electron injection layer and the hole injection layer, respectively, and the electrons and holes are respectively.
  • the electron transport layer and the hole transport layer migrate to the light-emitting layer and meet in the light-emitting layer to form excitons and excite the light-emitting molecules, and the latter emits visible light through radiation relaxation.
  • the OLED display is divided into two types according to the size of the panel, and the OLED display can be divided into two types: large size and small and medium size.
  • the large size OLED display generally emits white light through a white OLED and is filtered by a color filter layer (CF).
  • Color display In the prior art, a mask is generally used to evaporate the functional layers of the OLED.
  • a large-sized OLED display using a white OLED plus a color filter layer structure in the process of vapor-depositing a white OLED, only It is necessary to use a mask to define the boundary of the effective area (AA area). Please refer to FIG.
  • FIG. 1 which is a schematic structural diagram of a mask for manufacturing a large-sized OLED display, which includes a mask frame 100 ′ and a mask frame 100 ′.
  • a plurality of mask sheets 200', the plurality of mask sheets 200' and the mask frame 100' together define a plurality of An open area for vapor deposition is generally fixed to the mask frame 100' by soldering in the prior art.
  • the mask needs to be cleaned periodically during use to ensure product quality. After multiple cleanings, the mask is removed from the mask frame for rework process, because the existing mask is welded.
  • the method of soldering the mask and the mask frame, after the mask is removed from the mask frame, the welding position on the mask frame needs to be polished to ensure the flatness of the mask frame and the welding mask again.
  • the reliability of the diaphragm is complicated, and the thickness of the mask frame is thinned due to the grinding. Therefore, after 2 to 3 times of the redo process, the mask frame must be scrapped, so that the service life of the mask frame is short.
  • the fabrication of the mask frame and the redo process of the mask are the main components of the cost. The complicated redo process and the short life of the mask frame will be short. The cost of the product is greatly increased.
  • Another object of the present invention is to provide a method for fabricating a mask, which has a high efficiency in the redo process and a long service life.
  • the present invention firstly provides a mask, comprising: a mask frame, a plurality of masks disposed on the mask frame, and a plurality of masks mounted on the mask frame and respectively a plurality of pairs of locking fittings on which the mask is fixed on the mask frame;
  • the mask frame has an opening, and a plurality of pairs of grooves respectively corresponding to the plurality of mask sheets are disposed on the top or outer side surface of the mask frame, and two grooves in each pair of grooves are respectively located Each of the two sides of the opening; each of the locking fittings includes a fitting portion and two connecting portions disposed on both sides of the mating portion; each of the masking sheets has a portion overlapping with a corresponding pair of grooves, and each The mating portions of the pair of locking fittings corresponding to the mask are respectively engaged with the corresponding pair of grooves to clamp the portion of the mask that overlaps the pair of grooves, and the two connecting portions of each locking fitting are respectively A detachable connection to the mask frame to secure the plurality of masks to the mask frame.
  • the top surface of the mating portion of the locking fitting is provided with a plurality of first protrusions
  • the bottom surface of the groove is provided with a plurality of second protrusions that cooperate with the plurality of first protrusions.
  • the plurality of pairs of grooves are located at the top edge of the mask frame.
  • a portion of the mask sheet that coincides with a corresponding pair of grooves is located at both ends of the mask sheet.
  • the two connecting portions of the locking fitting are respectively provided with a through hole, and the corresponding through hole of the mask frame is provided with a threaded hole, and a locking screw is threadedly connected with the threaded hole through the through hole, thereby making the connecting portion and the cover
  • the membrane frame is detachably connected.
  • the invention also provides a method for manufacturing a mask, comprising the following steps:
  • Step S1 providing a mask frame
  • the mask frame has an opening, and a plurality of pairs of grooves are disposed on the top surface or the outer side surface of the mask frame, and two grooves in each pair of grooves are respectively located on two sides of the opening;
  • Step S2 providing a plurality of mask sheets, and a plurality of pairs of locking fittings respectively corresponding to the plurality of mask sheets;
  • the plurality of masks respectively correspond to pairs of grooves
  • Each locking accessory includes a mating portion and two connecting portions disposed on two sides of the mating portion;
  • Step S3 each mask sheet is closely adhered to the top surface of the mask frame, and a portion of each mask sheet is coincident with a corresponding pair of grooves;
  • Step S4 the mating portions of the pair of locking fittings corresponding to each of the masking sheets are respectively engaged with the corresponding pair of grooves to clamp the portion of the masking sheet that coincides with the pair of grooves, and each will be
  • the two connecting portions of the locking fitting are respectively detachably connected to the mask frame, and the plurality of mask sheets are fixed on the mask frame to obtain a mask.
  • the top surface of the mating portion of the locking fitting is provided with a plurality of first protrusions
  • the bottom surface of the groove is provided with a plurality of second protrusions that cooperate with the plurality of first protrusions.
  • the plurality of pairs of grooves are located at the top edge of the mask frame.
  • a portion of the mask sheet that coincides with a corresponding pair of grooves is located at both ends of the mask sheet.
  • the two connecting portions of the locking fitting are respectively provided with a through hole, and the corresponding through hole on the mask frame is provided with a threaded hole;
  • the locking screw is threadedly connected to the threaded hole through the through hole, so that the connecting portion and the mask frame are detachably connected.
  • the present invention also provides a mask comprising: a mask frame, a plurality of mask sheets disposed on the mask frame, and mounted on the mask frame and respectively fixing the plurality of mask sheets Multiple pairs of locking fittings on the mask border;
  • the mask frame has an opening, and a plurality of pairs of grooves respectively corresponding to the plurality of mask sheets are disposed on the top or outer side surface of the mask frame, and two grooves in each pair of grooves are respectively located Each of the two sides of the opening; each of the locking fittings includes a fitting portion and two connecting portions disposed on both sides of the mating portion; each of the masking sheets has a portion overlapping with a corresponding pair of grooves, and each The mating portions of the pair of locking fittings corresponding to the mask are respectively engaged with the corresponding pair of grooves to clamp the portion of the mask that overlaps the pair of grooves, and the two connecting portions of each locking fitting are respectively Removably connected to the mask frame to fix the plurality of masks on the mask frame;
  • top surface of the engaging portion of the locking fitting is provided with a plurality of first protrusions
  • bottom surface of the groove is provided with a plurality of second protrusions that cooperate with the plurality of first protrusions
  • the plurality of pairs of grooves are located at a top edge of the mask frame
  • the portion of the mask sheet that coincides with the corresponding pair of grooves is located at both ends of the mask sheet;
  • the two connecting portions of the locking fitting are respectively provided with a through hole, and the corresponding through hole of the mask frame is provided with a threaded hole, and a locking screw is threadedly connected with the threaded hole through the through hole, thereby making the connecting portion Removable connection to the mask border.
  • a mask provided by the present invention has a plurality of pairs of grooves corresponding to a plurality of mask sheets disposed on a mask frame, each mask sheet having a pair of grooves corresponding thereto
  • the overlapping portion is provided with a plurality of pairs of locking fittings corresponding to the plurality of mask sheets, each locking fitting comprises a fitting portion and two connecting portions provided on both sides of the mating portion, and the fitting portion of the locking fitting is utilized Cooperating with the corresponding groove to clamp the portion where the mask and the groove coincide, and detachably connecting the connection portion of the locking fitting and the mask frame, thereby fixing the plurality of masks on the mask frame,
  • the mask is reworked, only the locking accessory needs to be removed from the mask frame to complete the separation of the mask frame and the mask, so that the mask frame is not required to be polished, and the weight is reduced.
  • the complexity of the process, while extending the life of the mask frame is conducive to reducing product costs.
  • the invention provides a method for manufacturing a mask
  • 1 is a schematic structural view of a conventional mask
  • FIG. 2 is a schematic structural view of a mask of the present invention
  • Figure 3 is a cross-sectional view taken along line AA of Figure 2;
  • Figure 4 is a cross-sectional view taken along line BB of Figure 2;
  • FIG. 5 is a schematic structural view of a mask frame of a mask according to the present invention.
  • Figure 6 is a top plan view of the locking fitting of the mask of the present invention.
  • Figure 7 is a cross-sectional view taken along line CC of Figure 6;
  • Figure 8 is a cross-sectional view taken along line DD of Figure 6;
  • Figure 9 is a flow chart showing a method of fabricating a mask according to the present invention.
  • Figure 10 is a schematic view showing the step S3 of the method of fabricating the mask of the present invention.
  • the present invention provides a mask comprising: a mask frame 100 , a plurality of mask sheets 200 disposed on the mask frame 100 , and a mask frame 100 mounted on the mask frame 100 .
  • a plurality of pairs of locking fittings 300 that are respectively fixed to the mask frame 100 by a plurality of mask sheets 200.
  • the mask frame 100 has an opening 120 , and a plurality of pairs of grooves 110 corresponding to the plurality of mask sheets 200 are respectively disposed on the top surface or the outer side surface of the mask frame 100 .
  • the two recesses 110 of the pair of recesses 110 are respectively located at two sides of the opening 120.
  • each of the locking fittings 300 includes a mating portion 310 and two sides disposed on opposite sides of the mating portion 310 . a connecting portion 320; referring to FIG. 3 and FIG.
  • each of the mask sheets 200 has a portion overlapping with a corresponding pair of recesses 110, and a pair of locking fittings 300 corresponding to each of the mask sheets 200
  • the mating portions 310 are respectively clamped with the corresponding pair of recesses 110 to clamp the portion of the mask sheet 200 that overlaps the pair of recesses 110, and the two connecting portions 320 of each of the locking fittings 300 and the mask frame 100 are respectively
  • the plurality of mask sheets 200 are detachably attached to the mask frame 100.
  • the position and the number of the grooves 110 on the top or outer side of the mask frame 100 are designed according to the opening pattern of the mask to be obtained.
  • the plurality of pairs of grooves 110 are located at the top edge of the mask frame 100, and the plurality of mask sheets 200 are all located at the top of the mask frame 100. surface. It can be understood that when the plurality of pairs of grooves 110 are located on the outer side of the mask frame 100, a portion of the plurality of mask sheets 200 are located on the top surface of the mask frame 100, and a portion is bent to the mask frame 100. The outer side of the mask 200 is bent to the outer side of the mask frame 100 to coincide with the corresponding recess 110 so that the locking fitting 300 and the recess 110 can clamp it.
  • a portion of the mask sheet 200 that coincides with a corresponding pair of grooves 110 is located at both ends of the mask sheet 200.
  • the two connecting portions 320 of the locking component 300 are respectively provided with a through hole 321 , and the corresponding through hole 321 of the mask frame 100 is provided with a threaded hole 130 .
  • a locking screw 400 is threadedly coupled to the threaded hole 130 through the through hole 321 to detachably connect the connecting portion 320 with the mask frame 100.
  • the locking screw 400 is a vacuum screw.
  • the connection portion 320 can be connected to the mask frame 100 by other conventional detachable connection methods, which does not affect the implementation of the present invention.
  • the top surface of the engaging portion 310 of the locking fitting 300 is provided with a plurality of first protrusions 311, and the bottom surface of the groove 110 is provided with a plurality of second protrusions that cooperate with the first protrusions 311. 111.
  • the mating portion 310 and the recess 110 can be prevented from clamping the mask sheet 200, and the mask sheet is 200 slips during use.
  • the plurality of first protrusions 311 and the plurality of second protrusions 111 are in mesh with each other.
  • top surface of the mating portion 310 of the locking fitting 300 and the bottom surface of the recess 110 can be set to other non-planar structures to prevent the mask sheet 200 from slipping during use, which does not affect the present invention. Implementation of the invention.
  • the mask of the present invention is used in the evaporation process of a large-sized OLED display, and a plurality of pairs of grooves 110 corresponding to the plurality of mask sheets 200 are disposed on the mask frame 100, and each The mask sheets 200 each have a portion overlapping the corresponding pair of grooves 110, and a plurality of pairs of locking fittings 300 corresponding to the plurality of mask sheets 200 are disposed, and the mating portions 310 of the locking fittings 300 and the corresponding recesses are utilized.
  • the slot 110 cooperates with the portion that overlaps the mask sheet 200 and the recess 110, and at the same time, the connecting portion 320 of the locking fitting 300 is detachably connected with the mask frame 100, thereby fixing the plurality of mask sheets 200 to the mask frame.
  • the mask frame needs to separate the mask frame 100 from the mask sheet 200 in the redo process after multiple cleaning, only the locking accessory 300 needs to be removed from the mask frame 100 to complete.
  • the mask frame 100 is separated from the mask sheet 200, so that the mask frame 100 need not be polished, the complexity of the redo process is reduced, and the service life of the mask frame 100 is prolonged, which is beneficial to reduce product cost.
  • the present invention further provides a method for fabricating a mask, comprising the following steps:
  • Step S1 please refer to FIG. 5, providing a mask frame 100;
  • the mask frame 100 has an opening 120.
  • the top or outer surface of the mask frame 100 is provided with a plurality of pairs of grooves 110. Two of the grooves 110 of each pair of grooves 110 are respectively located at the opening 120. On both sides.
  • the position and the number of the grooves 110 on the top or outer side of the mask frame 100 are designed according to the opening pattern of the mask to be obtained.
  • the plurality of pairs of grooves 110 are located at the top edge of the mask frame 100. In other embodiments of the present invention, the plurality of pairs of grooves 110 may also be located on the outer side of the mask frame 100.
  • a plurality of second protrusions 111 are disposed on the bottom surface of the groove 110.
  • Step S2 please refer to FIG. 6 to FIG. 8, providing a plurality of mask sheets 200, and a plurality of pairs of locking fittings 300 respectively corresponding to the plurality of mask sheets 200;
  • the plurality of mask sheets 200 respectively correspond to the plurality of pairs of grooves 110;
  • Each of the locking fittings 300 includes a mating portion 310 and two connecting portions 320 disposed on two sides of the mating portion 310.
  • the two connecting portions 320 of the locking component 300 are respectively provided with a through hole 321 .
  • the corresponding through hole 321 of the mask frame 100 is provided with a threaded hole. 130.
  • the top surface of the engaging portion 310 of the locking fitting 300 is provided with a plurality of first protrusions 311 that cooperate with the second protrusions 111.
  • each mask sheet 200 is closely attached to the top surface of the mask frame 100 by using a netting machine, and a portion of each mask sheet 200 is corresponding to a pair of grooves 110. coincide.
  • a portion of the mask sheet 200 that coincides with a corresponding pair of grooves 110 is located at both ends of the mask sheet 200.
  • the whole of the mask sheet 200 is closely attached to the top surface of the mask frame 100 by using a netting machine.
  • a part of the mask sheet 200 is bent to the outer side of the mask frame 100 by using a netting machine.
  • the portion of the diaphragm 200 bent to the outer side surface of the mask frame 100 coincides with the corresponding groove 110, and at the same time, the portions of the plurality of mask sheets 200 other than the portion bent to the outer side of the mask frame 100 are made. It closely fits the top surface of the mask frame 100.
  • Step S4 referring to FIG. 2 to FIG. 4, the mating portions 310 of the pair of locking fittings 300 corresponding to each of the masking sheets 200 are respectively matched with the corresponding pair of recesses 110, and the masking sheet 200 is matched with the one.
  • the portions of the recesses 110 are clamped, and the two connecting portions 320 of each of the locking fittings 300 are respectively detachably connected to the mask frame 100, and the plurality of masks 200 are fixed on the mask frame 100 to be masked.
  • Membrane plate referring to FIG. 2 to FIG. 4
  • the locking screw 400 is screwed through the through hole 321 and the threaded hole 130, so that the connecting portion 320 is detachably connected to the mask frame 100.
  • the locking screw 400 is a vacuum screw.
  • the connection portion 320 can be connected to the mask frame 100 by other conventional detachable connection methods, which does not affect the implementation of the present invention.
  • a plurality of pairs of grooves 110 are disposed on the mask frame 100, and then a plurality of mask sheets 200 corresponding to the plurality of pairs of grooves 110 and the mask frame 100 are disposed.
  • the top surface of the mask sheet 200 is closely adhered, and a portion of each mask sheet 200 is overlapped with its corresponding groove 110, and the mating portion 310 of the pair of locking fittings 300 corresponding to the plurality of mask sheets 200 and the corresponding groove are utilized.
  • the connecting portion 320 of the locking fitting 300 is detachably connected with the mask frame 100, thereby fixing the plurality of mask sheets 200 to the mask frame 100.
  • a mask is obtained, and when the mask frame 100 needs to be separated from the mask sheet 200 in the redo process after multiple cleaning, only the locking component 300 needs to be removed from the mask frame 100.
  • the separation of the mask frame 100 and the mask sheet 200 can be completed, so that the mask frame 100 does not need to be polished, which reduces the complexity of the redo process and extends
  • the service life of the mask frame 100 is beneficial to reduce the product cost.
  • the mask of the present invention has a plurality of pairs of grooves corresponding to the plurality of mask sheets on the mask frame, and each of the mask sheets has a portion overlapping with a corresponding pair of grooves.
  • a plurality of pairs of locking fittings corresponding to the plurality of masking sheets are provided, each of the locking fittings comprises a fitting portion and two connecting portions provided on both sides of the mating portion, and the fitting portion of the locking fitting and the corresponding concave portion are used
  • the groove fits the portion of the mask sheet that coincides with the groove, and the connection portion of the locking fitting is detachably connected with the mask frame, thereby fixing the plurality of mask sheets on the mask frame, in the mask plate.
  • the masking plate manufacturing method of the invention has the advantages of high efficiency and long service life of the masking process.

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  • Chemical Kinetics & Catalysis (AREA)
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Abstract

一种掩膜板及其制作方法。在掩膜边框(100)上设置与多个掩膜片(200)对应的多对凹槽(110)，每一掩膜片(200)均具有与其所对应的一对凹槽(110)重合的部分，同时设置与多个掩膜片(200)对应的多对锁紧配件(300)，每一锁紧配件(300)均包括配合部(310)、及设于配合部(310)两侧的两个连接部(320)，利用锁紧配件(300)的配合部(310)与对应的凹槽(110)配合将掩膜片(200)与凹槽(110)重合的部分夹紧，同时将锁紧配件(300)的连接部(320)与掩膜边框(100)可拆卸连接，从而将多个掩膜片(200)固定在掩膜边框(100)上，在对掩膜板进行重做制程时，仅需要将锁紧配件(300)从掩膜边框(100)上拆下，即可完成掩膜边框(100)与掩膜片(200)的分离，因此无需对掩膜边框(100)进行打磨加工，降低了重做制程的复杂程度，同时延长了掩膜边框(100)的使用寿命，有利于降低产品成本。

Description

掩膜板及其制作方法 技术领域
本发明涉及显示技术领域，尤其涉及一种掩膜板及其制作方法。
背景技术
有机发光二极管显示装置(Organic Light Emitting Display，OLED)具有自发光、驱动电压低、发光效率高、响应时间短、清晰度与对比度高、近180°视角、使用温度范围宽，可实现柔性显示与大面积全色显示等诸多优点，被业界公认为是最有发展潜力的显示装置。
OLED按照驱动方式可以分为无源矩阵型OLED(Passive Matrix OLED，PMOLED)和有源矩阵型OLED(Active Matrix OLED，AMOLED)两大类，即直接寻址和薄膜晶体管(TFT)矩阵寻址两类。其中，AMOLED具有呈阵列式排布的像素，属于主动显示类型，发光效能高，通常用作高清晰度的大尺寸显示装置。
OLED器件通常包括：基板、设于基板上的阳极、设于阳极上的空穴注入层、设于空穴注入层上的空穴传输层、设于空穴传输层上的发光层、设于发光层上的电子传输层、设于电子传输层上的电子注入层、及设于电子注入层上的阴极。OLED器件的发光原理为半导体材料和有机发光材料在电场驱动下，通过载流子注入和复合导致发光。具体的，OLED器件通常采用ITO像素电极和金属电极分别作为阳极和阴极，在一定电压驱动下，电子和空穴分别从阴极和阳极注入到电子注入层和空穴注入层，电子和空穴分别经过电子传输层和空穴传输层迁移到发光层，并在发光层中相遇，形成激子并使发光分子激发，后者经过辐射弛豫而发出可见光。
以面板尺寸来划分OLED显示器，可将OLED显示器划分为大尺寸、以及中小尺寸两大类，其中，大尺寸OLED显示器一般通过白光OLED发出白光并通过彩色滤光层(CF)过滤的方式实现全彩显示。现有技术中，一般利用掩膜板(mask)来蒸镀OLED的各功能层，对于采用白光OLED加彩色滤光层结构的大尺寸OLED显示器而言，在蒸镀白光OLED的制程中，仅需要使用掩膜板来定义有效区(AA区)的边界即可。请参阅图1，为现有的一种用于制作大尺寸OLED显示器的掩膜板的结构示意图，该掩膜板包括掩膜边框(Frame)100’、以及固定于掩膜边框100’上的多条掩膜片(mask sheet)200’，所述多条掩膜片200’与掩膜边框100’共同限定出多 个用于蒸镀的开口区域，现有技术中一般通过焊接的方式将掩膜片200’固定在掩膜边框100’上。掩膜板在使用过程中需要定期进行清洗以保证产品质量，在多次清洗之后需要将掩膜片从掩膜边框上拆下进行重做(rework)制程，由于现有的掩膜板通过焊接的方式焊接掩膜片与掩膜边框，在将掩膜片从掩膜边框上拆下后，需要对掩膜边框上的焊接位置进行打磨加工，以保证掩膜边框的平坦度及再次焊接掩膜片的可靠性，操作复杂，并且由于打磨会导致掩膜边框的厚度减薄，所以在进行2～3次重做制程后，掩膜边框必须报废，使掩膜边框的使用寿命较短，对于用于制作大尺寸OLED显示器的掩膜板而言，掩膜边框的制作及掩膜板的重做制程是其成本的主要构成，复杂的重做制程以及掩膜边框的使用寿命较短会使产品成本大大增加。
发明内容
本发明的目的在于提供一种掩膜板，其重做制程的效率高，使用寿命长。
本发明的另一目的在于提供一种掩膜板的制作方法，制得的掩膜板的重做制程的效率高，使用寿命长。
为实现上述目的，本发明首先提供一种掩膜板，包括：掩膜边框、设于所述掩膜边框上的多个掩膜片、及安装于所述掩膜边框上且分别将多个掩膜片固定在掩膜边框上的多对锁紧配件；
所述掩膜边框具有一开口，所述掩膜边框的顶面或外侧面上设有分别与多个掩膜片对应的多对凹槽，每一对凹槽中的两个凹槽分别位于开口的两侧；每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部；每一掩膜片均具有与其所对应的一对凹槽重合的部分，与每一掩膜片对应的一对锁紧配件的配合部分别与对应的一对凹槽配合将该掩膜片与该一对凹槽重合的部分夹紧，同时每一锁紧配件的两连接部分别与掩膜边框可拆卸连接，从而将多个掩膜片固定在掩膜边框上。
所锁紧配件的配合部的顶面设有多个第一凸起，所述凹槽的底面设有与多个第一凸起配合的多个第二凸起。
所述多对凹槽均位于掩膜边框的顶面边缘。
所述掩膜片与其所对应的一对凹槽重合的部分位于该掩膜片的两端。
所述锁紧配件的两个连接部均设有一通孔，所述掩膜边框上对应通孔设有螺纹孔，一锁紧螺丝穿过通孔与螺纹孔螺纹连接，从而使连接部与掩膜边框可拆卸连接。
本发明还提供一种掩膜板的制作方法，包括如下步骤：
步骤S1、提供掩膜边框；
所述掩膜边框具有一开口，所述掩膜边框的顶面或外侧面上设有多对凹槽，每一对凹槽中的两个凹槽分别位于开口的两侧；
步骤S2、提供多个掩膜片、及分别与多个掩膜片对应的多对锁紧配件；
所述多个掩膜片分别与多对凹槽对应；
每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部；
步骤S3、将每一掩膜片与掩膜边框的顶面紧密贴合，并使每一掩膜片的部分与其所对应的一对凹槽重合；
步骤S4、使与每一掩膜片对应的一对锁紧配件的配合部分别与对应的一对凹槽配合将该掩膜片与该一对凹槽重合的部分夹紧，同时将每一锁紧配件的两连接部分别与掩膜边框可拆卸连接，将多个掩膜片固定在掩膜边框上，得到掩膜板。
所锁紧配件的配合部的顶面设有多个第一凸起，所述凹槽的底面设有与多个第一凸起配合的多个第二凸起。
所述多对凹槽均位于掩膜边框的顶面边缘。
所述掩膜片与其所对应的一对凹槽重合的部分位于该掩膜片的两端。
所述锁紧配件的两个连接部均设有一通孔，所述掩膜边框上对应通孔设有螺纹孔；
所述步骤S4中，通过锁紧螺丝穿过通孔与螺纹孔螺纹连接，从而使连接部与掩膜边框可拆卸连接。
本发明还提供一种掩膜板，包括：掩膜边框、设于所述掩膜边框上的多个掩膜片、及安装于所述掩膜边框上且分别将多个掩膜片固定在掩膜边框上的多对锁紧配件；
所述掩膜边框具有一开口，所述掩膜边框的顶面或外侧面上设有分别与多个掩膜片对应的多对凹槽，每一对凹槽中的两个凹槽分别位于开口的两侧；每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部；每一掩膜片均具有与其所对应的一对凹槽重合的部分，与每一掩膜片对应的一对锁紧配件的配合部分别与对应的一对凹槽配合将该掩膜片与该一对凹槽重合的部分夹紧，同时每一锁紧配件的两连接部分别与掩膜边框可拆卸连接，从而将多个掩膜片固定在掩膜边框上；
其中，所锁紧配件的配合部的顶面设有多个第一凸起，所述凹槽的底面设有与多个第一凸起配合的多个第二凸起；
其中，所述多对凹槽均位于掩膜边框的顶面边缘；
其中，所述掩膜片与其所对应的一对凹槽重合的部分位于该掩膜片的两端；
其中，所述锁紧配件的两个连接部均设有一通孔，所述掩膜边框上对应通孔设有螺纹孔，一锁紧螺丝穿过通孔与螺纹孔螺纹连接，从而使连接部与掩膜边框可拆卸连接。
本发明的有益效果：本发明提供的一种掩膜板，在掩膜边框上设置与多个掩膜片对应的多对凹槽，每一掩膜片均具有与其所对应的一对凹槽重合的部分，同时设置与多个掩膜片对应的多对锁紧配件，每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部，利用锁紧配件的配合部与对应的凹槽配合将掩膜片与凹槽重合的部分夹紧，同时将锁紧配件的连接部与掩膜边框可拆卸连接，从而将多个掩膜片固定在掩膜边框上，在对掩膜板进行重做制程时，仅需要将锁紧配件从掩膜边框上拆下，即可完成掩膜边框与掩膜片的分离，因此无需对掩膜边框进行打磨加工，降低了重做制程的复杂程度，同时延长了掩膜边框的使用寿命，有利于降低产品成本。本发明提供的一种掩膜板的制作方法，制得的掩膜板的重做制程的效率高，使用寿命长。
附图说明
为了能更进一步了解本发明的特征以及技术内容，请参阅以下有关本发明的详细说明与附图，然而附图仅提供参考与说明用，并非用来对本发明加以限制。
附图中，
图1为现有的一种掩膜板的结构示意图；
图2为本发明的掩膜板的结构示意图；
图3为沿图2中的AA线的剖视示意图；
图4为沿图2中的BB线的剖视示意图；
图5为本发明的掩膜板的掩膜边框的结构示意图；
图6为本发明的掩膜板的锁紧配件的俯视示意图；
图7为沿图6中的CC线的剖视示意图；
图8为沿图6中的DD线的剖视示意图；
图9为本发明的掩膜板的制作方法的流程图；
图10为本发明的掩膜板的制作方法的步骤S3的示意图。
具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果，以下结合本发明的优选实施例及其附图进行详细描述。
请参阅图2至图8，本发明提供一种掩膜板，包括：掩膜边框100、设于所述掩膜边框100上的多个掩膜片200、及安装于所述掩膜边框100上且分别将多个掩膜片200固定在掩膜边框100上的多对锁紧配件300。
其中，请参阅图5，所述掩膜边框100具有一开口120，所述掩膜边框100的顶面或外侧面上设有分别与多个掩膜片200对应的多对凹槽110，每一对凹槽110中的两个凹槽110分别位于开口120的两侧；请参阅图6至图8，每一锁紧配件300均包括配合部310、及设于配合部310两侧的两个连接部320；请参阅图3及图4，每一掩膜片200均具有与其所对应的一对凹槽110重合的部分，与每一掩膜片200对应的一对锁紧配件300的配合部310分别与对应的一对凹槽110配合将该掩膜片200与该一对凹槽110重合的部分夹紧，同时每一锁紧配件300的两连接部320分别与掩膜边框100可拆卸连接，从而将多个掩膜片200固定在掩膜边框100上。
具体地，凹槽110在掩膜边框100的顶面或外侧面的位置及数量根据欲得到的掩膜板的开口图案的来进行设计。
具体地，在图2至图5所示的实施例中，所述多对凹槽110均位于掩膜边框100的顶面边缘，多个掩膜片200的整体均位于掩膜边框100的顶面。可以理解的是，当所述多对凹槽110均位于掩膜边框100的外侧面时，所述多个掩膜片200的一部分位于掩膜边框100的顶面，一部分弯曲至掩膜边框100的外侧面，掩膜片200弯曲至掩膜边框100的外侧面的部分与对应的凹槽110重合，以使锁紧配件300及凹槽110能够将其夹紧。
优选地，所述掩膜片200与其所对应的一对凹槽110重合的部分位于该掩膜片200的两端。
具体地，请参阅图3、图6及图7，所述锁紧配件300的两个连接部320均设有一通孔321，所述掩膜边框100上对应通孔321设有螺纹孔130，一锁紧螺丝400穿过通孔321与螺纹孔130螺纹连接，从而使连接部320与掩膜边框100可拆卸连接。优选地，所述锁紧螺丝400为真空螺丝。当然，也可选择其他常用的可拆卸连接方式将连接部320与掩膜边框100连接，这并不会影响本发明的实现。
优选地，所锁紧配件300的配合部310的顶面设有多个第一凸起311，所述凹槽110的底面设有多个与第一凸起311配合的多个第二凸起111。通过在配合部310的顶面及凹槽110的底面分别设置第一凸起311与第二凸起111能够有效防止配合部310与凹槽110将掩膜片200夹紧之后，掩膜片 200在使用过程中发生滑动。优选地，所述多个第一凸起311与多个第二凸起111相互啮合。当然，也可将所述锁紧配件300的配合部310的顶面与凹槽110的底面均设为其他非平面结构，防止掩膜片200在使用过程中发生滑动，这并不会影响本发明的实现。
需要说明的是，本发明的掩膜板用于大尺寸的OLED显示器的蒸镀制程之中，通过在掩膜边框100上设置与多个掩膜片200对应的多对凹槽110，每一掩膜片200均具有与其所对应的一对凹槽110重合的部分，同时设置与多个掩膜片200对应的多对锁紧配件300，利用锁紧配件300的配合部310与对应的凹槽110配合将掩膜片200与凹槽110重合的部分夹紧，同时将锁紧配件300的连接部320与掩膜边框100可拆卸连接，从而将多个掩膜片200固定在掩膜边框100上，该掩膜板在多次清洗后的重做制程中需要将掩膜边框100与掩膜片200分离时，仅需要将锁紧配件300从掩膜边框100上拆下，即可完成掩膜边框100与掩膜片200的分离，因此无需对掩膜边框100进行打磨加工，降低了重做制程的复杂程度，同时延长了掩膜边框100的使用寿命，有利于降低产品成本。
请参阅图9，基于同一发明构思，本发明还提供一种掩膜板的制作方法，包括如下步骤：
步骤S1、请参阅图5，提供掩膜边框100；
所述掩膜边框100具有一开口120，所述掩膜边框100的顶面或外侧面上设有多对凹槽110，每一对凹槽110中的两个凹槽110分别位于开口120的两侧。
具体地，凹槽110在掩膜边框100的顶面或外侧面的位置及数量根据欲得到的掩膜板的开口图案的来进行设计。
具体地，在图5所示的实施例中，所述多对凹槽110均位于掩膜边框100的顶面边缘。在本发明的其他实施例中，所述多对凹槽110也可均位于掩膜边框100的外侧面。
优选地，请参阅图4，所述凹槽110底面设有多个第二凸起111。
步骤S2、请参阅图6至图8，提供多个掩膜片200、及分别与多个掩膜片200对应的多对锁紧配件300；
所述多个掩膜片200分别与多对凹槽110对应；
每一锁紧配件300均包括配合部310、及设于配合部310两侧的两个连接部320。
具体地，请参阅图6及图7，所述锁紧配件300的两个连接部320均设有一通孔321，请参阅图5，所述掩膜边框100上对应通孔321设有螺纹孔 130。
优选地，所锁紧配件300的配合部310的顶面设有多个与第二凸起111配合的第一凸起311。
步骤S3、请参阅图10，利用张网机将每一掩膜片200与掩膜边框100的顶面紧密贴合，并使每一掩膜片200的部分与其所对应的一对凹槽110重合。
优选地，所述掩膜片200与其所对应的一对凹槽110重合的部分位于该掩膜片200的两端。
具体地，当所述多对凹槽110均设于掩膜边框100的顶面时，所述步骤S3中，利用张网机将掩膜片200的整体与掩膜边框100的顶面紧密贴合，当所述多对凹槽110均设于掩膜边框100的外侧面时，所述步骤S3中，利用张网机将掩膜片200的一部分弯曲至掩膜边框100的外侧面，掩膜片200弯曲至掩膜边框100的外侧面的部分与对应的凹槽110重合，与此同时，使多个掩膜片200上除了弯曲至掩膜边框100的外侧面的部分以外的其他部分与掩膜边框100的顶面紧密贴合。
步骤S4、请参阅图2至图4，使与每一掩膜片200对应的一对锁紧配件300的配合部310分别与对应的一对凹槽110配合将该掩膜片200与该一对凹槽110重合的部分夹紧，同时将每一锁紧配件300的两连接部320分别与掩膜边框100可拆卸连接，将多个掩膜片200固定在掩膜边框100上，得到掩膜板。
具体地，所述步骤S4中，通过锁紧螺丝400穿过通孔321与螺纹孔130螺纹连接，从而使连接部320与掩膜边框100可拆卸连接。优选地，所述锁紧螺丝400为真空螺丝。当然，也可选择其他常用的可拆卸连接方式将连接部320与掩膜边框100连接，这并不会影响本发明的实现。
需要说明的是，本发明的掩膜板的制作方法，通过在掩膜边框100上设置多对凹槽110，而后将与多对凹槽110对应的多个掩膜片200与掩膜边框100的顶面紧密贴合，并使每一掩膜片200的部分与其对应的凹槽110重合，利用与多个掩膜片200对应的多对锁紧配件300的配合部310与对应的凹槽110配合将掩膜片200与凹槽110重合的部分夹紧，同时将锁紧配件300的连接部320与掩膜边框100可拆卸连接，从而将多个掩膜片200固定在掩膜边框100上而得到掩膜板，该掩膜板在多次清洗后的重做制程中需要将掩膜边框100与掩膜片200分离时，仅需要将锁紧配件300从掩膜边框100上拆下，即可完成掩膜边框100与掩膜片200的分离，因此无需对掩膜边框100进行打磨加工，降低了重做制程的复杂程度，同时延长 了掩膜边框100的使用寿命，有利于降低产品成本。
综上所述，本发明的掩膜板，在掩膜边框上设置与多个掩膜片对应的多对凹槽，每一掩膜片均具有与其所对应的一对凹槽重合的部分，同时设置与多个掩膜片对应的多对锁紧配件，每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部，利用锁紧配件的配合部与对应的凹槽配合将掩膜片与凹槽重合的部分夹紧，同时将锁紧配件的连接部与掩膜边框可拆卸连接，从而将多个掩膜片固定在掩膜边框上，在对掩膜板进行重做制程时，仅需要将锁紧配件从掩膜边框上拆下，即可完成掩膜边框与掩膜片的分离，因此无需对掩膜边框进行打磨加工，降低了重做制程的复杂程度，同时延长了掩膜边框的使用寿命，有利于降低产品成本。本发明的掩膜板的制作方法，制得的掩膜板的重做制程的效率高，使用寿命长。
以上所述，对于本领域的普通技术人员来说，可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形，而所有这些改变和变形都应属于本发明权利要求的保护范围。

Claims (11)

  1. 一种掩膜板，包括：掩膜边框、设于所述掩膜边框上的多个掩膜片、及安装于所述掩膜边框上且分别将多个掩膜片固定在掩膜边框上的多对锁紧配件；
    所述掩膜边框具有一开口，所述掩膜边框的顶面或外侧面上设有分别与多个掩膜片对应的多对凹槽，每一对凹槽中的两个凹槽分别位于开口的两侧；每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部；每一掩膜片均具有与其所对应的一对凹槽重合的部分，与每一掩膜片对应的一对锁紧配件的配合部分别与对应的一对凹槽配合将该掩膜片与该一对凹槽重合的部分夹紧，同时每一锁紧配件的两连接部分别与掩膜边框可拆卸连接，从而将多个掩膜片固定在掩膜边框上。
  2. 如权利要求1所述的掩膜板，其中，所锁紧配件的配合部的顶面设有多个第一凸起，所述凹槽的底面设有与多个第一凸起配合的多个第二凸起。
  3. 如权利要求1所述的掩膜板，其中，所述多对凹槽均位于掩膜边框的顶面边缘。
  4. 如权利要求1所述的掩膜板，其中，所述掩膜片与其所对应的一对凹槽重合的部分位于该掩膜片的两端。
  5. 如权利要求1所述的掩膜板，其中，所述锁紧配件的两个连接部均设有一通孔，所述掩膜边框上对应通孔设有螺纹孔，一锁紧螺丝穿过通孔与螺纹孔螺纹连接，从而使连接部与掩膜边框可拆卸连接。
  6. 一种掩膜板的制作方法，包括如下步骤：
    步骤S1、提供掩膜边框；
    所述掩膜边框具有一开口，所述掩膜边框的顶面或外侧面上设有多对凹槽，每一对凹槽中的两个凹槽分别位于开口的两侧；
    步骤S2、提供多个掩膜片、及分别与多个掩膜片对应的多对锁紧配件；
    所述多个掩膜片分别与多对凹槽对应；
    每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部；
    步骤S3、将每一掩膜片与掩膜边框的顶面紧密贴合，并使每一掩膜片的部分与其所对应的一对凹槽重合；
    步骤S4、使与每一掩膜片对应的一对锁紧配件的配合部分别与对应的一对凹槽配合将该掩膜片与该一对凹槽重合的部分夹紧，同时将每一锁紧 配件的两连接部分别与掩膜边框可拆卸连接，将多个掩膜片固定在掩膜边框上，得到掩膜板。
  7. 如权利要求6所述的掩膜板的制作方法，其中，所锁紧配件的配合部的顶面设有多个第一凸起，所述凹槽的底面设有与多个第一凸起配合的多个第二凸起。
  8. 如权利要求6所述的掩膜板的制作方法，其中，所述多对凹槽均位于掩膜边框的顶面边缘。
  9. 如权利要求6所述的掩膜板的制作方法，其中，所述掩膜片与其所对应的一对凹槽重合的部分位于该掩膜片的两端。
  10. 如权利要求6所述的掩膜板的制作方法，其中，所述锁紧配件的两个连接部均设有一通孔，所述掩膜边框上对应通孔设有螺纹孔；
    所述步骤S4中，通过锁紧螺丝穿过通孔与螺纹孔螺纹连接，从而使连接部与掩膜边框可拆卸连接。
  11. 一种掩膜板，包括：掩膜边框、设于所述掩膜边框上的多个掩膜片、及安装于所述掩膜边框上且分别将多个掩膜片固定在掩膜边框上的多对锁紧配件；
    所述掩膜边框具有一开口，所述掩膜边框的顶面或外侧面上设有分别与多个掩膜片对应的多对凹槽，每一对凹槽中的两个凹槽分别位于开口的两侧；每一锁紧配件均包括配合部、及设于配合部两侧的两个连接部；每一掩膜片均具有与其所对应的一对凹槽重合的部分，与每一掩膜片对应的一对锁紧配件的配合部分别与对应的一对凹槽配合将该掩膜片与该一对凹槽重合的部分夹紧，同时每一锁紧配件的两连接部分别与掩膜边框可拆卸连接，从而将多个掩膜片固定在掩膜边框上；
    其中，所锁紧配件的配合部的顶面设有多个第一凸起，所述凹槽的底面设有与多个第一凸起配合的多个第二凸起；
    其中，所述多对凹槽均位于掩膜边框的顶面边缘；
    其中，所述掩膜片与其所对应的一对凹槽重合的部分位于该掩膜片的两端；
    其中，所述锁紧配件的两个连接部均设有一通孔，所述掩膜边框上对应通孔设有螺纹孔，一锁紧螺丝穿过通孔与螺纹孔螺纹连接，从而使连接部与掩膜边框可拆卸连接。
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