WO2018201346A1

WO2018201346A1 - Cleaning device, and apparatus for manufacturing flexible display device

Info

Publication number: WO2018201346A1
Application number: PCT/CN2017/082903
Authority: WO
Inventors: 周启豪; 叶昱均
Original assignee: 深圳市柔宇科技有限公司
Priority date: 2017-05-03
Filing date: 2017-05-03
Publication date: 2018-11-08
Also published as: CN108136446B; CN108136446A

Abstract

Provided is a cleaning device (10) for cleaning a device substrate (800). The cleaning device (10) comprises an accommodation recess (11), a wet roller (12) provided in the accommodation recess (11), a dry roller (13), and a driving device (14). The accommodation recess (11) is used to store a detergent. The wet roller (12) is used to clean a lower surface of a substrate (820) with the detergent in the accommodation recess (11). The dry roller (13) is used to clean a device film (840). The driving device (14) is connected to the wet roller (12) and the dry roller (13). The driving device (14) is used to drive the wet roller (12) to separate from the accommodation recess (11) and rotate so as to clean the lower surface of the substrate (820), and to drive the dry roller (13) to rotate so as to clean the device film (840).

Description

Cleaning device and manufacturing device for flexible display

Technical field

The present invention relates to the field of displays, and in particular, to a cleaning apparatus and a manufacturing apparatus of the flexible display.

Background technique

In the related art, a flexible display generally fabricates a flexible substrate on a device substrate in a manufacturing process, and forms a device film on the flexible substrate, and finally peels off the device substrate and the flexible substrate by a laser lift-off technique to form a flexible display. The laser lift-off technology uses a laser to penetrate from the device substrate to the flexible substrate, so the cleanliness of the device substrate affects the success rate of the peeling, so the device substrate needs to be cleaned. However, the cleaning agent vapor generated during the cleaning process may damage the device film formed on the flexible substrate, such as an organic light emitting diode (OLED) or the like.

Summary of the invention

Embodiments of the present invention provide a cleaning apparatus and a manufacturing apparatus of the flexible display.

An embodiment of the present invention provides a cleaning device for cleaning a device substrate, the device substrate comprising a substrate and a device film disposed on an upper surface of the substrate, the cleaning device comprising:

a receiving groove for storing a cleaning agent; and

a wet roller brush disposed in the accommodating groove, wherein the wet roller brush is used to clean a lower surface of the substrate by using a cleaning agent in the accommodating groove;

a dry roller brush for cleaning the device film;

a driving device connecting the wet roller brush and the dry roller brush, and for driving the wet roller brush out of the receiving groove and rotating to clean the lower surface of the substrate, and for driving The dry roller is rotated to clean the device film.

A manufacturing apparatus of a flexible display provided by an embodiment of the present invention includes the cleaning device.

The cleaning device and the manufacturing apparatus of the flexible display according to the embodiments of the present invention utilize the driving device so that the wet roller brush can be detached from the accommodating groove to prevent the cleaning agent from splashing from the accommodating groove to the device film, and the device film is cleaned by the dry roller brush and the device film is adsorbed. The water vapor in the device avoids damage to the device film by moisture.

The additional aspects and advantages of the embodiments of the present invention will be set forth in part in the description which follows.

DRAWINGS

The above and/or additional aspects and advantages of the present invention will become apparent from the following description of the embodiments Obvious and easy to understand, where:

1 is a schematic structural view of a cleaning device according to an embodiment of the present invention;

2 is a schematic structural view of a device substrate according to an embodiment of the present invention;

3 is a block diagram showing a manufacturing apparatus of a flexible display according to an embodiment of the present invention;

4 is another schematic structural view of a cleaning device according to an embodiment of the present invention;

Figure 5 is a schematic block diagram of a fixing member according to an embodiment of the present invention;

6 is a schematic structural view of still another cleaning device according to an embodiment of the present invention;

Figure 7 is a schematic view showing still another structure of the cleaning device of the embodiment of the present invention;

Fig. 8 is a schematic block diagram of a brush moving mechanism according to an embodiment of the present invention.

The main component symbol drawing description:

Manufacturing apparatus 100, cleaning device 10, accommodating tank 11, wet roller brush 12, dry roller brush 13, drive device 14, roller moving mechanism 142, cylinder 1422, proportional valve 1424, first rail 144, second rail 146 The conveying member 15, the fixing member 16, the fixing air hole 162, the moisture releasing hole 164, the fixing portion moving mechanism 166, the peeling device 20, the device substrate 800, the substrate 820, and the device film 840.

detailed description

The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are intended to be illustrative of the invention and are not to be construed as limiting.

In the description of the present invention, it is to be understood that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, features defining "first" or "second" may include one or more of the described features either explicitly or implicitly. In the description of the present invention, the meaning of "a plurality" is two or more unless specifically and specifically defined otherwise.

In the description of the present invention, it should be noted that the terms "installation", "connected", and "connected" are to be understood broadly, and may be fixed or detachable, for example, unless otherwise explicitly defined and defined. Connected, or integrally connected; may be mechanically connected, or may be electrically connected or may communicate with each other; may be directly connected or indirectly connected through an intermediate medium, may be internal communication of two elements or interaction of two elements relationship. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood on a case-by-case basis.

The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. In order to simplify the disclosure of the present invention, the components and arrangements of the specific examples are described below. Of course, they are merely examples and are not intended to limit the invention. In addition, the present invention may repeat reference numerals and/or reference numerals in different examples, which are for the purpose of simplicity and clarity, and do not in themselves indicate the relationship between the various embodiments and/or arrangements discussed. system. Moreover, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the use of other processes and/or the use of other materials.

Referring to FIG. 1 and FIG. 2 together, the cleaning device 10 of the embodiment of the present invention can be used to clean the device substrate 800. The device substrate 800 includes a substrate 820 and a device film 840 disposed on an upper surface of the substrate 820. The cleaning device 10 includes a receiving groove 11, a wet roller brush 12 disposed in the receiving groove 11, a dry roller brush 13, and a driving device 14. The accommodating groove 11 is for storing a detergent. The wet roller brush 12 is for cleaning the lower surface of the substrate 820 with the detergent in the accommodating groove 11. The dry roller brush 13 is used to clean the device film 840. The driving device 14 is connected to the wet roller brush 12 and the dry roller brush 13, and is used for driving the wet roller brush 12 out of the accommodating groove 11 and rotating to clean the lower surface of the substrate 820, and for driving the dry roller brush 13 to rotate to clean the device. Film 840.

Referring to FIG. 3, in some embodiments, a manufacturing apparatus 100 of a flexible display according to an embodiment of the present invention includes a cleaning device 10.

The cleaning device 10 and the flexible display manufacturing apparatus 100 of the embodiment of the present invention utilize the driving device 14 to enable the wet roller brush 12 to be detached from the accommodating groove 11 to prevent the cleaning agent from splashing from the accommodating groove 11 to the device film 840 while using the dry roller brush 13 cleaning the device film 840 and adsorbing moisture in the device film 840 prevents the device film 840 from being damaged by moisture.

It can be understood that the wet roller brush 12 is disposed in the accommodating groove 11, which can facilitate the wet roller brush 12 to clean the device substrate 800 by using the detergent in the accommodating groove 11. The dry roller brush can be used directly to clean the device substrate 800.

In certain embodiments, substrate 820 includes a glass substrate. The device film 840 includes devices such as organic light emitting diodes (OLEDs), transistors, and the like. The cleaning agent includes a cleaning product such as water which is helpful for cleaning, and is not specifically limited herein. It should be noted that since the cleaning agent acts directly on the substrate 820, cleaning agents that chemically react or cause damage to the substrate 820 should be avoided when selecting the cleaning agent. In the embodiment of the present invention, the cleaning agent may be water, so that cost can be saved without causing damage to the substrate, and a good cleaning effect can be obtained.

In one embodiment, manufacturing apparatus 100 includes a stripping device 20. The peeling device 20 is for peeling off the cleaned substrate 820 from the device film 840.

As such, stripping of the substrate 820 can be achieved to facilitate subsequent manufacturing processes of the flexible display.

In certain embodiments, the stripping device 20 includes a laser stripping device. In the related art, in order to facilitate the manufacture of a flexible display, a flexible substrate is generally fabricated on the substrate 820, and a device film 840 is formed on the flexible substrate, but since the substrate 820 is not the final constituent structure of the flexible display, the substrate needs to be 820 was peeled off. Peeling the substrate 820 by the laser stripping device can avoid damage to the device film 840 during the peeling process.

In some embodiments, the manufacturing apparatus 100 includes an apparatus for bonding the device film 840, a device for manufacturing a flexible substrate, and the like, which are not specifically limited herein.

Referring to FIG. 4, in one embodiment, the cleaning device 10 includes a transfer member 15 for transporting the device substrate 800 to a set position. The driving device 14 is configured to drive the wet roller brush 12 that is detached from the accommodating groove 11 to rotate to clean the lower surface of the substrate 820 and to drive the dry roller brush 13 to rotate to clean the device film 840 when the device substrate 800 is at the set position.

Thus, the transporting member 15 transports the device substrate 800 to the set position, and the driving device 14 drives the wet roller brush 12 and the dry roller brush 13 to complete the cleaning of the device substrate 800.

Specifically, in order to facilitate cleaning of the device substrate 800, the device substrate 800 may be placed on the transfer member 15 and transferred by the transfer member 15 to the set position, which may be convenient for the wet roller brush 12 and dry. The roller brush 13 cleans the position of the device substrate 800, and can determine whether the device substrate 800 is at the set position by using an associated sensor such as a distance sensor. After the device substrate 800 is in the set position, the driving device 14 can drive the wet roller brush 12 out of the accommodating groove 11 and clean the lower surface of the substrate 820, thereby preventing the detergent in the accommodating groove 11 from splashing to the device when the device substrate 800 is cleaned. On the substrate 800. On the other hand, the driving device 14 can drive the dry roller brush 13 to clean the device film 840, and utilize the dry roller brush 13 to pick up the cleaning agent and possibly the moisture that may penetrate from the lower surface edge of the substrate 820 to the device film 840.

In an embodiment of the invention, the transport component 15 includes a plurality of rollers to transport the device substrate 800. The plurality of rollers are arranged in a plurality of rows.

It should be noted that during the transfer of the device substrate 800, the wet roller brush 12 and the dry roller brush 13 and the device substrate 800 are not in contact, thereby preventing the wet roller brush 12 or the dry roller brush 13 from affecting the transmission of the device substrate 800.

In addition, the driving device 14 driving the wet roller brush 12 out of the accommodating groove 11 can be performed before, at the same time as, or after the device substrate 800 reaches the set position, and is not specifically limited herein.

In one embodiment, the cleaning device 10 includes a stationary component 16 that includes a fixed air hole 162 for adsorbing the device substrate 800 to secure the device substrate 800.

In this way, the device substrate 800 can be fixed while the device substrate 800 is being cleaned, and the cleaning effect of the device substrate 800 is ensured.

Specifically, in order to facilitate the cleaning of the device substrate 800, the device substrate 800 needs to be fixed. Therefore, the device substrate 800 can be adsorbed by the fixed air holes 162 of the fixing member 16, and the device substrate 800 can be fixed by suction.

In one embodiment, the stationary component 16 includes a moisture vent 164 for extracting moisture from the environment.

As such, the moisture vent 164 can evacuate moisture from the environment to prevent moisture from damaging the device substrate 800.

Specifically, the moisture vent 164 may be a vent having a desiccant inside, and the desiccant 164 is sucked by the desiccant. The taken air is dried to draw off the water vapor in the environment, and the moisture vent 164 can also directly extract the air to reduce the humidity of the environment.

In one embodiment, the wetted air holes 164 are spaced from the device substrate 800 when the fixed air holes 162 are attracted to the device substrate 800.

As such, the moisture vent 164 is prevented from being blocked by the device substrate 800.

It can be understood that in order to facilitate the operation of the dehumidifying air holes 164, the dehumidifying air holes 164 need to have a certain interval from the device substrate 800.

In some embodiments, the dehumidified air holes 164 and the fixed air holes 162 can be set to different heights. The height of the fixed air holes 162 is relatively high, so that it can be close to the device substrate 800, and the height of the moisture venting holes 164 is relatively low, so that the device substrate 800 can be fixed at a certain interval when the fixed air holes 162 are fixed to the device substrate 800. It should be noted that the greater the difference between the height of the fixed air hole 162 and the height of the moisture vent 164, the distance between the moisture vent 164 and the device substrate 800 is too long, and the dehumidification effect on the device substrate 800 is worse; The smaller the difference between the height of the air hole 162 and the height of the moisture vent 164, the too close the distance between the moisture vent 164 and the device substrate 800 may cause the plenum 164 to malfunction. Therefore, the height difference between the humidifying air hole 164 and the fixed air hole 162 can be set according to the dehumidifying effect.

In one embodiment, the fixed air holes 162 and the wetted air holes 164 are alternately disposed.

In this way, the ability of the fixing member 16 to fix the device substrate 800 and the dehumidification ability can be balanced.

It can be understood that the more the number of the fixed air holes 162 is, the more the number of the moisture vents 164 may be reduced, so that the ability of the fixing member 16 to fix the device substrate 800 is enhanced and the dehumidification ability is weakened; the more the number of the moisture vents 164 is, the more likely The number of the fixed air holes 162 is reduced, so that the dehumidification ability of the fixing member 16 is enhanced and the ability to fix the device substrate 800 is weakened. Therefore, the ability to fix the device substrate 800 and the dehumidification ability can be balanced by the fixed pores 162 and the moisture vent 164 alternately disposed. In addition, the adsorption force of the fixed air holes 162 received by the device substrate 800 can be made more balanced and the dehumidification air holes 164 can be dehumidified at various positions of the device substrate 800.

Referring to FIG. 5 and FIG. 6, in one embodiment, the cleaning device 10 includes a fixing member 16 for fixing the device substrate 800. The fixing member 16 includes a fixing portion moving mechanism 166 for lifting and fixing. The component 16 is such that the device substrate 800 is detached from the transfer component 15.

As such, the device substrate 800 can be detached from the transfer member 15 to facilitate subsequent cleaning of the device substrate 800.

Specifically, the transport member 15 is in direct contact with the lower surface of the substrate 820 when the device substrate 800 is transported, thereby preventing the wet roller brush 12 from cleaning the lower surface of the substrate 820. The fixing member 16 is disposed at both ends of the device substrate 800 without hindering the cleaning process, and the fixing member 16 can be raised by the fixing portion moving mechanism 166, so that the device substrate 800 to which the fixing member 16 is fixed is separated from the conveying member 15 and raised to fit. The position where the wet roller brush 12 is cleaned.

Referring to FIG. 7, in one embodiment, the driving device 14 includes a roller moving mechanism 142, a first rail 144 and a second rail 146, and the dry roller brush 13 and the wet roller brush 12 are movably disposed on the first rail 144. First, first guide The rail 144 is movably disposed on the second rail 146 for driving the wet roller brush 12 and the dry roller brush 13 to move relative to the device substrate 800 along the first rail 144, and for driving the first rail 144 Moving back and forth on the second rail 146, the first rail 144 and the second rail 146 are not parallel.

As such, the drive device 14 can be used to drive the wet roller brush 12 and the dry roller brush 13 to move relative to the device substrate 800.

Specifically, after the fixing portion moving mechanism 166 raises the device substrate 800, the roller moving mechanism 142 drives the wet roller brush 12 and the dry roller brush 13 to move along the first rail 144 with respect to the device substrate 800, thereby causing the wet roller brush 12 to be detached. The groove 11 is accommodated and the wet roller brush 12 and the dry roller brush 13 are held by the device substrate 800. After the wet roller brush 12 and the dry roller brush 13 hold the device substrate 800, the roller moving mechanism 142 can drive the first rail 144 to move back and forth on the second rail 146, thereby causing the wet roller brush 12 on the first rail 144. The dry roller brush 13 holds the device substrate 800 and moves back and forth to achieve the effect of cleaning the device substrate 800.

It should be noted that the first rail 144 and the second rail 146 are not parallel to ensure that the wet roller brush 12 and the dry roller brush 13 can move up and down relative to the device substrate 800 to clamp the device substrate 800, and can be opposite to the device substrate 800. Moving back and forth to clean the device substrate 800.

In one embodiment, the first rail 144 and the second rail 146 are perpendicular. In this way, the moving distance of the wet roller brush 12 and the dry roller brush 13 can be reduced.

Referring to FIG. 8, in one embodiment, the roller moving mechanism 142 includes a cylinder 1422 and a proportional valve 1424. The cylinder 1422 is coupled to the proportional valve 1424 and the first rail 144. The roller moving mechanism 142 adjusts the pressure of the cylinder 1422 through the proportional valve 1424. The size controls the strength of the dry roller brush 13 and the wet roller brush 12 to hold the device substrate 800.

As such, the force of the wet roller brush 12 and the dry roller brush 13 to hold the device substrate 800 can be controlled by the proportional valve 1424.

It can be understood that when the wet roller brush 12 and the dry roller brush 13 hold the device substrate 800 at a large force, it is advantageous for a higher degree of cleaning, but the energy consumption is increased and the device substrate 800 may be damaged; When the force of the roller brush 12 and the dry roller brush 13 to sandwich the device substrate 800 is small, energy consumption is small and damage to the device substrate 800 is avoided, but the degree of cleaning is low. Therefore, the cylinder 1422 and the proportional valve 1424 can be used to control the strength of the dry roller brush 13 and the wet roller brush 12 to clamp the device substrate 800, so that different clamping strengths can be used according to different device substrates 800, thereby ensuring a cleaner effect. Preferably, and reducing unnecessary energy consumption and avoiding damage to the device substrate 800.

In the description of the present specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example", or "some examples", etc. Particular features, structures, materials or features described in the embodiments or examples are included in at least one embodiment or example of the invention. In the present specification, the schematic representation of the above terms does not necessarily mean the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.

Any process or method description in the flowcharts or otherwise described herein may be understood to represent a module, segment or portion of code that includes one or more executable instructions for performing the steps of a particular logical function or process. , And the scope of the preferred embodiments of the invention includes additional implementations, which may be performed in a substantially simultaneous manner or in an opposite order depending on the functions involved, not in the order shown or discussed, which should be It will be understood by those skilled in the art to which the embodiments of the present invention pertain.

The logic and/or steps represented in the flowchart or otherwise described herein, for example, may be considered as an ordered list of executable instructions for performing logical functions, and may be embodied in any computer readable medium, Used in conjunction with, or in conjunction with, an instruction execution system, apparatus, or device (eg, a computer-based system, a system including a processor, or other system that can fetch instructions and execute instructions from an instruction execution system, apparatus, or device) Or use with equipment. For the purposes of this specification, a "computer-readable medium" can be any apparatus that can contain, store, communicate, propagate, or transport a program for use in an instruction execution system, apparatus, or device, or in conjunction with the instruction execution system, apparatus, or device. More specific examples (non-exhaustive list) of computer readable media include the following: electrical connections (electronic devices) having one or more wires, portable computer disk cartridges (magnetic devices), random access memory (RAM), Read only memory (ROM), erasable editable read only memory (EPROM or flash memory), fiber optic devices, and portable compact disk read only memory (CDROM). In addition, the computer readable medium may even be a paper or other suitable medium on which the program can be printed, as it may be optically scanned, for example by paper or other medium, followed by editing, interpretation or, if appropriate, other suitable The method is processed to obtain the program electronically and then stored in computer memory.

It should be understood that portions of the invention may be implemented in hardware, software, firmware or a combination thereof. In the above-described embodiments, multiple steps or methods may be performed by software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if executed in hardware, as in another embodiment, it can be performed by any one of the following techniques or combinations thereof known in the art: having logic gates for performing logic functions on data signals Discrete logic circuits, application specific integrated circuits with suitable combinational logic gates, programmable gate arrays (PGAs), field programmable gate arrays (FPGAs), etc.

Those skilled in the art can understand that all or part of the steps carried in carrying out the above implementation method can be completed by a program to instruct related hardware, and the program can be stored in a computer readable storage medium, and the program is executed. Including one or a combination of the steps of the method embodiments.

In addition, each functional unit in each embodiment of the present invention may be integrated into one processing module, or each unit may exist physically separately, or two or more units may be integrated into one module. The above integrated modules can be executed in the form of hardware or in the form of software functional modules. The integrated modules, if executed in the form of software functional modules and sold or used as separate products, may also be stored in a computer readable storage medium.

The above mentioned storage medium may be a read only memory, a magnetic disk or an optical disk or the like. Although the embodiments of the present invention have been shown and described, it is understood that the above-described embodiments are illustrative and are not to be construed as limiting the scope of the invention. The embodiments are subject to variations, modifications, substitutions and variations.

Claims

A cleaning device for cleaning a device substrate, the device substrate comprising a substrate and a device film disposed on an upper surface of the substrate, wherein the cleaning device comprises:

a receiving groove for storing a cleaning agent; and

a wet roller brush disposed in the accommodating groove, wherein the wet roller brush is used to clean a lower surface of the substrate by using a cleaning agent in the accommodating groove;

a dry roller brush for cleaning the device film;

a driving device connecting the wet roller brush and the dry roller brush, and for driving the wet roller brush out of the receiving groove and rotating to clean the lower surface of the substrate, and for driving The dry roller is rotated to clean the device film.
A cleaning apparatus according to claim 1, wherein said cleaning means includes a conveying member for conveying said device substrate to a set position, said driving means for being located at said device substrate When the position is set, the wet roller brush that is driven away from the accommodating groove is rotated to clean the lower surface of the substrate, and the dry roller brush is driven to rotate to clean the device film.
A cleaning apparatus according to claim 1, wherein said cleaning means comprises a fixing member, said fixing member comprising a fixing air hole for adsorbing said device substrate to fix said device substrate.
A cleaning apparatus according to claim 3, wherein said fixing member includes a moisture vent for evacuating moisture in the environment.
The cleaning apparatus according to claim 4, wherein said dehumidifying pores are spaced apart from said device substrate when said fixed pores adsorb said device substrate.
A cleaning apparatus according to claim 4, wherein said fixed air holes and said moisture vent holes are alternately disposed.
A cleaning apparatus according to claim 2, wherein said cleaning means comprises a fixing member for fixing said device substrate, said fixing member comprising a fixing portion moving mechanism for said ascending portion A fixing member is described to cause the device substrate to be detached from the conveying member.
A cleaning apparatus according to claim 1, wherein said driving means comprises a roller moving mechanism, a first rail and a second rail, said dry roller brush and said wet roller brush being movably disposed at said On the first rail, the first rail is movably disposed on the second rail, and the roller moving mechanism is configured to drive the wet roller brush and the dry roller along the first rail Moving relative to the device substrate and for driving the first rail to move back and forth on the second rail, the first rail and the second rail are not parallel.
The cleaning device of claim 8 wherein said first rail and said second rail are perpendicular.
A cleaning device according to claim 8, wherein said roller moving mechanism is for driving said dry A roller brush and the wet roller brush hold the device substrate.
A cleaning apparatus according to claim 10, wherein said roller moving mechanism includes a cylinder and a proportional valve, said cylinder connecting said proportional valve and said first rail, said roller moving mechanism passing said A proportional valve adjusts a pressure of the cylinder to control a force of the dry roller brush and the wet roller brush to clamp the device substrate.
A manufacturing apparatus for a flexible display, comprising the cleaning device according to any one of claims 1-11.
A manufacturing apparatus according to claim 12, wherein said manufacturing apparatus includes a peeling means for peeling said cleaned substrate from said device film.
The manufacturing apparatus according to claim 13, wherein said peeling means comprises a laser stripping means.