WO2018142984A1 - 液化ガスの精製方法および装置 - Google Patents
液化ガスの精製方法および装置 Download PDFInfo
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- WO2018142984A1 WO2018142984A1 PCT/JP2018/001773 JP2018001773W WO2018142984A1 WO 2018142984 A1 WO2018142984 A1 WO 2018142984A1 JP 2018001773 W JP2018001773 W JP 2018001773W WO 2018142984 A1 WO2018142984 A1 WO 2018142984A1
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- WIPO (PCT)
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- liquefied gas
- cylinder
- gas
- gas phase
- purifying
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
- B01D19/0073—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042
- B01D19/0078—Degasification of liquids by a method not covered by groups B01D19/0005 - B01D19/0042 by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D19/00—Degasification of liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/10—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing sonic or ultrasonic vibrations
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B17/00—Sulfur; Compounds thereof
- C01B17/48—Sulfur dioxide; Sulfurous acid
- C01B17/50—Preparation of sulfur dioxide
- C01B17/56—Separation; Purification
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/02—Preparation, purification or separation of ammonia
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
- C01C1/00—Ammonia; Compounds thereof
- C01C1/02—Preparation, purification or separation of ammonia
- C01C1/024—Purification
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
- F17C7/02—Discharging liquefied gases
- F17C7/04—Discharging liquefied gases with change of state, e.g. vaporisation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/03—Mixtures
- F17C2221/032—Hydrocarbons
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/03—Mixtures
- F17C2221/037—Containing pollutant, e.g. H2S, Cl
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0337—Heat exchange with the fluid by cooling
Definitions
- the present invention relates to a purification method and apparatus for liquefied gas, and more particularly, to a method and apparatus for removing impurity gas from a cylinder containing a crude liquefied gas.
- liquefied gas such as ammonia or propylene may be used.
- liquefied gas such as ammonia or propylene
- High purity liquefied gas is generally produced by removing impurities from crude liquefied gas.
- methods for removing impurities in the crude liquefied gas methods using distillation, adsorption, absorption, separation membrane, and the like are known.
- Patent Document 1 discloses a technique for removing a hydrocarbon compound contained in crude ammonia by precision distillation.
- the precision distillation method requires a precision distillation column and increases the initial investment in equipment costs.
- the liquefied gas needs to be once vaporized and then liquefied again with the use of the reboiler or the condenser, there is a problem that energy consumption increases.
- Patent Document 2 discloses a technique for acquiring an acidic gas from which a non-acidic gas has been removed by absorbing an acidic gas contained in a mixed gas with an ionic liquid and reducing the pressure.
- the purification technique described above is likely to require a dehydration step after the absorption / release process depending on the type of the absorption liquid, and the process management is complicated. There was a problem of becoming.
- the liquefied gas as a product is generally handled in a state of being accommodated in a predetermined pressure vessel (cylinder) for the convenience of transportation to a consumer.
- a predetermined pressure vessel cylinder
- low boiling point impurities may be mixed in the process of storing the liquefied gas in the cylinder. In this case, it is necessary to open the cylinder valve and discharge the impurity gas. However, it takes a long time to discharge the low boiling point impurity gas. Further, when the low boiling point impurity gas is discharged, a part of the liquefied gas that is a product is also vaporized and discharged together with the impurities.
- the present invention has been conceived under such circumstances, and it is a main object to provide a purification method and apparatus suitable for efficiently removing impurities from a cylinder containing a crude liquefied gas. It is said.
- the present inventors have found that when the gas in the gas phase in the cylinder filled with the liquefied gas is discharged to remove the low boiling point impurities, the low boiling point impurities can be efficiently removed by applying ultrasonic waves to the cylinder.
- the headline and the present invention have been completed.
- a method for purifying liquefied gas includes an ultrasonic treatment step in which ultrasonic waves are applied to a bomb containing a crude liquefied gas containing impurities, and a gas discharge step in which gas phase components are discharged from the bomb.
- the liquefied gas is ammonia, nitrous oxide, hydrogen chloride, dichlorosilane, ethylene, propylene, propane, hydrogen sulfide, carbon tetrafluoride, sulfur dioxide, carbon dioxide, boron trichloride, chlorine, nitrogen dioxide, six Any one selected from the group consisting of sulfur fluoride, ethane, 1-butene, isobutene, normal butane, isobutane, methyl chloride, ethyl chloride, dimethyl ether, vinyl chloride, and hydrogen bromide.
- the liquefied gas has a boiling point at a standard atmospheric pressure of ⁇ 70 ° C. or higher and lower than 0 ° C.
- ultrasonic waves are applied to the cylinder through a liquid medium.
- the gas discharge step and the ultrasonic treatment step are simultaneously performed in parallel.
- the ultrasonic frequency is 40 to 100 kHz.
- the purification method of the liquefied gas further includes a step of analyzing the gas phase component discharged in the gas discharging step, and when the concentration of the gas phase impurity contained in the gas phase component is reduced below a predetermined value.
- the gas discharge step and the ultrasonic treatment step are stopped.
- an apparatus for purifying liquefied gas includes a bomb containing a crude liquefied gas containing impurities, an ultrasonic generator for applying ultrasonic waves to the bomb, and the bomb for discharging a gas phase component from the bomb. And a flow rate regulator for adjusting the flow rate of the gas phase component discharged through the pipe.
- the cylinder is provided with a container valve including a fusible stopper that melts at a predetermined temperature or higher.
- the ultrasonic generator includes a container that stores a liquid medium, and an ultrasonic oscillator that applies ultrasonic waves to the cylinder through the liquid medium.
- the apparatus for purifying liquefied gas further includes a chiller for adjusting the liquid medium to a predetermined temperature.
- the apparatus for purifying liquefied gas further includes an analyzer connected to the pipe in order to analyze the gas phase component discharged from the cylinder.
- the pipe is provided with a pressure reducing valve.
- FIG. 1 shows a schematic configuration of a purification apparatus X that can be used to execute a purification method of a liquefied gas according to the present invention.
- the refining device X of the present embodiment includes a cylinder 1, an ultrasonic generator 2, a chiller 3, a flow rate regulator 4, an analyzer 5, and a pipe 6.
- the cylinder 1 is filled with, for example, high-purity liquefied gas as a product.
- the cylinder 1 includes a container main body 11 and a container valve 12 connected to the container main body 11.
- the container body 11 is a pressure resistant container having a predetermined capacity, and is made of a metal such as iron or an iron alloy, for example.
- the container valve 12 is connected to the pipe 6 and switches the opening and closing of the connection flow path with the pipe 6 by operating the handle.
- the container body 11 can be attached to and detached from the pipe 6 (a pipe line 61 described later) while maintaining a sealed state in a state where the container valve 12 is closed.
- the container valve 12 includes a fusible stopper (not shown).
- the fusible stopper includes a fusible metal that melts at, for example, an operating temperature or higher, and functions as a safety valve that prevents the inside of the cylinder 1 (container body 11) from becoming an excessively high pressure state.
- the operating temperature of the fusible plug is set according to the type of liquefied gas filled in the cylinder 1 (container body 11). Illustrating the operating temperature of the fusible plug, the liquefied gas to be filled is 57 ° C. in the case of liquefied ammonia and 58 ° C. in the case of liquefied sulfur dioxide.
- the ultrasonic generator 2 is for applying ultrasonic waves to the cylinder 1.
- the ultrasonic generator 2 of the present embodiment includes an ultrasonic oscillator (not shown) and a container 21 having an upper opening, and a liquid medium 22 for conducting ultrasonic waves is accommodated in the container 21.
- the cylinder 1 (container body 11) is immersed in the liquid medium 22.
- the chiller 3 adjusts the liquid medium 22 in the container 21 to a predetermined temperature.
- the chiller 3 circulates chiller water maintained at a predetermined liquid temperature in the container 21.
- the pipe 6 has pipe lines 61 and 62.
- the pipe 61 has one end connected to the cylinder 1 and the other end connected to the analyzer 5.
- a pressure reducing valve 71, a flow rate regulator 4, and a needle valve 72 are provided in order from the cylinder 1 side to the analyzer 5 side.
- the pipe line 62 extends in a branched manner with respect to the pipe line 61.
- One end of the conduit 62 is connected to the conduit 61 between the flow regulator 4 and the needle valve 72, and the other end is open to the atmosphere.
- An opening / closing valve 73 is provided in the pipeline 62.
- the flow rate regulator 4 controls the gas discharged from the cylinder 1 to a predetermined flow rate.
- a mass flow controller is preferably used as the flow rate regulator 4. Accordingly, the flow rate of the gas discharged from the cylinder 1 and flowing through the pipe line 61 is controlled while the flow rate is measured by the flow rate regulator 4.
- the analyzer 5 measures the component concentration of the gas discharged from the cylinder 1.
- the ultrasonic generator 2 When purifying the liquefied gas in the cylinder 1 using the purification apparatus X having the above configuration, the ultrasonic generator 2 applies ultrasonic waves to the cylinder 1 while purging (discharging) the gas phase components in the cylinder 1. To do.
- Examples of the liquefied gas stored in the cylinder 1 include ammonia, nitrous oxide, hydrogen chloride, dichlorosilane, ethylene, propylene, propane, hydrogen sulfide, carbon tetrafluoride, sulfur dioxide, carbon dioxide, boron trichloride, and chlorine. Nitrogen dioxide, sulfur hexafluoride, ethane, 1-butene, isobutene, normal butane, isobutane, methyl chloride, ethyl chloride, dimethyl ether, vinyl chloride, hydrogen bromide.
- the contents of the cylinder 1 are a crude liquefied gas containing a liquefied gas and low boiling point impurities.
- the concentration of the liquefied gas in the crude liquefied gas is, for example, 90 vol% or more, preferably 95 vol% or more, more preferably 98 vol% or more.
- the concentration of the liquefied gas in the crude liquefied gas is too low (for example, less than 90 vol%), the amount of the liquefied gas to be purged becomes too large, which is not preferable from an economical viewpoint.
- the low boiling point impurities include air-derived components such as nitrogen, oxygen, and carbon dioxide.
- the boiling point of liquefied gas at standard atmospheric pressure (101.3 kPa) is less than 0 ° C. When the boiling point is 0 ° C. or higher, the vapor pressure of the liquefied gas is low, so that it is difficult to secure a flow rate during the gas phase component purge.
- the boiling point of the liquefied gas at the standard atmospheric pressure is preferably ⁇ 70 ° C. or higher. When the boiling point is less than ⁇ 70 ° C. and carbon dioxide is contained as an impurity, purification by gas phase component purge may be difficult.
- the flow rate when the gas phase component is discharged from the cylinder 1 is proportional to the cylinder cross-sectional area.
- the flow rate for discharging the gas phase component is preferably 0.01 to 10 L / min. If the said flow rate is less than 0.01 L / min, the refinement
- the liquid medium 22 in the container 21 is preferably neutral, more preferably neutral water. If the liquid medium 22 is not neutral, the cylinder 1 may be corroded, and the necessity of cleaning the cylinder 1 after the completion of the purification operation is increased, which may complicate the work process.
- the frequency of the ultrasonic wave applied to the cylinder 1 is preferably in the range of 40 to 100 kHz from the viewpoint of promoting cavitation and improving purification efficiency. If the frequency is lower than 40 kHz, the cylinder container may be damaged. If the frequency is higher than 100 kHz, the effect of removing gas phase impurities by ultrasonic waves may be weakened.
- the temperature of the liquid medium 22 in the ultrasonic generator 2 is, for example, 0 to 40 ° C., preferably 20 to 40 ° C. When the temperature of the liquid medium 22 exceeds 40 ° C., the fusible stopper of the cylinder 1 may be dissolved. When the temperature of the liquid medium 22 is less than 0 ° C., the purge rate of the gas phase component may be reduced, and when water is used as the liquid medium 22, it is solidified and the purification efficiency of the crude liquefied gas by ultrasonic waves Decreases.
- the ultrasonic waves may be applied directly to the cylinder 1 or to the cylinder 1 via the liquid medium 22. However, it is preferable to apply ultrasonic waves to the cylinder 1 through the liquid medium 22 in terms of efficiency.
- the operation (gas discharge step) of purging (discharging) the gas in the gas phase in the cylinder 1 may be performed continuously or intermittently.
- the operation of applying ultrasonic waves to the cylinder 1 may be performed continuously or intermittently.
- the gas discharge step and the ultrasonic treatment step may be performed simultaneously or sequentially.
- low boiling point impurities can be efficiently removed by applying ultrasonic waves to the cylinder 1 containing the crude liquefied gas.
- the concentration of the product liquefied gas in the cylinder 1 after purification is selected according to the use, and is, for example, 99.9%, 99.99%, 99.999%, 99.9999%, or the like.
- the gas phase impurity concentration in the cylinder 1 is analyzed by the analyzer 5, and the operation (gas discharge step) of purging (discharging) the gas phase components when the target concentration is reached may be completed.
- the flow rate of the gas phase component purged from the cylinder 1 is large, a part of the gas phase impurities (portion not sent to the analyzer 5) may be released into the atmosphere via the pipe 62. Good.
- Example 1 the liquefied gas was purified using the purification apparatus X shown in FIG.
- the volume of the cylinder 1 (container body 11) used was 10 L, and the crude ammonia as a crude liquefied gas was filled in the cylinder 1 before the purification treatment with an initial filling amount of 5 kg.
- the bomb 1 was installed so as to be immersed in water (liquid medium 22) in a container 21 of an ultrasonic generator 2 (ASU-20M manufactured by ASONE Co., Ltd.) to a depth of 5 cm. During startup of the ultrasonic generator 2, the water temperature in the container 21 rose, and the water temperature was adjusted to 25 ° C. by the chiller 3.
- Example 1 the gas phase component in the cylinder 1 was continuously discharged at a flow rate of 250 ml / min, and analyzed by gas chromatography (GC-2014 manufactured by Shimadzu Corporation) as the analyzer 5. The gas phase oxygen concentration and the gas phase nitrogen concentration were reduced to below the lower limit of quantification (less than 1 vol ppm) 1.5 hours after starting the purge of the gas phase components.
- the results of Example 1 are shown in Table 1.
- Example 2 the purification apparatus X was used in the same manner as in Example 1, and a cylinder 1 (volume: 10 L, initial filling amount 5 kg) filled with crude ammonia was used as an ultrasonic generator 2 (ASU-20M manufactured by ASONE Corporation). ) In the water (liquid medium 22) in the container 21 so as to be immersed to a depth of 5 cm. During startup of the ultrasonic generator 2, the water temperature in the container 21 was adjusted to 25 ° C. by the chiller 3. In Example 2, as a difference from Example 1 described above, an operation of stopping the purge for 15 minutes after repeating the purge for 15 minutes was repeated. That is, the gas discharge process was intermittently performed.
- Example 2 the gas phase component in the cylinder 1 was discharged at a flow rate of 250 ml / min, and analyzed by gas chromatography (GC-2014, manufactured by Shimadzu Corporation) as the analyzer 5. Three hours after the start of the component purge, the gas phase oxygen concentration and the gas phase nitrogen concentration were reduced to below the lower limit of quantification (less than 1 volppm). The results of Example 2 are shown in Table 1.
- Comparative Example 1 In Comparative Example 1, the purification apparatus X was used in the same manner as in Example 1, and a cylinder 1 (volume: 10 L, initial filling amount 5 kg) filled with crude ammonia was added to water (liquid medium 22) in the container 21 up to a depth of 5 cm. It was set up soaking. However, as a difference from Example 1, in Comparative Example 1, the ultrasonic generator 2 was not activated, and no ultrasonic wave was applied to the cylinder 1.
- Comparative Example 1 the gas phase components in the cylinder 1 were continuously discharged at a flow rate of 250 ml / min and analyzed by gas chromatography (GC-2014, Shimadzu Corporation) as the analyzer 5. Three hours after the start of the purge of the gas phase component, the gas phase oxygen concentration was 1.5 volppm, and the gas phase nitrogen concentration was 52 volppm. The results of Comparative Example 1 are shown in Table 1.
- Example 3 In Example 3, the liquefied gas was purified using the purification apparatus X in the same manner as in Example 1. However, the type of the liquefied gas charged in the cylinder 1 was different, and accordingly, various conditions were changed from Example 1. changed.
- a liquefied gas cylinder (volume: 3.4 L, initial filling amount 4 kg) filled with crude sulfur dioxide was added to the water in the container 21 of the ultrasonic generator 2 (ASU-20M manufactured by ASONE Corporation). It was installed so as to be immersed in the liquid medium 22) up to a depth of 5 cm. During startup of the ultrasonic generator 2, the water temperature in the container 21 was adjusted to 25 ° C. by the chiller 3.
- Example 3 the gas phase component in the cylinder 1 was continuously discharged at a flow rate of 350 ml / min and analyzed by gas chromatography (GC-2014, manufactured by Shimadzu Corporation) as the analyzer 5. Three hours after the start of the purge of the gas phase components, the gas phase oxygen concentration and the gas phase nitrogen concentration were reduced to below the lower limit of quantification (less than 1 volppm). The results of Example 3 are shown in Table 2.
- Comparative Example 2 In Comparative Example 2, the purification apparatus X is used in the same manner as in Example 3, and the cylinder 1 filled with crude sulfur dioxide (volume: 3.4 L, initial filling amount 4 kg) is used as the water (liquid medium 22) in the container 21. It was installed so that the water depth was 5 cm. However, as a difference from Example 3, in Comparative Example 2, the ultrasonic generator 2 was not activated, and no ultrasonic wave was applied to the cylinder 1.
- Comparative Example 2 the gas phase component in the cylinder 1 was continuously discharged at a flow rate of 350 ml / min and analyzed by gas chromatography (GC-2014, manufactured by Shimadzu Corporation) as the analyzer 5. Three hours after the start of the purge of the gas phase components, the gas phase oxygen concentration was 48 volppm, and the gas phase nitrogen concentration was 59 volppm. The gas phase gas was purged for another 3 hours, and each impurity concentration was 1 volppm or more. The results of Comparative Example 2 are shown in Table 2.
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- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Degasification And Air Bubble Elimination (AREA)
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KR1020197022366A KR20190113792A (ko) | 2017-02-02 | 2018-01-22 | 액화 가스의 정제 방법 및 장치 |
JP2018566062A JP6998329B2 (ja) | 2017-02-02 | 2018-01-22 | 液化ガスの精製方法および装置 |
CN201880009115.3A CN110234413A (zh) | 2017-02-02 | 2018-01-22 | 液化气体的精制方法和装置 |
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JP2017017459 | 2017-02-02 |
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JP (1) | JP6998329B2 (ko) |
KR (1) | KR20190113792A (ko) |
CN (1) | CN110234413A (ko) |
TW (1) | TWI794202B (ko) |
WO (1) | WO2018142984A1 (ko) |
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JPS64153A (en) * | 1987-05-21 | 1989-01-05 | E I Du Pont De Nemours & Co | Improved thermoplastic polyamide-polyarylate composition |
JP2000097399A (ja) * | 1998-08-24 | 2000-04-04 | Air Prod And Chem Inc | 液化圧縮ガス用超高純度気体製品送出装置のための制御ガス抜き装置並びに高純度気体製品送出方法及び装置 |
JP2000220962A (ja) * | 1999-02-01 | 2000-08-08 | Showa Tansan Co Ltd | 液化ガスの精製装置および液化ガスの精製方法 |
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JPH0292200U (ko) * | 1989-01-06 | 1990-07-23 | ||
JP2006036950A (ja) | 2004-07-28 | 2006-02-09 | Mitsubishi Materials Corp | ガスを精製する方法及びその精製に用いられる吸収液 |
CN201201904Y (zh) * | 2008-04-01 | 2009-03-04 | 南京特种气体厂有限公司 | 一种净化硅烷中微量杂质的净化器 |
CN202274686U (zh) * | 2011-09-01 | 2012-06-13 | 叶必武 | 不凝性气体排放装置 |
JP2014125383A (ja) | 2012-12-26 | 2014-07-07 | Showa Denko Kk | 高純度アンモニア及びその製造方法並びに高純度アンモニア製造装置 |
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2018
- 2018-01-22 WO PCT/JP2018/001773 patent/WO2018142984A1/ja active Application Filing
- 2018-01-22 JP JP2018566062A patent/JP6998329B2/ja active Active
- 2018-01-22 CN CN201880009115.3A patent/CN110234413A/zh active Pending
- 2018-01-22 KR KR1020197022366A patent/KR20190113792A/ko not_active Application Discontinuation
- 2018-01-24 TW TW107102517A patent/TWI794202B/zh active
Patent Citations (5)
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JPS64153A (en) * | 1987-05-21 | 1989-01-05 | E I Du Pont De Nemours & Co | Improved thermoplastic polyamide-polyarylate composition |
JP2000097399A (ja) * | 1998-08-24 | 2000-04-04 | Air Prod And Chem Inc | 液化圧縮ガス用超高純度気体製品送出装置のための制御ガス抜き装置並びに高純度気体製品送出方法及び装置 |
JP2000220962A (ja) * | 1999-02-01 | 2000-08-08 | Showa Tansan Co Ltd | 液化ガスの精製装置および液化ガスの精製方法 |
JP2006312115A (ja) * | 2005-05-06 | 2006-11-16 | Tokyo Electric Power Co Inc:The | ガス圧入装置及びガス圧入方法 |
WO2010134301A1 (ja) * | 2009-05-21 | 2010-11-25 | 大陽日酸株式会社 | 精製液化ガスの供給方法 |
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CN110234413A (zh) | 2019-09-13 |
TWI794202B (zh) | 2023-03-01 |
KR20190113792A (ko) | 2019-10-08 |
JPWO2018142984A1 (ja) | 2019-12-19 |
JP6998329B2 (ja) | 2022-01-18 |
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