JP5041828B2 - Substrate for substrate storage container and substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container lid of a substrate storage container called a small hoop (SMALL FOUP) and a substrate storage container.

  Various processings are applied to thin semiconductor wafers sliced to 200mm diameter or 300mm diameter, but the processing time of this semiconductor wafer is not uniform and the performance of IC chip Depends on the timing of commercialization, product specifications, etc.

  For example, when processing is performed by a memory device manufacturer or the like, especially when the processing target is a general-purpose product, mass production is required, so it takes a long time (for example, 30 to 40 days) through many processes. Processing is performed. On the other hand, in the case of processing by an LSI manufacturer or the like, it is necessary to respond to requests for high-mix low-volume production, trial manufacture of prototypes, and small-lot products, so a short time (for example, 14 to 20 days) Need to be processed in time.

  Therefore, when a semiconductor wafer is processed by an LSI manufacturer or the like, only a few wafers (for example, 25 or 26) can be stored in a dedicated substrate storage container instead of an existing substrate storage container that can store a plurality (for example, 25 or 26). 1 to 3) is stored, and it is preferable that the processing time per sheet is shortened (see Patent Document 1).

This type of dedicated substrate storage container includes a horizontally long container body (not shown) and a horizontally long lid body that opens and closes the front surface of the container body. The structure which incorporates the locking mechanism which locks the fitted cover body is examined. The locking mechanism is a configuration for an existing substrate storage container that can store a plurality of semiconductor wafers. Specifically, the rotation plate in the lid is rotated from the outside to the opening / closing mechanism of the load port. A configuration in which a pair of advancing and retracting plates are advanced to lock a locking claw at the tip of each advancing and retracting plate on the inner front surface of the container body has been studied (see Patent Document 2).
JP 2006-245206 A Japanese Patent Laid-Open No. 2002-368074

  However, the dedicated substrate storage container that shortens the processing time per sheet is configured to be smaller and smaller than the existing type, and the built-in space for the locking mechanism of the lid is narrow and scarce. There is a problem that it is difficult to divert and incorporate a large locking mechanism. In addition, since the existing locking mechanism for the substrate storage container requires that the rotating plate in the lid body be rotated from the outside, the configuration of the opening / closing mechanism for opening and closing the lid body is often complicated.

  The present invention has been made in view of the above, and can provide a locking mechanism in a narrow space of a lid, and can prevent the opening / closing mechanism for the lid from being complicated, and a lid for a substrate storage container and a substrate The object is to provide a storage container.

In order to solve the above-mentioned problems in the present invention, a lid that opens and closes the front of a container body that is substantially horizontally long when viewed from the front and that stores three or less substrates, and a locking mechanism that locks the lid fitted to the front of the container body With
The lid includes a horizontally long case that is detachably fitted to the open front of the container body, and a surface plate that covers the open front of the case. A mounting rib having a substantially U-shape is provided, a through hole for a locking mechanism is provided on both sides of the peripheral wall of the housing, and a pair of slots are provided in the surface plate.
The locking mechanism is supported on both inner sides of the lid body, and when the lid body is fitted to the front surface of the container body, a pair of forward / backward locking bodies facing the inner peripheral side portion of the front surface of the container body, and the container body Including a pair of springs for advancing and retracting the advancing and retracting locking body to the inner peripheral surface side of the front surface of the container main body when the lid is fitted to the front of
Each forward / backward locking body includes a driving member that is slidably supported by the mounting rib of the housing and can move forward / backward in the left / right / inside / outward direction of the lid body. Attach a locking body that fits through the through-hole of the housing to the side of the peripheral surface, and insert the pin through the groove on the surface plate of the lid at the end that penetrates the mounting rib of the drive member If the spring is fitted to the drive member of the forward / backward locking body and no load is applied to the spring, the locking body is urged by the spring to protrude from the through hole of the housing. It is characterized by the fact that it was made to let you .

Further, in the present invention, in order to solve the above-mentioned problem, the front of the container body that is substantially horizontally long when viewed from the front and that stores three or less substrates is opened and closed by the lid for a substrate storage container according to claim 1. Yes.

  Here, the substrate in the claims includes at least aluminum disks, semiconductor wafers, quartz glass, liquid crystal glass and the like having various sizes. The container body is not particularly required to be transparent, opaque or translucent. For this container body, for example, an insert part is inserted into a mold and the mold is clamped, and a molding material is injected into the mold that has been clamped, so that at least a part of the outer shape is formed by the insert part. can do. Specifically, the rear part of the container body including a rear wall that can be partially seen through can be formed by an insert part.

  The lid can be formed to be transparent, opaque, or translucent. The locking mechanism does not ask for a plurality. Moreover, the drive member and the locking body of the advance / retreat locking body may be integrated or separate. As these driving members and locking bodies, various shapes of shafts, plate bodies and the like can be used as appropriate, and the locking body can support a plurality of rollers. The locking body can be formed in a cross-sectional substantially plate shape, wedge shape, J shape, L shape, T shape, Y shape, γ shape, pin shape, or the like.

The drive member can be appropriately attached with an operation member that is an operation portion exposed from the lid, or can be provided with a recess that is an operation portion for inserting the operation member from the outside of the lid. Furthermore, although the spring is mainly a coil spring, other types of springs such as a leaf spring may be used as long as similar effects can be expected.

According to the present invention, when the lid is pressed and fitted to the open front of the container main body, the forward end of the forward / backward locking body protrudes from the lid by the biasing action of the spring, and the front inner periphery of the container main body The distal end of the advance / retreat locking body interferes to lock the lid fitted to the container body.

According to the present invention, it is possible to provide a locking mechanism in a narrow space of the lid, and to prevent the opening / closing mechanism for the lid from being complicated. That is, instead of diverting and incorporating an existing large locking mechanism, a small locking mechanism is placed sideways on a horizontally long lid, so the locking mechanism can be appropriately and easily mounted in a narrow built-in space of the lid. Can do. Further, since the locking body of each forward / backward locking body appears and disappears without rotating the rotating plate from the outside, the omission of the rotating plate may complicate the configuration of the opening / closing mechanism that opens and closes the lid. Can be eliminated. Further, when the lid is inserted into the open front of the container body, the locking body is continuously inserted into the locking groove of the container body and locked by the biasing action of the spring. Can be prevented.

  Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A substrate storage container in the present embodiment is substantially horizontally long in a front view for storing two semiconductor wafers W as shown in FIGS. The container body 1 is opaque, the cover body 30 is substantially horizontally long when opening and closing the front surface of the container body 1, and the elastic gasket 52 is interposed between the container body 1 and the cover body 30. And a small locking mechanism 40 that locks the lid 30 when fitted to the front surface of the container main body 1, and the locking mechanism 40 is a linear motion mechanism that does not have a rotating plate. I have to.

  The semiconductor wafer W is sliced thinly into a disk having a diameter of 300 mm (12 inches) so that, for example, an IC chip can be efficiently manufactured, and a film such as an oxide film is selectively laminated on the surface. .

  The container body 1, the lid 30 and the locking mechanism 40 are made of, for example, polycarbonate, polybutylene terephthalate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polyacetal, polyoxymethylene, polyformaldehyde, carbon, It is molded by a molding material to which carbon fiber, carbon nanotube, metal fiber, metal oxide, conductive polymer and the like are selectively added.

  As shown in FIGS. 1 to 3, the container body 1 is insert-molded into a front open box type using a predetermined molding material, and the ratio of the length of the front long side to the short side is 1.6 to It has a space sufficient for aligning and storing two semiconductor wafers W arranged vertically. The container main body 1 is formed in a band shape in which a fitting groove 7 for the teeth body 2 is continuous in the inside, specifically, the inner surface of both side walls and the back side of the inner bottom surface (see FIGS. 3 and 4). ).

  As shown in the figure, the teeth body 2 is detachably fitted to the inner surfaces of both side walls of the container body 1 via fitting grooves 7 so as to support the rear peripheral edge of the semiconductor wafer W from below. 3 and a connecting piece 4, which is connected to the inner bottom surface of the container main body 1 through a fitting groove 7 and is detachably fitted to the inner bottom surface of the container body 1. The container body 1 is integrally molded before and after the container body 1 is molded, and is injection-molded separately from the container body 1. The plurality of pairs of teeth 3 are formed by arranging a plurality of pairs of left and right teeth 5 that horizontally support the semiconductor wafer W at predetermined intervals in the vertical direction.

  As shown in the figure, each of the teeth 5 includes, for example, a flat semicircular arc-shaped flat plate 6 along the peripheral edge of the semiconductor wafer W, and a front inner wall formed on the curved front inner side of the flat plate 6. Formed on the outside of the front portion of the flat plate 6 and on the outside of the front middle thickness region, in other words, on the front thick region located near the side wall of the container body 1 and on the rear portion of the flat plate 6. And a rear middle meat region. In addition, the connecting piece 4 is formed in an elongated flat and substantially U-shape, is inclined downward from the thin end portions of the plurality of teeth 5 and is located below the back wall of the container body 1, and the rear periphery of the semiconductor wafer W and the container It functions to avoid interference with the back wall of the main body 1.

  In such a tooth 5, a step for contacting the semiconductor wafer is slightly formed between the front middle thickness region and the front thick thickness region, and the front middle thickness region and the rear middle thickness region form the semiconductor wafer W. While supporting substantially horizontally, it functions as a stopper which prevents the semiconductor wafer W storing the front thick region from popping out. By adopting such teeth 5, it is possible to improve the accuracy of the support mounting position of the semiconductor wafer W and effectively prevent the semiconductor wafer W from being inclined obliquely in the vertical direction during support.

  As shown in FIGS. 1, 2, 4, and 5, a bottom plate 8 that projects in the horizontal outward direction is integrally formed on the bottom surface of the container body 1, and the peripheral edge of the bottom plate 8 is bent upright. And exerts a reinforcing function. Positioning grooves 9 for positioning with respect to a semiconductor processing device (not shown) are bent in a substantially U-shaped or substantially V-shaped cross section at the center of the rear portion of the bottom plate 8 and in front of both side portions. In addition, weights 10 functioning as counterweights and balancers for the lid 30 are respectively incorporated on both sides of the rear portion of the bottom plate 8.

  From the rear center to the side of the bottom plate 8, as shown in FIGS. 4 and 5, an IC tag 11 for constructing an RFID system, which is a moving body identification device, is selectively mounted and the container body 1 is cleaned. A plurality of draining holes 12 that function sometimes are drilled at predetermined intervals. These IC tags 11 and drain holes 12 are disposed on the front, rear, and side portions of the bottom plate 8 as required (see FIG. 4).

  The ceiling of the container body 1 is formed in a substantially planar polygon having a plurality of steps, and both sides of the rear part are inclined inward so as to correspond to the rear edge of the semiconductor wafer W. As shown in FIG. 2, a substantially cylindrical mounting rib 13 is erected at the center of the ceiling of the container body 1, and a substantially plate-shaped reinforcing rib 14 is erected from the outer peripheral surface of the mounting rib 13. And a plurality of reinforcing ribs 14 are selectively extended in the radial direction, and screw holes 15 are perforated at the cylindrical end portions of the reinforcing ribs 14. The carrying suspension flange 16 is screwed horizontally through a fastener such as a screw.

  As shown in FIGS. 1 and 2, the suspension flange 16 is formed in a substantially triangular flat plate and is detachably gripped from above by a transport mechanism (not shown). Then, by being fitted and held on a slidable suspension plate of the semiconductor processing apparatus, the substrate storage container is set in the processing apparatus in a suspended state.

  The front surface of the container body 1 is formed in an oblong rectangular opening, and the locking grooves 18 for the lid 30 are cut out in the vertical direction on both sides of the inner peripheral surface (see FIG. 4). As shown in FIGS. 1, 2, and 5, a plurality of round identification holes 19 are perforated in a state of being arranged in the vertical direction on both sides of the front surface of the container body 1, and are attached to and removed from the plurality of identification holes 19. By selectively inserting the free discriminating body 20, the type of the substrate storage container, the presence / absence of the semiconductor wafer W, the number of sheets, and the like are discriminated by the processing apparatus.

  The identification body 20 is formed into a pin shape, a split pin shape, a screw shape, a cap shape, or the like using a predetermined synthetic resin such as polycarbonate, and is used for detecting means of a processing apparatus, such as a transmission type or reflection type photoelectric sensor, photo It is detected by a sensor, a touch sensor or the like.

  As shown in FIG. 3 and FIG. 5, a transparent viewing window 21 is formed in a substantially horizontally long rectangle in a part of the rear wall of the container body 1, for example, the center of the rear wall. By visually utilizing, the presence / absence and state of the stored semiconductor wafer W are observed. The viewing window 21 is formed in a circular shape, an elliptical shape, a polygonal shape, or the like as necessary.

  The lid 30 includes a horizontally long casing 31 having a substantially dish-shaped cross section that is detachably fitted to the open front of the container body 1, and a horizontally long surface plate 32 that removably covers the open front of the casing 31. And is configured to support automation. As shown in FIGS. 5 and 6, the housing 31 is provided with a plurality of substantially U-shaped mounting ribs 33 for the locking mechanism 40 on both sides of the housing 31, and the front peripheral edge of the semiconductor wafer W is provided on the back surface. An elastic front retainer 35 that holds elastically is detachably mounted. In addition, through holes 36 for the locking mechanism 40 are respectively perforated in rectangular shapes on both sides of the peripheral wall of the casing 31, and each through hole 36 faces the locking grooves 18 on both sides of the front surface of the container body 1.

  As shown in FIGS. 6 and 7, the locking mechanism 40 is supported on both inner sides of the lid body 30, and faces the locking groove 18 of the container body 1 when the lid body 30 is fitted to the front surface of the container body 1. When the lid body 30 is fitted to the front surface of the container main body 1, the forward / backward movement locking body 41 is advanced into the locking groove 18 of the container main body 1 to interfere with the tip portion thereof. A pair of coil springs 47 to be contacted is provided.

  Each forward / backward locking body 41 includes a drive member 42 that is slidably supported by the mounting rib 33 of the housing 31 and can move forward and backward horizontally in the left, right, inner and outer directions of the lid body 30. A locking claw 43 that fits into the locking groove 18 of the container body 1 through the through-hole 36 of the housing 31 is attached to the part, and a lid body is attached to the terminal part that penetrates the attachment rib 33 of the drive member 42. An operation hole 45 for inserting a load port pin 44 penetrating through the slot 32a of the surface plate 32 is rounded, and the load port pin 44 inserted into the operation hole 45 is slid from the outside. As a result, the forward / backward moving locking body 41 slides to retract the protruding locking claw 43 into the housing 31.

  As shown in FIG. 6, each coil spring 47 is fitted in the center of the drive member 42 and is interposed between the mounting rib 33 and the locking claw 43 of the housing 31 and is locked when no load is applied. The claw 43 is urged and pressed so as to protrude from the through-hole 36 of the housing 31 so as to be able to appear and retract.

  The gasket 52 is formed into an endless frame shape that can be elastically deformed using, for example, fluorine rubber, silicone rubber, or the like, and is sandwiched between the front inner periphery of the container body 1 and the peripheral portion of the casing 31 constituting the lid 30. The airtight function is exhibited by the pressure contact deformation, and contamination of the semiconductor wafer W and generation of particles are prevented.

  In the above, when obtaining the container body 1 of the substrate storage container, as shown in FIGS. 8 and 9, first, the mold 61 in which the insert part 60 that forms the rear part of the container body 1 is molded in advance and opened is used. The core mold 62 is inserted into and supported at the tip of the core 63, and the core mold 62 is inserted into the cavity mold 64 opposite to the mirror-finished recess 65 to insert the insert component 60, and the recess 65 is partitioned. The insert part 60 is brought into contact with the back of the plurality of opposing walls 66, and the mold 61 is clamped.

  When the mold 61 is clamped in this manner, the molding material melted into the mold 61 is injected, the hollow container body 1 integrally formed at the rear portion by the insert part 60 is injection-molded, and the mold 61 is clamped. After holding the pressure and cooling and opening the core mold 62 and the cavity mold 64 of the mold 61, the container body 1 can be ejected by a projecting pin or a projecting plate and dropped or transferred by a dedicated robot. 1 can be obtained.

  Next, the tooth body 2 is inserted into the molded container body 1 while being deformed, and is closely fitted and positioned in the fitting groove 7, and weights 10 are incorporated on both sides of the rear portion of the bottom plate 8 of the container body 1. 8, the IC tag 11 is mounted on the side of the rear portion, and the suspension flange 16 is screwed into the mounting rib 13 and the plurality of screw holes 15 of the container body 1, so that two semiconductor wafers W can be stored with high accuracy. A possible container body 1 can be completed.

  Next, when the front surface of the container body 1 is closed and locked by the lid body 30, first, the lid body 30 is pressed and fitted to the front surface of the container body 1 opened by the opening / closing mechanism. Then, the locking claws 43 of the respective forward / backward moving locking bodies 41 projecting from both front side portions of the container body 1 come into contact with each other and retract into the lid body 30. After that, when the locking claw 43 faces the locking groove 18 of the container body 1 and the load does not act, the locking claw 43 is linearly extended from the through hole 36 of the housing 31 by the restoring action of the compressed coil spring 47. The locking claw 43 is inserted into the locking groove 18 of the container body 1 and the lid 30 is firmly locked.

  According to the above configuration, the existing large locking mechanism 40 is not diverted and incorporated, but the small locking mechanism 40 is disposed sideways on the horizontally long lid 30, so that it is locked in the narrow internal space of the lid 30. The mechanism 40 can be attached appropriately and easily. Further, since the locking claw 43 of each forward / backward moving locking body 41 appears and disappears without rotating the rotating plate from the outside, the omission of the rotating plate complicates the configuration of the opening / closing mechanism for opening and closing the lid 30. It is possible to easily eliminate such a risk.

  Further, when the lid body 30 is inserted into the opened front surface of the container main body 1, the latching claw 43 is continuously inserted into the locking groove 18 of the container main body 1 due to the biasing action of the coil spring 47, so that the substrate storage container can be locked. It is possible to reliably prevent the lid 30 from falling off during movement. In addition, the container body 1 and the tooth body 2 are not integrally molded to be complicated, but the complicatedly shaped tooth body 2 is assembled later on the container body 1 having a simple configuration. The structure of the mold 61 can be greatly simplified, and the mold opening of the mold 61 for molding the container body 1 can be complicated, and the core mold 62 does not need to be divided at all. Is possible.

  Moreover, since the freedom degree of the shaping | molding is improved by making the teeth body 2 into another body, it becomes possible to improve the freedom degree of the shape of the teeth 5 significantly. Further, since the connecting pieces 4 are connected and integrated at the end portions of the plurality of pairs of teeth 5, there is no need to fit each tooth 5 into the container body 1 and closely fit into the fitting groove 7 one by one. In addition to improvement in workability and workability, improvement in productivity and mass productivity of the teeth body 2 and improvement in quality can be expected. In addition, since the connecting piece 4 of the tooth body 2 is positioned below the viewing window 21, it does not become an obstacle across the viewing window 21, and it is possible to improve the visibility of the viewer using the viewing window 21. become.

  Further, the insert part 60 supported on the tip of the core 63 of the core die 62 is brought into contact with the recess 65 of the cavity die 64 to restrict vibration of the free tip of the flat core 63. Even if an injection pressure difference occurs in the material, the core 63 of the core mold 62 fitted into the cavity mold 64 is not beaten or bent. Therefore, there is no variation in the thickness of the container body 1 to be molded, and the core 63 of the core mold 62 can be extremely effectively prevented from being broken. Furthermore, the insert part 60 is not simply supported at the tip of the core 63, but the insert part 60 is inserted to stabilize the molding position and posture, so that the container body 1 can be molded with high quality. .

  Next, FIG. 10 to FIG. 12 show a second embodiment of the present invention. In this case, each advance / retreat locking body 41 is slidably supported by the mounting rib 33 of the housing 31 and is horizontally supported. A drive member 42 made of SUS that can be moved forward and backward, and a tapered locking claw that fits into the locking groove 18 of the container body 1 through the through-hole 36 of the housing 31 at the distal end of the drive member 42. 43 is attached to the end of the drive member 42 penetrating the mounting rib 33 so as to contact the mounting rib 33 of the housing 31 so that the drive member 42 is excessively advanced. Is screwed.

A guide 34 protruding from the inside of the housing 31 is loosely inserted into the locking claw 43, and an operation protrusion 49 is formed in the restriction stopper 48 so as to pass through the slot 32 a of the surface plate 32 and be exposed. When the operation protrusion 49 is slid from the outside, the forward / backward movement locking body 41 slides to retract the protruding locking claw 43 into the housing 31. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.
In the present embodiment, it is obvious that the same operational effects as those of the above-described embodiment can be expected, and the advance / retreat locking body 41 and the operation portion can be diversified.

  Next, FIG. 13 shows a third embodiment of the present invention. In this case, the advancing / retracting locking body 41 of the locking mechanism 40 is supported in the casing 31 of the lid 30 and its left and right sides are shown. A drive member 42 that can be moved back and forth horizontally in the inner and outer directions, and pivotally supported on both sides of the peripheral wall of the lid 30 and connected to the tip of the drive member 42, and the lid 30 is mounted in front of the container body 1. A locking claw 43 that fits into the locking groove 18 of the container body 1 through the through-hole 36 of the housing 31 when fitted, and a regulation stopper 48 that is provided on the drive member 42 and regulates its excessive advancement. It is made up of.

  The drive member 42 may be an elongated shaft, but as shown in the figure, a plate guided by a plurality of guides 34 or a plurality of combined plates may be used. Also, pins can be attached to both sides of the drive member 42 and each pin can be guided to the guide 34 of the housing 31. The locking claw 43 is bent in a substantially L shape, and the bent portion is pivotally supported in the vicinity of the through-hole 36 of the lid 30 so that the free end 50 is slightly curved. A plurality of rollers 51 slidably in contact with the front side of the locking groove 18 are rotatably supported via a support shaft, and a distal end portion is rotatably connected to a distal end portion of the drive member 42.

  Such a locking claw 43 is configured so that the roller 51 of the free end 50 is opposite to the fitting direction of the lid 30 by the biasing action of the coil spring 47 when the lid 30 is fitted into the front surface of the container body 1. Project in the direction of.

  In the above description, when the front surface of the container main body 1 is closed and locked by the lid body 30, the lid body 30 is pressed and fitted to the front surface of the container main body 1 opened by the opening / closing mechanism. Then, the locking claws 43 of the respective forward / backward moving locking bodies 41 in a protruding state come into contact with both side portions of the front surface of the container body 1 and move backward while swinging into the lid body 30. Then, when the locking claw 43 faces the locking groove 18 of the container body 1 and the load stops working, the locking claw 43 swings from the through-hole 36 of the housing 31 by the restoring action of the compressed coil spring 47 ( The locking claw 43 is inserted into the front side of the locking groove 18 and the lid 30 is firmly locked. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and when the lid 30 is fitted to the front surface of the container body 1, the roller 51 of the locking claw 43 is fitted in the fitting direction of the lid 30. Projecting in the opposite direction to the front side of the locking groove 18, and the lid 30 is strongly pressed in the fitting direction with respect to the container body 1 by the reaction force accompanying this fitting contact. It is clear that 30 strong fits and locks can be greatly expected. Further, since the locking claw 43 is not brought into direct contact with the locking groove 18 of the container body 1 but the rotating roller 51 is brought into rolling contact, the generation of particles due to the contact of the locking claw 43 can be effectively prevented. Obviously you can.

  Next, FIG. 14 shows a fourth embodiment of the present invention. In this case, the locking claw 43 of the forward / backward moving locking body 41 is formed in a substantially T-shape and its end is covered with a lid. A plurality of rollers 51 that are slidably contacted with the rear side 18a opposite to the front side of the locking groove 18 are rotatably supported at the free end 50 of the locking claw 43. The distal end portion of the locking claw 43 is rotatably supported on the distal end portion of the drive member 42 by a connecting shaft. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In the present embodiment, it is obvious that the same operational effects as those of the above embodiment can be expected, and that the configurations of the advance / retreat locking body 41 and the locking claws 43 can be diversified.

  In the above-described embodiment, two semiconductor wafers W are stored in the container body 1. However, the present invention is not limited to this, and only one or three semiconductor wafers W may be stored in the container body 1. good. Moreover, if the same effect can be expected, the fitting groove 7 which is not continuous between the both side walls and the inner bottom surface of the container body 1 may be formed in a recessed manner. Further, the container body 1 and the tooth body 2 may be integrated. Moreover, although the container main body 1 and the bottom plate 8 may be integrated, it is good also as a different body. Moreover, the suspension flange 16 can be formed in a flat circular shape, a polygonal shape, or the like, or can be detachably attached to both side portions of the container body 1.

  In addition, the rear part and the center part of the plurality of pairs of teeth 5 can be connected by the connecting piece 4 as long as there is no problem. Moreover, although the locking groove 18 was formed in the both sides of the front inner peripheral surface of the container main body 1 in the said embodiment, it is not limited to this at all, For example, it locks in the four corners of the front inner peripheral surface of the container main body 1. Each of the grooves 18 is formed, and through holes 36 for the locking mechanism 40 are respectively drilled at the four corners of the peripheral wall of the housing 31, and the locking claws 43 of the forward / backward moving locking body 41 can be protruded from the through holes 36. it can.

  In addition, the locking grooves 18 are formed at the two diagonal corners of the front inner peripheral surface of the container body 1, and the through holes 36 for the locking mechanism 40 are drilled at the two peripheral corners of the casing 31 on the diagonal. And the latching claw 43 of the advance / retreat latching body 41 can be protruded from each through-hole 36. In addition, a regulation stopper 48 that regulates excessive advancement of the drive member 42 by contacting a regulated pin protruding from the housing 31 may be formed on both sides or sides instead of the end portion of the drive member 42. .

  Further, when each forward / backward locking body 41 is moved forward / backward in the left / right / inside / outward direction of the lid 30, the forward / backward locking body 41 may be moved forward / backward while being inclined in the thickness direction of the casing 31. Furthermore, in the said embodiment, although the coil spring 47 was fitted to the drive member 42, it is not limited to this at all. For example, the casing 31 and the driving member 42 or the locking claw 43 are connected by a necessary number of springs, and the locking claw 43 is elastically biased by this spring so as to protrude from the through hole 36 of the casing 31 so as to be able to appear and retract. May be. Furthermore, a required number of rollers 51 may be rotatably supported at the end of the locking claw 43 of the first embodiment.

It is a whole perspective explanatory view showing typically an embodiment of a lid for a substrate storage container and a substrate storage container concerning the present invention. 1 is an exploded perspective view schematically showing an embodiment of a lid for a substrate storage container and a substrate storage container according to the present invention. It is front explanatory drawing which shows typically the container main body in embodiment of the substrate storage container which concerns on this invention. It is a section top view showing typically a container main part in an embodiment of a substrate storage container concerning the present invention. FIG. 3 is a rear perspective explanatory view schematically showing an embodiment of a lid for a substrate storage container and a substrate storage container according to the present invention. It is a perspective explanatory view showing typically a lid and a locking mechanism in an embodiment of a lid for a substrate storage container and a substrate storage container concerning the present invention. It is a transparent perspective explanatory drawing which shows typically a lid and a locking mechanism in an embodiment of a lid for a substrate storage container and a substrate storage container concerning the present invention. It is a partial section explanatory view showing typically the forming die for container main parts in the embodiment of the substrate storage container concerning the present invention. It is a plane explanatory view showing typically the core type of the molding die in the embodiment of the substrate storage container concerning the present invention. It is a whole perspective explanatory view showing typically a 2nd embodiment of a lid for substrate storage containers and a substrate storage container concerning the present invention. It is a disassembled perspective explanatory drawing which shows typically 2nd Embodiment of the cover body for substrate storage containers which concerns on this invention, and a substrate storage container. It is a section explanatory view showing typically the locking mechanism in a 2nd embodiment of a lid for substrate storage containers and a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the locking mechanism in a 3rd embodiment of a lid for substrate storage containers and a substrate storage container concerning the present invention. It is a section explanatory view showing typically a locking mechanism in a 4th embodiment of a lid for substrate storage containers and a substrate storage container concerning the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container body 2 Teeth body 5 Teeth 18 Locking groove 18a Back side 30 Lid body 31 Housing | casing 32 Surface plate 32a Groove hole 33 Mounting rib 34 Guide 36 Through-hole 40 Locking mechanism 41 Advance / retreat locking body 42 Drive member 43 Locking claw (Locking body)
44 pin 45 operation hole (operation part)
47 Coil spring (elastic biasing body)
48 Restriction stopper (regulation member)
49 Operation protrusion (operation part)
50 Free end 51 Roller 52 Gasket W Semiconductor wafer (substrate)

Claims (2)

A lid for a substrate storage container comprising a lid that opens and closes the front of a container body that is substantially horizontally long when storing three or less substrates, and a locking mechanism that locks the lid fitted to the front of the container body. There,
The lid includes a horizontally long case that is detachably fitted to the open front of the container body, and a surface plate that covers the open front of the case. A mounting rib having a substantially U-shape is provided, a through hole for a locking mechanism is provided on both sides of the peripheral wall of the housing, and a pair of slots are provided in the surface plate.
The locking mechanism is supported on both inner sides of the lid body, and when the lid body is fitted to the front surface of the container body, a pair of forward / backward locking bodies facing the inner peripheral side portion of the front surface of the container body, and the container body Including a pair of springs for advancing and retracting the advancing and retracting locking body to the inner peripheral surface side of the front surface of the container main body when the lid is fitted to the front of
Each forward / backward locking body includes a driving member that is slidably supported by the mounting rib of the housing and can move forward / backward in the left / right / inside / outward direction of the lid body. Attach a locking body that fits through the through-hole of the housing to the side of the peripheral surface, and insert the pin through the groove on the surface plate of the lid at the end that penetrates the mounting rib of the drive member If the spring is fitted to the drive member of the forward / backward locking body and no load is applied to the spring, the locking body is urged by the spring to protrude from the through hole of the housing. A lid for a substrate storage container, wherein the lid is for a substrate storage container. 2. A substrate storage container comprising: a lid for a substrate storage container according to claim 1, wherein a front surface of a substantially horizontally long container main body storing three or less substrates is opened and closed.

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