JPH0637175A - Cap opening/closing device of storage box - Google Patents

Abstract

PURPOSE:To provide a cap opening/closing device of a storage box which can attract a cap even when power supply is disconnected, which hardly shifts the cap and generates heat, and has a simple structure. CONSTITUTION:The title device is the cap opening/closing device 31 of a storage box 10 which attracts a cap 13 to the opening of a storage box main body 11 by evacuating the main body 11 to a vacuum and separates the cap 13 from the main body 11 by attracting the cap 13 to a cap attracting section 35. A magnetic material 15 is buried in the cap 13 and an electromagnet 41 composed of a permanent magnet 37 and coil 39 is fitted to the device 31. When the device 31 is caused to approach or separated from the cap 13, the magnetic force of the electromagnet 41 is reduced or a low level or zero by permitting an electric current to flow through the coil 39 and, when the device is not moved, the magnetic material 15 of the cap 13 is attracted by the magnetic force of the permanent magnet 37 only by stopping the current supply to the coil 39. In addition, the pressing of the cap 14 against the main body 11 is performed by the pressing force of the device 31 itself.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage box used for carrying and storing wafers, glass substrates, disks and the like in a semiconductor manufacturing process and the like, and more particularly to a cap opening / closing device for the storage box.

[0002]

2. Description of the Related Art Conventionally, a storage box has a container-shaped storage box main body in which a carrier such as a wafer, a glass substrate, and a disk is housed, a cap is attached to the opening, and the inside of the storage box main body is evacuated. It is constructed by attaching and fixing the cap to the storage box body.

FIG. 6 is a view showing a cap opening / closing device for a storage box proposed by the applicant of the present application in Japanese Patent Application No. 2-312825, which shows a state in which the storage box 80 is connected to a connection chamber 90. .

In the storage box 80, a cap 83 is attached to an opening of a storage box main body 81 for accommodating carriers such as wafers, and the inside of the storage box main body 81 is evacuated to attract the cap 83 to the storage box main body 81. -It is configured to be fixed.

On the other hand, in the connection chamber 90, a working chamber 92 is provided in a connection chamber body 91, and the cap opening / closing device 9 is provided in the working chamber 92.
5 is inserted. This cap opening and closing device 9
5 can be driven vertically and horizontally by a drive mechanism 93.
Further, electromagnets 96 and 97 are embedded in the cap opening / closing device 95, and a current is supplied by a power source 98.

In order to remove the cap 83 from the storage box 80, first, the cap opening / closing device 95 is moved to bring it into contact with the cap 83, and the power source 98 causes the electromagnets 96, 9 to come into contact therewith.
7 to supply a current to the cap opening / closing device 95
Adsorb to 3.

Next, the switching valve 94 attached to the connection chamber body 91 is switched to the vacuum side to evacuate the working chamber 92. As a result, the internal pressure of the working chamber 92 and the storage box 8
Since the internal pressure of 0 is the same, the cap 83 does not stick to the storage box body 81.

Next, when the cap opening / closing device 95 is retracted and lowered by the drive mechanism 93 and is housed in the lower chamber 99,
The cap 83 attracted by the magnetic force of the electromagnets 96 and 97 of the cap opening / closing device 95 also moves together with the cap 83, is removed from the storage box body 81, and is housed in the lower chamber 99.

Then, the working chamber 92 is opened by the switching valve 94.
After the inside of the storage box main body 81 is brought to atmospheric pressure, the door 100 is opened and the wafers and the like are taken out from the storage box main body 81 and stored.

After closing the door 100, the switching valve 9
After the work chamber 92 and the storage box main body 81 are evacuated again by 4, the cap opening / closing device 95 is raised and moved forward to cover the opening of the storage box main body 81 with the cap 83, and the pressing force of the cap opening / closing device 95 itself. The cap 83 is pressed against the storage box body 81 by. Then, when the working chamber 92 is brought to the atmospheric pressure by the switching valve 94, the cap 83 is in a state of being adsorbed to the storage box main body 81. And electromagnet 9
The energization of 6, 97 is stopped and the arm 95 is retracted.

[0011]

However, the above-mentioned conventional example has the following problems. If the supply of current to the electromagnets 96 and 97 is cut off due to a power failure or the like while the cap opening / closing device 95 is sucking the cap 83, the cap 83 will drop.

If the cap 83 is attracted to the cap opening / closing device 95 for a long time by the electromagnets 96 and 97, heat is generated. As a countermeasure, a method of providing a cooling mechanism inside can be considered, but its structure becomes complicated.

When the cap 83 is detached from the storage box body 81 and is sucked by the cap opening / closing device 95 to be moved or stored, if the adsorption position of the cap 83 on the cap opening / closing device 95 is displaced, the cap 83 is opened again. When it is attached to the storage box main body 81, a deviation from the original attachment position occurs.

As a countermeasure against the above-mentioned problems, it is conceivable to provide a mechanical clamp mechanism or a place for accommodating the cap in a stable state, but in both cases, the structure becomes complicated.

The present invention has been made in view of the above points, and an object thereof is to allow the cap to be adsorbed even when the power is turned off, to prevent the cap from being displaced, to prevent heat generation, and to keep the structure simple. An object is to provide a box cap opening / closing device.

[0016]

In order to solve the above-mentioned problems, according to the present invention, as shown in FIG. 1, a storage box main body 11 for storing contents and a cap 1 for closing an opening of the storage box main body 11 are provided.
The storage box 10 comprises a storage box 10 configured to vacuum the inside of the storage box main body 11 so that the cap 13 is adsorbed to the opening of the storage box main body 11, and the cap 13 is attached to and detached from the storage box main body 11. In the switchgear 31,
At least one magnetic body 15 is provided on either the cap 13 of the storage box 10 or the cap opening / closing device 31.
And an electromagnet 41 including at least one permanent magnet 37 and a coil 39 is attached to the other side of the cap 13 or the cap opening / closing device 31 at a position facing the magnetic body 15. At the time of approaching to and leaving from, the electric current is passed through the coil 39 of the electromagnet 41 to weaken or reduce the attractive force of the electromagnet 41 to the magnetic body 15, or otherwise, to the coil 39.
The control means is provided so that the magnetic material 15 is attracted only by the magnetic force of the permanent magnet 37 and the cap 13 is pressed against the storage box body 11 by a mechanical pressing force.

Further, as shown in FIG. 1, the present invention comprises a storage box body 11 for storing contents and a cap 13 for closing an opening of the storage box body 11, and the inside of the storage box body 11 is evacuated to a vacuum. In the cap opening / closing device 31 of the storage box 10 which is equipped with the storage box 10 for adsorbing the cap 13 to the opening of the storage box body 11, the cap 13 of the storage box 10 or the cap At least one switchgear 31
One permanent magnet 65 is embedded, and at least one magnetic body 67 and the coil 3 are provided in a position facing the permanent magnet 65 on the other side of the cap 13 or the cap opening / closing device 31.
An electromagnet 41 composed of 9 is attached, and when the cap opening / closing device 31 approaches or leaves the cap 13, a current is passed through the coil 39 of the electromagnet 41 to weaken or reduce the attraction force of the electromagnet 41 to the permanent magnet 65. When the cap 13 is pressed against the storage box body 11, the coil 39
A control means is provided which causes a larger current to flow to generate a repulsive force to the permanent magnet 65, and otherwise cuts off the current to the coil 39 to attract the magnetic body 67 to the permanent magnet 65 only by its magnetic force. It was

The present invention also provides the cap opening / closing device 31.
In addition, a plurality of positioning stoppers 45, 46, 47, 48 for preventing lateral displacement of the cap 13 by abutting against the side surface of the cap 13 and urging the cap 13 are provided.

[0019]

The attraction between the cap 13 and the cap opening / closing device 31 is performed only by the magnetic force of the permanent magnet 37 or 65. Therefore, even if the current is not supplied to the coil 39 due to a power failure or the like, the cap 13 is attracted by the permanent magnets 37 or 65 and therefore does not fall from the cap opening / closing device 31.

Further, the cap opening / closing device 31 is the cap 13
Since it is not necessary to energize the coil 39 while holding, the energization time to the coil 39 is short and the amount of heat generation is small.

[0021]

Embodiments of the present invention will now be described in detail with reference to the drawings. [First Embodiment] FIG. 1 is an enlarged sectional view of an essential part showing a cap opening / closing device for a storage box. In the figure, 10 is a storage box, and 31 is a cap opening / closing device.

The storage box 10 is provided with a storage box main body 11 having a substantially U-shaped cross section for accommodating the contents 120 and a cap 13 for closing the opening of the storage box main body 11, and the inside of the storage box main body 11 is evacuated. The cap 13 is sucked and fixed to the storage box main body 11. At the center of the cap 13, a protrusion portion 19 is provided by a member 17 that accommodates the magnetic body 15 inside.

On the other hand, the connection chamber 20 is constructed by providing a working chamber 23 in the connection chamber body 21 and accommodating a cap opening / closing device 31 in the working chamber 23. Here, the connection chamber main body 21 is provided with a mounting port 25 for mounting the storage box 10, an opening 27 communicating with the gate valve 71, and a hole 29 into which the cap opening / closing device 31 is inserted. A pipe 28 is attached to the connection chamber body 21, and a vacuum valve and a leak valve (not shown) are connected to the pipe 28. When the leak valve is closed and the vacuum valve is opened, the working chamber 23 becomes a vacuum, When the vacuum valve is closed and the leak valve is opened, the working chamber 23 becomes atmospheric pressure.

The cap opening / closing device 31 is a hollow bar member 33.
The cap suction portion 35 is provided at the tip of the
The cap adsorption portion 35 accommodates an electromagnet 41 including a permanent magnet 37 and a coil 39 inside. The lead wire of the coil 39 is led out from the hollow portion of the rod member 33. On the other hand, on the outer circumference of the cap suction portion 35, a stopper holding portion 43 having a substantially U-shaped cross section is provided so as to cover the side surface of the projection portion 19 of the cap 13.
Four stoppers 45, 46, 47, 48 (the stoppers 46, 48 are not shown in the figure) are attached to the upper, lower, left and right sides of the inner peripheral surface of the stopper holding portion 43.

These stoppers 45, 46, 47, 48
Is composed of, for example, a piezoelectric actuator, and is located at a position indicated by a dotted line in the figure when not energized, and when it is energized, it projects to press the side surface of the protrusion 19 of the cap 13 to urge it for positioning. . Here, FIG. 2 shows the cap 1.
It is a figure which shows the positional relationship of the protrusion part 19 of 3 and stopper 45,46,47,48. As shown in the figure, when the stoppers 45, 46, 47, 48 project, each presses and urges the side surface of the protruding portion 19 of the cap 13, and that force holds the protruding portion 19 of the cap 13 as a stopper. Part 4
It works to position it at the central position of 3.

FIG. 3 is an overall schematic configuration diagram of a contents transporting / storing device using the cap opening / closing device 31 shown in FIG. As shown in the figure, the opening 27 of the connection chamber 20 is connected to the process system 77 via a gate valve 71, a storage box contents storage / extraction device 73, and a gate valve 75.

The cap opening / closing device 31 has a drive mechanism 79.
Is supported so as to be vertically and horizontally driven, and the hole 29 on the drive mechanism 79 side is sealed by a bellows 51.

Next, the operation of the cap opening / closing device 31 will be described with reference to FIGS. Here, FIG. 4 is a diagram showing a process of opening and closing the cap 13 using the cap opening and closing device 31. As shown in the figure, at time t = 0, the pressure in the working chamber 23 is atmospheric pressure, and the cap opening / closing device 3
1 is retracted (i.e. away from cap 13). Therefore, the retreat end limit switch (not shown) that is turned on near the most retracted position of the cap opening / closing device 31 is on. At this time, the current to the coil 39 is stopped, so that the electromagnet 41 as a whole produces the magnetic force of the permanent magnet 37. In addition, stoppers 45, 46, 4
Both 7 and 48 are set back to the positions shown by the dotted lines in FIGS. At this time, it is assumed that the storage box 10 is pressed against the mounting opening 25 of the connection chamber 20 from the outside by a transfer device (not shown).

In order to remove the cap 13, first, an electric current is passed through the coil 39 to excite the magnetic force of the permanent magnet 37 in a direction of canceling the magnetic force, whereby the magnetic force of the electromagnet 41 is set to 0 (time t ₁ ).

Next, the forward movement of the cap opening / closing device 31 is started (time t ₂ ). At this time, the backward limit switch is turned off (time t ₃ ).

In the cap opening / closing device 31, the cap suction portion 35 comes into contact with the protrusion 19 of the cap 13, and the cap suction portion 35 is strongly pressed against the cap 13 with a predetermined pressing force by the pressing force of the cap opening / closing device 31 itself. Move forward (time t ₄ ). This pressing force is detected by a load cell (not shown). At this time, since the magnetic field of the electromagnet 41 is demagnetized by the coil 39, the attracting force does not act on the magnetic body 15, and therefore when the two come into contact with each other, vibration due to the attraction between the two does not occur.

Next, the stoppers 45, 46, 47, 48 project to grip the projection 19 of the cap 13 (time t ₅
~t _6). However, at this time, the cap 13 is the storage box body 11
Even if the cap 1
Even if the protruding portion 19 of 3 is displaced from the center position of the stopper holding portion 43, the stoppers 45, 46, 47, 48
Does not move its position.

Then, the energization of the coil 39 is stopped at this point to cause the electromagnet 41 to generate a magnetic field by the permanent magnet 37, and the electromagnet 41 is attracted to the magnetic body 15 of the cap 13 (t ₆ ).

Next, a vacuum valve (not shown) connected to the pipe 28 of the working chamber 23 is opened to evacuate the working chamber 23 (time t _{7 to} t ₈ ). At this time, the storage box main body 11 is pushed by the external atmospheric pressure and strongly adsorbed to the apparatus main body 21, so that the O-ring 61 (see FIG. 1) that seals the two is crushed to the right direction shown in FIG. After that, the storage box main body 11 strongly adheres to the apparatus main body 21 and the pressure inside the storage box main body 11 and the pressure inside the working chamber 23 become the same, so that the cap 13 is no longer adsorbed to the storage box main body 11. Due to the elastic force of the O-ring 63, the cap 13 is slightly lifted from the storage box body 11 to the right as shown in FIG. Therefore, the cap opening and closing device 31 is slightly retracted during time t ₇ ~t ₈ shown in FIG.

When the cap opening / closing device 31 is started to retract (time t ₉ ) after the inside of the working chamber 23 has been kept in a predetermined vacuum state, the cap 13 which is no longer attracted to the storage box body 11 is also capped. It retreats together with the opening / closing device 31. At this time, the load applied to the load cell disappears.

Then, the cap opening / closing device 31 turns on the backward limit switch (time t ₁₀ ) and finishes the backward movement (time t ₁₁ ). The cap opening / closing device 31 moves downward after the backward movement is completed.

When the cap 13 is attracted and held by the cap opening / closing device 31 as described above, if the power supply to the coil 39 is momentarily cut off, the cap 13 is instantaneously moved to the cap opening / closing device 31. Since the suction / fixation is released, the position of the cap 13 is corrected by the urging force of the stoppers 45, 46, 47, 48, and the protrusion 19 thereof moves to the center position of the stopper holding portion 43. 13 is adsorbed and fixed to the cap opening / closing device 31.

Next, the contents 120 are taken out from the storage box main body 11, which will be briefly described with reference to FIG.

That is, after the cap 13 is retracted in the direction of arrow F by the cap opening / closing device 31, the gate valve 71 is opened and the storage box body is stored by the arm of a robot (not shown) housed in the storage box contents storage / unloading device 73. The contents 120 stored in 11 are taken out and transferred into the process system 77 via the gate valve 75.

On the other hand, the contents 120 which have been processed in the process system 77 are stored in the storage box contents storage / extraction device 73.
The robot arm (not shown) transfers it from the process system 77 into the storage box body 11 and closes the gate valve 71. Then, the cap 13 is put on the storage box main body 11 by the cap opening / closing device 31, and the process will be described again mainly with reference to FIGS. 1 and 4.

That is, after the contents 120 are stored in the storage box body 11, first, the cap opening / closing device 31 is raised and moved forward to bring the cap 13 into contact with the storage box body 11, and the pressing force of the cap opening / closing device 31 itself. Keep the cap 13 in the storage box body 1 until the load cell detects a predetermined load.
It is strongly pressed against 1 (time t _{12 to} t ₁₄ ).

Next, the vacuum valve connected to the pipe 28 of the working chamber 23 is closed and the leak valve is opened to bring the inside of the working chamber 23 to atmospheric pressure (time t _{15 to} t ₁₆ ). When the working chamber 23 becomes atmospheric pressure, the storage box main body 11 is no longer adsorbed to the device main body 21, and the storage box main body 11 is moved by the elastic force of the O-ring 61 (see FIG. 1) that seals the two. 21 slightly floats to the left in FIG. 1, and the cap 13 is strongly attracted to the storage box body 11, so the O-ring 63 is crushed, and the cap 13 moves slightly to the left in FIG. The contact surface of is in close contact. Therefore cap operating device 31 is somewhat further advanced during the time t ₁₅ ~t ₁₆ shown in FIG.

Next, energization of the coil 39 is started to eliminate the magnetic force of the electromagnet 41 to release the attraction of the cap 13 to the magnetic body 15 (time t ₁₇ ), and then the stoppers 45, 46,
47, 48 and withdrawal (time t ₁₈ ~t _19), starts the retraction of the cap opening and closing device 31 (time t _20). At this time, the load applied to the load cell disappears (time t ₂₀ ).
Then, the backward limit switch is turned on (time t ₂₁ )
After that, the backward movement of the cap opening / closing device 31 is stopped (time t
₂₂ ). And finally off the energization of the coil 39 (time t _23).

[Second Embodiment] The cap opening / closing device 31 according to the second embodiment has the same structure as that of the cap opening / closing device 31 of the first embodiment, and the different points are as shown in FIG. The magnetic material 15 embedded in the cap 13 is changed to a permanent magnet 65, and the permanent magnet 37 constituting the electromagnet 41 is changed to a magnetic material 67.

Next, the operation of the cap opening / closing device 31 will be described with reference to FIGS. 1 to 3 and 5. Here, FIG. 5 is a diagram showing a process of opening and closing the cap 13 using the cap opening and closing device 31. As shown in the figure, at time t = 0, the pressure in the work chamber 23 is atmospheric pressure, and the cap opening / closing device 31 is retracted. Therefore, the backward limit switch (not shown) is turned on. At this time, the coil 39 is not energized, and the electromagnet 41 as a whole does not generate magnetic force. In addition, stoppers 45, 46, 47, 4
All 8 are retracted to the positions shown by the dotted lines in FIGS.

In order to remove the cap 13, first, a predetermined current (ON1) is applied to the coil 39 so that the cap 13 can be removed.
A magnetic field is generated in the direction in which the attraction force of the permanent magnet 65 of
The repulsive force is set to 0 (time t ₁ ), and then the cap opening / closing device 3
Step 1 forward (time t ₂ ). At this time, the backward limit switch is turned off (time t ₃ ).

Next, the cap opening / closing device 31 completes its forward movement, and the cap suction portion 35 of the cap opening / closing device 31 is moved to the projection 19 of the cap 13.
Abut (time t ₄ ). A gap sensor (not shown) detects this contact. At this time, since the attraction force is not acting between the electromagnet 41 and the magnetic body, when they contact each other, vibration due to the attraction of both does not occur.

Next, the stoppers 45, 46, 47 and 48 project to grip the projection 19 of the cap 13 (time t ₅
~t _6).

Then, a larger current (ON2) is applied to the coil 39 to generate a repulsive force on the permanent magnet 65 of the cap 13 (time t ₇ ). As a result, the cap 13 can be pressed against the storage box body 11 with a predetermined force without pressing the cap opening / closing device 31 itself against the cap 13.

Next, the vacuum valve connected to the pipe 28 of the work chamber 23 is opened to evacuate the work chamber 23 (time t ₈
~ T ₉ ).

Then, after the inside of the working chamber 23 is brought into a predetermined vacuum state, the coil 39 is deenergized to turn off the cap 13
The space between the cap opening / closing device 31 and the cap opening / closing device 31 is sucked (time t ₁₀ ).

Next, when the cap opening / closing device 31 is started to retract (time t ₁₁ ), the cap 13 that has no longer attracted to the storage box body 11 is also retracted together with the cap opening / closing device 31. The rearmost limit switch after turned on (time t _12), stops the retraction of the cap opening and closing device 31 (time t _13). The cap opening / closing device 31 is moved downward after the backward movement is completed.

Next, the contents 120 are taken out from the storage box main body 11, but the description thereof is the same as that of the first embodiment, so the description thereof is omitted.

Next, in order to attach the cap 13 to the storage box body 11 by the cap opening / closing device 31, first, the cap opening / closing device 31 is raised and moved forward to bring the cap 13 into contact with the storage box body 11 (time t _{14 to} t _16). ). Rear end limit switch during this time is turned off (time t _15).

Next, a large current (ON2) is applied to the coil 39 to generate a repulsive force against the permanent magnet 65 of the cap 13 (time t ₁₇ ), whereby the cap 13 is applied to the storage box body 11 with a predetermined force. Press.

Next, the vacuum valve connected to the pipe 28 of the working chamber 23 is closed and the leak valve is opened to bring the inside of the chamber 23 to atmospheric pressure (time t _{18 to} t ₁₉ ).

Next, the value of the current supplied to the coil 39 is set to (ON
2) to (ON1) to eliminate the attraction of the electromagnet 41 to the magnetic body 15 of the cap 13 (time t ₂₀ ).
Next retracted stopper 45, 46, 47, 48 (time t ₂₁ ~t _22), rearmost limit switch cap closing device 31 is turned to retract to (time t ₂₄₎ (time t ₂₃ ~t _25). Gap sensor during this time is turned off (time t _23). Finally, the power supply to the coil 39 is turned off (time t ₂₆ ).

[Third Embodiment] In the embodiment of FIG. 1, one electromagnet 41 is attached at the center, but two or more electromagnets may be arranged. Needless to say, the mounting positions and the number of electromagnets, magnetic bodies, and permanent magnets can be variously modified.

[Fourth Embodiment] In the embodiment of FIG. 1, the number of the cap 13 is one, but as shown in FIGS. 7 (a) and 7 (b),
The storage box main body 11 'or the cap 13' is provided with a hole B and a second cap A for closing the hole B, a magnetic body or an electromagnet is attached to the second cap A, and this is opened and closed by using the present invention. You may do it.

Here, the second cap A can be used as follows, for example. 1) When the storage box is stored, in order to maintain the pressure inside the storage box, the cap A is constantly or regularly opened, and another vacuum device is used to evacuate.

2) Used as an opening / closing valve for the first cap 13 '(after opening the second cap A, the inside of the storage box body 11' is brought to atmospheric pressure to open / close the first cap 13 '). .

[0062]

As described in detail above, according to the cap opening / closing device for a storage box according to the present invention, the following excellent effects are obtained. Even if the cap opening and closing device attracts the cap and the power is turned off while holding the cap, the cap is attracted by the permanent magnet, so that the cap does not fall from the cap opening and closing device, which is safe.

Further, since the coil is energized only when the cap opening / closing device is approaching and leaving the cap, the time during which the current is applied is short and the amount of heat generation is small.

Mechanical positioning of the cap can be performed only by providing a simple stopper mechanism in the cap opening / closing device.

[Brief description of drawings]

FIG. 1 is an enlarged sectional view of an essential part showing a cap opening / closing device for a storage box according to first and second embodiments.

FIG. 2 is a projection portion 19 of the cap 13 and a stopper 45,
It is a figure which shows the positional relationship of 46, 47, and 48.

3 is an overall schematic configuration diagram of a contents transporting / storing device using the cap opening / closing device 31 shown in FIG.

FIG. 4 is a diagram showing a process of opening and closing the cap 13 using the cap opening and closing device 31 according to the first embodiment.

FIG. 5 is a diagram showing a process of opening and closing the cap 13 using the cap opening and closing device 31 according to the second embodiment.

FIG. 6 is a view showing a cap opening / closing device for a storage box proposed by the applicant of the present application.

FIG. 7 is a diagram showing a fourth embodiment of the present invention.

[Explanation of symbols]

 10 Storage Box 11 Storage Box Main Body 13 Cap 15 Magnetic Material 19 Projection 20 Connection Chamber 31 Cap Opening / Closing Device 37 Permanent Magnet 39 Coil 41 Electromagnet 45, 46, 47, 48 Stopper 65 Permanent Magnet 67 Magnetic Material

Claims (3)

[Claims] 1. A storage box comprising a storage box main body for storing contents and a cap for closing an opening of the storage box main body, wherein the inside of the storage box main body is evacuated and the cap is attracted to the opening of the storage box main body. In the storage box cap opening / closing device for attaching / detaching the cap to / from the storage box body, at least one magnetic material is embedded in either the storage box cap or the cap opening / closing device, and the cap or the cap opening / closing device is embedded. An electromagnet consisting of at least one permanent magnet and a coil is attached to the other side of the device at a position facing the magnetic body, and a current is passed through the coil of the electromagnet when the cap opening / closing device approaches or leaves the cap. The attracting force of the electromagnet to the magnetic body is weakened or set to 0, and otherwise, the current to the coil is cut off and only the magnetic force of the permanent magnet is used. Allowed aspirated sex body, pressing a mechanical pressing force storage box cap switchgear, characterized in that the provided control means occupying performed in to the storage box body of the cap. 2. A storage box comprising a storage box main body for storing contents and a cap for closing an opening of the storage box main body, wherein a vacuum is applied to the inside of the storage box main body so that the cap is adsorbed to the opening of the storage box main body. In the cap opening and closing device of the storage box for attaching and detaching the cap from the storage box main body, at least one permanent magnet is embedded in either one of the cap of the storage box and the cap opening and closing device, and the cap or the cap opening and closing device is embedded. An electromagnet consisting of at least one magnetic body and a coil is attached to the other side of the device at a position facing the permanent magnet, and a current is passed through the coil of the electromagnet when the cap opening / closing device approaches or leaves the cap. The attraction force of the electromagnet to the permanent magnet is weakened or set to 0, and when the cap is pressed against the storage box body, it is increased by the coil. A control means is provided for flowing a current to generate a repulsive force to the permanent magnet, and otherwise cutting off the current to the coil to attract the magnetic body to the permanent magnet only by its magnetic force. Cap opening and closing device for storage boxes. 3. The cap opening / closing device is provided with a plurality of positioning stoppers for preventing lateral displacement of the cap by abutting against the side surface of the cap and urging the side surface of the cap. Or the cap opening / closing device for the storage box described in 2.