WO2019049950A1 - ラジカル反応性を有するシリコーンエラストマー硬化物およびその用途 - Google Patents
ラジカル反応性を有するシリコーンエラストマー硬化物およびその用途 Download PDFInfo
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- WO2019049950A1 WO2019049950A1 PCT/JP2018/033098 JP2018033098W WO2019049950A1 WO 2019049950 A1 WO2019049950 A1 WO 2019049950A1 JP 2018033098 W JP2018033098 W JP 2018033098W WO 2019049950 A1 WO2019049950 A1 WO 2019049950A1
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- WIPO (PCT)
- Prior art keywords
- silicone elastomer
- cured
- component
- cured product
- adhesive layer
- Prior art date
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
Definitions
- the present invention is a silicone which is excellent in the followability and adhesion to a substrate, can be used as a protective material against various chemical and physical treatments, and has a surface having a radical reactivity with an adhesive or a pressure-sensitive adhesive.
- the present invention relates to a cured elastomer, a laminate having the cured product, use of the cured product or a laminate in producing an electronic component, and a method of producing an electronic component using the cured product.
- the silicone gel can be obtained by curing the organopolysiloxane having a reactive functional group to a low crosslinking density, and is excellent in heat resistance, weather resistance, oil resistance, cold resistance, electrical insulation, etc. Unlike conventional elastomer products, because they are gel-like, they are widely used for protection of damping materials for optical applications, automotive electronic components, and consumer electronic components, etc., because they are excellent in low elastic modulus, low stress and stress bufferability. (For example, Patent Documents 1 to 7). In particular, silicone gel is soft and easily deformed, and can be arranged according to the unevenness of the substrate surface, so it exhibits excellent followability even to a non-flat substrate, and has the advantage of being less likely to cause gaps or deviations.
- silicone gel is "gel-like", it is weak against deformation due to internal stress due to expansion / contraction due to external stress due to vibration or temperature change, and the gel is broken, protected or adhered.
- a sticky deposit may remain on the object, or the gel may aggregate on the substrate In some cases, it can not be easily removed from the substrate, the electronic component, etc.
- Such a deposit of gel is not preferable because it may cause defects in electronic parts and the like, as well as causing defects in mounting of semiconductors and the like, and defective products.
- curable compositions have been proposed in which curing reactions proceed in multiple stages assuming different curing reaction conditions.
- the tackiness required in the dicing step by the first stage curing is shown by the two-stage curing reaction
- the strong adhesiveness is shown by the second stage curing
- a thermosetting composition for use in the present invention.
- the applicants of the present invention have proposed in Patent Document 9 a curable silicone composition which is excellent in initial curability and maintains high physical strength even when exposed to high temperatures of 250 ° C. or higher. .
- such a multi-step curable silicone cured product adheres firmly on the substrate by a two-step curing reaction, so that a sticky deposit remains on the object, or
- the cured silicone may be cohesively broken on the substrate and may not be easily removed from the substrate, electronic components, and the like.
- adhesive residue (including non-uniform residual adhesion) is generated and the function as a protective material on the surface of the substrate can not be sufficiently exhibited.
- the present invention has been made to solve the above problems, and is excellent in heat resistance and physical strength, etc., and has low modulus of elasticity, low stress, stress bufferability and flexibility, compliance to a substrate, and adhesion.
- a cured product of a silicone elastomer which does not cause peeling from the substrate even if the cured product is cut together with the substrate to be provided and which can be easily removed from the substrate if desired, a protective material of an electronic component comprising the same
- the purpose is to provide its usage.
- this invention aims at the use of the said silicone elastomer hardened
- the present inventors have the following components: (A) A linear organopolysiloxane having at least two curing reactive groups in one molecule, Optionally (B) an organohydrogenpolysiloxane, (C1) Curing agents for the components (A) and (B) and (D) organopolysiloxane resin A composition containing 10 to 1000 parts by mass with respect to 100 parts by mass of the component (A) is cured And, by having an unreacted (C2) radical initiator in the cured product or on the cured product surface, it is found that the above problem can be solved by the silicone elastomer cured product having radical reactivity, and the present invention I reached.
- Such a silicone elastomer cured product has a radical reactivity with an adhesive or a pressure sensitive adhesive, so that an adhesive / pressure sensitive adhesive layer such as an adhesive tape / adhesive tape is produced at a desired stage, for example, in the manufacturing process of electronic parts and the like.
- the above radical initiator is preferably incorporated into the curable silicone composition before curing, and by designing curing conditions such as low temperature, an embodiment in which it is contained in the silicone elastomer cured product in an unreacted state is preferable.
- the surface of the cured silicone elastomer may be partially or entirely applied by spray or the like.
- the process may be disadvantageous in that a coating step is required as compared with an embodiment in which the composition is incorporated into the curable silicone composition before curing.
- the present inventors used a laminate containing the cured silicone elastomer, a protective material for an electronic component made of the cured silicone elastomer, the use thereof in the manufacture of electronic components, and the cured silicone elastomer.
- the inventors have found that the above problems can be solved by the method of manufacturing an electronic component, and have reached the present invention.
- the object of the present invention is achieved by the following silicone elastomer cured product.
- the following ingredients (A) A linear organopolysiloxane having at least two curing reactive groups in one molecule, Optionally (B) an organohydrogenpolysiloxane, (C1) Curing agents for the components (A) and (B) and (D) organopolysiloxane resin A composition containing 10 to 1000 parts by mass with respect to 100 parts by mass of the component (A) is cured And a cured silicone elastomer having radical reactivity by having an unreacted (C2) radical initiator in the cured product or on the surface of the cured product.
- C2 unreacted radical initiator
- the surface of the cured silicone elastomer has radical reactivity to an adhesive or a pressure sensitive adhesive, and the loss coefficient tan ⁇ of the cured product is in the range of 0.01 to 1.00 at 23 ° C. to 100 ° C.
- the component (C1) is at least one curing agent selected from a hydrosilylation reaction catalyst, a condensation catalyst and a photopolymerization initiator,
- the component (A) is a linear or branched organopolysiloxane having at least two alkenyl groups in one molecule (A1)
- Component (B) is an organohydrogenpolysiloxane having at least two silicon-bonded hydrogen atoms in one molecule of (B1)
- the component (C1) is a curing reaction catalyst containing a hydrosilylation reaction catalyst
- the component (C2) is an alkyl peroxide
- a resinous composition wherein the component (D) comprises any combination of (D1) triorganosiloxy units (M units), diorganosiloxy units (D units), monoorganosiloxy units (T units) and siloxy units (Q units) Or reticulated organopolysiloxane resin
- the silicon-bonded hydrogen atom in the component (B) is in the range of 0.5 mol or more relative to 1 mol of the alkenyl group in the component (A) in the composition [1]
- the organopolysiloxane resin is characterized in that the component (D1) is a combination of M units and Q units, and the molar ratio of M units to Q units is in the range of 0.5 to 1.2.
- the silicone elastomer cured product according to any one of [1] to [4].
- [6] The silicone elastomer cured product according to any one of [1] to [5], wherein each of the components (A) to (D) is cured at a temperature at which the component (C2) does not react.
- the object of the present invention is also achieved by the use of a cured silicone elastomer in the following form.
- a substrate, a layer comprising the cured silicone elastomer according to any one of [1] to [9], an adhesive layer or an adhesive layer, and a layer comprising the cured silicone elastomer as described above A laminate having a structure in which an adhesive layer or an adhesive layer faces each other.
- a laminate comprising a release agent layer facing at least one surface of the silicone elastomer cured product according to any one of [1] to [9] and the layer comprising the silicone elastomer cured product.
- a protective material for electronic parts comprising the silicone elastomer cured product according to any one of [1] to [9].
- the object of the present invention is achieved by the following method for producing an electronic component and a member for producing an electronic component.
- (L1) base material, (L2) The silicone elastomer cured product according to any one of [1] to [9] laminated on the substrate, and (L3) on the silicone elastomer cured product via an adhesive layer or an adhesive layer A laminate comprising sheet-like members laminated together, the silicone elastomer cured with the sheet-like member, the adhesive layer or the adhesive layer after the radical reaction of the cured silicone elastomer and the adhesive layer or the adhesive layer (L1) substrate
- the manufacturing method of the electronic component characterized by separating from.
- the cured silicone elastomer of the present invention is excellent in heat resistance and physical strength, etc., and has a low modulus of elasticity, low stress, stress bufferability and flexibility, compliance to a substrate, and adhesion, so that the entire substrate is cured.
- silicone elastomer cured product of the present invention it is possible to provide a use of the silicone elastomer cured product, a method for producing an electronic component using the silicone elastomer cured product, and a member for producing an electronic component.
- the cured silicone elastomer of the present invention is flexible and exhibits high adhesion to a substrate and followability by containing a certain amount of organopolysiloxane resin. Therefore, even when the cured silicone elastomer is placed on the substrate and both are cut together, the cured product does not peel off from the substrate, and the entire surface of the desired substrate can be protected. is there. Furthermore, since the cured silicone elastomer has a radical reactive property on its surface, it responds to heat, high energy radiation, etc. to cause a radical reaction with the adhesive or adhesive in contact, and both are integrated. By using a sheet-like member containing an adhesive or a pressure-sensitive adhesive, such as an adhesive tape, in order to form an integrated conjugate, it is possible to separate (remove) both from the substrate as one.
- the shape of the silicone elastomer cured product is not particularly limited, a layered form is preferable, and when it is used for manufacturing an electronic component described later, it is preferable to be a substantially flat silicone elastomer cured product layer.
- the thickness of the silicone elastomer cured product layer is also not particularly limited, but the average thickness may be in the range of 5 to 500 ⁇ m, in the range of 25 to 300 ⁇ m, or in the range of 30 to 200 ⁇ m.
- the average thickness is less than 5 ⁇ m, it is difficult to fill in the gaps (gaps) derived from asperities on the substrate, and in the step of performing various chemical or physical treatments, as a protective material for the electronic component or its precursor as the substrate May not be able to fully perform its functions. If it exceeds 500 ⁇ m, it may be uneconomical if a silicone elastomer cured product layer is used as a protective material for electronic components, particularly in electronic component manufacturing applications.
- At least a part of the surface of the cured silicone elastomer according to the present invention has radical reactivity derived from unreacted radical initiator.
- the means for placing such a radical initiator in the vicinity of the surface of the cured silicone elastomer is not particularly limited, and may be contained in the composition before curing, and the cured silicone elastomer surface is cured. It may be applied by means such as a spray, and these means may be combined to achieve the desired reactivity.
- radical initiators may be used in combination, depending on the conditions of the reactivity or radical reaction of the adhesive or pressure-sensitive adhesive to be contacted, the type of radical initiators to be incorporated into the composition To achieve desired radical reactivity by optimizing the amount and amount, type and amount of radical initiator to be applied to the cured silicone elastomer cured product surface, curing temperature for obtaining the silicone elastomer cured product, etc. it can.
- the radical initiator is a component that imparts radical reactivity to the cured silicone elastomer according to the present invention, and is not particularly limited, but an organic peroxide, a photopolymerization initiator or a combination thereof is preferable, and in particular, an alkyl peroxide The use of similar is preferred.
- organic peroxides examples include alkyl peroxides, diacyl peroxides, peroxide esters, and carbonate carbonates.
- the 10-hour half-life temperature of the organic peroxide is preferably 70 ° C. or higher, and may be 90 ° C. or higher.
- alkyl peroxides examples include dicumyl peroxide, di-tert-butyl peroxide, di-tert-butylcumyl peroxide, 2,5-dimethyl-2,5-di (tert-butylperoxy) hexane, 2 , 5-Dimethyl-2, 5-di (tert-butylperoxy) hexyne-3, tert-butylcumyl, 1,3-bis (tert-butylperoxyisopropyl) benzene, 3,6,9-triethyl-3, An example is 6,9-trimethyl-1,4,7-triper oxonan.
- diacyl peroxides examples include benzoyl peroxide such as p-methylbenzonyl peroxide, lauroyl peroxide and decanoyl peroxide.
- Peroxide carbonates include di-3-methoxybutylperoxydicarbonate, di (2-ethylhexyl) peroxydicarbonate, diisopropylperoxycarbonate, tert-butylperoxyisopropylcarbonate, di (4-tert-butylcyclohexyl) And d) peroxy dicarbonate, dicetyl peroxy dicarbonate, and dimyristyl peroxy dicarbonate.
- the organic peroxide preferably has a half-life of 10 hours at 70 ° C. or higher, and may have 90 ° C. or higher or 95 ° C. or higher.
- organic peroxides p-methylbenzonyl peroxide, dicumyl peroxide, di-t-butyl peroxide, di-t-hexyl peroxide, t-butylcumyl peroxide, 2,5- Dimethyl-2,5-di (tert-butylperoxy) hexane, 1,3-bis (tert-butylperoxyisopropyl) benzene, di- (2-t-butylperoxyisopropyl) benzene, 3,6,9- Triethyl-3,6,9-trimethyl-1,4,7-triper oxonan is exemplified.
- the content of the organic peroxide is not limited, when it is blended in the composition before curing, it is within the range of 0.05 to 10 parts by mass, or 0.10 parts by mass, based on 100 parts by mass of the entire silicone elastomer cured product. It is preferably in the range of ⁇ 5.0 parts by mass.
- the said content can be suitably selected according to the radical reactivity of the silicone elastomer cured object made into the objective.
- the photopolymerization initiator is a component which generates radicals by high energy radiation such as ultraviolet light and electron beam, and examples thereof include acetophenone, dichloroacetophenone, trichloroacetophenone, tert-butyl trichloroacetophenone, 2,2-diethoxyacetophenone, p- Acetophenone and derivatives thereof such as dimethylaminoacetophenone; benzoin and derivatives thereof such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin butyl ether, benzoin n-butyl ether; benzophenone, 2-chlorobenzophenone, p, p'-dichlorobenzophenone, p Benzophenone and its derivatives such as p, p'-bisdiethylaminobenzophenone; p-dimethylaminopropiophenone, Michler's ketone, ben , Benzyld
- this photoinitiator is not specifically limited, When it mix
- the content is preferably in the range of 10 to 5.0 parts by mass. However, the said content can be suitably selected according to the radical reactivity of the silicone elastomer cured object made into the objective.
- n-butylamine, di- n-butylamine, etc. are mentioned as another arbitrary component, for example Photosensitizers such as tri-n-butyl phosphine, allylthiourea, s-benzyl isothiuronium-p-toluenesulfinate, triethylamine, diethylaminoethyl methacrylate and the like may be included.
- the silicone elastomer cured product according to the present invention contains the organopolysiloxane resin in a range of 10 to 1000 parts by mass with respect to 100 parts by mass of the chain-like organopolysiloxane which is the main component, so the surface has adhesion. Show adhesion to substrate and followability. For this reason, the cured silicone elastomer is difficult to peel or peel off from the substrate, and even when the cured silicone elastomer and the substrate are integrally cut (dicing), the cured silicone elastomer is disposed on the substrate such as an electronic component. Since the state of adhesion to the material is maintained and the end portions and the like are not easily peeled off, the entire surface of the substrate intended for protection can be covered with certainty, which is useful as a protective material for substrates of electronic parts and the like.
- the silicone elastomer cured product according to the present invention has a loss coefficient tan ⁇ (from a visco-elasticity measuring device) from the viewpoint of flexibility, low elastic modulus, low stress and stress cushioning property required for a protective material for a substrate such as an electronic component.
- the frequency measured at a frequency of 0.1 Hz) is preferably in the range of 0.01 to 1.00 at 23 ° C. to 100 ° C., and is preferably 0.03 to 0.95, 0.10 to 23 ° C. More preferably, it is in the range of 0.90.
- the loss coefficient tan ⁇ is in the range of 0.01 to 0.50 at 23 ° C to 100 ° C, and 23 ° C. And particularly preferably in the range of 0.02 to 0.50.
- the storage elastic modulus G ′ of the cured silicone elastomer is preferably in the range of 4.0 ⁇ 10 4 to 5.0 ⁇ 10 6 Pa at 23 ° C. to 100 ° C., preferably 4.0 ⁇ 10 4 to 2 0 ⁇ 10 6 , more preferably in the range of 4.0 ⁇ 10 4 to 1.0 ⁇ 10 6 Pa.
- the cured product of the silicone elastomer according to the present invention can be used as a group for electronic parts and the like by having these properties as an elastic body. When it is used as a protective material for a material, it is difficult to be physically damaged even if it is cut integrally with the substrate, and even after cutting, it can be used as a desired protective material while maintaining close contact with the substrate. There is an advantage.
- the silicone elastomer cured product of the present invention is (A) A linear organopolysiloxane having at least two curing reactive groups in one molecule, Optionally (B) an organohydrogenpolysiloxane, (C1) A curable silicone composition containing 10 to 1000 parts by mass based on 100 parts by mass of the (A) component and the curing agent of the (B) component, and (D) organopolysiloxane resin (A) component It is a cured silicone elastomer cured product, and (C2) A radical initiator is contained in the composition or is applied to the surface of the cured silicone elastomer, thereby having radical reactivity derived from an unreacted radical initiator.
- the curing reactive group of the component (A) is a carbon-carbon double bond-containing organic group such as an alkenyl group
- the component (C) is a hydrosilylation reaction catalyst
- the curing mechanism of the curable silicone composition for forming the silicone elastomer cured product of the present invention is not particularly limited, hydrosilylation reaction curing type by alkenyl group and silicon-bonded hydrogen atom; silanol group and / or Dehydration condensation reaction cure type or dealcohol condensation reaction cure type by silicon atom bonded alkoxy group; peroxide cure reaction type by use of organic peroxide; and radical reaction cure type by high energy radiation to mercapto group etc .; light
- a curing reaction such as a hydrosilylation curing type by high energy ray irradiation using an activated platinum complex curing catalyst and the like.
- the silicone elastomer cured product after curing is compounded with a large amount of unreacted radical initiator in order to maintain radical reactivity, or the obtained silicone elastomer Since it is necessary to apply a radical initiator to the cured product, the curing reaction for forming the silicone elastomer cured product is preferably a hydrosilylation reaction curing type.
- Component (A) is a linear organopolysiloxane having at least two curing reactive groups in one molecule, and it is a linear organopolysiloxane or two or less RSiO 3/2 units (T units) (Wherein R independently of one another is a branched organopolysiloxane having a monovalent organic group or a hydroxyl group) or a SiO 4/2 unit (Q unit), or a cyclic organopolysiloxane, preferably A linear organopolysiloxane having at least two curing reactive groups in one molecule.
- the property of the component (A) at room temperature may be oil or gum-like, and the viscosity of the component (A) at 25 ° C. is preferably 50 mPa ⁇ s or more, particularly 100 mPa ⁇ s or more.
- component (A) is preferably in the form of a gum having a viscosity of 100,000 mPa ⁇ s or more at 25 ° C. or a plasticity.
- the lower viscosity component (A) can be used.
- the curing reactive group of the component (A) described above contains at least an alkenyl group, and preferably contains an alkenyl group having 2 to 10 carbon atoms.
- the alkenyl group having 2 to 10 carbon atoms include a vinyl group, an allyl group, a butenyl group, and a hexenyl group.
- the alkenyl group having 2 to 10 carbon atoms is a vinyl group.
- the curable silicone composition according to the present invention comprises (B) an organohydrogenpolysiloxane as a crosslinking agent, in particular an organosilicon having two or more Si-H bonds in its molecule It is preferable to include hydrogen polysiloxane.
- the alkenyl group of the organopolysiloxane can be hydrosilylated with the silicon-bonded hydrogen atom of the organohydrogenpolysiloxane to form a cured silicone elastomer.
- a hydrosilylation reaction catalyst as the component (C1).
- the curing reactive group of the above-mentioned component (A) is a silanol group (Si-OH) or a silicon atom-bonded alkoxy group, and as an alkoxy group Alkoxy groups having 1 to 10 carbon atoms such as methoxy, ethoxy and propoxy are preferably exemplified.
- the alkoxy group may be bonded to the side chain or end of the organopolysiloxane, or may be in the form of an alkylalkoxysilyl group or an alkoxysilyl group-containing group bonded to a silicon atom via another functional group. And preferred.
- the organopolysiloxane having the curing reactive group has a curing reactive group by another curing mechanism in the same molecule, in addition to the dehydrating condensation reaction curing type or the dealcohol condensation reaction curing type functional group. It is also good.
- a hydrosilylation-reactive functional group or a photopolymerizable functional group may be contained in the same molecule.
- the curing reactive group has a general formula of silicon atom bonding:
- the alkoxysilyl group-containing group represented by is suitably exemplified.
- R 1 is the same or different and is a monovalent hydrocarbon group having no aliphatic unsaturated bond, preferably a methyl group or a phenyl group.
- R 2 is an alkyl group, and is preferably a methyl group, an ethyl group or a propyl group to constitute an alkoxy group having dealcoholization condensation reactivity.
- R 3 is an alkylene group bonded to a silicon atom, preferably an alkylene group having 2 to 8 carbon atoms.
- a is an integer of 0 to 2
- p is an integer of 1 to 50.
- a is 0 and is preferably a trialkoxysilyl group-containing group.
- it may have a hydrosilylation-reactive functional group or a photopolymerization-reactive functional group in the same molecule.
- the curing reactive group of the component (A) may be a radical reactive functional group by peroxide, and an alkyl group, an alkenyl group, an acrylic group, Peroxide curing reactive functional groups such as hydroxyl groups can be used without limitation.
- Peroxide curing reactive functional groups such as hydroxyl groups can be used without limitation.
- the object of the present invention is to obtain a cured silicone elastomer having radical reactivity, it is preferable to incorporate an excessive amount of peroxide for the crosslinking reaction of the component (A) or to cure the cured silicone elastomer.
- the radical initiator is not separately applied, the silicone elastomer cured product obtained by the same curing mechanism may not have radical reactivity.
- the curing reactive functional group of the component (A) is a photopolymerizable functional group, and is a mercaptoalkyl group such as 3-mercaptopropyl group and the above Similar alkenyl groups or acrylamide groups such as N-methyl acrylamidopropyl.
- the conditions for irradiation with high energy radiation are not particularly limited.
- the composition may be cooled to room temperature or cooled in air, inert gas such as nitrogen gas, argon gas, helium gas or in vacuum. Irradiation may be carried out while heating to ⁇ 150 ° C., and in particular, irradiation in air and at room temperature is preferred.
- the curable silicone composition may be coated.
- the curable silicone composition may be cured at room temperature using ultraviolet light having a wavelength of 280 to 450 nm, preferably 350 to 400 nm, to obtain a cured silicone elastomer.
- the preferred component (A) is a linear or branched organopolysiloxane having at least two alkenyl groups in one molecule, which is a dimethylsiloxane block having both ends of molecular chain trimethylsiloxy groups.
- Methyl vinyl siloxane copolymer trimethylsiloxy group blocked dimethyl siloxane ⁇ methyl vinyl siloxane ⁇ methyl phenyl siloxane copolymer with both molecular chain ends, dimethyl vinylsiloxy group blocked with both molecular chain ends dimethyl vinylsiloxy group, dimethyl vinylsiloxy group with molecular chain ends Blocked methylphenylpolysiloxane, both-end dimethylvinylsiloxy group-terminated dimethylsiloxane / methylvinylsiloxane copolymer, both-end dimethylphenylsiloxy group blocked dimethylsiloxane / methylvinylsiloxane copolymer, both-chain chain End methylvinyl phenyl siloxy group-blocked dimethyl polysiloxane.
- the component (B) is a crosslinking agent that is essential when the curing reaction of the curable silicone composition is a hydrosilylation curing reaction and the curing reactive group in the component (A) is an alkenyl group.
- Organohydrogenpolysiloxanes in particular organohydrogenpolysiloxanes having at least two silicon-bonded hydrogen atoms in one molecule.
- the component (B) is an optional component.
- the component (B) is preferably a dimethylhydrogensiloxy-blocked dimethylpolysiloxane having both molecular chains terminated, a methylphenylpolysiloxane capped with dimethylhydrogensiloxy groups having both-molecular chains, and a dimethylhydrogensiloxy-blocked dimethyl siloxane containing both molecular terminals.
- Methylphenyl siloxane copolymer Dimethylhydrogensiloxy group-capped diphenylpolysiloxane with both molecular chain ends, Trimethylsiloxy group-capped methyl hydrogen polysiloxane with both molecular chain ends, Trimethylsiloxy group-capped methylhydrogensiloxane and dimethylsiloxane with molecular chain ends Copolymer, both molecular terminal dimethylhydrogensiloxy group-blocked methyl hydrogen siloxane / dimethylsiloxane copolymer, and two or more of these organopolysiloxanes Mixtures are exemplified.
- the component (B) is exemplified by a methyl hydrogen siloxane / dimethylsiloxane copolymer having a viscosity of 1 to 500 mPa ⁇ s at 25 ° C. and a methyl chain siloxane terminated with a hydroxyl group at both ends.
- a resinous organohydrogenpolysiloxane resin may be included as the component (B).
- the amount of the component (B) may be 0 parts by mass, but the curing reaction of the curable silicone composition is a hydrosilylation curing reaction, and the component (A) is
- the curing reactive group in the composition is an alkenyl group
- the (B) component is mix
- the component (C1) is a curing agent for the components (A) and (B), and is selected according to the curing reaction group in the component (A) and the curing reaction mechanism of the curable silicone composition.
- radical initiators such as a peroxide
- (C1) component since the objective of this invention is to obtain the silicone elastomer hardened
- the preferred (C1) component is a curing reaction catalyst containing one or more selected from a hydrosilylation reaction catalyst and a condensation reaction catalyst, and the use of a hydrosilylation reaction catalyst is particularly preferred.
- a radical initiator as (C1) component, the example is the same as that of the compound illustrated previously.
- the hydrosilylation reaction catalyst may, for example, be a platinum-based catalyst, a rhodium-based catalyst or a palladium-based catalyst, and is preferably a platinum-based catalyst because it can remarkably accelerate the curing of the present composition.
- a platinum-based catalyst fine platinum powder, chloroplatinic acid, alcohol solution of chloroplatinic acid, platinum-alkenyl siloxane complex, platinum-olefin complex, platinum-carbonyl complex, and these platinum-based catalysts, silicone resin, polycarbonate
- a catalyst dispersed or encapsulated with a thermoplastic resin such as a resin or an acrylic resin is exemplified, and a platinum-alkenyl siloxane complex is particularly preferable.
- alkenyl siloxane 1,3-divinyl-1,1,3,3-tetramethyldisiloxane, 1,3,5,7-tetramethyl-1,3,5,7-tetravinylcyclotetrasiloxane,
- the alkenyl siloxane which substituted a part of methyl group of these alkenyl siloxanes by the ethyl group, the phenyl group, etc., and the alkenyl siloxane which substituted the vinyl group of these alkenyl siloxanes with the allyl group, the hexenyl group etc. is illustrated.
- 1,3-divinyl-1,1,3,3-tetramethyldisiloxane is preferable because the stability of the platinum-alkenylsiloxane complex is good.
- a non-platinum-based metal catalyst such as iron, ruthenium or iron / cobalt may be used as a catalyst for promoting the hydrosilylation reaction.
- the cured silicone elastomer of the present invention may use a particulate platinum-containing hydrosilylation reaction catalyst dispersed or encapsulated with a thermoplastic resin.
- a particulate platinum-containing hydrosilylation reaction catalyst dispersed or encapsulated with a thermoplastic resin.
- the use of such an encapsulated curing agent improves the storage stability of the curable silicone composition and controls the curing reaction by temperature, in addition to the advantages of improving the conventional handling workability and the pot life of the composition. The advantage is obtained.
- a hydrosilylation reaction catalyst such as a photoactive platinum complex curing catalyst which promotes the hydrosilylation reaction by irradiation of high energy rays such as ultraviolet rays may be used other than heating.
- a hydrosilylation reaction catalyst a ⁇ -diketone platinum complex or a platinum complex having a cyclic diene compound as a ligand is preferably exemplified, and a trimethyl (acetylacetonato) platinum complex, trimethyl (2,4-pentanedionetato) ) Platinum complexes, trimethyl (3,5-heptanedionate) platinum complexes, trimethyl (methylacetoacetate) platinum complexes, bis (2,4-pentanedionato) platinum complexes, bis (2,4-hexandionato) platinum complexes Bis (2,4-heptandionato) platinum complex bis (3,5-heptanedionato) platinum complex bis (1-phenyl-1,3-
- a cured silicone elastomer can be formed using the curable silicone composition as a raw material without performing heating operation.
- the content of the catalyst for hydrosilylation reaction is such that the metal atom is in the range of 0.01 to 500 ppm by mass unit, within the range of 0.01 to 100 ppm, based on 100 parts by mass of the entire cured silicone elastomer.
- the amount is in the range of 0.01 to 50 ppm.
- the condensation reaction catalyst is not particularly limited.
- Organic tin compounds such as tetrabutyl titanate, tetrapropyl titanate, and dibutoxy bis (ethyl acetoacetate); other acidic compounds such as hydrochloric acid, sulfuric acid, and dodecylbenzene sulfonic acid; alkaline compounds such as ammonia and sodium hydroxide; Examples are amine compounds such as 1,8-diazabicyclo [5.4.0] undecene (DBU) and 1,4-diazabicyclo [2.2.2] octane (DABCO). The amount thereof is in the range of 0.1 to 10.0 parts by mass, based on 100 parts by mass of the entire silicone elastomer cured product.
- DBU 1,8-diazabicyclo [5.4.0] undecene
- DABCO 1,4-diazabicyclo [2.2.2] octane
- the component (C2) is a radical initiator and is the same as the component described above.
- the (C1) component is a curing reaction catalyst containing a hydrosilylation reaction catalyst and the (C2) component is an alkyl peroxide is preferable.
- Component (C2) is blended in the range of 0.5 to 5.0 parts by mass, preferably 0.75 to 3.5 parts by mass, based on 100 parts by mass of the entire silicone elastomer cured product. be able to. If the amount of the component (C2) in the curable silicone composition is less than the above lower limit, the radical reactivity of the surface of the cured silicone elastomer is insufficient even when the component (C2) is cured in a non-reactive form. It may be On the other hand, when the amount of the component (C2) in the curable silicone composition exceeds the above upper limit, the amount of the unreacted (C2) component becomes excessive, and the substrate surface is brought into close contact as a protective material.
- radical initiator may be left behind or react with the surface of the substrate, which is not preferable.
- amount of the component (C2) in the curable silicone composition is less than the above lower limit, it is preferable to separately apply a radical initiator on the surface of the obtained cured silicone elastomer.
- the curable silicone composition containing the (C2) component can be cured at 100 ° C. or less, preferably 80 ° C. or less, to give a silicone elastomer cured product containing an unreacted (C2) component.
- the component (C1) is a curing reaction catalyst containing a hydrosilylation catalyst and the component (C2) is an alkyl peroxide
- unreacted alkyl peroxide is obtained by curing at the above temperature.
- Such a silicone elastomer cured product is advantageous in terms of process when used as a protective material for electronic parts and the like, since the surface has radical reactivity even without applying a radical initiator to the surface of the cured product.
- a radical initiator is applied to part or all of the surface of the cured product using a known application means such as a spray. It is necessary.
- the radical initiator may be applied in the range of 0.01 to 5.0 parts by mass, based on 100 parts by mass of the entire silicone elastomer cured product.
- the component (D) is an organopolysiloxane resin, which imparts adhesiveness / tackiness to the cured silicone elastomer according to the present invention to improve the followability to the substrate and adhesiveness, and the substrate and silicone. Even when the cured elastomer is cut as a single piece, there is no peeling or peeling from the substrate surface, and the entire surface of the substrate targeted as a protective material can be covered and protected from chemical or physical treatment. Have.
- component (D) comprises any combination of triorganosiloxy units (M units), diorganosiloxy units (D units), monoorganosiloxy units (T units) and siloxy units (Q units).
- Organopolysiloxane resin having a resinous or network-like molecular structure, wherein R 2 SiO 2/2 units (D units) and RSiO 3/2 units (T units) (wherein R is independently of each other) Resin composed of (valent organic group or hydroxyl group), organopolysiloxane resin composed of T unit alone, and R 3 SiO 1/2 unit (M unit) and SiO 4/2 unit (Q unit), in the molecule And organopolysiloxane resins having at least two curing reactive groups, hydroxyl groups or hydrolyzable groups.
- an organopolysiloxane resin also called MQ resin
- MQ resin composed of R 3 SiO 1/2 units (M units) and SiO 4/2 units (Q units).
- component (D) when a hydroxyl group exists in component (D), it is directly bonded to silicon such as T unit or Q unit in the molecule, and is a group derived as a result of hydrolysis of silane or silane as a raw material.
- R in each of the above-mentioned siloxy units is a monovalent organic group or a hydroxyl group, and industrially an alkyl group or an aryl group, particularly preferably a methyl group or a phenyl group is preferable, but a part thereof is It may be a curing reactive functional group exemplified in the component A), for example, one containing an alkenyl group such as a vinyl group, or one containing a silicon-bonded hydrogen atom.
- the component (D) is an organopolysiloxane resin comprising a combination of the above M units and Q units, wherein the molar ratio of M units to Q units is in the range of 0.5 to 1.2, From the viewpoint of adhesion / tackification, it consists of (CH 3 ) 3 SiO 1/2 units (trimethylsiloxy units) and SiO 4/2 units (Q units), and the molar ratio of trimethylsiloxy units to Q units is 0.6 Most preferred are organopolysiloxane resins in the range of ⁇ 1.1.
- the compounding amount of the component (D) is 10 to 1000 parts by mass with respect to 100 parts by mass of the component (A), and is in the range of 25 to 500 parts by mass. It may be in the range of 25 to 300 parts by mass.
- the compounding amount of the component (D) is less than the above lower limit, the following property and adhesion of the cured silicone elastomer to the substrate become insufficient, and particularly when the cured silicone elastomer is placed on the substrate and cut as one, In some cases, peeling may occur, and the function as a protective material is insufficient.
- the silicone elastomer cured product loses its property as an elastic body and becomes hard, and the flexibility and followability of the silicone cured product become insufficient. It may cause cracking or breakage.
- the silicone elastomer cured product of the present invention preferably further contains a reinforcing filler.
- the reinforcing filler can improve the mechanical strength of the cured silicone elastomer and maintain high formability and moderate hardness.
- the composition of the reinforcing filler may further improve the surface releasability of the cured silicone elastomer after radical reaction.
- a reinforcing filler for example, fumed silica fine powder, precipitated silica fine powder, calcined silica fine powder, fumed titanium dioxide fine powder, quartz fine powder, calcium carbonate fine powder, diatomaceous earth powder, oxidized powder
- Inorganic fillers such as aluminum fine powder, aluminum hydroxide fine powder, zinc oxide fine powder, zinc carbonate fine powder and the like can be mentioned, and such inorganic fillers can be exemplified by organoalkoxysilanes such as methyltrimethoxysilane, trimethylchlorosilane, etc.
- Organohalosilanes organosilazanes such as hexamethyldisilazane, ⁇ , ⁇ -silanol group-blocked dimethylsiloxane oligomers, ⁇ , ⁇ -silanol group-blocked methylphenyl siloxane oligomers, ⁇ , ⁇ -silanol group-blocked methylvinylsiloxane oligomers
- processing agent such as oligomer
- the surface-treated inorganic filler may be contained. The amount thereof is in the range of 0.0 to 20.0 parts by mass, preferably 1.0 to 10.0 parts by mass, based on 100 parts by mass of the entire silicone elastomer cured product.
- fillers having hollow inside may be used, and these hollow fillers are expanded by heating accompanying the above-mentioned radical reaction etc., and when peeling from the base material of a silicone elastomer cured material becomes easy There is.
- said curable silicone composition and silicone elastomer cured material can contain components other than the said component.
- Antioxidants such as triazoles or benzophenones; light stabilizers such as triazoles or benzophenones; flame retardants such as phosphates, halogens, phosphoruss, or antimonys; cationic surfactants, anionic surfactants, or non-photosensitive agents
- the above curable silicone composition may be selected from organic solvents such as toluene, xylene, acetone, methyl ethyl ketone, methyl isobutyl ketone, hexane and heptane; ⁇ , ⁇ -trimethylsiloxy group-blocked dimethylpolysiloxane, ⁇ , ⁇ -trimethylsiloxy group
- Non-crosslinkable diorganopolysiloxanes such as blocked methylphenylpolysiloxanes
- Flame retardants such as carbon blacks
- Antioxidants such as hindered phenolic antioxidants
- Heat inhibitors such as iron oxides
- a plasticizer such as a group-capped dialkyl siloxane oligomer; and others, a pigment, a thixotropic agent, and an antifungal agent may be optionally contained as long as the object of the present invention is not impaired.
- an organic solvent such as xylene may be blended for the purpose of blending the component
- a hydrosilylation reaction inhibitor as a curing retarder.
- the adhesion promoter is preferably an organosilicon compound having at least one alkoxy group bonded to a silicon atom in one molecule.
- this alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group and a methoxyethoxy group, and a methoxy group is particularly preferable.
- halogen substituted or unsubstituted monovalent hydrocarbon groups such as an alkyl group, an alkenyl group, an aryl group, an aralkyl group and a halogenated alkyl group
- Glycidoxyalkyl groups such as 3-glycidoxypropyl group and 4-glycidoxybutyl group; such as 2- (3,4-epoxycyclohexyl) ethyl group and 3- (3,4-epoxycyclohexyl) propyl group
- Examples thereof include an epoxycyclohexyl alkyl group; an epoxy alkyl group such as a 3,4-epoxybutyl group and a 7,8-epoxyoctyl group; an acrylic group-containing monovalent organic group such as a 3-methacryloxypropyl group; and a hydrogen atom.
- the organosilicon compound preferably has an alkenyl group in the composition or a group capable of reacting with a silicon-bonded hydrogen atom, and specifically, preferably has a silicon-bonded hydrogen atom or an alkenyl group.
- the organic silicon compound has at least one epoxy group-containing monovalent organic group in one molecule, because it can impart good adhesion to various substrates.
- organosilicon compounds include organosilane compounds, organosiloxane oligomers, and alkyl silicates.
- organosiloxane oligomer or alkyl silicate examples include linear, partially branched linear, branched, cyclic, and network-like, and in particular, linear, branched or network-like. Is preferred.
- organosilicon compounds include silane compounds such as 3-glycidoxypropyltrimethoxysilane, 2- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, etc .; silicon atom in one molecule Siloxane compound having at least one bonded alkenyl group or silicon-bonded hydrogen atom and at least one silicon-bonded alkoxy group, silane compound having at least one silicon-bonded alkoxy group or siloxane compound and silicon-bonded hydroxy in one molecule Examples thereof include a mixture of a group and a siloxane compound having at least one silicon-bonded alkenyl group, methyl polysilicate, ethyl polysilicate, and epoxy group-containing ethyl polysilicate.
- the adhesion promoter is preferably a low viscosity liquid, and its viscosity is not limited, but is preferably in the range of 1 to 500 mPa ⁇ s at 25 ° C. Although the content of the adhesion promoter is not limited, it is preferably in the range of 0.01 to 10 parts by mass with respect to a total of 100 parts by mass of the curable silicone composition.
- a reverse roll coat, an air knife coat, a curtain coat using a curtain flow coater or the like, a comma coat, a Mayer bar, and other known methods used for forming a cured layer can be used without limitation.
- the temperature condition for curing is 100 ° C. or less, and the reaction is preferably performed at room temperature to 90 ° C., and the curing reaction is a hydrosilylation reaction It is preferable to cure in a temperature range of 70 to 90 ° C. for about 10 minutes to 3 hours. Under such temperature conditions, since the alkyl peroxide and the like remain in a substantially unreacted state in the cured silicone elastomer, the resulting cured silicone elastomer has radical reactivity on the surface.
- the cured silicone elastomer of the present invention has unreacted radical initiator in the cured product or on the surface of the cured product, it has radical reactivity with various adhesives or adhesives, and the radical reaction produces an adhesive. Or form a cured product integrated with the adhesive. In this cured product, the silicone elastomer cured product after radical reaction and the adhesive or pressure-sensitive adhesive form a firmly bonded assembly, and both can be peeled off integrally.
- the type of adhesive or pressure-sensitive adhesive is not particularly limited, but since it is radical reactive, acrylic resin-based pressure-sensitive adhesives, rubber-based pressure-sensitive adhesives, silicone-based pressure-sensitive adhesives; acrylic resin-based adhesives, synthetic rubber-based Examples of the adhesive include silicone adhesives, epoxy resin adhesives and polyurethane adhesives.
- These adhesives or pressure-sensitive adhesives are an adhesive layer or pressure-sensitive adhesive layer laminated on another sheet-like (including film-like) substrate like an adhesive tape / pressure-sensitive adhesive tape, and these sheet-like materials It is preferable to place on the cured silicone elastomer of the present invention, together with the substrate of
- the radical reaction of the cured silicone elastomer of the present invention with the above-mentioned adhesive or pressure-sensitive adhesive is carried out by heating at a temperature above 100 ° C., preferably at a temperature above 120 ° C., more preferably 130 ° C. or more. And the whole may be radically reacted.
- a radical reaction in a temperature range of 120 ° C. to 200 ° C. or 130 to 180 ° C. is preferably selected.
- radical reactions can also be advanced by irradiation with high energy rays (also referred to as active energy rays), and as high energy rays, ultraviolet rays, electron rays, radiation and the like can be mentioned. Is preferred.
- a high pressure mercury lamp, a medium pressure mercury lamp, an Xe-Hg lamp, a deep UV lamp and the like are suitable as a UV radiation source, and UV radiation with a wavelength of 280 to 400 nm, preferably 350 to 400 nm is particularly preferable.
- the irradiation dose at that time is preferably 100 to 10000 mJ / cm 2.
- radical reaction between the cured silicone elastomer and the adhesive or the adhesive by high energy rays selective radical reaction is possible regardless of the above temperature conditions, and these radical reactions are combined. It can be used.
- the radical reactive silicone elastomer cured product after radical reaction tends not to change significantly before and after the reaction with a loss coefficient tan ⁇ (measured at a frequency of 0.1 Hz from a viscoelasticity measuring apparatus).
- the storage elastic modulus G 'of the cured radical reactive silicone elastomer can be designed to have a composition that does not change significantly before and after the radical reaction
- the composition can also be designed to change the storage elastic modulus G' significantly before and after the radical reaction .
- an organopolysiloxane resin in which a part or all of the component (D) contains a curing reactive functional group alkenyl group, silicon-bonded hydrogen atom, etc.
- the storage elastic modulus G 'of the cured silicone elastomer after radical reaction tends to increase in the range of about 1 to 10 times, and the storage elastic modulus G' is in the range of 1.1 to 7.0 times
- An increased radical reactive silicone elastomer cure can be suitably designed.
- the durability of the cured product after radical reaction is improved as a protective material for a substrate of an electronic component etc.
- the cured silicone elastomer of the present invention is excellent in adhesion to a substrate, is flexible, has a low modulus of elasticity, low stress and excellent stress bufferability, and is integrally disposed on a substrate such as an electronic component. Even when cut, since it does not peel off at the end portion etc., it can be used as a protective material for various electronic parts. In addition, after having played the role of protection, it can be easily separated (removed) from above the electronic component which is a base material as a joined body integrated with the tape by radical reaction with an adhesive tape or the like.
- the cured silicone elastomer of the present invention can also be used as an adhesive, a sealing material, and a potting material, and is also suitable for use as a sealing agent.
- Such applications include building members, electrical / electronic parts, vehicle parts and the like, but in particular, the cured silicone elastomer of the present invention is used as an adhesive or sealant used in the production of electronic parts. Can.
- the silicone elastomer cured product of the present invention is particularly useful for the production of electronic parts, and is used as a stable and flat protective layer excellent in stress relaxation properties by forming the silicone elastomer cured product layer on various substrates. It can also be done.
- the functions as these protective layers are protection against physical impact derived from strength and elasticity of cured silicone elastomer, protection against heat and temperature change derived from heat resistance and cold resistance of silicone, and various types of chemistry for electronic parts. Protection against physical or physical treatment (including partial coating that includes a design that avoids treatment on the protective surface). Also, as described above, the protective layer can be easily formed on the electronic component and easily removed.
- the silicone elastomer cured product of the present invention is useful as a silicone elastomer cured material layer constituting a laminate for producing an electronic component, and hereinafter, the laminate will be described.
- the substrate on which the silicone elastomer cured material layer is laminated may have irregularities, and it is particularly preferable that the silicone elastomer cured material layer fills or follows the irregularities without gaps to form a flat silicone elastomer cured material layer.
- the cured silicone elastomer layer of the present invention is flexible and is excellent in deformability, followability, and adhesion, so it is difficult to form a gap even on a substrate having irregularities, and problems such as separation and deformation of the cured silicone elastomer surface are caused. It has the advantage of being less likely to occur.
- the purpose of laminating the silicone elastomer cured product layer is not particularly limited, but when the substrate is an electronic component, it is possible to selectively protect the laminating portion of the silicone elastomer layer from various treatments, and also a flexible silicone elastomer
- the cured product layer may provide protection from physical impact and vibration.
- the substrate used in the present invention is not particularly limited, and a desired substrate may be appropriately selected, but in particular, an electronic component or a precursor thereof is preferable.
- the material is, for example, an adherend made of glass, ceramic, mortar, concrete, wood, aluminum, copper, brass, zinc, silver, stainless steel, iron, tin, tin, nickel-plated surface, epoxy resin, phenol resin, etc.
- a substrate is exemplified.
- adherends or substrates made of thermoplastic resins such as polycarbonate resin, polyester resin, ABS resin, nylon resin, polyvinyl chloride resin, polyphenylene sulfide resin, polyphenylene ether resin, and polybutylene terephthalate resin are exemplified. These may be in the form of a rigid plate or in the form of a flexible sheet. Further, it may be a stretchable film-like or sheet-like substrate used for a substrate such as a dicing tape.
- the substrate used in the present invention may be subjected to surface treatment such as primer treatment, corona treatment, etching treatment, plasma treatment and the like for the purpose of improving adhesion and adhesion with the silicone elastomer cured product layer.
- surface treatment such as primer treatment, corona treatment, etching treatment, plasma treatment and the like for the purpose of improving adhesion and adhesion with the silicone elastomer cured product layer.
- a base material is an electronic component or its precursor.
- semiconductor elements pedestals at least temporarily arranging electronic components in the manufacturing process, semiconductor wafers for lamination applications, ceramic elements (including ceramic capacitors), substrates usable as substrates for electronic circuit applications, etc. As illustrated, these may be separated later by dicing.
- a base that can be used as a semiconductor element, a pedestal for processing electronic components, a circuit board, a semiconductor substrate or a semiconductor wafer is preferable.
- the material of these base materials is not particularly limited, but as members suitably used as circuit boards etc., organic resins such as glass epoxy resin, bakelite resin, phenol resin, etc .; ceramics such as alumina; copper, aluminum Examples of such materials include metals such as Si, silicon wafers for semiconductor applications, and the like.
- the conducting wire which consists of materials, such as copper and silver-palladium, may be printed on the surface.
- the cured silicone elastomer of the present invention has the advantage of being able to fill or follow the surface irregularities of these semiconductor devices and circuit substrates without gaps, and to form a flat cured silicone elastomer surface.
- the surface on which the silicone elastomer cured product is formed can be selectively protected from physical impact and various treatments.
- the laminate of the present invention preferably has one or more electronic components as a substrate.
- the type of the electronic component is not particularly limited, but semiconductor wafers, ceramic elements (including ceramic capacitors), semiconductor chips and light emitting semiconductor chips which are elements of semiconductor chips are exemplified, and the same or two or more different ones
- the silicone elastomer layer may be disposed on the electronic component of
- the silicone elastomer layer in the laminate of the present invention is suitably flexible and excellent in followability and deformability, so that a stable and flat surface can be formed, and furthermore, the cured silicone elastomer is subjected to various treatments from the lamination surface.
- the electronic parts on which the silicone elastomer cured product is laminated are stably held in place, and various patterns are formed on the electronic parts, etc. Even when processing such as processing and dicing is performed, there is an advantage that surface irregularities of the base material, positional deviation of the electronic component, and processing defects of the electronic component due to vibration displacement (damping) are less likely to occur.
- the retention of the electronic component by the silicone elastomer cured product is due to the elasticity derived from the elastomer and the adhesion derived from the organopolysiloxane resin, and the adhesion of the elastomer itself and the supporting of the electronic component by its deformation. Including both.
- These electronic components may be subjected to chemical or physical treatment before forming a laminate, or may be subjected to the above treatment after laminating a silicone elastomer cured product on an electronic component.
- the portions where the cured silicone elastomer of the present invention is laminated can be selectively protected from these treatments, so desired chemical or physical processing is required only at specific portions of the electronic components. It can be applied to In particular, the present invention is particularly useful for selective protection of electronic parts because the cured product of the silicone elastomer can be separated efficiently even if it is topical or pinpoint.
- the processing on these electronic components includes, but is not limited to, forming an electronic circuit or an electrode pattern, a conductive film, an insulating film, etc. at least partially.
- conventionally known means can be used without particular limitation, and it is formed by vacuum evaporation method, sputtering method, electroplating method, chemical plating method (including electroless plating method), etching method, printing method or lift off method It may be done.
- the laminate of the present invention is used for producing an electronic component, it is particularly preferable to form an electronic circuit of the electronic component, an electrode pattern, a conductive film, an insulating film, etc. after laminating the cured silicone elastomer.
- the laminate may be singulated (dicing).
- the top, bottom, left, and right relationship between the base electronic component and the cured silicone elastomer layer can be selected as desired.
- the above-mentioned silicone elastomer cured product forms a cured layer excellent in shape retention, hardness and surface releasability, so in the laminate using the above electronic component as a base, the cured layer can be easily made from the electronic component.
- residue adheresive residue
- the above-mentioned silicone elastomer cured product can form a united body integrated by radical reaction of the sheet-like substrate and the adhesive layer / adhesive layer described below, and the cured product can be quickly, simply and reliably. It enables separation.
- the sheet-like member is characterized by at least partially including an adhesive layer or an adhesive layer, and is laminated on the cured cured reactive silicone elastomer as described above via the adhesive layer or the adhesive layer.
- the sheet-like member and the cured product form a joined body when the radical reaction with the cured silicone elastomer is allowed to proceed, substantially Can be separated from the substrate as one piece.
- the radical reactant of the cured silicone elastomer can cause problems such as breakage and complication of the peeling process depending on the type of mechanical device used for separation, but silicone elastomer cured integrated with the sheet-like member Radical reaction products can be easily separated from local or pinpoint points, and can be easily, quickly and reliably separated from the substrate, especially in the industrial production process, shortening the working time And realize a significant advantage of reducing man-hours.
- members so-called “adhesive / adhesive film” or “adhesive / adhesive sheet” can be used without particular limitation, and are substantially flat, and tape, film, etc. Substrates having appropriate width and thickness can be used without particular limitation depending on the application of Specifically, a composite sheet of paper, synthetic resin film, cloth, synthetic fiber, metal foil (aluminum foil, copper foil, etc.), glass fiber, and a plurality of sheet-like substrates of these are laminated. A base material is mentioned.
- a synthetic resin film is preferable, and synthesis of polyester, polytetrafluoroethylene, polyimide, polyphenylene sulfide, polyamide, polycarbonate, polystyrene, polypropylene, polyethylene, polyvinyl chloride, polyvinylidene chloride, polycarbonate, polyethylene terephthalate, nylon, etc.
- a resin film can be illustrated.
- the thickness is not particularly limited, but is usually about 5 to 300 ⁇ m.
- the synthetic resin film or the like may be subjected to surface treatment such as primer treatment, corona treatment, etching treatment, plasma treatment and the like. This improves the adhesion and integrity of the adhesive layer and the sheet-like member described below.
- the adhesive layer or adhesive layer of the sheet-like member is not particularly limited in its kind, but it is intended to form a joined body with the above-mentioned cured silicone elastomer by radical reaction and separate it as one, It is preferable to form a strong bonded body so that the failure mode of the bonded body becomes cohesive failure when it is intended to separate from the object to be attached.
- the adhesive agent / adhesive used for these adhesive layers or adhesive layers is as above-mentioned, and it is the same also about the method of advancing radical reaction.
- the laminate of the present invention is formed by laminating the cured product of the silicone elastomer and a sheet-like member via the adhesive layer on a substrate, and, if desired, a curable composition which is a raw material composition of the cured silicone elastomer. It can be manufactured by applying a silicone composition onto a target substrate and curing it in the form of an elastomer while maintaining radical reactivity.
- a silicone elastomer cured product is formed on a sheet-like substrate provided with a desired release layer, and the silicone elastomer cured material layer is separated from the release layer, and is formed on another substrate. It can also be manufactured by transferring and further laminating sheet-like members via an adhesive layer.
- the lamination of the cured silicone elastomer can be carried out over the entire surface of the substrate or locally, and pinpoint substrate protection is also possible. Moreover, you may apply
- a radically reactive silicone elastomer cured product is formed on a sheet-like base material (base material R) provided with a release layer, and it is separated from the release layer and handled as a sheet-like member later, a uniform surface is obtained by the following method.
- a silicone elastomer cured product layer may be formed.
- the sheet-like substrate (substrate R) provided with the release layer is substantially flat, and may be used without particular limitation with a substrate having an appropriate width and thickness depending on the application such as a tape, a film, etc. In particular, it is a synthetic resin film (PET film or the like) having a thickness of about 5 to 300 ⁇ m.
- a release agent used to form a release layer for example, rubber based elastomers such as olefin based resins, isoprene based resins, butadiene based resins, long chain alkyl based resins, alkyd based resins, fluorine based resins, silicone based resins Etc. are used.
- a release agent comprising a silicone resin is preferred, and the use of a release agent comprising a fluoroalkyl-containing fluorine-modified silicone resin is particularly preferred.
- the cured silicone elastomer layer according to the present invention is preferably substantially flat, but when the curable silicone composition as the raw material is applied onto a substrate having a release layer by a conventional method, particularly after curing When the thickness of the silicone elastomer cured material layer is 50 ⁇ m or more, the coated surface may be recessed to form a nonuniform surface, and the resulting silicone elastomer cured material layer surface may be nonuniform.
- a substrate having a release layer is applied to the curable silicone composition and the cured silicone elastomer layer, and a sheet-like substrate having an uncured coated surface provided with each release layer (the substrate R described above And forming a physically uniformized planarizing layer by sandwiching with a separator) to obtain a planarized cured silicone elastomer layer.
- the rolling process is carried out using the well-known rolling methods, such as roll rolling, for the laminated body formed by apply
- a structure in which a cured silicone elastomer cured product layer is sandwiched by a sheet-like substrate provided with a release layer is preferable, and a sheet-like base provided with a release layer comprising a release agent comprising two silicone resins.
- the structure clamped by material is preferable.
- the laminate of the present invention is useful in the manufacture of electronic components, and is a stable and flat electronic component having excellent stress relaxation properties by forming a cured silicone elastomer on the base electronic components.
- the portion on which the silicone elastomer cured product is laminated is selectively protected from various treatments.
- the radical reaction of the silicone elastomer cured product in which the above sheet-like member is laminated via the adhesive layer or the adhesive layer causes the radical reaction of the sheet-like member, silicone elastomer cured product and the adhesive layer or the adhesive layer. Even if it is a local arrangement where it is difficult to effectively peel off the cured product when the cured product of the silicone elastomer is cured by bonding the two products together, both of them are convenient, quick, and almost simultaneously. It has the advantage of being able to be reliably separated from electronic parts and to be less likely to produce defective products derived from the residue (adhesive residue) such as a silicone elastomer cured product.
- the method of manufacturing an electronic component of the present invention is Step (I): producing a laminate having an electronic component, a cured product of silicone elastomer and a sheet-like member having an adhesive layer or an adhesive layer, Step (II): After step (I), the electronic component is selected from one or more types of chemical or physical treatment (formation of electronic circuit, formation of electrode pattern, formation of conductive film, formation of insulating film) Performing one or more of the following types of processing); Step (III): after the step (II), performing a radical reaction between the cured silicone elastomer and the adhesive layer or adhesive layer, Step (IV): After the step (III), the method comprises the steps of separating the sheet-like member, the cured product of the silicone elastomer cured product and the adhesive layer or the adhesive layer from the electronic component substantially simultaneously.
- the formation process of the laminated body in process (I) is arbitrary, you may apply
- the electronic component is as described in the section of [laminate containing electronic component], and in the method of manufacturing an electronic component according to the present invention, after the silicone elastomer cured product is laminated, an electronic circuit or an electrode is formed on the electronic component.
- a process of forming a pattern, a conductive film, an insulating film and the like may be included and preferred.
- the laminate or the electronic component may be cut into pieces (dicing).
- the cured silicone elastomer of the present invention is excellent in followability and adhesion to a substrate and is less likely to be peeled off by cutting, it comprises a step of integrally cutting the substrate and silicone elastomer before or after the radical reaction. In the manufacturing method of electronic parts, it is especially suitable.
- the cut electronic component can efficiently treat the entire surface other than the adhesion surface of the cured silicone elastomer, and then the radical reaction is performed.
- the electronic component can be singulated in a processed and cut state by separating the cured product of the silicone elastomer and the bond of the adhesive layer / adhesive layer and the like.
- Component (B3) Both terminal trimethylsiloxy group-capped dimethylsiloxane / hydrogenmethylsiloxane polymer (content of silicon-bonded hydrogen group: 0.78% by weight).
- Component (C1) vinylsiloxane solution of platinum-divinyltetramethyldisiloxane complex (about 0.6% by weight as platinum metal concentration)
- Component (C2) 2,5-dimethyl-2,5-di (t-butylperoxy) hexane-end-terminated trimethylsiloxy group-blocked siloxane polymer mixture (2,5-dimethyl-2,5-di (t- About 50% by weight of butyl peroxy) hexane
- Component (D1) an organopolysiloxane resin comprising trimethylsiloxy units (M units) and SiO 4/2 units (Q units), wherein the molar ratio of M units
- Component (D2) an organopolysiloxane resin comprising trimethylsiloxy units (M units), vinyldimethylsiloxy (M Vi units) and SiO 4/2 units (Q units) (vinyl content: about 4.1% by weight)
- Component (D3) an organopolysiloxane resin comprising hydrogen dimethylsiloxy units (M units) and SiO 4/2 units (Q units) (content of silicon-bonded hydrogen groups: about 0.97% by weight)
- Inhibitor 1,3,5,7-tetramethyl-1,3,5,7-tetravinyl-cyclotetrasiloxane (vinyl content: 30.2% by weight)
- Silica Hexamethyldisilazane-treated silica fine particles (manufactured by Nippon Aerosil, under the trade name “Aerosil 200 V”, surface-treated)
- ⁇ Curable silicone composition composition according to Examples 1 to 14>
- the above components were compounded with the composition described in Table 1 and the parts by weight described in the same table to prepare a curable silicone composition for obtaining a cured silicone elastomer of Examples 1-14.
- the silicon-bonded hydrogen atom (Si-H) of the component (B1) was designed to be 0.9, 1.2 or 1.3 moles per mole of vinyl group in the composition.
- composition according to comparative example 1> Each component described above was compounded with the composition described in Table 2 and the parts by weight described in the Table to prepare a curable silicone composition according to Comparative Example 1. At that time, the amount of silicon-bonded hydrogen atoms (Si-H) of component (B2) was designed to be 0.56 mol per mol of vinyl group in the composition.
- the composition according to Comparative Example 1 is not a cured silicone elastomer, but a composition for forming a silicone gel.
- composition according to comparative example 2> Each component described above is compounded with the composition described in Table 2 and parts by weight described in the same table, and a curable silicone composition (composition not containing a radical initiator and an organopolysiloxane resin) according to Comparative Example 2 is prepared. did. At that time, the amount of silicon-bonded hydrogen atoms (Si-H) of component (B1) was designed to be 1.20 moles per mole of vinyl group in the composition.
- Comparative Example 1 In order to form a silicone gel, Comparative Example 1 was measured at 23 ° C. in the same manner as in Comparative Example 2 except that the strain was 0.5%. The values are shown in Table 2.
- the curable silicone composition having the composition shown in Table 1 or 2 becomes about 10 to 20 ⁇ m thick or about 50 ⁇ m thick on the substrate over 15 minutes at 5000 rpm with a GDE-100 spin coater (manufactured by Shimadzu Corporation) I coated it like that. Thereafter, the hydrosilylation reaction was allowed to proceed under the conditions described above to prepare a silicone layer which was a silicone elastomer cured product or a silicone gel. The substrate was diced at a rotational speed of 20,000 rpm and a speed of 30 mm / s using a DAD322 dicer (manufactured by DISCO).
- Adhesion Test with Adhesive Sheet A thin film of Primers X and Y (both manufactured by Toray Dow Corning Co., Ltd.) was applied onto an aluminum substrate. The liquid silicone composition before curing described in Example 4 and 10-14 was applied thereon to about 230 ⁇ m, and the hydrosilylation reaction was allowed to proceed under the conditions described above to obtain a silicone elastomer cured product. Furthermore, a pressure-sensitive adhesive tape having a silicone-based pressure-sensitive adhesive layer (polyester-based silicone pressure-sensitive adhesive tape for heat-resistant plating and masking No. 336, manufactured by Nitto Denko Corporation) is pasted onto the obtained cured elastomer, and 1 at 150 ° C. in a nitrogen atmosphere.
- the radical reaction with the said adhesion layer was performed by heating over time. After storage for 30 minutes, 180 ° peel test was performed at a speed of 300 mm / min under conditions of 23 ° C. and 50% relative humidity, using an RTC 1210 (manufactured by Orientec Co., Ltd.). Table 3 shows the results. In Examples 4 and 10-14, it is considered that the peel strength is high, and a strong bond (bonded body) is formed at the interface between the curing reactive elastomer and the adhesive tape.
- the cured silicone elastomer has adhesiveness derived from the organopolysiloxane resin and viscoelasticity as the elastomer, adhesion to the substrate is good, and it is integral with the substrate Even when cut, peeling does not occur at the time of dicing, and the entire surface of the base can be protected at the laminated portion. Furthermore, as confirmed for Examples 4 and 8-12, the cured silicone elastomer has radical reactivity with respect to the adhesive layer, and the radical reaction proceeds by heating at 150 ° C., and both are firmly integrated. It is possible to form an integrated conjugate and to separate both from the substrate as one.
- the cured silicone elastomer of Comparative Example 2 which does not contain the silicone gel or the organopolysiloxane resin of Comparative Example 1 is inferior in adhesion to the substrate, and when cut integrally with the substrate, the end thereof Since it exfoliates from the substrate (FIGS. 3 and 4), it does not function as a protective material for the exfoliated part, and is unsuitable as a protective material used particularly for applications involving cutting.
- the silicone cured product according to the present invention can be evaluated by the following method. For example, a solder resist is applied, and the silicone cured material layer of the present invention is formed on a substrate on which solders are arranged at equal intervals. After dicing by the above-mentioned method, the tape having the adhesive layer used in the example is attached onto each piece substrate and heated to integrate the silicone cured material layer and the tape. By separating the cured silicone layer from the substrate together with the tape, it was confirmed that it could be used as a protective material with no residue on the solder surface.
- the protective layer can be evaluated by the following method. For example, a metal is sputtered on each of the piece substrates prepared by the above-mentioned method using an ion coater (IB-3) manufactured by Eiko Engineering. After heating, the silicone cured material layer was separated from the substrate together with the tape, and it was confirmed that no metal was attached to the substrate surface covered with the silicone cured material layer.
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Abstract
Description
(A)一分子中に、少なくとも2個の硬化反応性基を有する鎖状オルガノポリシロキサン、
任意で、(B)オルガノハイドロジェンポリシロキサン、
(C1)前記の(A)成分および(B)成分の硬化剤、および
(D)オルガノポリシロキサンレジン (A)成分100質量部に対して10~1000質量部
を含有する組成物を硬化させてなり、かつ、当該硬化物中または硬化物表面に未反応の(C2)ラジカル開始剤を有することにより、ラジカル反応性を有するシリコーンエラストマー硬化物により、上記課題を解決できる事を見出し、本発明に到達した。このようなシリコーンエラストマー硬化物表面は、接着剤または粘着剤に対するラジカル反応性を有するため、所望の段階、たとえば、電子部品等の製造工程において、接着テープ/粘着テープのような接着/粘着剤層を備えたシート状部材と接触させて加熱や紫外線照射等によりラジカル反応させることにより、シリコーンエラストマー硬化物と接着/粘着剤層が一体化した接合体を形成し、これらを容易に剥離することができるためである。なお、上記のラジカル開始剤は、硬化前の硬化性シリコーン組成物中に配合し、低温等の硬化条件を設計することにより、未反応の状態でシリコーンエラストマー硬化物中に含有する態様が好ましいが、硬化後のシリコーンエラストマー硬化物表面にスプレー等で一部又は全部に塗布してもよい。ただし、硬化前の硬化性シリコーン組成物中に配合する態様に比べ、塗布工程が必要になる点で工程上不利になる場合がある。
[1] 以下の成分:
(A)一分子中に、少なくとも2個の硬化反応性基を有する鎖状オルガノポリシロキサン、
任意で、(B)オルガノハイドロジェンポリシロキサン、
(C1)前記の(A)成分および(B)成分の硬化剤、および
(D)オルガノポリシロキサンレジン (A)成分100質量部に対して10~1000質量部
を含有する組成物を硬化させてなり、かつ、当該硬化物中または硬化物表面に未反応の(C2)ラジカル開始剤を有することにより、ラジカル反応性を有するシリコーンエラストマー硬化物。
[2] シリコーンエラストマー硬化物表面が、接着剤または粘着剤に対するラジカル反応性を有し、23℃~100℃において、当該硬化物の損失係数tanδが、0.01~1.00の範囲にあり、貯蔵弾性率G’が、4.0×104~5.0×106Paの範囲であることを特徴とする、[1]に記載のシリコーンエラストマー硬化物。
[3] (C1)成分が、ヒドロシリル化反応触媒、縮合触媒および光重合開始剤から選ばれる1種類以上の硬化剤であり、
(C2)成分が、有機過酸化物を含有するラジカル開始剤である、[1]または[2]に記載のシリコーンエラストマー硬化物。
[4] (A)成分が、(A1)一分子中に、少なくとも2個のアルケニル基を有する直鎖状または分岐鎖状のオルガノポリシロキサンであり、
(B)成分が、(B1)一分子中に、少なくとも2個のケイ素原子結合水素原子を有するオルガノハイドロジェンポリシロキサンであり、
(C1)成分が、ヒドロシリル化反応触媒を含有する硬化反応触媒であり、
(C2)成分が、アルキル過酸化物であり、
(D)成分が、(D1)トリオルガノシロキシ単位(M単位)、ジオルガノシロキシ単位(D単位)、モノオルガノシロキシ単位(T単位)及びシロキシ単位(Q単位)の任意の組み合わせからなる樹脂状または網目状のオルガノポリシロキサンレジンであり、
組成物中の(A)成分中のアルケニル基1モルに対して、(B)成分中のケイ素原子結合水素原子が、0.5モル以上の範囲であることを特徴とする、[1]~[3]のいずれか1項に記載のシリコーンエラストマー硬化物。
[5] (D1)成分が、M単位及びQ単位の組み合わせからなり、Q単位に対するM単位のモル比が0.5~1.2の範囲にあるオルガノポリシロキサンレジンであることを特徴とする、[1]~[4]のいずれか1項に記載のシリコーンエラストマー硬化物。
[6] (A)~(D)成分の各成分が、(C2)成分が反応しない温度において硬化されてなる、[1]~[5]のいずれか1項に記載のシリコーンエラストマー硬化物。
[7] [6]において、(C2)成分が、アルキル過酸化物であり、硬化のための温度が100℃以下である、シリコーンエラストマー硬化物。
[8] 他の接着剤または粘着剤に対してラジカル反応性を有する、[1]~[7]のいずれか1項に記載のシリコーンエラストマー硬化物。
[9] 平均厚みが5 ~500μmの範囲にあるフィルム状またはシート状の形態である、[1]~[8]のいずれか1項に記載のシリコーンエラストマー硬化物。
[10] [1]~[9]のいずれか1項に記載のシリコーンエラストマー硬化物を含有する積層体。
[11] 基材、[1]~[9]のいずれか1項に記載のシリコーンエラストマー硬化物からなる層、接着層または粘着層を含有してなり、前記のシリコーンエラストマー硬化物からなる層と接着層または粘着層が対向した構造を有する、積層体。
[12] [1]~[9]のいずれか1項に記載のシリコーンエラストマー硬化物および前記のシリコーンエラストマー硬化物からなる層の少なくとも一方の面に対向した、剥離剤層を含有する積層体。
[13] [1]~[9]のいずれか1項に記載のシリコーンエラストマー硬化物からなる、電子部品用保護材。
[14] [10]~[12]のいずれか1項に記載の積層体であって、電子部品の製造に用いるもの。
[15] (L1)基材、
(L2)前記基材上に積層された[1]~[9]のいずれか1項に記載のシリコーンエラストマー硬化物、および
(L3)前記シリコーンエラストマー硬化物上に、接着層または粘着層を介して積層されたシート状部材を含有する積層体について、シリコーンエラストマー硬化物と接着層または粘着層とのラジカル反応後に、シート状部材、接着層または粘着層とともにシリコーンエラストマー硬化物を(L1)基材から分離することを特徴とする電子部品の製造方法。
[16] [15]の電子部品の製造方法であって、(L1)基材が電子部品またはその前駆体であり、(I)積層体に対する化学的ないし物理的処理を行う工程、
(II)工程(I)の後、シリコーンエラストマー硬化物と接着層または粘着層とのラジカル反応を行う工程、および
(III)工程(II)の後、シート状部材、接着層または粘着層とともにシリコーンエラストマー硬化物を(L1)基材から分離する工程
を備えることを特徴とする電子部品の製造方法。
[17] [15]または[16]に記載の電子部品の製造方法であって、ラジカル反応の前または後に、基材とシリコーンエラストマーを一体として切断する工程を備えることを特徴とする電子部品の製造方法。
[18][1]~[9]のいずれか1項に記載のシリコーンエラストマー硬化物を有する、電子部品製造用部材。
本発明のシリコーンエラストマー硬化物は、一定量のオルガノポリシロキサンレジンを含有していることで、柔軟かつ基材に対する高い密着性と追従性を示す。このため、当該シリコーンエラストマー硬化物を基材上に配置して両者を一体として切断した場合でも、当該硬化物が基材上から剥離せず、所望とする基材の面の全面を保護可能である。さらに、当該シリコーンエラストマー硬化物は、その表面がラジカル反応性であるので、加熱、高エネルギー線の照射等に応答して、接触している接着剤または粘着剤とラジカル反応を起こし、両者が一体化した接合体を形成するため、接着テープのように接着剤または粘着剤を含むシート状部材を用いることで、両者を一体として基材上から分離(除去)可能である。
ラジカル開始剤は、本発明にかかるシリコーンエラストマー硬化物にラジカル反応性を付与する成分であり、特に制限されないが、有機過酸化物、光重合開始剤またはこれらの組み合わせが好ましく、特に、過酸化アルキル類の使用が好ましい。
本発明にかかるシリコーンエラストマー硬化物は、オルガノポリシロキサンレジンを主剤である鎖状オルガノポリシロキサン100質量部に対して10~1000質量部の範囲で含有しているため、その表面が粘着力を有し、基材に対する密着性と追従性を示す。このため、当該シリコーンエラストマー硬化物は、基材から剥離ないし剥落しにくく、電子部品等の基材上に配置して当該シリコーンエラストマー硬化物と基材を一体として切断(ダイシング)した場合でも、基材への密着状態を維持し、その端部等が剥離しにくいため、保護を目的とした基材全面を確実に被覆できるため、電子部品等の基材に対する保護材として有用である。
本発明のシリコーンエラストマー硬化物は、
(A)一分子中に、少なくとも2個の硬化反応性基を有する鎖状オルガノポリシロキサン、
任意で、(B)オルガノハイドロジェンポリシロキサン、
(C1)前記の(A)成分および(B)成分の硬化剤、および
(D)オルガノポリシロキサンレジン (A)成分100質量部に対して10~1000質量部
を含有する硬化性シリコーン組成物を硬化させてなるシリコーンエラストマー硬化物であり、さらに、
(C2)ラジカル開始剤を組成物中に含有するか、シリコーンエラストマー硬化物の表面に塗布することにより、未反応のラジカル開始剤に由来するラジカル反応性を有するものである。ここで、(B)成分は、(A)成分の硬化反応性基がアルケニル基等の炭素―炭素二重結合含有有機基であり、(C)成分がヒドロシリル化反応触媒である場合、必須となる成分であるが、他の硬化機構を採用する場合には必ずしも必要ではない。
(A)成分は一分子中に、少なくとも2個の硬化反応性基を有する鎖状オルガノポリシロキサンであり、直鎖状オルガノポリシロキサンまたは分子内に2個以下のRSiO3/2単位(T単位)(式中、Rは互いに独立して、一価有機基または水酸基)またはSiO4/2単位(Q単位)を有する分岐鎖状オルガノポリシロキサン、または環状オルガノポリシロキサンが例示され、好適には、一分子中に、少なくとも2個の硬化反応性基を有する直鎖状のオルガノポリシロキサンである。(A)成分の室温における性状はオイル状または生ゴム状であってもよく、(A)成分の粘度は25℃において50mPa・s以上、特に100mPa・s以上であることが好ましい。特に、硬化性シリコーン組成物が溶剤型である場合には、(A)成分は、25℃において100,000mPa・s以上の粘度を有するか、可塑度を有する生ゴム状であることが好ましい。但し、より低粘度の(A)成分であっても、利用可能である。
上式中、R1は同じかまたは異なる、脂肪族不飽和結合を有さない一価炭化水素基であり、メチル基またはフェニル基が好ましい。R2はアルキル基であり、脱アルコール縮合反応性のアルコキシ基を構成するため、メチル基、エチル基またはプロピル基であることが好ましい。R3はケイ素原子に結合するアルキレン基であり、炭素原子数2~8のアルキレン基が好ましい。aは0~2の整数であり、pは1~50の整数である。脱アルコール縮合反応性の見地から、最も好適には、aは0であり、トリアルコキシシリル基含有基であることが好ましい。なお、上記のアルコキシシリル基含有基に加えて、ヒドロシリル化反応性の官能基または光重合反応性の官能基を同一分子内に有してもよい。
上記のとおり、(B)成分は、硬化性シリコーン組成物の硬化反応がヒドロシリル化硬化反応であり、(A)成分中の硬化反応性基がアルケニル基である場合に必須となる架橋剤であり、オルガノハイドロジェンポリシロキサン、特に、一分子中に、少なくとも2個のケイ素原子結合水素原子を有するオルガノハイドロジェンポリシロキサンである。なお、本発明にかかるシリコーンエラストマー硬化物が他の硬化反応により得られる場合、(B)成分は任意成分である。
(C1)成分は、前記の(A)成分および(B)成分の硬化剤であり、(A)成分中の硬化反応性基および硬化性シリコーン組成物の硬化反応機構に応じて選択される。なお、(C1)成分として、過酸化物等のラジカル開始剤を用いることも可能であるが、本発明の目的はラジカル反応性を有するシリコーンエラストマー硬化物を得ることであるため、(A)成分および(B)成分の架橋反応について過剰量のラジカル開始剤を配合するか、硬化後のシリコーンエラストマー硬化物に別途ラジカル開始剤を塗布しない場合、(C1)成分としてラジカル開始剤を利用しないことが好ましい
(C2)成分は、ラジカル開始剤であり、先に述べた成分と同様である。特に、(C1)成分が、ヒドロシリル化反応触媒を含有する硬化反応触媒であり、(C2)成分が、アルキル過酸化物である組み合わせが好ましい。
(D)成分は、オルガノポリシロキサンレジンであり、本発明にかかるシリコーンエラストマー硬化物に接着性/粘着性を付与することで、基材への追従性と密着性を向上させ、基材およびシリコーンエラストマー硬化物を一体として切断する場合であっても、基材表面からの剥離や剥落が生じず、保護材として目的とする基材表面全面を被覆し、化学的ないし物理的処理から保護できる利点を有する。
本発明のシリコーンエラストマー硬化物は、好適には、さらに、補強性フィラーを含む。補強性フィラーは、シリコーンエラストマー硬化物の機械的強度を改善し、高い保型性と適度な硬度を保つことができる。さらに、補強性フィラーの配合により、ラジカル反応後のシリコーンエラストマー硬化物の表面離型性がさらに改善される場合がある。このような補強性フィラーとしては、例えば、ヒュームドシリカ微粉末、沈降性シリカ微粉末、焼成シリカ微粉末、ヒュームド二酸化チタン微粉末、石英微粉末、炭酸カルシウム微粉末、ケイ藻土微粉末、酸化アルミニウム微粉末、水酸化アルミニウム微粉末、酸化亜鉛微粉末、炭酸亜鉛微粉末等の無機質充填剤を挙げることができ、これらの無機質充填剤をメチルトリメトキシシラン等のオルガノアルコキシシラン、トリメチルクロロシラン等のオルガノハロシラン、ヘキサメチルジシラザン等のオルガノシラザン、α,ω-シラノール基封鎖ジメチルシロキサンオリゴマー、α,ω-シラノール基封鎖メチルフェニルシロキサンオリゴマー、α,ω-シラノール基封鎖メチルビニルシロキサンオリゴマー等のシロキサンオリゴマー等の処理剤により表面処理した無機質充填剤を含有してもよい。その配合量は、シリコーンエラストマー硬化物全体を100質量部とした場合、0.0~20.0質量部の範囲であり、1.0~10.0質量部範囲が好ましい。なお、内部が中空になっているフィラー類を使用してもよく、これらの中空フィラーは上記のラジカル反応等に伴う加熱により膨張してシリコーンエラストマー硬化物の基材からの剥離が容易になる場合がある。
本発明の技術的効果を損なわない範囲において、上記の硬化性シリコーン組成物およびシリコーンエラストマー硬化物は、上記成分以外の成分を含むことができる。例えば、硬化遅延剤;接着付与剤;ポリジメチルシロキサンまたはポリジメチルジフェニルシロキサンなどの非反応性のオルガノポリシロキサン;フェノール系、キノン系、アミン系、リン系、ホスファイト系、イオウ系、またはチオエーテル系などの酸化防止剤;トリアゾール系またはベンゾフェノン系などの光安定剤;リン酸エステル系、ハロゲン系、リン系、またはアンチモン系などの難燃剤;カチオン系界面活性剤、アニオン系界面活性剤、または非イオン系界面活性剤などからなる1種類以上の帯電防止剤;染料;顔料;熱伝導性フィラー;誘電性フィラー;電気伝導性フィラー;離型性成分などを含むことができる。
本発明のシリコーンエラストマー硬化物は、硬化物中またはその硬化物表面に未反応のラジカル開始剤を有するため、各種の接着剤または粘着剤に対するラジカル反応性を有し、当該ラジカル反応により、接着剤または粘着剤と一体化した硬化物を形成する。この硬化物において、ラジカル反応後のシリコーンエラストマー硬化物と接着剤または粘着剤とは、強固に接着した接合体を形成しており、両者を一体として剥離することができる。
本発明のシリコーンエラストマー硬化物は、基材との密着性に優れ、柔軟で低弾性率、低応力かつ応力緩衝性に優れ、かつ電子部品等の基材上に配置した状態で両者を一体として切断した場合でもその端部等で剥離しないことから、各種電子部品用保護材として利用可能である。また、上記保護の役割を果たした後は、接着テープ等と共にラジカル反応させることにより、当該テープと一体化した接合体として、容易に基材である電子部品上から分離(除去)可能である。
また、本発明のシリコーンエラストマー硬化物は、接着剤、シーリング材、ポッティング材としても用いることができ、封止剤としての利用にも適する。このような用途は、建築用部材や、電気・電子部品や車両用部品などを含むものであるが特に、本発明のシリコーンエラストマー硬化物は、電子部品の製造に用いる接着剤または封止剤として用いることができる。
本発明のシリコーンエラストマー硬化物は、特に、電子部品の製造に有用であり、各種基材上にシリコーンエラストマー硬化物層を形成して、安定かつ平坦で、応力緩和性に優れた保護層として用いることもできる。これらの保護層として機能は、シリコーンエラストマー硬化物の強度および弾力に由来する物理的な衝撃に対する保護、シリコーンの耐熱性と耐寒性に由来する加熱や温度変化に対する保護、および電子部品に対する各種の化学的または物理的な処理に対する保護(部分的な被覆により、当該保護面に対する処理を回避した設計含む)を含むものである。また、前記のとおり、当該保護層は、容易に電子部品上に形成でき、かつ、容易に除去可能である。
具体的には、本発明のシリコーンエラストマー硬化物は、電子部品を製造するための積層体を構成するシリコーンエラストマー硬化物層として有用であり、以下、当該積層体に付いて説明する。
シリコーンエラストマー硬化物層を積層する基材は凹凸があってよく、シリコーンエラストマー硬化物層により当該凹凸が隙間なく充填乃至追従され、平坦なシリコーンエラストマー硬化物層を形成していることが特に好ましい。本発明のシリコーンエラストマー硬化物層は柔軟で変形性、追従性、密着性に優れるため、凹凸のある基材に対しても間隙を生じにくく、乖離やシリコーンエラストマー硬化物表面の変形などの問題を生じにくいという利点がある。シリコーンエラストマー硬化物層を積層する目的は特に制限されるものではないが、基材が電子部品である場合、当該シリコーンエラストマー層の積層箇所を各種処理から選択的に保護できるほか、柔軟なシリコーンエラストマー硬化物層により物理的な衝撃・振動からの保護等を図ってもよい。
本発明の積層体は、上記の通り、基材として1個以上の電子部品を有することが好ましい。電子部品は、特にその種類は制限されるものではないが、半導体チップの素体となる半導体ウェハ、セラミックス素子(セラミックコンデンサ含む)、半導体チップおよび発光半導体チップが例示され、同一または異なる2個以上の電子部品の上にシリコーンエラストマー層が配置されたものであってもよい。本発明の積層体におけるシリコーンエラストマー層は、適度に柔軟かつ追従性・変形性に優れるため、安定かつ平坦な面を形成することができ、さらに、当該シリコーンエラストマー硬化物が積層面を各種処理から選択的に保護するほか、電子部品の製造工程における振動や衝撃を緩和するため、当該シリコーンエラストマー硬化物を積層した電子部品を定位置に安定的に保持し、電子部品に対して各種パターン形成等の処理およびダイシング等の加工処理を行った場合であっても、基材の表面凹凸や電子部品の位置ずれ、振動変位(ダンピング)に伴う電子部品の加工不良が発生しにくいという利点を有する。なお、シリコーンエラストマー硬化物による電子部品等の保持は、そのエラストマー由来の弾性およびオルガノポリシロキサンレジンに由来する密着性によるものであり、エラストマー自体の粘着力によるものとその変形による電子部品の担持の両方を含む。
これらの電子部品は、積層体を形成する前に化学的または物理的な処理が行われていてもよく、電子部品にシリコーンエラストマー硬化物を積層した後に、上記処理を行うものであっても良い。ここで、電子部品のうち、本発明のシリコーンエラストマー硬化物を積層した箇所は、これらの処理から選択的に保護されうるため、所望とする化学的または物理的処理を、電子部品の特定箇所のみに施すことが可能である。特に、本発明では、シリコーンエラストマーが局所的、ピンポイントであっても、効率よくその硬化物を分離できるため、電子部品の選択的な保護に特に有用である。これらの電子部品への処理は、少なくとも部分的に電子回路または電極パターン、導電膜、絶縁膜等を形成する事が含まれるが、これらに限定されるものではない。上記処理にあたっては、従来公知の手段を特に制限なく用いることができ、真空蒸着法、スパッタ法、電気めっき法、化学めっき法(無電解めっき法含む)、エッチング法、印刷工法またはリフトオフ法に形成されていてもよい。本発明の積層体を電子部品の製造に用いる場合、シリコーンエラストマー硬化物を積層した上で、電子部品の電子回路、電極パターン、導電膜、絶縁膜等を形成することが特に好ましく、任意で当該積層体を個片化(ダイシング)してもよい。上記のとおり、シリコーンエラストマー硬化物層を用いることで、これらの電子部品の加工不良が抑制される。なお、処理に当たっては、基材である電子部品とシリコーンエラストマー硬化物層の上下左右関係は所望により選択することができる。
シート状部材は、少なくとも部分的に接着層または粘着層を備えており、前記の硬化反応性シリコーンエラストマー硬化物上に、接着層または粘着層を介して積層されることを特徴とする。当該接着層または粘着層を介してシリコーンエラストマー硬化物と密着していることで、シリコーンエラストマー硬化物に対するラジカル反応を進行させる際に、シート状部材と当該硬化物は接合体を形成し、実質的に一体として基材上から分離することができる。シリコーンエラストマー硬化物のラジカル反応物は、分離に用いる機械装置の種類により、破損の問題や剥離工程の複雑化といった問題の原因になりうるものであるが、シート状部材と一体化したシリコーンエラストマー硬化物のラジカル反応物は、局所的乃至ピンポイントであっても容易に分離でき、かつ、簡便、迅速かつ確実に基材上から分離することができ、特に工業的生産工程において、作業時間の短縮および工数の削減という著しい優位性を実現する。
本発明の積層体は、基材上に前記シリコーンエラストマー硬化物、および接着層を介してシート状部材を積層してなるものであり、所望により、シリコーンエラストマー硬化物の原料組成物である硬化性シリコーン組成物を目的となる基材上に塗布し、ラジカル反応性を維持した状態でエラストマー状に硬化させることで製造可能である。
剥離層を備えたシート状基材(基材R)にラジカル反応性のシリコーンエラストマー硬化物を形成させ、後に剥離層から分離してシート状の部材として取り扱う場合、以下の方法により、均一な表面を有するシリコーンエラストマー硬化物層を形成させてもよい。剥離層を備えたシート状基材(基材R)は、実質的に平坦であり、テープ、フィルム等の用途に応じて適度な幅と厚みを持った基材を特に制限なく使用することができ、特に、厚さ5~300μm程度の合成樹脂フィルム(PETフィルム等)である。また、剥離層を形成させるために用いる剥離剤としては、例えばオレフィン系樹脂、イソプレン系樹脂、ブタジエン系樹脂などのゴム系エラストマー、長鎖アルキル系樹脂、アルキド系樹脂、フッ素系樹脂、シリコーン系樹脂などが用いられる。特に、シリコーン系樹脂からなる剥離剤の使用が好ましく、フルオロアルキル基を含有するフッ素変性シリコーン樹脂を含有する剥離剤の使用が特に好ましい。
本発明にかかるシリコーンエラストマー硬化物層は実質的に平坦であることが好ましいが、その原料となる硬化性シリコーン組成物を、通常の方法で剥離層を有する基材上に塗布すると、特に硬化後のシリコーンエラストマー硬化物層の厚みが50μm以上となる場合には、その塗布面が凹んだ不均一な表面を形成して、得られるシリコーンエラストマー硬化物層表面が不均一となる場合がある。しかしながら、当該硬化性シリコーン組成物およびシリコーンエラストマー硬化物層に対して剥離層を有する基材を適用し、未硬化の塗布面を各々の剥離層を備えたシート状基材(上記の基材R;セパレータ)で挟み込み、物理的に均一化された平坦化層を形成することで、平坦化されたシリコーンエラストマー硬化物層を得ることができる。なお、上記の平坦化層の形成にあたっては、剥離層を有するセパレータ間に未硬化の硬化性シリコーン組成物が塗布されてなる積層体を、ロール圧延等の公知の圧延方法を用いて圧延加工することが好ましい。この場合、剥離層を備えたシート状基材により、硬化後のシリコーンエラストマー硬化物層が挟持された構造が好ましく、2枚のシリコーン系樹脂からなる剥離剤からなる剥離層を備えたシート状基材により挟持された構造が好ましい。
上記のとおり、本発明の積層体は電子部品の製造に有用であり、基材である電子部品上にシリコーンエラストマー硬化物を形成して、安定かつ平坦で、応力緩和性に優れた電子部品の配置面を形成することにより、その後に当該電子部品に対して化学的乃至物理的処理を行った場合であっても、当該シリコーンエラストマー硬化物を積層した部分は、各種処理から選択的に保護され、かつ、電子部品の製造時における基材の表面凹凸や電子部品の位置ずれ、振動変位(ダンピング)に伴う電子部品の加工不良が発生しにくいという利益を実現しうる。また、前記のシート状部材が接着層または粘着層を介して積層されたシリコーンエラストマー硬化物についてラジカル反応を進行させることにより、当該シート状部材、シリコーンエラストマー硬化物と接着層または粘着層のラジカル反応物が接合して一体化し、シリコーンエラストマー硬化物のみを硬化させた場合には硬化物の効率的な剥離が難しいような局所的な配置であっても、両者をほぼ同時に、簡便、迅速、かつ、確実に電子部品上から分離することができ、しかもシリコーンエラストマー硬化物等の残留物(糊残り)に由来する不良品が発生しにくいという利点を有する。
工程(I):電子部品、シリコーンエラストマー硬化物および接着層または粘着層を有するシート状部材を有する積層体を作成する工程、
工程(II):工程(I)の後、電子部品に対して、1種類以上の化学的乃至物理的処理(電子回路の形成、電極パターンの形成、導電膜の形成 および絶縁膜の形成から選ばれる1種類以上の処理を含むが、これらに限定されない)を行う工程、
工程(III):工程(II)の後、シリコーンエラストマー硬化物と接着層または粘着層とのラジカル反応を行う工程、
工程(IV):工程(III)の後、シート状部材、シリコーンエラストマー硬化物と接着層または粘着層との接合体を、実質的に同時に電子部品から分離する工程
を有するものである。なお、工程(I)における積層体の形成工程は任意であり、硬化性シリコーン組成物を基材である電子部品上に塗布してエラストマー状に硬化させてもよく、別途形成したシリコーンエラストマー硬化物を基材である電子部品上に転写しても良い。
工程(I’):電子部品上にシリコーンエラストマー硬化物を積層する工程、
工程(II’):工程(I’)の後、電子部品に対して、1種類以上の化学的乃至物理的処理(電子回路の形成、電極パターンの形成、導電膜の形成 および絶縁膜の形成から選ばれる1種類以上の処理を含むが、これらに限定されない)を行う工程、
工程(III’):工程(II)の後、シリコーンエラストマー硬化物上に接着層を有するシート状部材を積層する工程 、
工程(IV’):工程(III’)の後、シリコーンエラストマー硬化物と接着層または粘着層とのラジカル反応を行う工程、
工程(V’):工程(IV’)の後、シート状部材、シリコーンエラストマー硬化物と接着層または粘着層との接合体を、実質的に同時に電子部品から分離する工程。
電子部品については[電子部品を含む積層体]の項にて説明した通りであり、本発明の電子部品の製造方法においては、シリコーンエラストマー硬化物を積層した後に当該電子部品上に電子回路、電極パターン、導電膜、絶縁膜等を形成する工程を有してよく、かつ好ましい。また、任意で、当該積層体または電子部品を切断により個片化(ダイシング)してもよい。特に、本発明のシリコーンエラストマー硬化物は、基材に対する追従性と密着性に優れ、切断による剥離を起こしにくいため、ラジカル反応の前または後に、基材とシリコーンエラストマーを一体として切断する工程を備える電子部品の製造方法において、特に好適である。
・成分(A1-1):両末端ビニルジメチルシロキシ基封鎖ジメチルシロキサンポリマー(ビニル基の含有量:0.13重量%)
・成分(A1-2):両末端トリメチルシロキシ基封鎖ジメチルシロキサン-ビニルメチルシロキサンコポリマー (ビニル基の含有量: 約0.29重量%)
・成分(A1-3):両末端ビニルジメチルシロキシ基封鎖ジメチルシロキサンポリマー (ビニル基の含有量: 約1.53重量%)
・成分(A1-4):両末端ビニルジメチルシロキシ基封鎖ジメチルシロキサンポリマー (ビニル基の含有量: 約0.23重量%)
・成分(A1-5):両末端ビニルジメチルシロキシ基封鎖ジメチルシロキサンポリマー (ビニル基の含有量: 約0.45重量%)
<オルガノハイドロジェンポリシロキサン>
・成分(B1):両末端ハイドロジェンジメチルシロキシ基封鎖ジメチルシロキサンポリマー(ケイ素結合水素基の含有量: 0.12重量%)
・成分(B2):両末端ハイドロジェンジメチルシロキシ基封鎖ジメチルシロキサンポリマー(ケイ素結合水素基の含有量:: 0.07重量%)。
・成分(B3):両末端トリメチルシロキシ基封鎖ジメチルシロキサン-ハイドロジェンメチルシロキサンポリマー(ケイ素結合水素基の含有量:: 0.78重量%)。
<硬化剤>
・成分(C1):白金-ジビニルテトラメチルジシロキサン錯体のビニルシロキサン溶液(白金金属濃度で約0.6重量%)
<ラジカル開始剤>
・成分(C2):2,5-ジメチル-2,5-ジ(t-ブチルパーオキシ)ヘキサン-両末端トリメチルシロキシ基封鎖シロキサンポリマー混合物(2,5-ジメチル-2,5-ジ(t-ブチルパーオキシ)ヘキサン濃度で約50重量%)
<オルガノポリシロキサンレジン>
・成分(D1):トリメチルシロキシ単位(M単位)およびSiO4/2単位(Q単位)からなり、前記のM単位/Q単位のモル比が0.8であるオルガノポリシロキサンレジン。
・成分(D2):トリメチルシロキシ単位(M単位)、ビニルジメチルシロキシ(MVi単位)およびSiO4/2単位(Q単位)からなるオルガノポリシロキサンレジン (ビニル基の含有量: 約4.1重量%)
・成分(D3):ハイドロジェンジメチルシロキシ単位(M単位)およびSiO4/2単位(Q単位)からなるオルガノポリシロキサンレジン (ケイ素結合水素基の含有量: 約0.97重量%)
<ヒドロシリル化反応抑制剤>
・インヒビター:1,3,5,7-テトラメチル-1,3,5,7-テトラビニル-シクロテトラシロキサン(ビニル基の含有量:30.2重量%)
<補強性フィラー>
・シリカ:ヘキサメチルジシラザン処理シリカ微粒子(日本アエロジル製、商品名「アエロジル200V」を表面処理したもの)
表1に記載の組成および同表に記載の重量部で、上記の各成分を配合し、実施例1~14のシリコーンエラストマー硬化物を得るための硬化性シリコーン組成物を調製した。その際、組成物中のビニル基1モル当たり、成分(B1)のケイ素原子結合水素原子(Si-H)が0.9,1.2または1.3モルとなるように設計した。
表2に記載の組成および同表に記載の重量部で、上記の各成分を配合し、比較例1にかかる硬化性シリコーン組成物を調製した。その際、組成物中のビニル基1モル当たり、成分(B2)のケイ素原子結合水素原子(Si-H)が0.56モルとなる量となるように設計した。なお、比較例1にかかる組成物は、シリコーンエラストマー硬化物ではなく、シリコーンゲルの形成を目的とした組成物である。
表2に記載の組成および同表に記載の重量部で、上記の各成分を配合し、比較例2にかかる硬化性シリコーン組成物(ラジカル開始剤およびオルガノポリシロキサンレジンを含まない組成)を調製した。その際、組成物中のビニル基1モル当たり、成分(B1)のケイ素原子結合水素原子(Si-H)が1.20モルとなる量となるように設計した。
上記の方法で調製した硬化性シリコーン組成物を80℃で1~2時間かけて加熱することにより、ヒドロシリル化反応を進行させて弾性体であるエラストマー状の硬化物を得た。なお、前記の反応温度は、成分(C2)であるラジカル開始剤の分解温度未満であり、大部分のラジカル開始剤は未反応でシリコーンエラストマー硬化物中に残存する条件を選択している。さらに、窒素雰囲気下150℃で1時間加熱することで、ラジカル開始剤を分解させ、エラストマー状の硬化物を得た。
上記の方法で調製した硬化性シリコーン組成物を80℃で1~2時間かけて加熱することにより、ヒドロシリル化反応を進行させた。結果、比較例1では弾性体のエラストマー硬化物ではなく、シリコーンゲルを形成した。一方、比較例2では、ヒドロシリル化反応の進行により、弾性体であるエラストマー状の硬化物を得た。なお、前記の反応温度は、成分(C2)であるラジカル開始剤の半減期温度未満であり、比較例1において、大部分のラジカル開始剤は未反応でシリコーンゲル中に残存する条件を選択している。
1.圧縮変形量測定
表1または2に示す組成の硬化性シリコーン組成物をガラス製シャーレー(直径70mm)に、18g投入し、実施例または比較例について、先に述べた条件でヒドロシリル化反応を進行させて得たシリコーンエラストマー硬化物またはシリコーンゲルを使用した。テクスチャーアナライザー TA.XT Plus(英弘精機株式会社製)を用いて室温で測定を行った。平坦プローブ(6mm直径)を毎秒0.17mmの速度で降下させて、最大圧縮力0.5Nに達成後の硬化物の圧縮変形量を測定した。値を表1または表2に示す。
上記の圧縮変形量の測定に用いた試料について、同装置の平坦プローブを硬化物の初期の厚み以上の高さまで毎秒0.34mmの速度で上昇させて、平坦プローブを引き剥がす際にかかる荷重(絶対値)を粘着力(N)として測定した。なお、この値が高いほど、試料の粘着力があることを意味する。その測定値を表1または表2に示す。
[実施例1~14、比較例2]
表1または2に示す組成の硬化性シリコーン組成物を厚さ約1.5mmとなるように金型に投入し、先に述べた条件でヒドロシリル化反応を進行させてシリコーンエラストマー硬化物を得た。同硬化物から直径8mmとなるように試験体を切り出し、測定試料として使用した。MCR302粘弾性測定装置(Anton Paar社製)を用い、直径8mmのパラレルプレートに、切り出した測定試料を貼り付け、周波数1Hzおよびひずみ0.2%での貯蔵弾性率と損失正接(損失弾性率/貯蔵弾性率)の測定を行った。23℃における値を表1または表2に示す。
[比較例1]
比較例1はシリコーンゲルを形成するため、ひずみ0.5%とした他は上記比較例2同様にして23℃で測定を行った。値を表2に示す。
実施例4および10に関して、上述の条件で硬化物を作製した。JIS-K6249に基づき、得られた硬化物の引裂強さを測定し、また引張強さおよび破断伸びを測定し、モジュラスを求めた。なお、機械的強度の測定のため、シートの厚さは2mmとした。また、実施例8については厚さ6mmシートのデュロメータA硬度を測定した。表3および4に実施例4および8のそれぞれの結果を示す。
表1または2に示す組成の硬化性シリコーン組成物をGDE-100スピンコーター(島津製作所製)で、5000rpmで15分間かけて基板上に約10~20μm厚もしくは約50μm厚となるようにコートした。その後、先に述べた条件でヒドロシリル化反応を進行させてシリコーンエラストマー硬化物またはシリコーンゲルであるシリコーン層を作製した。DAD322ダイサー(DISCO社製)を用いて、回転数20,000rpm、速度30mm/sの条件で基板のダイシングを行った。その後、光学顕微鏡(KEYENCE社製 VHX-6000)を使用して基板上面を観察し、シリコーン層の基板からの剥がれを評価した。シリコーン層の基板の剥がれが認められないもしくはほぼ認められない場合を○とし、剥がれが認められ基材露出しているものを×とした。表中に○×を示す。また、実施例4、実施例10、比較例1および比較例2について光学顕微鏡写真を図1、2、3および4に図面で示した。
アルミ基板上にプライマーXおよびY(共に東レ・ダウコーニング社製)を薄膜塗布した。その上に実施例4、10-14に記載の硬化前液状シリコーン組成物を約230μmとなるように塗布し、先に述べた条件でヒドロシリル化反応を進行させてシリコーンエラストマー硬化物を得た。さらに、得られたエラストマー硬化物上に、シリコーン系粘着層を有する粘着テープ(耐熱性めっきマスキング用ポリエステル基材シリコーン粘着テープ No.336、日東電工社製)を張り合わせ、窒素雰囲気下150℃で1時間かけて加熱することにより当該粘着層とのラジカル反応を行った。30分保存後、RTC1210(オリエンテック社製)を用いて、23℃、相対湿度50%の条件で、300mm/minの速度で180度ピール試験を行った。表3に結果を示す。
実施例4および10-14では、ピール強度が高く、硬化反応性エラストマーと粘着テープ界面で強固な結合(接合体)が形成されていると考えられる。
Claims (18)
- 以下の成分:
(A)一分子中に、少なくとも2個の硬化反応性基を有する鎖状オルガノポリシロキサン、
任意で、(B)オルガノハイドロジェンポリシロキサン、
(C1)前記の(A)成分および(B)成分の硬化剤、および
(D)オルガノポリシロキサンレジン (A)成分100質量部に対して10~1000質量部
を含有する組成物を硬化させてなり、かつ、当該硬化物中または硬化物表面に未反応の(C2)ラジカル開始剤を有することにより、ラジカル反応性を有するシリコーンエラストマー硬化物。 - シリコーンエラストマー硬化物表面が、接着剤または粘着剤に対するラジカル反応性を有し、23℃~100℃において、当該硬化物の損失係数tanδが、0.01~1.00の範囲にあり、貯蔵弾性率G’が、4.0×104~5.0×106Paの範囲であることを特徴とする、請求項1に記載のシリコーンエラストマー硬化物。
- (C1)成分が、ヒドロシリル化反応触媒および縮合触媒から選ばれる1種類以上の硬化剤であり、
(C2)成分が、有機過酸化物を含有するラジカル開始剤である、請求項1または請求項2に記載のシリコーンエラストマー硬化物。 - (A)成分が、(A1)一分子中に、少なくとも2個のアルケニル基を有する直鎖状または分岐鎖状のオルガノポリシロキサンであり、
(B)成分が、(B1)一分子中に、少なくとも2個のケイ素原子結合水素原子を有するオルガノハイドロジェンポリシロキサンであり、
(C1)成分が、ヒドロシリル化反応触媒を含有する硬化反応触媒であり、
(C2)成分が、アルキル過酸化物であり、
(D)成分が、(D1)トリオルガノシロキシ単位(M単位)、ジオルガノシロキシ単位(D単位)、モノオルガノシロキシ単位(T単位)及びシロキシ単位(Q単位)の任意の組み合わせからなる樹脂状または網目状のオルガノポリシロキサンレジンであり、
組成物中の(A)成分中のアルケニル基1モルに対して、(B)成分中のケイ素原子結合水素原子が、0.5モル以上の範囲であり、
上記の(A1)~(D1)成分を含む硬化性シリコーン組成物を硬化してなることを特徴とする、請求項1~請求項3のいずれか1項に記載のシリコーンエラストマー硬化物。 - (D1)成分が、M単位及びQ単位の組み合わせからなり、Q単位に対するM単位のモル比が0.5~1.2の範囲にあるオルガノポリシロキサンレジンであることを特徴とする、請求項1~請求項4のいずれか1項に記載のシリコーンエラストマー硬化物。
- (A)~(D)成分の各成分が、(C2)成分が反応しない温度において硬化されてなる、請求項1~請求項5のいずれか1項に記載のシリコーンエラストマー硬化物。
- 請求項6において、(C2)成分が、アルキル過酸化物であり、硬化のための温度が100℃以下である、シリコーンエラストマー硬化物。
- 他の接着剤または粘着剤に対してラジカル反応性を有する、請求項1~請求項7のいずれか1項に記載のシリコーンエラストマー硬化物。
- 平均厚みが5 ~500μmの範囲にあるフィルム状またはシート状の形態である、請求項1~請求項8のいずれか1項に記載のシリコーンエラストマー硬化物。
- 請求項1~請求項9のいずれか1項に記載のシリコーンエラストマー硬化物を含有する積層体。
- 基材、請求項1~請求項9のいずれか1項に記載のシリコーンエラストマー硬化物からなる層、接着層または粘着層を含有してなり、前記のシリコーンエラストマー硬化物からなる層と接着層または粘着層が対向した構造を有する、積層体。
- 請求項1~請求項9のいずれか1項に記載のシリコーンエラストマー硬化物および前記のシリコーンエラストマー硬化物からなる層の少なくとも一方の面に対向した、剥離剤層を含有する積層体。
- 請求項1~請求項9のいずれか1項に記載のシリコーンエラストマー硬化物からなる、電子部品用保護材。
- 請求項10~請求項12のいずれか1項に記載の積層体であって、電子部品の製造に用いるもの。
- (L1)基材、
(L2)前記基材上に積層された請求項1~請求項9のいずれか1項に記載のシリコーンエラストマー硬化物、および
(L3)前記シリコーンエラストマー硬化物上に、接着層または粘着層を介して積層されたシート状部材を含有する積層体について、シリコーンエラストマー硬化物と接着層または粘着層とのラジカル反応後に、シート状部材、接着層または粘着層とともにシリコーンエラストマー硬化物を(L1)基材から分離することを特徴とする電子部品の製造方法。 - 請求項15の電子部品の製造方法であって、(L1)基材が電子部品またはその前駆体であり、(I)積層体に対する化学的ないし物理的処理を行う工程、
(II)工程(I)の後、シリコーンエラストマー硬化物と接着層または粘着層とのラジカル反応を行う工程、および
(III)工程(II)の後、シート状部材、接着層または粘着層とともにシリコーンエラストマー硬化物を(L1)基材から分離する工程
を備えることを特徴とする電子部品の製造方法。 - 請求項15または請求項16に記載の電子部品の製造方法であって、ラジカル反応の前または後に、基材とシリコーンエラストマー硬化物を一体として切断する工程を備えることを特徴とする電子部品の製造方法。
- 請求項1~請求項9のいずれか1項に記載のシリコーンエラストマー硬化物を有する、電子部品製造用部材。
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CN111247183A (zh) | 2020-06-05 |
TW201920488A (zh) | 2019-06-01 |
KR20200051665A (ko) | 2020-05-13 |
EP3683246A4 (en) | 2021-06-23 |
US11981814B2 (en) | 2024-05-14 |
JP7228519B2 (ja) | 2023-02-24 |
KR102673414B1 (ko) | 2024-06-13 |
EP3683246A1 (en) | 2020-07-22 |
JPWO2019049950A1 (ja) | 2020-11-26 |
TWI784048B (zh) | 2022-11-21 |
US20200277492A1 (en) | 2020-09-03 |
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