WO2019073865A1 - 産業用ロボット - Google Patents

産業用ロボット Download PDF

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Publication number
WO2019073865A1
WO2019073865A1 PCT/JP2018/036976 JP2018036976W WO2019073865A1 WO 2019073865 A1 WO2019073865 A1 WO 2019073865A1 JP 2018036976 W JP2018036976 W JP 2018036976W WO 2019073865 A1 WO2019073865 A1 WO 2019073865A1
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WO
WIPO (PCT)
Prior art keywords
arm
hand
rotation center
base
center
Prior art date
Application number
PCT/JP2018/036976
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
矢澤　隆之
志村　芳樹
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to CN201880065220.9A priority Critical patent/CN111194253B/zh
Priority to KR1020207007168A priority patent/KR102254387B1/ko
Publication of WO2019073865A1 publication Critical patent/WO2019073865A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Definitions

  • the present invention relates to an industrial robot that transports an object to be transported, such as a glass substrate used in a liquid crystal display or an organic EL (Electro Luminescence) display.
  • an industrial robot that transports an object to be transported, such as a glass substrate used in a liquid crystal display or an organic EL (Electro Luminescence) display.
  • a double arm type robot that conveys a work such as a glass substrate for liquid crystal display is known (see, for example, Patent Document 1).
  • a double arm type robot in which a first arm and a second arm are disposed so as to overlap in the vertical direction (hereinafter, this robot is referred to as a "first robot”.
  • a double arm type robot hereinafter, this robot will be referred to as a "second robot" in which the first arm and the second arm are arranged to be adjacent to each other in the horizontal direction.
  • a first robot described in Patent Document 1 includes a support member to which a base end side of a first arm and a base end side of a second arm are rotatably connected, a column which holds the support member so as to be able to move up and down, and A pedestal fixed to the lower end portion, a vertical movement mechanism for raising and lowering the support member, and a pivoting mechanism for pivoting the pedestal are provided.
  • the base end side of the first arm connected to the support member and the base end side of the second arm overlap in the vertical direction.
  • the second hand is disposed above the second arm
  • the first hand is disposed above the second hand
  • the first arm is disposed above the first hand.
  • the support member moves up and down along the side surface of the column.
  • the second robot described in Patent Document 1 has a base upper portion to which the base end side of the first arm and the base end side of the second arm are rotatably connected, and a rotating shaft to which the base upper portion is fixed to the upper end And a base lower portion rotatably holding the pivot shaft and holding the pivot shaft up and down.
  • the upper portion of the base is disposed on the upper side of the lower portion of the base, and the pivot shaft can be accommodated in the lower portion of the base.
  • the first hand is disposed above the first arm, and the second hand is disposed above the second arm, and as described above, the first arm and the second arm Are arranged adjacent to each other in the horizontal direction.
  • the base upper portion to which the base end side of the first arm and the base end side of the second arm are connected is disposed on the upper side of the base lower portion. , Can not move below the upper end of the base lower part. Therefore, in the second robot, the elevation amount of the first hand and the second hand tends to be small.
  • the support member to which the base end side of the first arm and the base end side of the second arm are connected moves up and down along the side of the column, the first hand And the second hand can be increased and decreased.
  • the inventor of the present application In the first robot described in 1, it is considered to arrange the first arm and the second arm adjacent to each other in the horizontal direction, like the second robot.
  • the first robot when the first arm and the second arm are arranged side by side in the horizontal direction, in order to prevent interference between the first arm or the second arm and the column, the turning of the first robot It is necessary to arrange the column away from the center. Therefore, in the first robot, if the first arm and the second arm are arranged horizontally adjacent to each other, the turning radius of the first robot may be larger.
  • the industrial robot includes a first hand and a second hand on which an object to be transferred is mounted, and a first arm in which the first hand is rotatably connected to the tip side.
  • a pillar-shaped support frame that holds the lower end of the support frame vertically, a pivoting frame to which the lower end of the support frame is fixed at one end, and a base to which the other end of the pivoting frame is rotatably coupled; Is disposed above the first arm, the second hand is disposed above the second arm, and the first arm and the second arm are constituted by a plurality of arm portions rotatably coupled to each other Of the transport object
  • the first hand joint portion which is a connecting portion between the first hand and the first arm, expands and contracts at the time of feeding, and linearly moves
  • the second arm joint portion is disposed adjacent to the joint portion in the second direction, and the third arm joint portion is disposed on the third direction side of the first arm joint portion, and the arm support member can be moved up and down along the side surface of the support frame
  • the first hand includes a first hand base connected to the distal end side of the first arm, and the second hand includes a second hand base connected to the distal end side of the second arm from the first direction
  • the shape of the first hand base when viewed is straight in the vertical direction
  • the second hand base is disposed on the upper side of the first hand base and is connected to the tip side of the second arm.
  • the lower hand base and a hand base connection portion connecting the upper hand base and the lower hand base on the third direction side of the first hand base, and when viewed from the first direction, the second rotation center and the The center in the second direction with the four rotation centers is characterized in that it is disposed on the third direction side with respect to the fifth rotation center which is the rotation center of the swing frame with respect to the base.
  • the moving direction of the first hand joint portion and the second hand joint portion is a first direction
  • the direction perpendicular to the vertical direction and the first direction is a second direction
  • one of the second directions is In the third direction
  • the arm support member extends in the third direction from the support frame
  • the second arm joint portion which is a connecting portion between the second arm and the arm support member, supports the first arm and the arm It is arrange
  • the fourth rotation center which is the rotation center of the first arm with respect to the arm support member and the fourth rotation center which is the rotation center of the second arm with respect to the arm support member
  • the center in the second direction with the movement center is disposed on the third direction side with respect to the fifth rotation center (that is, the rotation center of the industrial robot) which is the rotation center of the rotation frame with respect to the base.
  • the center in the second direction of the second rotation center and the fourth rotation center and the fifth rotation center are arranged at the same position in the second direction. It becomes possible to arrange the second rotation center in the third direction side, and as a result, prevent the interference between the support frame and the first arm, while the fifth rotation is the rotation center of the industrial robot It becomes possible to arrange the support frame at a position closer in the second direction from the center. Therefore, in the present invention, the industrial robot is disposed even if the first arm and the second arm are disposed horizontally adjacent to each other and the arm support member can be moved up and down along the side surface of the columnar support frame. It is possible to reduce the turning radius of
  • the second rotation center and the fifth rotation center are disposed at the same position in the second direction when viewed from the first direction.
  • the second rotation center it is possible to arrange the second rotation center closer to the third direction. Therefore, it is possible to dispose the support frame at a position closer to the second rotation direction from the fifth rotation center which is the rotation center of the industrial robot while preventing interference between the support frame and the first arm.
  • the center of the transport object mounted on the first hand in the second direction when viewed from the first direction, the center of the transport object mounted on the second hand in the second direction, and It is preferable that the 5 rotation center and the center of gravity of the first hand be arranged at the same position in the second direction.
  • the center of the object to be carried in the first hand in the second direction when viewed from the first direction, the center of the object to be carried in the first hand in the second direction and the center of the object to be carried in the second hand in the second direction Since the fifth rotation center is disposed at the same position in the second direction, it is possible to stabilize the state of the object to be conveyed when the industrial robot turns.
  • the center in the second direction between the second rotation center and the fourth rotation center is disposed on the third direction side with respect to the fifth rotation center. Therefore, when viewed from the first direction, the first rotation center which is the rotation center of the first hand with respect to the first arm and the third rotation center which is the rotation center of the second hand with respect to the second arm
  • the center in the second direction is also disposed on the third direction side with respect to the fifth rotation center. Therefore, for example, compared with the case where the centers in the second direction of the first rotation center and the third rotation center and the fifth rotation center are arranged at the same position in the second direction, the first When viewed from the direction, it is possible to bring the first rotation center closer to the fifth rotation center in the second direction.
  • the first rotation center is determined as the first hand in the second direction. It is possible to get close to the center of gravity of Therefore, when the first arm extends and contracts, and the first hand joint moves linearly in the first direction, a moment hardly acts on the first hand rotatably connected to the tip end side of the first arm Become. As a result, it becomes possible to stabilize the operation of the first hand when the first arm expands and contracts, and it is possible to improve the operation accuracy of the first hand.
  • the second hand base that constitutes a part of the second hand includes the upper hand base, the lower hand base, and the upper hand base and the lower hand base in the third direction side of the first hand base.
  • the center of gravity of the second hand is the third direction relative to the center of the second object of the object carried by the second hand, as viewed from the first direction. It becomes the side.
  • the centers in the second direction of the first rotation center and the third rotation center are arranged on the third direction side with respect to the fifth rotation center.
  • the first When viewed from the direction, it is possible to move the third rotation center away from the fifth rotation center in the third direction. Therefore, when the center in the second direction of the object to be carried mounted on the second hand and the fifth rotation center are arranged at the same position in the second direction when viewed from the first direction, the second It is possible to bring the third rotation center closer to the center of gravity of the second hand in the direction. Therefore, when the second arm extends and contracts and the second hand joint moves linearly in the first direction, a moment hardly acts on the second hand rotatably connected to the tip end side of the second arm Become. As a result, it is possible to stabilize the operation of the second hand when the second arm expands and contracts, and it is possible to improve the operation accuracy of the second hand.
  • the center of gravity of the first hand and the first rotation center are preferably arranged at the same position in the second direction.
  • this structure when the first arm extends and contracts and the first hand joint moves linearly in the first direction, a moment is generated in the first hand rotatably coupled to the tip end of the first arm. It is possible to prevent the action of Therefore, it becomes possible to further stabilize the operation of the first hand when the first arm expands and contracts, and it is possible to further improve the operation accuracy of the first hand.
  • the first arm to which the first hand is connected and the second arm to which the second hand is connected are arranged horizontally adjacent to each other, and Even if the arm support member to which the proximal end side of the arm and the proximal end side of the second arm are pivotally connected is movable up and down along the side surface of the columnar support frame, the turning radius of the industrial robot is reduced. It becomes possible.
  • FIG. 1 is a front view of an industrial robot according to an embodiment of the present invention. It is a side view of the industrial robot shown in FIG. It is a top view of the industrial robot shown in FIG. It is a top view of the industrial robot shown in FIG. It is a top view of the industrial robot shown in FIG. It is a top view of the industrial robot shown in FIG. (A) is a figure for demonstrating the arrangement relationship etc. of the 1st rotation center-the 5th rotation center shown in FIG. 3, (B) is for demonstrating the effect of the industrial robot shown in FIG. Of the It is a figure for demonstrating the effect of the industrial robot shown in FIG.
  • FIG. 1 is a front view of an industrial robot 1 according to an embodiment of the present invention.
  • FIG. 2 is a side view of the industrial robot 1 shown in FIG. 3 to 5 are plan views of the industrial robot 1 shown in FIG.
  • the industrial robot 1 (hereinafter, referred to as “robot 1”) of the present embodiment is a horizontal articulated robot for transporting the transport target 2.
  • the transport target 2 in this embodiment is a relatively large glass substrate used in a liquid crystal display, an organic EL display, or the like. Therefore, hereinafter, the transport target 2 is referred to as a “substrate 2”.
  • the substrate 2 is formed in, for example, a rectangular flat plate shape.
  • the robot 1 includes two hands 3 and 4 on which the substrate 2 is mounted, an arm 5 to which the hand 3 is rotatably connected to the tip end, and an arm to which the hand 4 is rotatably connected to the tip It is equipped with six. That is, the robot 1 is a double arm type robot.
  • the hand 3 of this embodiment is a first hand
  • the hand 4 is a second hand
  • the arm 5 is a first arm
  • the arm 6 is a second arm.
  • the robot 1 also includes an arm support member 8 rotatably connected to the base end side of the arm 5 and the base end side of the arm 6, a columnar support frame 9 for holding the arm support member 8 so as to be able to move up and down, and support
  • the frame 9 has a swing frame 10 to which the lower end portion is fixed at one end, a base 11 to which the other end of the swing frame 10 is rotatably connected, and a base member 12 for holding the base 11. .
  • the base 11 is movable in the horizontal direction with respect to the base member 12.
  • the arms 5 and 6 are constituted by a plurality of arm portions 15 and 16 rotatably connected to each other. Specifically, the arms 5 and 6 are configured by two arm portions 15 and 16.
  • the base end side of the arm portion 15 is connected to the arm support member 8 so as to be able to rotate in the vertical direction as the axial direction of the rotation.
  • the base end side of the arm portion 16 is connected to the distal end side of the arm portion 15 so as to be able to turn in the vertical direction as the axial direction of the turning.
  • the hands 3 and 4 are connected to the tip end side of the arm portion 16 so as to be able to rotate with the vertical direction as the axial direction of rotation.
  • the rotation center of the hand 3 with respect to the arm portion 16 (that is, the rotation center of the hand 3 with respect to the arm 5) C1 and the rotation center C2 of the arm portion 16 with respect to the arm portion 15 And the distance between the center of rotation of the arm portion 15 with respect to the arm support member 8 (that is, the center of rotation of the arm 5 with respect to the arm support member 8) C3 and the center of rotation C2 are equal.
  • the rotation center C1 of this embodiment is a first rotation center
  • the rotation center C3 is a second rotation center.
  • the pivoting center of the hand 4 with respect to the arm 16 (that is, the pivoting center of the hand 4 with respect to the arm 6) C4 and the pivoting of the arm 16 with respect to the arm 15
  • the distance between the center C5 and the rotation center of the arm portion 15 relative to the arm support member 8 (that is, the rotation center of the arm 6 relative to the arm support member 8) C6 and the rotation center C5 are equal.
  • the rotation center C4 of this embodiment is a third rotation center
  • the rotation center C6 is a fourth rotation center.
  • the arms 5 and 6 expand and contract when the substrate 2 is transported.
  • the robot 1 includes an arm drive mechanism that extends and retracts the arm 5 and an arm drive mechanism that extends and retracts the arm 6.
  • the joint portion 17 which is a connection portion between the hand 3 and the arm 5 linearly moves in the horizontal direction, and when viewed from the vertical direction, the rotation center C1 and the rotation center C3 Move on the virtual line VL1 connecting the
  • the hand 3 linearly moves in the horizontal direction in a state in which the hand 3 faces a certain direction.
  • the joint 17 in the present embodiment is a first hand joint
  • the virtual line VL1 is a first virtual line.
  • the joint unit 18 which is a connection unit between the hand 4 and the arm 6 linearly moves in the same direction as the movement direction of the joint unit 17 and viewed from the vertical direction It moves on an imaginary line VL2 connecting the rotation center C4 and the rotation center C6.
  • the hand 4 linearly moves in the horizontal direction with the hand 4 facing a certain direction.
  • the joint 18 in this embodiment is a second hand joint, and the virtual line VL2 is a second virtual line.
  • the arms 5 and 6 are contracted most and the state (state shown in FIG. 5) in which the arm part 15 and the arm part 16 overlapped is shown in figure.
  • the moving direction (X direction in FIG. 1 etc.) of the joints 17 and 18 when the revolving frame 10 is stopped at a predetermined position is referred to as “front and back direction” and is perpendicular to the up and down direction
  • the Y direction of FIG. 1 etc. be "left-right direction.”
  • the virtual lines VL1 and VL2 are parallel to the front-rear direction when viewed from the top-bottom direction.
  • the rotation center C1 and the rotation center C3 are disposed at the same position in the left-right direction
  • the rotation center C4 and the rotation center C6 are disposed at the same position in the left-right direction There is.
  • the X1 direction side in the front and rear direction is the "front” side
  • the X2 direction side that is the opposite side is the "rear” side
  • the Y1 direction side in the left and right direction is the "right” side
  • the Y2 direction side “left” side which is the opposite side.
  • the longitudinal direction (X direction) of this embodiment is a first direction
  • the lateral direction (Y direction) is a second direction
  • the right direction (Y1 direction) is a third direction.
  • the arm support member 8 includes an arm connecting portion 8 a to which the arms 5 and 6 are connected and a held portion 8 b held by the support frame 9.
  • the holding portion 8 b is formed in a rectangular block shape.
  • the arm connecting portion 8a is formed in a substantially rectangular parallelepiped shape whose shape when viewed in the vertical direction is an elongated rectangular shape.
  • the left end of the arm connecting portion 8a is connected to the held portion 8b, and the arm connected portion 8a extends to the right from the held portion 8b. That is, the arm support member 8 extends from the support frame 9 to the right.
  • the arms 5 and 6 are disposed above the arm connecting portion 8a.
  • the hand 3 is disposed above the arm 5.
  • the hand 4 is disposed above the arm 6.
  • the arm portion 16 is disposed above the arm portion 15.
  • the joint portion 20 which is a connection portion between the arm 5 and the arm support member 8 and the joint portion 21 which is a connection portion between the arm 6 and the arm support member 8 are disposed on the right end side of the arm support member 8.
  • the joint 20 and the joint 21 are arranged adjacent to each other in the left-right direction. That is, the arm 5 and the arm 6 are arranged adjacent to each other in the left-right direction.
  • the joint unit 21 is disposed on the right side of the joint unit 20.
  • the joint 20 and the joint 21 are disposed at the same position in the front-rear direction. That is, the rotation center C3 and the rotation center C6 are disposed at the same position in the front-rear direction. Further, a joint 22 which is a connection between the arm 15 and the arm 16 of the arm 5 is disposed on the left side of the joints 17 and 20, and a connection between the arm 15 and the arm 16 of the arm 6 is provided. The joint 23 which is a part is disposed on the right side of the joints 18 and 21.
  • the support frame 9 includes a columnar first support frame 26 which holds the arm support member 8 so as to be able to move up and down, and a columnar second support frame 27 which holds the first support frame 26 so as to be able to move up and down.
  • the robot 1 includes an elevation mechanism for raising and lowering the arm support member 8 with respect to the first support frame 26, an elevation mechanism for raising and lowering the first support frame 26 with respect to the second support frame 27, and the first support frame 26 up and down.
  • a guide mechanism for guiding in the direction and a guide mechanism for guiding the arm support member 8 in the vertical direction are provided.
  • the first support frame 26 is disposed on the rear side of the second support frame 27. Behind the first support frame 26, a held portion 8b is disposed.
  • the arm support member 8 can be moved up and down along the side surface of the support frame 9. Specifically, the arm support member 8 can be raised and lowered along the rear side surface of the first support frame 26, and raised and lowered along the rear side surface of the second support frame 27 via the first support frame 26. It is possible.
  • the swing frame 10 is formed in a substantially rectangular parallelepiped shape whose shape when viewed in the vertical direction is an elongated rectangular shape.
  • the pivoting frame 10 extends from the support frame 9 to the right.
  • the length of the swing frame 10 is shorter than the length of the arm support member 8.
  • the lower end surface of the second support frame 27 is fixed to the upper surface of the left end portion of the turning frame 10.
  • the right end of the swing frame 10 is disposed above the base 11. Further, the right end portion of the turning frame 10 is rotatably connected to the base 11.
  • the robot 1 includes a pivoting mechanism that pivots the pivoting frame 10 with respect to the base 11.
  • the turning frame 10 is slightly inclined with respect to the left-right direction so as to go to the rear side as it goes to the right side.
  • the base 11 is horizontally movable with respect to the base member 12 as described above.
  • the robot 1 includes a horizontal movement mechanism that moves the base 11 horizontally with respect to the base member 12.
  • FIG. 6A is a view for explaining the arrangement relationship etc. of the rotation centers C1 to C7 shown in FIG. 3, and FIG. 6B is a view for explaining the effect of the robot 1 shown in FIG. FIG.
  • the hand 3 is composed of a plurality of linear forks 29 on which the substrate 2 is mounted, and a hand base 30 connected to the distal end side of the arm 5.
  • the hand 4 is composed of a plurality of linear forks 29 on which the substrate 2 is mounted, and a hand base 31 to which the distal end side of the arm 6 is connected.
  • the hands 3 and 4 each include, for example, four forks 29.
  • Four forks 29 extend rearward from the hand bases 30, 31.
  • the hand base 30 of this embodiment is a first hand base, and the hand base 31 is a second hand base.
  • the hand base 30 is formed in a rectangular flat plate shape that is elongated in the left-right direction.
  • the hand base 30 is disposed so that the thickness direction of the hand base 30 and the vertical direction coincide with each other, and the shape of the hand base 30 when viewed from the front-rear direction is a flat plate perpendicular to the vertical direction.
  • the tip of the arm 5 is connected to the lower surface of the hand base 30.
  • the tip of the arm 5 is connected to the center of the hand base 30 in the left-right direction, and when viewed from the front-rear direction, the center of the hand 3 in the left-right direction and the rotation centers C1, C3 are in the left-right direction It is arranged at the same position.
  • the center of the hand 3 in the left-right direction and the center of gravity G1 of the hand 3 coincide in the left-right direction when viewed from the front-rear direction. That is, when viewed from the front-rear direction, the center of gravity G1 of the hand 3 and the rotation centers C1 and C3 are disposed at the same position in the left-right direction. Further, when viewed from the front-rear direction, the center of the substrate 2 mounted on the hand 3 in the left-right direction and the center of the hand 3 in the left-right direction are arranged at the same position in the left-right direction. That is, when viewed from the front-rear direction, the center of the substrate 2 mounted on the hand 3 in the left-right direction and the center of gravity G1 of the hand 3 are arranged at the same position in the left-right direction.
  • the rotation center C7 of the swing frame 10 with respect to the base 11 that is, the swing center of the robot 1
  • C7 and the center of gravity G1 of the hand 3 are disposed at the same position in the left-right direction.
  • the center of the substrate 2 mounted on the hand 3 in the left-right direction and the rotation center C7 are disposed at the same position in the left-right direction, and rotate with the rotation centers C1 and C3.
  • the center C7 is disposed at the same position in the left-right direction.
  • the rotation center C7 in this embodiment is a fifth rotation center.
  • the hand base 31 includes an upper hand base 31a disposed on the upper side of the hand base 30, a lower hand base 31b disposed on the lower side of the hand base 30, and an upper hand base 31a and a lower side on the right side of the hand base 30. It is comprised from the hand base connection part 31c which connects the hand base 31b.
  • the upper hand base 31a and the lower hand base 31b are formed in a rectangular flat plate shape that is elongated in the left-right direction.
  • the upper hand base 31a is disposed so that the thickness direction of the upper hand base 31a coincides with the vertical direction, and the shape of the upper hand base 31a when viewed from the front-rear direction is a flat plate orthogonal to the vertical direction It has become.
  • the lower hand base 31b is disposed so that the thickness direction of the lower hand base 31b coincides with the vertical direction, and the shape of the lower hand base 31b when viewed from the front-rear direction is orthogonal to the vertical direction It has a flat plate shape.
  • the left end of the upper hand base 31a and the left end of the hand base 30 are disposed at the same position in the left-right direction, and the right end of the upper hand base 31a is disposed to the right of the right end of the hand base 30 ing.
  • a fork 29 is fixed to the upper hand base 31a.
  • the left end of the lower hand base 31b is disposed on the right side of the joint 17 and the right end of the lower hand base 31b is disposed on the right of the right end of the hand base 30 There is.
  • the left end of the lower hand base 31b is disposed to the right of the center of the upper hand base 31a in the left-right direction.
  • the tip side of the arm 6 is rotatably connected to the lower hand base 31 b. Specifically, the tip of the arm 6 is connected to the lower surface of the lower hand base 31 b. Further, the tip of the arm 6 is connected to the left end of the lower hand base 31 b.
  • the center of the substrate 2 mounted on the hand 4 in the left-right direction and the center of the substrate 2 mounted on the hand 3 in the left-right direction are arranged at the same position in the left-right direction. That is, when viewed in the front-rear direction, the center in the left-right direction of the substrate 2 mounted on the hand 4 and the rotation center C7 are disposed at the same position in the left-right direction.
  • the hand base 31 includes the hand base connection portion 31c disposed on the right side of the hand base 30, and the right end of the upper hand base 31a and the right end of the lower hand base 31b are more right than the right end of the hand base 30
  • the center of gravity G2 of the hand 4 is disposed to the right of the center of the hand 3 in the left-right direction when viewed from the front-rear direction. That is, when viewed from the front-rear direction, the center of gravity G2 of the hand 4 is disposed to the right of the center of the substrate 2 mounted on the hand 3 in the left-right direction.
  • the center of gravity G2 of the hand 4 is disposed to the right of the center of gravity G1 of the hand 3 and is disposed to the right of the rotation center C7.
  • the center of gravity G2 of the hand 4 when viewed from the front-rear direction, is disposed on the left side of the rotation centers C4 and C6. Specifically, when viewed from the front-rear direction, the center of gravity G2 of the hand 4 is greater than the center C8 (see FIG. 6A) in the left-right direction of the rotation centers C1 and C3 and the rotation centers C4 and C6. While being arrange
  • the center of gravity G2 of the hand 4 is disposed slightly to the right of the centers of the rotation centers C4 and C6 and the center C8 in the left-right direction when viewed from the front and rear direction .
  • the centers of rotation C1 and C3 and the center of rotation C7 are disposed at the same position in the left-right direction. It is disposed on the right side of the rotation center C7.
  • the center C8 in the left-right direction of the rotation center C3 of the arm 5 with respect to the arm support member 8 and the rotation center C6 of the arm 6 with respect to the arm support member 8 when viewed from the front and rear direction. Is disposed on the right side of a rotation center C7 which is the rotation center of the robot 1. Therefore, in the present embodiment, as shown in FIG. 6B, for example, as compared to the case where the center C8 and the rotation center C7 are arranged at the same position in the left-right direction when viewed from the front-rear direction As shown in FIG. 6A, it is possible to arrange the rotation center C3 on the right side, and as a result, as shown in FIGS.
  • the rotation center C3 and the rotation center C7 are arranged at the same position in the left-right direction, so the rotation center C3 can be arranged further to the right become. Therefore, in the present embodiment, the interference between the support frame 9 and the arm 5 is prevented, and the support frame 9 can be disposed at a position closer to the lateral direction from the rotation center C7 which is the rotation center of the robot 1 Become. As a result, in this embodiment, even if the arm 5 and the arm 6 are arranged adjacent to each other in the left-right direction and the arm support member 8 can be moved up and down along the side surface of the columnar support frame 9, the robot 1 It is possible to reduce the turning radius of
  • the center C8 when viewed from the front-rear direction, the center C8 is disposed on the right side of the rotation center C7. Therefore, as shown in FIG. 6B, for example, as viewed from the front-rear direction Compared to the case where the center C8 and the rotation center C7 are disposed at the same position in the left-right direction, the length in the left-right direction of the lower hand base 31b is shortened as shown in FIG. Thus, the weight of the hand 4 can be reduced. In addition, since the length in the left-right direction of the lower hand base 31b can be shortened, the rigidity of the hand 4 can be enhanced.
  • the center of the substrate 2 mounted on the hand 3 in the left-right direction when viewed from the front-rear direction, the center of the substrate 2 mounted on the hand 3 in the left-right direction, the center of the substrate 2 mounted on the hand 4 in the left-right direction, and the turning center of the robot 1
  • the movement center C7 is disposed at the same position in the left-right direction. Therefore, in the present embodiment, it is possible to stabilize the state of the substrate 2 when the robot 1 turns.
  • the center of gravity G1 of the hand 3 and the rotation center C1 are disposed at the same position in the left-right direction. Therefore, in the present embodiment, when the arm 5 expands and contracts and the joint unit 17 linearly moves in the front-rear direction, the moment is prevented from acting on the hand 3 rotatably connected to the tip end of the arm 5 It will be possible to That is, for example, when the center of gravity G1 of the hand 3 is shifted to the right with respect to the rotation center C1 (see FIG. 7) when viewed from the front-rear direction, as shown in FIG. When the joint portion 17 moves forward due to expansion and contraction, a moment in the counterclockwise direction in FIG.
  • the center C8 is disposed on the right side of the rotation center C7 when viewed in the front-rear direction, so for example, when viewed from the front-rear direction as shown in FIG.
  • the center of rotation C4 when viewed from the front and rear direction, can be brought close to the center of gravity G2 of the hand 4 disposed on the right side of the center of rotation C7 in the left and right direction.
  • the rotation center C3 and the rotation center C7 when viewed from the front-rear direction May be shifted in the left and right direction. That is, when the center C8 is disposed on the right side of the rotation center C7 when viewed in the front-rear direction, the rotation center C3 is on the right or left side of the rotation center C7 when viewed in the front-rear direction.
  • the center C8 is disposed on the right side of the rotation center C7 when viewed from the front-rear direction, the center of gravity G1 of the hand 3 rotates when viewed from the front-rear direction.
  • the center C1 may be shifted in the left-right direction. In this case, for example, when viewed from the front-rear direction, the amount of displacement of the center of gravity G1 of the hand 3 to the right with respect to the rotation center C1 and the amount of displacement of the center of gravity G2 of the hand 4 to the left with respect to the rotation center C4. May be equal.
  • the center of gravity G2 of the hand 4 and the rotation center C4 may be disposed at the same position in the left-right direction when viewed from the front-rear direction.
  • the joint unit 18 linearly moves in the front-rear direction
  • a moment is prevented from acting on the hand 4 rotatably connected to the tip end side of the arm 6 It becomes possible. Therefore, it becomes possible to stabilize the operation of the hand 4 when the arm 6 expands and contracts, and as a result, it is possible to improve the operation accuracy of the hand 4.
  • the support frame 9 is configured by two frames of the first support frame 26 and the second support frame 27.
  • the support frame 9 may be configured by one frame.
  • the robot 1 may be a robot that transports a transport target other than the substrate 2.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/JP2018/036976 2017-10-13 2018-10-03 産業用ロボット WO2019073865A1 (ja)

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JP2002210684A (ja) * 2000-11-14 2002-07-30 Daihen Corp トランスファロボット
JP2012115932A (ja) * 2010-11-30 2012-06-21 Kawasaki Heavy Ind Ltd 搬送ロボット
JP2013000839A (ja) * 2011-06-17 2013-01-07 Yaskawa Electric Corp 搬送ロボット
JP2016500473A (ja) * 2012-11-30 2016-01-12 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 不等長の前腕部を備えた多軸ロボット装置、電子デバイス製造システム、及び、電子デバイス製造において基板を搬送するための方法
JP2017019061A (ja) * 2015-07-13 2017-01-26 日本電産サンキョー株式会社 産業用ロボット

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KR102254387B1 (ko) 2021-05-24
JP2019072784A (ja) 2019-05-16
KR20200040821A (ko) 2020-04-20
JP6873881B2 (ja) 2021-05-19
CN111194253A (zh) 2020-05-22
CN111194253B (zh) 2022-09-27

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