JP2003094368A - Vacuum suction hand - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum suction hand capable of carrying out accurate positioning in regard to a vacuum suction hand sucking a component, and to be more specific, a vacuum suction hand suitable for use in a clean room. SOLUTION: Vacuum suction means 7 and 7' of sucking the component 5 by a negative pressure and carrying out a vacuum break by atmospheric opening, and knockout means 9 and 9' of pressing the sucked component 5 in an opposite direction to a sucking direction are provided on a base 1 capable of moving along the sucking direction (an arrowhead I direction) of the component 5. By pressing the component 5 by the knockout means 9 and 9', the base 1 is lifted and the vacuum suction means 7 and 7' are separated from the component 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction hand for sucking parts, and more particularly to a vacuum suction hand suitable for use in a clean room.

[0002]

2. Description of the Related Art A vacuum suction hand is used for picking up semiconductor parts and optical parts in a clean room and transporting them to a desired place.

In such a vacuum suction hand, when the sucked component is released from the suction port, pressurized air is sent to the suction port for a certain period of time to break the vacuum, so that it can be surely released in a short time. . However, since dust in the pressurized air is scattered in the clean room, a method is used in which clean air in the surroundings is added (open to the atmosphere) and vacuum is broken.

[0004]

However, in the vacuum suction band having the above-described structure, when the vacuum suction band is opened to the atmosphere to break the vacuum, the vacuum suction hand is parted before the pressure in the vacuum suction hand reaches the external pressure. If they are separated from each other, the parts adhere to the vacuum hand and are lifted up, which causes a problem that accurate positioning cannot be performed. In particular, when an elastic pad made of rubber or the like is provided at the suction port in order to absorb a suction height error at the time of component suction, the phenomenon is remarkable.

Therefore, there is a problem that the parts cannot be opened in a short time. The present invention has been made in view of the above problems, and a first object thereof is to provide a vacuum suction hand capable of performing accurate positioning.

A second object is to provide a vacuum suction hand which can open parts in a short time.

[0007]

FIG. 1A shows the principle of the invention according to claim 1. In the figure, a base 1 is provided so as to be movable with respect to a transfer mechanism 3 such as a robot or an XY table along a suction direction of a component 5 (direction of arrow I in the figure).

On the base 1, vacuum suction means 7 and 7'for sucking the component 5 by negative pressure and breaking the vacuum by opening to the atmosphere, and knockout means for pressing the sucked component 5 in the opposite direction to the suction direction. 9, 9'are provided.

The operation of this structure will be described with reference to FIG.
As shown in FIG. 3, the vacuum suction means 7 and 7'suction the component 5 and transport it to a desired place by the transport mechanism 3. Then, when it is transported to a desired place, as shown in FIG. 1B, the vacuum suction means 7, 7 ′ is broken by opening to the atmosphere, and the knockout means 9, 9 ′ press the component 5.

By pressing the knockout means 9, 9'to the component 5, the base 1 and the vacuum suction means 7, 7'provided on the base 1 are lifted in the suction direction, and the vacuum suction means 7, 7'are moved. Apart from 5, the component 5 is opened.

According to this structure, the vacuum suction means 7, 7'is released from the component 5 while the knockout means 9, 9'press the component 5, so that the vacuum suction means 7,
Accurate positioning can be performed because the adhesion between 7'and the component 5 is eliminated.

Further, even when the pressure inside the vacuum suction means 7, 7'has not fallen to the external pressure, the parts can be opened without displacement, so that the parts can be opened in a short time.

A second aspect of the present invention is the vacuum suction hand according to the first aspect, wherein the vacuum suction means is opened while the knockout means presses the component.

More accurate positioning can be performed by opening the vacuum suction means 7, 7'while the parts 5 are kept stationary while the knockout means 9, 9'press the parts 5.

According to a third aspect of the invention, there is provided the vacuum suction hand according to the first or second aspect, characterized in that a biasing means for biasing the base in the suction direction is provided. By providing the urging means for urging the base 1 in the suction direction (direction of arrow I), it is possible to absorb the suction height error at the time of component suction.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION First, referring to FIG. 2 which is a configuration diagram of a vacuum suction hand according to an embodiment of the present invention, and FIG. 3 which is a sectional view taken along the line AA in FIG. explain.
The vacuum suction hand of this embodiment is a suction hand used in a clean room.

In FIG. 2, a hand attaching portion 15 to which a vacuum suction hand 13 is attached via a column 10 is provided in a transfer mechanism 11 such as a robot or an XY table. At the approximate center of the hand attachment part 15,
A through hole 15a is formed, and the collar portion 1 is formed in the through hole 15a.
A cylindrical guide 17 having 7b is provided.

Further, on the flange portion 17b of the guide 17, a hole 21a communicating with the hole (inner cylinder) 17a of the guide 17 is formed.
A plate 21 formed with is formed. The rod 23 is inserted into the hole 21 a of the plate 21 and the guide hole 17 a of the guide 17.

On the upper end of the rod 23 protruding upward from the hole 21a of the plate 21, a retaining ring 25 that can come into contact with the plate 21 is attached. A base 27 is attached to the lower end of the rod 23 protruding downward from the guide hole 17a of the guide 17.

A spring 28 is provided between the base 27 and the guide 17 to wind the rod 23 into contact with the base 27 and the guide 17. The spring 28 urges the base 27 downward.

In the present embodiment, as shown in FIG. 3, the guides 1 having the same structure in the front-rear direction with the column 10 interposed therebetween.
7, 17 'are provided. Returning to FIG. 2, the base 2
Vacuum suction means 31 and 31 'for sucking the first component (for example, the cover of the enclosure of the magnetic disk device) 29 and the suction direction (arrow I in FIG. 2) of the sucked first component 29 are provided on both sides of 7. Direction) and knockout means 33, 33 'for pressing in the opposite direction. The base 27 is movable in the component suction direction I by a slide mechanism including guides 17 and 17 'and rods 23 and 23'.

Elastic pads 35, 35 'made of an elastic material such as rubber are provided at the suction ports at the bottom of the vacuum suction means 31, 31'.
Is provided. The knockout means 33, 33 'are
The air cylinder 37 and a push rod 39 provided at the tip of the rod of the air cylinder 37.

Next, the pneumatic piping of the vacuum suction hand 13 shown in FIG. 2 will be described with reference to FIG. High-pressure air from the air pressure source 51 is supplied to the air cylinder 37 of the knockout means 33 and the air cylinder 37 'of the knockout means 33' via a knockout solenoid valve (5-port 2-position spring solenoid switching valve) 53.

The knockout solenoid valve 5 in the state shown in the figure
3, the solenoid is not driven, the high pressure air supplied from the air pressure source 51 by the biasing force of the spring,
Air cylinders 37, 3 of knockout means 33, 33 '
7'is driven in a direction in which the push rods 39, 39 'are pushed upward (a direction away from the first component 29).

On the other hand, when the solenoid is driven against the biasing force of the spring, the high pressure air supplied from the air pressure source 51 causes the air cylinders 37 and 37 'of the knockout means 33 and 33' to push the push rod 39 thereof. , 39 'are pushed downward (directions for pushing the first component 29).

The high-pressure air from the air pressure source 51 is also supplied to the vacuum unit 63 for degassing the vacuum suction means 31, 31 '. The vacuum unit 63 includes a vacuum solenoid valve (3-port 2-position spring solenoid switching valve) 55, a switching valve (2-port 2-position valve) 57 driven by the vacuum solenoid valve 55, an ejector 59, and a vacuum switch 61. Has become.

Further, the vacuum unit 63 and the elastic pad 3
A vacuum break valve (3-port 2-position spring electromagnetic switching valve) 65 and a filter 67 are provided between the valves 5 and 35 '.

In the state shown in the figure, the vacuum solenoid valve 55 of the vacuum unit 63 is not driven, and the high pressure air from the air pressure source 51 is supplied in the direction of closing the switching valve 57, so that the vacuum unit 63 operates. I haven't.

Here, when degassing the inside of the vacuum suction means 31, 31 ', the vacuum solenoid valve 55 of the vacuum unit 63 is driven. Then, the vacuum solenoid valve 55 opens the switching valve 57, and the high pressure air from the air pressure source 51 is ejected by the ejector 59.
It is exhausted through the clean room. Ejector 5
When high pressure air flows through the vacuum chamber 9, vacuum suction means 31, 31 '
The inside is deaerated. When the pressure in the vacuum suction means 31, 31 'drops to the set pressure, the vacuum switch 61 operates.

Next, when the vacuum suction means 31, 31 'are to be broken in vacuum, the driving of the vacuum solenoid valve 55 is stopped,
The switching valve 57 is closed and the vacuum break valve 65 is operated. Then, the pipeline from the elastic pads 35, 35 'to the vacuum break valve 65 is opened to the atmosphere in the clean room, and the vacuum suction means 31, 31' are broken in vacuum.

Next, the operation of the vacuum suction hand 13 of this embodiment will be described with reference to FIGS. 2 and 5 to 7. Figure 2
The state shown in FIG.
Is in a state of being positioned on the first component 29 to which is sucked.

Here, as shown in FIG. 5, the transport mechanism 11
As a result, the vacuum suction hand 13 descends, and the vacuum suction means 3
1, 31 'of elastic pads 35, 35' are the first parts 29
Abut on top. Then, the vacuum solenoid valve 55 shown in FIG. 4 is driven to evacuate the vacuum suction means 31, 31 ',
The first component 29 is sucked by the vacuum suction means 31, 31 '.

The vacuum suction hand 13 that has sucked the first component 29 is transported by the transport mechanism 11 onto a second component (for example, an enclosure of a magnetic disk device) 71 on which the first component 29 is placed, As shown in FIG. 6, the first component 29 is placed on the second component 71.

Next, the knockout solenoid valve 53 shown in FIG.
Is driven, and the push rods 39, 39 'of the air cylinders 37, 37' of the knockout means 33, 33 'are driven by the first part 2
9 and the push rods 39, 39 'of the knockout means 33, 33' press the first component 29, the vacuum break valve 65 shown in FIG.
The inside of 1, 31 'is opened to the atmosphere in the clean room, the vacuum suction means 31, 31' are broken in vacuum, and the suction of the vacuum suction means 31, 31 'to the first component 29 is released.

When the vacuum suction means 31, 31 'is broken in vacuum, the knockout means 33, 33' are pressed against the first component 29, and the base 27 and the vacuum suction means 31, 31 provided on the base 27 are pressed. ′ Is lifted in the suction direction I, and the vacuum suction means 31, 31 ′ are separated from the first component 29.

According to the above construction, the knockout means 3
Since the vacuum suction means 31, 31 ′ are separated from the first component 29 while the third component 33, 33 ′ presses the first component 29,
Accurate positioning can be performed because the vacuum suction means 31, 31 'and the first component 29 do not adhere to each other.

Further, even if the pressure inside the vacuum suction means 31, 31 'is not reduced to the external pressure, the first part 29 can be opened without displacement, so that the first part 29 can be opened in a short time. Can be opened.

Further, in the above-described embodiment, the vacuum suction means 31, 31 'are ruptured in vacuum while the knockout means 33, 33' press the first component 29, thereby further accurate positioning is performed. It can be performed.

Further, by breaking the vacuum of the vacuum suction means 31 and 31 'with the atmosphere open, dust is not scattered around, which is suitable for use in a clean room.

Further, the suction ports of the vacuum suction means 31, 31 'are provided with elastic pads 35, 35', and a spring 28 for urging the base 27 downward is provided.
It is possible to absorb the suction height error at the time of component suction.

The present invention is not limited to the above embodiment. In the above-described embodiment, the vacuum suction means 31, 31 'vacuum breaks while the knockout means 33, 33' presses the first component 29. However, after the vacuum breakup is performed, the knockout means 33, 33 'is broken. Even if the vacuum suction means 31, 31 'are moved away from the first component 29 by driving 33', the positioning can be performed more accurately than before.

[0042]

As described above, according to the first aspect of the invention, the vacuum suction means is separated from the component while the knockout means presses the component, so that the adhesion between the vacuum suction means and the component is eliminated. , Accurate positioning is possible.

Further, even if the pressure inside the vacuum suction means has not fallen to the external pressure, it is possible to open the parts without displacement, so that the parts can be opened in a short time. According to the second aspect of the present invention, more accurate positioning can be performed by opening the vacuum suction means while the knockout means presses the component so that the component does not move.

According to the third aspect of the present invention, by providing the biasing means for biasing the base in the suction direction, it is possible to absorb the suction height error at the time of component suction.

[Brief description of drawings]

FIG. 1 is a principle diagram of the invention according to claim 1;

FIG. 2 is a vacuum suction hand according to an embodiment (before component suction).
It is a block diagram of.

3 is a cross-sectional view taken along the section line AA of FIG.

FIG. 4 is a pneumatic piping diagram of the vacuum suction hand of FIG.

5 is a configuration diagram showing the vacuum suction hand of FIG. 2 during component suction.

FIG. 6 is a configuration diagram showing a time when a suction component of the vacuum suction hand of FIG. 2 is placed.

FIG. 7 is a configuration diagram showing a time when a suction component of the vacuum suction hand of FIG. 2 is knocked out.

[Explanation of symbols]

1 base 3 Transport mechanism 5 parts 7,7 'Vacuum suction means 9,9 'Knockout means

Continued front page    F-term (reference) 3C007 AS25 DS02 FS01 FT02 FT17                       GU03 GU06

Claims (3)

[Claims] 1. In a vacuum suction hand for sucking a component, a base provided so as to be movable along the suction direction of the component, and a base provided on the base for sucking the component by negative pressure and breaking the vacuum by opening to the atmosphere. A vacuum suction hand comprising: a vacuum suction means for performing the above; and a knockout means provided on the base for pressing the suctioned component in a direction opposite to the suction direction. 2. The vacuum suction hand according to claim 1, wherein the knockout means presses the component while breaking the vacuum suction means in vacuum. 3. The vacuum suction hand according to claim 1, further comprising a biasing unit that biases the base in a suction direction.