CN104465448B - A kind of piece box lifting device, Transmission system and semiconductor processing equipment - Google Patents
A kind of piece box lifting device, Transmission system and semiconductor processing equipment Download PDFInfo
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- CN104465448B CN104465448B CN201310428249.8A CN201310428249A CN104465448B CN 104465448 B CN104465448 B CN 104465448B CN 201310428249 A CN201310428249 A CN 201310428249A CN 104465448 B CN104465448 B CN 104465448B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to piece box lifting device, Transmission system and semiconductor processing equipment.Piece box lifting device includes elevating mechanism, connector and connecting rod, wherein, connecting rod is connected with film magazine；Elevating mechanism is connected by connector with connecting rod, and under the driving of elevating mechanism, connecting rod drives the film magazine to make elevating movement；Connecting portion is formed with the lower end of connecting rod, and the external diameter of the radial section all directions of connecting portion is incomplete same；Also, through hole is provided with connector, the profile of the radial section of through hole is corresponding with the profile of the radial section of connecting portion, and through hole is engaged with connecting portion；Connector includes at least two separate splits, and at least two splits concatenate to form through hole；The first stop part and the second stop part are provided with connecting portion, the two is in contact with the top and bottom of connector respectively, are used to stop that connector is relatively moved with connecting rod in the axial direction of connecting rod.Sheet above box lifting device limits the position on connecting rod angle in its circumferential direction and axial direction.
Description
Technical field
The present invention relates to microelectronic processing technique field, in particular it relates to a kind of piece box lifting device, Transmission system and half
Conductor process equipment.
Background technology
The workpiece to be machined that semiconductor processing equipment is generally placed in film magazine by manipulator is transmitted to reaction chamber
Carry out PROCESS FOR TREATMENT.In the process, in order to simplify the motion of manipulator, lowering or hoisting gear is generally set below film magazine, is used to
Film magazine is driven to rise or fall, so as to be cooperated with the horizontal movement of manipulator by the elevating movement of film magazine, you can complete
To the loading of workpiece to be machined.
Fig. 1 is the existing structural representation of box lifting device.As shown in figure 1, piece box lifting device includes lift
Structure 1, connector 2 and jacking sleeve 3.Wherein, elevating mechanism 1 includes electric rotating machine 10, drive disk assembly 11, leading screw 12, wherein, rotation
Rotating motor 10 drives leading screw 12 to rotate by drive disk assembly 11；Leading screw 12 is provided with nut, and the nut is fixed with connector 2 and connected
Connect；Connector 2 is fixedly connected with the lower end of jacking sleeve 3；The upper end of jacking sleeve 3 passes through pallet 4 and film magazine location-plate 5 and piece
Box is fixedly connected.Under the driving of electric rotating machine 10, the drive nut of leading screw 12 rises or falls along its axial direction, drives jacking sleeve
3 and the film magazine that is fixed thereon rise or fall.
It is described in detail with the connected mode of connector 2 below for jacking sleeve 3.Specifically, such as Fig. 2 and Fig. 3 institutes
Show, be provided with through hole 20 on connector 2, connector 2 is made on jacking sleeve 3 for 20 sets by the through hole, and through hole 20 hole
Footpath is engaged with the external diameter of jacking sleeve 3, and the opening being connected with through hole 20 is provided with connector 2, and even
Fitting 2 is provided with the screw 6 through opening, by tightening screw 6, can reduce the opening, so that connector 2 " holding " rises
Drop sleeve 3, i.e. prevent relative motion therebetween by increasing the stiction between connector 2 and sleeve 3.And,
Accordingly it is provided with the side wall of connector 2 and jacking sleeve 3 along the location hole for extending radially through the two of jacking sleeve 3, positioning
Pin 7 is arranged in the location hole, is used to limit the position in its axial direction of jacking sleeve 3 and angle in its circumferential direction.
Sheet above box lifting device is inevitably present following problems in actual applications, i.e.,：
During in tightening screw 6 with the opening for reducing connector 2, connector 2 can be deformed upon, and cause connection
Location hole on part 2 produces dislocation with the location hole on jacking sleeve 3, so as to cause alignment pin 7 to insert the He of jacking sleeve 3
In the location hole of connector 2, and then the position in its axial direction of jacking sleeve 3 and angle in its circumferential direction cannot be limited.
And, even first alignment pin 7 is inserted in the location hole of jacking sleeve 3 and connector 2, rear tightening screw 6,
Occur that alignment pin 7 produces the problem of torsional deformation because of the deformation of connector 2, this not only lowers the knot of piece box lifting device
Structure stability and security, but also can be made troubles to the dismounting of piece box lifting device and maintenance.
The content of the invention
It is contemplated that at least solving one of technical problem present in prior art, it is proposed that a kind of film magazine lifting dress
Put, Transmission system and semiconductor processing equipment, it can limit connecting rod position in its axial direction and angle in its circumferential direction
Degree, and be easy to dismount and safeguard.
A kind of piece box lifting device is provided to realize the purpose of the present invention, including elevating mechanism, connector and connecting rod, its
In, the connecting rod is connected with film magazine；The elevating mechanism is connected by the connector with the connecting rod, in the elevating mechanism
Driving under, the connecting rod drives the film magazine to make elevating movement, wherein, be formed with connecting portion in the lower end of the connecting rod, and
The external diameter of the radial section all directions of the connecting portion is incomplete same；Also, through hole, institute are provided with the connector
The profile for stating the radial section of through hole is corresponding with the profile of the radial section of the connecting portion, and the through hole and the connection
Portion is engaged；The connector includes at least two separate splits, and at least two split concatenates to form described logical
Hole；The first stop part and the second stop part are provided with the connecting portion, the two respectively with the upper end of the connector and under
End is in contact, and is used to stop that the connector is relatively moved with the connecting rod in the axial direction of the connecting rod.
Wherein, first stop part and the second stop part be respectively along the connecting rod periphery wall set upper flange and
Lower flange, wherein, the lower end of the upper flange is in contact with the upper end of the connector；The upper end of the lower flange and the company
The lower end of fitting is in contact.
Wherein, the contour shape of the radial section of the through hole includes oval, triangle or polygon.
Wherein, it is fixed together by the way of threaded connection between two neighboring split.
Wherein, the elevating mechanism includes electric rotating machine, leading screw and the nut being engaged with the leading screw, wherein the spiral shell
It is female to be connected with the connector；The electric rotating machine is used to drive the leading screw to rotate, thus drive the nut, connector and
Connecting rod makees elevating movement.
Wherein, the connecting rod uses tubular structure, and the tubular connecting rod is enclosed within the outside of the leading screw.
Wherein, the elevating mechanism also includes guide rail and the sliding block along the slide；Wherein described guide rail with it is described
The axial direction of leading screw is parallel to each other；The sliding block is connected with the connector；Under the driving of the electric rotating machine, the connector
The sliding block is driven to make elevating movement along the guide rail.
Wherein, the elevating mechanism also includes transmission mechanism, and the transmission mechanism is used for the rotation of the electric rotating machine
Power is transferred to the leading screw.
Wherein, the transmission mechanism includes tape handler or gear drive.
Wherein, described box lifting device also includes Flexible Connector, the Flexible Connector respectively with the nut and
The connector elastic connection, is used to enter the axial displacement and radial missing that are produced between the jacking sleeve and elevating mechanism
Row compensation, makes have axiality higher between the jacking sleeve and elevating mechanism.
Used as another technical scheme, the present invention also provides a kind of Transmission system, including manipulator, loading chamber, film magazine
With piece box lifting device, the film magazine be arranged on it is described loading chamber in, be used to carry workpiece to be machined；The manipulator is used for
Workpiece to be machined is transmitted between the loading chamber and reaction chamber；Described box lifting device is used to drive the film magazine to make
Elevating movement, completes to take piece or film releasing from the film magazine with cooperative mechanical hand, wherein, described box lifting device is using this hair
The sheet above box lifting device of bright offer.
Used as another technical scheme, the present invention also provides a kind of semiconductor processing equipment, including reaction chamber and transmission
System, the Transmission system is used to transmit workpiece to be machined to the reaction chamber, or removes quilt from the reaction chamber
Processing workpiece, wherein, the above-mentioned Transmission system that the Transmission system is provided using the present invention.
The invention has the advantages that：
The piece box lifting device that the present invention is provided, the external diameter of the radial section all directions of the connecting portion of its connecting rod lower end is not
It is identical, and in its connector, concatenate the through hole for being formed by least two splits and be engaged with connecting portion, make connecting rod at it
Can not be rotated relative to connector on circumferential, so as to limit connecting rod angle in its circumferential direction；Also, set on its connecting portion
There are the first stop part and the second stop part, the two is in contact with the top and bottom of connector respectively, connector is existed with connecting rod
Can not be relatively moved in the axial direction of connecting rod, so as to limit connecting rod position in its axial direction.Additionally, the piece provided in the present invention
In box lifting device, the restriction to the position in connecting rod angle and axial direction in its circumferential direction does not rely on the deformation of connector,
So as to make it easy to dismount and safeguard, and then reduce maintenance cost.
The Transmission system that the present invention is provided, it is passed through the piece box lifting device provided using the present invention, connecting rod can be made to exist
Can not be rotated relative to connector on it is circumferential, so as to limit connecting rod angle in its circumferential direction；And make connector and company
Bar can not be relatively moved in the axial direction of connecting rod, so as to limit connecting rod position in its axial direction.Also, provided in the present invention
Transmission system in, the restriction to the position in connecting rod angle and axial direction in its circumferential direction does not rely on the deformation of connector,
So as to make it easy to dismount and safeguard, and then reduce maintenance cost.
The semiconductor processing equipment that the present invention is provided, it is passed through the Transmission system provided using the present invention, can make connecting rod
Can not be rotated relative to connector in its circumferential direction, so as to limit connecting rod angle in its circumferential direction；And make connector with
Connecting rod can not be relatively moved in the axial direction of connecting rod, so as to limit connecting rod position in its axial direction.Also, carried in the present invention
In the Transmission system of confession, the restriction to the position in connecting rod angle and axial direction in its circumferential direction does not rely on the shape of connector
Become, so as to make it easy to dismount and safeguard, and then reduce maintenance cost.
Brief description of the drawings
Fig. 1 is the existing structural representation of box lifting device；
Fig. 2 is the partial sectional view of piece box lifting device shown in Fig. 1；
Fig. 3 is the top view of connector；
Fig. 4 is the provided in an embodiment of the present invention structural representation of box lifting device；
Fig. 5 is the partial structural diagram of the connecting rod of the embodiment of the present invention；
Fig. 6 is the top view of the connector of the embodiment of the present invention；And
Fig. 7 is the radial section schematic diagram of the connecting portion of the embodiment of the present invention.
Specific embodiment
To make those skilled in the art more fully understand technical scheme, come below in conjunction with the accompanying drawings to the present invention
A kind of piece box lifting device, Transmission system and the semiconductor processing equipment for providing are described in detail.
Fig. 4 is the provided in an embodiment of the present invention structural representation of box lifting device.Fig. 5 is the company of the embodiment of the present invention
The partial structural diagram of bar.Fig. 4 and Fig. 5 is refer to, piece box lifting device includes elevating mechanism 30, connector 40 and connecting rod
50；Wherein, connecting rod 50 is connected with film magazine, and elevating mechanism 30 is connected by connector 40 with connecting rod 50, in the drive of elevating mechanism 30
Under dynamic, connecting rod 50 drives film magazine to make elevating movement.Specifically, the lower end of connecting rod 50 is formed with connecting portion 51, and connecting portion 51
The external diameter of radial section all directions is incomplete same.
The first stop part 52 and the second stop part 53 are provided with connecting portion 51；First stop part 52 and the second stop part 53
The top and bottom with connector 40 are in contact respectively, are used to stop that connector 40 is relative in the axial direction of connecting rod 50 with connecting rod 50
It is mobile.Specifically, in the present embodiment, as shown in figure 5, the first stop part 52 and the second stop part 53 are respectively along connecting rod 50
Upper flange and lower flange that periphery wall is set；Wherein, the upper end phase of the lower end of the first stop part 52, i.e. upper flange and connector 40
Contact；Second stop part 53, the i.e. upper end of lower flange are in contact with the lower end of connector 40.It is readily appreciated that, the lower end of upper flange,
Contact between the upper end of lower flange and the upper and lower end of connector 40, makes connector 40 with connecting rod 50 in the axial direction of connecting rod 50
Can not relatively move, so as to define the position in its axial direction of connecting rod 50.
As shown in fig. 6, be provided with through hole 41 on connector 40, the profile of the radial section of through hole 41 and the footpath of connecting portion 51
Profile to section is corresponding, and the through hole 41 is engaged with connecting portion 51.In the present embodiment, as shown in fig. 7, connecting portion 51
Radial section profile on include A points, B points, C points and D points, wherein, between AD section and BC sections be radius identical circular arc, AB
Section is length identical straight line with CD sections.It is readily appreciated that, in the profile of the radial section of connecting portion 51, AD sections and BC sections has
Identical external diameter, AB sections and CD section are with incomplete same external diameter, and external diameter with AD and BC sections is differed；So as in film magazine
In lowering or hoisting gear, the cooperation of respective planes, makes connecting portion 51 in plane where straight line AB and plane where straight line CD and through hole 41
Rotation can not be produced relative to connector 40 in the course of the work, define the angle in its circumferential direction of connecting rod 50.
Specifically, connector 40 includes at least two separate splits 42, also, through hole 41 is by least two splits
42 concatenations are formed.In the present embodiment, as shown in fig. 6, the quantity of split 42 be two, two splits 42 along connecting portion 51 week
To setting gradually, connecting portion is surround 51 1 weeks, and the mode being connected through a screw thread is fixed together；Also, in two splits 42
Inner side be formed with through hole 41, it is engaged with connecting portion 51, connector 40 is fixedly connected with connecting rod 50.Above-mentioned two split
42 can make connector 40 avoid the first stop part 52 and the second stop part 53 set on connecting portion 51, in the week of connecting portion 51
It is fixedly connected with connecting rod 50 upwards, and connector 40 and connecting rod 50 is disassembled in the circumference of connecting portion 51.
Sheet above box lifting device, the external diameter of all directions of the radial section of the connecting portion 51 of its lower end of connecting rod 50 is not complete
It is exactly the same, and in its connector 40, concatenate the through hole 41 for being formed by least two splits 42 and be engaged with connecting portion 51, make company
Bar 50 can not be rotated relative to connector 40 in its circumferential direction, so as to limit the angle in its circumferential direction of connecting rod 50；Also, its
The first stop part 52 and the second stop part 53 are provided with connecting portion 51, the two top and bottom respectively with connector 40 connects
Touch, connector 40 is relatively moved in the axial direction of connecting rod 50 with connecting rod 50, so as to limit connecting rod 50 in its axial direction
Position.Additionally, in the piece box lifting device that the present embodiment is provided, in the angle and axial direction in its circumferential direction of connecting rod 50
The restriction of position does not rely on the deformation of connector 40, so as to make it easy to dismount and safeguard, and then reduces cost.
The concrete structure to elevating mechanism 30 is described in detail below, refer to Fig. 4, and elevating mechanism 30 includes electric rotating
Machine 31, leading screw 33 and the nut 34 being engaged with leading screw 33；Wherein, nut 34 is connected with connector 40；Connecting rod 50 uses tubular
Structure, its outside for being enclosed within leading screw 33；Electric rotating machine 31 is used to drive leading screw 33 to rotate, so as to drive nut 34, connector 40
Make elevating movement with connecting rod 50.Specifically, electric rotating machine 31 is directly connected with leading screw 33, or by transmission mechanism 32 and leading screw 33
Connection, in the present embodiment, electric rotating machine 31 is connected by transmission mechanism 32 with leading screw 33, and transmission mechanism 32 can be V belt translation
Mechanism, gear drive or other transmission mechanisms, it is used to for the rotary power of electric rotating machine to be transferred to leading screw 33, drives silk
Thick stick 33 rotates.
Preferably, elevating mechanism 30 also includes guide rail 35 and the sliding block 36 slided along guide rail 35；Wherein, guide rail 35 and leading screw
33 axial direction is parallel to each other；Sliding block 36 is connected with connector 40.Under the driving of electric rotating machine 31, connector 40 is with movable slider 36
Make elevating movement along guide rail 35；The sliding block 36 is used for the elevating movement to connector 40 and connecting rod 50 along the elevating movement of guide rail 35
It is oriented to.
It should be noted that in the present embodiment, through hole 41 is two straight lines and two in the contour shape of its radial section
The shape of similar " cydariform " that bar circular arc is interconnected to form, but the present invention is not limited thereto, and in actual applications, through hole 41 exists
The contour shape of its radial section can also be oval, triangle or polygon, and other any shapes than a circular one
Shape.
Also, it should be noted that in the present embodiment, nut 34 is directly connected to connector 40, band follower link 40 rises
Drop motion, but the present invention is not limited thereto, in actual applications, can also set a Flexible Connector, its respectively with nut 34
With the elastic connection of connector 40, the Flexible Connector can be inclined to the axial displacement and radial direction produced between connecting rod 50 and leading screw 33
Difference is compensated, and makes have axiality higher between connecting rod 50 and leading screw 33, and then can make connecting rod 50 in vertical direction
Lifting has precision higher.
Used as another technical scheme, the embodiment of the present invention also provides a kind of Transmission system, and it includes manipulator, loads chamber
Room, film magazine and piece box lifting device；Wherein, film magazine is arranged in loading chamber, is used to carry workpiece to be machined；Manipulator is used for
Transmit workpiece to be machined between chamber and reaction chamber loading；Piece box lifting device is provided using the above embodiment of the present invention
Piece box lifting device, is used to drive film magazine to make elevating movement, completes to take piece or film releasing from film magazine with cooperative mechanical hand.
Transmission system provided in an embodiment of the present invention, it passes through the film magazine lifting dress provided using the above embodiment of the present invention
Put, connecting rod can be made to be rotated relative to connector in its circumferential direction, so as to limit connecting rod angle in its circumferential direction；With
And connector is relatively moved in the axial direction of connecting rod with connecting rod, so as to limit connecting rod position in its axial direction.And
And, in Transmission system provided in an embodiment of the present invention, the restriction to the position in connecting rod angle and axial direction in its circumferential direction
The deformation of connector is not relied on, so as to make it easy to dismount and safeguard, and then maintenance cost is reduced.
Used as another technical scheme, the embodiment of the present invention also provides a kind of semiconductor processing equipment, and it includes reaction chamber
Room and Transmission system, wherein, the Transmission system that Transmission system is provided using the above embodiment of the present invention, for by workpiece to be machined
Transmit to reaction chamber, or autoreaction chamber removes workpiece to be machined.
Semiconductor processing equipment provided in an embodiment of the present invention, it passes through the transmission provided using the above embodiment of the present invention
System, can be such that connecting rod is rotated relative to connector in its circumferential direction, so as to limit connecting rod angle in its circumferential direction；
And connector is relatively moved in the axial direction of connecting rod with connecting rod, so as to limit connecting rod position in its axial direction.
Also, in semiconductor processing equipment provided in an embodiment of the present invention, to the position in connecting rod angle and axial direction in its circumferential direction
The restriction put does not rely on the deformation of connector, so as to make it easy to dismount and safeguard, and then reduces maintenance cost.
It is understood that the embodiment of above principle being intended to be merely illustrative of the present and the exemplary implementation for using
Mode, but the invention is not limited in this.For those skilled in the art, essence of the invention is not being departed from
In the case of god and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.
Claims (12)
1. a kind of piece box lifting device, including elevating mechanism, connector and connecting rod, wherein, the connecting rod is connected with film magazine；It is described
Elevating mechanism is connected by the connector with the connecting rod, and under the driving of the elevating mechanism, the connecting rod drives described
Film magazine makees elevating movement, it is characterised in that be formed with connecting portion in the lower end of the connecting rod, and the connecting portion radial section
The external diameter of all directions is incomplete same；Also, through hole, the wheel of the radial section of the through hole are provided with the connector
It is wide corresponding with the profile of the radial section of the connecting portion, and the through hole is engaged with the connecting portion；
The connector includes at least two separate splits, and at least two split concatenates to form the through hole；
The first stop part and the second stop part are provided with the connecting portion, the two respectively with the upper end of the connector and under
End is in contact, and is used to stop that the connector is relatively moved with the connecting rod in the axial direction of the connecting rod.
2. according to claim 1 box lifting device, it is characterised in that first stop part and the second stop portions
It is not the upper flange and lower flange set along the periphery wall of the connecting rod, wherein, the lower end of the upper flange and the connector
Upper end be in contact；The upper end of the lower flange is in contact with the lower end of the connector.
3. according to claim 1 box lifting device, it is characterised in that the contour shape of the radial section of the through hole
Including oval, triangle or polygon.
4. according to claim 1 box lifting device, it is characterised in that using threaded connection between two neighboring split
Mode be fixed together.
5. according to claim 1 box lifting device, it is characterised in that the elevating mechanism includes electric rotating machine, silk
Thick stick and the nut being engaged with the leading screw, wherein
The nut is connected with the connector；
The electric rotating machine is used to drive the leading screw to rotate, so as to drive the nut, connector and connecting rod to make elevating movement.
6. according to claim 5 box lifting device, it is characterised in that the connecting rod uses tubular structure, and described
Tubular connecting rod is enclosed within the outside of the leading screw.
7. according to claim 5 box lifting device, it is characterised in that the elevating mechanism also includes guide rail and along institute
State the sliding block of slide；Wherein
The guide rail is parallel to each other with the axial direction of the leading screw；
The sliding block is connected with the connector；
Under the driving of the electric rotating machine, the connector drives the sliding block to make elevating movement along the guide rail.
8. according to claim 5 box lifting device, it is characterised in that the elevating mechanism also includes transmission mechanism,
The transmission mechanism is used to for the rotary power of the electric rotating machine to be transferred to the leading screw.
9. according to claim 8 box lifting device, it is characterised in that the transmission mechanism include tape handler or
Person's gear drive.
10. according to claim 5 box lifting device, it is characterised in that described box lifting device also includes elasticity
Connector, the Flexible Connector respectively with the nut and the connector elastic connection, be used to the connecting rod and leading screw
Between produce axial displacement and radial missing compensate, make between the connecting rod and leading screw have axiality higher.
A kind of 11. Transmission systems, including manipulator, loading chamber, film magazine and piece box lifting device, the film magazine is arranged on described
Load in chamber, be used to carry workpiece to be machined；The manipulator is used to be transmitted between the loading chamber and reaction chamber
Workpiece to be machined；Described box lifting device is used to drive the film magazine to make elevating movement, is completed described in cooperative mechanical hand
Film magazine takes piece or film releasing, it is characterised in that described box lifting device is used as described in the claim 1-10 any one
Piece box lifting device.
A kind of 12. semiconductor processing equipments, including reaction chamber and Transmission system, the Transmission system are used for workpiece to be machined
Transmit to the reaction chamber, or workpiece to be machined is removed from the reaction chamber, it is characterised in that the Transmission system is adopted
Use Transmission system as claimed in claim 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310428249.8A CN104465448B (en) | 2013-09-18 | 2013-09-18 | A kind of piece box lifting device, Transmission system and semiconductor processing equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310428249.8A CN104465448B (en) | 2013-09-18 | 2013-09-18 | A kind of piece box lifting device, Transmission system and semiconductor processing equipment |
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| Publication Number | Publication Date |
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| CN104465448A CN104465448A (en) | 2015-03-25 |
| CN104465448B true CN104465448B (en) | 2017-06-06 |
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| CN106892380B (en) * | 2015-12-17 | 2019-04-23 | 北京北方华创微电子装备有限公司 | Elastic connecting component and piece box lifting device, the semiconductor processing equipment for applying it |
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| JP4494831B2 (en) * | 2004-03-11 | 2010-06-30 | 株式会社アルバック | Substrate transfer device and substrate transfer system provided with the same |
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|---|---|---|---|---|
| TW201013810A (en) * | 2008-06-16 | 2010-04-01 | Tokyo Electron Ltd | Processing device |
| CN101847594A (en) * | 2008-12-19 | 2010-09-29 | 韩美半导体株式会社 | Transfer apparatus for wafer cassette |
| CN103182642A (en) * | 2011-12-29 | 2013-07-03 | 富泰华工业（深圳）有限公司 | Automatic installation device and electronic equipment provided with same |
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| CN104465448A (en) | 2015-03-25 |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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