WO2005087632A1

WO2005087632A1 - Substrate transfer equipment and substrate transfer system provided with the substrate transfer equipment

Info

Publication number: WO2005087632A1
Application number: PCT/JP2005/003172
Authority: WO
Inventors: Hisato Tanaka
Original assignee: Ulvac, Inc.
Priority date: 2004-03-11
Filing date: 2005-02-25
Publication date: 2005-09-22
Also published as: JP2005259947A; JP4494831B2

Abstract

Substrate transfer equipment and a substrate transfer system provided with the equipment, for improving workability and productivity. The substrate transfer equipment (1) is provided with an airtight container (3) which has a cassette (2) inside for storing a plurality of substrates in a height direction, and a valve (6), which opens and closes an opening (5) for transferring the substrate between the cassette (2) formed in the airtight container (3) and substrate processing equipment (15). The substrate processing equipment (15) is provided with a valve opening and closing mechanism (19) including a drive source (21) for opening and closing the valve (6), and a cassette lifting mechanism (20) including a drive source (22) for moving up and down the cassette (2). The valve (6) and the cassette (2) are driven through the valve opening and closing mechanism (19) and the cassette lifting mechanism (20) by connecting the substrate transfer equipment (1) with the substrate processing equipment (15).

Description

Substrate transfer device and substrate transfer system provided with the same

Technical field

The present invention relates to a substrate transfer device for loading or unloading a substrate to be processed, a mask substrate, or the like to or from a substrate processing device such as a vacuum chamber, and a substrate transfer system including the same.

Background art

[0002] For example, in the manufacture of an organic EL (Electro Luminescence) display device, a process of forming three primary colors of red, green, and blue light-emitting layers on a first glass substrate, an electrode pattern, and the like. And a step of bonding the first glass substrate to a second glass substrate. Each of these steps is performed in a predetermined substrate processing apparatus such as a vacuum film forming chamber, and the glass substrate and the air (moisture in the air) are also loaded and unloaded from the substrate processing apparatus. In order to avoid contact with the substrate, a substrate transfer device having a closed structure has been conventionally used!

[0003] A substrate transfer device of this type includes a closed container that stores a glass substrate, and a valve that is formed in the closed container and that opens and closes an opening that transfers the glass substrate between the cassette and the substrate processing apparatus. These are installed, for example, on a trolley so that they can move between the substrate processing apparatuses. Then, the substrate transfer apparatus is connected to the substrate processing apparatus, the valve is opened and the glass substrate is carried into the substrate processing apparatus from the inside of the closed container through the opened opening.

[0004] A conventional substrate transfer device is provided with a pneumatic cylinder as a drive source for driving a valve. After being connected to a substrate processing apparatus, the pneumatic cylinder is connected to an external air tank or the like via a coupler hose. Connected to a power source.

[0005] Further, a substrate transfer apparatus provided with a cassette capable of storing a plurality of glass substrates in a closed container has a motor as a drive source for driving the cassette up and down, and is connected to the substrate processing apparatus. The motor was electrically connected to an external power supply system via a connector cable. [0006] Note that there are the following prior art documents related to the invention of this application. Patent Document 1 below discloses a substrate transfer apparatus and a substrate transfer system that can transfer a semiconductor wafer directly between semiconductor wafer manufacturing apparatuses without using a carrier or other intervening carrier.

Patent Document 1: Japanese Patent Application Laid-Open No. 7-169817

Disclosure of the invention

Problems to be solved by the invention

[0008] As described above, in the conventional substrate transfer apparatus, the pneumatic cylinder as a drive source for opening and closing the valve and the drive for raising and lowering the cassette are used for loading the glass substrate into the substrate processing apparatus. The motor as the source has a pneumatic coupler! /, Has an external pressure source via a connector cable! / Requires the work to connect to the power supply! There was a problem.

[0009] Furthermore, there is a problem that a process error occurs due to a mistake in connection work between each drive source of the valve or the cassette and the pneumatic coupler or the connector cable, or the like. In addition, it is necessary to take measures against deterioration of the connector part of the electric cable, and there is a concern that productivity may be reduced due to the maintenance.

[0010] Furthermore, in the conventional substrate transfer device, since the driving sources of the knob and the cassette are mounted, the configuration of the substrate transfer device is complicated, and the weight of the substrate transfer device is increased. There is also the problem of impairing the sex.

[0011] The present invention has been made in view of the above problems, and has as its object to provide a substrate transfer device capable of improving workability and productivity, and a substrate transfer system including the same. Means for solving the problem

An object of the present invention is to provide a substrate transport apparatus for loading or unloading a substrate from or to a substrate processing apparatus, wherein the closed container has a cassette capable of storing a plurality of the substrates in a height direction. A valve formed in the closed container for opening and closing the substrate for transferring the substrate between the cassette and the substrate processing apparatus. The valve and the cassette are connected to an external drive source. Thus, the present invention solves the above problem by providing a substrate transfer device in which a driving force transmission portion to which a driving force is transmitted is provided. [0013] Further, an object of the present invention is a substrate transport system for loading or unloading a substrate between a substrate transport apparatus and a substrate processing apparatus, wherein the substrate transport apparatus moves the substrate in a height direction. A closed container having therein a cassette capable of accommodating a plurality of cassettes, and a valve formed in the closed container for opening and closing an opening for transferring the substrate between the cassette and the substrate processing apparatus. The substrate processing apparatus includes a valve opening / closing mechanism including a drive source for opening / closing the valve, and a cassette lifting / lowering mechanism including a drive source for raising / lowering the cassette. The substrate transfer device is connected to the substrate processing apparatus. The substrate transport system is characterized in that the valve and the cassette are respectively driven via the valve opening / closing mechanism and the cassette elevating mechanism. It is determined.

[0014] In the present invention, each drive source of the valve and the cassette is not mounted on the substrate transfer device, but is provided outside, that is, on the substrate processing device side. A valve opening / closing mechanism and a cassette elevating mechanism mounted on the substrate processing apparatus transmit a driving force to each of the valves and the cassette via the respective driving force transmitting portions of the valve and the cassette of the substrate processing apparatus.

[0015] Each of the driving force transmitted portions can be constituted by a shaft-like member that opens and closes a valve or moves the cassette up and down by being moved in the axial direction. The magnetic attraction of the electromagnet can be used for coupling the shaft member to the valve opening / closing mechanism and the cassette elevating mechanism. The invention's effect

According to the present invention, since the drive sources of the valve and the cassette of the substrate transfer device are mounted outside, particularly on the substrate processing device side, after the substrate transfer device is connected to the substrate processing device, The troublesome work of connecting the transfer device to an external pressure source or a power system can be eliminated, and the valve opening / closing operation and the cassette raising / lowering operation can be performed quickly and accurately, thereby improving workability and productivity.

Brief Description of Drawings

FIG. 1 is a schematic configuration diagram of a substrate transfer device 1 of the present invention.

FIG. 2 is a side cross-sectional view showing a connection state between the substrate transfer apparatus 1 and a substrate processing apparatus 15 connected thereto.

FIG. 3 is a side view showing a valve opening / closing mechanism 19 in the substrate processing apparatus 15.

FIG. 4 is a side view showing a cassette elevating mechanism 20 in the substrate processing apparatus 15. Explanation of reference numerals

1 Board transfer device

2 cassettes

3 Closed container

4 bogie section

5 opening

6 Nolev unit

7 Valve body

8 Guide rod (Driving force transmission part, shaft-shaped member)

11 Elevating shaft (Driving force transmission part, shaft member)

15 Substrate processing equipment

16 passages

17 fe tube

18 Vacuum pump

19 Valve opening and closing mechanism

20 Cassette lifting mechanism

21 First drive source

22 Second drive source

23 Drive rod

26 Stopper

29 Linear Guide Actuator

31 1st electromagnet unit

32 Second electromagnet unit

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows a schematic configuration of the substrate transfer device 1. The substrate transfer device 1 includes a sealed container 3 having a cassette 2 in which a plurality of substrates can be stored in a height direction, and a cart 4 supporting the sealed container 3. The term “substrate” here refers to a glass substrate or semiconductor substrate And the like, as well as mask substrates such as metal masks and reticles. The bogie unit 4 may be a self-propelled type or a manual push type by an operator!

The closed container 3 has a structure in which the inside can be maintained at a vacuum or a high pressure equal to or higher than the atmospheric pressure. An opening 5 having a rectangular cross section for transferring substrates between the cassette 2 and a substrate processing apparatus to be described later is formed on a part of the side wall of the closed container 3, and a valve for opening and closing the opening 5 is provided. Unit 6 is provided.

The valve unit 6 has a built-in valve body 7 for opening or closing the opening 5 and an urging means (not shown) for urging the valve body 7 to a closed position shown in the figure. As the biasing means, a mechanical panel, a gas spring using compressed gas, or the like can be applied.

At the lower end of the valve body 7, a guide rod 8 extending outward from the valve unit 6 is fixed physically, and a flange-like end 8 A of the guide rod 8 is attached to the valve unit 6. The illustrated closed position of the valve body 7 is positioned by contact with the casing.

Here, the guide rod 8 corresponds to the “drive force receiving portion (shaft-shaped member)” of the present invention with respect to the valve body 7, and as described later, the first rod mounted on the substrate processing apparatus 15. It is connected to a valve opening / closing mechanism 19 including a driving source 21 for driving up and down. The end 8A of the guide rod 8 is made of, for example, a magnetic material such as iron or magnetic stainless steel.

[0025] A similar guide rod 9 is also fixed to the upper end of the valve body 7 in a body, and the flange-shaped end 9A of the guide rod 9 is brought into contact with the casing of the valve unit 6 so that the guide rod 9 comes into contact with the casing. The opening position of the valve body 7 is determined (FIG. 2).

The cassette 2 is configured to be able to move up and down inside the closed container 3 by a cassette support unit 10 provided below the closed container 3. The cassette support unit 10 includes an elevating shaft 11 integrally fixed to a lower end of the cassette 2, a bellows 12 covering the periphery of the elevating shaft 11, a guide for elevating the elevating shaft 11, and a bellows. It is composed of a support member 13 and the like for keeping the space between the airtight container 12 and the closed container 3 airtight.

Here, the elevating shaft 11 corresponds to the “driving force receiving portion (shaft-shaped member)” of the present invention for the cassette 2, and as will be described later, a second drive mounted on the substrate processing apparatus 15. It is connected to a force set elevating mechanism 20 including a source 22 so as to be driven up and down. End of lifting shaft 11 1 1A is made of a magnetic material such as iron or magnetic stainless steel.

Next, the configuration of the substrate processing apparatus 15 to which the substrate transport apparatus 1 is connected will be described with reference to FIG. FIG. 2 shows a connection state between the substrate transfer device 1 and the substrate processing device 15.

[0029] The substrate processing apparatus 15 is an intermediate chamber for taking out substrates one by one from the cassette 2 of the substrate transport apparatus 1 and transporting the substrates to a predetermined vacuum processing chamber such as a film forming chamber. And constitute a part of a vacuum processing apparatus such as a vacuum evaporation apparatus!

[0030] The substrate processing apparatus 15 is connected to the valve unit 6 of the vacuum transfer apparatus 1, and has a connection pipe 16 having therein a passage 16 for transferring a substrate taken out of the cassette 2 to a vacuum chamber (such as a film formation chamber). 17, a vacuum pump 18 for evacuating the passage 16, a valve opening / closing mechanism 19 including a first drive source 21 for opening and closing the valve unit 6, and a second drive source 22 for raising and lowering the cassette 2 A cassette lifting mechanism 20 is provided.

[0031] At an end of the connection pipe 17, a reference pin 17a that fits into a reference hole 6a (FIG. 1) formed on the front surface of the valve unit 6 of the substrate transfer device 1 is provided. The connection position between the connection hole and the connection pipe 17 is based on the fitting position of the reference hole 6a and the reference pin 17a. It is assumed that a seal structure for keeping the space between the connection 17 and the valve unit 6 airtight is applied to the end of the connection 17.

The valve opening / closing mechanism 19 and the cassette elevating mechanism 20 are both mounted on a base 30 that constitutes a part of the substrate processing apparatus 15. Hereinafter, the configurations of the valve opening / closing mechanism 19 and the cassette elevating mechanism 20 will be described with reference to FIGS. 3 and 4, respectively.

The knob opening / closing mechanism 19 includes a first drive source 21, a first electromagnet unit 31, and the like.

The first drive source 21 is located immediately below the valve unit 6 connected to the connection pipe 17 and is configured as a drive source for opening and closing the valve body 7 of the valve unit 6. In the present embodiment, the first drive source 21 is a pneumatic cylinder, and the drive rod 23 is coaxially aligned with the guide rod 8 of the knob unit 6.

Next, since the valve body 7 of the valve unit 6 is constantly urged to the position where the opening 5 is closed, the guide rod 8 is pulled down to open the opening 5 and the valve body 7 is It needs to be moved down. Therefore, the first electromagnet unit 31 is installed at the upper end of the drive rod 23 of the pneumatic cylinder (first drive source) 21 and magnetically coupled to the end 8 A of the guide rod 8 made of a magnetic material. The unit 6 is driven to open and close.

Further, the drive rod 23 of the pneumatic cylinder 21 is supported by the guide bush 25 attached to the base 30 via the bracket 24. At the upper end of the bracket 24, a stopper 26 is attached, which is engaged with the first electromagnet unit 31 and is locked to the guide rod end 8A lowered to the valve open position.

[0037] The stopper 26 is rotatably supported by a rotating shaft 27, and is configured to take a lock position indicated by a solid line in FIG. 3 and an unlock position indicated by a two-dot chain line. Being energized. The structure for urging the stopper 26 to the unlocked position is not particularly limited. For example, a structure in which a spring plunger is interposed at the lower end of the stopper 26 or a torsion panel is provided around the rotation shaft can be applied.

The stopper 26 has an upper hook 26A that engages with the upper surface of the guide rod end 8A, and a lower hook that engages with the lower surface of the pedestal 23a at the upper end of the drive rod 23 that supports the first electromagnet unit 31. When the drive rod 23 is lowered, the lower hook 26B engages with the pedestal 23a to rotate the stopper 26 around the rotation shaft 27, and the upper hook 26A It comes into engagement with the guide rod end 8A.

With this configuration, even if the power supply to the first electromagnet unit 31 is interrupted due to an unexpected situation, the closing operation of the valve unit 6 due to springback can be prohibited, and the open state of the opening 5 can be maintained. it can.

On the other hand, the cassette lifting / lowering mechanism 20 includes a linear guide actuator 29 including a second drive source 22, a second electromagnet unit 32, and the like.

The linear guide actuator 29 raises and lowers the guide block 34 along the guide rail 33 by driving an electric servomotor or a servo cylinder 22 as a second drive source, for example, and the final control position moves to the control valve. It is configured as a precision feed mechanism that has a follow-up mechanism that functions as a function of the input signal. Note that the feed mechanism may be constituted by a ball screw unit or the like.

[0042] A bracket 35 that supports the second electromagnet unit 32 is attached to the guide block 34. Have been. The second electromagnet unit 32 is coupled to the end 11A of the elevating shaft 11 of the cassette 2 by magnetic force. To raise and lower.

The second electromagnet unit 32 is connected to a power supply system (not shown) via the inside of a flexible outlet tube 36 supported by a bracket 35.

The substrate transfer system of the present invention is configured by the substrate transfer device 11 and the substrate processing device 15 configured as described above. Next, this operation will be described.

[0045] A plurality of substrates are housed in the cassette 2 arranged inside the closed container 3 of the substrate transfer device 1 in the height direction. The valve unit 6 is located at a position that closes the opening 5, and the inside of the sealed container 3 is maintained at a nitrogen atmosphere or a predetermined vacuum pressure.

The substrate transfer device 1 is connected to the substrate processing device 15 by fitting the reference hole 6a of the valve unit 6 into the reference pin 17a provided at the end of the connection pipe 17 of the substrate processing device 15. Continued. Thereby, the opening 5 of the sealed container 3 and the passage 16 of the connection pipe 17 are aligned.

When the connection between the substrate transfer apparatus 1 and the substrate processing apparatus 15 is completed, the first electromagnet unit 31 of the valve opening / closing mechanism 19 and the second electromagnet unit of the cassette elevating mechanism 20 provided in the substrate processing apparatus 15 32 faces the lower end 8A of the guide rod of the valve unit 6 and the lower end 11A of the elevating shaft of the cassette 2, respectively. Then, the first and second drive sources 21 and 22 are operated respectively, and the first and second electromagnet units 31 and 32 are brought into contact with the lower end 8A of the guide rod and the lower end 11A of the elevating shaft, respectively. , And are connected to each other by magnetic force.

Next, the vacuum pump 18 is operated to evacuate the passage 16 to a predetermined pressure. Thereafter, the guide rod 8 is pulled down against the urging force by the operation of the valve opening / closing mechanism 19, the opening 5 is opened, and the inside of the sealed container 3 and the passage 16 are communicated with each other (FIG. 2).

In this state, the substrate is loaded from the cassette 2 into the vacuum chamber. Loading of the substrate is performed via a transfer robot (not shown) installed on the vacuum chamber side. In the processing of the substrate in the substrate processing apparatus 15, the substrate taken out of the cassette 2 is processed (for example, a film forming process), the processed substrate is stored in the original position of the cassette 2, and the next substrate is processed. For example, a method of taking out the substrate from the cassette 2 for processing, a method of sequentially taking out the substrates stored in the cassette 2 and carrying out the processed substrate to a separately prepared substrate transfer device having a similar configuration, etc. V, deviation method is also applicable.

At this time, the cassette 2 is moved up and down by driving the cassette elevating mechanism 20, and the position for taking out the substrate is adjusted. In this embodiment, the cassette elevating mechanism 20 is constituted by the linear guide actuator 29 capable of precision feeding, so that any substrate storage position of the cassette 2 can be accurately supplied to a predetermined take-out position. it can.

After the processing for all the substrates stored in the cassette 2 is completed, the valve unit 6 is returned to the closed position by the operation of the valve opening / closing mechanism 19. At this time, the inside of the sealed container 3 is maintained at the same vacuum pressure as the passage 16. Then, the power supply to the first and second electromagnet units 31 and 32 is released, and accordingly, the connection between the guide rod 8 and the elevating shaft 11 is released.

[0052] Thereafter, the passage 16 inside the connection pipe 17 is released to the atmosphere, and the substrate transfer device 1 transfers the processed substrate or the empty cassette 2 to the next step with the power of the substrate processing device 15 also cut off. I do.

As described above, according to the substrate transfer system of the present embodiment, a substrate can be loaded or unloaded between the substrate transfer device 1 and the substrate processing device 15 without exposing the substrate to the atmosphere. For example, it is possible to construct a substrate processing system that is effective for loading and unloading a substrate to be processed, which is not required to be exposed to the atmosphere, such as a glass substrate for an organic EL display device.

According to the present embodiment, since the respective drive sources for driving the valve unit 6 and the cassette 2 of the substrate transfer device 1 are provided on the substrate processing device 15 side, the substrate transfer device 1 can be connected to the substrate processing device. After connecting to No. 15, troublesome connection work using a pneumatic bra or a connector cable to drive the valve or cassette can be eliminated, so that the valve opening / closing operation and cassette elevating operation can be performed quickly and accurately. This makes it possible to improve workability and productivity.

Further, according to the present embodiment, since the respective drive sources for driving the valve unit 6 and the cassette 2 of the substrate transfer device 1 are provided on the substrate processing device 15 side, the configuration of the substrate transfer device 1 is simplified. Therefore, it is possible to improve the handleability and maneuverability of the substrate transfer device 1.

As described above, the power described in the embodiment of the present invention is, of course, limited to this. Without departing from the invention, various modifications are possible based on the technical concept of the present invention.

For example, in the above embodiment, the connection between the guide rod of the valve unit 6 and the drive rod 23 of the valve opening / closing mechanism 19 and the linear guide actuation of the elevating shaft 11 of the cassette 2 and the cassette elevating mechanism 20 The connection with the writer 29 is performed by the first and second electromagnet units 31 and 32, respectively, but the present invention is not limited to this, and a connection form with a mechanical engagement action or the like is adopted. It is also possible.

Further, the configuration in which the valve unit 6 of the substrate transfer device 1 is moved to the open position by the lowering operation of the guide rod 8 has been described. Conversely, the guide rod is lifted to move the valve unit 6 up. Is also applicable to move the to the open position. In this case, the drive rod of the valve opening / closing mechanism may be configured such that the end only comes into contact with the end of the guide rod.

The opening / closing operation of the valve unit 6 may be a lateral or rotational movement that is not limited to the vertical movement of the guide rod.

Further, as the substrate processing apparatus 15, a vacuum processing apparatus such as a film forming apparatus is described as an example in the above-described embodiment, but is not limited to this, and the substrate is transferred to the cassette 2 in the closed container 3. A loading chamber for loading, a removal chamber for removing substrates from the cassette 2, and the like can also be configured as the substrate processing apparatus of the present invention.

Claims

The scope of the claims

[1] A substrate transfer device for loading or unloading a substrate from or to a substrate processing apparatus, the sealed container having a cassette capable of accommodating a plurality of the substrates in a height direction therein, and formed in the closed container. A valve for opening and closing an opening for transferring the substrate between the cassette and the substrate processing apparatus;

A substrate transfer device, wherein the valve and the cassette are provided with a driving force transmitting portion to which a driving force is transmitted by being coupled to an external driving source.

2. The substrate transfer apparatus according to claim 1, wherein each of the driving force transmission portions is a shaft-shaped member that opens and closes the valve or moves the cassette up and down by being moved in an axial direction. .

3. The substrate transfer device according to claim 2, wherein an end of the shaft-shaped member is coupled to the external drive source via a magnetic attraction force of an electromagnet.

[4] The substrate transfer apparatus according to claim 1, wherein the valve is constantly urged in a direction to close the opening.

5. The substrate transfer device according to claim 1, further comprising a cart supporting the closed container.

[6] A substrate transport system for loading or unloading a substrate between a substrate transport device and a substrate processing device,

The substrate transfer device includes an airtight container having therein a cassette capable of storing a plurality of the substrates in a height direction, and an opening formed in the airtight container for transferring the substrate between the cassette and the substrate processing apparatus. And a knob that opens and closes the

The substrate processing apparatus includes a valve opening / closing mechanism including a drive source for opening and closing the valve, and a cassette lifting mechanism including a drive source for lifting and lowering the cassette,

The substrate transfer system, wherein the valve and the cassette are driven via the valve opening / closing mechanism and the cassette elevating mechanism, respectively, by being connected to the substrate processing apparatus.

7. The valve according to claim 6, wherein the valve and the cassette are provided with a driving force transmitting portion to which a driving force is transmitted by being coupled to the valve opening / closing mechanism and the cassette lifting mechanism. The substrate transfer system according to any one of the preceding claims.

[8] The substrate transfer system according to claim 7, wherein each of the drive power transmission portions is a shaft-shaped member which is moved in an axial direction to open and close the valve or move the cassette up and down. .

9. The substrate transfer system according to claim 8, wherein an end of the shaft-shaped member is coupled to the valve opening / closing mechanism and the cassette elevating mechanism via a magnetic attraction force of an electromagnet.

10. The substrate transport system according to claim 6, wherein the valve is constantly urged in a direction to close the opening.

11. The substrate transfer system according to claim 6, wherein the substrate transfer device includes a carriage supporting the closed container.