WO2018176918A1 - 传送装置、传送方法以及真空蒸镀装置 - Google Patents

传送装置、传送方法以及真空蒸镀装置 Download PDF

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Publication number
WO2018176918A1
WO2018176918A1 PCT/CN2017/116469 CN2017116469W WO2018176918A1 WO 2018176918 A1 WO2018176918 A1 WO 2018176918A1 CN 2017116469 W CN2017116469 W CN 2017116469W WO 2018176918 A1 WO2018176918 A1 WO 2018176918A1
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WIPO (PCT)
Prior art keywords
conveying
conveyed
carrier pad
conveying member
transfer
Prior art date
Application number
PCT/CN2017/116469
Other languages
English (en)
French (fr)
Inventor
王震
林治明
黄俊杰
井昱
吴文泽
Original Assignee
京东方科技集团股份有限公司
鄂尔多斯市源盛光电有限责任公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 京东方科技集团股份有限公司, 鄂尔多斯市源盛光电有限责任公司 filed Critical 京东方科技集团股份有限公司
Priority to US16/068,493 priority Critical patent/US11535462B2/en
Publication of WO2018176918A1 publication Critical patent/WO2018176918A1/zh

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/10Antistatic features

Definitions

  • Embodiments of the present disclosure relate to a conveying device, a conveying method, and a vacuum evaporation device.
  • an OLED (Organic Light Emitting Diode) display device has self-illumination, no backlight module, high contrast, high definition, wide viewing angle, full curing, suitable for flexible panels, good temperature characteristics, and power consumption.
  • the basic structure of the OLED display device includes an anode layer, a functional film layer, a cathode layer, and the like.
  • the functional film layer may include a hole transport layer, an organic light-emitting layer, an electron transport layer, and the like.
  • an organic functional film layer such as an organic light-emitting layer is formed by a vapor deposition film forming method, that is, in an vacuum environment, an organic material is heated to be vaporized or sublimated, and deposited on a substrate to form a corresponding functional film layer.
  • At least one embodiment of the present disclosure provides a transport apparatus including: at least one first transport component and at least one second transport component, wherein the first transport component includes a first carrier pad that is in contact with the object being transported
  • the second transfer member includes a second carrier pad in contact with the object to be conveyed; the electron-receiving ability of the material of the first carrier pad is stronger than the electron-receiving ability of the material of the second carrier pad
  • the electron loss capability of the material of the second carrier pad is stronger than the electron loss of the material of the first carrier pad.
  • the material of the first carrier pad is more capable of being electronic than the object to be conveyed, and the material of the second carrier pad is The transmission is more capable of losing electrons.
  • the first transfer member and the second transfer member are disposed adjacent to each other, and all of the first carrier pads of the transfer device cause the transfer
  • the amount of charge of the positive charge obtained by the object is approximately equal to the amount of charge of the negative charge obtained by all of the second carrier pads of the conveyor.
  • the first conveying member and the second conveying member are spaced apart from each other, and all of the first carrier pads of the conveying device cause the object to be conveyed
  • the amount of charge of the positive charge obtained is approximately equal to the amount of charge of the negative charge obtained by all of the second carrier pads of the conveyor.
  • the first carrier pad makes the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object.
  • the amount of negative charge is the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object. The amount of negative charge.
  • the conveying device includes a plurality of combined structures, and the first conveying member and the second conveying member belong to the same combined structure or belong to different combined structures.
  • the conveying device includes at least one first combined structure and at least one second combined structure, the first combined structure being composed of at least one of the first conveying members, and the second combined structure being composed of at least one of the second conveying Component composition.
  • the first combined structure and the second combined structure are disposed adjacent to each other.
  • the first combined structure and the second combined structure are spaced apart from each other.
  • the material of the first carrier pad comprises bakelite, rosin, polytetrafluoroethylene or sulfur.
  • the material of the second carrier pad includes sheepskin, rubber or quartz.
  • the first conveying member includes at least one of a robot arm and a conveying platform; and the second conveying member includes at least one of a robot arm and a conveying platform.
  • the first transmitting member causes the amount of positive electric charge obtained by the conveyed object to be approximately equal to that obtained by the second transmitting member for the conveyed object.
  • the amount of negative charge is the amount of negative charge obtained by the first transmitting member.
  • the first transmitting member causes the amount of positive electric charge obtained by the conveyed object to be approximately equal to that obtained by the second transmitting member for the conveyed object.
  • the amount of negative charge is the amount of negative charge obtained by the first transmitting member.
  • the first conveying member includes a first robot arm
  • the second conveying member includes a second robot arm
  • the first carrier pad is disposed at the first On a robotic arm
  • the second carrier pad is disposed on the second robot arm.
  • the first transport component further includes a first transport platform
  • the second transport component further includes a second transport platform, an upper surface of the first transport platform
  • the material and the material of the first carrier pad have the same electron-loss property; the material of the upper surface of the second transfer platform and the material of the second carrier pad have the same electron-loss properties.
  • the material of the upper surface of the first conveying platform and the material of the first bearing pad are the same or different, and the material of the upper surface of the second conveying platform The material of the second carrier pad is the same or different.
  • the first transmission platform and the first carrier pad cause the amount of positive electric charge obtained by the object to be approximately equal to the second transmission platform and The amount of charge of the negative charge obtained by the second carrier pad to the object to be conveyed.
  • the first conveying member includes a conveying platform
  • the second conveying member includes a mechanical arm
  • the first bearing pad is disposed on the conveying platform.
  • the second carrier pad is disposed on the robot arm.
  • the first carrier pad makes the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object.
  • the amount of negative charge is the amount of positive electric charge obtained by the conveyed object approximately equal to that obtained by the second carrying mat for the conveyed object. The amount of negative charge.
  • At least one embodiment of the present disclosure also provides a vacuum evaporation apparatus comprising any of the above-described transfer devices, a vacuum evaporation chamber, and an evaporation source disposed in the vacuum evaporation chamber.
  • At least one embodiment of the present disclosure also provides a transfer method comprising: transferring a conveyed object using a first transfer member and a second transfer member; wherein the first transfer member includes contacting the conveyed object being conveyed a first carrier pad, the second transfer member includes a second carrier pad in contact with the conveyed object being conveyed; an electronic capability of the material of the first carrier pad relative to the second carrier pad The material has a stronger ability to get electrons, and the material of the second carrier pad has a greater ability to lose electrons than the material of the first carrier pad.
  • the conveyed object is continuously conveyed using the first transfer member and the second transfer member, or the conveyed object is conveyed at different stages, respectively.
  • the material of the first carrier pad is more capable of obtaining electrons than the object to be conveyed
  • the material of the second carrier pad is the same as the material of the second carrier pad.
  • the transmission is more capable of losing electrons.
  • the first conveying member is used to drive the object to be lifted, rotated, or moved horizontally; and the second conveying member is used to drive the object to be lifted and lowered, Rotate or move horizontally.
  • FIG. 1 is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure
  • FIG. 1b is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure
  • FIG. 2 is a schematic structural diagram of a first carrying member provided with a first carrying mat according to an embodiment of the present disclosure
  • FIG. 3 is a schematic structural diagram of a second carrying member provided with a second carrying mat according to an embodiment of the present disclosure
  • FIG. 4 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • FIG. 4b is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • FIG. 5 is a schematic structural diagram of still another transmitting apparatus according to an embodiment of the present disclosure.
  • FIG. 6 is a schematic structural diagram of still another transmitting apparatus according to an embodiment of the present disclosure.
  • FIG. 7 is a schematic structural diagram of still another transmitting apparatus according to an embodiment of the present disclosure.
  • FIG. 8 is a schematic cross-sectional view of a vacuum evaporation apparatus according to an embodiment of the present disclosure.
  • the electronic product to be formed is transferred by the conveying device to complete the preparation of the film structure of each layer.
  • the transfer speed is usually accelerated.
  • the respective film layer structures are formed under vacuum conditions, it is necessary to ensure the stability of the electronic product to be formed to be transmitted by the friction between the transfer device and the electronic product to be formed.
  • the electronic product to be formed may come into contact with the transport device, and static electricity may inevitably occur, but the static electricity may bring various adverse effects.
  • OLED organic electroluminescent device
  • OLED organic electroluminescent device
  • it is generally required to deposit each layer of the thin film layer by using an evaporation device, and it is also required to transfer the substrate to be film-formed using a transfer device.
  • the evaporation equipment is usually placed in a vacuum chamber to work when the substrate is in the vacuum chamber
  • the transfer member for example, the robot arm
  • the control of the base substrate depends entirely on, for example, between the robot arm and the substrate.
  • the inventors of the present disclosure have found in research that the friction between the conveying member and the object to be conveyed can be increased by changing the design of the conveying member and the portion of the object to be conveyed in the conveying device while reducing the static electricity. For example, it is possible to change the electron-accepting ability of the material of the conveying member and the portion to be contacted with the object or to change the contact area of the conveying member with the portion of the object to be conveyed to reduce the reduction in the alignment success rate due to the sliding of the object to be conveyed.
  • the problem which in turn reduces the chance of fragmentation, which speeds up the transfer, increases productivity, and increases product yield.
  • the inventors of the present disclosure have found that the static electricity on the object to be conveyed can be neutralized by changing the material of the conveying member in contact with the object to be conveyed, and the conveying path of the object to be conveyed in the vacuum chamber may be long, the object to be conveyed and conveyed There are also a large number of contact points of the components.
  • a material that is more easily electron-acceptable compared to the material of the object to be conveyed
  • the material that contacts the transfer member and the object to be transported is replaced with a material that is more susceptible to electron loss (compared with the material of the transported object), so that it is The surface of the transfer produces a negative charge, and the negative charge and the previously accumulated positive charge neutralize each other to reduce the effect of static electricity on the object being conveyed.
  • At least one embodiment of the present disclosure provides a transfer device including: at least one first transfer member and at least one second transfer member, the first transfer member including a first carrier pad in contact with the object to be conveyed, the second transfer The component includes a second carrier pad in contact with the object to be conveyed; the electron-receiving ability of the material of the first carrier pad is stronger than the electron-receiving ability of the material of the second carrier pad, and the electron-depleting ability of the material of the second carrier pad is relatively The ability of the material of the first carrier pad to lose electrons is stronger.
  • the present disclosure primarily reduces the ability of electrons and electron loss of materials of the transfer member and the object contact portion (eg, the first carrier pad and/or the second carrier pad) to reduce slippage due to the conveyed object.
  • the problem of lowering the success rate of the alignment, and also reducing the number of fragments The chance of being born, which can speed up the transfer of the conveyed material, increase the production efficiency, and also improve the yield of the product.
  • FIG. 1a is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure.
  • the conveying device comprises at least one first conveying member 101 and at least one second conveying member 102, the first conveying member 101 and the second conveying member 102 being disposed adjacent to each other.
  • FIG. 1b is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • the conveying device includes a first conveying member 101 and a second conveying member 102, and the first conveying member 101 and the second conveying member 102 are spaced apart.
  • FIG. 1a is a schematic structural diagram of a transmitting apparatus according to an embodiment of the present disclosure.
  • the conveying device includes a first conveying member 101 and a second conveying member 102, and the first conveying member 101 and the second conveying member 102 are spaced apart.
  • FIG. 2 is a schematic structural diagram of a first carrying member provided with a first carrying pad according to an embodiment of the present disclosure.
  • the first transmitting member 101 includes a first contact with the object to be transported.
  • a carrier pad 103 such as a conveyed object, is placed over the first carrier pad 103.
  • FIG. 3 is a schematic structural diagram of a second carrying member provided with a second carrying pad according to an embodiment of the present disclosure.
  • the second transmitting member 102 includes a second contact with the object to be transported.
  • a carrier pad 104 such as a conveyed object, is placed over the second carrier pad 104.
  • the electron-carrying ability of the material of the first carrier pad 103 is stronger than the electron-receiving ability of the material of the second carrier pad 104, and the material of the second carrier pad 104 is lost.
  • the ability of the electrons is stronger relative to the ability of the first carrier pad 103 to lose electrons.
  • first conveying member and the second conveying member shown in FIG. 2 and FIG. 3 are only schematic structural views, and the structures of the first conveying member and the second conveying member may be the same or different, and this is not limited.
  • the structure of the first conveying member and the second conveying member may be the same as the structure shown in FIG. 2, or may be the same as the structure shown in FIG. 3, or the second conveying member may be the structure shown in FIG.
  • a transfer member is the structure shown in FIG.
  • the body of the first conveying member 101 and the body of the second conveying member 102 are formed of a rigid material and are not easily deformed, and the body of the first conveying member 101 and the body of the second conveying member 102 can perform well for the conveyed object. Supporting role to ensure the smoothness of the conveyed material.
  • the material of the first bearing pad 103 is different from the material of the body of the first conveying member 101, and the first bearing pad 103 is in contact with the object to be conveyed, and the body of the first conveying member 101 is prevented from directly contacting the object to be conveyed, and, similarly,
  • the material of the second carrier pad 104 is different from the material of the body of the second transfer member 102, and the second carrier pad 104 is in contact with the object to be conveyed, and the body of the second transfer member 102 is prevented from coming into direct contact with the object to be conveyed.
  • the materials of the first carrier pad 103 and the second carrier pad 104 can be flexibly selected as needed, or can be replaced as needed, thereby enhancing the transmission. The scope of the device reduces the cost of equipment.
  • the material of the first carrier pad 103 is more capable of electrons than the object being conveyed
  • the material of the second carrier pad 104 is more resistant to electrons than the object being conveyed.
  • the object to be transported accumulates a positive charge on the object after being contacted with the first carrier pad 103, and the object is accumulated on the carrier after the contact with the second carrier pad 104, and the object is conveyed.
  • the negative charge accumulated after the contact of the second carrier pad 104 can be neutralized with the positive charge accumulated before to reduce the damage of the static electricity to the object to be transported.
  • the conveying device may include a plurality of first conveying members 101 and a plurality of second conveying members 102, and in the entire conveying device, the first conveying member 101 and the second conveying member 102 may Arranged adjacent to each other or spaced apart, or both the first transfer member 101 and the second transfer member 102 are disposed adjacent to each other, and the first transfer member 101 and the second transfer member 102 are spaced apart.
  • the object to be transported is brought into contact with the first carrying mat 103 on the first transporting member 101.
  • the positive charge is neutralized by the negative charge generated by the contact of the object and the second carrier pad 104 on the second transfer member 102, thus reducing the accumulation process of static electricity; when the first transfer member 101 and the second transfer member 102 are spaced apart
  • the static electricity is neutralized to a certain extent before being neutralized, as long as the accumulated static electricity amount is less than the minimum static electricity amount causing the chipping phenomenon.
  • all of the first carrier pads 103 in the conveyor cause the amount of positive charge obtained by the object to be approximately equal to the negative charge obtained by all of the second carrier pads 104 in the conveyor to the object being conveyed.
  • the amount of electricity is such that the static electricity in the conveyor can be substantially neutralized to reduce the amount of static electricity accumulated in the vacuum chamber while reducing the adverse effects of static electricity on the product.
  • the amount of electricity generated by the contact with each of the first carrier pads 103 and each of the second carrier pads 104 may be approximately the same or different.
  • the amount of electricity generated by the contact with each of the first carrier pads 103 is x
  • the amount of electricity generated by the contact with each of the first carrier pads 103 is y
  • the number of the second carrier pads 104 is set to be equal to twice the number of the first carrier pads 103, so that all the first carrier pads 103 in the conveyor device make the amount of positive charge obtained by the object to be approximately equal to the transmission.
  • the amount of charge of the negative charge obtained by all of the second carrier pads 104 in the device is set to be equal to twice the number of the first carrier pads 103, so that all the first carrier pads 103 in the conveyor device make the amount of positive charge obtained by the object to be approximately equal to the transmission.
  • the amount of charge of the negative charge obtained by all of the second carrier pads 104 in the device is set to be equal to twice the
  • the first carrier pad 103 causes the amount of positive charge obtained by the object to be transferred to be approximately equal to the first The amount of charge of the negative charge obtained by the second carrier pad 104 to the object being conveyed.
  • the first carrier pad 103 and the second carrier pad 104 can be arranged adjacent to each other, and the accumulation of static electricity can be well controlled.
  • the amount of power generated by the contact of the object with the first carrier pad 103 and/or the second carrier pad 104 is not only related to the ability of the first carrier pad 103 or the second carrier pad 104 to obtain and lose electrons. It also relates to the contact area of the object to be transported with the first carrier pad 103 and/or the second carrier pad 104. For example, when the first carrier pad 103 of the unit area is in contact with the object to be conveyed so that the amount of charge of the positive charge obtained by the object is n, the contact area of the second carrier pad 104 of the unit area with the object to be conveyed is negative.
  • the contact portion of the transport member and the object to be transported are disposed in a planar shape rather than a dot shape to reduce circuit damage caused by tip discharge, for example, a in FIG.
  • the area is a patchy area.
  • the transport device needs to be subjected to maintenance treatment after a period of use, and the static electricity still present on the transport device can be removed by wiping.
  • FIG. 4a is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • the transfer device comprises a plurality of combined structures 20, the first transfer member 101 and the second transfer member 102 belonging to the same combined structure 20.
  • a plurality of combined structures 20 are sequentially disposed adjacent to each other.
  • the first carrier pad 103 on each of the first transport members 101 causes the amount of positive charge obtained by the object to be transported and the second carrier pad 104 on each of the second transport members 102 to be
  • the amount of charge of the negative charge obtained by the transport is substantially equal, such that the charge accumulated by the transport on one of the transport members can quickly cancel out at least a portion of the transport on the next transport structure.
  • the amount of positive electric charge obtained after the transfer and the electric quantity of the negative electric charge are also substantially equal, or even if they are not equal, the accumulated static electricity can be surely cleared in time, so that the accumulated static electricity amount is smaller than the minimum static electricity amount causing the fragmentation phenomenon, so that The adverse effects of static electricity are reduced to a very low level.
  • FIG. 4b is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • the transfer device comprises a plurality of combined structures 20, the first transfer member 101 and the second transfer member 102 belonging to the same combined structure 20.
  • a plurality of combined structures 20 are sequentially disposed adjacent to each other.
  • the amount of electricity generated by the contact with each of the first carrier pads 103 is x
  • the amount of electricity generated by the contact with each of the first carrier pads 103 is y
  • x 3y
  • the number of the first transfer members 101 included is three times the number of the second transfer members 102
  • the amount of charge of the positive charge obtained by the first carrier pad 103 included in the combined structure 20 is second and second.
  • the second carrier pad 104 on the transport member 102 causes the amount of charge of the negative charge obtained by the transport object to be substantially equal, so that the charge accumulated by the transport object on one transport member can be quickly offset by at least the next transport member.
  • the amount of the positive electric charge and the negative electric charge obtained by the transported object after being transmitted through the plurality of combined structures 20 are also substantially equal, or even if they are not equal, the accumulated static electricity can be surely cleared in time to accumulate the static electricity.
  • the amount is less than the minimum amount of static electricity that causes fragmentation, which can reduce the adverse effects of static electricity to a very low level.
  • FIG. 5 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • the conveying device includes a plurality of combined structures, and the first conveying member 101 and the second conveying member 102 belong to the first combined structure 21 and the second combined structure 22, and the first conveying member 101 of the first combined structure 21
  • the first carrier pad on the upper side obtains a positive charge of the object to be transported, and correspondingly, the second carrier pad on the second transporting member 102 of the second combined structure 22 causes the object to be transported to obtain a negative charge.
  • the carrier pad on the other components in the same combined structure as the first transfer member 101 may have the same or opposite electron-loss performance as the first carrier member, and be the same as the second transfer member 102, with respect to the object to be transported.
  • the carrier pads on other components in the combined structure may have the same or opposite electronic and electronic properties as the second carrier pads.
  • the carrier pads on the other components in the same combination structure as the first transport member can be set to
  • the first carrier pad has the same electron-loss performance or is designed to be the same material.
  • a combined structure may include only one transmitting component, and may also include multiple transmitting components.
  • FIG. 6 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • the first combined structure 21 includes two first transporting members 101, which are spaced apart.
  • the second combined structure 22 includes two second transfer members 102 that are spaced apart.
  • the two first transmitting components 101 may also be Or adjacently disposed; or, the first combined structure 21 includes a plurality of first conveying members 101, both of which include two first conveying members 101 disposed adjacent to each other, and two first conveying members 101 spaced apart from each other. situation.
  • FIG. 7 is a schematic structural diagram of another transmitting apparatus according to an embodiment of the present disclosure.
  • the first combined structure 21 includes a plurality of first transfer members 101
  • the second combined structure 22 includes a plurality of second transfer members 102, exemplarily, a first transfer member 101 and a second transfer member 102 includes the same component such as a robotic arm.
  • the first combined structure 21 may include only a plurality of first transporting members 101, each of which is provided with a first carrier pad 103, and the second combined structure 22 may include only the first
  • the second transfer member 102 and the second transfer member 102 are each provided with a second carrier pad 104, as long as the first carrier pad is in contact with the object to be conveyed, so that the amount of static electricity accumulated by the object to be conveyed is less than the minimum amount of static electricity causing the debris phenomenon.
  • the number of the first transfer members included in the first combined structure the arrangement of the first transfer members in the first combined structure, the number of the second transfer members included in the second combined structure, and the second combined structure
  • the setting of the second transporting component is not limited to the above, and the number of the first transporting component or the second transmitting component and the setting situation may be adjusted as needed, and details are not described herein again.
  • the first combined structure 21 and the second combined structure 22 are disposed adjacent to each other.
  • the first combined structure 21 and the second combined structure 22 are spaced apart from each other.
  • the first combined structure 21 and the second combined structure 22 may be simultaneously disposed adjacent to each other. The situation of being spaced apart from each other will not be described here.
  • the first carrier pad 103 on the first transfer member 101 compares the amount of charge of the positive charge obtained by the object to the amount of charge of the negative charge obtained by the second carrier pad 104 on the second transfer member 102. , approximately equal.
  • the amount of static electricity accumulated is substantially zero, which can reduce the adverse effects of static electricity to a very low level.
  • the material of the first carrier pad when the material of the object to be conveyed is a glass substrate, the material of the first carrier pad includes materials such as bakelite, rosin, polytetrafluoroethylene or sulfur which have electronic properties with respect to the glass.
  • the material of the second carrier pad includes materials such as sheepskin, rubber or quartz which have electron-depleting properties with respect to the glass.
  • the material of the object to be transported may be any other material, the first carrier pad
  • the material of the second carrier pad and the material of the second carrier pad can be adjusted as needed, as long as the frictional force is increased and electrostatic neutralization is performed to reduce the adverse effects caused by static electricity.
  • the manner of increasing the friction may further include increasing the coefficient of friction of the first carrier pad and the second carrier pad.
  • the first transport component includes at least one of a robotic arm and a transport platform; the second transport component includes at least one of a robotic arm and a transport platform.
  • the first transfer component includes a first robotic arm or belt
  • the second transport component includes a second robotic arm or belt.
  • the robot arm is an example, but the embodiment of the present disclosure is not limited to this specific structure.
  • the first carrier pad is disposed on the first robot arm
  • the second carrier pad is disposed on the second robot arm. See FIG. 3 for a schematic structural view of the first robot arm and the second robot arm.
  • the first robot arm and the second robot arm can transfer a sheet-like product such as a glass substrate between the vacuum reaction chambers.
  • the first robot arm can take out the glass substrate from the first vacuum reaction chamber, and then place the glass substrate in the second vacuum reaction chamber by means of lifting, rotating or horizontal movement to perform a process such as vapor deposition and film formation;
  • the second robot arm takes out the glass substrate from the second vacuum reaction chamber and then places the glass substrate in the third vacuum reaction chamber by lifting, rotating or horizontally moving to perform an evaporation film forming process of the other film layer.
  • the structure shown in FIG. 3 may be a first robot arm or a second robot arm.
  • the first and second robot arms include a main support arm 31 and an auxiliary support arm 32 disposed on at least one side of the main support arm 31.
  • the robot arm (eg, the first robot arm or the second robot arm) includes at least two auxiliary support arms 32 that are disposed in parallel or symmetrically disposed relative to the main support arm 31, and each of the auxiliary support arms The extension length of 32 is equal.
  • the mechanical arm includes a main support arm 31 and eight auxiliary support arms 32 that are symmetrically disposed on both sides of the main support arm 31, respectively.
  • auxiliary support arm 32 in the robot arm can be adjusted as needed, as long as it can satisfy the planar and stable support of the object to be transported, which is not limited herein.
  • the first robot arm and the second robot arm each include a lifting structure, a rotating structure, and a horizontal telescopic structure to enable the first robot arm and the second robot arm to acquire the conveyed object, and transmit the conveyed object to the vacuum steaming.
  • the first robot arm and the second robot arm each include a lifting structure, a rotating structure, and a horizontal telescopic structure to enable the first robot arm and the second robot arm to acquire the conveyed object, and transmit the conveyed object to the vacuum steaming.
  • the plating chamber In the plating chamber.
  • the transmitting device may further include: driving the first robot arm and/or a first motor that lifts and lowers the second robot arm; a second motor that drives the first robot arm and/or the second robot arm to rotate; and a third motor that drives the first robot arm and/or the second robot arm to horizontally expand and contract.
  • the first transfer component includes a transport platform
  • the second transport component includes a robotic arm
  • the first load bearing pad is disposed on the transport platform
  • the second load bearing pad is disposed on the robotic arm.
  • the amount of charge of the positive charge obtained by the first carrier pad to the object being conveyed is approximately equal to the amount of charge of the negative charge obtained by the second carrier pad to the object to be transported.
  • the amount of static electricity accumulated on the object to be transported is substantially zero.
  • At least one embodiment of the present disclosure changes the relative electrons and losses of the material of the transport member and the object contact portion (eg, the first carrier pad, the second carrier pad, or a combination of the first carrier pad and the second carrier pad)
  • the ability of electrons to neutralize more static electricity generated by increasing friction and at the same time reduce the problem of lowering the success rate of the alignment caused by the sliding of the object due to the too small frictional force, and also reduce the generation of debris.
  • the probability of this can reduce the adverse effects of static electricity while ensuring sufficient friction, so that the rate at which the conveyed material is conveyed can be accelerated, the production efficiency can be improved, and the yield of the product can be improved.
  • At least one embodiment of the present disclosure further provides a vacuum evaporation apparatus 40.
  • the vacuum evaporation apparatus 40 includes any one of the above-described transfer apparatuses, and the vacuum evaporation apparatus 40 further includes a vacuum evaporation chamber 401 and An evaporation source 402 disposed in the vacuum evaporation chamber 401.
  • the vacuum evaporation chamber 401 is further provided with an evaporation substrate (not shown) for placing the substrate to be evaporated, and the opening of the evaporation source 402 faces the vapor deposition base, and the evaporation source 402 may be linear evaporation. source.
  • the vacuum evaporation apparatus further includes a cathode 403 disposed on one side of the evaporation source 402, an anode 404 disposed on one side of the vapor deposition abutment, and an inert gas supply device for inputting an inert gas into the vacuum evaporation chamber 401. .
  • the vacuum evaporation apparatus may further include a magnetic plate 406 for being placed on the opposite side of the substrate 407 from the evaporation source 402, the anode 404 being disposed on the magnetic plate 406.
  • the vacuum evaporation apparatus further includes a mask plate 405 for placement on the side of the substrate 407 opposite the evaporation source 402, the mask plate 405 being connected to the anode 404 by wires.
  • the vacuum evaporation process using the vacuum evaporation apparatus 40 includes: drawing the evaporation chamber to a high vacuum state, and inputting an inert gas into the evaporation chamber by using an inert gas supply device; and using the transfer device to transfer the substrate to be evaporated. Transfer to the vacuum evaporation chamber; produce high between the anode and cathode The frequency electric field causes the inert gas to ionize to generate inert gas ions and electrons; the evaporation source is heated, and the evaporated film-forming substance can adsorb electrons to move toward the anode to form a thin film on the surface of the substrate.
  • At least one embodiment of the present disclosure also provides a transmission method, where the transmission method includes:
  • the object to be conveyed generates a positive charge on the object to be conveyed after contacting the first carrier pad, and the object to be transported generates a negative charge on the object after contacting the second carrier pad, and the object to be conveyed is in the second
  • the negative charge generated after the contact of the carrier pad can be neutralized with the positive charge generated previously to reduce the damage of the static electricity to the object to be transported.
  • the transfer method can also be:
  • the first conveying component includes a first bearing pad contacting the conveyed object being conveyed
  • the second conveying component includes a second contacting with the conveyed object being conveyed
  • the carrier pad; the electron-carrying ability of the material of the first carrier pad is stronger than the electron-receiving ability of the material of the second carrier pad, and the electron-depleting ability of the material of the second carrier pad is relative to the material of the first carrier pad.
  • the ability is stronger.
  • the material of the first carrier pad is more capable of electrons than the object being conveyed
  • the material of the second carrier pad is more resistant to electrons than the object being conveyed.
  • the conveyed object is continuously conveyed using the first transfer member and the second transfer member, or the conveyed object is conveyed at different stages, respectively.
  • the positive charge generated by the contact of the object with the first carrier pad on the first conveying member may be on the conveyed object and the second conveying member.
  • the negative charge generated by the contact of the second carrier pad is neutralized, which reduces the accumulation process of static electricity and reduces the possibility of debris accumulation caused by static electricity accumulation.
  • the static electricity is accumulated to a certain extent before being neutralized, as long as the accumulated static electricity amount is less than the minimum static electricity amount causing the debris phenomenon, so that the first conveying member and the second conveying member can reduce the conveying device during the preparation process.
  • the first transmitting component and the second transmitting component belong to the same combined structure or belong to different combined structures.
  • the carrier pad on the other component in the same combination structure as the first transfer component has the same or opposite electron-loss performance as the first carrier pad
  • the carrier on the other component in the same combination structure as the second transfer component has the same or opposite electron-loss performance as the second carrier pad.
  • a combined structure may include only one transmitting component, and may also include multiple transmitting components.
  • the first combined structure is comprised of at least one first transfer component and the second combined structure is comprised of at least one second transfer component.
  • the first combined structure includes two first transfer members that may be disposed adjacent to each other or may be spaced apart.
  • the second combined structure includes two second transfer members that may be disposed adjacent to each other or may be spaced apart.
  • the first combined structure may include only a plurality of first conveying members, and does not include other members, and the first conveying member is provided with a first bearing pad; the second combined structure may only The second conveying member is included, and the second conveying member is disposed on the second conveying member, as long as the first bearing mat is in contact with the object to be conveyed, so that the amount of static electricity accumulated by the conveyed object is less than the minimum causing the fragmentation phenomenon.
  • the amount of static electricity can be.
  • the number of the first transfer members included in the first combined structure the arrangement of the first transfer members in the first combined structure, the number of the second transfer members included in the second combined structure, and the second combined structure
  • the setting of the second transmitting component is not limited to the above, and the number of the first transmitting component or the second transmitting component and the setting situation may be adjusted as needed, and details are not described herein again.
  • first combined structure and the second combined structure may be disposed adjacent to each other, may be spaced apart from each other, and may also include a case where the first combined structure and the second combined structure are disposed adjacent to each other and spaced apart from each other.
  • the material of the first carrier pad is more capable of electrons than the object being conveyed, and the material of the second carrier pad is more resistant to electrons than the object being conveyed.
  • the first transfer member when the object to be transported is a glass substrate, the first transfer member is used to drive the glass substrate to be lifted, rotated, or moved horizontally;
  • the second conveying member drives the glass substrate to move up, down, or horizontally.
  • the first conveying member may take out the glass substrate from the first vacuum reaction chamber, and then place the glass substrate in the second vacuum reaction chamber by means of lifting, rotating or horizontal movement to perform vapor deposition and film formation;
  • the second conveying member takes out the glass substrate from the first vacuum reaction chamber and then places the glass substrate in the third vacuum reaction chamber by lifting, rotating or horizontally moving to perform an evaporation film forming process of the other film layer.
  • a conveying device, a conveying method, and a vacuum evaporation device provided by at least one embodiment of the present disclosure have at least one of the following beneficial effects:
  • a conveying device provided by at least one embodiment of the present disclosure, by changing a contact portion of a conveying member and a conveyed object (for example, a first carrier pad, a second carrier pad, or a combination of a first carrier pad and a second carrier pad) The relative electron and electron loss of the material to neutralize more static electricity due to increased friction;
  • the conveying device provided by at least one embodiment of the present disclosure can reduce the problem of lowering the success rate of the alignment caused by the sliding of the conveyed object due to the frictional force being too small, and thus can ensure that the friction is sufficiently large. To reduce the adverse effects of static electricity;
  • the transmitting device provided by at least one embodiment of the present disclosure can reduce the probability of debris generation, thereby improving the yield of the product;
  • the conveying device provided by at least one embodiment of the present disclosure can speed up the conveyance of the conveyed object and improve the production efficiency
  • the materials of the first carrier pad and the second carrier pad can be flexibly selected as needed, or can be replaced as needed, thereby enhancing the application range of the conveying device. , reducing equipment costs.

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Abstract

一种传送装置,该传送装置包括至少一个第一传送部件(101)和至少一个第二传送部件(102),所述第一传送部件(101)包括与被传送物接触的第一承载垫(103),所述第二传送部件(102)包括与所述被传送物接触的第二承载垫(104);所述第一承载垫(103)的材料的得电子能力相对于所述第二承载垫(104)的材料的得电子的能力更强,所述第二承载垫(104)的材料的失电子能力相对于所述第一承载垫(103)的材料的失电子的能力更强。通过改变传送部件的与被传送物接触部分的材料的相对得电子和失电子的能力,在保证摩擦力足够大的情况下,减少静电带来的不利影响,从而可以加快被传送物被传送的速率,提高生产效率,同时还可以提高产品的良率。

Description

传送装置、传送方法以及真空蒸镀装置
本申请要求于2017年3月31日递交的中国专利申请第201710209599.3号的优先权,在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。
技术领域
本公开的实施例涉及一种传送装置、传送方法以及真空蒸镀装置。
背景技术
在显示技术领域中,通常需要在真空环境下在衬底基板上连续形成各层膜层结构,因此,需要使用传送装置将待成膜的衬底基板进行传送。
例如,OLED(Organic Light Emitting Diode,有机发光二极管)显示装置具有自发光、无需背光模组、对比度高、清晰度高、视角宽、全固化、适用于挠曲性面板、温度特性好、功耗低、响应速度快以及制造成本低等一系列优异特性,而得到了广泛的应用。OLED显示器件的基本结构包括阳极层、功能膜层以及阴极层等,上述功能膜层可以包括空穴传输层、有机发光层以及电子传输层等,有机发光层的成膜方法有很多种,包括蒸镀成膜法、分子束外延法、有机化学气相沉积法以及溶胶-凝胶法等,蒸镀成膜法由于具有操作简单、膜厚容易控制、对薄膜的污染小以及易于实现掺杂等优点,目前多采用蒸镀成膜法形成有机发光层等有机功能膜层,即在真空环境下,将有机材料加热使其气化或者升华,并沉积到衬底基板上形成对应的功能膜层。
在真空环境下,需要通过衬底基板与传送装置之间的摩擦力控制衬底基板传输的稳定性,如果衬底基板与传送装置之间的摩擦力太小,容易导致衬底基板滑动或者偏移,从而造成各膜层之间对位不精准的问题,进而影响了产品的良率,并且摩擦容易产生静电,随着传送过程的进行,也会在真空腔室中积累大量的静电,大量静电的存在可能会造成衬底基板产生碎片、破坏衬底基板上的电路,甚至损坏掩膜板。
发明内容
本公开至少一实施例提供一种传送装置,该传送装置包括:至少一个第一传送部件和至少一个第二传送部件,其中,所述第一传送部件包括与被传送物接触的第一承载垫,所述第二传送部件包括与所述被传送物接触的第二承载垫;所述第一承载垫的材料的得电子能力相对于所述第二承载垫的材料的得电子的能力更强,所述第二承载垫的材料的失电子能力相对于所述第一承载垫的材料的失电子的能力更强。
例如,在本公开至少一实施例提供的传送装置中,所述第一承载垫的材料与所述被传送物相比得电子的能力更强,所述第二承载垫的材料与所述被传送物相比失电子的能力更强。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件和所述第二传送部件彼此相邻设置,所述传送装置的全部所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述传送装置的全部所述第二承载垫使所述被传送物获得的负电荷的电量大小。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件和所述第二传送部件彼此间隔设置,所述传送装置的全部所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述传送装置的全部所述第二承载垫使所述被传送物获得的负电荷的电量大小。
例如,在本公开至少一实施例提供的传送装置中,所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述第二承载垫使所述被传送物获得的负电荷的电量大小。
例如,在本公开至少一实施例提供的传送装置中,所述传送装置包括多个组合结构,所述第一传送部件和所述第二传送部件属于同一个组合结构或属于不同的组合结构,所述传送装置包括至少一个第一组合结构和至少一个第二组合结构,所述第一组合结构由至少一个所述第一传送部件组成,所述第二组合结构由至少一个所述第二传送部件组成。
例如,在本公开至少一实施例提供的传送装置中,所述第一组合结构和所述第二组合结构彼此相邻设置。
例如,在本公开至少一实施例提供的传送装置中,所述第一组合结构和所述第二组合结构彼此间隔设置。
例如,在本公开至少一实施例提供的传送装置中,当所述被传送物的材料为玻璃基板时,所述第一承载垫的材料包括胶木、松香、聚四氟乙烯或者硫磺,所述第二承载垫的材料包括羊皮、橡胶或者石英。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件包括机械手臂和传输平台中的至少一种;所述第二传送部件包括机械手臂和传输平台中的至少一种。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件使所述被传送物获得的正电荷的电量大小近似等于所述第二传送部件使所述被传送物获得的负电荷的电量大小。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件使所述被传送物获得的正电荷的电量大小近似等于所述第二传送部件使所述被传送物获得的负电荷的电量大小。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件包括第一机械手臂,所述第二传送部件包括第二机械手臂,所述第一承载垫设置在所述第一机械手臂上,所述第二承载垫设置在所述第二机械手臂上。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件还包括第一传输平台,所述第二传送部件还包括第二传输平台,所述第一传输平台的上表面的材料和所述第一承载垫的材料具有相同的得失电子的性能;所述第二传输平台的上表面的材料和所述第二承载垫的材料具有相同的得失电子的性能。
例如,在本公开至少一实施例提供的传送装置中,所述第一传输平台的上表面的材料和所述第一承载垫的材料相同或者不同,所述第二传输平台的上表面的材料和所述第二承载垫的材料相同或者不同。
例如,在本公开至少一实施例提供的传送装置中,所述第一传输平台和所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述第二传输平台和所述第二承载垫使所述被传送物获得的负电荷的电量大小。
例如,在本公开至少一实施例提供的传送装置中,所述第一传送部件包括传输平台,所述第二传送部件包括机械手臂,所述第一承载垫设置在所述传输平台上,所述第二承载垫设置在所述机械手臂上。
例如,在本公开至少一实施例提供的传送装置中,所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述第二承载垫使所述被传送物获得的负电荷的电量大小。
本公开至少一实施例还提供一种真空蒸镀装置,包括上述任一传送装置、真空蒸镀腔和设置于所述真空蒸镀腔中的蒸发源。
本公开至少一实施例还提供一种传送方法,包括:使用第一传送部件和第二传送部件传送被传送物;其中,所述第一传送部件包括与被传送中的所述被传送物接触的第一承载垫,所述第二传送部件包括与被传送中的所述被传送物接触的第二承载垫;所述第一承载垫的材料的得电子能力相对于所述第二承载垫的材料的得电子的能力更强,所述第二承载垫的材料的失电子能力相对于所述第一承载垫的材料的失电子的能力更强。
例如,在本公开至少一实施例提供的传送方法中,使用所述第一传送部件和所述第二传送部件连续传送所述被传送物,或分别在不同阶段传送所述被传送物。
例如,在本公开至少一实施例提供的传送方法中,所述第一承载垫的材料与所述被传送物相比得电子的能力更强,所述第二承载垫的材料与所述被传送物相比失电子的能力更强。
例如,在本公开至少一实施例提供的传送方法中,使用所述第一传送部件带动所述被传送物升降、旋转或者水平移动;使用所述第二传送部件带动所述被传送物升降、旋转或者水平移动。
附图说明
为了更清楚地说明本公开实施例的技术方案,下面将对实施例的附图作简单地介绍,显而易见地,下面描述中的附图仅仅涉及本公开的一些实施例,而非对本公开的限制。
图1a为本公开一实施例提供的一种传送装置的结构示意图;
图1b为本公开一实施例提供的一种传送装置的结构示意图;
图2为本公开一实施例提供的一种第一传送部件上设置有第一承载垫的结构示意图;
图3为本公开一实施例提供的一种第二传送部件上设置有第二承载垫的结构示意图;
图4a为本公开一实施例提供的另一种传送装置的结构示意图;
图4b为本公开一实施例提供的另一种传送装置的结构示意图;
图5为本公开一实施例提供的又一种传送装置的结构示意图;
图6为本公开一实施例提供的又一种传送装置的结构示意图;
图7为本公开一实施例提供的又一种传送装置的结构示意图;以及
图8为本公开一实施例提供的一种真空蒸镀装置的截面结构示意图。
具体实施方式
为使本公开实施例的目的、技术方案和优点更加清楚,下面将结合本公开实施例的附图,对本公开实施例的技术方案进行清楚、完整地描述。显然,所描述的实施例是本公开的一部分实施例,而不是全部的实施例。基于所描述的本公开的实施例,本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例,都属于本公开保护的范围。
除非另外定义,本公开使用的技术术语或者科学术语应当为本公开所属领域内具有一般技能的人士所理解的通常意义。本公开中使用的“第一”、“第二”以及类似的词语并不表示任何顺序、数量或者重要性,而只是用来区分不同的组成部分。“包括”或者“包含”等类似的词语意指出现该词前面的元件或者物件涵盖出现在该词后面列举的元件或者物件及其等同,而不排除其他元件或者物件。“连接”或者“相连”等类似的词语并非限定于物理的或者机械的连接,而是可以包括电性的连接,不管是直接的还是间接的。“上”、“下”、“左”、“右”等仅用于表示相对位置关系,当被描述对象的绝对位置改变后,则该相对位置关系也可能相应地改变。
通常,在电子产品的制备过程中,会通过传送装置传送待形成的电子产品,以完成各层膜层结构的制备。为了提高生产效率,通常会加快传送速度。当在真空条件下形成各层膜层结构时,需要通过传送装置和待形成的电子产品之间的摩擦力来保证待形成的电子产品被传输的稳定性。但是在待形成的电子产品的传送过程中,待形成的电子产品会与传输装置接触,不可避免地会出现静电,然而静电会带来各种不利的影响。
例如,在有机电致发光器件(OLED)的制备过程中,通常需要采用蒸镀设备沉积各层薄膜层,同时也需要使用传送装置将待成膜的衬底基板进行传送。蒸镀设备通常放置在真空腔室中进行工作,当衬底基板在真空腔 室中被传送时,蒸镀过程使用的传送部件(例如,机械手臂)不能像在大气环境中一样使用真空吸附的传送部件,衬底基板的控制完全靠例如机械手臂和衬底基板之间的摩擦力,但是机械手臂和衬底基板之间容易产生滑动摩擦,滑动摩擦容易产生静电,且衬底基板滑动后产生的位置偏差容易造成碎片或各膜层对位异常的问题。随着传送过程的进行,也会在真空腔室中积累大量的静电,大量静电的存在可能会造成有机电致发光器件中的衬底基板产生碎片、破坏衬底基板上的电路,甚至损坏掩膜板。
本公开的发明人在研究中发现,可以通过更改传送装置中传送部件的和被传送物接触部分的设计来增加传送部件和被传送物之间的摩擦力,同时减小静电。例如,可以改变传送部件的和被传送物接触部分的材料的得失电子能力或者改变传送部件的和被传送物接触部分的接触面积,来减少由于被传送物的滑动带来的对位成功率降低的问题,进而减少产生碎片的几率,这样可以加快传送的速度,提高生产效率,同时可以提高产品的良率。
本公开的发明人发现可以通过改变传送部件的与被传送物接触位置的材料来中和被传送物上的静电,被传送物在真空腔室中的传输路径可能很长,被传送物与传送部件的接触点相应地也很多,例如,可以在前段传送部件和被传送物接触的部分采用更容易得电子的材料(和被传送物的材料比较),保证摩擦后被传送物带正电荷,在静电积累到不会造成不良影响的临界值之前,把传送部件的和被传送物接触的材质换成更容易失电子的材料(和被传送物的材料比较),这样在传送的过程中被传送物的表面会产生负电荷,负电荷和之前积累的正电荷相互中和,以减少静电对被传送物造成的影响。
本公开至少一实施例提供一种传送装置,该传送装置包括:至少一个第一传送部件和至少一个第二传送部件,第一传送部件包括与被传送物接触的第一承载垫,第二传送部件包括与被传送物接触的第二承载垫;第一承载垫的材料的得电子能力相对于第二承载垫的材料的得电子的能力更强,第二承载垫的材料的失电子能力相对于第一承载垫的材料的失电子的能力更强。本公开主要通过改变传送部件的和被传送物接触部分(例如,第一承载垫和/或第二承载垫)的材料的得电子和失电子的能力,以减少由于被传送物的滑动带来的对位成功率降低的问题,同时也可以减少碎片产 生的几率,这样可以加快被传送物传送的速率,提高生产效率,同时还可以提高产品的良率。
本公开至少一实施例提供一种传送装置,例如,图1a为本公开一实施例提供的一种传送装置的结构示意图。如图1a所示,该传送装置包括至少一个第一传送部件101和至少一个第二传送部件102,该第一传送部件101和该第二传送部件102相邻设置。例如,图1b为本公开一实施例提供的另一种传送装置的结构示意图。如图1b所示,该传送装置包括第一传送部件101和第二传送部件102,该第一传送部件101和该第二传送部件102间隔设置。例如,图2为本公开一实施例提供的一种第一传送部件上设置有第一承载垫的结构示意图,如图2所示,该第一传送部件101包括与被传送物接触的第一承载垫103,例如被传送物被放置在第一承载垫103之上。例如,图3为本公开一实施例提供的一种第二传送部件上设置有第二承载垫的结构示意图,如图3所示,该第二传送部件102包括与被传送物接触的第二承载垫104,例如被传送物被放置在第二承载垫104之上。综合图1a、图1b、图2和图3,第一承载垫103的材料的得电子能力相对于第二承载垫104的材料的得电子的能力更强,第二承载垫104的材料的失电子的能力相对于第一承载垫103的材料的失电子的能力更强。
需要说明的是,图2和图3所示的第一传送部件和第二传送部件只是示意性的结构图,第一传送部件和第二传送部件的结构可以相同,也可以不同,对此不作限定。例如,第一传送部件和第二传送部件的结构可以同为图2所示的结构,也可以同为图3所示的结构,还可以是第二传送部件为图2所示的结构,第一传送部件为图3所示的结构。
例如,第一传送部件101的本体和第二传送部件102的本体由刚性的材料形成且不易变形,第一传送部件101的本体和第二传送部件102的本体对被传送物可以起到很好的支撑作用,以保证被传送物传送的平稳性。第一承载垫103的材料不同于第一传送部件101的本体的材料,第一承载垫103与被传送物接触,且避免了第一传送部件101的本体与被传送物直接接触,同样地,第二承载垫104的材料不同于第二传送部件102的本体的材料,第二承载垫104与被传送物接触,且避免了第二传送部件102的本体与被传送物直接接触。该第一承载垫103和第二承载垫104的材料可以根据需要灵活地进行选择,也可以根据需要进行更换,从而增强了传送 装置的适用范围,降低了设备成本。
例如,第一承载垫103的材料与被传送物相比得电子的能力更强,第二承载垫104的材料与被传送物相比失电子的能力更强。这样可以满足,被传送物在与第一承载垫103接触后在被传送物上积累正电荷,被传送物在与第二承载垫104接触后在传送物上积累负电荷,被传送物在与第二承载垫104接触后积累的负电荷可以与之前积累的正电荷进行中和,以减少静电对被传送物的损害。
例如,如图1a和图1b所示,该传送装置可以包括多个第一传送部件101和多个第二传送部件102,在整个传送装置中,第一传送部件101和第二传送部件102可以彼此相邻设置或者间隔设置,或者,既包含第一传送部件101和第二传送部件102相邻设置的情形,也包含第一传送部件101和第二传送部件102间隔设置的情形。
例如,综合图1a、图1b、图2和图3,当第一传送部件101和第二传送部件102相邻设置时,被传送物与第一传送部件101上的第一承载垫103接触产生的正电荷与被传送物和第二传送部件102上的第二承载垫104接触产生的负电荷进行中和,这样减少了静电的累积过程;当第一传送部件101和第二传送部件102间隔设置时,静电累积到一定的程度之前被中和,只要满足累积的静电量小于引起碎片现象的最小静电量即可。
例如,在整个传送装置中,该传送装置中的全部第一承载垫103使被传送物获得的正电荷的电量大小近似等于传送装置中的全部第二承载垫104使被传送物获得的负电荷的电量大小,这样最终可以将传送装置中的静电基本中和,以减少真空腔室中积累的静电量,同时减少静电对产品造成的不良影响。
需要说明的是,被传送物与每一个第一承载垫103同每一个第二承载垫104接触产生的电量可以近似相同,也可以不同。例如,被传送物与每一个第一承载垫103接触产生的电量为x,被传送物与每一个第一承载垫103接触产生的电量为y,且x=2y,则可以在整个传送装置中,使设置的第二承载垫104个数等于第一承载垫103个数的二倍,从而使得该传送装置中的全部第一承载垫103使被传送物获得的正电荷的电量大小近似等于传送装置中的全部第二承载垫104使被传送物获得的负电荷的电量大小。例如,该第一承载垫103使被传送物获得的正电荷的电量大小近似等于第 二承载垫104使被传送物获得的负电荷的电量大小。这样可以将第一承载垫103和第二承载垫104相邻设置,对静电的积累进行很好的控制。
需要说明的是,被传送物与第一承载垫103和/或第二承载垫104接触产生的电量的大小不仅和第一承载垫103、第二承载垫104的材料的得失电子的能力有关,还和被传送物与第一承载垫103和/或第二承载垫104的接触面积有关。例如,当单位面积的第一承载垫103与被传送物接触使被传送物获得的正电荷的电量大小为n,单位面积的第二承载垫104与被传送物接触使被传送物获得的负电荷的电量大小为m,且m=2n时,可以将第一承载垫103与被传送物接触的面积设为a,将第二承载垫104与被传送物接触的面积设为b,且a=2b,同样地,当已知单位面积的第一承载垫103使被传送物获得的正电荷的电量大小和单位面积的第二承载垫104使被传送物获得的负电荷的电量大小的比例关系时,可以相应地调整第一承载垫103和第二承载垫104的面积大小,以满足第一承载垫103使被传送物获得的正电荷的电量大小近似等于第二承载垫104使被传送物获得的负电荷的电量大小。
例如,传送部件的和被传送物接触部分(例如,第一承载垫和/或第二承载垫)设置成面状而非点状来减少尖端放电造成的电路损伤,例如,图2中的a区域为面状的区域。除此之外,传送装置在使用一段时间后需要进行维护处理,可以通过擦拭去除传输装置上仍然存在的静电。
例如,图4a为本公开一实施例提供的另一种传送装置的结构示意图。如图4a所示,该传送装置包括多个组合结构20,第一传送部件101和第二传送部件102属于同一个组合结构20。例如,多个组合结构20依次相邻设置。在每个组合结构20中,每个第一传送部件101上的第一承载垫103使被传送物获得的正电荷的电量大小和每个第二传送部件102上的第二承载垫104使被传送物获得的负电荷的电量大小基本相等,这样可以使得被传送物在一个传送部件上积累的电荷很快就能在下一个传送部件上抵消掉至少部分,被传送物在经过多个组合结构20的传送后获得的正电荷的电量和负电荷的电量的大小也基本相等,或者即使不相等也可以保证积累的静电及时被清除,使积累的静电量小于引起碎片现象的最小静电量,这样可以将静电带来的不利影响降到很低。
例如,图4b为本公开一实施例提供的另一种传送装置的结构示意图。 如图4b所示,该传送装置包括多个组合结构20,第一传送部件101和第二传送部件102属于同一个组合结构20。例如,多个组合结构20依次相邻设置。例如,被传送物与每一个第一承载垫103接触产生的电量为x,被传送物与每一个第一承载垫103接触产生的电量为y,且x=3y,则在每个组合结构20中,包含的第一传送部件101的个数是第二传送部件102个数的3倍,一个组合结构20所包含的第一承载垫103使被传送物获得的正电荷的电量大小和第二传送部件102上的第二承载垫104使被传送物获得的负电荷的电量大小基本相等,这样可以使得被传送物在一个传送部件上积累的电荷很快就能在下一个传送部件上抵消掉至少部分,被传送物在经过多个组合结构20的传送后获得的正电荷的电量和负电荷的电量的大小也基本相等,或者即使不相等也可以保证积累的静电及时被清除,使积累的静电量小于引起碎片现象的最小静电量,这样可以将静电带来的不利影响降到很低。
例如,图5为本公开一实施例提供的另一种传送装置的结构示意图。如图5所示,该传送装置包括多个组合结构,第一传送部件101和第二传送部件102属于第一组合结构21和第二组合结构22,第一组合结构21的第一传送部件101上的第一承载垫使被传送物获得正电荷,对应的,第二组合结构22的第二传送部件102上的第二承载垫使被传送物获得负电荷。例如,相对于被传送物,与第一传送部件101位于同一组合结构中的其他部件上的承载垫可以与第一承载垫具有相同或者相反的得失电子的性能,与第二传送部件102位于同一组合结构中的其他部件上的承载垫可以与第二承载垫具有相同或者相反的得失电子的性能。通常,为了设备制作的简便性,且保证每个组合结构使被传送物得电子或者失电子的确定性,可以将与第一传送部件位于同一组合结构中的其他部件上的承载垫设置为与第一承载垫具有相同的得失电子的性能,或者设计成相同的材料。需要说明的是,一个组合结构可以仅包括一个传送部件,也可以包括多个传送部件。
例如,图6为本公开一实施例提供的另一种传送装置的结构示意图。例如,第一组合结构21包括两个第一传送部件101,该两个第一传送部件101间隔设置。第二组合结构22包括两个第二传送部件102,该两个第二传送部件102间隔设置。
需要说明的是,在第一组合结构21中,两个第一传送部件101也可 以相邻设置;或者,第一组合结构21中包括更多个第一传送部件101,既包括两个第一传送部件101相邻设置的情形,也包括两个第一传送部件101间隔设置的情形。
例如,图7为本公开一实施例提供的另一种传送装置的结构示意图。如图7所示,该第一组合结构21包括多个第一传送部件101,该第二组合结构22包括多个第二传送部件102,示例性地,第一传送部件101和第二传送部件102均包括同一种元件如机械手臂。为了简化传送装置的制作过程,该第一组合结构21可以仅包括多个第一传送部件101,第一传送部件101上均设置有第一承载垫103,该第二组合结构22可以仅包括第二传送部件102,第二传送部件102上均设置有第二承载垫104,只要能够满足第一承载垫与被传送物接触使被传送物累积的静电量小于引起碎片现象的最小静电量即可。
例如,第一组合结构所包含的第一传送部件的个数、第一组合结构中第一传送部件的设置情况,第二组合结构所包含的第二传送部件的个数以及第二组合结构中第二传送部件的设置情况不限于上述情形,根据需要,第一传送部件或者第二传送部件的个数以及设置情况可以进行调整,在此不再赘述。
例如,如图6所示,该第一组合结构21和第二组合结构22彼此相邻设置。
如图7所示,该第一组合结构21和第二组合结构22相互间隔设置,在本公开至少一实施例中,也可以同时包含第一组合结构21和第二组合结构22相邻设置和相互间隔设置的情形,在此不再赘述。
例如,第一传送部件101上的第一承载垫103使被传送物获得的正电荷的电量大小与第二传送部件102上第二承载垫104使被传送物获得的负电荷的电量大小相比,近似相等。这样,在每层膜层制作完成后,积累的静电量基本为零,这样可以将静电带来的不利影响降到很低。
例如,在本公开至少一实施例中,当被传送物的材料为玻璃基板时,第一承载垫的材料包括胶木、松香、聚四氟乙烯或者硫磺等相对于玻璃具有得电子性能的材料,第二承载垫的材料包括羊皮、橡胶或者石英等相对于玻璃具有失电子性能的材料。
需要说明的是,被传送物的材料可以为其他任意的材料,第一承载垫 和第二承载垫的材料可以根据需要进行调整,只要能够满足摩擦力增大和进行静电中和,以减少静电带来的不良影响即可。例如,增大摩擦力的方式还可以包括增大第一承载垫和第二承载垫的摩擦系数。
例如,第一传送部件包括机械手臂和传输平台中的至少一种;第二传送部件包括机械手臂和传输平台中的至少一种。
例如,在一个示例中,第一传送部件包括第一机械手臂或传送带等装置,第二传送部件包括第二机械手臂或传送带等装置。下面分别以机械手臂作为示例进行说明,但是本公开的实施例不限于这种具体的结构。例如,第一承载垫设置在第一机械手臂上,第二承载垫设置在第二机械手臂上,第一机械手臂和第二机械手臂的结构示意图可以参见图3。
例如,该第一机械手臂和第二机械手臂可以实现板状产品例如玻璃基板在各真空反应腔室之间进行传递。例如,该第一机械手臂可以从第一真空反应腔室中取出玻璃基板,再通过升降、旋转或者水平移动等方式将玻璃基板放置在第二真空反应腔室内以进行蒸镀成膜等过程;第二机械手臂从第二真空反应腔室内取出玻璃基板再通过升降、旋转或者水平移动等方式将玻璃基板放置在第三真空反应腔室内,以进行另一膜层的蒸镀成膜过程。
例如,图3所示的结构可以为第一机械手臂,也可以为第二机械手臂。该第一机械手臂和第二机械手臂包括主支撑臂31和设置在主支撑臂31的至少一侧的辅助支撑臂32。
例如,机械手臂(例如,第一机械手臂或者第二机械手臂)包括至少两个辅助支撑臂32,至少两个辅助支撑臂32平行设置或者相对于主支撑臂31对称设置,且各个辅助支撑臂32的延伸长度相等。如图3所示,机械手臂包括主支撑臂31和分别对称设置在主支撑臂31两侧的八个辅助支撑臂32。
需要说明的是,机械手臂中辅助支撑臂32的设置情况可以根据需要进行调整,只要能够满足对被传送物进行平面且稳定的支撑即可,在此不做限定。
例如,第一机械手臂和第二机械手臂均包括升降结构、旋转结构和水平伸缩结构,以使第一机械手臂和第二机械手臂能够获取被传送物,并将该被传送物传送至真空蒸镀腔室中。
例如,在本示例中,传送装置还可以包括:驱动第一机械手臂和/或 第二机械手臂升降的第一电机;驱动第一机械手臂和/或第二机械手臂旋转的第二电机;驱动第一机械手臂和/或第二机械手臂水平伸缩的第三电机。
例如,在又一个示例中,第一传送部件包括传输平台,第二传送部件包括机械手臂,第一承载垫设置在该传输平台上,第二承载垫设置在该机械手臂上。
例如,第一承载垫使被传送物获得的正电荷的电量大小近似等于第二承载垫使被传送物获得的负电荷的电量大小。这样被传送物在经过一个传输平台和一个机械手臂的传送后,在被传送物上积累的静电量基本为零。
本公开至少一实施例通过改变传送部件的和被传送物接触部分(例如,第一承载垫、第二承载垫或者第一承载垫和第二承载垫的组合)的材料的相对得电子和失电子的能力,以中和由于增大摩擦而产生的更多的静电,同时可以减少由于之前摩擦力太小而导致被传送物滑动带来的对位成功率降低的问题,也可以减少碎片产生的几率,这样可以在保证摩擦力足够大的情况下,同时减少静电带来的不利影响,从而可以加快被传送物被传送的速率,提高生产效率,同时还可以提高产品的良率。
本公开至少一实施例还提供一种真空蒸镀装置40,如图8所示,该真空蒸镀装置40包括上述任意一种传送装置,该真空蒸镀装置40还包括真空蒸镀腔401和设置于真空蒸镀腔401中的蒸发源402。
例如,该真空蒸镀腔401中还设置有用于放置待蒸镀的基板的蒸镀基台(未示出),蒸发源402的开口朝向该蒸镀基台,该蒸发源402可以为线性蒸发源。
例如,该真空蒸镀设备还包括设置在蒸发源402一侧的阴极403,设置在蒸镀基台一侧的阳极404,以及用于向真空蒸镀腔401内输入惰性气体的惰性气体提供装置。
例如,该真空蒸镀设备还可以包括用于放置在基板407的与蒸发源402的相背一侧的磁板406,磁板406上设置有该阳极404。
例如,该真空蒸镀设备还包括用于放置在基板407的与蒸发源402相对一侧的掩膜板405,该掩膜板405与阳极404通过导线连接。
例如,采用该真空蒸镀设备40进行真空蒸镀的过程包括:将蒸镀腔抽至高真空状态,并利用惰性气体提供装置向蒸镀腔内输入惰性气体;采用传送装置将待蒸镀的基板传送至真空蒸镀腔内;在阳极与阴极之间产生高 频电场,使得惰性气体电离产生惰性气体离子和电子;对蒸发源进行加热,蒸发出的待成膜物质能够吸附电子向阳极移动,以在基板表面形成薄膜。
本公开至少一实施例还提供一种传送方法,该传送方法包括:
S101、使用第一传送部件传送被传送物;
S102、使用第二传送部件传送被传送物,该第一传送部件包括与被传送中的被传送物接触的第一承载垫,第二传送部件包括与被传送中的被传送物接触的第二承载垫;第一承载垫的材料的得电子能力相对于第二承载垫的材料的得电子的能力更强,第二承载垫的材料的失电子能力相对于第一承载垫的材料的失电子的能力更强。例如,第一承载垫的材料与被传送物相比得电子的能力更强,第二承载垫的材料与被传送物相比失电子的能力更强。这样可以满足,被传送物在与第一承载垫接触后在被传送物上产生正电荷,被传送物在与第二承载垫接触后在传送物上产生负电荷,被传送物在与第二承载垫接触后产生的负电荷可以与之前产生的正电荷进行中和,以减少静电对被传送物的损害。
或者,该传送方法还可以为:
S201、使用第二传送部件传送被传送物;
S202、使用第一传送部件传送被传送物,该第一传送部件包括与被传送中的被传送物接触的第一承载垫,第二传送部件包括与被传送中的被传送物接触的第二承载垫;第一承载垫的材料的得电子能力相对于第二承载垫的材料的得电子的能力更强,第二承载垫的材料的失电子能力相对于第一承载垫的材料的失电子的能力更强。例如,第一承载垫的材料与被传送物相比得电子的能力更强,第二承载垫的材料与被传送物相比失电子的能力更强。
例如,在本公开至少一实施例提供的传送方法中,使用第一传送部件和第二传送部件连续传送该被传送物,或分别在不同的阶段传送该被传送物。
例如,使用第一传送部件和第二传送部件连续传送该被传送物时,被传送物与第一传送部件上的第一承载垫接触产生的正电荷可与被传送物和第二传送部件上的第二承载垫接触产生的负电荷进行中和,这样减少了静电的累积过程,降低了静电积累引起碎片现象的可能性。
例如,当使用第一传送部件和第二传送部件在不同阶段传送该被传送 物时,静电累积到一定的程度前被中和,只要满足累积的静电量小于引起碎片现象的最小静电量即可,这样第一传送部件和第二传送部件可以降低传送装置在制备过程中的复杂程度。
例如,在本公开至少一实施例提供的传送方法中,第一传送部件和第二传送部件属于同一个组合结构或属于不同的组合结构。例如,与第一传送部件位于同一组合结构中的其他部件上的承载垫与第一承载垫具有相同或者相反的得失电子的性能,与第二传送部件位于同一组合结构中的其他部件上的承载垫与第二承载垫具有相同或者相反的得失电子的性能。
需要说明的是,一个组合结构可以只包括一个传送部件,也可以包括多个传送部件。
例如,第一组合结构由至少一个第一传送部件组成,第二组合结构由至少一个第二传送部件组成。例如,第一组合结构包括两个第一传送部件,该两个第一传送部件可以相邻设置也可以间隔设置。第二组合结构包括两个第二传送部件,该两个第二传送部件可以相邻设置也可以间隔设置。
例如,为了简化传送装置的制作过程,该第一组合结构可以仅包括多个第一传送部件,不包括其他的部件,第一传送部件上均设置第一承载垫;该第二组合结构可以仅包括第二传送部件,不包括其他的部件,第二传送部件上均设置第二承载垫,只要能够满足第一承载垫与被传送物接触使被传送物累积的静电量小于引起碎片现象的最小静电量即可。
例如,第一组合结构所包含的第一传送部件的个数、第一组合结构中第一传送部件的设置情况、第二组合结构所包含的第二传送部件的个数以及第二组合结构中第二传送部件的设置情况不限于上述情形,根据需要,第一传送部件或者第二传送部件的个数以及设置情况可以调整,在此不再赘述。
例如,该第一组合结构和第二组合结构可以彼此相邻设置,可以相互间隔设置,还可以同时包含第一组合结构和第二组合结构相邻设置和相互间隔设置的情形。
例如,该第一承载垫的材料与被传送物相比得电子的能力更强,该第二承载垫的材料与被传送物相比失电子的能力更强。
例如,在本公开至少一实施例提供的传送方法中,当被传送物为玻璃基板时,使用第一传送部件带动玻璃基板升降、旋转或者水平移动;使用 第二传送部件带动玻璃基板升降、旋转或者水平移动。例如,该第一传送部件可以从第一真空反应腔室内取出玻璃基板,再通过升降、旋转或者水平移动等方式将玻璃基板放置在第二真空反应腔室内以进行蒸镀成膜等过程;第二传送部件从第一真空反应腔室内取出玻璃基板再通过升降、旋转或者水平移动等方式将玻璃基板放置在第三真空反应腔室内,以进行另一膜层的蒸镀成膜过程。
本公开至少一个实施例提供的一种传送装置、传送方法以及真空蒸镀装置具有以下至少一项有益效果:
(1)本公开至少一实施例提供的传送装置,通过改变传送部件的和被传送物的接触部分(例如,第一承载垫、第二承载垫或者第一承载垫和第二承载垫的组合)的材料的相对得电子和失电子的能力,以中和由于增大摩擦而产生的更多的静电;
(2)本公开至少一实施例提供的传送装置,可以减少由于之前摩擦力太小而导致被传送物滑动带来的对位成功率降低的问题,进而可以在保证摩擦力足够大的情况下,减少静电带来的不利影响;
(3)本公开至少一实施例提供的传送装置,可以减少碎片产生的几率,进而可以提高产品的良率;
(4)本公开至少一实施例提供的传送装置,可以加快被传送物被传送的速率,提高生产效率;
(5)在本公开至少一实施例提供的传送装置中,第一承载垫和第二承载垫的材料可以根据需要灵活地进行选择,也可以根据需要进行更换,从而增强了传送装置的适用范围,降低了设备成本。
另外,还有以下几点需要说明:
(1)本公开实施例的附图只涉及到本公开实施例涉及到的结构,其他结构可参考通常设计。
(2)为了清晰起见,在用于描述本公开的实施例的附图中,层或区域的厚度被放大或缩小,即这些附图并非按照实际的比例绘制,也并非按照实际形状绘制。
(3)在不冲突的情况下,本公开的实施例及实施例中的特征可以相互组合以得到新的实施例。
以上所述,仅为本公开的具体实施方式,但本公开的保护范围并不局 限于此,本公开的保护范围应以所述权利要求的保护范围为准。

Claims (14)

  1. 一种传送装置,包括:至少一个第一传送部件和至少一个第二传送部件,其中,
    所述第一传送部件包括与被传送物接触的第一承载垫,所述第二传送部件包括与所述被传送物接触的第二承载垫;
    所述第一承载垫的材料的得电子能力相对于所述第二承载垫的材料的得电子的能力更强,所述第二承载垫的材料的失电子能力相对于所述第一承载垫的材料的失电子的能力更强。
  2. 根据权利要求1所述的传送装置,其中,所述第一承载垫的材料与所述被传送物相比得电子的能力更强,所述第二承载垫的材料与所述被传送物相比失电子的能力更强。
  3. 根据权利要求1或2所述的传送装置,其中,所述第一传送部件和所述第二传送部件彼此相邻设置,所述传送装置的全部所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述传送装置的全部所述第二承载垫使所述被传送物获得的负电荷的电量大小。
  4. 根据权利要求1或2所述的传送装置,其中,所述第一传送部件和所述第二传送部件彼此间隔设置,所述传送装置的全部所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述传送装置的全部所述第二承载垫使所述被传送物获得的负电荷的电量大小。
  5. 根据权利要求3或4所述的传送装置,其中,所述第一承载垫使所述被传送物获得的正电荷的电量大小近似等于所述第二承载垫使所述被传送物获得的负电荷的电量大小。
  6. 根据权利要求5所述的传送装置,其中,所述第一传送部件的和所述被传送物接触的部分设置成面状;所述第二传送部件的和所述被传送物接触的部分设置成面状。
  7. 根据权利要求5所述的传送装置,其中,所述第一传送部件包括机械手臂和传输平台中的至少一种;所述第二传送部件包括机械手臂和传输平台中的至少一种。
  8. 根据权利要求7所述的传送装置,其中,所述第一传送部件使所述被传送物获得的正电荷的电量大小近似等于所述第二传送部件使所述被 传送物获得的负电荷的电量大小。
  9. 根据权利要求1-8中任一项所述的传送装置,其中,所述被传送物的材料为玻璃基板,所述第一承载垫的材料包括胶木、松香、聚四氟乙烯或者硫磺,所述第二承载垫的材料包括羊皮、橡胶或者石英。
  10. 一种真空蒸镀装置,包括权利要求1-9中任一项所述的传送装置。
  11. 一种传送方法,包括:
    使用第一传送部件和第二传送部件传送被传送物;
    其中,所述第一传送部件包括与被传送中的所述被传送物接触的第一承载垫,所述第二传送部件包括与被传送中的所述被传送物接触的第二承载垫;所述第一承载垫的材料的得电子能力相对于所述第二承载垫的材料的得电子的能力更强,所述第二承载垫的材料的失电子能力相对于所述第一承载垫的材料的失电子的能力更强。
  12. 根据权利要求11所述的传送方法,其中,使用所述第一传送部件和所述第二传送部件连续传送所述被传送物,或分别在不同阶段传送所述被传送物。
  13. 根据权利要求12所述的传送方法,其中,所述第一承载垫的材料与所述被传送物相比得电子的能力更强,所述第二承载垫的材料与所述被传送物相比失电子的能力更强。
  14. 根据权利要求11-13中任一项所述的传送方法,其中,
    使用所述第一传送部件带动所述被传送物升降、旋转或者水平移动;
    使用所述第二传送部件带动所述被传送物升降、旋转或者水平移动。
PCT/CN2017/116469 2017-03-31 2017-12-15 传送装置、传送方法以及真空蒸镀装置 WO2018176918A1 (zh)

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