JP2004140395A - Precision substrate storing container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a precision substrate storing container in which an opening front of the container main body is adequately sealed and contamination of the precision substrate is suppressed or prevented even when the size of the container main body is expanded. <P>SOLUTION: This container comprises a pod 1 containing a wafer, an openable and closable lid body 9 which is fitted in the opening front of the pod 1 through a seal gasket to seal, and a locking means fixing the lid body 9 to an occlusion state. The locking means comprises a clamp hole 19 formed on an inner periphery of the opening front of the pod 1, a rotary plate 34 which is built into the lid body 9 and rotates by access from the outside through a keyhole 21 in the surface of the lid body, a reciprocating plate 38 which reciprocates inward and outward inside the lid body by rotation of the rotary plate 34, and a rotatable roller 55, having a friction reducing function, which is inserted into the clamp hole 19 of the pod 1 from a through hole 20 made on a peripheral surface of the lid body at advancing of the reciprocating plate 38, and returns from the clamp hole 19 of the pod 1 to the through hole 20 of the lid body 9 at backing of the reciprocating plate 38. <P>COPYRIGHT: (C)2004,JPO

Description

The present invention relates to a precision substrate storage container used for storage, storage, processing in a process, or transportation of a precision substrate made of an aluminum disk, a semiconductor wafer, or a mask glass, and more specifically, for processing a semiconductor wafer. The present invention relates to an improvement in a container body, a lid, and a lock mechanism of a precision substrate storage container that can be connected to a device having a standardized mechanical interface to be used.

Although not shown, a conventional precision substrate storage container includes a pod (Pod) for storing a plurality of semiconductor wafers (hereinafter abbreviated as wafers), a hollow lid for opening and closing an opening surface of the pod, and a lid for the pod. Locking means for maintaining the closed state when the body is closed is provided (see Patent Documents 1, 2, 3, and 4).

Locking means are classified into inner lock type and outer lock type. The former inner lock type has a plurality of clamp holes provided on the inner periphery of the pod, a plurality of through holes formed in the lid corresponding to the plurality of clamp holes, and a shaft supported inside the lid. The rotary cam includes a rotating cam that is rotated by external access, and a plurality of latch plates that are loosely fitted to the connecting pins of the rotating cam via guide grooves. Each latch plate is formed of metal so as to secure a large rigidity, and a locking claw that locks through a through hole in a clamp hole protrudes from a tip portion thereof.

On the other hand, the latter outer lock type is constituted by a plurality of locking pieces formed to be swingable on the outer periphery of the opening surface of the pod, and a plurality of projections formed on the peripheral surface of the lid body, The plurality of locking pieces and the protrusion lock when the lid is closed.

In the above configuration, when storing, storing, or transporting wafers, first, a plurality of wafers are stored in a pod, and a lid is fitted in a sealing state in an opening surface of the pod, and thereafter, not shown. By the door opening and closing device of the processing device, for example, a rotating cam rotates in one direction to perform a locking operation. When the locking operation is performed in this manner, each latch plate protrudes from the inside to the outside of the lid, and the locking claw is locked in the clamp hole, so that the fixed state of the lid is secured.

On the other hand, when processing stored, stored, or transported wafers, the rotating cam is rotated in the other direction by the door opening / closing device of the processing apparatus to unlock the wafer. Then, each latch plate returns from the inside to the outside of the lid to the inside to the inside, the locking claw is released from the clamp hole, and the lid can be removed. When the lid becomes removable in this way, the lid is removed from the pod by vacuum suction or the like, and a plurality of wafers are sequentially taken out of the pod, and then the wafer is subjected to a predetermined process.
JP-A-9-88398 JP-A-8-340043 Japanese Patent Publication No. 4-505234 Japanese Patent Publication No. 7-504536

By the way, in recent years, in order to increase the density and miniaturization of semiconductor integrated circuits and to improve production efficiency, agreement has been reached on increasing the diameter of wafers (300 mm), and intensive research and development have been made. In order to accommodate a 300 mm wafer, simply increasing the size of the pod causes the following problems.

In other words, when the pod is enlarged, each latch plate bends at the time of the locking operation, and there is a large problem that the opening surface of the pod cannot be sufficiently and uniformly sealed. Conventionally, the latch plate is formed using a metal material, but this may hinder the cleaning of the lid, and may cause contamination of the wafer due to generation of metal ions.

The present invention has been made in view of the above, and provides a precision substrate storage container capable of properly sealing the opening front of the container body even if the container body is enlarged, thereby preventing contamination of the precision substrate from being suppressed. It is intended to be.

In the present invention, in order to solve the above problems, a front open box type container main body for storing a precision substrate, and an openable and closable hollow lid that is fitted and sealed in the opening front of the container main body via a seal gasket. And locking means for fixing the lid in a closed state,
A rotating body which is provided in the lid, and which rotates the locking means by an external operation through a keyhole on the surface of the lid, and a rotation hole of the rotating body; An advancing / retracting member that moves in and out of the lid inside and out, has a friction reducing function, and is fitted into a clamp hole of the container body from a through hole provided in the lid peripheral surface when the advancing / retracting member advances, And a rotating roller which is separated from the clamp hole of the container body when returning to the forward / backward movement member and returns to the through hole of the lid.

In addition, a connecting protrusion provided on the rotating body and connected to the moving member, linearly moving the moving member at the time of rotation of the rotating member, and a guiding member for the moving member provided inside the lid body,
A friction reducing member having a friction reducing function can be rotatably attached to a contact portion between the reciprocating member and the connecting protrusion and / or a contact portion between the reciprocating member and the guide member.

Also, a clamp member is fitted into the clamp hole of the container main body from the through hole of the lid when the advance / retreat member advances, and comes out of the clamp hole of the container main body and returns to the through hole of the lid body when the advance / retreat member retracts. ,
The clamp member includes a first arm rotatably attached to the reciprocating member, and a second arm attached to the first arm, and bending the second arm to rotate the distal end thereof. The second arm can be supported in the vicinity of the through hole in the lid body so as to be rotatable in and out of the lid body by using a fitting holding part with a roller.

Here, the precision substrate in the claims includes at least one (eg, 13 or 25) aluminum disks, liquid crystal cells, and quartz used in the manufacturing field of information communication, electricity, electronics, semiconductors, and the like. Glass, a semiconductor wafer (such as a silicon wafer), or a mask substrate is included. When the precision substrate is a semiconductor wafer, a semiconductor wafer having a large diameter (for example, 200 mm to 300 mm or more) is included.

The container body and the lid are molded using a resin such as polycarbonate, acrylonitrile, polybutylene terephthalate, PEEK, PEI, PES, or polypropylene. Further, antistatic treatment and coloring are performed as necessary. When used as a 300 mm wafer carrier, the outer appearance of the container body can be configured substantially in accordance with SEMI standard E47.1-0097 and a modified ballot.

(4) It is preferable that the rotating body, the reciprocating member, the rotating roller, or the clamp member that constitutes the locking means is made of a resin material having good slidability and sufficient strength. Specifically, it is preferable to be formed of a polyacetal resin, PEEK, polycarbonate, PPS, polybutylene terephthalate, PEI, a fluororesin, or the like.

各種 Furthermore, various resins containing a fluororesin and having improved slidability can be used. Further, in order to improve the mechanical strength, a filler such as glass fiber, glass beads, or talc can be added to the resin, or a metal component can be inserted into the resin to be molded.

According to the present invention, after the lid is fitted to the front of the opening of the container body, when the locking means is externally locked through the keyhole, the rotating body in the lid rotates in a predetermined direction, and moves forward and backward. The moving member advances from the inside inside direction to the inside outside direction of the lid, and the rotating roller moves and fits into the clamp hole of the container body from the direction of the through hole of the lid, so that the fixed state of the lid is maintained.

On the other hand, when the locking means in the locked state is unlocked, the rotating body rotates in the direction opposite to the locking direction, and the advance / retreat member retreats from the inside and outside of the lid to the inside and from the inside, The rotating roller returns from the clamp hole of the container body to the direction of the through hole of the lid, and the lid fitted to the opening front of the container main body becomes detachable.

According to the present invention, even if the size of the container body is increased, the front face of the opening of the container body can be properly sealed, and the effect of suppressing or preventing contamination of the precision substrate can be achieved. Further, since the rotating roller is fitted into the clamp hole of the container body while rotating, friction is reduced, and generation of dust can be suppressed.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A precision substrate storage container according to the present embodiment arranges a plurality of (for example, 25) wafers as shown in FIGS. A pod 1 to be stored, an openable / closable hollow lid 9 fitted and sealed in the front of the opening of the pod 1 via a seal gasket 13, and a lid in the front of the opening of the pod 1 when the lid 9 is closed. Guide means 14 for guiding and positioning the body 9 and locking means 18 for fixing the lid 9 in a closed state are provided.

As shown in FIG. 1 and the like, the pod 1 is molded into a transparent front open box using a synthetic resin such as polycarbonate, which is excellent in lightness and moldability. The pod 1 having an open front has sufficient strength, rigidity, and dimensional stability so as not to be deformed, and guarantees a normal operation of the automatic transport device such as an AGV (Auto Guided Vehicle). At the center of the ceiling of the pod 1, a robotic flange 2 is screwed via a fastener, and the robotic flange 2 is conveyed by being gripped by a ceiling conveyor (not shown).

As shown in FIG. 2, a plurality of cylindrical mounting bosses 3 are formed on the bottom surface of the pod 1 at a predetermined interval, and each of the mounting bosses 3 has a substantially Y-shaped bottom surface. A plate 4 is detachably mounted via a fastener (not shown), and a positioning tool 5 composed of a kinematic coupling is detachably mounted on both front and rear sides of the bottom plate 4 via a fastener. (See FIG. 1). Side handles 6 for manual transport are detachably attached to both outer surfaces of the pod 1.

As shown in FIG. 1, a pair of opposed columns 7 are detachably provided on both sides of the inside of the pod 1, and a rear retainer (not shown) is detachably provided on the inside rear surface of the pod 1. Fixed. On the opposing surfaces of the pair of columns 7 and the surface of the rear retainer, a plurality of support slots 8 each having a substantially U-shaped cross section or a substantially V-shaped cross section are formed in a row in the vertical direction, and each of the support slots 8 supports the peripheral portion of the wafer. . The pair of columns 7 and the rear retainer having such a configuration align a plurality of wafers vertically at a predetermined pitch while horizontally supporting the plurality of wafers, and effectively prevent the vibration of the plurality of wafers.

As shown in FIGS. 1, 5, 7, etc., the lid 9 is made up of a surface plate 10 molded using the same synthetic resin as the pod 1 and a substantially box-shaped back plate 11 having an open surface. The front plate 10 is covered on the opening surface of the back plate 11 via a fastener.

鍵 On both sides of the surface plate 10, keyholes 21 that enable operation from outside are respectively pierced, and an attachment 33 of a door opening / closing device of the processing apparatus is inserted into each keyhole 21. A front retainer 12 is detachably mounted and fixed to the center of the back plate 11, and a frame-shaped seal gasket 13 is detachably fitted to the peripheral surface of the back plate 11 via protrusions, grooves, and the like. You.

The seal gasket 13 is formed as a gasket using various kinds of thermoplastic elastomers such as polyolefin or polysell, or fluorine rubber or silicone rubber. Preferably, the material is formed by using a material having a hardness of 80 ° or less according to a method of measuring K6301A specified in JIS, with little generation of organic components that contaminate the wafer.

As shown in FIG. 2, the guide means 14 is formed to be inclined at the top, bottom, left and right of the front of the opening of the pod 1, and goes from inside the pod 1 (left side in FIG. 2) to outside of the front of the opening (right side in FIG. 2). A first inclined guide portion 15 that gradually spreads according to the above, and a second inclined guide portion that is formed to be inclined on the peripheral surface of the lid 9 and gradually outwardly extends from the back plate 11 side to the front plate 10 side of the lid 9. And the second inclined guide portion 16 comes into contact with the first inclined guide portion 15 when the lid 9 is closed, and functions to position the lid.

The end of the first inclined guide portion 15 is a sealing surface 17, and the sealing gasket 13 is pressed against the sealing surface 17 when the lid 9 is closed and deforms. The state is secured.

The locking means 18 includes a plurality of clamp holes 19 formed in the opening front of the pod 1, a plurality of through holes 20 pierced in the upper and lower peripheral surfaces of the lid 9, and facing the plurality of clamp holes 19, A pair of left and right rotating plates 34, which are pivotally supported at the center on both inner sides of the inside of the cover 9 and rotate by an access operation from the outside, and a plurality of forward / backward movements which linearly slide inward and outward of the lid 9 by rotation of the respective rotating plates 34. A plate 38, a guide member 46 for guiding the slide of each advance / retreat plate 38, and projecting from each through hole 20 at the time of advance of each advance / retreat plate 38 to fit into each clamp hole 19, and at the time of return of each advance / retreat plate 38 And a clamp member 51 made of synthetic resin that returns into each through hole 20.

As shown in FIG. 1, the plurality of clamp holes 19 are respectively formed in the first inclined guide portions 15 above and below the opening front of the pod 1.

As shown in FIGS. 8 and 9, each rotating plate 34 is formed in a disc shape using polyacetal resin or the like, and a bottomed cylindrical operation projection 35 is formed at the center of the surface thereof. An attachment 33 that penetrates the keyhole 21 is detachably inserted into the operation protrusion 35 (see FIG. 10). A pair of cylindrical connecting pins 36 project from the outer periphery of the surface of each rotating plate 34, and each connecting pin 36 is provided with a cylindrical rotating roller 37 having a friction reducing function so as to be rotatable as necessary. It is inserted.

The connection position and dimensions between the door opening / closing device and each rotary plate 34 are determined for each size of the pod 1 in the SEMI standard. For example, the standard of the lid 9 for a 300-mm wafer is defined corresponding to E62 of the SEMI standard.

As shown in FIGS. 3 to 7, the plurality of advance / retreat plates 38 are basically formed into a rectangular plate shape using polyacetal resin or the like, and the central axis in the longitudinal direction passes through the center of the rotary plate 34. , Are slidably disposed on both sides of the inside of the lid 9. The distal end of each of the reciprocating plates 38 is curved in a substantially semi-circular shape toward the side to cover a part of the outer periphery of the surface of the rotating plate 34, and a guide groove 39 to be fitted in the connecting pin 36 or the rotating roller 37. Is perforated.

The guide groove 39 includes a first guide groove 40 having a curvature substantially equal to the trajectory of the connecting pin 36, a second guide groove 41 having a larger curvature than the trajectory of the connecting pin 36, and the first and second guide grooves. And an inflection section 42 connecting the sections 40 and 41. The first guide groove 40 functions to linearly move each of the advance / retreat plates 38 inward and outward of the lid 9 (vertical direction in FIG. 3). Further, the second guide groove 41 guides each of the reciprocating plates 38 to linearly move in a three-dimensional path.

小 Near the center of each of the reciprocating plates 38, a plurality of oval shaped guide long holes 43 are formed at predetermined intervals in the longitudinal direction. Guide pins 44 are formed on both left and right sides of each advance / retreat plate 38 so as to protrude, and a cylindrical rotary roller 45 having a friction reducing function is rotatably fitted into each guide pin 44 as necessary (see FIG. 1). See FIG. 12).

The guide member 46 includes a first guide 47 protruding from the inner surface of the back plate 11 and loosely fitting into the plurality of guide long holes 43, and a second guide 49. The first guide 47 is formed in a cylindrical shape, and a rotatable roller 48 having a friction reducing function is rotatably fitted as required.

The second guide 49 includes a plurality of pairs of opposing guides 50 formed on the inner opposing surfaces of the front plate 10 and the back plate 11, respectively. The opposed curved surfaces of each pair of opposed guides 50 move the reciprocating plate 38 that linearly moves across each guide pin 44 or each rotating roller 45 three-dimensionally move in the front and back directions of the lid 9 (the left and right direction in FIG. 12). Serve as a guide when doing

As shown in FIGS. 11 to 13 (a) and (b), the clamp member 51 includes a rotatable first arm 52 which is rotatably supported via a pin at the tip of the advance / retreat plate 38, and The distal end of one arm 52 and the second arm 53 are integrated with the distal end.

The second arm 53 is bent and formed into a substantially L-shape, and its tip is directed in a direction substantially perpendicular to the first arm 52, and this tip is a fitting holding part 54 for the clamp hole 19, A cylindrical rotary roller 55 rotatably slidably in the clamp hole 19 is rotatably supported by the fitting presser 54 via a pin. The distal end of the second arm 53 is pivotally supported via a pin in the vicinity of the through hole 20 on the inner periphery of the lid 9, and the second arm 53, in other words, the clamp member 51 is connected to the inside and outside of the lid 9. Rotate in the direction.

In the above configuration, when storing wafers, first, a plurality of wafers sliced in the pod 1 are aligned and stored via a rear retainer and a pair of columns 7, and a lid 9 is provided with a seal gasket in front of the opening of the pod 1. 13, the front retainer 12 is pressed against the plurality of wafers, and the locking means 18 is locked to the door opening / closing device of the processing apparatus.

Then, the attachment 33 is inserted into the operation protrusion 35 of the rotating plate 34, and the rotating plate 34 is rotated clockwise by 90 °, and each of the reciprocating plates 38 is guided by the guide member 46 from inside the inside of the lid 9. The first arm 52 protrudes linearly and three-dimensionally inward and outward, and swings.

When the first arm 52 swings in this manner, the second arm 53 swings around the end of the first arm 52 in the inside and outside directions of the lid 9 to expose the fitting holding portion 54 from the through hole 20. The rotating roller 37 of the part 54 is fitted and locked while rollingly contacting the clamp hole 19, and the fixed state of the lid 9 is firmly maintained (see FIGS. 6, 7, and 11).

際 At this time, the fitting holding portions 54 of the respective second arms 53 are fitted and locked in the clamp holes 19 in a state of being substantially aligned with the respective reciprocating plates 38 exhibiting the function of a beam (see FIG. 13). Therefore, the power applied to the rotating plate 34 is transmitted straight and smoothly to the clamp member 51. In addition, the fitting presser portion 54 is circularly moved and is exposed without contacting the through hole 20.

Next, when it is desired to process the stored, stored, or transported wafer, first, the locking means 18 is unlocked by the door opening / closing device of the processing apparatus, and the attachment 33 is inserted into the operation protrusion 35 of the rotating plate 34. Then, the rotating plate 34 is rotated 90 ° counterclockwise, and the respective reciprocating plates 38 are linearly and three-dimensionally returned from the inside and outside of the cover 9 to the first and second arms while being guided by the guide member 46. 52 is returned and rocked.

The return swing of the first arm 52 causes the second arm 53 to swing inward in the inside of the lid 9 to return the press-fitting portion 54 that fits into the through-hole 20 and the lid 9 can be removed. (See FIGS. 10 and 11). At this time, the fitting presser 54 returns in a circular motion without contacting the through hole 20.
When the lid 9 can be opened in this way, the lid 9 is removed from the pod 1 by vacuum suction, and thereafter, a plurality of wafers are sequentially taken out from below the pod 1 and subjected to predetermined processing.

According to the above configuration, the cover 9 is fixed in a state in which the fitting / holding portion 54 of the second arm 53 is substantially in line with the advance / retreat plate 38 during the locking operation. 9 can be fixed. Therefore, it is possible to effectively prevent the power from locally acting on each of the advancing / retreating plates 38 to bend and to reduce the locking force due to the bending, and to sufficiently and sufficiently cover the front of the opening of the pod 1 for a long time. It becomes possible to seal uniformly.

In addition, since the reciprocating plate 38 can be formed using a high-rigidity synthetic resin, the number of metal parts can be reduced or omitted, and prevention of wafer contamination due to generation of metal ions at the time of cleaning or the like can be prevented. Can also be expected. In addition, since the rotating rollers 37, 45, 48, and 55 for rolling contact are rotatably supported at the contact portions, frictional resistance is significantly reduced, and generation of resin powder can be suppressed and prevented. Further, since the second arm 53 is pivotally supported in the vicinity of the through hole 20, the thickness of the lid 9 can be reduced to the minimum necessary.

In addition, since the inclined first and second inclined guide portions 15 and 16 exert a guide guiding action, it is possible to effectively prevent rattling and displacement of the repeatedly used lid 9 with a simple configuration. it can. Therefore, when the lid 9 is fitted, the clamp hole 19 and the through hole 20 are not displaced, and it is not difficult to lock the lid 9. Furthermore, it is possible to very effectively suppress and prevent the generation of contaminants such as particles due to the rubbing of the opening front of the pod 1 and the edge of the lid 9.

The components of the locking means 18 of the above embodiment may be appropriately increased or decreased. Further, although the guide pins 44 are formed to project from the left and right sides of each of the advance / retreat plates 38, cam floors may be provided on the left and right sides of each of the advance / retreat plates 38.

Also, the second arm 53 is bent into a substantially L-shape. However, if the same function and effect can be expected, the second arm 53 can be appropriately bent into a J-shape or the like. Further, the distal end portion of the first arm 52 and the distal end portion of the second arm 53 are integrated. However, if the same operation and effect can be expected, the first arm 52 is attached to the second arm 53. The tip may be rotatably mounted.

1 is a schematic overall perspective view showing an embodiment of a precision substrate storage container according to the present invention. It is a sectional side view showing an embodiment of a precision substrate storage container concerning the present invention. It is a front explanatory view showing lock means in an embodiment of a precision substrate storage container concerning the present invention. It is explanatory drawing which shows the cover body open state of the lock means in embodiment of the precision substrate storage container which concerns on this invention. FIG. 5 is a sectional view taken along line VV of FIG. 4. It is explanatory drawing which shows the lid | cover closure state of the lock means in embodiment of the precision substrate storage container which concerns on this invention. FIG. 7 is a sectional explanatory view taken along line VII-VII of FIG. 6. It is a figure which shows the rotating plate of the lock means in embodiment of the precision substrate storage container which concerns on this invention, (a) figure is a top view, (b) figure is sectional drawing of (a) figure. FIG. 4A is a diagram showing a rotating plate with a rotating roller of locking means in the embodiment of the precision substrate storage container according to the present invention, wherein FIG. 4A is a plan view and FIG. 4B is a cross-sectional view of FIG. It is sectional explanatory drawing which shows the state which the opening / closing mechanism of the processing apparatus was inserted in the rotating plate. It is an important section enlarged sectional view showing a clamp member at the time of closure of a lock means in an embodiment of a precision substrate storage container concerning the present invention. It is a principal part expanded sectional view which shows the cover body, the rotating plate, the reciprocating plate, the guide member, and the clamp member in embodiment of the precision substrate storage container which concerns on this invention. It is a figure which shows the clamp member of the lock means in embodiment of the precision substrate storage container which concerns on this invention, (a) is a top view, (b) is a side view of (a).

Explanation of reference numerals

1 pod (container body)
9 Lid 10 Front plate 11 Back plate 13 Seal gasket 14 Guide means 15 First inclined guide part 16 Second inclined guide part 18 Lock means 19 Clamp hole 20 Through hole 21 Key hole 34 Rotating plate (rotating body)
36 connecting pin 37 rotating roller (friction reducing member)
38 Forward / backward moving plate (forward / backward moving member)
39 Guide groove 44 Guide pin 45 Rotary roller (friction reducing member)
46 guide member 47 first guide member 48 rotating roller (friction reducing member)
49 Second Guide Member 51 Clamp Member 52 First Arm 53 Second Arm 54 Fitting Holder 55 Rotary Roller

Claims (3)

A front open box type container body for storing precision substrates, an openable and closable hollow lid which is fitted and sealed in the opening front of the container body via a seal gasket, and a lock for fixing the lid in a closed state A precision substrate storage container comprising:
A rotating body which is provided in the lid, and which rotates the locking means by an external operation through a keyhole on the surface of the lid, and a rotation hole of the rotating body; An advancing / retracting member that moves in and out of the lid inside and out, has a friction reducing function, and is fitted into a clamp hole of the container body from a through hole provided in the lid peripheral surface when the advancing / retracting member advances, A precision substrate storage container, comprising: a rotating roller that is disengaged from the clamp hole of the container body and returns to the through hole of the lid when the reciprocating member is retracted. A connecting projection provided on the rotating body and connected to the moving member, linearly moving the moving member at the time of rotation of the rotating body, and a guiding member for the moving member provided inside the lid body,
The precision substrate storage container according to claim 1, wherein a friction reducing member having a friction reducing function is rotatably attached to a contact portion between the reciprocating member and the connecting protrusion and / or a contact portion between the reciprocating member and the guide member. A clamp member is fitted into the clamp hole of the container body from the through hole of the lid when the advance / retreat member advances, and is released from the clamp hole of the container body and returns to the through hole of the lid body when the advance / retreat member retracts,
The clamp member includes a first arm rotatably attached to the reciprocating member, and a second arm attached to the first arm, and bending the second arm to rotate the distal end thereof. The precision substrate storage container according to claim 1 or 2, wherein the container is a fitting holding portion provided with a roller, and the second arm is supported near a through hole in the lid so as to be rotatable in and out of the lid.

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