WO2019071696A1 - 张网设备 - Google Patents

张网设备 Download PDF

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Publication number
WO2019071696A1
WO2019071696A1 PCT/CN2017/110206 CN2017110206W WO2019071696A1 WO 2019071696 A1 WO2019071696 A1 WO 2019071696A1 CN 2017110206 W CN2017110206 W CN 2017110206W WO 2019071696 A1 WO2019071696 A1 WO 2019071696A1
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WO
WIPO (PCT)
Prior art keywords
metal mask
netting
image capturing
horizontal plate
disposed
Prior art date
Application number
PCT/CN2017/110206
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English (en)
French (fr)
Inventor
姜亮
李金川
Original Assignee
深圳市华星光电半导体显示技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市华星光电半导体显示技术有限公司 filed Critical 深圳市华星光电半导体显示技术有限公司
Priority to US15/578,719 priority Critical patent/US10946430B2/en
Publication of WO2019071696A1 publication Critical patent/WO2019071696A1/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks

Definitions

  • the present invention relates to the field of display panel manufacturing, and more particularly to a netting apparatus for preparing a metal mask.
  • OLEDs Organic electroluminescent devices
  • OLEDs have become the most promising new display devices in recent years due to their advantages of self-luminescence, all solid state, and high contrast.
  • a precise metal mask is used to define a pixel (pixel region), so that the evaporated organic material is deposited in the pixel region, and the metal mask is in close contact with the glass substrate by magnetic force during the evaporation process.
  • the quality of the metal mask production directly affects the positional accuracy of the vapor deposition pixel.
  • a metal mask is exposed and etched on a metal frame to obtain a metal mask for vapor deposition, and a CCD (Change-coupled Device) is used in the manufacturing process.
  • the device detects the position of the pixel opening on the metal mask, obtains the correction amount of the net mechanism by comparing the difference between the actual position and the design value, feeds the information back to the tensioning mechanism for position correction, and repeats the above steps until The actual position is consistent with the design position, and the pixel position is accurate and then passed through the laser.
  • the head laser torch
  • the head is welded to fix the metal mask to the metal frame.
  • the metal mask in the actual use of the metal mask, it will be in close contact with the glass substrate by magnetic adsorption, and in this process, the metal mask will be deformed under the action of the magnetic force, which will cause the pixel position shift to cause product color mixing and lack of color. Defects such as color and mura (uneven brightness of the screen), and the current metal mask manufacturing process cannot correct this defect.
  • the metal mask produced by the prior art web device the metal mask will be deformed during use, resulting in a deviation of the pixel position defined on the surface of the glass substrate, thereby causing color mixing and lack of color in the display panel. And mura and other defects.
  • the invention provides a netting device, which can simulate the deformation of a metal mask in use, and adjusts the metal mask by detecting the position information of the metal pattern on the surface of the deformed metal mask to solve the prior art.
  • the metal mask plate made by the screen-forming device causes a deviation in the pixel position defined by the surface of the glass substrate after deformation, which causes a technical problem of color mixing, lack of color, and mura defects in the display panel.
  • the invention provides a netting device for preparing a metal mask for vapor deposition; the netting device comprises:
  • the tensioning mechanism includes at least a first jig and a second jig disposed opposite to each other, the first jig is fixed to the first end of the metal mask, and the second jig is fixed to the metal mask a second end of the other end;
  • the horizontal plate is a metal plate, and a side of the horizontal plate facing the metal mask is a black oxidation surface;
  • a measuring mechanism is disposed in a working area of the netting device, wherein the measuring mechanism is configured to perform three-dimensional movement in the working area to perform position information collection on a pattern on the metal mask;
  • the magnetic attraction mechanism is vertically disposed above the horizontal plate for adsorbing the metal mask to deform the metal mask.
  • the measuring mechanism includes an upper image capturing device and a lower image capturing device, the upper image capturing device is located above the metal mask, and the lower image capturing device is located at the metal mask Below the board.
  • the horizontal plate is a metal plate, and a side of the horizontal plate facing the metal mask is a black oxidation surface.
  • the horizontal oxidized surface flatness of the horizontal plate is less than or equal to 1 um.
  • the netting device further comprises a lifting device, the lifting device comprising a base and a lifting arm disposed on the base, the lifting arm being disposed perpendicular to the base.
  • the magnetic attraction mechanism includes a magnetic plate, and one end of the magnetic plate is detachably fixed to the lifting arm.
  • one end of the horizontal plate is detachably fixed to the lifting arm, and the horizontal plate is disposed in parallel with the magnetic plate.
  • a metal frame is disposed under the metal mask.
  • the netting apparatus further includes a welding mechanism, the welding mechanism including a moving device, and one end of the moving device is provided with a laser welding torch.
  • the tensioning mechanism further includes a third jig and a fourth jig disposed opposite to each other, the third jig being fixed to the third end of the metal mask, the fourth jig Fixed to a fourth end of the metal mask, the fourth end being located at an opposite end of the third end.
  • the invention also provides a netting device for preparing a metal mask for vapor deposition; the netting device comprises:
  • the tensioning mechanism includes at least a first jig and a second jig disposed opposite to each other, the first jig is fixed to the first end of the metal mask, and the second jig is fixed to the metal mask a second end of the other end;
  • a measuring mechanism is disposed in a working area of the netting device, wherein the measuring mechanism is configured to perform three-dimensional movement in the working area to perform position information collection on a pattern on the metal mask;
  • the magnetic attraction mechanism is vertically disposed above the horizontal plate for adsorbing the metal mask to deform the metal mask.
  • the measuring mechanism includes an upper image capturing device and a lower image capturing device, the upper image capturing device is located above the metal mask, and the lower image capturing device is located at the metal mask Below the board.
  • the horizontal oxidized surface flatness of the horizontal plate is less than or equal to 1 um.
  • the netting device further comprises a lifting device, the lifting device comprising a base and a lifting arm disposed on the base, the lifting arm being disposed perpendicular to the base.
  • the magnetic attraction mechanism includes a magnetic plate, and one end of the magnetic plate is detachably fixed to the lifting arm.
  • one end of the horizontal plate is detachably fixed to the lifting arm, and the horizontal plate is disposed in parallel with the magnetic plate.
  • a metal frame is disposed under the metal mask.
  • the netting apparatus further includes a welding mechanism, the welding mechanism including a moving device, and one end of the moving device is provided with a laser welding torch.
  • the tensioning mechanism further includes a third jig and a fourth jig disposed opposite to each other, the third jig being fixed to the third end of the metal mask, the fourth jig Fixed to a fourth end of the metal mask, the fourth end being located at an opposite end of the third end.
  • Step S10 using a clamp of the tensioning mechanism to fix the metal mask
  • Step S20 providing an upper image capturing device, the upper image capturing device is disposed on the metal mask upper side, and using the upper image collecting device to measure the metal mask to obtain first position information;
  • Step S30 the tensioning mechanism performs tensile adjustment on the metal mask according to the first position information
  • Step S40 providing a horizontal plate, and placing the horizontal plate above the metal mask
  • Step S50 providing a magnetic plate, and placing the magnetic plate above the horizontal plate, the magnetic plate adsorbing the metal mask, and causing the metal mask to be deformed and conform to the level One side of the board;
  • Step S60 providing a lower image capturing device, wherein the lower image capturing device is disposed on a lower side of the metal mask, and the deformed metal mask is measured by the lower image collecting device to obtain a second position. information;
  • Step S70 the tensioning mechanism performs a second stretching adjustment on the metal mask according to the second position information.
  • the invention has the beneficial effects that the netting device provided by the present invention simulates the deformation of the metal mask in use when the metal mask is fabricated, and detects the deformed metal by comparing the existing netting device.
  • the position information of the metal pattern on the surface of the mask plate is adjusted, and the metal mask is adjusted to obtain a high-precision metal mask; the metal mask made by the prior art web device is solved, and the glass substrate is deformed after being deformed. There is a deviation in the pixel position defined by the surface, which in turn causes a technical problem of color mixing, lack of color, and mura defects in the display panel.
  • FIG. 1 is a schematic structural view of a netting device provided by the present invention.
  • FIG. 2 is a flow chart of a method of preparing a metal mask using the web apparatus provided by the present invention.
  • the present invention is directed to a metal mask made by a prior art stretched device, which causes a deviation in the pixel position defined by the surface of the glass substrate after deformation, thereby causing technical problems of color mixing, lack of color, and mura defects of the display panel.
  • the example can solve this defect.
  • the netting device As shown in FIG. 1, the netting device provided by the present invention comprises a tensioning mechanism, a horizontal plate 102, a measuring mechanism and a magnetic attraction mechanism.
  • the tensioning mechanism is configured to stretch the rectangular metal mask 105, and adjust the position of the metal pattern on the surface of the metal mask 105 by stretching;
  • the tensioning mechanism includes a first clamp 1011 and a second clamp 1012, the first clamp 1011 is fixed to the first end of the metal mask 105, and the second clamp 1012 is fixed to the second end of the metal mask 105 opposite to the other end;
  • the tensioning mechanism further includes a third jig and a fourth jig disposed opposite to each other, the third jig is fixed to the third end of the metal mask 105, and the fourth jig is fixed to the metal a fourth end of the masking plate 105, the fourth end portion being located at an opposite end of the third end portion;
  • the first jig 1011, the second jig 1012, the third jig and the fourth jig may be from four
  • the metal mask 105 is stretched in the direction to adjust the metal mask 105.
  • the horizontal plate 102 is used to simulate a glass substrate during an evaporation process, and the horizontal plate 102 is a metal plate having a flat surface.
  • a measuring mechanism is disposed in the working area of the netting device, wherein the measuring mechanism can perform three-dimensional movement in the working area for collecting position information on the pattern on the metal mask 105;
  • the measuring mechanism includes at least an upper image capturing device 1031 and a lower image capturing device 1032, the upper image capturing device 1031 being located above the metal masking plate 105, and the lower image capturing device 1032 being located below the metal masking plate 105.
  • a magnetic attraction mechanism is disposed above the horizontal plate 102 for lifting the metal mask 105 so that a portion of the metal mask 105 is deformed and conforms to the horizontal plate 102.
  • the horizontal plate 102 and the magnetic attraction mechanism are far from the metal mask plate 105.
  • the metal mask plate 105 is in a flat state, and the upper image is collected.
  • the device 1031 is moved over the metal mask 105, and the metal pattern on the surface of the metal mask 105 is measured and compared to obtain first position information, and the tensioning mechanism is configured according to the first position information.
  • the metal mask 105 is subjected to stretch adjustment; subsequently, the upper image capture device 1031 is removed, the horizontal plate 102 and the magnetic attraction mechanism are lowered to be close to the metal mask 105, and the magnetic attraction mechanism is adsorbed.
  • the metal mask 105 is deformed and adhered to the surface of the horizontal plate 102; at this time, the lower image capturing device 1032 forms the metal mask after the deformation.
  • the metal pattern on the surface of the board 105 is compared to obtain second position information, the magnetic attraction mechanism is removed, and the metal mask sheet 105 is restored to a flat state, and the tensioning mechanism is configured according to the second position information.
  • the metal mask 105 is performed Correction so as to obtain a vapor deposition meet the needs of the metal mask plate 105 with high accuracy.
  • the side of the horizontal plate 102 facing the metal mask 105 is blackened to form a black oxidized surface to prevent the lower image capturing device 1032 from forming an image for the metal mask 105.
  • the surface of the horizontal plate 102 is reflected to affect the accuracy of acquiring position information.
  • the flatness of the black oxidized surface is less than or equal to 1 um, which can increase the flatness of the metal mask 105 when deformed and the black oxidized surface, thereby causing the lower image capturing device 1032 to detect the metal mask.
  • the diaphragm 105 has more accurate positional information.
  • the magnetic attraction mechanism includes a magnetic plate 104 that is disposed in parallel with the horizontal plate 102.
  • the netting device further includes a lifting device, the lifting device includes a base and a lifting arm 106 disposed on the base, the lifting arm 106 is disposed perpendicular to the base; wherein the lifting arm 106 is disposed at a side portion thereof There is a slide rail, and the slide rail is slidably disposed with a first fixing member and a second fixing member, the first fixing member is fixedly connected to one end of the magnetic plate 104, and the second fixing member and the horizontal plate are fixedly connected One end of the fixing member 102 is fixedly connected; the first fixing member and the second fixing member are movable toward each other, and can also move in the opposite direction, thereby adjusting the distance between the magnetic plate 104 and the horizontal plate 102.
  • a metal frame 107 is disposed under the metal mask 105.
  • the netting device further includes a welding mechanism, the welding mechanism includes a moving device, and one end of the moving device is provided with a laser welding torch; after the adjustment of the metal mask plate 105, the tensioning mechanism is removed, so that The metal mask 105 falls into a corresponding position of the metal frame 107, and the laser torch welds the metal mask 105 into the metal frame 107.
  • step S10 the metal mask is fixed using the clamp of the tensioning mechanism.
  • Step S20 providing an upper image capturing device, using the upper image capturing device to measure the metal mask to obtain first position information; wherein the upper image capturing device is disposed on the side of the metal mask .
  • Step S30 the tensioning mechanism performs tensile adjustment on the metal mask according to the first position information.
  • Step S40 providing a horizontal plate; the horizontal plate is disposed above the metal mask.
  • Step S50 providing a magnetic plate; the magnetic plate adsorbing the metal mask, and causing the metal mask to be deformed and attached to one side of the horizontal plate.
  • the magnetic plate is disposed above the horizontal plate.
  • Step S60 providing a lower image acquisition device, using the lower image acquisition device to measure the deformed metal mask to obtain second position information.
  • the lower image acquisition device is disposed on a lower side of the metal mask.
  • Step S70 the tensioning mechanism performs a second stretching adjustment on the metal mask according to the second position information.
  • the method further includes:
  • step S80 the metal mask plate subjected to the secondary stretching adjustment is welded to the metal frame using a laser welding torch.
  • the invention has the beneficial effects that the netting device provided by the present invention simulates the deformation of the metal mask in use when the metal mask is fabricated, and detects the deformed metal by comparing the existing netting device.
  • the position information of the metal pattern on the surface of the mask plate is adjusted, and the metal mask is adjusted to obtain a high-precision metal mask; the metal mask made by the prior art web device is solved, and the glass substrate is deformed after being deformed. There is a deviation in the pixel position defined by the surface, which in turn causes a technical problem of color mixing, lack of color, and mura defects in the display panel.

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  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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Abstract

一种张网设备，包括：张紧机构包括第一夹具（1011）和第二夹具（1012），第一夹具（1011）固定于金属掩膜板（105）一端，第二夹具（1012）固定于金属掩膜板（105）另一端；水平板（102），设置于金属掩膜板（105）上方；测量机构，用以对金属掩膜板上的图案进行位置信息采集；磁吸机构，设置于水平板上方，用以吸附金属掩膜板，使得金属掩膜板产生形变。

Description

张网设备 技术领域
本发明涉及显示面板制造领域，尤其涉及一种用以制备金属掩膜板的张网设备。
 背景技术
有机电致发光器件（OLED）以其自发光、全固态、高对比度等优点，成为近年来最具潜力的新型显示器件。在OLED制备过程中需使用精密金属掩膜来定义pixel（像素区域），从而使蒸发的有机材料沉积在pixel区域内，在蒸镀的过程中通过磁力使金属掩膜板与玻璃基板紧密接触，有鉴于此，金属掩膜板制作的品质直接影响蒸镀pixel的位置精度。
现行的金属掩膜板制作工艺中使用张网机将曝光蚀刻后的金属掩膜板焊接在金属框上从而获得蒸镀用的金属掩膜板，制作过程中通过CCD（Change-coupledDevice，电荷耦合器件）检测机，捕捉金属掩膜板上像素开口的位置，通过对比实际位置与设计值的差异获得张网机构的修正量，将此信息反馈给张紧机构进行位置的修正，重复以上步骤直至实际位置与设计位置一致，pixel位置准确后通过laser head（激光焊枪）进行焊接将金属掩膜板固定在金属框上。但金属掩膜板实际使用过程中会通过磁力吸附使其与玻璃基板紧密接触，而此过程成中金属掩膜板在磁力的作用下会产生变形，进而导致pixel位置偏移引起产品混色、缺色及mura（画面亮度不均匀）等缺陷，而现行的金属掩膜板制作工艺无法补正此部分缺陷。
综上所述，现有技术的张网设备制作的金属掩膜板，金属掩膜板在使用时会产生形变，导致玻璃基板表面定义的像素位置存在偏差，进而导致显示面板出现混色、缺色及mura等缺陷。
 技术问题
本发明提供一种张网设备，能够模拟金属掩膜板在使用中的形变，通过检测形变后的金属掩膜板表面的金属图案位置信息，对金属掩膜板进行调整，以解决现有技术的张网设备制作的金属掩膜板，产生形变后导致玻璃基板表面定义的像素位置存在偏差，进而导致显示面板出现混色、缺色及mura的缺陷的技术问题。
 技术解决方案
为解决上述问题，本发明提供的技术方案如下：
本发明提供一种张网设备，用以制备蒸镀用金属掩膜板；所述张网设备包括：
张紧机构，至少包括相对设置的第一夹具和第二夹具，所述第一夹具固定于所述金属掩膜板的第一端部，所述第二夹具固定于所述金属掩膜板相对另一端的第二端部；
水平板，可升降地设置于所述金属掩膜板上方；所述水平板为金属板，所述水平板面向所述金属掩膜板的一侧为黑色氧化面；
测量机构，设置于所述张网设备的工作区域内，所述测量机构用以在所述工作区域内作三维移动，以对所述金属掩膜板上的图案进行位置信息采集；以及，
磁吸机构，可升降地设置于所述水平板上方，用以吸附所述金属掩膜板，使得所述金属掩膜板产生形变。
根据本发明一优选实施例，所述测量机构包括上图像采集装置和下图像采集装置，所述上图像采集装置位于所述金属掩膜板上方，所述下图像采集装置位于所述金属掩膜板下方。
根据本发明一优选实施例，所述水平板为金属板，所述水平板面向所述金属掩膜板的一侧为黑色氧化面。
根据本发明一优选实施例，所述水平板的黑色氧化面表面平坦度小于或等于1um。
根据本发明一优选实施例，所述张网设备还包括升降装置，所述升降装置包括底座和设置于所述底座上的升降臂，所述升降臂垂直于所述底座设置。
根据本发明一优选实施例，所述磁吸机构包括磁性板，所述磁性板的一端可升降地固定于所述升降臂上。
根据本发明一优选实施例，所述水平板的一端可升降地固定于所述升降臂上，所述水平板与所述磁性板平行设置。
根据本发明一优选实施例，所述金属掩膜板下方设置有金属边框。
根据本发明一优选实施例，所述张网设备还包括焊接机构，所述焊接机构包括移动装置，所述移动装置的一端设置有激光焊枪。
根据本发明一优选实施例，所述张紧机构还包括相对设置的第三夹具和第四夹具，所述第三夹具固定于所述金属掩膜板的第三端部，所述第四夹具固定于所述金属掩膜板的第四端部，所述第四端部位于所述第三端部的对立端。
本发明还提供一种张网设备，用以制备蒸镀用金属掩膜板；所述张网设备包括：
张紧机构，至少包括相对设置的第一夹具和第二夹具，所述第一夹具固定于所述金属掩膜板的第一端部，所述第二夹具固定于所述金属掩膜板相对另一端的第二端部；
水平板，可升降地设置于所述金属掩膜板上方；
测量机构，设置于所述张网设备的工作区域内，所述测量机构用以在所述工作区域内作三维移动，以对所述金属掩膜板上的图案进行位置信息采集；以及，
磁吸机构，可升降地设置于所述水平板上方，用以吸附所述金属掩膜板，使得所述金属掩膜板产生形变。
根据本发明一优选实施例，所述测量机构包括上图像采集装置和下图像采集装置，所述上图像采集装置位于所述金属掩膜板上方，所述下图像采集装置位于所述金属掩膜板下方。
根据本发明一优选实施例，所述水平板的黑色氧化面表面平坦度小于或等于1um。
根据本发明一优选实施例，所述张网设备还包括升降装置，所述升降装置包括底座和设置于所述底座上的升降臂，所述升降臂垂直于所述底座设置。
根据本发明一优选实施例，所述磁吸机构包括磁性板，所述磁性板的一端可升降地固定于所述升降臂上。
根据本发明一优选实施例，所述水平板的一端可升降地固定于所述升降臂上，所述水平板与所述磁性板平行设置。
根据本发明一优选实施例，所述金属掩膜板下方设置有金属边框。
根据本发明一优选实施例，所述张网设备还包括焊接机构，所述焊接机构包括移动装置，所述移动装置的一端设置有激光焊枪。
根据本发明一优选实施例，所述张紧机构还包括相对设置的第三夹具和第四夹具，所述第三夹具固定于所述金属掩膜板的第三端部，所述第四夹具固定于所述金属掩膜板的第四端部，所述第四端部位于所述第三端部的对立端。
依据上述发明目的，提出一种使用上述的张网设备制备金属掩膜板的方法，所述方法包括：
步骤S10，使用张紧机构的夹具固定金属掩膜板；
步骤S20，提供上图像采集装置，所述上图像采集装置设置于所述金属掩膜板上侧，使用所述上图像采集装置对所述金属掩膜板进行测量，获取第一位置信息；
步骤S30，所述张紧机构根据所述第一位置信息对所述金属掩膜板进行拉伸调整；
步骤S40，提供水平板，并将所述水平板设置于所述金属掩膜板上方；
步骤S50，提供磁性板，并将所述磁性板设置于所述水平板上方，所述磁性板吸附所述金属掩膜板，并使得所述金属掩膜板产生形变且贴合于所述水平板一侧；
步骤S60，提供下图像采集装置，所述下图像采集装置设置于所述金属掩膜板下侧，使用所述下图像采集装置对形变后的所述金属掩膜板进行测量，获取第二位置信息；
步骤S70，所述张紧机构根据所述第二位置信息对所述金属掩膜板进行第二次拉伸调整。
 有益效果
本发明的有益效果为：相较于现有的张网设备，本发明提供的张网设备，在制作金属掩膜板时，模拟金属掩膜板在使用中的形变，通过检测形变后的金属掩膜板表面的金属图案位置信息，对金属掩膜板进行调整，进而得到高精度的金属掩膜板；解决了现有技术的张网设备制作的金属掩膜板，产生形变后导致玻璃基板表面定义的像素位置存在偏差，进而导致显示面板出现混色、缺色及mura的缺陷的技术问题。
 附图说明
为了更清楚地说明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单介绍，显而易见地，下面描述中的附图仅仅是发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明提供的张网设备结构示意图；
图2为使用本发明提供的张网设备制备金属掩膜板的方法流程图。
 本发明的最佳实施方式
以下各实施例的说明是参考附加的图示，用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语，例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。在图中，结构相似的单元是用以相同标号表示。
本发明针对现有技术的张网设备制作的金属掩膜板，产生形变后导致玻璃基板表面定义的像素位置存在偏差，进而导致显示面板出现混色、缺色及mura的缺陷的技术问题，本实施例能够解决该缺陷。
如图1所示，本发明提供的张网设备，包括张紧机构、水平板102、测量机构以及磁吸机构。
所述张紧机构，用以对长方形的金属掩膜板105进行拉伸，通过拉伸而对金属掩膜板105表面的金属图案的位置进行调整；所述张紧机构包括第一夹具1011和第二夹具1012，所述第一夹具1011固定于所述金属掩膜板105的第一端部，所述第二夹具1012固定于所述金属掩膜板105相对另一端的第二端部；例如，所述张紧机构还包括相对设置的第三夹具和第四夹具，所述第三夹具固定于所述金属掩膜板105的第三端部，所述第四夹具固定于所述金属掩膜板105的第四端部，所述第四端部位于所述第三端部的对立端；所述第一夹具1011、第二夹具1012、第三夹具和第四夹具可从四个方向拉伸所述金属掩膜板105，以调整所述金属掩膜板105。
所述水平板102，用以模拟蒸镀制程时的玻璃基板，所述水平板102为表面平整的金属板。
测量机构，设置于所述张网设备的工作区域内，所述测量机构可在所述工作区域内作三维移动，用以对所述金属掩膜板105上的图案进行位置信息采集；所述测量机构至少包括上图像采集装置1031和下图像采集装置1032，所述上图像采集装置1031位于所述金属掩膜板105上方，所述下图像采集装置1032位于所述金属掩膜板105下方。
磁吸机构，可升降地设置于所述水平板102上方，用以吸附所述金属掩膜板105，使得所述金属掩膜板105部分区域产生形变后贴合所述水平板102。
所述张网设备在运行时，所述水平板102与所述磁吸机构距离所述金属掩膜板105较远，此时，所述金属掩膜板105为平整状态，所述上图像采集装置1031移动至所述金属掩膜板105上方，对所述金属掩膜板105表面的金属图案进行测量比对得到第一位置信息，所述张紧机构根据所述第一位置信息对所述金属掩膜板105进行拉伸调整；随后，所述上图像采集装置1031移开，所述水平板102与所述磁吸机构下降至靠近所述金属掩膜板105，所述磁吸机构吸附所述金属掩膜板105，使得所述金属掩膜板105的部分区域形变并贴合至所述水平板102表面；此时，所述下图像采集装置1032对形变后的所述金属掩膜板105表面的金属图案进行测量比对得到第二位置信息，所述磁吸机构移开，使所述金属掩膜板105恢复平整状态，所述张紧机构根据所述第二位置信息，对所述金属掩膜板105进行二次修正，以得到满足蒸镀需求的高精度金属掩膜板105。
所述水平板102面向所述金属掩膜板105的一侧经过黑化处理，形成黑色氧化面，以避免所述下图像采集装置1032在对所述金属掩膜板105形成图像采集时，所述水平板102表面反光而影响获取位置信息的准确度。
所述黑色氧化面表面的平坦度小于或等于1um，可增加所述金属掩膜板105形变时与所述黑色氧化面的贴合平整度，进而使得所述下图像采集装置1032测得金属掩膜板105更加准确的位置信息。
所述磁吸机构包括有磁性板104，所述磁性板104与所述水平板102平行设置。
所述张网设备还包括升降装置，所述升降装置包括底座和设置于所述底座上的升降臂106，所述升降臂106垂直于所述底座设置；其中，所述升降臂106侧部设置有滑轨，所述滑轨上滑动设置有第一固定件与第二固定件，所述第一固定件与所述磁性板104的一端固定连接，所述第二固定件与所述水平板102的一端固定连接；所述第一固定件与所述第二固定件可相向移动，亦可反向移动，进而可调节所述磁性板104与所述水平板102之间的距离。
所述金属掩膜板105下方设置有金属边框107。
所述张网设备还包括焊接机构，所述焊接机构包括移动装置，所述移动装置的一端设置有激光焊枪；所述金属掩膜板105调整完成后，所述张紧机构移开，使得所述金属掩膜板105落入所述金属边框107的对应位置，所述激光焊枪将所述金属掩膜板105焊接至所述金属边框107内。
如图2所示，依据上述发明目的，提出一种使用上述的张网设备制备金属掩膜板的方法，所述方法包括：
步骤S10，使用张紧机构的夹具固定金属掩膜板。
步骤S20，提供上图像采集装置，使用所述上图像采集装置对所述金属掩膜板进行测量，获取第一位置信息；其中，所述上图像采集装置设置于所述金属掩膜板上侧。
步骤S30，所述张紧机构根据所述第一位置信息对所述金属掩膜板进行拉伸调整。
步骤S40，提供水平板；所述水平板设置于所述金属掩膜板上方。
步骤S50，提供磁性板；所述磁性板吸附所述金属掩膜板，并使得所述金属掩膜板产生形变且贴合于所述水平板一侧。其中，所述磁性板设置于所述水平板上方。
步骤S60，提供下图像采集装置，使用所述下图像采集装置对形变后的所述金属掩膜板进行测量，获取第二位置信息。其中，所述下图像采集装置设置于所述金属掩膜板下侧。
步骤S70，所述张紧机构根据所述第二位置信息对所述金属掩膜板进行第二次拉伸调整。
根据本发明一优选实施例，所述方法还包括：
步骤S80，使用激光焊枪将经过二次拉伸调整的所述金属掩膜板焊接于金属框架上。
本发明的有益效果为：相较于现有的张网设备，本发明提供的张网设备，在制作金属掩膜板时，模拟金属掩膜板在使用中的形变，通过检测形变后的金属掩膜板表面的金属图案位置信息，对金属掩膜板进行调整，进而得到高精度的金属掩膜板；解决了现有技术的张网设备制作的金属掩膜板，产生形变后导致玻璃基板表面定义的像素位置存在偏差，进而导致显示面板出现混色、缺色及mura的缺陷的技术问题。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。

Claims (16)

  1. 一种张网设备，用以制备蒸镀用金属掩膜板；其中，所述张网设备包括：
    张紧机构，至少包括相对设置的第一夹具和第二夹具，所述第一夹具固定于所述金属掩膜板的第一端部，所述第二夹具固定于所述金属掩膜板相对另一端的第二端部；
    水平板，可升降地设置于所述金属掩膜板上方；所述水平板为金属板，所述水平板面向所述金属掩膜板的一侧为黑色氧化面；
    测量机构，设置于所述张网设备的工作区域内，所述测量机构用以在所述工作区域内作三维移动，以对所述金属掩膜板上的图案进行位置信息采集；以及，
    磁吸机构，可升降地设置于所述水平板上方，用以吸附所述金属掩膜板，使得所述金属掩膜板产生形变。
  2. 根据权利要求1所述的张网设备，其中，所述测量机构包括上图像采集装置和下图像采集装置，所述上图像采集装置位于所述金属掩膜板上方，所述下图像采集装置位于所述金属掩膜板下方。
  3. 根据权利要求1所述的张网设备，其中，所述水平板的黑色氧化面表面平坦度小于或等于1um。
  4. 根据权利要求1所述的张网设备，其中，所述张网设备还包括升降装置，所述升降装置包括底座和设置于所述底座上的升降臂，所述升降臂垂直于所述底座设置。
  5. 根据权利要求4所述的张网设备，其中，所述磁吸机构包括磁性板，所述磁性板的一端可升降地固定于所述升降臂上。
  6. 根据权利要求5所述的张网设备，其中，所述水平板的一端可升降地固定于所述升降臂上，所述水平板与所述磁性板平行设置。
  7. 根据权利要求1所述的张网设备，其中，所述金属掩膜板下方设置有金属边框。
  8. 根据权利要求7所述的张网设备，其中，所述张网设备还包括焊接机构，所述焊接机构包括移动装置，所述移动装置的一端设置有激光焊枪。
  9. 一种张网设备，用以制备蒸镀用金属掩膜板；其中，所述张网设备包括：
    张紧机构，至少包括相对设置的第一夹具和第二夹具，所述第一夹具固定于所述金属掩膜板的第一端部，所述第二夹具固定于所述金属掩膜板相对另一端的第二端部；
    水平板，可升降地设置于所述金属掩膜板上方；
    测量机构，设置于所述张网设备的工作区域内，所述测量机构用以在所述工作区域内作三维移动，以对所述金属掩膜板上的图案进行位置信息采集；以及，
    磁吸机构，可升降地设置于所述水平板上方，用以吸附所述金属掩膜板，使得所述金属掩膜板产生形变。
  10. 根据权利要求9所述的张网设备，其中，所述测量机构包括上图像采集装置和下图像采集装置，所述上图像采集装置位于所述金属掩膜板上方，所述下图像采集装置位于所述金属掩膜板下方。
  11. 根据权利要求9所述的张网设备，其中，所述张网设备还包括升降装置，所述升降装置包括底座和设置于所述底座上的升降臂，所述升降臂垂直于所述底座设置。
  12. 根据权利要求11所述的张网设备，其中，所述磁吸机构包括磁性板，所述磁性板的一端可升降地固定于所述升降臂上。
  13. 根据权利要求12所述的张网设备，其中，所述水平板的一端可升降地固定于所述升降臂上，所述水平板与所述磁性板平行设置。
  14. 根据权利要求9所述的张网设备，其中，所述金属掩膜板下方设置有金属边框。
  15. 根据权利要求14所述的张网设备，其中，所述张网设备还包括焊接机构，所述焊接机构包括移动装置，所述移动装置的一端设置有激光焊枪。
  16. 一种使用如权利要求9所述的张网设备制备金属掩膜板的方法，其中，所述方法包括：
    步骤S10，使用张紧机构的夹具固定金属掩膜板；
    步骤S20，提供上图像采集装置，使用所述上图像采集装置对所述金属掩膜板进行测量，获取第一位置信息；其中，所述上图像采集装置设置于所述金属掩膜板上侧；
    步骤S30，所述张紧机构根据所述第一位置信息对所述金属掩膜板进行拉伸调整；
    步骤S40，提供水平板；所述水平板设置于所述金属掩膜板上方；
    步骤S50，提供磁性板；所述磁性板设置于所述水平板上方，所述磁性板吸附所述金属掩膜板，并使得所述金属掩膜板产生形变且贴合于所述水平板一侧；
    步骤S60，提供下图像采集装置使用所述下图像采集装置对形变后的所述金属掩膜板进行测量，获取第二位置信息；其中，所述下图像采集装置设置于所述金属掩膜板下侧；
    步骤S70，所述张紧机构根据所述第二位置信息对所述金属掩膜板进行第二次拉伸调整。
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