CN111194253B - 工业用机器人 - Google Patents

工业用机器人 Download PDF

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Publication number
CN111194253B
CN111194253B CN201880065220.9A CN201880065220A CN111194253B CN 111194253 B CN111194253 B CN 111194253B CN 201880065220 A CN201880065220 A CN 201880065220A CN 111194253 B CN111194253 B CN 111194253B
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CN
China
Prior art keywords
arm
hand
center
rotation center
viewed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201880065220.9A
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English (en)
Chinese (zh)
Other versions
CN111194253A (zh
Inventor
矢泽隆之
志村芳树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Publication of CN111194253A publication Critical patent/CN111194253A/zh
Application granted granted Critical
Publication of CN111194253B publication Critical patent/CN111194253B/zh
Active legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201880065220.9A 2017-10-13 2018-10-03 工业用机器人 Active CN111194253B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017199165A JP6873881B2 (ja) 2017-10-13 2017-10-13 産業用ロボット
JP2017-199165 2017-10-13
PCT/JP2018/036976 WO2019073865A1 (ja) 2017-10-13 2018-10-03 産業用ロボット

Publications (2)

Publication Number Publication Date
CN111194253A CN111194253A (zh) 2020-05-22
CN111194253B true CN111194253B (zh) 2022-09-27

Family

ID=66100823

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880065220.9A Active CN111194253B (zh) 2017-10-13 2018-10-03 工业用机器人

Country Status (4)

Country Link
JP (1) JP6873881B2 (ko)
KR (1) KR102254387B1 (ko)
CN (1) CN111194253B (ko)
WO (1) WO2019073865A1 (ko)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
EP2042272A2 (en) * 2007-09-28 2009-04-01 Nidec Sankyo Corporation Industrial robot with cam-actuated gripper
CN101506963A (zh) * 2006-08-21 2009-08-12 株式会社安川电机 双臂型机器人
CN101863015A (zh) * 2006-07-11 2010-10-20 株式会社安川电机 多关节机器人
CN102380872A (zh) * 2010-07-16 2012-03-21 日本电产三协株式会社 工业用机器人
CN103208447A (zh) * 2012-01-13 2013-07-17 诺发系统公司 双臂真空机械手
CN104576474A (zh) * 2013-08-30 2015-04-29 罗普伺达机器人有限公司 具有多臂的搬运机器人
CN106078721A (zh) * 2015-04-27 2016-11-09 日本电产三协株式会社 工业用机器人以及制造系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4558981B2 (ja) * 2000-11-14 2010-10-06 株式会社ダイヘン トランスファロボット
JP5847393B2 (ja) * 2010-11-30 2016-01-20 川崎重工業株式会社 搬送ロボット
JP5387622B2 (ja) * 2011-06-17 2014-01-15 株式会社安川電機 搬送ロボット
JP5668678B2 (ja) * 2011-12-20 2015-02-12 株式会社安川電機 ロボット
CN104812534B (zh) * 2012-11-30 2018-05-11 应用材料公司 马达模块、多轴马达驱动组件、多轴机械手设备及电子装置制造系统与方法
JP6616606B2 (ja) * 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
TW501969B (en) * 2000-03-23 2002-09-11 Sankyo Seiki Seisakusho Kk Double-arm robot
CN101863015A (zh) * 2006-07-11 2010-10-20 株式会社安川电机 多关节机器人
CN101506963A (zh) * 2006-08-21 2009-08-12 株式会社安川电机 双臂型机器人
EP2042272A2 (en) * 2007-09-28 2009-04-01 Nidec Sankyo Corporation Industrial robot with cam-actuated gripper
CN102380872A (zh) * 2010-07-16 2012-03-21 日本电产三协株式会社 工业用机器人
CN103208447A (zh) * 2012-01-13 2013-07-17 诺发系统公司 双臂真空机械手
CN104576474A (zh) * 2013-08-30 2015-04-29 罗普伺达机器人有限公司 具有多臂的搬运机器人
CN106078721A (zh) * 2015-04-27 2016-11-09 日本电产三协株式会社 工业用机器人以及制造系统

Also Published As

Publication number Publication date
KR102254387B1 (ko) 2021-05-24
WO2019073865A1 (ja) 2019-04-18
JP2019072784A (ja) 2019-05-16
KR20200040821A (ko) 2020-04-20
JP6873881B2 (ja) 2021-05-19
CN111194253A (zh) 2020-05-22

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