WO2018201530A1 - 喷嘴调整工具及调整方法 - Google Patents
喷嘴调整工具及调整方法 Download PDFInfo
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- WO2018201530A1 WO2018201530A1 PCT/CN2017/085156 CN2017085156W WO2018201530A1 WO 2018201530 A1 WO2018201530 A1 WO 2018201530A1 CN 2017085156 W CN2017085156 W CN 2017085156W WO 2018201530 A1 WO2018201530 A1 WO 2018201530A1
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- nozzle
- positioning
- angle
- adjusting
- nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
Definitions
- the present application relates to a nozzle adjustment tool and an adjustment method, and more particularly to a nozzle adjustment tool for a cleaning machine and an adjustment method using the adjustment tool.
- the OLED is generally fabricated on a glass substrate by a plurality of process steps, and then a plurality of layers are successively deposited on the substrate, and the film layer is mainly included in the glass substrate.
- a transparent anode formed on the sheet sequentially depositing a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer and an electron injection layer on the anode, and finally a metal cathode layer; if dust is deposited on the substrate in each of the above process steps In the formation process of the next film layer, it will cover it, thereby affecting the thickness and uniformity of the film layer, thereby affecting the subsequent process quality, and finally reducing the quality of the OLED. It can be seen that the cleaning of the substrate plays a pivotal role, and therefore a substrate cleaning apparatus is required, which can ensure high cleanliness of the substrate while performing efficient cleaning of the substrate.
- the nozzles installed on the washing machine often have a misalignment of the axial angle when the nozzle is installed, so that the spray angle and the direction of the nozzle are not consistent, and the uneven spraying causes the cleaning to be incomplete.
- an object of the present invention is to provide a nozzle adjusting tool and a method for adjusting the same, which can adjust a plurality of nozzles mounted on the same nozzle to a uniform direction through a simple operation. With the angle, the spray is evenly solved to solve the problem of incomplete cleaning.
- a nozzle adjusting tool includes: an adjusting piece body; a nozzle positioning unit comprising a nozzle positioning hole disposed symmetrically on the adjusting piece body, and Two nozzle positioning bolts of the nozzle positioning hole; and a nozzle positioning unit, including the adjusting piece a nozzle positioning hole in the center of the body and an angle fixing portion concentrically disposed on the periphery of the nozzle positioning hole, the angle fixing portion is a turntable structure that can rotate concentrically with the adjusting piece body, and the angle positioning portion
- the edge and the adjusting piece body are provided with an angle auxiliary scale at a corresponding position, and the angle fixing part is provided with two symmetrical angular positioning holes and two symmetrical angular positioning pins, when the angle positioning bolt passes through the When the hole is positioned at an angle and is pressed, the relative angle of the angle positioning portion and the adjusting piece body is fixed at a predetermined angle.
- the nozzle positioning holes are sequentially sleeved on a plurality of nozzles of a nozzle, and at the same time, the nozzle positioning pins are sequentially disposed at a plurality of positions of the nozzle, so that The nozzles are arranged in line.
- the adjusting piece has a hexagonal shape, and the nozzle positioning holes are disposed in pairs in a symmetrical countersunk shape on a hexagonal diagonal line.
- the nozzle positioning hole and the nozzle positioning bolt are provided with corresponding male threads and female thread structures.
- the nozzle positioning hole is a hex nut hole.
- the angular positioning holes are two arc-shaped counterbores that are symmetrically disposed concentrically around the periphery of the nozzle positioning holes.
- the angular positioning hole and the angular positioning pin are provided with corresponding male threads and female thread structures.
- the nozzle adjusting tool is made of a metal material or a plastic material.
- the application further includes a nozzle adjusting method, comprising: providing the nozzle adjusting tool; mounting a plurality of nozzles on a plurality of nozzle joints of a nozzle; and sequentially arranging the nozzle positioning holes in the nozzle The plurality of nozzles of the nozzle are described, and at the same time, the nozzle positioning bolts are sequentially sandwiched at a plurality of positions of the nozzle.
- the nozzle adjusting method sequentially sleeves the nozzle positioning holes in the plurality of nozzles of the nozzle, and simultaneously positions the nozzle positioning pins in the nozzles.
- the step of describing the plurality of positions of the nozzle includes: arranging the nozzle positioning hole on the nozzle; rotating the adjusting piece body to rotate the nozzle positioning hole to the outer edge of the nozzle;
- the angle positioning pin fixes the relative angle of the angle positioning portion and the adjusting piece to a predetermined angle, and passes the nozzle positioning pin to set the pipe diameter; and the plurality of mounting holes are mounted on the nozzle
- the nozzles are aligned and aligned so that the nozzles are sprayed in the same direction.
- the center direction and the angle of the plurality of nozzles are the same.
- the application further includes a nozzle adjusting tool, comprising: an adjusting piece body having a hexagonal shape; and a nozzle positioning unit comprising a nozzle positioning hole disposed symmetrically on the adjusting piece body, And a nozzle positioning pin for inserting the nozzle positioning hole; and a nozzle positioning unit comprising a nozzle positioning hole disposed at the center of the adjustment piece body and a concentric arrangement on the periphery of the nozzle positioning hole An angle fixing portion; wherein the angle fixing portion is a turntable knot that can rotate concentrically with the adjusting sheet body An angle assisting scale is disposed at an edge of the angle positioning portion and the adjusting piece body at a corresponding position; the angle fixing portion is provided with two symmetric angular positioning holes and two symmetric angular positioning pins; The nozzle positioning holes are arranged in pairs in a symmetrical countersunk hole shape on a hexagonal diagonal line, the nozzle positioning holes are hexagonal nut holes; the nozzle positioning holes are sequentially sleeved on
- a plurality of nozzles on the same cleaning nozzle can be adjusted to a uniform direction and angle through a simple operation, so that the nozzle is evenly sprayed to achieve a better cleaning effect.
- Figure 1A is a schematic perspective view of an exemplary nozzle cleaning.
- Figure 1B is a front elevational view of an exemplary nozzle cleaning process.
- Figure 1C is a front elevational view of an exemplary nozzle cleaning result.
- FIG. 2 is a schematic structural view of a nozzle adjusting tool of the present application.
- FIG. 3A is a schematic top view of a method for adjusting nozzle adjustment according to the present application.
- FIG. 3A is a schematic top view of a method for adjusting nozzle adjustment according to the present application.
- FIG. 3B is a schematic view showing the adjustment method of the nozzle adjustment performed in the present application.
- 4A is a front elevational view of the nozzle cleaning process of the present application.
- 4B is a front elevational view of the nozzle cleaning results of the present application.
- the word “comprising” is to be understood to include the component, but does not exclude any other component.
- “on” means located above or below the target component, and does not mean that it must be on the top based on the direction of gravity.
- the production thereof requires the use of glass or the like as a substrate, and various processes are performed on the substrate to form a multilayer film, which is involved in the process steps.
- the coating, photolithography, etching and other processes will cause dust to adhere to the substrate, which will affect the cleanliness of the substrate.
- the cleanliness of the substrate has a significant impact on the quality of the product. Therefore, in the steps of coating, photolithography, and etching, a cleaning step must be penetrated to maintain the surface cleanliness of the substrate during production.
- the OLED is generally fabricated on a glass substrate by a plurality of process steps, and then a plurality of layers are successively deposited on the substrate, and the film layer is mainly included in the glass substrate.
- a transparent anode formed on the sheet sequentially depositing a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer and an electron injection layer on the anode, and finally a metal cathode layer; if dust is deposited on the substrate in each of the above process steps In the formation process of the next film layer, it will cover it, thereby affecting the thickness and uniformity of the film layer, thereby affecting the subsequent process quality, and finally reducing the quality of the OLED.
- the cleaning of the substrate plays a pivotal role, and therefore a substrate cleaning apparatus is required, which can ensure high cleanliness of the substrate while performing efficient cleaning of the substrate.
- FIG. 1A is a schematic perspective view of an exemplary nozzle cleaning
- FIG. 1B is a front elevational view of an exemplary nozzle cleaning process
- FIG. 1C is a front elevational view of an exemplary nozzle cleaning result.
- the nozzle N installed on the nozzle PP often has a phenomenon that the center C' is offset due to inconvenient alignment during installation, thereby causing the nozzle N to be cleaned.
- the fluid F' has a direction inconsistent.
- the present application provides a nozzle adjusting tool, which can adjust a plurality of nozzles mounted on the same nozzle to a uniform direction and angle through a simple operation, so that the spraying can be uniformly solved.
- a nozzle adjusting tool 1 having a structure as shown in FIG. 2 includes: an adjusting piece 10; a nozzle positioning unit 11 including a regulating body 10 a pair of symmetric nozzle positioning holes 111, and two nozzle positioning pins 112 for penetrating the nozzle positioning holes 111; and a nozzle positioning unit 12 including a nozzle disposed at the center of the adjusting sheet 10.
- the nozzle positioning holes 121 of the present application are sequentially sleeved on a plurality of nozzles N of a nozzle PP (as shown in FIG. 1A), and at the same time, the nozzle positioning pins 112 are sequentially disposed on the nozzles.
- the plurality of positions of the nozzle PP make the nozzles N aligned.
- the adjustment sheet 10 of the present application has a hexagonal shape, and the nozzle positioning holes 111 are disposed in pairs in a symmetrical countersunk shape on a hexagonal diagonal line.
- the nozzle positioning hole 111 and the nozzle positioning bolt 112 of the present application are provided with corresponding male threads and female thread structures.
- the nozzle positioning hole 121 of the present application is a hexagonal nut hole.
- the angular positioning holes 1222 of the present application are two arc-shaped counterbores that are symmetrically disposed concentrically around the periphery of the nozzle positioning holes 121.
- angle positioning hole 1222 and the angle positioning pin 1223 of the present application are provided with corresponding male threads and female thread structures.
- the nozzle adjusting tool 1 of the present application is made of a metal material or a plastic material.
- the center direction and the angle of the plurality of nozzles N are uniform.
- FIG. 3A is a schematic diagram of the upper side of the method for adjusting the nozzle adjustment in the present application
- FIG. 3B is a schematic view of the method for adjusting the nozzle adjustment according to the present application.
- a nozzle adjusting method includes: providing a nozzle adjusting tool 1 as described above; and mounting a plurality of nozzles N in a nozzle PP
- the nozzle positioning holes 121 are sequentially sleeved on the plurality of nozzles N of the nozzle PP, and at the same time, the nozzle positioning pins 112 are sequentially disposed in the nozzle positioning holes.
- 111 is interposed at a plurality of positions of the nozzle PP.
- the same components are denoted by the same component symbols, and the nozzle positioning holes 121 are sequentially sleeved on the plurality of nozzles N of the nozzle PP, and at the same time, the nozzles are simultaneously disposed.
- the step of sequentially positioning the positioning pins 112 on the plurality of positions of the nozzle PP includes: positioning the nozzle positioning holes 121 on the nozzle N; rotating the adjusting piece 10 to make the nozzle
- the positioning hole 111 is rotated to the outer edge of the nozzle PP; the angle positioning pin 1223 is pressed to fix the relative angle of the angle positioning portion 122 and the adjusting piece 10 at a predetermined angle, and the nozzle is positioned.
- the plug 112 is used to set the pipe diameter; and the plurality of nozzles N mounted on the nozzle PP are aligned and aligned so that the plurality of nozzles N are sprayed in the same direction. Wherein, the center direction and the angle of the plurality of nozzles are the same.
- FIG. 4A is a front view of the nozzle cleaning process of the present application
- FIG. 4B is a front view of the nozzle cleaning result of the present application.
- the cleaning device adjusted by the adjustment method used by the above-mentioned nozzle adjusting tool has the same angle in the center C direction of the nozzle N installed on the nozzle PP, so the cleaning fluid ejected from the nozzle N is discharged.
- the angle in the F direction is also uniform. In this way, when the substrate G is cleaned, the dust particles PA on the substrate G are uniformly cleaned, which effectively reduces the incomplete cleaning.
- a plurality of nozzles on the same cleaning nozzle can be adjusted to a uniform direction and angle through a simple operation, so that the nozzle is evenly sprayed to achieve a better cleaning effect.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
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- Coating Apparatus (AREA)
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Abstract
一种喷嘴调整工具（1），包括：一调整片体（10）；一喷管定位单元（11），包括有设置于调整片体上成对对称的喷管定位孔（111），以及用以穿设喷管定位孔的两个喷管定位栓（112）；以及一喷嘴定位单元（12），包括有设置于调整片体中心的一喷嘴定位孔（121）以及同心设置于喷嘴定位孔外围的一角度固定部（122），角度固定部为一可与调整片体同心相对旋转的转盘结构，角度固定部的边缘与调整片体于对应位置设置有角度辅助刻度（1221），角度固定部设置有两个对称的角度定位孔（1222）和两个对称的角度定位栓（1223），当角度定位栓穿设角度定位孔并迫紧时，将角度固定部与调整片体的相对角度固定于一预定角度。此外还提供了一种使用该喷嘴调整工具的喷嘴调整方法。
Description
本申请涉及一种喷嘴调整工具及调整方法，特别是涉及一种清洗机台的喷嘴调整工具及使用所述调整工具进行的调整方法。
随着各种半导体产品的广泛应用及半导体技术的发展，半导体产品的批量生产规模越来越大。同时半导体产品的尺寸也越来越大，导致半导体工艺日趋复杂。而产品的生产不仅要求高精度，也要求高效率及高自动化，因此，对生产半导体产品的生产系统和生产工艺也提出了更高的要求。对于半导体制品，例如有机发光显示器件、液晶显示器件、非晶硅太阳能电池板等，其生产都需要利用玻璃等作为基片，在基片上进行多种工序进而形成多层薄膜，工艺步骤中涉及的镀膜、光刻、蚀刻等工艺会产生粉尘附着在基片上，进而影响基片的清洁度，基片的清洁度对产品的质量有着重大影响。因此，在于镀膜、光刻及蚀刻等步骤中必须贯穿有清洗步骤，以维持基片在生产过程中的表面清洁度。
以OLED(Organic Light-Emitting Diode，即有机发光二极管)为例，OLED的制造一般都在玻璃基片上进行多次工艺步骤，进而在基片上相继沉积多层薄膜，其膜层主要包括在玻璃基片上形成的透明阳极，在阳极上依次沉积空穴注入层、空穴传输层、发光层、电子传输层和电子注入层，最后是金属阴极层；在上述各个工艺步骤中若基片上沉积有粉尘，在下一膜层的形成过程中会将其覆盖，从而影响膜层的厚度和均匀性，进而影响后续的工艺质量，最终使OLED的质量降低。可见所述基片的清洁起着举足轻重的作用，因此需要一种基片清洗装置，对所述基片进行高效清洗的同时也能保证所述基片的高清洁度。
惟，目前清洗机台上装设的喷头在装设时时常会有轴心角度偏移的状况，使得喷嘴的喷洒角度与方向未能一致，形成喷洒不均导致清洗不完全的情形。
发明内容
为了解决上述技术问题，本申请的目的在于，提供一种喷嘴调整工具及调整方法，所述喷嘴调整工具可透过简易的操作将装设于同一喷管上的多个喷嘴调整至一致的方向与角度，使喷洒均匀解决清洗不完全的问题。
本申请的目的及解决其技术问题是采用以下技术方案来实现的。依据本申请提出的一种喷嘴调整工具，包括：一调整片体；一喷管定位单元，包括有设置于所述调整片体上成对对称的喷管定位孔，以及用以穿设所述喷管定位孔的二个喷管定位栓；以及一喷嘴定位单元，包括有设置于调整片
体中心的一喷嘴定位孔以及同心设置于所述喷嘴定位孔外围的一角度固定部，所述角度固定部为一可与所述调整片体同心相对旋转的转盘结构，所述角度定位部的边缘与所述调整片体于对应位置设置有角度辅助刻度，所述角度固定部并设置有二个对称的角度定位孔和二个对称的角度定位栓，当所述角度定位栓穿设所述角度定位孔并迫紧时，将所述角度定位部与所述调整片体的相对角度固定于一预定角度。
本申请解决其技术问题还可采用以下技术措施进一步实现。
在本申请的一实施例中，所述喷嘴定位孔依序套设于一喷管的多个喷嘴，且同时该些喷管定位栓依序夹设于所述喷管的多个位置，使该些喷嘴排列一致。
在本申请的一实施例中，所述调整片体为六角形的型态，所述喷管定位孔成对以对称的沉头孔型态设置于六角形对角的连线上。
在本申请的一实施例中，所述喷管定位孔与所述喷管定位栓设置有相对应的公螺纹及母螺纹结构。
在本申请的一实施例中，所述喷嘴定位孔为六角螺帽孔。
在本申请的一实施例中，所述角度定位孔为两个对称且同心设置于喷嘴定位孔外围的弧线型态沉头孔。
在本申请的一实施例中，所述角度定位孔与角度定位栓设置有相对应的公螺纹及母螺纹结构。
在本申请的一实施例中，所述喷嘴调整工具以金属材质或塑料材质制成。
本申请更包括一种喷嘴调整方法，包括：提供所述的喷嘴调整工具；将多个喷嘴装设于一喷管的多个喷嘴接头上；以及将所述喷嘴定位孔依序套设于所述喷管的多个喷嘴，且同时将该些喷管定位栓依序夹设于所述喷管的多个位置。
在本申请的一实施例中，所述喷嘴调整方法，将所述喷嘴定位孔依序套设于所述喷管的多个喷嘴，且同时将该些喷管定位栓依序夹设于所述喷管的多个位置的步骤包括：将所述喷嘴定位孔套设于所述喷嘴上；旋转所述调整片体，使所述喷管定位孔旋转至所述喷管外缘；迫紧所述角度定位栓使所述角度定位部与所述调整片体的相对角度固定于一预定角度，并穿设喷管定位栓用以设定管径；以及将装设于喷管上的多个喷嘴调整排列一致，使多个喷嘴喷洒的方向相同。
在本申请的一实施例中，所述多个喷嘴的中心方向及角度均一致。
本申请还包括一种喷嘴调整工具，包括：一调整片体，其为六角形的型态；一喷管定位单元，包括有设置于所述调整片体上成对对称的喷管定位孔，以及用以穿设所述喷管定位孔的二个喷管定位栓；以及一喷嘴定位单元，包括有设置于调整片体中心的一喷嘴定位孔以及同心设置于所述喷嘴定位孔外围的一角度固定部；其中，所述角度固定部为一可与所述调整片体同心相对旋转的转盘结
构，所述角度定位部的边缘与所述调整片体于对应位置设置有角度辅助刻度；所述角度固定部并设置有二个对称的角度定位孔和二个对称的角度定位栓；所述喷管定位孔成对以对称的沉头孔型态设置于六角形对角的连线上，所述喷嘴定位孔为六角螺帽孔；所述喷嘴定位孔依序套设于一喷管的多个喷嘴，且同时该些喷管定位栓依序夹设于所述喷管的多个位置，使该些喷嘴排列一致；所述多个喷嘴的中心方向及角度均一致。
本申请可透过简易的操作将同一清洗喷管上的多个喷嘴调整到一致的方向与角度，使喷嘴的喷洒均匀进而达到更佳的清洗效果。
图1A是范例性的喷嘴清洗立体示意图。
图1B是范例性的喷嘴清洗过程正面示意图。
图1C是范例性的喷嘴清洗结果正面示意图。
图2是本申请所述喷嘴调整工具的结构示意图。
图3A是本申请实施喷嘴调整的调整方法上方示意图。
图3B是本申请实施喷嘴调整的调整方法下方示意图。
图4A是本申请的喷嘴清洗过程正面示意图。
图4B是本申请的喷嘴清洗结果正面示意图。
以下各实施例的说明是参考附加的图式，用以例示本申请可用以实施的特定实施例。本申请所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本申请，而非用以限制本申请。
附图和说明被认为在本质上是示出性的，而不是限制性的。在图中，结构相似的单元是以相同标号表示。另外，为了理解和便于描述，附图中示出的每个组件的尺寸和厚度是任意示出的，但是本申请不限于此。
在附图中，为了清晰起见，夸大了微尘粒子、基板等特征。在附图中，为了理解和便于描述，夸大了一些中心偏移和清洁流体的角度方向。将理解的是，当例如调整片体或定位单元的组件被称作“在”另一组件“上”时，所述组件可以直接在所述另一组件上，或者也可以存在中间组件。
另外，在说明书中，除非明确地描述为相反的，否则词语“包括”将被理解为意指包括所述组件，但是不排除任何其它组件。此外，在说明书中，“在......上”意指位于目标组件上方或者下方，而不意指必须位于基于重力方向的顶部上。
为更进一步阐述本申请为达成预定发明目的所采取的技术手段及功效，以下结合附图及较佳实施例，对依据本申请提出的一种喷嘴调整工具及调整方法，其具体实施方式、结构、特征及其功效，详细说明如后。
对于半导体制品，例如有机发光显示器件、液晶显示器件、非晶硅太阳能电池板等，其生产都需要利用玻璃等作为基片，在基片上进行多种工序进而形成多层薄膜，工艺步骤中涉及的镀膜、光刻、蚀刻等工艺会产生粉尘附着在基片上，进而影响基片的清洁度，基片的清洁度对产品的质量有着重大影响。因此，在于镀膜、光刻及蚀刻等步骤中必须贯穿有清洗步骤，以维持基片在生产过程中的表面清洁度。
以OLED(Organic Light-Emitting Diode，即有机发光二极管)为例，OLED的制造一般都在玻璃基片上进行多次工艺步骤，进而在基片上相继沉积多层薄膜，其膜层主要包括在玻璃基片上形成的透明阳极，在阳极上依次沉积空穴注入层、空穴传输层、发光层、电子传输层和电子注入层，最后是金属阴极层；在上述各个工艺步骤中若基片上沉积有粉尘，在下一膜层的形成过程中会将其覆盖，从而影响膜层的厚度和均匀性，进而影响后续的工艺质量，最终使OLED的质量降低。
可见所述基片的清洁起着举足轻重的作用，因此需要一种基片清洗装置，对所述基片进行高效清洗的同时也能保证所述基片的高清洁度。
图1A是范例性的喷嘴清洗立体示意图、图1B是范例性的喷嘴清洗过程正面示意图、图1C是范例性的喷嘴清洗结果正面示意图。如图所示，于范例性的清洗设备中，装设于喷管PP上的喷嘴N时常会因为装设时对准不方便形成中心C’偏移的现象，进而导致喷嘴N喷出的清洁流体F’有方向不一致的情形。
喷嘴N喷出的清洁流体F’方向若不一致，则在清洗过程中则会如图1B所示，有C’中心偏移影响清洁流体F’喷至基板G的清洗面积不一致的问题，进而导致图1C的清洗结果，亦即清洗力道不均导致基板G上的微尘粒子PA清洗不完全。
为了解决上述技术问题，本申请提供一种喷嘴调整工具，所述喷嘴调整工具可透过简易的操作将装设于同一喷管上的多个喷嘴调整至一致的方向与角度，使喷洒均匀解决清洗不完全的问题。
在本申请的一实施例中，一种喷嘴调整工具1，其结构如图2所示，包括：一调整片体10；一喷管定位单元11，包括有设置于所述调整片体10上成对对称的喷管定位孔111，以及用以穿设所述喷管定位孔111的二个喷管定位栓112；以及一喷嘴定位单元12，包括有设置于调整片体10中心的一喷嘴定位孔121以及同心设置于所述喷嘴定位孔外围的一角度固定部122，所述角度固定部122为一可与所述调整片体10同心相对旋转的转盘结构，所述角度定位部122的边缘与所述调整
片体10于对应位置设置有角度辅助刻度1221，所述角度固定部122并设置有二个对称的角度定位孔1222和二个对称的角度定位栓1223，当所述角度定位栓1223穿设所述角度定位孔1222并迫紧时，将所述角度定位部122与所述调整片体10的相对角度固定于一预定角度。
在一实施例中，本申请所述喷嘴定位孔121依序套设于一喷管PP的多个喷嘴N(如图1A所示)，且同时该些喷管定位栓112依序夹设于所述喷管PP的多个位置，使该些喷嘴N排列一致。
在一实施例中，本申请所述调整片体10为六角形的型态，所述喷管定位孔111成对以对称的沉头孔型态设置于六角形对角的连线上。
在一实施例中，本申请所述喷管定位孔111与所述喷管定位栓112设置有相对应的公螺纹及母螺纹结构。
在一实施例中，本申请所述喷嘴定位孔121为六角螺帽孔。
在一实施例中，本申请所述角度定位孔1222为两个对称且同心设置于喷嘴定位孔121外围的弧线型态沉头孔。
在一实施例中，本申请所述角度定位孔1222与角度定位栓1223设置有相对应的公螺纹及母螺纹结构。
在一实施例中，本申请所述喷嘴调整工具1以金属材质或塑料材质制成。
在一实施例中，所述多个喷嘴N的中心方向及角度均一致。
接下来敬请参阅图3A与图3B，图3A是本申请实施喷嘴调整的调整方法上方示意图、图3B是本申请实施喷嘴调整的调整方法下方示意图。
如图3A及图3B所示，在本申请的一实施例中，一种喷嘴调整方法，包括：提供一如上述的喷嘴调整工具1；将多个喷嘴N装设于一喷管PP的多个喷嘴接头上；以及将所述喷嘴定位孔121依序套设于所述喷管PP的多个喷嘴N，且同时将该些喷管定位栓112依序穿设于所述喷管定位孔111以夹设于所述喷管PP的多个位置。
在本申请上述的调整方法如图3B所示，相同组件标示相同组件符号，将所述喷嘴定位孔121依序套设于所述喷管PP的多个喷嘴N，且同时将该些喷管定位栓112依序夹设于所述喷管PP的多个位置的步骤包括：将所述喷嘴定位孔121套设于所述喷嘴N上；旋转所述调整片体10，使所述喷管定位孔111旋转至所述喷管PP外缘；迫紧所述角度定位栓1223使所述角度定位部122与所述调整片体10的相对角度固定于一预定角度，并穿设喷管定位栓112用以设定管径；以及将装设于喷管PP上的多个喷嘴N调整排列一致，使多个喷嘴N喷洒的方向相同。其中，所述多个喷嘴的中心方向及角度均一致。
利用本申请所述喷嘴调整工具使用的调整方法调整过的清洗设备，其喷嘴清洗过程与喷嘴清洗
结果敬请参阅图4A与图4B，图4A是本申请的喷嘴清洗过程正面示意图、图4B是本申请的喷嘴清洗结果正面示意图。
如图4A所示，经上述的喷嘴调整工具使用的调整方法调整过的清洗设备，所述喷嘴N装设于喷管PP上的中心C均方向角度一致，因此由喷嘴N喷出的清洗流体F方向角度也会均匀一致，如此一来，在清洗基板G时，基板G上面的粉尘粒子PA就会被均匀的清洗，有效降低清洗不完全的情形发生。
本申请可透过简易的操作将同一清洗喷管上的多个喷嘴调整到一致的方向与角度，使喷嘴的喷洒均匀进而达到更佳的清洗效果。
“在一些实施例中”及“在各种实施例中”等用语被重复地使用。所述用语通常不是指相同的实施例；但它亦可以是指相同的实施例。“包含”、“具有”及“包括”等用词是同义词，除非其前后文意显示出其它意思。
以上所述，仅是本申请的较佳实施例而已，并非对本申请作任何形式上的限制，虽然本申请已以较佳实施例揭露如上，然而并非用以限定本申请，任何熟悉本专业的技术人员，在不脱离本申请技术方案范围内，当可利用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例，但凡是未脱离本申请技术方案的内容，依据本申请的技术实质对以上实施例所作的任何简单修改、等同变化与修饰，均仍属于本申请技术方案的范围内。
Claims (14)
- 一种喷嘴调整工具，包括：一调整片体；一喷管定位单元，包括有设置于所述调整片体上成对对称的喷管定位孔，以及用以穿设所述喷管定位孔的二个喷管定位栓；以及一喷嘴定位单元，包括有设置于调整片体中心的一喷嘴定位孔以及同心设置于所述喷嘴定位孔外围的一角度固定部，所述角度固定部为一可与所述调整片体同心相对旋转的转盘结构，所述角度定位部的边缘与所述调整片体于对应位置设置有角度辅助刻度，所述角度固定部并设置有二个对称的角度定位孔和二个对称的角度定位栓，当所述角度定位栓穿设所述角度定位孔并迫紧时，将所述角度定位部与所述调整片体的相对角度固定于一预定角度。
- 如权利要求1所述的喷嘴调整工具，其中所述喷嘴定位孔依序套设于一喷管的多个喷嘴，且同时该些喷管定位栓依序夹设于所述喷管的多个位置，使该些喷嘴排列一致。
- 如权利要求1所述的喷嘴调整工具，其中所述调整片体为六角形的型态。
- 如权利要求3所述的喷嘴调整工具，其中所述喷管定位孔成对以对称的沉头孔型态设置于六角形对角的连线上。
- 如权利要求1所述的喷嘴调整工具，其中所述喷管定位孔与所述喷管定位栓设置有相对应的公螺纹及母螺纹结构。
- 如权利要求1所述的喷嘴调整工具，其中所述喷嘴定位孔为六角螺帽孔。
- 如权利要求1所述的喷嘴调整工具，其中所述角度定位孔为两个对称且同心设置于喷嘴定位孔外围的弧线型态沉头孔。
- 如权利要求1所述的喷嘴调整工具，其中所述角度定位孔与角度定位栓设置有相对应的公螺纹及母螺纹结构。
- 如权利要求1所述的喷嘴调整工具，其中所述喷嘴调整工具以金属材质制成。
- 如权利要求1所述的喷嘴调整工具，其中所述喷嘴调整工具以塑料材质制成。
- 一种喷嘴调整方法，包括：提供一如权利要求1所述的喷嘴调整工具；将多个喷嘴装设于一喷管的多个喷嘴接头上；以及将所述喷嘴定位孔依序套设于所述喷管的多个喷嘴，且同时将该些喷管定位栓依序夹设于所述喷管的多个位置。
- 如权利要求11所述的喷嘴调整方法，其中将所述喷嘴定位孔依序套设于所述喷管的多个喷嘴， 且同时将该些喷管定位栓依序夹设于所述喷管的多个位置的步骤包括：将所述喷嘴定位孔套设于所述喷嘴上；旋转所述调整片体，使所述喷管定位孔旋转至所述喷管外缘；迫紧所述角度定位栓使所述角度定位部与所述调整片体的相对角度固定于一预定角度，并穿设喷管定位栓用以设定管径；以及将装设于喷管上的多个喷嘴调整排列一致，使多个喷嘴喷洒的方向相同。
- 如权利要求11所述的喷嘴调整方法，其中所述多个喷嘴的中心方向及角度均一致。
- 一种喷嘴调整工具，包括：一调整片体，其为六角形的型态；一喷管定位单元，包括有设置于所述调整片体上成对对称的喷管定位孔，以及用以穿设所述喷管定位孔的二个喷管定位栓；以及一喷嘴定位单元，包括有设置于调整片体中心的一喷嘴定位孔以及同心设置于所述喷嘴定位孔外围的一角度固定部；其中，所述角度固定部为一可与所述调整片体同心相对旋转的转盘结构，所述角度定位部的边缘与所述调整片体于对应位置设置有角度辅助刻度；其中，所述角度固定部并设置有二个对称的角度定位孔和二个对称的角度定位栓；其中，所述喷管定位孔成对以对称的沉头孔型态设置于六角形对角的连线上，所述喷嘴定位孔为六角螺帽孔；其中，所述喷嘴定位孔依序套设于一喷管的多个喷嘴，且同时该些喷管定位栓依序夹设于所述喷管的多个位置，使该些喷嘴排列一致；其中，所述多个喷嘴的中心方向及角度均一致。
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