WO2018176918A1 - 传送装置、传送方法以及真空蒸镀装置 - Google Patents
传送装置、传送方法以及真空蒸镀装置 Download PDFInfo
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- WO2018176918A1 WO2018176918A1 PCT/CN2017/116469 CN2017116469W WO2018176918A1 WO 2018176918 A1 WO2018176918 A1 WO 2018176918A1 CN 2017116469 W CN2017116469 W CN 2017116469W WO 2018176918 A1 WO2018176918 A1 WO 2018176918A1
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- Prior art keywords
- conveying
- conveyed
- carrier pad
- conveying member
- transfer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
- B65G2207/10—Antistatic features
Definitions
- Embodiments of the present disclosure relate to a conveying device, a conveying method, and a vacuum evaporation device.
- an OLED (Organic Light Emitting Diode) display device has self-illumination, no backlight module, high contrast, high definition, wide viewing angle, full curing, suitable for flexible panels, good temperature characteristics, and power consumption.
- the basic structure of the OLED display device includes an anode layer, a functional film layer, a cathode layer, and the like.
- the functional film layer may include a hole transport layer, an organic light-emitting layer, an electron transport layer, and the like.
- an organic functional film layer such as an organic light-emitting layer is formed by a vapor deposition film forming method, that is, in an vacuum environment, an organic material is heated to be vaporized or sublimated, and deposited on a substrate to form a corresponding functional film layer.
- At least one embodiment of the present disclosure provides a transport apparatus including: at least one first transport component and at least one second transport component, wherein the first transport component includes a first carrier pad that is in contact with the object being transported
- the second transfer member includes a second carrier pad in contact with the object to be conveyed; the electron-receiving ability of the material of the first carrier pad is stronger than the electron-receiving ability of the material of the second carrier pad
- the electron loss capability of the material of the second carrier pad is stronger than the electron loss of the material of the first carrier pad.
- the material of the first carrier pad is more capable of being electronic than the object to be conveyed, and the material of the second carrier pad is The transmission is more capable of losing electrons.
- the first transfer member and the second transfer member are disposed adjacent to each other, and all of the first carrier pads of the transfer device cause the transfer
- the amount of charge of the positive charge obtained by the object is approximately equal to the amount of charge of the negative charge obtained by all of the second carrier pads of the conveyor.
- the first conveying member and the second conveying member are spaced apart from each other, and all of the first carrier pads of the conveying device cause the object to be conveyed
- the amount of charge of the positive charge obtained is approximately equal to the amount of charge of the negative charge obtained by all of the second carrier pads of the conveyor.
- the first carrier pad makes the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object.
- the amount of negative charge is the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object. The amount of negative charge.
- the conveying device includes a plurality of combined structures, and the first conveying member and the second conveying member belong to the same combined structure or belong to different combined structures.
- the conveying device includes at least one first combined structure and at least one second combined structure, the first combined structure being composed of at least one of the first conveying members, and the second combined structure being composed of at least one of the second conveying Component composition.
- the first combined structure and the second combined structure are disposed adjacent to each other.
- the first combined structure and the second combined structure are spaced apart from each other.
- the material of the first carrier pad comprises bakelite, rosin, polytetrafluoroethylene or sulfur.
- the material of the second carrier pad includes sheepskin, rubber or quartz.
- the first conveying member includes at least one of a robot arm and a conveying platform; and the second conveying member includes at least one of a robot arm and a conveying platform.
- the first transmitting member causes the amount of positive electric charge obtained by the conveyed object to be approximately equal to that obtained by the second transmitting member for the conveyed object.
- the amount of negative charge is the amount of negative charge obtained by the first transmitting member.
- the first transmitting member causes the amount of positive electric charge obtained by the conveyed object to be approximately equal to that obtained by the second transmitting member for the conveyed object.
- the amount of negative charge is the amount of negative charge obtained by the first transmitting member.
- the first conveying member includes a first robot arm
- the second conveying member includes a second robot arm
- the first carrier pad is disposed at the first On a robotic arm
- the second carrier pad is disposed on the second robot arm.
- the first transport component further includes a first transport platform
- the second transport component further includes a second transport platform, an upper surface of the first transport platform
- the material and the material of the first carrier pad have the same electron-loss property; the material of the upper surface of the second transfer platform and the material of the second carrier pad have the same electron-loss properties.
- the material of the upper surface of the first conveying platform and the material of the first bearing pad are the same or different, and the material of the upper surface of the second conveying platform The material of the second carrier pad is the same or different.
- the first transmission platform and the first carrier pad cause the amount of positive electric charge obtained by the object to be approximately equal to the second transmission platform and The amount of charge of the negative charge obtained by the second carrier pad to the object to be conveyed.
- the first conveying member includes a conveying platform
- the second conveying member includes a mechanical arm
- the first bearing pad is disposed on the conveying platform.
- the second carrier pad is disposed on the robot arm.
- the first carrier pad makes the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object.
- the amount of negative charge is the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object. The amount of negative charge.
- At least one embodiment of the present disclosure also provides a vacuum evaporation apparatus comprising any of the above-described transfer devices, a vacuum evaporation chamber, and an evaporation source disposed in the vacuum evaporation chamber.
- At least one embodiment of the present disclosure also provides a transfer method comprising: transferring a conveyed object using a first transfer member and a second transfer member; wherein the first transfer member includes contacting the conveyed object being conveyed a first carrier pad, the second transfer member includes a second carrier pad in contact with the conveyed object being conveyed; an electronic capability of the material of the first carrier pad relative to the second carrier pad The material has a stronger ability to get electrons, and the material of the second carrier pad has a greater ability to lose electrons than the material of the first carrier pad.
- the conveyed object is continuously conveyed using the first transfer member and the second transfer member, or the conveyed object is conveyed at different stages, respectively.
- the material of the first carrier pad is more capable of obtaining electrons than the object to be conveyed
- the material of the second carrier pad is the same as the material of the second carrier pad.
- the transmission is more capable of losing electrons.
- the first conveying member is used to drive the object to be lifted, rotated, or moved horizontally; and the second conveying member is used to drive the object to be lifted and lowered, Rotate or move horizontally.
- FIG. 1 is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure
- FIG. 1b is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure
- FIG. 2 is a schematic structural diagram of a first carrying member provided with a first carrying mat according to an embodiment of the present disclosure
- FIG. 3 is a schematic structural diagram of a second carrying member provided with a second carrying mat according to an embodiment of the present disclosure
- FIG. 4 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- FIG. 4b is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- FIG. 5 is a schematic structural diagram of still another transmitting apparatus according to an embodiment of the present disclosure.
- FIG. 6 is a schematic structural diagram of still another transmitting apparatus according to an embodiment of the present disclosure.
- FIG. 7 is a schematic structural diagram of still another transmitting apparatus according to an embodiment of the present disclosure.
- FIG. 8 is a schematic cross-sectional view of a vacuum evaporation apparatus according to an embodiment of the present disclosure.
- the electronic product to be formed is transferred by the conveying device to complete the preparation of the film structure of each layer.
- the transfer speed is usually accelerated.
- the respective film layer structures are formed under vacuum conditions, it is necessary to ensure the stability of the electronic product to be formed to be transmitted by the friction between the transfer device and the electronic product to be formed.
- the electronic product to be formed may come into contact with the transport device, and static electricity may inevitably occur, but the static electricity may bring various adverse effects.
- OLED organic electroluminescent device
- OLED organic electroluminescent device
- it is generally required to deposit each layer of the thin film layer by using an evaporation device, and it is also required to transfer the substrate to be film-formed using a transfer device.
- the evaporation equipment is usually placed in a vacuum chamber to work when the substrate is in the vacuum chamber
- the transfer member for example, the robot arm
- the control of the base substrate depends entirely on, for example, between the robot arm and the substrate.
- the inventors of the present disclosure have found in research that the friction between the conveying member and the object to be conveyed can be increased by changing the design of the conveying member and the portion of the object to be conveyed in the conveying device while reducing the static electricity. For example, it is possible to change the electron-accepting ability of the material of the conveying member and the portion to be contacted with the object or to change the contact area of the conveying member with the portion of the object to be conveyed to reduce the reduction in the alignment success rate due to the sliding of the object to be conveyed.
- the problem which in turn reduces the chance of fragmentation, which speeds up the transfer, increases productivity, and increases product yield.
- the inventors of the present disclosure have found that the static electricity on the object to be conveyed can be neutralized by changing the material of the conveying member in contact with the object to be conveyed, and the conveying path of the object to be conveyed in the vacuum chamber may be long, the object to be conveyed and conveyed There are also a large number of contact points of the components.
- a material that is more easily electron-acceptable compared to the material of the object to be conveyed
- the material that contacts the transfer member and the object to be transported is replaced with a material that is more susceptible to electron loss (compared with the material of the transported object), so that it is The surface of the transfer produces a negative charge, and the negative charge and the previously accumulated positive charge neutralize each other to reduce the effect of static electricity on the object being conveyed.
- At least one embodiment of the present disclosure provides a transfer device including: at least one first transfer member and at least one second transfer member, the first transfer member including a first carrier pad in contact with the object to be conveyed, the second transfer The component includes a second carrier pad in contact with the object to be conveyed; the electron-receiving ability of the material of the first carrier pad is stronger than the electron-receiving ability of the material of the second carrier pad, and the electron-depleting ability of the material of the second carrier pad is relatively The ability of the material of the first carrier pad to lose electrons is stronger.
- the present disclosure primarily reduces the ability of electrons and electron loss of materials of the transfer member and the object contact portion (eg, the first carrier pad and/or the second carrier pad) to reduce slippage due to the conveyed object.
- the problem of lowering the success rate of the alignment, and also reducing the number of fragments The chance of being born, which can speed up the transfer of the conveyed material, increase the production efficiency, and also improve the yield of the product.
- FIG. 1a is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure.
- the conveying device comprises at least one first conveying member 101 and at least one second conveying member 102, the first conveying member 101 and the second conveying member 102 being disposed adjacent to each other.
- FIG. 1b is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- the conveying device includes a first conveying member 101 and a second conveying member 102, and the first conveying member 101 and the second conveying member 102 are spaced apart.
- FIG. 1a is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure.
- the conveying device includes a first conveying member 101 and a second conveying member 102, and the first conveying member 101 and the second conveying member 102 are spaced apart.
- FIG. 2 is a schematic structural diagram of a first carrying member provided with a first carrying pad according to an embodiment of the present disclosure.
- the first transmitting member 101 includes a first contact with the object to be transported.
- a carrier pad 103 such as a conveyed object, is placed over the first carrier pad 103.
- FIG. 3 is a schematic structural diagram of a second carrying member provided with a second carrying pad according to an embodiment of the present disclosure.
- the second transmitting member 102 includes a second contact with the object to be transported.
- a carrier pad 104 such as a conveyed object, is placed over the second carrier pad 104.
- the electron-carrying ability of the material of the first carrier pad 103 is stronger than the electron-receiving ability of the material of the second carrier pad 104, and the material of the second carrier pad 104 is lost.
- the ability of the electrons is stronger relative to the ability of the first carrier pad 103 to lose electrons.
- first conveying member and the second conveying member shown in FIG. 2 and FIG. 3 are only schematic structural views, and the structures of the first conveying member and the second conveying member may be the same or different, and this is not limited.
- the structure of the first conveying member and the second conveying member may be the same as the structure shown in FIG. 2, or may be the same as the structure shown in FIG. 3, or the second conveying member may be the structure shown in FIG.
- a transfer member is the structure shown in FIG.
- the body of the first conveying member 101 and the body of the second conveying member 102 are formed of a rigid material and are not easily deformed, and the body of the first conveying member 101 and the body of the second conveying member 102 can perform well for the conveyed object. Supporting role to ensure the smoothness of the conveyed material.
- the material of the first bearing pad 103 is different from the material of the body of the first conveying member 101, and the first bearing pad 103 is in contact with the object to be conveyed, and the body of the first conveying member 101 is prevented from directly contacting the object to be conveyed, and, similarly,
- the material of the second carrier pad 104 is different from the material of the body of the second transfer member 102, and the second carrier pad 104 is in contact with the object to be conveyed, and the body of the second transfer member 102 is prevented from coming into direct contact with the object to be conveyed.
- the materials of the first carrier pad 103 and the second carrier pad 104 can be flexibly selected as needed, or can be replaced as needed, thereby enhancing the transmission. The scope of the device reduces the cost of equipment.
- the material of the first carrier pad 103 is more capable of electrons than the object being conveyed
- the material of the second carrier pad 104 is more resistant to electrons than the object being conveyed.
- the object to be transported accumulates a positive charge on the object after being contacted with the first carrier pad 103, and the object is accumulated on the carrier after the contact with the second carrier pad 104, and the object is conveyed.
- the negative charge accumulated after the contact of the second carrier pad 104 can be neutralized with the positive charge accumulated before to reduce the damage of the static electricity to the object to be transported.
- the conveying device may include a plurality of first conveying members 101 and a plurality of second conveying members 102, and in the entire conveying device, the first conveying member 101 and the second conveying member 102 may Arranged adjacent to each other or spaced apart, or both the first transfer member 101 and the second transfer member 102 are disposed adjacent to each other, and the first transfer member 101 and the second transfer member 102 are spaced apart.
- the object to be transported is brought into contact with the first carrying mat 103 on the first transporting member 101.
- the positive charge is neutralized by the negative charge generated by the contact of the object and the second carrier pad 104 on the second transfer member 102, thus reducing the accumulation process of static electricity; when the first transfer member 101 and the second transfer member 102 are spaced apart
- the static electricity is neutralized to a certain extent before being neutralized, as long as the accumulated static electricity amount is less than the minimum static electricity amount causing the chipping phenomenon.
- all of the first carrier pads 103 in the conveyor cause the amount of positive charge obtained by the object to be approximately equal to the negative charge obtained by all of the second carrier pads 104 in the conveyor to the object being conveyed.
- the amount of electricity is such that the static electricity in the conveyor can be substantially neutralized to reduce the amount of static electricity accumulated in the vacuum chamber while reducing the adverse effects of static electricity on the product.
- the amount of electricity generated by the contact with each of the first carrier pads 103 and each of the second carrier pads 104 may be approximately the same or different.
- the amount of electricity generated by the contact with each of the first carrier pads 103 is x
- the amount of electricity generated by the contact with each of the first carrier pads 103 is y
- the number of the second carrier pads 104 is set to be equal to twice the number of the first carrier pads 103, so that all the first carrier pads 103 in the conveyor device make the amount of positive charge obtained by the object to be approximately equal to the transmission.
- the amount of charge of the negative charge obtained by all of the second carrier pads 104 in the device is set to be equal to twice the number of the first carrier pads 103, so that all the first carrier pads 103 in the conveyor device make the amount of positive charge obtained by the object to be approximately equal to the transmission.
- the amount of charge of the negative charge obtained by all of the second carrier pads 104 in the device is set to be equal to twice the
- the first carrier pad 103 causes the amount of positive charge obtained by the object to be transferred to be approximately equal to the first The amount of charge of the negative charge obtained by the second carrier pad 104 to the object being conveyed.
- the first carrier pad 103 and the second carrier pad 104 can be arranged adjacent to each other, and the accumulation of static electricity can be well controlled.
- the amount of power generated by the contact of the object with the first carrier pad 103 and/or the second carrier pad 104 is not only related to the ability of the first carrier pad 103 or the second carrier pad 104 to obtain and lose electrons. It also relates to the contact area of the object to be transported with the first carrier pad 103 and/or the second carrier pad 104. For example, when the first carrier pad 103 of the unit area is in contact with the object to be conveyed so that the amount of charge of the positive charge obtained by the object is n, the contact area of the second carrier pad 104 of the unit area with the object to be conveyed is negative.
- the contact portion of the transport member and the object to be transported are disposed in a planar shape rather than a dot shape to reduce circuit damage caused by tip discharge, for example, a in FIG.
- the area is a patchy area.
- the transport device needs to be subjected to maintenance treatment after a period of use, and the static electricity still present on the transport device can be removed by wiping.
- FIG. 4a is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- the transfer device comprises a plurality of combined structures 20, the first transfer member 101 and the second transfer member 102 belonging to the same combined structure 20.
- a plurality of combined structures 20 are sequentially disposed adjacent to each other.
- the first carrier pad 103 on each of the first transport members 101 causes the amount of positive charge obtained by the object to be transported and the second carrier pad 104 on each of the second transport members 102 to be
- the amount of charge of the negative charge obtained by the transport is substantially equal, such that the charge accumulated by the transport on one of the transport members can quickly cancel out at least a portion of the transport on the next transport structure.
- the amount of positive electric charge obtained after the transfer and the electric quantity of the negative electric charge are also substantially equal, or even if they are not equal, the accumulated static electricity can be surely cleared in time, so that the accumulated static electricity amount is smaller than the minimum static electricity amount causing the fragmentation phenomenon, so that The adverse effects of static electricity are reduced to a very low level.
- FIG. 4b is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- the transfer device comprises a plurality of combined structures 20, the first transfer member 101 and the second transfer member 102 belonging to the same combined structure 20.
- a plurality of combined structures 20 are sequentially disposed adjacent to each other.
- the amount of electricity generated by the contact with each of the first carrier pads 103 is x
- the amount of electricity generated by the contact with each of the first carrier pads 103 is y
- x 3y
- the number of the first transfer members 101 included is three times the number of the second transfer members 102
- the amount of charge of the positive charge obtained by the first carrier pad 103 included in the combined structure 20 is second and second.
- the second carrier pad 104 on the transport member 102 causes the amount of charge of the negative charge obtained by the transport object to be substantially equal, so that the charge accumulated by the transport object on one transport member can be quickly offset by at least the next transport member.
- the amount of the positive electric charge and the negative electric charge obtained by the transported object after being transmitted through the plurality of combined structures 20 are also substantially equal, or even if they are not equal, the accumulated static electricity can be surely cleared in time to accumulate the static electricity.
- the amount is less than the minimum amount of static electricity that causes fragmentation, which can reduce the adverse effects of static electricity to a very low level.
- FIG. 5 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- the conveying device includes a plurality of combined structures, and the first conveying member 101 and the second conveying member 102 belong to the first combined structure 21 and the second combined structure 22, and the first conveying member 101 of the first combined structure 21
- the first carrier pad on the upper side obtains a positive charge of the object to be transported, and correspondingly, the second carrier pad on the second transporting member 102 of the second combined structure 22 causes the object to be transported to obtain a negative charge.
- the carrier pad on the other components in the same combined structure as the first transfer member 101 may have the same or opposite electron-loss performance as the first carrier member, and be the same as the second transfer member 102, with respect to the object to be transported.
- the carrier pads on other components in the combined structure may have the same or opposite electronic and electronic properties as the second carrier pads.
- the carrier pads on the other components in the same combination structure as the first transport member can be set to
- the first carrier pad has the same electron-loss performance or is designed to be the same material.
- a combined structure may include only one transmitting component, and may also include multiple transmitting components.
- FIG. 6 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- the first combined structure 21 includes two first transporting members 101, which are spaced apart.
- the second combined structure 22 includes two second transfer members 102 that are spaced apart.
- the two first transmitting components 101 may also be Or adjacently disposed; or, the first combined structure 21 includes a plurality of first conveying members 101, both of which include two first conveying members 101 disposed adjacent to each other, and two first conveying members 101 spaced apart from each other. situation.
- FIG. 7 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
- the first combined structure 21 includes a plurality of first transfer members 101
- the second combined structure 22 includes a plurality of second transfer members 102, exemplarily, a first transfer member 101 and a second transfer member 102 includes the same component such as a robotic arm.
- the first combined structure 21 may include only a plurality of first transporting members 101, each of which is provided with a first carrier pad 103, and the second combined structure 22 may include only the first
- the second transfer member 102 and the second transfer member 102 are each provided with a second carrier pad 104, as long as the first carrier pad is in contact with the object to be conveyed, so that the amount of static electricity accumulated by the object to be conveyed is less than the minimum amount of static electricity causing the debris phenomenon.
- the number of the first transfer members included in the first combined structure the arrangement of the first transfer members in the first combined structure, the number of the second transfer members included in the second combined structure, and the second combined structure
- the setting of the second transporting component is not limited to the above, and the number of the first transporting component or the second transmitting component and the setting situation may be adjusted as needed, and details are not described herein again.
- the first combined structure 21 and the second combined structure 22 are disposed adjacent to each other.
- the first combined structure 21 and the second combined structure 22 are spaced apart from each other.
- the first combined structure 21 and the second combined structure 22 may be simultaneously disposed adjacent to each other. The situation of being spaced apart from each other will not be described here.
- the first carrier pad 103 on the first transfer member 101 compares the amount of charge of the positive charge obtained by the object to the amount of charge of the negative charge obtained by the second carrier pad 104 on the second transfer member 102. , approximately equal.
- the amount of static electricity accumulated is substantially zero, which can reduce the adverse effects of static electricity to a very low level.
- the material of the first carrier pad when the material of the object to be conveyed is a glass substrate, the material of the first carrier pad includes materials such as bakelite, rosin, polytetrafluoroethylene or sulfur which have electronic properties with respect to the glass.
- the material of the second carrier pad includes materials such as sheepskin, rubber or quartz which have electron-depleting properties with respect to the glass.
- the material of the object to be transported may be any other material, the first carrier pad
- the material of the second carrier pad and the material of the second carrier pad can be adjusted as needed, as long as the frictional force is increased and electrostatic neutralization is performed to reduce the adverse effects caused by static electricity.
- the manner of increasing the friction may further include increasing the coefficient of friction of the first carrier pad and the second carrier pad.
- the first transport component includes at least one of a robotic arm and a transport platform; the second transport component includes at least one of a robotic arm and a transport platform.
- the first transfer component includes a first robotic arm or belt
- the second transport component includes a second robotic arm or belt.
- the robot arm is an example, but the embodiment of the present disclosure is not limited to this specific structure.
- the first carrier pad is disposed on the first robot arm
- the second carrier pad is disposed on the second robot arm. See FIG. 3 for a schematic structural view of the first robot arm and the second robot arm.
- the first robot arm and the second robot arm can transfer a sheet-like product such as a glass substrate between the vacuum reaction chambers.
- the first robot arm can take out the glass substrate from the first vacuum reaction chamber, and then place the glass substrate in the second vacuum reaction chamber by means of lifting, rotating or horizontal movement to perform a process such as vapor deposition and film formation;
- the second robot arm takes out the glass substrate from the second vacuum reaction chamber and then places the glass substrate in the third vacuum reaction chamber by lifting, rotating or horizontally moving to perform an evaporation film forming process of the other film layer.
- the structure shown in FIG. 3 may be a first robot arm or a second robot arm.
- the first and second robot arms include a main support arm 31 and an auxiliary support arm 32 disposed on at least one side of the main support arm 31.
- the robot arm (eg, the first robot arm or the second robot arm) includes at least two auxiliary support arms 32 that are disposed in parallel or symmetrically disposed relative to the main support arm 31, and each of the auxiliary support arms The extension length of 32 is equal.
- the mechanical arm includes a main support arm 31 and eight auxiliary support arms 32 that are symmetrically disposed on both sides of the main support arm 31, respectively.
- auxiliary support arm 32 in the robot arm can be adjusted as needed, as long as it can satisfy the planar and stable support of the object to be transported, which is not limited herein.
- the first robot arm and the second robot arm each include a lifting structure, a rotating structure, and a horizontal telescopic structure to enable the first robot arm and the second robot arm to acquire the conveyed object, and transmit the conveyed object to the vacuum steaming.
- the first robot arm and the second robot arm each include a lifting structure, a rotating structure, and a horizontal telescopic structure to enable the first robot arm and the second robot arm to acquire the conveyed object, and transmit the conveyed object to the vacuum steaming.
- the plating chamber In the plating chamber.
- the transmitting device may further include: driving the first robot arm and/or a first motor that lifts and lowers the second robot arm; a second motor that drives the first robot arm and/or the second robot arm to rotate; and a third motor that drives the first robot arm and/or the second robot arm to horizontally expand and contract.
- the first transfer component includes a transport platform
- the second transport component includes a robotic arm
- the first load bearing pad is disposed on the transport platform
- the second load bearing pad is disposed on the robotic arm.
- the amount of charge of the positive charge obtained by the first carrier pad to the object being conveyed is approximately equal to the amount of charge of the negative charge obtained by the second carrier pad to the object to be transported.
- the amount of static electricity accumulated on the object to be transported is substantially zero.
- At least one embodiment of the present disclosure changes the relative electrons and losses of the material of the transport member and the object contact portion (eg, the first carrier pad, the second carrier pad, or a combination of the first carrier pad and the second carrier pad)
- the ability of electrons to neutralize more static electricity generated by increasing friction and at the same time reduce the problem of lowering the success rate of the alignment caused by the sliding of the object due to the too small frictional force, and also reduce the generation of debris.
- the probability of this can reduce the adverse effects of static electricity while ensuring sufficient friction, so that the rate at which the conveyed material is conveyed can be accelerated, the production efficiency can be improved, and the yield of the product can be improved.
- At least one embodiment of the present disclosure further provides a vacuum evaporation apparatus 40.
- the vacuum evaporation apparatus 40 includes any one of the above-described transfer apparatuses, and the vacuum evaporation apparatus 40 further includes a vacuum evaporation chamber 401 and An evaporation source 402 disposed in the vacuum evaporation chamber 401.
- the vacuum evaporation chamber 401 is further provided with an evaporation substrate (not shown) for placing the substrate to be evaporated, and the opening of the evaporation source 402 faces the vapor deposition base, and the evaporation source 402 may be linear evaporation. source.
- the vacuum evaporation apparatus further includes a cathode 403 disposed on one side of the evaporation source 402, an anode 404 disposed on one side of the vapor deposition abutment, and an inert gas supply device for inputting an inert gas into the vacuum evaporation chamber 401. .
- the vacuum evaporation apparatus may further include a magnetic plate 406 for being placed on the opposite side of the substrate 407 from the evaporation source 402, the anode 404 being disposed on the magnetic plate 406.
- the vacuum evaporation apparatus further includes a mask plate 405 for placement on the side of the substrate 407 opposite the evaporation source 402, the mask plate 405 being connected to the anode 404 by wires.
- the vacuum evaporation process using the vacuum evaporation apparatus 40 includes: drawing the evaporation chamber to a high vacuum state, and inputting an inert gas into the evaporation chamber by using an inert gas supply device; and using the transfer device to transfer the substrate to be evaporated. Transfer to the vacuum evaporation chamber; produce high between the anode and cathode The frequency electric field causes the inert gas to ionize to generate inert gas ions and electrons; the evaporation source is heated, and the evaporated film-forming substance can adsorb electrons to move toward the anode to form a thin film on the surface of the substrate.
- At least one embodiment of the present disclosure also provides a transmission method, where the transmission method includes:
- the object to be conveyed generates a positive charge on the object to be conveyed after contacting the first carrier pad, and the object to be transported generates a negative charge on the object after contacting the second carrier pad, and the object to be conveyed is in the second
- the negative charge generated after the contact of the carrier pad can be neutralized with the positive charge generated previously to reduce the damage of the static electricity to the object to be transported.
- the transfer method can also be:
- the first conveying component includes a first bearing pad contacting the conveyed object being conveyed
- the second conveying component includes a second contacting with the conveyed object being conveyed
- the carrier pad; the electron-carrying ability of the material of the first carrier pad is stronger than the electron-receiving ability of the material of the second carrier pad, and the electron-depleting ability of the material of the second carrier pad is relative to the material of the first carrier pad.
- the ability is stronger.
- the material of the first carrier pad is more capable of electrons than the object being conveyed
- the material of the second carrier pad is more resistant to electrons than the object being conveyed.
- the conveyed object is continuously conveyed using the first transfer member and the second transfer member, or the conveyed object is conveyed at different stages, respectively.
- the positive charge generated by the contact of the object with the first carrier pad on the first conveying member may be on the conveyed object and the second conveying member.
- the negative charge generated by the contact of the second carrier pad is neutralized, which reduces the accumulation process of static electricity and reduces the possibility of debris accumulation caused by static electricity accumulation.
- the static electricity is accumulated to a certain extent before being neutralized, as long as the accumulated static electricity amount is less than the minimum static electricity amount causing the debris phenomenon, so that the first conveying member and the second conveying member can reduce the conveying device during the preparation process.
- the first transmitting component and the second transmitting component belong to the same combined structure or belong to different combined structures.
- the carrier pad on the other component in the same combination structure as the first transfer component has the same or opposite electron-loss performance as the first carrier pad
- the carrier on the other component in the same combination structure as the second transfer component has the same or opposite electron-loss performance as the second carrier pad.
- a combined structure may include only one transmitting component, and may also include multiple transmitting components.
- the first combined structure is comprised of at least one first transfer component and the second combined structure is comprised of at least one second transfer component.
- the first combined structure includes two first transfer members that may be disposed adjacent to each other or may be spaced apart.
- the second combined structure includes two second transfer members that may be disposed adjacent to each other or may be spaced apart.
- the first combined structure may include only a plurality of first conveying members, and does not include other members, and the first conveying member is provided with a first bearing pad; the second combined structure may only The second conveying member is included, and the second conveying member is disposed on the second conveying member, as long as the first bearing mat is in contact with the object to be conveyed, so that the amount of static electricity accumulated by the conveyed object is less than the minimum causing the fragmentation phenomenon.
- the amount of static electricity can be.
- the number of the first transfer members included in the first combined structure the arrangement of the first transfer members in the first combined structure, the number of the second transfer members included in the second combined structure, and the second combined structure
- the setting of the second transmitting component is not limited to the above, and the number of the first transmitting component or the second transmitting component and the setting situation may be adjusted as needed, and details are not described herein again.
- first combined structure and the second combined structure may be disposed adjacent to each other, may be spaced apart from each other, and may also include a case where the first combined structure and the second combined structure are disposed adjacent to each other and spaced apart from each other.
- the material of the first carrier pad is more capable of electrons than the object being conveyed, and the material of the second carrier pad is more resistant to electrons than the object being conveyed.
- the first transfer member when the object to be transported is a glass substrate, the first transfer member is used to drive the glass substrate to be lifted, rotated, or moved horizontally;
- the second conveying member drives the glass substrate to move up, down, or horizontally.
- the first conveying member may take out the glass substrate from the first vacuum reaction chamber, and then place the glass substrate in the second vacuum reaction chamber by means of lifting, rotating or horizontal movement to perform vapor deposition and film formation;
- the second conveying member takes out the glass substrate from the first vacuum reaction chamber and then places the glass substrate in the third vacuum reaction chamber by lifting, rotating or horizontally moving to perform an evaporation film forming process of the other film layer.
- a conveying device, a conveying method, and a vacuum evaporation device provided by at least one embodiment of the present disclosure have at least one of the following beneficial effects:
- a conveying device provided by at least one embodiment of the present disclosure, by changing a contact portion of a conveying member and a conveyed object (for example, a first carrier pad, a second carrier pad, or a combination of a first carrier pad and a second carrier pad) The relative electron and electron loss of the material to neutralize more static electricity due to increased friction;
- the conveying device provided by at least one embodiment of the present disclosure can reduce the problem of lowering the success rate of the alignment caused by the sliding of the conveyed object due to the frictional force being too small, and thus can ensure that the friction is sufficiently large. To reduce the adverse effects of static electricity;
- the transmitting device provided by at least one embodiment of the present disclosure can reduce the probability of debris generation, thereby improving the yield of the product;
- the conveying device provided by at least one embodiment of the present disclosure can speed up the conveyance of the conveyed object and improve the production efficiency
- the materials of the first carrier pad and the second carrier pad can be flexibly selected as needed, or can be replaced as needed, thereby enhancing the application range of the conveying device. , reducing equipment costs.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (14)
- 一种传送装置,包括:至少一个第一传送部件和至少一个第二传送部件,其中,所述第一传送部件包括与被传送物接触的第一承载垫,所述第二传送部件包括与所述被传送物接触的第二承载垫;所述第一承载垫的材料的得电子能力相对于所述第二承载垫的材料的得电子的能力更强,所述第二承载垫的材料的失电子能力相对于所述第一承载垫的材料的失电子的能力更强。
- 根据权利要求1所述的传送装置,其中,所述第一承载垫的材料与所述被传送物相比得电子的能力更强,所述第二承载垫的材料与所述被传送物相比失电子的能力更强。
- 根据权利要求1或2所述的传送装置,其中,所述第一传送部件和所述第二传送部件彼此相邻设置,所述传送装置的全部所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述传送装置的全部所述第二承载垫使所述被传送物获得的负电荷的电量大小。
- 根据权利要求1或2所述的传送装置,其中,所述第一传送部件和所述第二传送部件彼此间隔设置,所述传送装置的全部所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述传送装置的全部所述第二承载垫使所述被传送物获得的负电荷的电量大小。
- 根据权利要求3或4所述的传送装置,其中,所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述第二承载垫使所述被传送物获得的负电荷的电量大小。
- 根据权利要求5所述的传送装置,其中,所述第一传送部件的和所述被传送物接触的部分设置成面状;所述第二传送部件的和所述被传送物接触的部分设置成面状。
- 根据权利要求5所述的传送装置,其中,所述第一传送部件包括机械手臂和传输平台中的至少一种;所述第二传送部件包括机械手臂和传输平台中的至少一种。
- 根据权利要求7所述的传送装置,其中,所述第一传送部件使所述被传送物获得的正电荷的电量大小近似等于所述第二传送部件使所述被 传送物获得的负电荷的电量大小。
- 根据权利要求1-8中任一项所述的传送装置,其中,所述被传送物的材料为玻璃基板,所述第一承载垫的材料包括胶木、松香、聚四氟乙烯或者硫磺,所述第二承载垫的材料包括羊皮、橡胶或者石英。
- 一种真空蒸镀装置,包括权利要求1-9中任一项所述的传送装置。
- 一种传送方法,包括:使用第一传送部件和第二传送部件传送被传送物;其中,所述第一传送部件包括与被传送中的所述被传送物接触的第一承载垫,所述第二传送部件包括与被传送中的所述被传送物接触的第二承载垫;所述第一承载垫的材料的得电子能力相对于所述第二承载垫的材料的得电子的能力更强,所述第二承载垫的材料的失电子能力相对于所述第一承载垫的材料的失电子的能力更强。
- 根据权利要求11所述的传送方法,其中,使用所述第一传送部件和所述第二传送部件连续传送所述被传送物,或分别在不同阶段传送所述被传送物。
- 根据权利要求12所述的传送方法,其中,所述第一承载垫的材料与所述被传送物相比得电子的能力更强,所述第二承载垫的材料与所述被传送物相比失电子的能力更强。
- 根据权利要求11-13中任一项所述的传送方法,其中,使用所述第一传送部件带动所述被传送物升降、旋转或者水平移动;使用所述第二传送部件带动所述被传送物升降、旋转或者水平移动。
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US20210163238A1 (en) | 2021-06-03 |
CN108657819B (zh) | 2019-10-01 |
CN108657819A (zh) | 2018-10-16 |
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