CN202824004U - Base plate cleaning device - Google Patents
Base plate cleaning device Download PDFInfo
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- CN202824004U CN202824004U CN 201220520997 CN201220520997U CN202824004U CN 202824004 U CN202824004 U CN 202824004U CN 201220520997 CN201220520997 CN 201220520997 CN 201220520997 U CN201220520997 U CN 201220520997U CN 202824004 U CN202824004 U CN 202824004U
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- transmission shaft
- baffle plate
- power transmission
- via hole
- cleaning
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Abstract
The utility model provides a base plate cleaning device which comprises a cleaning box which is used for providing an operating space for cleaning technology of the surface of a base plate. The cleaning box comprises a baffle, a cleaning brush, a transmission shaft and a prevention mechanism, the baffle is used for separating the operation space from the outside, and a via hole is formed in the baffle. The cleaning brush is used for being contacted with the surface of the base plate and rotating to clean the surface of the base plate, and arranged inside the cleaning box. The transmission shaft is used driving the cleaning brush to rotate, one end of the transmission shaft stretches out of the cleaning box by the via hole, and the other end of the transmission shaft is connected with the cleaning brush inside the cleaning box. The prevention mechanism is used for preventing liquid inside the cleaning box from flowing out of the via hole of the baffle and arranged on the position of the via hole of the baffle. The prevention mechanism is arranged on the position of the via hole of the baffle of a cleaning groove so as to prevent liquid on the surface of glass from flowing out of the cleaning groove along the transmission shaft from the position of the via hole of the cleaning groove, ensure that the connecting portion of the transmission shaft and the motor works in dry environment, ensure operation stability of equipment, and prolong service life of equipment.
Description
Technical field
The utility model relates to a kind of base plate cleaning device, belongs to the Display Technique field.
Background technology
In the production technology of liquid crystal panel manufacturing and semiconductor applications, matting is one of the technique that must use.After white glass (Bare Glass) breaks a seal, be called preliminary cleaning (Initial Clean) through the most initial cleaning, to guarantee its surface cleanliness in the Substrate manufacture process from packing case.
As shown in Figure 1, TFT-LCD(Thin Film Transistor Liquid Crystal Display, Thin Film Transistor-LCD) in the array glass substrate manufacture process, when glass tentatively cleans, glass along certain throughput direction, enters cleaning case 100 from glass inlet port A under the conveying mechanism effect of base plate cleaning device, after in cleaning case 100, carrying out glass cleaning process, again from glass outlet N out.Wherein, cleaning case 100 comprises between the first buffering interval B, the second buffering area that sets gradually along the glass throughput direction between C, the interval D of the first spray, the interval E of the first cleaning agent, the interval F of the second cleaning agent, the interval G of the second spray, the interval H of the 3rd spray, the interval I of the 4th spray, the interval J of the 5th spray, the interval K of the 6th spray, the interval L of air knife and the 3rd buffering area M etc.Wherein, in each cleaning agent interval, glass is to utilize the cleaning brush that is arranged at the rotation in the cleaning case 100 to scrub glass surface to reach the cleaning purpose.
As shown in Figure 2, cleaning brush 200 in the cleaning case 100 of base plate cleaning device, under power transmission shaft 400, motor 500 etc. drive, to rotate, wherein, power transmission shaft 400 1 ends are connected with the cleaning brush 200 of cleaning case 100 inside, the other end passes the via hole 102 on the baffle plate 101 of cleaning case 100, is connected with the motor 500 that is positioned at cleaning case 100 outsides by bolt, screw thread etc.The connecting portion of power transmission shaft 400 and motor 500 is positioned at Z between the dry section of cleaning case 100 outsides, requires the environment of Z between dry section more dry better.
But, because TFT(Thin Film Transistor, thin film transistor (TFT)) and involved most cleaning processes in the industry (comprise wet etching, wet method peel off) all need to tilt to carry (about 15 ° of angles tilt) glass.In the TFT-LCD array glass substrate manufacture process, glass also needs to tilt to carry when preliminary the cleaning, and the power transmission shaft 400 of cleaning brush 200 also is the setting of inclination certain angle.Like this, in the glass course of conveying, have large quantity of fluid and flow down along the incline direction of glass.Because the space in the existing base plate cleaning device between the via hole 102 on the baffle plate 101 of power transmission shaft 400 and cleaning case 100 does not arrange black box, liquid can be along the power transmission shaft 400 of cleaning brush 200, and the via hole 102 from baffle plate 101 flows out between the dry section of cleaning case 100 outsides; Simultaneously, to glass 300 surface spraying liquid the time, it is low-priced to the via hole 102 of baffle plate 101 and the gap location of power transmission shaft 400 also to have partially liq; Like this, will cause the metal parts such as power transmission shaft 400, motor 500 to work in the very large environment of humidity for a long time, serious words can affect the stability of motor 500, and motor 500 is caused damage.
The utility model content
In order to solve in the above-mentioned prior art in the Substrate manufacture process, having liquid infiltrates from the cleaning case of base plate cleaning device, and the problem that causes power transmission shaft and CD-ROM drive motor connecting portion in the very large environment of humidity, to move, the utility model provides a kind of base plate cleaning device, can prevent that liquid from leaking out between the dry section of cleaning case outside from cleaning case.
Technical scheme provided by the utility model is:
A kind of base plate cleaning device comprises:
Be used to the substrate surface cleaning that the cleaning case of working space is provided, described cleaning case comprises the baffle plate that separates for described working space and outside, and described baffle plate is provided with via hole;
Be used for the cleaning brush on cleaning base plate surface, being arranged at the inside of described cleaning case in substrate surface contact and rotation;
Be used for driving the power transmission shaft of described cleaning brush rotation, an end stretches out outside the described baffle plate by described via hole, and the other end is connected with the described cleaning brush of described cleaning case inside;
And the liquid that is used for stoping described cleaning case inside is located at the via hole place of described baffle plate from the prevention mechanism that the via hole on the described baffle plate flows out.
Further, described prevention mechanism comprises that one is used for the inner sleeve that stops the described power transmission shaft of liquid runs down to flow to described via hole place, and described inner sleeve is sheathed on the described power transmission shaft and between described cleaning brush and described baffle plate.
Further, described inner sleeve comprises that one is sheathed on the pad of the ring-type on the described power transmission shaft, and the external diameter of described pad is greater than the internal diameter of the via hole on the described baffle plate.
Further, described prevention mechanism comprises that also one is sheathed on the axle sleeve of the ring-type on the described power transmission shaft, is fixed with one with the pad of ring-type, and wherein, described pad is positioned at the end near described via hole.
Further, described prevention mechanism also comprises blocks seal cover, and the space that is used for blocking between described power transmission shaft and the described baffle plate is flowed out by described space with prevention liquid.
Further, the described seal cover that blocks has the second end that opening-like first end and center have through hole for to cover the shape structure, and the aperture area of described first end is cavity volume greater than the via area of described the second end between described first end and described the second end;
Wherein,
And the edge of the opening of described first end is connected regularly or removably with described baffle plate, and the inner edge diameter of the through hole of described the second end is greater than described power transmission shaft external diameter, and installs described power transmission shaft in the through hole of described the second end;
Perhaps,
The opening of the described first end that blocks seal cover is towards described baffle plate, and the edge of the opening of described first end is around the via hole of described baffle plate, and the edge of the opening of described first end and described baffle plate from, the inner edge of the through hole of described the second end is connected regularly or removably with described power transmission shaft;
Perhaps,
The opening of the described first end that blocks seal cover is towards described cleaning brush, install described power transmission shaft in the through hole of described the second end that blocks seal cover, and the through hole inner edge of described the second end is connected regularly or removably with described baffle plate or with described power transmission shaft.
Further, described chamber wall of blocking seal cover is provided with at least one draining hole, and the horizontal level of described draining hole is lower than the via hole of described baffle plate.
Further, described prevention mechanism comprises fan assembly, and described fan assembly is used for producing the air-flow that blows to described cleaning case inside at the via hole place of described baffle plate, with the fan assembly that stops liquid to flow out from the via hole of described baffle plate.
Further, described fan assembly is arranged on described via hole place, and is fixed on the described baffle plate or is fixed on the described power transmission shaft.
Further, described fan assembly comprises: a plurality of blast fans that can rotate under described power transmission shaft drives, described a plurality of blast fans circumferentially are uniformly distributed on the described power transmission shaft along described power transmission shaft.
Further, described base plate cleaning device comprises also that be used to the motor that drives described power transmission shaft rotation described motor stretches out the outer end of described via hole with described power transmission shaft and is connected.
The beneficial effects of the utility model are:
Substrate cleaning plant of the present utility model is provided with one and stops mechanism at the via hole place of the baffle plate of cleaning case, stop the interior liquid of cleaning case to flow out to outside the cleaning case from the via hole of baffle plate, thereby having guaranteed that power transmission shaft and motor connecting portion are in the dry environment moves, guarantee stable equipment operation, improved equipment life.
Description of drawings
Fig. 1 represents the overall schematic of base plate cleaning device in the prior art;
Fig. 2 represents the internal structure schematic diagram of base plate cleaning device in the prior art;
Fig. 3 represents the structural representation of the first embodiment of base plate cleaning device of the present utility model;
Fig. 4 represents the structural representation of the second embodiment of base plate cleaning device of the present utility model;
Fig. 5 represents the structural representation of the prevention mechanism among the second embodiment of base plate cleaning device of the present utility model;
Fig. 6 represents the structural representation of the 6th kind of embodiment of base plate cleaning device of the present utility model;
Fig. 7 represents the structural representation of the tenth kind of embodiment of base plate cleaning device of the present utility model;
Fig. 8 represents the structural representation of the 11 kind of embodiment of base plate cleaning device of the present utility model;
Fig. 9 represents the structural representation of the 12 kind of embodiment of base plate cleaning device of the present utility model.
The specific embodiment
Below in conjunction with accompanying drawing principle of the present utility model and feature are described, institute gives an actual example and only is used for explaining the utility model, is not be used to limiting scope of the present utility model.
In TFT-LCD array base palte manufacture process, the base plate cleaning device that is used for glass is tentatively cleaned mainly comprises cleaning case 100, and the inside of cleaning case 100 is provided with working space, can carry out the preliminary washing and cleaning operation of substrate (glass) in this working space.As shown in Figure 1, cleaning case 100 inside are provided with the conveying mechanism (not shown) for delivery of glass 300, and according to the cleaning requirement of glass, cleaning case 100 is divided into the first buffering interval B successively along glass throughput direction (being the glass throughput direction among the figure shown in the arrow), C between the second buffering area, the interval D of the first spray, the interval E of the first cleaning agent, the interval F of the second cleaning agent, the interval G of the second spray, the interval H of the 3rd spray, the interval I of the 4th spray, the interval J of the 5th spray, the interval K of the 6th spray, between the interval L of air knife and the 3rd buffering area between a plurality of process island such as M.Certainly, more than also can adjust as required between each process island, as more/few spray interval, more/between few buffering area etc.
As shown in Figure 2, in each cleaning agent interval of cleaning case 100, be provided with cleaning brush 200, cleaning brush 200 can with glass 300 Surface Contacts, and in glass 300 surface rotations, above glass 300 surfaces, also be provided with to the spray equipment (not shown) of glass 300 surface spraying liquid, thereby cleaning brush 200 reaches the purpose of cleaning glass 300 surfaces in rotary course.
As shown in Figure 2, cleaning brush 200 is to be rotated under the driving of power transmission shaft 400 and motor 500, wherein, motor 500 is arranged at the outside of cleaning case 100, one end of power transmission shaft 400 is connected with the motor 500 of cleaning case 100 outsides, and the via hole 102 that the other end passes on the baffle plate 101 of cleaning case 100 is connected with the cleaning brush 200 of cleaning case 100 inside.Because glass 300 in preliminary cleaning process, needs to tilt certain angle to carry, as shown in Figure 2, the cleaning brush 200 that is used for the cleaning glass 300 surfaces certain angle setting of also tilting.
The liquid on base material cleaning plant glass of the prior art 300 surfaces can flow to along the power transmission shaft 400 of cleaning brush 200 outside of cleaning case 100 through the via hole 102 on cleaning case 100 baffle plates 101, simultaneously, in to glass 300 cleaning courses, partially liq also can splash to via hole 102, thereby the connecting portion that causes power transmission shaft 400 and motor 500 grades is in the wet environment and moves, and affects stabilization of equipment performance.
Shown in Fig. 3 to 9, base material cleaning device provided by the utility model, via hole 102 places on the baffle plate 101 of cleaning case 100 are provided with and stop mechanism, flow out to cleaning case 100 outsides with the liquid that stops cleaning case 100 inside from the via hole 102 on the baffle plate 101, guaranteed the dry environment of power transmission shaft 400 with the connecting portion of motor 500, guarantee stable equipment operation, improved equipment life.
As shown in Figure 3, in the first embodiment provided by the utility model, this prevention mechanism comprises that one is sheathed on the inner sleeve 602 on the power transmission shaft 400, and this inner sleeve 602 is between cleaning brush 200 and baffle plate 101.This inner sleeve 602 is sheathed on the power transmission shaft 400, plays the effect that changes liquid flow direction.When the liquid on glass 300 surfaces since Action of Gravity Field when power transmission shaft 400 flows downward, liquid is subject to stopping of inner sleeve 602, no longer flow down along power transmission shaft 400, and directly drop in the cleaning case 100, thereby avoided entering into from the liquid that glass 300 surfaces flow down the via hole 102 of baffle plate 101.
As shown in Figure 3, this inner sleeve 602 can comprise at least that one is set in diameter on the power transmission shaft 400 more than or equal to the pad 6021 of the ring-type of the internal diameter of the via hole 102 on the baffle plate 101, and the distance between pad 6021 and the baffle plate 101 should comparatively press close to be advisable, greatly between 2 ~ 3mm.
As shown in Figure 3, this inner sleeve 602 can also comprise that one is sheathed on the axle sleeve 6022 of the ring-type on the power transmission shaft 400, and this axle sleeve 6022 can be fixed with one with the pad 6021 of ring-type, and pad 6021 is positioned at the end near the via hole 102 of baffle plate 101.Certainly, in actual applications, this inner sleeve 602 is not limited to comprise the form of pad 6021 and axle sleeve 6022, can also adopt other versions, enumerates no longer one by one at this.
In addition, in the second embodiment provided by the utility model, in order to stop liquid to be flowed out through via hole 102 by the space between power transmission shaft 400 and the baffle plate 101, and flow to power transmission shaft 400 and motor 500 connecting portions, as shown in Figure 4 and Figure 5, on the basis of the first embodiment provided by the utility model, this prevention mechanism comprises that also one blocks seal cover 601, and flow out with prevention liquid in the space that is used for blocking between power transmission shaft 400 and the baffle plate 101.Preferably, as shown in Figure 4 and Figure 5, this blocks seal cover 601 for to cover the shape structure, has the second end that opening-like first end and center have through hole 6012, the aperture area of first end is greater than the area of the through hole 6012 of the second end, and is cavity volume between first end and the second end; Wherein,
Block the opening of first end of seal cover 601 towards baffle plate 101, and the edge of opening is around the via hole 102 of baffle plate 101, and is connected with baffle plate 101; Block the inner edge diameter of through hole 6012 of the second end of seal cover 601 greater than the external diameter of power transmission shaft 400, install power transmission shaft 400 in this through hole 6012; Inner sleeve 602 places in the cavity volume; And the maximum outside diameter of the pad 6021 of the ring-type of this inner sleeve 602 is less than the internal diameter that blocks seal cover 601 cavity volumes, and greater than the internal diameter of the through hole 6012 of the second end that blocks seal cover 601.
Said structure block seal cover 601, because blocking the opening edge edge of the first end of seal cover 601 centers on around the via hole 102 of baffle plate 101, and be connected with baffle plate 101, and through hole 6012 diameters of the second end are less than the external diameter of inner sleeve 602, therefore, block seal cover 601 and can cover at outside the inner sleeve 602, and spiral-lock prevents well that at via hole 102 places of baffle plate 101 liquid from entering into via hole 102 places by space between inner sleeve 602 and the baffle plate 101.
In addition, in the second embodiment provided by the utility model, preferably, the edge of opening that blocks the first end of seal cover 601 can adopt removably with baffle plate 101 that connected mode is connected, such as, at the edge of the opening of the first end that blocks seal cover 601 external screw thread is set, relative set internal thread around the via hole 102 of baffle plate 101, block seal cover 601 by the cooperating of external screw thread and internal thread, and removably be connected on the baffle plate 101 for convenience detach and maintenance.What certainly can understand is, in actual applications, and baffle plate 101 and block modes such as can also adopting welding between the seal cover 601 and directly be connected.
Should be understood that, in actual applications, this blocks seal cover 601 can also adopt other versions, such as: this blocks the tubular construction of seal cover 601 for arranging around inner sleeve 602 peripheries, this tubular construction one end and baffle plate 101 are connected, other end diameter and inner sleeve 602 equal diameters.
In addition, in the second embodiment provided by the utility model, the liquid runs down power transmission shaft 400 on glass 300 surfaces flows downward, and through hole 6012 flow directions that have partially liq can pass through the second end that blocks seal cover 601 are blocked in the cavity volume of seal cover 601, this part liquid is being stoped by inner sleeve 602 when power transmission shaft 400 flows downward and is directly dripping below the cavity volume that blocks seal cover 601, too much in accumulation in order to prevent the liquid in this cavity volume that blocks seal cover 601, and overflow from the via hole 102 of baffle plate 101, preferably, on the chamber wall of blocking seal cover 601, also be provided with at least one draining hole 6011, and the horizontal level of draining hole 6011 is lower than via hole 102 horizontal levels of baffle plate 101.Because the setting of draining hole 6011, the liquid that blocks in the seal cover 601 can directly be back to cleaning case 100.
In addition, in the second embodiment provided by the utility model, preferably, as shown in Figure 4 and Figure 5, it is so interior that the axle sleeve 6022 of the ring-type of inner sleeve 602 can be arranged on the through hole 6012 of the second end that blocks seal cover 601, the axle sleeve 6022 of ring-type further stops liquid to enter in the cavity volume that blocks seal cover 601 on the one hand, on the other hand, pad 6021 diameters of ring-type are greater than the external diameter of the axle sleeve 6022 of ring-type, can play the effect that changes flow direction, stop liquid runs down power transmission shaft 400 to flow, and fall into the cavity volume bottom of blocking seal cover 601, the pad 6021 of ring-type is gone back because diameter greater than through hole 6012 diameters that block seal cover 601 second ends, can also play the effect of labyrinth seal, and further to blocking through hole 6012 excellent sealings of seal cover 601 second ends.
In addition, in the third embodiment provided by the utility model, with respect to the second embodiment, blocking seal cover 601 can also be to be assemblied in the following ways on this base plate cleaning device:
Block the opening of first end of seal cover 601 towards baffle plate 101, and the edge of the opening of first end is around the via hole 102 of baffle plate 101, and the edge of the opening of first end and baffle plate 101 from, the inner edge of the through hole 6012 of the second end is connected regularly or removably with power transmission shaft 400, that is to say, compared to the second embodiment, the first end opening that blocks seal cover 601 is separated with baffle plate 101, and so that block seal cover 602 can be with power transmission shaft 400 rotation.
In addition, in the 4th kind of embodiment provided by the utility model, with respect to the second embodiment, blocking seal cover 601 can also be to be assemblied in the following ways on this base plate cleaning device:
Block the opening of first end of seal cover 601 towards cleaning brush 200, install power transmission shaft 400 in the through hole 6012 of its second end, and the inner edge of the through hole 6012 of the second end and baffle plate 101 adopt the mode that is connected or removably mode be connected.That is to say, compared to the second embodiment, the first end and the second end that block seal cover 601 are exchanged, and so that block seal cover 601 and can rotate with power transmission shaft 400.
In addition, in the 5th kind of embodiment provided by the utility model, with respect to the 4th kind of embodiment, blocking seal cover 601 can also be to be assemblied in the following ways on this base plate cleaning device:
Block the opening of first end of seal cover 601 towards cleaning brush 200, install power transmission shaft 400 in the through hole 6012 of its second end, and the inner edge of the through hole 6012 of the second end and power transmission shaft 400 adopt the mode that is connected or removably mode be connected.That is to say, compared to the second embodiment, the first end and the second end that block seal cover 601 are exchanged, and so that block seal cover 601 second ends and be fixed on the baffle plate 101.
In addition, in the 6th kind of embodiment provided by the utility model, as shown in Figure 6, this stops mechanism can also only be that spiral-lock is in via hole 102 places of baffle plate 101, and be sheathed on and block seal cover 601 on the power transmission shaft 400, it is arranged on the inside of cleaning case 100, and at least a portion shelters from the via hole 102 of baffle plate 101, splashes down to via hole 102 places of baffle plate 101 to stop the liquid in the cleaning case 100.
In the 6th kind of embodiment provided by the utility model, preferred, as shown in Figure 6, this blocks seal cover 601 for to cover the shape structure, has the second end that through hole 6012 is established at opening-like first end and center, and its inside has cavity volume.Wherein, block the opening of first end of seal cover 601 towards baffle plate 101, and the edge of opening is around the via hole 102 of baffle plate 101, and with baffle plate 101 combinations, thereby will block seal cover 601 spiral-locks in via hole 102 places of baffle plate 101; Block in the through hole 6012 of the second end of seal cover 601 and install power transmission shaft 400.Block seal cover 601 by what the via hole 102 place's spiral-locks one at the baffle plate 101 of cleaning case 100 had a cavity volume, when glass 300 lip-deep liquid flow downward along power transmission shaft 400, block the effect that seal cover 601 plays via hole 102 places that stop flow direction baffle plate 101; Simultaneously, block seal cover 601 spiral-locks around the via hole 102 of baffle plate 101, stop liquid to splash down to via hole 102 places.
In the 6th kind of embodiment provided by the utility model, preferably, the edge of opening that blocks the first end of seal cover 601 adopts removably with baffle plate 101, and connected mode is connected, such as, edge at the opening of the first end that blocks seal cover 601 arranges external screw thread, and relative set internal thread around the via hole 102 of baffle plate 101 blocks seal cover 601 cooperating by external screw thread and internal thread, and removably be connected on the baffle plate 101 for convenience detach and maintenance.What certainly can understand is, in actual applications, and baffle plate 101 and block modes such as can also adopting welding between the seal cover 601 and directly be connected.
In addition, in the present embodiment, as shown in Figure 3, preferably, offer at least one draining hole 6011 in the chamber wall of blocking seal cover 601, the horizontal level of draining hole 6011 is lower than the horizontal level of via hole 102, is used for entering into liquid backflow in the cavity volume that blocks seal cover 601 to the inside of cleaning case 100.Like this, even when having partially liq to flow along power transmission shaft 400, the through hole 6012 that can pass through the second end that blocks seal cover 601 enters and blocks in the seal cover 601, because blocking the opening edge of the first end of seal cover 601 arranges along the via hole 102 on baffle plate 101, below the via hole 102 and block between the seal cover 601 collecting chamber that can form a liquid, the liquid in the collecting chamber can be back to cleaning case 100 inside by draining hole 6011.
Same, in the 7th kind of embodiment provided by the utility model, with respect to the 6th kind of embodiment, blocking seal cover 601 can also be to be assemblied in the following ways on this base plate cleaning device:
Block the opening of first end of seal cover 601 towards baffle plate 101, and the edge of the opening of first end is around the via hole 102 of baffle plate 101, and the edge of the opening of first end and baffle plate 101 from, the inner edge of the through hole 6012 of the second end is connected regularly or removably with power transmission shaft 400.That is to say, compared to the 6th kind of embodiment, the first end opening that blocks seal cover 601 is separated with baffle plate 101, and so that block seal cover 602 can be with power transmission shaft 400 rotation.
In addition, in the 8th kind of embodiment provided by the utility model, with respect to the 6th kind of embodiment, blocking seal cover 601 can also be to be assemblied in the following ways on this base plate cleaning device:
Block the opening of first end of seal cover 601 towards cleaning brush 200, install power transmission shaft 400 in the through hole 6012 of its second end, and the inner edge of the through hole 6012 of the second end and baffle plate 101 adopt the mode that is connected or removably mode be connected.That is to say, compared to the 6th kind of embodiment, the first end and the second end that block seal cover 601 are exchanged, and so that block seal cover 601 and can rotate with power transmission shaft 400.
In addition, in the 9th kind of embodiment provided by the utility model, with respect to the 6th kind of embodiment, blocking seal cover 601 can also be to be assemblied in the following ways on this base plate cleaning device:
Block the opening of first end of seal cover 601 towards cleaning brush 200, install power transmission shaft 400 in the through hole 6012 of its second end, and the inner edge of the through hole 6012 of the second end and power transmission shaft 400 adopt the mode that is connected or removably mode be connected.That is to say, compared to the 6th kind of embodiment, the first end and the second end that block seal cover 601 are exchanged, and so that block seal cover 601 second ends and be fixed on the baffle plate 101.
In addition, in the provided by the utility model ten kind of embodiment, as shown in Figure 7, on the basis of the first embodiment of the present utility model, this prevention mechanism can also comprise a fan assembly 603, this fan assembly 603 is arranged at via hole 102 places of baffle plate 101, and be positioned at the outside of cleaning case 100, can be fixed on the baffle plate 101, also can be fixed on the power transmission shaft 400, be used for producing the air-flow that blows to cleaning case 100 inside at via hole 102 places of baffle plate 101, flow out from the via hole 102 of baffle plate 101 to stop liquid.
In the provided by the utility model ten kind of embodiment, preferably, fan assembly 603 comprises a plurality of blast fans that can rotate under power transmission shaft 400 drives, via hole 102 positions near baffle plate 101 on power transmission shaft 400 are provided with bearing, a plurality of blast fans directly are inserted on the bearing of power transmission shaft 400, and are bolted and get final product; And a plurality of blast fans circumferentially evenly distribute along power transmission shaft 400, preferably select the blast fan that weight is light, homogeneity is good, and the wind-force of blast fan is as far as possible large, to obtain better to stop the effect of fluid seepage.
In addition, in the 11 kind of embodiment provided by the utility model, as shown in Figure 8, on the basis of the second embodiment of the present utility model, this prevention mechanism can also comprise a fan assembly 603, this fan assembly 603 is arranged at via hole 102 places of baffle plate 101, and be positioned at the outside of cleaning case 100, can be fixed on the baffle plate 101, also can be fixed on the power transmission shaft 400, be used for producing the air-flow that blows to cleaning case 100 inside at via hole 102 places of baffle plate 101, flow out from the via hole 102 of baffle plate 101 to stop liquid.
In the 11 kind of embodiment provided by the utility model, preferably, fan assembly 603 comprises a plurality of blast fans that can rotate under power transmission shaft 400 drives, via hole 102 positions near baffle plate 101 on power transmission shaft 400 are provided with bearing, a plurality of blast fans directly are inserted on the bearing of power transmission shaft 400, and are bolted and get final product; And a plurality of blast fans circumferentially evenly distribute along power transmission shaft 400, preferably select the blast fan that weight is light, homogeneity is good, and the wind-force of blast fan is as far as possible large, to obtain better to stop the effect of fluid seepage.
In addition, in the 12 kind of embodiment provided by the utility model, as shown in Figure 9, on the basis of the 6th kind of embodiment of the present utility model, this prevention mechanism can also comprise a fan assembly 603, this fan assembly 603 is arranged at via hole 102 places of baffle plate 101, and be positioned at the outside of cleaning case 100, can be fixed on the baffle plate 101, also can be fixed on the power transmission shaft 400, be used for producing the air-flow that blows to cleaning case 100 inside at via hole 102 places of baffle plate 101, flow out from the via hole 102 of baffle plate 101 to stop liquid.
In the 12 kind of embodiment provided by the utility model, preferably, fan assembly 603 comprises a plurality of blast fans that can rotate under power transmission shaft 400 drives, via hole 102 positions near baffle plate 101 on power transmission shaft 400 are provided with bearing, a plurality of blast fans directly are inserted on the bearing of power transmission shaft 400, and are bolted and get final product; And a plurality of blast fans circumferentially evenly distribute along power transmission shaft 400, preferably select the blast fan that weight is light, homogeneity is good, and the wind-force of blast fan is as far as possible large, to obtain better to stop the effect of fluid seepage.
It should be understood that, in other embodiment of the present utility model, also can on the basis of the 3rd, the 4th, the 5th, the 7th, the 8th or the 9th embodiment provided by the utility model, arrange such as the fan assembly 603 among the 11, the 12 and the 13 embodiment; And the base plate cleaning device that the various embodiments described above of the present utility model provide can also comprise for the motor 500 that rotary power is provided to power transmission shaft; Enumerate no longer one by one at this, those skilled in the art can make corresponding improvement on each embodiment basis provided by the utility model.
The above is preferred embodiment of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from principle described in the utility model; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (11)
1. base plate cleaning device comprises:
Be used to the cleaning case that substrate surface cleans provides working space, described cleaning case comprises the baffle plate that separates for described working space and outside, and described baffle plate is provided with via hole;
Be positioned at described cleaning case inside, contact with substrate surface and rotate the cleaning brush with the cleaning base plate surface;
Be used for driving the power transmission shaft of described cleaning brush rotation, an end of described power transmission shaft stretches out outside the described baffle plate by described via hole, and the other end is connected with described cleaning brush;
It is characterized in that described base plate cleaning device also comprises:
The liquid that is used for stoping described cleaning case inside is located at the via hole place of described baffle plate from the prevention mechanism that the via hole on the described baffle plate flows out.
2. base plate cleaning device according to claim 1, it is characterized in that: described prevention mechanism comprises for the inner sleeve that stops the described power transmission shaft of liquid runs down to flow to described via hole place, and described inner sleeve is sheathed on the described power transmission shaft and between described cleaning brush and described baffle plate.
3. base plate cleaning device according to claim 2, it is characterized in that: described inner sleeve comprises the pad that is sheathed on the ring-type on the described power transmission shaft, the external diameter of described pad is greater than the internal diameter of the via hole on the described baffle plate.
4. base plate cleaning device according to claim 3, it is characterized in that: described inner sleeve also comprises the axle sleeve that is sheathed on the ring-type on the described power transmission shaft, is fixed with one with the described pad of ring-type, wherein said pad is positioned at the end near described via hole.
5. base plate cleaning device according to claim 1 is characterized in that: described prevention mechanism comprises blocks seal cover, and the space that is used for blocking between described power transmission shaft and the described baffle plate is flowed out by described space with prevention liquid.
6. base plate cleaning device according to claim 5, it is characterized in that: the described seal cover that blocks is for covering the shape structure, have opening-like first end and center and have the second end of through hole, the aperture area of described first end is cavity volume greater than the via area of described the second end between described first end and described the second end;
Wherein,
The opening of the described first end that blocks seal cover is towards described baffle plate, and the edge of the opening of described first end is around the via hole of described baffle plate, and the edge of the opening of described first end is connected regularly or removably with described baffle plate, the inner edge diameter of the through hole of described the second end is greater than described power transmission shaft external diameter, and installs described power transmission shaft in the through hole of described the second end;
Perhaps,
The opening of the described first end that blocks seal cover is towards described baffle plate, and the edge of the opening of described first end is around the via hole of described baffle plate, and the edge of the opening of described first end and described baffle plate from, the inner edge of the through hole of described the second end is connected regularly or removably with described power transmission shaft;
Perhaps,
The opening of the described first end that blocks seal cover is towards described cleaning brush, install described power transmission shaft in the through hole of described the second end that blocks seal cover, and the through hole inner edge of described the second end is connected regularly or removably with described baffle plate or with described power transmission shaft.
7. base plate cleaning device according to claim 6, it is characterized in that: described chamber wall of blocking seal cover is provided with at least one draining hole, and the horizontal level of described draining hole is lower than the via hole of described baffle plate.
8. base plate cleaning device according to claim 1, it is characterized in that, described prevention mechanism comprises fan assembly, and described fan assembly is used for producing the air-flow that blows to described cleaning case inside at the via hole place of described baffle plate, flows out from the via hole of described baffle plate to stop liquid.
9. base plate cleaning device according to claim 8 is characterized in that, described fan assembly is arranged on described via hole place, and is fixed on the described baffle plate or is fixed on the described power transmission shaft.
10. according to claim 8 or 9 described base plate cleaning devices, it is characterized in that, described fan assembly comprises: a plurality of blast fans that can rotate under described power transmission shaft drives, described a plurality of blast fans circumferentially are distributed on the described power transmission shaft along described power transmission shaft.
11. base plate cleaning device according to claim 1 is characterized in that, described base plate cleaning device comprises also that be used to the motor that drives described power transmission shaft rotation described motor stretches out the outer end of described via hole with described power transmission shaft and is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220520997 CN202824004U (en) | 2012-10-11 | 2012-10-11 | Base plate cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220520997 CN202824004U (en) | 2012-10-11 | 2012-10-11 | Base plate cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202824004U true CN202824004U (en) | 2013-03-27 |
Family
ID=47935800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220520997 Expired - Lifetime CN202824004U (en) | 2012-10-11 | 2012-10-11 | Base plate cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202824004U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016095299A1 (en) * | 2014-12-18 | 2016-06-23 | 深圳市华星光电技术有限公司 | Cleaning device |
| CN106299043A (en) * | 2016-09-05 | 2017-01-04 | 合肥钰芹信息科技有限公司 | A kind of LED wafer cleaning drying device |
| WO2018201346A1 (en) * | 2017-05-03 | 2018-11-08 | 深圳市柔宇科技有限公司 | Cleaning device, and apparatus for manufacturing flexible display device |
-
2012
- 2012-10-11 CN CN 201220520997 patent/CN202824004U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016095299A1 (en) * | 2014-12-18 | 2016-06-23 | 深圳市华星光电技术有限公司 | Cleaning device |
| US10173251B2 (en) | 2014-12-18 | 2019-01-08 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Cleaning device for cleaning a glass substrate and a semi-finished array substrate |
| CN106299043A (en) * | 2016-09-05 | 2017-01-04 | 合肥钰芹信息科技有限公司 | A kind of LED wafer cleaning drying device |
| WO2018201346A1 (en) * | 2017-05-03 | 2018-11-08 | 深圳市柔宇科技有限公司 | Cleaning device, and apparatus for manufacturing flexible display device |
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