JP2009021371A - Substrate storing container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storing container which hardly occurs any trouble of locking of a cover and can prevent the generation of particles, etc. that contaminate a substrate. <P>SOLUTION: The substrate storing container has such a locking mechanism 40 on a cover 20 that opens/closes an open front part of a container body with a small height for storing two semiconductor wafers. The locking mechanism 40 is provided with a link plate 41 that is supported on both sides within the cover 20 and is slidable in right and left directions and in inside and outside directions of the cover 20; a locking click 47 that is pivotally supported projecting around a groove hole 23 on the side wall of the cover 20, is connected rotatably with the tip of the link plate 41, and is projected from the groove hole 23 of the cover 20, interfering with an engaging groove in the front part of the container body; a coil spring 49 to project the locking click 47 from the groove hole 23 of the cover 20; and an operation hole 45 that is operated from the outside of the cover 20. A roller 48 is pivotally supported at the interference part of each of the locking click 47 for interfering with the engaging groove of the container body. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate storage container that stores a small number of substrates made of semiconductor wafers and the like, and more particularly to an improvement of a locking mechanism.

Although not shown, the substrate storage container used for processing semiconductor wafers in a short period of time at an LSI manufacturer or the like is a container main body for storing three or less semiconductor wafers, and an open front portion of the container main body is attached and detached. The lid includes a lid that can be freely opened and closed, and a locking mechanism that locks the lid fitted to the front portion of the container body (see Patent Document 1).
For example, a plurality of rotating bodies are rotatably supported in the lid body, and a plurality of locking claws protruding from the peripheral portion of the rotating mechanism are exposed from the peripheral wall of the lid body. The claw functions to lock the lid by engaging the inner periphery of the front portion of the container body.
JP 2006-1000071 A

  The conventional substrate storage container is configured as described above, and although the lid fitted to the front portion of the container main body can be firmly locked by the locking mechanism, it is not necessary to remove the lid from the container main body. Therefore, there is a possibility that the rotating body rotates freely and the locking claw comes off from the inner periphery of the front portion of the container body, thereby hindering the locking of the lid. In addition, since the locking claw of the rotating body is directly locked to the inner periphery of the front portion of the container body, with this direct locking, the locking claw and the inner periphery of the front portion of the container body are rubbed, and particles of the semiconductor wafer are contaminated. There is also a possibility of causing the occurrence.

  The present invention has been made in view of the above, and an object of the present invention is to provide a substrate storage container that can prevent the generation of particles and the like that contaminate the substrate without causing a problem in locking the lid.

In the present invention, in order to solve the above-described problem, a lid body that opens and closes a front portion that is opened in a substantially horizontally long container body that accommodates three or less substrates is provided with a lid body that closes the front portion of the container body. Provided with a locking mechanism for locking,
The locking mechanism is supported inside the lid and is slidable in the left and right inside and outside of the lid, and is supported so as to be able to appear and retract in the vicinity of the through hole in the side wall of the lid, and rotates to the tip of the slide A locking claw that can be connected and protrudes from the through-hole of the lid and can interfere with the locking grooves on both sides in the front part of the container body, and the sliding claw is slid in the left and right direction of the lid to cover the locking claw An interference portion of a locking claw that includes a spring that protrudes from a through-hole of the body and an operation hole that is provided on the distal end side of the slide body and is operated from the outside of the lid body surface and interferes with the locking groove of the container body To support the roller rotatably,
When removing the lid from the front part of the container body, operate the operation hole to slide the slide body in the left-right inward direction of the lid so that the protruding locking claw is retracted into the through-hole of the lid It is characterized by that.

A rib flange can be formed on at least the back wall of the back wall and both side walls of the container body, and the rib flange can be protruded when the container body is removed from the mold and substantially opposed to the pin from the outside.
Moreover, the guide which pinches | interposes a slide body in the left-right inside and outside direction of a cover body can be formed inside a cover body.

In addition, an elastically deformable gasket interposed between the container body and the container body is attached to the lid body, and the gasket is attached to an attachment portion to be attached to the lid body and a front portion formed in the attachment portion and opened to the container body. The contact portion is in contact with each other, and at least the contact portion of the attachment portion and the contact portion can be coated with diamond-like carbon.
And a cylindrical body that is slidably fitted to the slide body, and an arm that is rotatably connected to the slide body and supported by the lid body, and rotates in the left, right, inner and outer directions of the lid body, You may make a cylinder contact an arm by interposing a spring between cylinders.

  Here, the substrate in the claims includes at least 1, 2, 3, 11, 25, and 26 various glass substrates, cover glasses, semiconductor wafers (diameters 200 mm, 300 mm, 450 mm, etc.), photomasks, and the like. It is. The container body is not particularly required to be transparent, opaque, translucent or the like, but is shorter than a substrate storage container that stores 25 or 26 semiconductor wafers having a diameter of 300 mm. For example, when two substrates made of a semiconductor wafer having a diameter of 300 mm are accommodated, the height is 6 cm or less.

  The lid does not particularly ask for transparency, opaqueness, translucency, and the like. A gasket that ensures airtightness is interposed between the container body and the lid, but this gasket may or may not be an endless filament. Further, the term rotation of the locking mechanism includes rotation and swinging. The spring and roller are not particularly limited to a plurality. The spring may be a coil spring or a leaf spring. Furthermore, the terminal part side of the slide body includes both the terminal part and the terminal part.

  According to the present invention, when closing the opened front part of the container body with the lid, the lid is fitted into the front part of the container body, and the groove hole of the lid is formed in the locking groove in the front part of the container body. What is necessary is just to oppose. Then, the slide body slides to the left and right outward direction of the lid body by the spring to rotate the latching claw, the latching claw protrudes from the through hole in the lid body side wall, and the roller is fitted into the latching groove of the container body, By fitting the roller, the front portion of the container body is closed and locked by the lid.

On the other hand, when removing the lid from the front of the container body, a jig or the like is inserted into the operation hole of the slide body from the outside of the lid body, and the slide body is slid in the left-right inward direction of the lid body. good. Then, the slide body slides inward in the left and right direction while compressing the spring, and the locking claw rotates to retract the exposed roller into the through hole of the lid, and the locking claw retracts. Thus, the roller can be removed from the locking groove of the container body, and the lid body can be removed from the container body.
When the lid is not removed from the container body as described above, or when a load is not applied to the locking mechanism, the locking claw protruding in the locking groove of the container body interferes with the spring, and the front portion of the container body is covered. Since it is closed by the body, the lid body is rarely detached from the container body.

According to the present invention, there is no risk of hindering the locking of the lid, and there is an effect that generation of particles or the like that contaminate the substrate can be prevented.
In addition, if a guide that guides the slide body by sandwiching the slide body in the left, right, inner and outer directions of the lid body is formed inside the lid body, the slide body is less likely to slide or be displaced, and the lid body with respect to the container body Can be optimized.

  Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to the drawings. The substrate storage container in this embodiment stores two semiconductor wafers W as shown in FIGS. The lid body 20 that opens and closes the open front portion of the container body 1 is provided with a locking mechanism 40 that locks the lid body 20 fitted to the front portion of the container body 1. A pair of link plates 41 slidable in the left and right inside and outside of the body 20 and a pair of locking claws that protrude from the groove hole 23 on the side wall of the lid 20 and can interfere with the locking grooves 14 on both sides inside the front portion of the container body 1 47, a pair of coil springs 49 that slide each link plate 41 in the left-right outward direction of the lid 20 to project the locking claws 47 from the slot 23 of the lid 20, and a pair that is operated from the outside of the lid 20 From the operation hole 45 of It is to be formed.

  As shown in FIG. 8, each semiconductor wafer W is made of, for example, a thin and round silicon type having a diameter of 300 mm, and an orientation flat for alignment and identification or a substantially semicircular notch in a plane is selectively formed on the peripheral edge.

  As shown in FIGS. 1 to 10, the container body 1 has a low height for aligning and storing two or less semiconductor wafers W by injecting a molding material containing a predetermined resin into a molding die ( (For example, 6 cm or less) It is injection-molded into a front open box type, and the lid 20 having the same shape is detachably fitted to the open horizontally long front portion via an endless gasket 28. As the mold, an injection molding type (not shown) is used and is mounted on an injection molding machine. As shown in FIGS. 4 and 7, a plurality of reciprocating protruding pins 2 protruding with the mold opening are incorporated in the mold in a state of being fixed to the protruding plate.

  Examples of the predetermined resin of the molding material of the container body 1 include polycarbonate, polyetherimide, polyetheretherketone, polybutylene terephthalate, etc., which are excellent in mechanical properties, heat resistance, dimensional stability, and the like. To these resins, carbon, carbon fibers, metal fibers, carbon nanotubes, antistatic agents, flame retardants and the like are appropriately added as necessary.

  As shown in FIGS. 8 and 10, a pair of left and right teeth 3 that horizontally support the semiconductor wafer W are provided on the inside of the container body 1, specifically, on the inner surfaces of the opposing side walls. The teeth 3 are arranged at intervals in the vertical direction. Each tooth 3 is formed into a long and narrow plate in the front-rear direction of the container body 1, and the end portion of the container body 1 near the back wall is tapered. Further, as shown in FIGS. 1, 2, 5 to 9, a rib flange 4 is formed on the outer peripheral surface of the container main body 1 to increase the mechanical strength and rigidity of the container main body 1. 4 protrudes when the container body 1 is removed and faces the pin 2.

  The rib flange 4 is integrally formed on the back wall and both side walls of the container body 1 from the outside, and has a deformed planar U shape. The rib flange 4 on the back wall is formed in, for example, a long and thin plate shape, and both side parts 5 are horizontally positioned substantially at the center of both side parts of the back wall of the container body 1, and the center part 7 is on the container body 1. Located below the center of the back wall. Further, both side portions 5 of the rib flange 4 on the rear wall are respectively screwed with metal balance weights 6 from below so that the front portion of the container body 1 does not tilt downward, and from the mold of the container body 1. It functions so as to face the plurality of protruding pins 2 from the outside during demolding.

  The central portion 7 of the rib flange 4 on the back wall is bent into a substantially W shape to form a concave portion, and the opening of the concave portion faces downward and functions as a positioning portion 8 for the processing apparatus of the container body 1. Moreover, the rib flange 4 of each side wall is formed in, for example, an elongated and thick plate shape, the front portion 9 is positioned below the front portion of each side wall, and the remaining portion 10 other than the front portion is other than the front portion of each side wall. It is located horizontally in the approximate center of the remaining portion of the rear wall and is integrated with the rib flange 4 of the back wall. The front portion of the rib flange 4 on each side wall is bent into a substantially inverted V shape to form a recess, and the opening of this recess faces downward and functions as a positioning portion 8 for the processing apparatus of the container body 1.

  As shown in FIGS. 1 and 4 to 9, a plurality of mounting ribs 11 having a substantially Y-shape in a plane are erected at a substantially central portion of the ceiling of the container body 1, and on the plurality of mounting ribs 11. The planar substantially triangular or polygonal holding flange 12 held by a transport mechanism (not shown) is detachably screwed later through a fastener such as a screw.

  As shown in FIGS. 3, 6, and 8, the opened front portion of the container main body 1 is bent so as to spread outward to form a rim flange 13. The locking grooves 14 for locking the body 20 are cut out in the vertical direction. On both sides of the rim flange 13 projecting to the left and right, a plurality of identification holes 15 are vertically perforated and rounded, and identification pins (not shown) are selectively inserted into the plurality of identification holes 15. By the detection means (for example, a photoelectric sensor, a photo sensor, a touch sensor, etc.), the presence or absence of the semiconductor wafer W, the number of the semiconductor wafers W, the type of the substrate storage container, etc. are identified by the processing apparatus.

  As shown in FIGS. 3, 6, 11, 12, 16, and 17, the lid 20 includes a horizontally long casing 21 that is detachably fitted to the opened rim flange 13 of the container body 1, A front cover 32 that is screwed onto and covers the front portion of the housing 21 that is opened is configured to be transparent. The housing 21 is integrally formed with a plurality of holding ribs 22 for the locking mechanism 40 on both sides of the housing 21, and the locking mechanism 40 corresponding to the locking groove 14 of the container body 1 is formed on both sides of the peripheral wall. In the vicinity of the inner peripheral edge of each slot 23, a support rib 24 for the locking mechanism 40 is integrally formed.

  As shown in FIG. 12, a horizontally long mounting hole 25 is formed in the center of the rear surface of the housing 21, and the front peripheral edges of the plurality of semiconductor wafers W are elastically formed by elastic pieces in the mounting hole 25. A holding front retainer 26 is mounted.

  As shown in FIG. 12, a laterally long frame-shaped mounting groove 27 is cut out at the peripheral edge of the rear surface of the housing 21, and an elastic gasket 28 interposed between the container body 1 and the mounting groove 27 is formed in the mounting groove 27. Mated. As shown in FIGS. 13 to 15, the gasket 28 includes, for example, silicone rubber, fluororubber, or diamond-like carbon (also referred to as DLC) 31 having excellent heat resistance, weather resistance, flame resistance, cold resistance, and compression characteristics. Various thermoplastic elastomers (for example, olefins) that can be coated are molded into a horizontally long frame shape that can be elastically deformed.

  The gasket 28 is deformed by being pressed into the endless frame-shaped attachment portion 29 fitted into the attachment groove 27 of the lid 20 and the rim flange 13 formed integrally with the attachment portion 29 and opened in the container body 1. The contact portion 30 is coated with a hard diamond-like carbon 31 excellent in high smoothness, wear resistance, corrosion resistance, low friction coefficient, and high gas barrier property by batch processing or the like. The diamond-like carbon 31 contacts the inner peripheral edge of the rim flange 13.

  As shown in FIG. 15, the gasket 28 is formed in a substantially U shape in cross section, and the thickness and length of both free ends thereof are different from each other. The part is elongated longer. Both free ends of the gasket 28 are obliquely cut so that the thin inner free end is easily deformed and tightly fitted in the mounting groove 27 of the lid 20, and the end surface of the thick outer free end is The contact portion 30 is sharpened to have a substantially triangular cross section, and the remaining portion other than the contact portion 30 is the attachment portion 29.

  Diamond-like carbon 31 is formed into an amorphous hard film by carbon-containing gas being decomposed atomically in plasma, and has a feature that the surface is smooth and has grain boundaries due to a dense amorphous structure. From the viewpoint of maintaining the flexibility and followability of the gasket 28, it is coated to a thickness of about 10 to 100 nm.

  As shown in FIGS. 3, 6, 16, and 17, the surface cover 32 is formed in a horizontally long shape, and operation ports 33 for the locking mechanism 40 are formed in the horizontally long sides on both sides. A pair of guide pieces 34 for the locking mechanism 40 are integrally formed in the inward direction of the housing 21 at the rear surface side peripheral portion of the mouth 33.

  As shown in FIGS. 11, 12, 18, and 19, the locking mechanism 40 includes a pair of link plates 41 that are supported on both inner sides of the casing 21 of the lid 20 and are slidable in the left, right, inner, and outer directions. A pair of swingable locking claws 47 that are pivotally supported in the respective groove holes 23 of the body 21 and connected to the distal end portion of the link plate 41 and that engage with the locking grooves 14 of the container body 1 and interfere with each other. And a pair of coil springs 49 that are inserted into the respective link plates 41 and cause the locking claws 47 to interfere with the locking grooves 14 of the container body 1.

  As shown in FIGS. 11 and 18, each link plate 41 is formed, for example, in a substantially Y-shaped plate having a bifurcated tip, and a collar 42 for the coil spring 49 is slidable at the center of the bar. The distal end portion 43 and the most distal end portion 44 are slidably sandwiched between the pair of guide pieces 34 of the surface cover 32, and the distal end portion 44 corresponds to the operation port 33 of the surface cover 32. A round operation hole 45 is drilled.

  A substantially U-shaped link arm 46 that restricts sliding and dropping of the cylindrical collar 42 is fitted to the end portion 43 of the link plate 41 through a pin so as to be swingable in the left, right, inner and outer directions. The arm 46 is pivotally supported by the holding rib 22 of the housing 21 through a pin so as to be swingable in the left, right, inner and outer directions.

  As shown in FIG. 11 and FIG. 19, each locking claw 47 is bent into a deformed substantially V shape, and the bent portion is pivotally supported by the support rib 24 of the housing 21 via a pin so as to be swingable. One end of the latching claw 47 is pivotally supported via a pin between the bifurcated tip portions of the link plate 41, and the container body 1 is latched between the other bifurcated other ends. A plurality of rollers 48 in sliding contact with the groove 14 are rotatably supported via pins. Each roller 48 is formed into a cylindrical shape using, for example, the same material as that of the container body 1.

  As shown in FIG. 11, each coil spring 49 is inserted into the center portion of the link plate 41 and interposed between the wide end portion side of the link plate 41 and the collar 42, and the collar 42 is pressed against the link arm 46. At the same time, the other end of the locking claw 47, that is, a plurality of rollers 48, is projected from the slot 23 of the housing 21 to the outside.

  In the above configuration, when the opened rim flange 13 of the container body 1 containing the semiconductor wafer W is closed by the lid body 20, the lid body 20 is pressed and fitted into the rim flange 13 of the container body 1. The contact portion 30 of the gasket 28 is pressed and deformed to the inner peripheral edge of the rim flange 13 of the main body 1 via the diamond-like carbon 31, and the slot 23 of the lid 20 is made to face each locking groove 14 of the container main body 1. It ’s fine.

  Then, the link plate 41 is slid horizontally in the left and right direction of the lid body 20 while being guided by the holding rib 22, the guide piece 34, and the link arm 46 by the restoring action of the compressed coil springs 49, and the locking claws 47 are moved. A plurality of rollers 48 that are swung in the front and back direction of the lid 20 and the other ends of the locking claws 47 project and rotate outwardly from the groove hole 23 of the lid 20 are attached to the container body 1. By fitting into the stop groove 14 and inserting the plurality of rollers 48, the rim flange 13 of the container body 1 is firmly closed by the lid 20, and airtightness and airtightness are ensured.

  In this way, when no load is applied to the locking mechanism 40, the rollers 48 of the locking claws 47 projectingly swinging into the respective locking grooves 14 of the container main body 1 are fitted so as to be able to roll and contact, and the rim flange of the container main body 1 is inserted. 13 is covered with the lid 20.

  On the other hand, when removing the locked lid 20 from the rim flange 13 of the container body 1 containing the semiconductor wafer W, a dedicated jig (not shown) is attached to the operation hole 45 of each link plate 41 of the lid 20. What is necessary is just to insert from the exterior via the operation port 33, and to slide each link plate 41 to the left-right inward direction of the cover body 20. FIG.

  Then, each link plate 41 slides horizontally in the left-right inward direction of the cover body 20 while compressing the coil spring 49, and the locking claw 47 swings while drawing an arc to expose the other end, that is, a plurality of rollers. 48 is retracted into the slot 23 of the lid 20, and the other end of the locking claw 47 is retracted, so that the plurality of rollers 48 are removed from the locking groove 14 of the container body 1 and the lid is closed from the container body 1. The body 20 can be removed.

  According to the above configuration, when the locking mechanism 40 that does not remove the lid 20 from the container body 1 is not operated, the locking claw 47 is continuously fitted into the locking groove 14 of the container body 1 by the coil spring 49 and the rim of the container body 1 is Since the flange 13 is firmly closed by the lid 20, the lid 20 is not detached from the container body 1 at all, and there is no possibility that the locking of the lid 20 will be hindered. In addition, the locking claw 47 is not directly fitted into the locking groove 14 of the container body 1, but a plurality of rotatable rollers 48 of the locking claw 47 are fitted into the locking groove 14 of the container body 1 to be in sliding contact. Therefore, the coefficient of friction is small, and there is no possibility that the container main body 1 and the locking claw 47 are rubbed and the generation of particles that contaminate the semiconductor wafer W is not caused.

  Further, since the contact portion 30 of the gasket 28 with respect to the container body 1 is coated with diamond-like carbon 31 having high smoothness and wear resistance, the gasket 28 is interposed between the container body 1 and the lid 20 for a long time. Even if it is interposed, the gasket 28 sticks in the container body 1 and does not hinder the opening of the lid 20 at all. In addition, since it is not necessary to change the hardness of the gasket 28 to be high, the followability of the gasket 28 can be ensured and the airtightness and sealing performance can be improved.

  Further, both sides of the rib flange 4 of the container body 1 face the outside from the mold protruding pin 2 to become an obstacle, and the reinforcing function is exerted by increasing the strength of the back wall. For example, the protruding pin 2 is protruded. Even if a large load is applied, the back side of the container body 1 protrudes and is not pierced by the pins 2, thereby making it possible to effectively prevent damage to the container body 1 during manufacturing.

  Further, since it is not necessary to greatly change the drawing angle when the container body 1 is removed from the mold, there is no hindrance to taking in and out of the semiconductor wafer W. Furthermore, since the rib flange 4 and the positioning portion 8 on the back wall are not formed separately, but the positioning portion 8 is integrally formed on the central portion 7 of the rib flange 4 on the back wall, the simplification of the configuration can be greatly expected. .

  The substrate storage container according to the present invention is not limited to the above embodiment. For example, a viewing window for visually recognizing the semiconductor wafer W may be formed above the center of the back wall of the container body 1 by an insert molding method, a two-color molding method, or the like. Further, an RF tag of the FRID system may be attached to the container main body 1 or its rib flange 4 so as to contribute to an automatic moving body identification system.

  Instead of forming the plurality of positioning portions 8 on the rib flange 4, the positioning portions 8 for the processing apparatus may be formed on both the front side and the rear center of the flat bottom surface of the container body 1. Further, the central portion of the rib flange 4 on the back wall can be bent into a substantially V shape instead of a substantially W shape to form a recess. Further, the rib flange 4 on each side wall can be omitted if no particular trouble occurs.

  Further, the diamond-like carbon 31 is coated only on the contact portion 30 of the gasket 28, but there is no particular limitation, and the diamond-like carbon 31 may be coated on the mounting portion 29 and the contact portion 30 of the gasket 28, respectively. . Further, the diamond-like carbon 31 may be simply coated on the contact portion 30 of the gasket 28. However, if there is no particular problem, the diamond-like carbon 31 may be partially coated on the contact portion 30 of the gasket 28.

It is a plane explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is bottom explanatory drawing which shows typically embodiment of the substrate storage container which concerns on this invention. It is front explanatory drawing which shows typically embodiment of the substrate storage container which concerns on this invention. It is back explanatory drawing which shows typically embodiment of the board | substrate storage container which concerns on this invention. It is side explanatory drawing which shows typically embodiment of the board | substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is back explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. It is front explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. It is side explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. It is a section side explanatory view showing typically a container main part in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically a lid and a locking mechanism in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the back of the lid in the embodiment of the substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the gasket in embodiment of the substrate storage container which concerns on this invention. It is side surface explanatory drawing which shows typically the gasket in embodiment of the board | substrate storage container which concerns on this invention. It is the XIII-XIII sectional view taken on the line of FIG. It is a perspective view showing typically a surface cover of a lid in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the back of a surface cover in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the slide plate of the locking mechanism in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically a latching claw of a locking mechanism in an embodiment of a substrate storage container concerning the present invention.

Explanation of symbols

1 Container Body 4 Rib Flange 13 Rim Flange (Open Front)
14 Locking groove 20 Lid 21 Housing 22 Holding rib 23 Groove hole (through hole)
24 support rib 32 surface plate 33 operation port 34 guide piece (guide)
40 Locking mechanism 41 Link plate (slide body)
42 Collar 43 End portion 44 Endmost portion 45 Operation hole 46 Link arm 47 Locking claw 48 Roller 49 Coil spring (spring)
W Semiconductor wafer (substrate)

Claims (2)

A substrate storage container provided with a locking mechanism that locks a lid that closes the front part of the container main body to a lid that opens and closes a front part of the container body that accommodates three or less substrates, which is opened in a substantially horizontal shape. There,
The locking mechanism is supported inside the lid and is slidable in the left and right inside and outside of the lid, and is supported so as to be able to appear and retract in the vicinity of the through hole in the side wall of the lid, and rotates to the tip of the slide A locking claw that can be connected and protrudes from the through-hole of the lid and can interfere with the locking grooves on both sides in the front part of the container body, and the sliding claw is slid in the left and right direction of the lid to cover the locking claw An interference portion of a locking claw that includes a spring that protrudes from a through-hole of the body and an operation hole that is provided on the distal end side of the slide body and is operated from the outside of the lid body surface and interferes with the locking groove of the container body To support the roller rotatably,
When removing the lid from the front part of the container body, operate the operation hole to slide the slide body in the left-right inward direction of the lid so that the protruding locking claw is retracted into the through-hole of the lid A substrate storage container characterized by that.   The substrate storage container according to claim 1, wherein a guide is formed inside the lid so as to guide the slide body sandwiched in the left and right inner and outer directions of the lid.

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