WO2019015554A1 - 热交换装置及其热交换方法与气相沉积设备 - Google Patents
热交换装置及其热交换方法与气相沉积设备 Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
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- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
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Abstract
Description
Claims (17)
- 一种热交换装置,用于对待冷却目标物进行降温处理,其特征在于,包括热交换器、冷却水路、循环水路、切换器,所述冷却水路用于实现冷却水与所述热交换器的热交换,所述循环水路用于对所述待冷却目标物进行温度控制,所述切换器用于断开所述循环水路与所述待冷却目标物的连接,同时实现所述冷却水路与所述待冷却目标物的连接。
- 如权利要求1所述的热交换装置,其特征在于,所述冷却水路包括与所述热交换器相连接的冷却水进水管、冷却水出水管;所述循环水路包括循环水出水管、循环水回水管,所述热交换器、所述循环水出水管、所述待冷却目标物和所述循环水回水管串联形成回路。
- 如权利要求2所述的热交换装置,其特征在于,所述切换器包括第一切换器和第二切换器,其中,所述第一切换器设置在所述冷却水进水管和所述循环水出水管之间且用于断开一部分所述循环水出水管与所述待冷却目标物的连接,并同时接通所述冷却水进水管和所述待冷却目标物;所述第二切换器设置在所述冷却水出水管和所述循环水回水管之间且用于断开所述冷却水出水管和所述热交换器的连接,并同时接通所述冷却水出水管与所述待冷却目标物。
- 如权利要求3所述的热交换装置,其特征在于,所述第一切换器和所述第二切换器均为三通阀。
- 如权利要求4所述的热交换装置,其特征在于,所述循环水回水管包括第一循环水回水管和第二循环水回水管,所述循环水出水管包括第一循环水出水管和第二循环水出水管;所述第一循环水出水管的第一端连接所述热交换器,所述第一循环水出水管的第二端连接所述第一切换器;所述第二循环水出水管的第一端连接所述第一切换器,所述第二循环水出水管的第二端连接所述待冷却目标物;所 述冷却水进水管通过第一支路连接所述第一切换器;所述第一循环水回水管的第一端连接所述第二切换器,所述第一循环水回水管的第二端连接所述待冷却目标物;所述第二循环出进水管路的第一端连接所述热交换器,所述第二循环出进水管路的第二端连接所述第二切换器;所述冷却水出水管通过第二支路连接所述第二切换器。
- 如权利要求4所述的热交换装置,其特征在于,所述三通阀为气控式三通阀。
- 如权利要求6所述的热交换装置,其特征在于,所述气控式三通阀具有用于允许压缩气体通过的输送通道,所述输送通道中设置有压力表和压力报警器,所述压力表用于测量所述压缩气体的压力值,所述压力报警器用于当所述压缩气体的压力值低于一设定值时报警。
- 如权利要求3所述的热交换装置,其特征在于,所述第一切换器包括第一常闭式电磁阀和第一常开式电磁阀;所述第二切换器包括第二常闭式电磁阀和第二常开式电磁阀。
- 如权利要求8所述的热交换装置,其特征在于,所述冷却水进水管通过第一支路与所述循环水出水管相连,且所述第一支路上设置有所述第一常开式电磁阀,所述循环水出水管上设置有所述第一常闭式电磁阀;所述冷却水出水管通过第二支路与所述循环水回水管相连,且所述第二支路上设置有所述第二常开式电磁阀,所述循环水回水管上设置有所述第二常闭式电磁阀。
- 如权利要求8所述的热交换装置,其特征在于,所述冷却水进水管通过第一支路与所述循环水出水管相连,且所述第一支路上设置有所述第一常闭式电磁阀,所述循环水出水管上设置有所述第一常开式电磁阀;所述冷却水出水管通过第二支路与所述循环水回水管相连,且所述第二支路上设置有所述第二常闭式电磁阀,所述循环水回水管上设置有所述第二常开式电磁阀。
- 如权利要求9或10所述的热交换装置,其特征在于,还包括一控制 器,用于控制所述第一和第二常闭式电磁阀和所述第一和第二常开式电磁阀的通电和断电。
- 如权利要求3所述的热交换装置,其特征在于,所述循环水路设置有温度传感器、压力传感器以及流量计中的一个或多个。
- 如权利要求3所述的热交换装置,其特征在于,所述待冷却目标物为一工艺腔体。
- 一种如权利要求3至13中任一项所述的热交换装置的热交换方法,其特征在于,包括:通过第一切换器断开一部分所述循环水出水管与所述待冷却目标物的连接,并同时接通所述冷却水进水管与所述待冷却目标物,以使冷却水依次通过冷却水进水管、一部分所述循环水出水管流入所述待冷却目标物;以及通过第二切换器断开所述热交换器与所述待冷却目标物的连接,并同时接通所述冷却水出水管与所述待冷却目标物,以使流出所述待冷却目标物的冷却水依次通过循环水回水管、冷却水出水管流出,实现所述冷却水与所述待冷却目标物的热量交换。
- 如权利要求14所述的热交换方法,其特征在于,所述第一切换器和第二切换器均为三通阀,其中,实现所述冷却水进水管、所述冷却水出水管与所述待冷却目标物相连接的方法包括:通过一气动执行单元控制所述第一切换器,以断开所述循环水路与所述待冷却目标物的连接,并同时接通所述冷却水进水管和所述待冷却目标物;以及通过所述气动执行单元控制所述第二切换器,以断开所述热交换器与所述待冷却目标物的连接,并同时接通所述通冷却水出水管和所述待冷却目标物。
- 如权利要求14所述的热交换方法,其特征在于,所述第一切换器包括第一常闭式电磁阀和第一常开式电磁阀;所述第二切换器包括第二常闭式 电磁阀和第二常开式电磁阀,其中,实现冷却水进水管、冷却水出水管与待冷却目标物相连接的方法包括:所述第一和第二常开式电磁阀闭合,以接通所述待冷却目标物和所述冷却水进水管、冷却水出水管;以及所述第一和第二常闭式电磁阀开启,以断开所述目标冷却物和所述循环水路以及所述热交换器的连接。
- 一种气相沉积设备,其特征在于,包括权利要求1-13中任一项所述的热交换装置,所述热交换装置用于对所述气相沉积设备进行温控。
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SG11202000373YA SG11202000373YA (en) | 2017-07-17 | 2018-07-16 | Heat exchange apparatus, and heat exchange method therefor and vapour deposition device thereof |
JP2020501474A JP2020527219A (ja) | 2017-07-17 | 2018-07-16 | 熱交換装置及びその熱交換方法並びに蒸着装置 |
KR1020207003765A KR20200026981A (ko) | 2017-07-17 | 2018-07-16 | 열 교환 장치 및 이를 위한 열 교환 방법과 이의 기상 증착 장치 |
US16/632,279 US20200363146A1 (en) | 2017-07-17 | 2018-07-16 | Heat exchange apparatus, and heat exchange method therefor and vapour deposition device thereof |
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CN201710582127.2A CN109269332A (zh) | 2017-07-17 | 2017-07-17 | 热交换装置及其热交换方法与气相沉积设备 |
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- 2018-07-16 KR KR1020207003765A patent/KR20200026981A/ko not_active Application Discontinuation
- 2018-07-16 WO PCT/CN2018/095850 patent/WO2019015554A1/zh active Application Filing
- 2018-07-16 SG SG11202000373YA patent/SG11202000373YA/en unknown
- 2018-07-16 US US16/632,279 patent/US20200363146A1/en not_active Abandoned
- 2018-07-16 JP JP2020501474A patent/JP2020527219A/ja active Pending
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JP2020527219A (ja) | 2020-09-03 |
SG11202000373YA (en) | 2020-02-27 |
CN109269332A (zh) | 2019-01-25 |
TWI681518B (zh) | 2020-01-01 |
US20200363146A1 (en) | 2020-11-19 |
KR20200026981A (ko) | 2020-03-11 |
TW201909358A (zh) | 2019-03-01 |
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