JP2012190928A - Thin plate housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thin plate housing container in which a lid can be easily removed from a container body even if the container body and the lid are adhered to each other.SOLUTION: A thin plate housing container 1 comprises: a container body 2 which has an opening 4 on its front face; and a lid 3 which is fitted to the opening 4 so as to sealably close the opening 4. The lid 3 comprises: a lid body 11; and a locking mechanism 7 having a locking part 8 which protrudes and recedes from a protrusion/recession hole 13 formed on the lid body 11. A gasket 26 comprises: a frame body 30 and a lip part 31 which seal between the container body 2 and the lid 3; and operated ribs 32 which are connected to the lip part 31 and extended to the protrusion/recession 13, and which are displaced by roller parts 25 of the locking part 8 protruding and receding from the protrusion/recession hole 13. The gasket 26 is fitted into a sealing groove 27 of the lid body 11.

Description

  The present invention relates to a thin plate storage container used for storing, transporting and transporting precision substrates such as semiconductor wafers, glass wafers, mask glasses, etc., and in particular, when removing the cover from the thin plate storage container The present invention relates to a structure of a thin plate container that prevents a sticker from sticking to a container body.

  This type of thin plate container includes a container body having an opening and a lid that closes the opening so that the opening can be sealed, and stores one or more substrates in an aligned manner in the container body. It is possible. This thin plate container is used for storage of substrates such as semiconductor wafers, glass wafers, mask glass, in-process transport, and transport to the outside.

  In addition, a thin plate storage container for storing a silicon wafer having a diameter of 300 mm and a thickness of 775 μm, which is currently mainstream in the semiconductor industry, uses a lid body that has a built-in locking mechanism that can be automatically operated from the processing apparatus side. Yes. Thereby, the container main body and the lid can be detachably engaged.

  The thin plate container configured as described above is generally transported by an aircraft. However, due to the pressure difference generated inside and outside the thin plate container, the inside of the thin plate container is depressurized, making it difficult to open the lid. As a result, the lid cannot be removed from the container body by the lid opening / closing device, and there is a problem in that the productivity of semiconductor components is reduced.

  Therefore, in Patent Document 1, it is proposed that a container storing a plurality of wafers is formed with minute irregularities on a seal member, a container main body, or a lid, thereby impairing airtightness when pressure changes.

  Patent Document 2 proposes providing a filter for eliminating a difference between internal and external pressures in a substrate storage container that stores a plurality of substrates.

JP 2002-145111 A JP 2009-105205 A

  However, although the container described in Patent Document 1 can relieve the pressure difference between the inside and outside, there is a problem that the tip of the lip of the seal member sticks when the lid is automatically removed from the container body. It does not solve.

  Further, the substrate storage container described in Patent Document 2 also has no disclosure regarding sticking of the seal member.

  Then, an object of this invention is to provide the thin plate container which can remove a cover body from a container main body easily even if a container main body and a cover body stick.

  A thin plate storage container according to the present invention includes a container body having an opening to store a substrate, a lid provided with a locking mechanism and fitted into the opening, and a seal for sealing between the opening and the lid And a sealing member is deformed by an unlocking operation of the locking mechanism, and a gap is formed between the opening and the lid.

  According to the thin plate container according to the present invention, even if the sealing member sticks to the container main body and the lid, the sealing member is deformed by the unlocking operation of the locking mechanism, so that there is a gap between the opening and the lid. Therefore, the resistance when removing the lid from the container body is reduced. As a result, the lid can be removed from the container body with a small force, so that the lid body can be stably removed from the container body without stopping the lid opening / closing device, thereby improving the productivity of semiconductor components. Can do.

  The seal member preferably includes a seal body that seals between the opening and the lid, and a projecting piece extending from the seal body, and the projecting piece is preferably displaced by a locking mechanism that performs an unlocking operation. . With this configuration, when locking, the seal body is in close contact with the opening and the lid so that the space between the container body and the lid is completely sealed. Since the protruding piece is displaced by the mechanism, the seal body is pulled by the protruding piece and deformed. Thereby, since the seal main body is partially peeled from the opening, the resistance when removing the lid from the container main body is reduced, and the lid can be removed from the container main body with a small force.

  In this case, it is preferable that the projecting piece is disposed on the movement path of the locking mechanism. By comprising in this way, a protrusion can be displaced easily and reliably, without adding a change to a locking mechanism.

  Moreover, it is preferable that a locking mechanism is provided with the operation part which deform | transforms a sealing member by unlocking operation of a locking mechanism. By comprising in this way, a seal member can be changed by an operation part by carrying out unlocking operation of a locking mechanism. Thereby, since the seal main body is partially peeled from the opening, the resistance when removing the lid from the container main body is reduced, and the lid can be removed from the container main body with a small force.

  In this case, the seal member preferably includes an engaged portion that is engaged with the operation portion. Thus, the seal member can be reliably deformed by providing the engaged portion on the seal member.

  According to the present invention, the lid can be easily removed from the container main body even if the container main body and the lid adhere to each other.

It is an expansion | deployment perspective view of the thin plate container which concerns on embodiment. It is a partial cross section figure which shows the opening part of a container main body. It is a perspective view which shows a cover body back side. It is sectional drawing which shows the locking state of a locking mechanism. It is sectional drawing which shows the unlocking state of a locking mechanism. It is a partially enlarged view showing the periphery of the appearance hole of the lid body. It is a perspective view which shows a gasket. It is a partially expanded view of the gasket shown in FIG. It is the IX-IX sectional view taken on the line of FIG. It is a perspective view which shows the cover body in which the locking mechanism is locked. FIG. 11 is a partially enlarged view of FIG. 10. It is a partially expanded view which shows the through-hole periphery of the cover body in the state of FIG. It is sectional drawing which shows the relationship between the latch mechanism in a locked state, and a gasket. It is a perspective view which shows the cover body in which the locking mechanism is unlocked. FIG. 15 is a partially enlarged view of FIG. 14. FIG. 15 is a partially enlarged view showing the vicinity of the through hole of the lid in the state of FIG. 14. It is sectional drawing which shows the relationship between the latch mechanism in a unlocked state, and a gasket. It is a partially expanded view which shows the locking state of the thin plate container which concerns on 2nd Embodiment. It is a figure which shows the relationship between the operation part in the state of FIG. It is a partially expanded view which shows the locking state of the thin plate container which concerns on 2nd Embodiment. It is a figure which shows the relationship between the operation part in the state of FIG.

  Hereinafter, a preferred embodiment of a thin plate container according to the present invention will be described in detail with reference to the drawings. In the following description, up, down, left and right indicate up, down, left and right of the thin plate container. Moreover, the same code | symbol shall be attached | subjected to the same or an equivalent part in all the figures.

[First Embodiment]
FIG. 1 is an exploded perspective view of a thin plate container according to the embodiment. As shown in FIG. 1, the thin plate container 1 according to the embodiment stores a wafer (substrate) having a diameter of 300 mm therein. The thin plate container 1 includes a container body 2 and a lid 3.

  The container body 2 is a front open type container having an opening 4 on the front surface. The container body 2 is provided with a pair of support members 5 for horizontally supporting the substrate inside the opposing side walls. The support member 5 has plate-like support portions extending from the opening 4 to the back side and arranged at regular intervals in the vertical direction, and a step portion that prevents the substrate from jumping out at the end portion on the opening 4 side of each support portion. Is formed. Further, a position regulating wall for regulating the insertion limit of the substrate is formed on the back side wall of the container body 2.

  FIG. 2 is a partial cross-sectional view showing the opening of the container body. As shown in FIGS. 1 and 2, the opening 4 is formed in a rectangular shape in front view with rounded corners. The opening 4 is formed to have a substantially L-shaped cross section. The opening 4 is directed to the peripheral end surface of the lid 3 and fitted with the lid 3, and the lid 4 is directed to the back of the lid 3. An opening front portion 4b that forms a seal with the body 3.

  Two locking recesses 6 for locking the lid 3 to the container body 2 are formed on the upper and lower surfaces of the opening peripheral surface portion 4a. The locking recess 6 is formed by partially denting the opening peripheral surface portion 4a in order to lock a locking portion 8 of a locking mechanism 7 described later.

  As shown in FIG. 1, a robotic flange 9 for transportation is attached to the top surface of the container body 2, and the bottom surface of the container body 2 is positioned on a processing apparatus on which the thin plate container 1 is mounted. A pedestal member 10 having an inverted V-shaped cross section is attached.

  The container body 2 configured as described above is formed using a synthetic resin such as polycarbonate, polyether ether ketone, polyether imide, polybutylene terephthalate, polyacetal, liquid crystal polymer, or cycloolefin polymer. And, to these resins, conductivity imparting agents such as carbon powder, carbon fiber, and carbon nanotube are appropriately added.

  The lid 3 is fitted into the opening 4 of the container body 2 and closes the opening 4 so as to be sealable. The lid body 3 is formed in a rectangular thin plate shape, and the surface side of the lid body 3 facing the inside of the thin plate container 1 when the lid body 3 is fitted into the opening 4 of the container body 2 is arranged on the lid body 3. The surface side that is referred to as the back surface side and is directed to the outside of the thin plate container 1 when the lid 3 is fitted into the opening 4 of the container body 2 is referred to as the surface side of the lid 3. Further, a direction from each outer peripheral surface of the lid body 3 toward the inside of the lid body 3 is referred to as an inner side direction of the lid body 3, and a direction from each outer peripheral surface of the lid body 3 to the outer side is referred to as an outer direction of the lid body 3. .

  The lid 3 covers the lid body 11, the retainer 14 attached to the back side of the lid body 11, the locking mechanism 7 attached to the front side of the lid body 11, and the locking mechanism 7. And a surface plate 12 attached to the surface side of the lid body 11. In addition, the back surface side of the lid body 3 means a side disposed inside the thin plate container 1 when the lid body 3 is fitted into the opening 4 of the container body 2, and the surface side of the lid body 3 is When the lid 3 is fitted into the opening 4 of the container body 2, it is the side that is disposed outside the thin plate container 1.

  The lid 3 configured as described above is formed using a synthetic resin such as polycarbonate, polyether ether ketone, polyether imide, polybutylene terephthalate, polyacetal, liquid crystal polymer, or cycloolefin polymer. And, to these resins, conductivity imparting agents such as carbon powder, carbon fiber, and carbon nanotube are appropriately added.

  The lid body 11 constitutes the body of the lid 3. The lid body 11 is formed in a rectangular shape in front view with rounded corners, and an outer peripheral surface portion 11 a that fits into the opening 4 of the container main body 2 is formed on the outer peripheral surface thereof. On the upper and lower surfaces of the outer peripheral surface portion 11a, a pair of in / out holes 13 are formed in which an engaging portion 8 of the locking mechanism 7 to be described later in and out.

  FIG. 3 is a perspective view showing the back side of the lid. As shown in FIG. 3, a retainer 14 that holds the peripheral edge of the opening 4 side of the substrate housed in the container body 2 is attached to the back surface side of the lid body 11. The retainer 14 includes a frame 15 and an elastic portion 16 extending in a strip shape from the frame 15 toward the inside. The elastic portion 16 protrudes in a direction facing the substrate stored in the container body 2, and a holding groove 17 having a V-shaped cross section or a U-shaped cross section is formed at the tip of the elastic portion 16. Although the elastic portion 16 is cantilevered by the frame body 15, a pair of opposing elastic portions 16 may be connected to be supported at both ends by the frame body 15. Further, another holding portion for holding the substrate may be provided at the tip of the elastic portion 16 instead of the holding groove 17 or together with the holding groove 17.

  As shown in FIG. 1, the surface plate 12 has an operation hole for enabling the locking mechanism 7 to be locked and unlocked by a lid opening / closing device provided in a processing apparatus on which the thin plate container 1 is mounted. 18 is formed.

  The locking mechanism 7 locks and unlocks the lid body 3 with respect to the container body 2, and two sets of the locking mechanism 7 are arranged side by side on the surface side of the lid body 11. The locking mechanism 7 includes a rotating member 19, a pair of connecting bars 20 connected to the rotating member 19, and a locking portion 8 that is connected to each connecting bar 20 and protrudes and retracts from the retracting hole 13 of the lid body 11. And.

  The rotating member 19 is formed in a disc shape and is rotatably supported by the lid body 11. The rotating member 19 is formed with an operated recess 22 that fits with an operation key inserted through the operation hole 18 of the surface plate 12. The rotating member 19 is formed with a guide groove 23 for moving the connecting bar 20 back and forth by rotation. The guide groove 23 has a longer distance from the center of the rotating member 19 when the rotating member 19 is rotated forward (rotated left in FIG. 1), and when the rotating member 19 is reversed (rotated right in FIG. 1), The distance from the center of the rotating member 19 is formed to be short.

  The connecting bar 20 is formed in a long rectangular plate shape, and is supported by the lid body 11 so as to be able to advance and retreat in the vertical direction (the inner direction and the outer direction of the lid body 3). The inner end of the connecting bar 20 is loosely fitted into the guide groove 23 of the rotating member 19, and the outer end is connected to the locking portion 8. For this reason, the connecting bar 20 can be advanced and retracted by rotating the rotating member 19 with the operation key.

  FIG. 4 is a cross-sectional view showing a locked state of the locking mechanism. FIG. 5 is a cross-sectional view showing an unlocked state of the locking mechanism. As shown in FIGS. 4 and 5, the locking portion 8 is formed in a substantially L shape that is bent upward. The locking portion 8 has a base end portion (left end portion in FIGS. 3 and 4) located on the surface side of the lid body 3 fixed to the lid body 11 and extending in the left-right direction. It is pivotably supported. The locking portion 8 has a pair of cylindrical shapes that are locked to the locking recess 6 of the container body 2 at the front end portion (the right end portion in FIGS. 3 and 4) located inside the lid body 3. A roller unit 25 is rotatably attached. Further, the outer end portion of the connecting bar 20 is swingably connected to the locking portion 8 at the central portion bent in a convex shape.

  For this reason, as shown in FIG. 4, when the locking mechanism 7 for rotating the rotating member 19 in the normal direction is operated by the operation key of the lid opening / closing device, the locking portion 8 is pushed out by the advancing connection bar 20 and rotated. Due to the arc motion of the locking portion 8 about the shaft 24, the roller portion 25 appears from the intrusion hole 13 of the lid body 11. Thereby, the roller part 25 is latched by the latching recessed part 6 formed in the opening peripheral surface part 4a of the opening part 4. FIG.

  On the other hand, as shown in FIG. 5, when the unlocking operation of the locking mechanism 7 for reversing the rotating member 19 is performed by the operation key of the lid opening / closing device, the locking portion 8 is pulled back by the retreating connecting bar 20, and the rotating shaft The roller portion 25 is immersed in the intrusion hole 13 of the lid body 11 by an arc motion around the axis 24. Thereby, the latching of the roller part 25 with respect to the latching recessed part 6 is cancelled | released.

  The locking mechanism 7 configured as described above is formed of a synthetic resin such as polycarbonate, polyetheretherketone, polybutylene terephthalate, or polyacetal.

  FIG. 6 is a partially enlarged view showing the vicinity of the appearance hole of the lid body. As shown in FIGS. 1 to 6, the lid body 11 is fitted with a gasket 26 that fits a seal between the opening front portion 4 b of the opening 4 and the lid body 11 at the peripheral portion on the back surface side. A working groove 27 is formed. The opening of the sealing groove 27 is directed to the outer side of the lid 3. The lid body 11 is formed with a slit 28 that extends from the sealing groove 27 to the protrusion / depression hole 13 and extends from the outer peripheral surface portion 11 a of the lid body 11 to the bottom surface of the sealing groove 27. The slits 28 are formed in one-to-one correspondence with the roller portions 25 of the locking portion 8. For this reason, two slits 28 are formed for each of the appearance holes 13, and eight slits 28 are formed in the lid body 11.

  FIG. 7 is a perspective view showing the gasket. FIG. 8 is a partially enlarged view of the gasket shown in FIG. 9 is a cross-sectional view taken along line IX-IX in FIG. As shown in FIGS. 3 and 7 to 9, the gasket 26 that seals between the opening front portion 4 b of the opening 4 and the lid body 11 includes a frame body 30 formed in a rectangular frame shape, A lip portion 31 extending from the body 30 and an operated rib 32 extending in the opposite direction of the lip portion 31 and operated by the roller portion 25 of the locking portion 8 are provided.

  The frame body 30 is a part that is fixed to the lid body 11 by being fitted into the sealing groove 27 and seals between the gasket 26 and the lid body 11. The frame 30 is formed in a substantially rectangular cross section, and a fitting rib 33 is formed on at least one side peripheral surface in contact with the sealing groove 27 to prevent the sealing groove 27 from falling off. Has been.

  The lip portion 31 is a portion that seals between the gasket 26 and the opening front portion 4b by being in close contact with the opening front portion 4b. The lip portion 31 extends while curving from the entire peripheral surface of the frame body 30 toward the opening front portion 4b. The lip portion 31 is formed with a thin cross-section and has a rounded tip at the end in order to improve the adhesion with the opening front portion 4b. The lip portion 31 has a seal surface 31a directed toward the opening front portion 4b curved in a convex shape, and a back surface 31b opposite to the seal surface 31a curved in a concave shape.

  The operated rib 32 is provided in a one-to-one correspondence with the roller portion 25 of the locking portion 8, and the first rib portion 32 a connected to the lip portion 31 and the lid body 11 from the first rib portion 32 a. A second rib portion 32b extending toward the lure hole 13.

  The first rib portion 32 a is connected to the back surface 31 b extending from the base end of the lip portion 31 to the tip end portion. For this reason, when the 1st rib part 32a is pulled from the back surface 31b side of the lip part 31, the lip part 31 is lifted by the 1st rib part 32a.

  The second rib portion 32b is formed integrally with the first rib portion 32a, and is formed in a bar shape having a rectangular cross section. By inserting the second rib portion 32 b into the slit 28, the tip end portion thereof is disposed in the locking portion 8. The distal end portion of the second rib portion 32 b disposed in the locking portion 8 reaches the moving path of the roller portion 25 that protrudes and retracts through the retracting hole 13 by the operation of the locking mechanism 7. Further, the second rib portion 32b disposed in the locking portion 8 is disposed outside the both side walls of the connecting bar 20 and at a position where it does not contact the roller portion 25 when the locking mechanism 7 is locked. Is done.

  The gasket 26 configured as described above is formed of a displaceable material, and is formed of, for example, rubber such as fluorine rubber or NBR rubber, or various thermoplastic elastomers such as polyolefin, polystyrene, or polyester. The For this reason, the gasket 26 can deform the operated rib 32 and the lip portion 31 with respect to the frame body 30.

  Next, the opening / closing operation | movement of the cover body 3 with respect to the container main body 2 is demonstrated.

  First, with reference to FIGS. 10-13, operation | movement of the thin plate container 1 when performing locking operation of the locking mechanism 7 is demonstrated. FIG. 10 is a perspective view showing the lid body in which the locking mechanism is locked. FIG. 11 is a partially enlarged view of FIG. FIG. 12 is a partially enlarged view showing the periphery of the through hole of the lid in the state of FIG. FIG. 14 is a perspective view showing the lid body with the locking mechanism in the unlocked state. 10 and 11 show a state where the surface plate 12 is removed from the lid 3.

  As shown in FIGS. 10 to 13, when performing the locking operation of the locking mechanism 7, first, the lid 3 is fitted into the opening 4 of the container body 2. Then, the lip portion 31 of the gasket 26 is pressed and brought into close contact with the opening front portion 4b, and the space between the container body 2 and the lid 3 is sealed.

  And the locking operation which rotates the rotation member 19 normally with the operation key of a cover body opening / closing apparatus is performed. Then, since the connecting bar 20 advances in the outer direction of the lid 3 due to the normal rotation of the rotating member 19, the roller portion 25 is pushed out from the retracting hole 13 by the arc motion of the locking portion 8 about the rotating shaft 24. . Then, the roller portion 25 enters the locking recess 6, and the roller portion 25 is locked in the locking recess 6. Thereby, locking of the cover 3 with respect to the container main body 2 is completed.

  At this time, since the roller portion 25 does not contact the second rib portion 32b, the seal between the lip portion 31 and the container body 2 is appropriately held.

  Next, with reference to FIGS. 14-17, operation | movement of the thin plate container 1 when unlocking operation of the locking mechanism 7 is demonstrated. FIG. 14 is a perspective view showing the lid body with the locking mechanism in the unlocked state. FIG. 15 is a partially enlarged view of FIG. FIG. 16 is a partially enlarged view showing the periphery of the through hole of the lid in the state of FIG. FIG. 17 is a cross-sectional view showing the relationship between the latch mechanism and the gasket in the unlocked state. 14 and 15 show a state where the surface plate 12 is removed from the lid 3.

  As shown in FIGS. 14-17, the unlocking operation which reverses the rotation member 19 with the operation key of a cover body opening / closing apparatus is performed. Then, since the connecting bar 20 is retracted inward of the lid 3 by the reversal of the rotating member 19, the roller portion 25 is extracted from the locking recess 6 by the arc motion of the locking portion 8 about the rotation shaft 24. Then, it is immersed in the in / out hole 13. Thereby, the locking of the roller portion 25 with respect to the locking recess 6 is released, and unlocking by the locking mechanism 7 is completed.

  At this time, since the tip end portion of the second rib portion 32b is disposed on the moving system path of the roller portion 25 that protrudes and retracts through the retracting hole 13, the second rib portion 32b is moved by the roller portion 25 that moves into and out of the retracting hole 13. The lid 3 is displaced by being pushed down inward. Then, since the first rib portion 32a is pulled by the displaced second rib portion 32b, the lip portion 31 connected to the first rib portion 32a is deformed so as to be partially lifted from the opening front portion 4b. Partially peeled off.

  As a result, a gap is generated between the lip portion 31 and the opening front portion 4b, and the seal between the lip portion 31 and the opening front portion 4b is released, so that the adhesion between the container body 2 and the lid 3 is reduced. Get smaller. As shown in FIG. 16, since the pair of operated ribs 32 arranged in the same intrusion hole 13 are close to each other, the lip portion 31 is opened in the entire section between the pair of operated ribs 32. It is peeled off from the part 4b.

  As described above, according to the thin plate container 1 according to the present embodiment, during locking, the entire surface of the lip portion 31 is in close contact with the opening front portion 4b and the space between the container body 2 and the lid 3 is completely sealed. However, when the locking mechanism 7 is unlocked, the operated rib 32 is displaced by the roller portion 25, so that the lip portion 31 is pulled by the operated rib 32 and deformed. Thereby, since the lip | rip part 31 is partially peeled from the opening front part 4b, the resistance at the time of removing the cover body 3 from the container main body 2 becomes small. As a result, the lid 3 can be stably removed from the container body 2 without stopping the lid opening / closing device, and the productivity of semiconductor components can be improved.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. The thin plate container according to the second embodiment is basically the same as the thin plate container according to the first embodiment, and only the configuration of the locking portion and the shape of the gasket in the locking mechanism are related to the first embodiment. It differs from a thin plate container. For this reason, in the following description, only matters different from the thin plate storage container according to the first embodiment will be described, and description of the same matters as the thin plate storage container according to the first embodiment will be omitted.

  FIG. 18 is a partially enlarged view showing a locked state of the thin plate container according to the second embodiment. FIG. 19 is a diagram illustrating a relationship between the operation unit and the gasket in the state of FIG. FIG. 20 is a partially enlarged view showing a locked state of the thin plate container according to the second embodiment. FIG. 21 is a diagram illustrating the relationship between the operation unit and the gasket in the state of FIG. 20.

  As shown in FIGS. 18 to 21, a locking mechanism 41 is attached to the lid 3 of the thin plate container 40 according to the second embodiment, and the lid is placed in the sealing groove 27 of the lid body 11. 3 and a gasket 45 which is engaged with the locking mechanism 41 while being sealed between the container body 2 and the container body 2 is fitted.

  The locking mechanism 41 includes a rotating member 19, a pair of connecting bars 20 connected to the rotating member 19, and a locking portion 42 that is connected to each connecting bar and protrudes and retracts from the retracting hole 13 of the lid body 11. ing.

  The locking portion 42 is formed in a rod shape that extends on an extension line of the connecting bar 20. A cylindrical roller portion 43 is attached to the distal end portion of the locking portion 42. An operation portion 44 for deforming the gasket 45 is attached to the body portion of the locking portion 42.

  The operation portion 44 extends in a direction perpendicular to the locking portion 42 and toward the gasket 45. The operation part 44 is formed in a rod shape, and advances and retreats in the slit 28 of the lid body 11 as the locking part 42 advances and retreats.

  The gasket 45 includes a frame body 30 formed in a rectangular frame shape, a lip portion 31 extending from the frame body 30, and an engaged portion 48 engaged with the operation portion 44.

  The engaged portion 48 is provided in one-to-one correspondence with the operation portion 44, and a first engaged portion 48 a connected to the lip portion 31 and a second engaged portion engaged with the operation portion 44. And a joint portion 48b.

  The first engaged portion 48 a is connected to the back surface 31 b extending from the proximal end of the lip portion 31 to the vicinity of the distal end portion. Therefore, when the first engaged portion 48a is pulled from the back surface 31b side of the lip portion 31, the lip portion 31 is lifted by the first engaged portion 48a.

  The second engaged portion 48 b protrudes from the first engaged portion 48 a in the direction opposite to the lip portion 31 and is inserted into the slit 28. And the engagement recessed part 49 engaged with the operation part 44 which retracts is formed in the side surface by the side of the latching | locking part 42 in the 2nd to-be-engaged part 48b.

  The engaging recess 49 opens toward the surface side of the lid body 3 and the outer side of the lid body 3 so that the retracting operation section 44 can enter inside and does not obstruct the traveling operation section 44. Yes. For this reason, the operation part 44 is not engaged with the engagement recessed part 49 at the time of locking. Further, the depth of the engaging recess 49 in the advancing / retreating direction is a depth at which the operating portion 44 contacts the bottom surface of the engaging recess 49 before the operating portion 44 is completely retracted. For this reason, at the time of unlocking, the engaged portion 48 is pressed by the operation portion 44 toward the inner side of the lid body 3.

  Next, the opening / closing operation | movement of the cover body 3 with respect to the container main body 2 is demonstrated.

  First, the operation of the thin plate container 40 when the locking mechanism 41 is locked will be described. As shown in FIGS. 18 and 19, when performing the locking operation of the locking mechanism 41, first, the lid 3 is fitted into the opening 4 of the container body 2. Then, the lip portion 31 of the gasket 45 is pressed against and closely contacts the opening front portion 4b, and the space between the container body 2 and the lid 3 is sealed.

  And the locking operation which rotates the rotation member 19 normally with the operation key of a cover body opening / closing apparatus is performed. Then, since the connecting bar 20 advances in the outer direction of the lid 3 by the normal rotation of the rotating member 19, the roller portion 43 of the locking portion 42 is pushed out from the retracting hole 13. Then, the roller portion 43 enters the locking recess 6, and the roller portion 43 is locked in the locking recess 6. Thereby, locking of the cover 3 with respect to the container main body 2 is completed.

  At this time, since the operation portion 44 does not engage with the engagement recess 49, the seal between the lip portion 31 and the container body 2 is appropriately held.

  Next, the operation of the thin plate container 40 when the locking mechanism 41 is unlocked will be described. As shown in FIGS. 20 and 21, the unlocking operation for reversing the rotating member 19 is performed by the operation key of the lid opening / closing device. Then, since the connecting bar 20 is retracted in the up-down direction due to the reversal of the rotating member 19, the roller portion 43 is extracted from the locking recess 6 and immersed in the intrusion hole 13. Thereby, the locking of the roller portion 43 with respect to the locking recess 6 is released, and unlocking by the locking mechanism 41 is completed.

  At this time, the operating portion 44 retracted in the inner direction of the lid 3 is engaged with the engaging recess 49, and the operating portion 44 presses the engaging recess 49 in the inner direction of the lid 3, so The engaging portion 48b is deformed so as to bend in the inner direction of the lid 3. Then, since the first engaged portion 48a is pulled by the deformed second engaged portion 48b, the lip portion 31 connected to the first engaged portion 48a is deformed so as to be partially lifted. , And partially peeled off from the opening front portion 4b.

  As a result, a gap is generated between the lip portion 31 and the opening front portion 4b, and the seal between the lip portion 31 and the opening front portion 4b is released, so that the adhesion between the container body 2 and the lid 3 is reduced. Get smaller.

  As described above, according to the thin plate container 40 according to the present embodiment, by unlocking the locking mechanism 41, the engaged portion 48 can be pressed and deformed by the operation portion 44 to deform the lip portion 31. it can. Thereby, since the lip part 31 is partially peeled from the opening front part 4b, the resistance when removing the lid 3 from the container body 2 is reduced, and the resistance when removing the lid 3 from the container body 2 is small. Become. As a result, the lid 3 can be stably removed from the container body 2 without stopping the lid opening / closing device, and the productivity of semiconductor components can be improved.

  Further, by forming the engaging recess 49 in the engaged portion 48, the engaged portion 48 can be reliably deformed.

The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment.
For example, in the above-described embodiment, the gasket is described as being fitted into the lid, but may be fitted into the container body. Further, in the above embodiment, the gaskets 26 and 45 are used as the sealing members. However, any member may be used as long as the space between the container body 2 and the lid 3 can be sealed.

  In the first embodiment, the operated rib 32 that is a projecting piece has been described as having a rod shape, but any shape can be used as long as it is inserted into the retracting hole 13 and displaced by the roller portion 25. May be. Furthermore, in the first embodiment, it has been described that the operated rib 32 is displaced by the roller portion 25 of the locking mechanism 7, but the operated rib 32 may be mutated at any part of the locking mechanism 7.

  In the second embodiment, the operation portion 44 has been described as having a rod shape. However, as long as the operation portion 44 can be attached to the locking mechanism 41 and the engaged portion 48 can be deformed by an unlocking operation, an elastic piece or another member can be used. The operation unit 44 may be formed of any shape, material, or structure.

  DESCRIPTION OF SYMBOLS 1 ... Thin plate container, 2 ... Container main body, 3 ... Cover body, 4 ... Opening part, 4a ... Opening peripheral surface part, 4b ... Opening front surface part, 5 ... Supporting member, 6 ... Locking recessed part, 7 ... Locking mechanism, 8 DESCRIPTION OF SYMBOLS ... Locking part, 9 ... Robotic flange, 10 ... Base member, 11 ... Cover body, 11a ... Outer peripheral surface part, 12 ... Surface plate, 13 ... Recessed hole, 14 ... Retainer, 15 ... Frame body, 16 ... Elastic part , 17 ... Holding groove, 18 ... Operation hole, 19 ... Rotating member, 20 ... Connection bar, 22 ... Operated recess, 23 ... Guide groove, 24 ... Rotating shaft, 25 ... Roller part, 26 ... Gasket (seal member), 27 ... Slot groove, 28 ... Slit, 30 ... Frame body (seal body), 31 ... Lip portion (seal body), 31a ... Seal surface, 31b ... Back surface, 32 ... Operated rib (projection piece), 32a ... No. 1 rib part, 32b ... 2nd rib part, 33 ... fitting rib, 40 ... thin plate collection Container, 41 ... Locking mechanism, 42 ... Locking portion, 43 ... Roller portion, 44 ... Operation portion, 45 ... Gasket (seal member), 48 ... Engaged portion, 48a ... First engaged portion, 48b ... First Two engaged portions, 49...

Claims (5)

A thin plate having a container body having an opening and storing a substrate, a lid provided with a locking mechanism and fitted into the opening, and a seal member for sealing between the opening and the lid A storage container,
A thin plate container in which the seal member is deformed by an unlocking operation of the locking mechanism and a gap is formed between the opening and the lid. The seal member includes a seal body that seals between the opening and the lid, and a projecting piece that extends from the seal body.
The thin plate container according to claim 1, wherein the protruding piece is displaced by the locking mechanism that performs an unlocking operation.   The thin plate container according to claim 2, wherein the protruding piece is disposed on a movement path of the locking mechanism.   The thin plate container according to claim 1, wherein the locking mechanism includes an operation unit that deforms the seal member by an unlocking operation of the locking mechanism. The thin plate container according to claim 4, wherein the seal member includes an engaged portion that is engaged with the operation portion.

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