JP4891939B2 - Substrate storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storage container capable of suppressing troubles of the opening of a lid body caused by the sticking of a gasket to a container body even if the gasket is interposed between the container body and the lid body for a long period of time. <P>SOLUTION: The substrate storage container includes the container body 1 of a front open box type for aligning and storing two semiconductor wafers and the lid body 20 freely detachably fitted to a front surface opened horizontally long in the container body 1, a diamond-like carbon layer 12 excellent in smoothness and wear resistance is coated in the front surface of the container body 1, and the elastically deformable gasket 28 in contact with the diamond-like carbon layer 12 of the container body 1 is fitted to the back surface peripheral edge of the lid body 20. Since the highly smooth diamond-like carbon layer 12 is coated in the front surface part of the container body 1, the gasket 28 of the lid body 20 does not stick to the container body 1 and troubles of the opening of the lid body 20 are suppressed and prevented. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a substrate storage container for storing a substrate made of a semiconductor wafer or the like.

Although not shown, a conventional substrate storage container includes a front open box type container main body for storing semiconductor wafers, a detachable lid that opens and closes an open front portion of the container main body, and a lid that is fitted to the lid. And an elastically deformable gasket (see Patent Documents 1 and 2).
The gasket is molded endlessly using a molding material containing a predetermined elastomer, and is interposed between the inner periphery of the front portion of the container body and the peripheral portion of the lid so as to ensure airtightness and sealing performance. Function.
JP 2006-303261 A JP 2005-353898 A

  The conventional substrate storage container is configured as described above, and the gasket is molded in a low hardness endless from the viewpoint of ensuring flexibility, airtightness, and sealing performance. When interposed between the periphery and the lid, there is a problem in that the gasket adheres to and adheres to the container body, which hinders the opening of the lid.

  The present invention has been made in view of the above, and even if a gasket is interposed between the container body and the lid for a long time, the gasket is stuck to the container body and prevents the lid from being obstructed. An object of the present invention is to provide a substrate storage container that can handle the above problem.

In the present invention, in order to solve the above-mentioned problems, a container body of a front open box that accommodates three or less substrates, a diamond-like carbon layer coated on the inner periphery of a horizontally long front portion opened in the container body, Includes a lid that is detachably fitted to the open front portion of the container body, and a locking mechanism that locks the lid that closes the front portion of the container body, and is attached to the peripheral edge of the back surface facing the substrate of the lid body A groove is formed, and in this mounting groove, a frame-shaped gasket that contacts the diamond-like carbon layer is fitted so as to be elastically deformable,
The locking mechanism is supported by the lid and is slidable in the left and right and outside directions, and is rotatably supported at the tip of the slide, and protrudes from the through hole in the side wall of the lid so as to be inside the front portion of the container body. A locking claw capable of interfering with the locking groove, a spring that slides the slide body to the left and right outwards of the lid body and protrudes the locking claw from the through hole of the lid body, and a distal end side of the slide body. An operation hole into which the operation pin is inserted from the outside of the lid body, the operation hole of the slide body is formed in a substantially circular shape, and a part located on the left and right inward side of the lid body is a straight vertical flat portion When removing the lid from the front part of the container body, an operation pin is inserted into the operation hole of the slide body, the slide body is slid in the left-right inward direction of the lid body, and the protruding locking claw is inserted into the through-hole of the lid body To retreat inside,
A gasket is formed in a substantially U-shaped cross section so that the lengths of both free ends thereof are different from each other, and the inner free end and the outer free end forming both free ends are tightly fitted in the mounting groove of the lid. The inner free end to be fitted is formed thinner than the outer free end and the end surface is formed obliquely, the outer free end is formed thicker and longer than the inner free end, and the end surface is sharpened to have a substantially triangular cross section. And the end face of the outer free end is pressed against the diamond-like carbon layer of the container body.

  Also, a rim flange formed on the peripheral edge of the front portion of the container body that is open and projecting outward and facing the loading / unloading port of the load port device, a mounting hole drilled in a side portion of the rim flange, and the mounting hole A detachable information display pad that is selectively inserted into the rim flange, and a mounting hole is located on the front side of the rim flange, and the enlarged diameter portion is formed integrally with the enlarged diameter portion on the rear side of the rim flange. The front surface portion of the information display pad can be substantially flush with the front surface of the rim flange, or can be buried in the expanded diameter portion of the mounting hole.

  In addition, the information display pad can be formed from a column portion that fits in the enlarged diameter portion of the mounting hole, and an elastic locking piece that extends from the column portion and catches on the reduced diameter portion of the mounting hole.

  Further, the lid is fitted to the open front portion of the container main body to house the locking mechanism, the front cover covering the open front portion of the housing, and the locking mechanism provided on the front cover. An operation port facing the operation hole of the slide body, and the operation port is formed in a horizontally long shape extending in the left / right / inside / outside direction of the lid, and the left / right outer direction side serves as a widened portion and is positioned on the left / right inner direction side. The remaining part may be a narrow part.

  Here, the substrates in the claims include at least various glass substrates, cover glasses, semiconductor wafers (φ200 mm, 300 mm, 450 mm, etc.), photomasks, and the like. The container body is not particularly required to be transparent, opaque, translucent, or the like, but is shorter than a substrate storage container that stores 25 or 26 φ300 mm semiconductor wafers. For example, in the case of storing two substrates made of a semiconductor wafer having a diameter of 300 mm, the height is 6 cm or less.

  The lid does not need to be transparent, opaque, translucent or the like. The diamond-like carbon layer can be divided into a plurality of coatings, and a gap can be formed between the plurality of diamond-like carbon layers. Further, the gasket may or may not be an endless filament.

According to the present invention, a highly smooth diamond-like carbon layer is coated in the front portion of the container body, and the gasket of the lid is elastically contacted with the diamond-like carbon layer. Even if it is interposed between the outer peripheral portion of the lid and the back surface of the lid, the gasket is less likely to adhere and stick to the container body. Therefore, there is an effect that it is possible to suppress the opening of the lid from being hindered.

In addition, since the diamond-like carbon layer is coated in the front part of the container body instead of the gasket, it prevents the deterioration of the design properties associated with the coloring of the gasket, and also prevents the diamond-like carbon layer from cracking due to the deformation of the gasket. be able to. In addition, since the container body is a short front open box type that accommodates 3 or less substrates, a gasket is placed in the front part of the container body that is used when processing semiconductor wafers in a short time by LSI manufacturers. Can be prevented from obstructing the opening of the lid.

Furthermore, since the gasket mounting groove is formed in the peripheral edge of the back surface of the lid, it is possible to easily set and position the gasket simply by fitting into the mounting groove. Therefore, it is not necessary to bond the gasket to the peripheral edge of the back surface of the lid with an adhesive, and it is possible to effectively prevent contamination of the substrate due to the adhesive component. Furthermore, when the locking mechanism that does not remove the lid from the container body is not operated, the latching claw is continuously inserted into the latching groove in the container body by the spring, and the front part of the container body is firmly closed by the lid, The lid body is unlikely to come off from the container body, and it is possible to eliminate the possibility of hindering the locking and opening / closing of the lid body.

  Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to the drawings. The substrate storage container according to the present embodiment can store two semiconductor wafers W as shown in FIGS. A container body 1 and a lid 20 that is detachably fitted to the opened front portion of the container body 1, and a diamond-like carbon (DLC) layer 12 is coated on the front portion of the container body 1, 20 is fitted with a gasket 28 that comes into contact with the diamond-like carbon layer 12 of the container body 1.

  As shown in FIG. 3, the semiconductor wafer W is made of, for example, a thin and round silicon type having a diameter of 300 mm, and an orientation flat for alignment or identification or a substantially semicircular notch in a plane is selectively formed on the peripheral edge.

  As shown in FIGS. 1 to 8, the container body 1 has a short front opening for aligning and storing two semiconductor wafers W by injecting a molding material containing a predetermined resin into a molding die. The lid 20 is injection-molded into a box type, and the same shape of the lid 20 is detachably fitted to the open lateral front portion via an endless gasket 28. The lid 20 closes the front portion of the container body 1. The locking mechanism 40 that locks the lid 20 is built in, and is mounted on the load port device 2 so that the front portion and the rim flange 10 are opposed to the loading / unloading port 3.

  Examples of the predetermined resin of the molding material for molding the container body 1 include polycarbonate, polyetherimide, polyetheretherketone, polybutylene terephthalate and the like which are excellent in mechanical properties, heat resistance, dimensional stability and the like. Necessary carbon, carbon fiber, metal fiber, carbon nanotube, antistatic agent, flame retardant and the like are selectively added to these resins.

  A pair of left and right teeth 4 that horizontally support the semiconductor wafer W are provided inside the container main body 1, specifically, on the inner surfaces of the opposite side walls, and the pair of teeth 4 are spaced apart in the vertical direction. Are arranged. Each tooth 4 is formed into a long and narrow plate in the front-rear direction of the container body 1, and the end portion of the container body 1 near the back wall is tapered. A rib flange 5 is formed on the outer peripheral surface of the container body 1 to increase the mechanical strength and rigidity of the container body 1, and the rib flange 5 on the back wall side protrudes and faces the pin when the container body 1 is removed.

  The rib flange 5 is integrally formed on the back wall and both side walls of the container body 1 from the outside, and has a deformed planar substantially U shape. The rib flange 5 of the back wall is formed in, for example, a long and thin plate shape, and both side portions are horizontally positioned substantially at the center of both sides of the back wall of the container body 1, and the center portion is the back wall of the container body 1. Located below the center. In addition, metal balance weights 6 are screwed from the lower side on both sides of the rib flange 5 on the back wall so that the front part of the container body 1 does not tilt downward, so that the container body 1 is removed from the mold. It functions to face a plurality of protruding pins from the outside during molding.

  The central portion of the rib flange 5 on the back wall is bent into a substantially W shape to form a concave portion, and the opening of the concave portion faces downward and functions as a positioning portion 7 for the load port device 2 of the container body 1. Moreover, the rib flange 5 of each side wall is formed in, for example, a long and thin plate shape, the front part is located below the front part of each side wall, and the remaining part other than the front part is the remaining part other than the front part of each side wall. It is located horizontally in the approximate center of and is integrated with the rib flange 5 of the back wall. The front portion of the rib flange 5 on each side wall is bent into a substantially inverted V shape to form a recess, and the opening of this recess functions downward as a positioning portion 7 for the load port device 2.

  As shown in FIGS. 1 to 4, etc., a plurality of mounting ribs 8 having a substantially Y-shape in a plane are erected on the substantially central portion of the ceiling of the container body 1, and on the mounting ribs 8, A substantially triangular or polygonal suspension flange 9 gripped by a transport mechanism (not shown) is detachably screwed later through a fastener such as a screw.

  The front portion of the container body 1 is bent so as to spread outwardly to form a rim flange 10, and a locking groove 11 for locking the lid 20 is notched in the vertical direction on both sides inside the rim flange 10. It is. As shown in FIG. 3, the gasket contact area on the front portion of the container body 1, in other words, the inner peripheral edge of the front portion of the container body 1 has high smoothness, wear resistance, corrosion resistance, low friction coefficient, A hard diamond-like carbon layer 12 excellent in high gas barrier property is coated by batch processing or the like, and the diamond-like carbon layer 12 is elastically contacted with the gasket 28 of the lid 20.

  The diamond-like carbon layer 12 is formed into an amorphous hard film by carbon-containing gas being atomically decomposed in plasma, and has a dense amorphous structure with a smooth surface and grain boundaries. In consideration of the rigidity of the container body 1, it is coated to a thickness of about 10 to 500 nm.

  As shown in FIGS. 2, 3, 7, and 8, a plurality of mounting holes 13 are vertically perforated on both sides of the rim flange 10 so as to be rounded. An info pad 16 that is an information display pad is selectively inserted into the hole 13 and detected by a detection means (for example, a photoelectric sensor, a photo sensor, a touch sensor, etc.) of the load port device 2, thereby Presence / absence, number of sheets, type of substrate storage container, and the like are identified by the load port device 2.

  As shown in FIG. 8, each mounting hole 13 has a round enlarged diameter portion 14 located on the front side of the rim flange 10, and a round contraction located integrally with the enlarged diameter portion 14 and located on the back side of the rim flange 10. And a diameter portion 15. Further, as shown in FIG. 8, the info pad 16 is composed of a cylindrical portion 17 that fits in the enlarged diameter portion 14 of the mounting hole 13 and a pair of locking pieces 18 that extend from the back side of the cylindrical portion 17. The The pair of locking pieces 18 have elasticity and spring properties and bend inward and outward in the radius of the cylindrical portion 17, and are locked to the periphery of the back surface side of the reduced diameter portion 15 to drop off the info pad 16 from the mounting hole 13. To prevent.

  As shown in FIGS. 2, 4, 7, 9, and 10, the lid 20 is detachably fitted to the front portion of the container body 1, and has a horizontally long casing 21 that includes a locking mechanism 40. And a transparent surface cover 32 that is screwed onto and covers the open front portion (surface portion) of the casing 21, and is attached to and detached from the container body 1 by a lid opening / closing device (not shown). The

  A plurality of holding ribs 22 for the locking mechanism 40 are integrally formed on both sides of the housing 21 so as to integrally project, and both sides of the peripheral wall are for the locking mechanism 40 facing the locking groove 11 of the container body 1. In the vicinity of the inner peripheral edge of each slot 23, a support rib 24 for the locking mechanism 40 is integrally formed.

  A horizontally long mounting hole 25 is formed in the center of the rear surface of the housing 21, and a front retainer 26 that elastically holds the front peripheral edges of the plurality of semiconductor wafers W with elastic pieces. Installed. Further, a horizontally long and frame-shaped mounting groove 27 is cut out on the peripheral edge of the back surface of the housing 21, and an elastic gasket 28 interposed between the container body 1 and the mounting groove 27 is fitted into the mounting groove 27. .

  As shown in FIGS. 11 and 12, the gasket 28 is formed of, for example, silicone rubber, fluorine rubber, various thermoplastic elastomers (for example, olefin-based) having excellent heat resistance, flame resistance, cold resistance, and compression characteristics. It is formed into a horizontally long frame shape that can be elastically deformed as a material. The gasket 28 is deformed by being pressed against the diamond-like carbon layer 12 of the container body 1 and formed integrally with the endless frame-shaped attachment portion 29 that fits into the attachment groove 27 of the lid 20. The contact portion 30 is formed.

  As shown in FIG. 12, the gasket 28 has a substantially U-shaped cross-section, and the thickness and length of both free ends thereof are different. The part is elongated longer. Both free ends of the gasket 28 are obliquely cut so that the thin inner free end is easily deformed and tightly fitted in the mounting groove 27 of the lid 20, and the end surface of the thick outer free end is The contact portion 30 is sharpened to have a substantially triangular cross section, and the remaining portion other than the contact portion 30 is the attachment portion 29.

  The front cover 32 is formed in a horizontally long and substantially rectangular shape, and operation ports 33 for the locking mechanism 40 are respectively perforated in a substantially convex shape on both sides. A front circular suction region 36 that is vacuum-sucked by the apparatus is formed. Each operation port 33 is formed in a horizontally long shape extending in the left-right inward / outward direction of the lid 20, the left-right outer direction side is a widened portion 34 with a curved side, and the remaining portion located on the left-right inner direction side is a rectangular narrow-width portion A pair of guide pieces 37 for the locking mechanism 40 are integrally formed in the inner direction of the housing 21 at the rear surface side peripheral edge portion.

  As shown in FIGS. 4, 7, 9, and 10, the locking mechanism 40 includes a pair of link plates 41 that are supported on both sides of the housing 21 and are slidable in the left and right directions, and each of the housings 21. A pair of swingable locking claws 45 that are pivotally supported in the slot 23 so as to be able to project and retract and are connected to and supported by the distal end portion of the link plate 41 and are engaged with the locking groove 11 of the container body 1 to interfere with each other, A pair of coil springs 47 that are fitted into the link plate 41 and cause the locking claws 45 to interfere with the locking grooves 11 of the container body 1, and are drilled on the most distal end 43 side of each link plate 41, and each operation pin from outside the lid body And an operation hole 48 into which is inserted.

  Each link plate 41 is formed, for example, in a substantially Y-shaped plate having a bifurcated tip, and a collar 42 that is a cylindrical body for the coil spring 47 is slidably fitted in the center of the rod. And the most distal end portion 43 are slidably sandwiched between a pair of guide pieces 37 of the surface cover 32, and the most distal end portion 43 has a front semi-elliptical operation facing the operation port 33 of the surface cover 32. Hole 48 is drilled.

  A link arm 44, which is a substantially U-shaped arm that restricts the sliding and dropping off of the collar 42, is fitted and supported at the end of the link plate 41 so as to be swingable in the left / right / inside / outward direction via a pin. It is pivotally supported by the holding rib 22 of the housing 21 so as to be swingable in the left and right inner and outer directions via pins.

  Each latching claw 45 is bent and formed into a deformed substantially V shape, and the bent portion is pivotally supported by the support rib 24 of the housing 21 via a pin so as to be swingable. One end of the locking claw 45 is pivotally supported via a pin between the bifurcated tip portions of the link plate 41, and the container main body 1 is latched between the other bifurcated other ends. A plurality of rollers 46 in sliding contact with the groove 11 are rotatably supported via pins. Each roller 46 is formed into a cylindrical shape using, for example, the same material as that of the container body 1.

  Each of the coil springs 47 is inserted into the center portion of the link plate 41 and interposed between the wide tip end side of the link plate 41 and the collar 42, presses the collar 42 against the link arm 44, and The other end portion of the locking claw 45, that is, the plurality of rollers 46 is protruded from the slot 23 to the outside.

  Each operation hole 48 is basically formed in a substantially elliptical shape on the front, and a peripheral edge portion located on the left and right inward side of the lid body 20 is notched into a vertical flat portion 49 that is linear in the vertical direction. The operation pin comes into contact with the vertical flat portion 49 when the lid 20 is removed.

  Although not shown, each operation pin includes an elongated cylindrical pin portion and a bulging portion that is integrally formed with the pin portion and bulges outward in the radial direction, and is operated automatically or manually. The operation pin is inserted into the operation hole 48 of the link plate 41 through the operation port 33, and the bulging portion appropriately contacts and interferes with the operation port 33 of the surface cover 32 to support the lid 20. To function.

  In the above configuration, when the info pad 16 is selectively inserted into the plurality of mounting holes 13 of the container body 1, the pair of locking pieces 18 of the info pad 16 is inserted into the selected mounting hole 13 and pressed. good. Then, a pair of locking pieces 18 are locked while being bent to the rear surface side periphery of the reduced diameter portion 15 of the mounting hole 13, and the cylindrical portion 17 of the info pad 16 is fitted to the enlarged diameter portion 14 of the mounting hole 13, The front portion of the info pad 16 is flush with and aligned with the front surface of the flange 10.

  Conversely, when the info pad 16 is removed from the mounting hole 13 of the container body 1, the pair of locking pieces 18 of the info pad 16 are bent inward to lock the reduced diameter portion 15 with the peripheral edge on the back surface side. The info pad 16 may be released from the back side of the rim flange 10 to the front side.

  Further, when the open front portion of the container body 1 containing the semiconductor wafer W is closed by the lid body 20, the lid body 20 is pressed and fitted into the rim flange 10 of the container body 1 by the lid body opening / closing device. The contact portion 30 of the gasket 28 is pressed and deformed through the diamond-like carbon layer 12 in the rim flange 10, and the groove 23 of the lid 20 is made to face each locking groove 11 of the container body 1.

  Then, the link plate 41 is slid horizontally in the left and right outer directions of the lid body 20 while being guided by the holding rib 22, the guide piece 37, and the link arm 44 by the restoring action of each compressed coil spring 47, and the locking claw 45 is moved. A plurality of rollers 46 that are swung in the front and back direction of the lid 20 and projecting while the other end of the locking claw 45 arcs outwardly from the slot 23 of the lid 20 are arranged on the container body 1. By fitting in the stop groove 11 and inserting the plurality of rollers 46, the front portion of the container body 1 is firmly closed by the lid body 20, and airtightness and airtightness are ensured.

  When no load is applied to the locking mechanism 40 as described above, the roller 46 of the locking claw 45 that swings and protrudes into each locking groove 11 of the container body 1 is fitted so as to be able to roll and contact the front surface of the container body 1. The part is covered with the lid 20.

  On the other hand, when removing the locked lid 20 from the front portion of the container main body 1 containing the semiconductor wafer W, the operation pins are inserted into the operation holes 48 of the pair of link plates 41 and the operation ports 33 of the lid 20 are connected. Each link plate 41 may be slid in the left-right inward direction of the lid body 20 by inserting each operation pin from the outside and moving each operation pin from the widened portion 34 of the operation port 33 toward the narrow-width portion 35.

  Then, each link plate 41 slides horizontally in the left-right inward direction of the cover body 20 while compressing the coil spring 47, and the locking claw 45 swings while drawing an arc to expose the other end, that is, a plurality of rollers. 46 is retracted into the slot 23 of the lid 20, and the other end of the locking claw 45 is retracted, so that the plurality of rollers 46 are removed from the locking groove 11 of the container body 1 and the lid is closed from the container body 1. The body 20 can be removed.

  According to the above configuration, the highly smooth diamond-like carbon layer 12 is coated in the front portion of the container body 1, and the gasket 28 of the lid 20 is elastically contacted with the diamond-like carbon layer 12, so that the gasket 28 is long, for example. Even if it is interposed between the front portion of the container body 1 and the rear peripheral edge portion of the lid 20 for a time, the gasket 28 does not adhere to and adhere to the container body 1 at all. Therefore, it is possible to suppress and prevent the lid 20 from being obstructed.

  Further, since the diamond-like carbon layer 12 is coated not in the gasket 28 but in the front portion of the container body 1, the deterioration of the design property due to the coloring of the gasket 28 is prevented, and the diamond-like carbon layer accompanying the deformation of the gasket 28. 12 cracks can be effectively prevented.

  Further, since the counterbore is formed in the mounting hole 13, the front portion of the info pad 16 can be flush with the front surface of the rim flange 10 or can be buried in the mounting hole 13 and inserted into the mounting hole 13. The front surface of the info pad 16 does not protrude forward from the front surface of the rim flange 10. Accordingly, since the protruding portion on the front surface of the info pad 16 does not become an obstacle, the front portion of the container body 1 and the rim flange 10 are appropriately brought into contact with the loading / unloading port 3 of the load port device 2 to facilitate the semiconductor manufacturing work. , Speeding up, and facilitating.

  Further, when the locking mechanism 40 that does not remove the lid 20 from the container body 1 is not operated, the locking claw 45 is continuously fitted into the locking groove 11 of the container body 1 by the coil spring 47 so that the front portion of the container body 1 and the rim flange are fitted. Since 10 is firmly closed by the lid 20, the lid 20 is not detached from the container body 1 at all, and there is no risk of hindering the locking or opening / closing of the lid 20. Further, the locking claw 45 is not directly inserted into the locking groove 11 of the container body 1, but a plurality of rotatable rollers 46 of the locking claw 45 are inserted and slidably contacted with each other. There is no possibility that particles are generated by rubbing with 45 and the semiconductor wafer W is contaminated.

  Next, FIGS. 13 to 15 show a second embodiment of the present invention. In this case, on the inner peripheral edge of the front portion of the container main body 1A for accommodating 25 or 26 semiconductor wafers W in alignment. A hard diamond-like carbon layer 12 excellent in smoothness, wear resistance, corrosion resistance, low friction coefficient, and high gas barrier properties is coated, and this diamond-like carbon layer 12 is fitted to the periphery of the back surface of the lid 20A. The joined gasket 28 is elastically contacted. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In the present embodiment, the same effects as those of the above-described embodiment can be expected, and since it can be used for a container body 1A that is larger than the container body 1, it is obvious that improvement in versatility can be expected.

  In the above embodiment, the diamond-like carbon layer 12 is simply coated on the inner peripheral edge of the front portion of the container body 1, but the diamond-like carbon layer 12 may be coated on a part of the inner peripheral edge, or the entire inner peripheral edge may be diamond-coated. The like carbon layer 12 may be coated. Moreover, although the info pad 16 in which the pair of locking pieces 18 extends from the cylindrical portion 17 is shown, the present invention is not limited to this. For example, if no particular problem occurs, the info pad 16 may be formed in a substantially convex cross section. Further, a plurality of (three, four, etc.) locking pieces 18 may be used instead of the pair of locking pieces 18.

It is side surface explanatory drawing which shows typically the container main body and load port apparatus in embodiment of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. It is a section side view showing typically a container main part in an embodiment of a substrate storage container concerning the present invention. It is plane explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. It is bottom explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. It is front explanatory drawing which shows typically the container main body and its cover body in embodiment of the substrate storage container which concerns on this invention. It is a partial section explanatory view showing typically a rim flange, a mounting hole, and an info pad in an embodiment of a substrate storage container concerning the present invention. It is a disassembled perspective explanatory drawing which shows typically the cover body in embodiment of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically the back of the lid in the embodiment of the substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the gasket in embodiment of the substrate storage container which concerns on this invention. It is XII-XII sectional view explanatory drawing of FIG. It is a perspective explanatory view showing typically a 2nd embodiment of a substrate storage container concerning the present invention. It is a cross-sectional top view which shows typically the accommodation state of the semiconductor wafer in 2nd Embodiment of the substrate storage container which concerns on this invention. It is a section top view showing typically a 2nd embodiment of a substrate storage container concerning the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container main body 1A Container main body 10 Rim flange 12 Diamond-like carbon layer 20 Lid 20A Lid 21 Case 27 Mounting groove 32 Surface cover 28 Gasket 29 Mounting part 30 Contact part W Semiconductor wafer (substrate)

Claims (1)

A container body of a front open box that accommodates three or less substrates, a diamond-like carbon layer coated on the inner periphery of the horizontally long front part of the container body, and a removable front part of the container body A lid that fits together and a locking mechanism that locks the lid that closes the front portion of the container body, and a mounting groove is formed in the peripheral edge of the back surface facing the substrate of the lid, and a diamond is formed in the mounting groove. A substrate storage container in which a frame-shaped gasket in contact with a like carbon layer is fitted so as to be elastically deformable,
The locking mechanism is supported by the lid and is slidable in the left and right and outside directions, and is rotatably supported at the tip of the slide, and protrudes from the through hole in the side wall of the lid so as to be inside the front portion of the container body. A locking claw capable of interfering with the locking groove, a spring that slides the slide body to the left and right outwards of the lid body and protrudes the locking claw from the through hole of the lid body, and a distal end side of the slide body. An operation hole into which the operation pin is inserted from the outside of the lid body, the operation hole of the slide body is formed in a substantially circular shape, and a part located on the left and right inward side of the lid body is a straight vertical flat portion When removing the lid from the front part of the container body, an operation pin is inserted into the operation hole of the slide body, the slide body is slid in the left-right inward direction of the lid body, and the protruding locking claw is inserted into the through-hole of the lid body. To retreat inside,
A gasket is formed in a substantially U-shaped cross section so that the lengths of both free ends thereof are different from each other, and the inner free end and the outer free end forming both free ends are tightly fitted in the mounting groove of the lid. The inner free end to be fitted is formed thinner than the outer free end and the end surface is formed obliquely, the outer free end is formed thicker and longer than the inner free end, and the end surface is sharpened to have a substantially triangular cross section. The substrate storage container is characterized in that the end surface of the outer free end is pressed against the diamond-like carbon layer of the container body.

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