WO2018038140A1

WO2018038140A1 - Mold material storage container

Info

Publication number: WO2018038140A1
Application number: PCT/JP2017/030060
Authority: WO
Inventors: 朋一梅澤; 昇川崎
Original assignee: 富士フイルム株式会社
Priority date: 2016-08-24
Filing date: 2017-08-23
Publication date: 2018-03-01
Also published as: CN109641693A; KR20190030744A; JP6680646B2; CN109641693B; JP2018030605A; KR102171153B1

Abstract

Provided is a mold material storage container that is capable of preventing foreign objects from sticking to a mold material and occurrence of flaws and damage. The mold material storage container has a container body and a lid. The container body has a mounting surface. The mold material that comprises a magnetic body is mounted on the mounting surface. The lid is attached to the container body so as to be freely opened/closed, and covers the mold material. A magnet closely adheres the mold material to the mounting surface of the container body by means of magnetic force. Since the mold material is not abraded in the container body, dust generation is prevented. Since there is no need to fix the mold material by using an adhesive tape or the like, sticking of foreign objects and occurrence of damage are prevented.

Description

Mold storage container

The present invention relates to a mold material storage container.

Mold materials such as nickel mold, quartz mold, or silicon mold are used for nanoimprinting. These mold materials can be used for LSI (large-scale integration) manufacturing and are attracting attention. Usually, since the mold material manufacturing apparatus and the apparatus using the manufactured mold material are in different locations, the mold material is stored in a storage container and stored or transported in a stored state.

The mold material is formed with a pattern consisting of a set of fine irregularities on the surface. In some cases, the pattern is formed in the central portion, and no pattern is formed in the outer peripheral edge portion. A storage container with a lid is used as the storage container.

Further, although not a mold material container, a container using a magnet for holding a device such as a semiconductor element has been proposed in, for example, Japanese Patent Application Laid-Open Nos. 2010-13189 and 2012-224379.

When the mold material is simply put in the storage container and stored and transported, the mold material moves in the storage container or contacts the inner surface of the storage container. For this reason, deformation of the mold material, damage to the pattern, and the like occur. In order to prevent such deformation and / or breakage of the mold material, an adhesive tape having an adhesive layer on one side is pasted so as to straddle the outer peripheral edge of the mold material and the mounting surface of the storage container, and the mold material is stored in the storage container. It is done to be fixed inside.

In fixing the mold material with the adhesive tape, when the adhesive tape is peeled off, there may be a so-called adhesive residue in which the adhesive layer remains on the mold material. The adhesive residue is not preferable because the mold material becomes dirty and deposits are generated. Further, when the adhesive tape is peeled off, stress is applied to the mold material, and as a result, the mold material may be deformed.

Instead of the above adhesive tape, it is also conceivable that, for example, a cross-shaped leaf spring is bent and the mold material is pressed by the elastic force generated by the deformation of each end of the leaf spring. However, in this case, since the mold material is pressed by the leaf spring, stress is applied to the mold material, and as a result, the mold material may be deformed. Further, the contact portion of the leaf spring may be scratched and / or dust may be generated due to scratching.

Instead of the holding method as described above, as disclosed in Japanese Patent Application Laid-Open Nos. 2010-13189 and 2012-224379, a technique for holding a stored item such as a device in a storage container with a magnet is diverted. It is also conceivable to hold the mold material. However, in this case, since the mold material is brought into close contact with the magnet by magnetic force, when the mold material is thin, there is a problem in that it cannot be picked well even if the outer periphery of the mold material is pinched with, for example, tweezers. is there. Even if it is picked, since the mold material is in close contact with the magnet, it becomes difficult to peel off, and the thin mold material is deformed by the tensile force at the time of peeling. Therefore, the problem with thin mold materials cannot be solved by simply diverting the technique based on magnetic adsorption.

An object of the present invention is to provide a mold material storage container that eliminates the adhesion of foreign matters to the mold material and the occurrence of scratches and breakage.

The mold material storage container of the present invention includes a container body, a lid, and a magnet. The container body has a placement surface on which a mold material made of a magnetic material is placed. The lid is attached to the container body so as to be openable and closable, and covers the mold material. The magnet closely attaches the mold material to the mounting surface by magnetic force.

The mounting surface is preferably the surface of a magnet. The mounting surface is preferably a protective sheet interposed between the magnet and the mold material. The protective sheet is made of a nonmagnetic material.

It is preferable that the mold material has a pattern surface and an outer peripheral edge portion surrounding the pattern surface, and the outer peripheral edge of the mounting surface is located inside the outer peripheral edge portion of the mold material and outside the outer peripheral edge of the pattern surface. Moreover, it is preferable to have the groove | channel, recessed part, or notch which forms a clearance gap between the outer peripheral edge parts of a type | mold material in the outer peripheral edge part of a mounting surface. The thickness of the mold material is not particularly limited, but the mold material storage container of the present invention is suitable for storing a thin mold material. The thin mold material referred to in the present invention refers to a material that is flexible and easily stretches and deforms due to the action of a tensile force. The range varies depending on the material, but the thickness is 1 μm to 2 mm, preferably The thickness is in the range of 10 μm to 1 mm, particularly preferably in the range of 100 μm to 700 μm.

There is a magnet displacement part that moves the magnet close to the mold material and displaces the mold material between the close position and the release position that releases the magnet from the mold material and releases the close contact with the mount surface. It is preferable. The magnet is a set of a plurality of divided magnets that are divided in a direction parallel to the placement surface, and at least one of the divided magnets is preferably displaced between the contact position and the release position by the magnet displacement portion. It is preferable that the magnet displacement portion has a storage hole that holds the magnet so as to be movable to the contact position and the release position. The magnet preferably has an operation member operable from the outside of the container body. It is preferable to have an interlocking mechanism that places the magnet in the close contact position when the lid is open and places the magnet in the release position when the lid is closed.

The magnet is an electromagnet, and is preferably turned on in a state where the mold material is placed on the placement surface.

The magnet is a flexible magnet sheet, and the magnet sheet preferably has a separation part that separates a part of the magnet sheet from the mold material from the outside of the container body.

The mold material storage container of the present invention includes a container body, a lid, a first magnetic body, and a second magnetic body. The container body has a placement surface on which the mold material is placed. The lid is attached to the container body so as to be openable and closable, and covers the mold material. At least one of the first magnetic body and the second magnetic body is a magnet, and the mold material is clamped on the mounting surface by a magnetic force. The mold material has a pattern surface and an outer peripheral edge surrounding the pattern surface, and the first magnetic body or the second magnetic body facing the pattern surface forms a gap that maintains a non-contact state with the portion facing the pattern surface. It is preferable to have a recess or a notch.

According to the present invention, it is possible to eliminate the adhesion of foreign matter to the mold material and the occurrence of scratches and breakage.

It is a perspective view which shows the mold material storage container of 1st Embodiment of this invention. It is a top view which shows a mold material storage container. It is a side view which notches and shows a part of mold material storage container. It is a rear view which notches and shows a part of mold material storage container. It is a side view which shows the holding | maintenance state of a mold material. It is a side view which shows the holding | maintenance state of the type | mold material of the modification 1 using a protection sheet. It is a perspective view which shows the principal part of the mold material storage container of the modification 2 using a ring-shaped magnet. It is a perspective view which shows the principal part of the mold material storage container of 2nd Embodiment which changed the outer diameter size of the magnet. It is a top view which shows the principal part of the type | mold material storage container of the modification 3 which changed the outer shape of the magnet. It is a perspective view which shows the principal part of the mold material storage container of the modification 4 which has a groove | channel in a part of magnet. It is a top view which shows the principal part of the mold material storage container of 3rd Embodiment which moves a division | segmentation magnet. FIG. 12 is a cross-sectional view taken along the line XII-XII in FIG. FIG. 12 is a cross-sectional view taken along the line XII-XII in FIG. 11, showing a state where the divided magnet is in the release position. It is a top view which shows the principal part of the mold material storage container of the modification 5 which moves a division | segmentation magnet. FIG. 15 is a cross-sectional view taken along line XV-XV in FIG. 14 and shows a state where the divided magnets are in close contact positions. It is sectional drawing which shows the type | mold material storage container of the modification 6 which made the baseplate double, and has shown the state which closed the lid | cover. It is sectional drawing which shows the mold material storage container of the modification 6 of the state which opened the lid | cover. It is a top view which shows the principal part of the mold material storage container of the modification 7 which divided the magnet into two. It is sectional drawing which shows the principal part of the mold material storage container of the modification 7 of the state which opened the movable baseplate. It is sectional drawing which shows the principal part of the mold material storage container of the modification 8 using a magnet sheet. It is sectional drawing which shows the mold material storage container of 4th Embodiment using an interlocking mechanism, and has shown the state which closed the lid | cover. It is sectional drawing which shows the principal part of the mold material storage container of 4th Embodiment, and has shown the state which opened the cover. It is a perspective view which shows the mold material storage container of 5th Embodiment. It is sectional drawing which shows the mold material storage container of 6th Embodiment using an electromagnet as a magnet.

[First Embodiment]
As shown in FIG. 1, the mold material storage container 10 which implemented this invention is for accommodating a mold material. The mold material storage container 10 includes a container body 11, a lid 12, and a magnet 13. The container body 11 is formed in a rectangular box shape with an open top. The container main body 11 includes a rectangular bottom plate 11A and

side plates

11B and 11C that cover the outer periphery of the bottom plate 11A.

As shown in FIG. 2, the lid 12 is attached to one side plate 11B through a hinge portion 17 so as to be freely opened and closed. The lid 12 is displaced by the hinge portion 17 between an open position shown in FIG. 1 and a closed position shown in FIG. In the open position, the lid 12 is, for example, about 90 ° with respect to the bottom plate 11A. In the closed position, the lid 12 is parallel to the bottom plate 11A.

The lid 12 has a locking claw portion 18 on the side opposite to the hinge portion 17. A locking projection 19 is formed on the side plate 11 B of the container body 11 at a position corresponding to the locking claw portion 18. When the lid 12 is closed, the locking claw portion 18 is locked to the locking projection 19, whereby the lid 12 is kept closed. An o-ring (not shown) is provided on the mating surface of the lid 12 and the container body 11 as necessary. The O-ring seals the inside of the container body 11 when the lid 12 is closed.

The magnet 13 is composed of a permanent magnet, and is attached to the upper surface of the bottom plate 11A with, for example, an adhesive as shown in FIGS. The mold 15 is made of a magnetic material, and in this example is a nickel (Ni) mold. “Magnetic substance” is a substance that can be magnetized, and more simply means a substance that adheres to a magnet. As shown in FIG. 2, the magnet 13 is formed in a rectangular plate shape and attracts the mold material 15 by magnetic force. As a result, the mold material 15 comes into close contact with the magnet 13. The surface of the magnet 13 serves as a mounting surface 13 A for the mold material 15. The “magnet” is a magnet and means an object (a magnetized member) that is a source for generating a magnetic field.

The thickness of the mold material 15 is not particularly limited, and mold materials 15 of various thicknesses can be accommodated. The mold material 15 stored in the mold material storage container 10 of the present embodiment is formed into a circular shape by cutting a thin nickel sheet having a thickness of 120 μm, for example. In each figure, the thickness of the mold material 15 is exaggerated with respect to other members in order to display the mold material 15 in an easily understandable manner.

As shown in FIGS. 1 and 5, a pattern surface 15 A is formed on one surface (surface) at the center of the mold 15. The pattern surface 15A is composed of a set of fine irregularities and is formed, for example, in a circular shape in plan view. Although the range of the mold material 15 preferably used in the present invention varies depending on the material, it has a thickness in the range of 1 μm to 2 mm, preferably 10 μm to 1 mm, particularly preferably 100 μm to 700 μm. The mold material 15 having such a thickness range is referred to as a thin mold material 15 in the present invention, but the range varies depending on the material. The point is that the mold 15 is thin if it has flexibility and is thin enough to be easily deformed when stress is applied for removal in normal handling.

The mold 15 has an outer peripheral edge 15B that surrounds the pattern surface 15A. The mold material 15 is placed on the magnet 13 so that the back surface opposite to the surface on which the pattern surface 15A is formed is in close contact with the mounting surface 13A of the magnet 13. As a result, the pattern surface 15A does not contact the magnet 13, and the pattern surface 15A is not damaged by the contact with the magnet 13.

When using the mold material storage container 10 of the first embodiment, the mold material 15 is placed on the magnet 13 after the lid 12 is opened. The mold member 15 made of nickel is attracted to the placement surface 13A of the magnet 13 by magnetic force, and is in close contact with the placement surface 13A. Since the back surface of the mold member 15 is in close contact with the mounting surface 13A of the magnet 13, the pattern surface 15A on the front surface does not contact the magnet 13 and the pattern surface 15A is not damaged.

[Modification 1]
In the first embodiment, the back surface of the mold material 15 is directly adhered to the magnet 13, but in the first modification shown in FIG. 6, the protective sheet 21 is inserted between the magnet 13 and the mold material 15. Therefore, the protective sheet 21 is interposed between the mold material 15 and the magnet 13, and constitutes a placement surface on which the protective sheet 21 is placed in contact with the mold material 15. The protective sheet 21 prevents the surface of the magnet 13 and the mold material 15 from coming into direct contact and is made of a nonmagnetic material. Here, the non-magnetic material is a material that is not a magnetic material, and more simply means a material that does not stick to a magnet. Since the protective sheet 21 is a non-magnetic material, the magnetic field is not disturbed between the magnet 13 and the mold material 15, and the mold material 15 can be favorably adsorbed and protected. When the protective sheet 21 is used, the mold material 15 is in a state in which the pattern surface 15A is in contact with the protective sheet 21, and the mold material 15 of the first embodiment shown in FIG. In this case, the back surface of the mold material 15 is exposed to the outside, so that it does not come into contact with the pattern surface 15A, and damage to the pattern surface 15A can be prevented. Further, the adhesion of foreign matter to the pattern surface 15A can be suppressed. Here, from the viewpoint of protecting the pattern surface 15 A, the protective sheet 21 is preferably formed of a material softer than the mold material 15. Note that, in the following modifications and embodiments, the same components are denoted by the same reference numerals, and redundant descriptions are omitted. The protective sheet 21 is formed to be sufficiently thin so that the adhesion of the mold material 15 due to magnetic force is not impaired. The protective sheet 21 is drawn with the thickness exaggerated in the same manner as the mold 15.

[Modification 2]
Instead of using the protective sheet 21, in the second modification shown in FIG. 7, the magnet 22 is in a ring shape, and only the outer peripheral edge 15 B of the mold material 15 is in contact with the magnet 22. In this case, even if the pattern surface 15A faces the magnet 22 side, the magnet 22 does not directly contact the pattern surface 15A. Therefore, the pattern surface 15A is not exposed to the outside, and therefore, scratches and / or dust are prevented from being attached. The magnet 22 is configured in a ring shape having a circular opening. However, the magnet 22 may be a recess, groove, or notch for forming a gap that maintains a non-contact state with a portion facing the pattern surface 15A. Well, the shape is not particularly limited. Also in this case, the pattern surface 15A can be made non-contact with the magnet.

[Second Embodiment]
In the second embodiment shown in FIG. 8, the outer size (outer diameter D2) of the magnet 25 is smaller than the outer size (outer diameter D1) of the mold member 15. Due to the difference in the outer size (difference in outer diameter determined by D1-D2), the non-contact portion 15C of the mold material 15 by the magnet 25 is formed. A gap is formed between the magnet 25 and the mold material 15 by the non-contact portion 15C. The mold material 15 can be easily picked by inserting a tip such as tweezers into the gap. Therefore, when the mold material 15 is taken out, it is easier to take out the thin mold material 15 as compared with the first embodiment in which the mold material 15 in close contact with the mounting surface 13A is peeled off from the magnet 13 as shown in FIG.

[Modification 3]
In the second embodiment, the non-contact portion 15C is formed by changing the outer size, but the method of forming the non-contact portion 15C is not limited to this. For example, in the modified example 3 shown in FIG. 9, a rectangular magnet 26 is used for the circular mold material 15, and the non-contact portion 15C indicated by hatching is formed by changing the outer shape in plan view in this way. is doing. In the modified example 3, as in the second embodiment, the non-contact portion 15C is formed in the mold material 15, so that a gap is formed between the magnet 26 and the mold material 15. As a result, the mold material 15 can be easily taken out. Can be done.

[Modification 4]
In the fourth modification shown in FIG. 10, four grooves 28 A are formed in a part of the surface of the magnet 28, thereby forming a non-contact portion 15 C in the mold material 15. Also in this case, the mold member 15 can be easily picked by inserting a tip portion such as tweezers between the non-contact portion 15C formed by the groove 28A and the magnet 28. In place of the groove 28A, a recess or a notch may be used.

[Third Embodiment]
In the third embodiment shown in FIGS. 11 to 13, when the mold material 15 is taken out from the bottom plate 31, the divided magnet 30 A is moved away from the mold material 15 by a magnet displacement portion (not shown), and thereby attracted by magnetic force. The power is reduced. For this reason, the mold 15 can be easily taken out. The magnet displacement part has a storage hole 31A. The storage hole 31A stores the divided magnet 30A so as to be movable between the close contact position and the release position.

As shown in FIG. 11, the magnet is configured as a set of a plurality of divided magnets 30A divided in a direction parallel to the placement surface 13A, for example, a set of four divided magnets 30A. These divided magnets 30 A are disposed in the storage holes 31 A near each corner of the square bottom plate 31, for example. The storage hole 31 A is formed in the bottom plate 31 on a diagonal line connecting corners of the rectangular bottom plate 31. The split magnet 30A moves between the close contact position shown in FIG. 12 and the release position shown in FIG.

The close contact position is a position where the divided magnet 30A is close to the inside of the storage hole 31A. At this close contact position, the mold material 15 is attracted to the divided magnet 30A by the magnetic force of the divided magnet 30A. The release position shown in FIG. 13 is a position where the divided magnet 30A is located outside the storage hole 31A. At this release position, the attractive force due to the magnetic force of the divided magnet 30A is weakened or lost, and the mold 15 can be easily picked from the bottom plate 31 and peeled off.

A spring material 32 made of a coil spring is placed in the storage hole 31A. The spring material 32 biases the divided magnet 30A from the release position to the contact position. The split magnet 30A is set at the close contact position by the spring material 32.

In the outer surface of the bottom plate 31, a long hole 34 extending long along a diagonal line is formed. Further, the split magnet 30A is formed with a projection 35 as an operation member protruding. The protrusion 35 protrudes slightly from the long hole 34 toward the outside, and can be operated from the outside of the container body. By pushing the projection 35 along the long hole 34 with a finger or the like, the divided magnet 30A can be moved from the contact position to the release position.

Note that the projection 35 may be omitted, and the split magnet 30A may be moved from the contact position to the release position by inserting a finger into the long hole 34.

When the mold material 15 is taken out, the split magnet 30A is moved from the contact position to the release position against the bias of the spring material 32, thereby releasing the holding of the mold material 15 by the split magnet 30A. With this release, the part 15 of the released part can be picked with tweezers and the like, and the part 15 can be easily taken out from the storage container.

Instead of urging the contact position by the spring material 32, the divided magnets 30A may be locked at the contact position and the release position by a click mechanism (not shown). In this case, when the mold material 15 is stored, the split magnet 30A is set at the close contact position, and when the mold material 15 is taken out, the split magnet 30A is set at the release position.

A part of the bottom plate 31 is interposed as a protective layer 31B between the mold material 15 and the divided magnet 30A. The protective layer 31B is formed with a thickness within a range in which the tensile force of the mold material 15 due to the magnetic force of the split magnet 30A acts. Note that the protective layer 31B may be eliminated, and the mold material 15 may be directly adhered to the divided magnet 30A. Further, in the third embodiment, all the divided magnets 30A are configured to be movable within the storage hole 31A, but one or more of them may be moved. In this case, the remaining divided magnet 30A is fixed to the bottom plate 31 at the close contact position.

[Modification 5]
In the fifth modification shown in FIGS. 14 and 15, the moving direction of the divided magnet 40 is set to a direction perpendicular to the pattern surface 15A. The storage hole 41 A is formed at a position close to each corner of the rectangular bottom plate 41. The storage hole 41A holds the divided magnet 40 so as to be movable in a direction orthogonal to the pattern surface 15A. The split magnet 40 is biased upward by a spring material 42. Due to this urging, the divided magnet 40 is held in a close contact position (indicated by a solid line in FIG. 15) for holding the mold material 15 in close contact with the protective layer 41B.

The operation projection 43 as an operation member is formed on the side surface of the split magnet 40 so as to protrude. A long hole 44 that is long in the vertical direction is formed on the side surface of the bottom plate 41 at a position corresponding to the operation protrusion 43. By causing the operation protrusion 43 to protrude outside from the long hole 44, the divided magnet 40 is moved up and down in the storage hole 41 A via the operation protrusion 43. By this elevation, the position is switched between a close contact position for holding the mold material 15 and a release position (indicated by a two-dot chain line in FIG. 15) for releasing the holding of the mold material 15. At the release position, the attracting force due to the magnetic force of the split magnet 40 is weakened or lost, and the mold 15 can be easily picked from the bottom plate 41 and peeled off.

[Modification 6]
In Modification 6 shown in FIGS. 16 and 17, the container body 50 has a double structure of a first bottom plate 51 and a second bottom plate 52, and can be opened and closed independently by

hinge portions

48 and 49. The mold material 15 is placed on the upper first bottom plate 51. A magnet 53 is fixed to the lower second bottom plate 52. The thickness of the mounting surface 51 A of the first bottom plate 51 is set within a range in which the attractive force of the mold material 15 due to the magnetic force of the magnet 53 acts. While the mold material 15 is housed, the second bottom plate 52 is in a closed state, and the mold material 15 is held in close contact with the first bottom plate 51 by the magnet 53.

As shown in FIG. 17, when the mold material 15 is taken out, the second bottom plate 52 is opened after the lid 12 is opened. Since the magnet 53 is separated from the mold material 15 by opening the second bottom plate 52, the holding of the mold material 15 by the magnetic force of the magnet 53 is released. Therefore, the mold material 15 can be peeled off from the first bottom plate 51. As described above, the container body 50 has a double structure of the first bottom plate 51 and the second bottom plate 52, and the second bottom plate 52 is opened, so that dust generation due to rubbing between the container body 50 and the mold material 15 can be suppressed. . Furthermore, an O-ring (not shown) or the like may be disposed between the lid 12 and the container body 50 to form a sealed structure. Accordingly, it is possible to prevent moisture and / or dust from entering from the outside, which is suitable for long-term storage of the mold material 15 such as a thin electric mold having a fine pattern.

[Modification 7]
In Modification 7 shown in FIGS. 18 and 19, for example, two divided magnets 61 A and 61 B obtained by dividing the magnet 53 of Modification 6 into two parts are used. One divided magnet 61 A is fixed to the bottom plate 60. The other divided magnet 61B is fixed to the movable bottom plate 62. The movable bottom plate 62 is attached to the bottom plate 60 by a hinge portion 63 so as to be freely opened and closed. Therefore, when the movable bottom plate 62 is opened by rotating the movable bottom plate 62 downward by the hinge portion 63, the other divided magnet 61B is lowered, thereby forming a gap 64 with the mold material 15. . Due to the gap 64, the holding of the mold material 15 by the split magnet 61 B is released, and the mold material 15 can be peeled from the bottom plate 60.

[Modification 8]
In the modification 8 shown in FIG. 20, the division magnet 65 equivalent to the division magnet 61B of the modification 7 is formed from the magnet sheet. The split magnet 65 has flexibility, and only the rear end portion 65A is fixed to the bottom plate 60, and the front end portion 65B is attached so as to be separated from the bottom plate 60 (displaceable between a contact state and a separated state). . A knob 66 is formed at the tip 65B so as to protrude. A separating portion is constituted by the tip portion 65B including the knob 66. Therefore, instead of the movable bottom plate 62 of the modified example 7, a gap 67 is formed between the divided magnet 65 and the mold 15 by pulling the divided magnet 65 downward in FIG. The holding of the mold material 15 by the split magnet 65 is released.

In addition, although illustration was abbreviate | omitted instead of comprising the division magnet 65 from a magnet sheet, you may comprise one magnet from a magnet sheet. Also in this case, similarly to the case of the divided magnet 65, the magnet sheet can be separated (separated) from the placement surface by pulling one end or corner of the magnet sheet downward in FIG.

[Fourth Embodiment]
The fourth embodiment shown in FIGS. 21 and 22 is a mold material storage container 69 in which the magnet 71 is displaced from the contact position to the release position in accordance with the opening / closing operation of the lid 12 by the interlock mechanism 70. The interlocking mechanism 70 places the magnet 71 in the release position when the lid 12 is open, and places the magnet 71 in the contact position when the lid 12 is closed.

The interlocking mechanism 70 includes an arm 72 and a swing plate 73. The arm 72 is provided so as to protrude obliquely from the lid 12 near the hinge portion 74. An engaging pin 72 A protrudes from the tip of the arm 72 in a state orthogonal to the arm 72. The swing plate 73 is an end of the bottom plate 75 opposite to the hinge portion 74 and is swingably attached to the bottom plate 75 via a mounting shaft 76. A magnet 71 is fixed to the bottom plate 75. The swing plate 73 has a recess 73B formed on the bottom surface. A magnet 71 is housed in the recess 73B. The tip portion of the swing plate 73 has a long hole 78, and the engagement pin 72 A is engaged in the long hole 78.

As shown in FIG. 22, when the lid 12 is displaced from the closed state to the open state, the swing plate 73 is lifted via the arm 72 and the engaging pin 72A. By this swinging by lifting, the mounting surface 73A of the swinging plate 73 is separated from the magnet 71. For this reason, the mold material 15 on the placement surface 73 A is weakened or eliminated by the magnetic force, and the mold material 15 can be taken out from the swing plate 73.

When the mold material 15 is stored in the mold material storage container 69, the lid 12 is closed after the mold material 15 is placed on the placement surface 73 A of the swing plate 73. When the lid 12 is closed, as shown in FIG. 21, the mold material 15 on the placement surface 73A is pulled by the magnetic force of the magnet 71 fixed to the bottom plate 75, thereby causing the mold material 15 to be placed on the placement surface 73A. Retained.

[Fifth Embodiment]
A mold material storage container 81 of the fifth embodiment shown in FIG. 23 holds a mold material 80 that is not a magnetic material such as a quartz mold or a silicon mold, that is, a mold material 80 that is a non-magnetic material. In this case, the mold material 80 is held by the mold material storage container 10 and the holding plate 82 of the first embodiment shown in FIG. The holding plate 82 is made of, for example, iron and has a ring shape, and is chrome plated. The outer diameter D3 of the holding plate 82 is larger than the outer diameter D1 of the mold member 80, and the inner diameter d3 is larger than the diameter d1 of the pattern surface 15A of the mold member 80. The holding plate 82 is a first magnetic body, and the rectangular magnet 13 is a second magnetic body. The mold member 80 is clamped by a magnetic force by a holding plate 82 as a first magnetic body and a magnet 13 as a second magnetic body.

The holding plate 82 may be a magnet instead of a magnetic material. Further, instead of the magnet 13 fixed to the bottom plate 11A, for example, an iron magnetic body may be used. In this case, the holding plate 82 is made of a magnet. In order to avoid contact between the pattern surface 15A and the first magnetic body or the second magnetic body, an inner diameter d3 of an opening larger than the diameter d1 of the pattern surface 15A is formed on the magnetic body side in contact with the pattern surface 15A. In place of the opening, a groove and / or a recess may be formed to avoid contact with the pattern surface 15A. Furthermore, a protective sheet may be interposed between the pattern surface 15A and the magnetic body instead of the opening, groove, or recess.

[Sixth Embodiment]
The mold material storage container 90 of the sixth embodiment shown in FIG. 24 uses an electromagnet 91 as a magnet. For this reason, the container main body 94 includes a control circuit 92 that controls the electromagnet 91 to be turned ON / OFF and a battery power source 93. The electromagnet 91 is configured to be thin and has a mounting surface 91A on which the entire surface of the mold material 15 is placed. The control circuit 92 has an operation switch 95. The control circuit 92 energizes the electromagnet 91 when the operation switch 95 is turned on by operating the operation knob 95A. When the mold material 15 is placed on the placement surface 91A in this state, the mold material 15 is brought into close contact with the placement surface 91A by the electromagnet 91. Further, when the operation switch 95 is turned OFF, the energization to the electromagnet 91 is cut off, and thereby the holding of the mold material 15 is released.

The electromagnet 91 may be a divided magnet that is divided into a plurality of pieces in the direction of the pattern surface 15A of the mold 15. In this case, the plurality of divided magnets may be individually turned ON / OFF or current controlled to partially eliminate or weaken the holding force of the mold material 15, thereby facilitating the removal of the mold material 15.

Further, the electromagnet 91 may be controlled on and off in conjunction with the opening and closing of the lid 12. For example, when the lid 12 is opened, the electromagnet 91 is turned off, and when the lid 12 is closed, the electromagnet 91 is turned on. The placement surface 91 A is the surface of the electromagnet 91, but a protective sheet or a protective layer formed by the container body 94 may be interposed between the mounting surface 91 A and the mold material 15.

The present invention is not limited to the above embodiments and modifications, and various modifications can be made without departing from the spirit of the present invention, for example, combinations of the above embodiments and modifications. It is.

Claims

A container body having a mounting surface on which a mold made of a magnetic material is placed;
A lid that is openably and closably attached to the container body, and covers the mold material;
A mold material storage container, comprising: a magnet for bringing the mold material into close contact with the mounting surface by magnetic force.
2. The mold material storage container according to claim 1, wherein the mounting surface is a surface of the magnet.
2. The mold material storage container according to claim 1, wherein the mounting surface is a protective sheet interposed between the magnet and the mold material.
The mold material container according to claim 3, wherein the protective sheet is made of a non-magnetic material.
The mold material has a pattern surface and an outer peripheral edge surrounding the pattern surface, and the outer peripheral edge of the placement surface is located inside the outer peripheral edge of the mold material and outside the outer peripheral edge of the pattern surface. The mold material container according to claim 1.
The mold material has a pattern surface and an outer peripheral edge surrounding the pattern surface, and a groove, a recess, or a notch that forms a gap with the outer peripheral edge of the mold material is formed on the outer peripheral edge of the placement surface. The mold material storage container according to claim 1.
Between a close position where the magnet is brought close to the mold material and the mold material is in close contact with the placement surface, and a release position where the magnet is separated from the mold material and the close contact of the mold material with the placement surface is released. The mold material storage container according to claim 1, further comprising a magnet displacing portion that is displaced by the step.
The magnet is a set of a plurality of divided magnets divided in a direction parallel to the placement surface,
The mold material storage container according to claim 7, wherein at least one of the divided magnets is displaced between the contact position and the release position by the magnet displacement portion.
The mold material storage container according to claim 7 or 8, wherein the magnet displacement part has a storage hole for holding the magnet movably at the close contact position and the release position.
The mold material storage container according to any one of claims 7 to 9, wherein the magnet has an operation member operable from the outside of the container main body.
The mold material storage container according to claim 7, further comprising an interlocking mechanism for bringing the magnet into the close contact position when the lid is open and bringing the magnet into the release position when the lid is closed.
The mold material container according to claim 1, wherein the magnet is an electromagnet, and is turned on when the mold material is placed on the mounting surface.
The magnet is a flexible magnet sheet;
The mold material storage container according to claim 1, wherein the magnet sheet has a separation portion that separates a part of the magnet sheet from the mold material from the outside of the container body.
A container body having a mounting surface on which a mold material is placed;
A lid that is openably and closably attached to the container body, and covers the mold material;
A mold material storage container comprising a first magnetic body and a second magnetic body, at least one of which is a magnet and sandwiching the mold material on the mounting surface by a magnetic force.
The mold material has a pattern surface and an outer peripheral edge surrounding the pattern surface, and the first magnetic body or the second magnetic body facing the pattern surface maintains a non-contact state with a portion facing the pattern surface. The mold material storage container according to claim 14, further comprising a recess or a notch that forms a gap.