JP2013004852A - Substrate storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate storage container which can stabilize locking by a locking mechanism, and prevent a fear of deformation or damage of a container body, a cover body, and the locking mechanism.SOLUTION: A substrate storage container includes: a container body 1 capable of aligning and storing a semiconductor wafer; a cover body 10 fitted with an opening front surface 5 of the container body 1; and a locking mechanism 30 for locking the fitted cover body 10. On a rotating operation reel of the locking mechanism 30, a cam groove portion for advancing/retreating an advancing/retreating link 38 is formed. The deformation of the cam groove portion is prevented by a deformation preventive rib. When the locking mechanism 30 carries out locking, a rotating operation reel 31 rotates in a locking direction to advance the advancing/retreating link 38 in a peripheral wall direction of the cover body 10, and a locking latch 45 linearly enters a locking hole 7 of the container body 1 from the cover body 10 while being guided by a guide reinforcing block 51. The locking latch 45 entering the locking hole 7 of the container body 1 rocks in a thickness direction of the cover body 10 while being guided by the guide reinforcing block 51 to come into contact with a front surface side wall surface 8 defining the locking hole 7.

Description

  The present invention relates to a substrate storage container used when storing, storing, transporting, and transporting a substrate made of a semiconductor wafer or the like.

  A conventional substrate storage container is not shown, but a container body for aligning and storing a plurality of semiconductor wafers, a lid body fitted in a sealed state on the opened front surface of the container body, and an open front surface of the container body. And a locking mechanism that locks the fitted lid (see Patent Documents 1 and 2).

  The container body is formed into a front open box from a predetermined molding material, and a plurality of locking holes for a locking mechanism are formed at intervals on the inner periphery of the opened front. The lid body includes a substantially dish-shaped lid body that is fitted to the front surface of the container body, and a separate cover plate is covered on the opened front surface of the lid body, and the lid body has a peripheral wall. A plurality of in / out holes for the locking mechanism are perforated at intervals. The thickness of the lid body from the lid body to the cover plate is determined by the SEMI standard, which is a voluntary standard in the industry.

  The locking mechanism includes a pair of left and right rotational operation plates that are pivotally supported by the lid body of the lid body and are rotated from the outside of the cover plate, and a plurality of slide plates that slide in the vertical direction within the lid body by the rotation of each rotational operation plate And a plurality of locking claws that slide in and out of the lid holes by sliding on each slide plate and come in contact with and away from the locking holes in the container body, preventing the lid body from falling off the front of the container body To function.

  The locking claw is a type that is pivotally supported in the thickness direction of the lid by a metal pin in the vicinity of the cover hole and the tip of the slide plate, and is pivotally supported at the tip of the slide plate. A type that moves while being guided by a guide groove by being pressed by a slide plate is known.

  In the above, when the lid is fitted to the open front of the container body and locked by the locking mechanism, the cover body is inserted into the front of the container body shallowly in view of the thickness of the lid. (The lid is not completely fitted at this stage), and the rotation operation plate of the locking mechanism is rotated in the locking direction so that the locking claw is inserted into each locking hole of the container body. Just do it.

  Then, the tip of the locking claw swings while gradually projecting in the direction of the front side wall surface defining each locking hole, and the front end of the locking claw comes into contact with the front side wall surface of the locking hole, and the lid is placed inside the front of the container body. The body is gradually pulled in, and the locking claw is finally firmly inserted and locked in each locking hole, and the lid is completely tightly fitted, so that the lid is fitted to the front of the container body and locked by the locking mechanism. Can do.

JP 2003-133405 A JP 2006-303015 A

  Since the conventional substrate storage container is configured as described above, it has the following problems. First, if the locking claw is of a type that swings in the thickness direction of the lid, the locking claw protrudes and swings at the same time, and the tip of the locking claw of the locking mechanism is placed on the front side wall surface of the locking hole of the container body. Since the lid gradually comes into contact with the front of the container body and the locking claw is not sufficiently in contact with the locking hole, the lid may not be sufficiently pulled. There is a problem that the locking by the mechanism becomes unstable, and the locking holes of the container body and the locking claws of the locking mechanism are damaged.

  In addition, since the locking claw is pivotally supported in the vicinity of the in / out hole of the lid, the strength in the vicinity of the in / out hole of the lid cannot be ensured. For this reason, if a large locking force is applied during locking, the lid and the slide plate of the locking mechanism may be deformed.

  Next, in the case of a type in which the locking claw moves while being guided by the guide groove, the locking claw must be formed to a predetermined length, and if a large locking force is applied during locking, the slide plate or the locking claw is deformed. There is a problem that it becomes easy to do. In view of this point, if the locking claw or the like is formed thick to prevent deformation, a new problem arises that the amount of stroke of the locking claw decreases.

  The present invention has been made in view of the above, and an object of the present invention is to provide a substrate storage container that can stabilize locking by a locking mechanism and eliminate the risk of deformation and damage of the container body, lid, and locking mechanism. .

In the first invention of the present invention, in order to solve the above-mentioned problem, a lid for closing the opening of the container main body, and a locking mechanism provided on the lid,
The locking mechanism includes a rotary operation body that can be rotated by an external operation, and a first engagement portion that engages with the rotation operation body, and an advancement / retraction body that moves inward and outward of the lid by the movement of the rotation operation body, Have
The rotary operation body comes into contact with the second engagement portion that engages with the first engagement portion of the advance / retreat body, and the end portion on the rotation operation body side of the advance / retreat body, and the locking mechanism locks the lid body on the container body. It is characterized by having a deformation preventing part for preventing the bending of the advance / retreat body.

The locking mechanism is attached to the locking body that can be rotated in the thickness direction of the lid that comes in contact with and separates from the locking hole in the inner periphery of the opening of the container body by the advance and retreat of the advance and retreat body, Including a guide reinforcement body that regulates the movement of the body,
When locking the locking mechanism, the rotating operation body rotates in the locking direction to advance the advancing / retracting body to the outside of the lid, and the locking body is linearly guided from the lid into the locking hole of the container body while being guided by the guide reinforcement. The locking body that has entered into the locking hole of the container body rotates in the thickness direction of the lid while being guided by the guide reinforcing body, and contacts the wall surface that defines the locking hole.
When unlocking the locking mechanism, the rotary operation body rotates in the unlocking direction to move the forward / backward moving body inwardly of the lid, and the locking body is rotated and returned in the thickness direction of the lid while being guided by the guide reinforcement. The locking body separated from the wall surface of the locking hole can be receded linearly from the locking hole of the container body to the lid body while being guided by the guide reinforcing body.

The lid includes a lid main body fitted into the opening of the container main body, and a cover plate that covers the opening surface of the lid main body, and either the lid main body or the cover plate has a storage for a locking mechanism. An enclosing wall is formed, the lid body is formed in a substantially dish-shaped cross section, a locking mechanism is disposed therein, and an intrusion hole for a locking body of the locking mechanism can be provided in the peripheral wall of the lid body.
Further, the rotary operating body of the locking mechanism includes a rotatable key slot that is supported in the housing enclosure wall of the lid body and is operated from the outside of the cover plate, and an end of the forward / backward moving body provided at the peripheral edge of the key slot. A cam groove portion connected to the portion, and a deformation preventing portion for the advancing / retreating body can be formed in the cam groove portion.

Further, the rotation operating body of the locking mechanism is provided with a cam groove for advancing / retreating of the advancing / retracting body, and the deformation preventing part is prevented from being deformed by the cam groove,
The advancing / retracting body of the locking mechanism is formed in a plate that is directed from the vicinity of the center of the lid toward the circumferential wall, and a support groove for the locking body is formed at the tip of the plate. Each of the guide grooves is formed, and at the end of the plate, a convex portion that fits into the cam groove portion of the rotary operation body is formed, and the convex portion and the deformation preventing portion of the cam groove portion are brought into contact with each other,
The lock body is bent into a substantially L-shaped cross section, and a support shaft that is rotatably supported by the support groove of the advancing / retracting body is formed in the vicinity of the bent portion so that one bent side of the lock body can be slid into the guide reinforcement body. And the other bent side can be brought into and out of the locking hole of the container body, the first convex portions for the guide reinforcing body are respectively formed on both sides of the distal end of the bent side of the locking body, Second convex portions for the guide reinforcing body can be formed on both sides of the bent side, respectively.

  Furthermore, the guide reinforcing body of the locking mechanism is formed in a substantially U-shaped cross section that can be fitted to the locking body, and a rotation-permissible recess that is rotatably fitted to the front end portion of one of the bent sides of the locking body at the inside front thereof An extension piece is provided inside the guide reinforcement body, which is provided with a positioning elastic member for a locking body and is adjacent to the rotation-permissible recess, and is slidably fitted into the guide groove of the advancing / retreating body on both sides of the rear portion of the guide reinforcement body. Each side wall of the guide reinforcement body is formed with a slide groove that is slidably fitted to the first convex portion of the locking body, and the second convex portion of the locking body is slidably supported. It is possible to make it.

Further, in the second invention of the present invention, in order to solve the above-mentioned problem, a container main body capable of storing a substrate, a lid fitted to the opening of the container main body, and an opening of the container main body are fitted. A locking mechanism for locking the lid,
The lid includes a lid main body fitted into the opening of the container main body and a cover plate covering the opening surface of the lid main body, and the cover plate is formed with an inclined protrusion and a protrusion for the locking mechanism,
The locking mechanism is supported by the lid and is rotated by an external operation, and the rotary operating body moves forward and backward in the direction of the lid, and the tip of the locking hole on the inner periphery of the opening of the container body The first cam projection is formed on the advancement / retraction body to incline the tilting projection of the lid body and incline the distal end side of the advancement / retraction body in the thickness direction of the lid body. And forming a second cam projection that interferes with the projection of the lid body and inclines the distal end side of the advance / retreat body in the thickness direction of the lid body,
When locking the locking mechanism, the rotating operation body rotates in the locking direction to advance the advancing / retracting body outward of the lid, and the locking body enters the locking hole of the container body from the lid, and enters the locking hole of the container body. The approaching locking body inclines in the thickness direction of the lid and contacts the wall surface defining the locking hole,
When unlocking the locking mechanism, the rotary operation body rotates in the unlocking direction, the advancing / retracting body is retracted inward of the lid body, the locking body returns to the thickness direction of the lid body, and is separated from the wall surface of the locking hole, The locking body that is separated from the wall surface of the locking hole is retreated from the locking hole of the container body to the lid.

The inclined projection is formed on the cover plate of the lid body in a substantially concave shape and is positioned near the end of the advancing / retracting body. Of the pair of upper and lower opposing walls that define the recessed surface of the inclined projection, The opposing wall located on the peripheral edge side can be formed on a tapered inclined surface.
Further, the rotation operating body of the locking mechanism can be provided with a cam groove for advancing / retreating of the advancing / retracting body, and a deformation preventing portion for preventing the cam groove from being deformed.

  Here, the substrate in the claims includes a plurality of semiconductor wafers, glass plates, and the like having at least φ200, 300, and 450 mm. The container body may be a top open box type, a bottom open box type, or a front open box type. Further, the cover plate of the lid can be provided with an automatic operation hole and a manual operation hole for the rotation operation body of the locking mechanism.

  There is no particular limitation on the number of rotating operation bodies, advancement / retraction bodies, locking bodies, and guide reinforcing bodies of the locking mechanism. A manual operation portion operated from a manual operation hole of the cover plate can be provided on the peripheral portion of the key slot of the rotary operation body. The locking body rotates in the thickness direction of the lid, and this rotation includes rotation and swinging. The positioning elastic member corresponds to at least one rubber, a leaf spring, a coil spring, and the like.

  According to the first aspect of the present invention, when a lid is fitted into the opening of the container body and locked by the locking mechanism, for example, the lid is shallowly fitted into the opening of the container body, and the locking mechanism is rotated. Rotate body in locking direction. Then, the rotating operation body of the locking mechanism rotates in the locking direction to advance the advancing / retracting body outwardly of the lid body, and the distal end portion of the advancing / retreating body and the guide reinforcing body approach to advance the locking body outwardly of the lid body. The locking body standing upright from the lid projects and projects linearly into the locking hole of the container body.

  When the locking body linearly protrudes into the locking hole of the container body and becomes rotatable, the upright locking body rotates in the thickness direction of the lid. Then, the locking body rotates and contacts the wall surface that defines the locking hole of the container body, the lid body is gradually drawn into the opening of the container body, and the locking body finally strongly interferes with the locking hole and the lid body is Fit completely. As described above, since the locking body protrudes and rotates not simultaneously but continuously after the locking body protrudes, the lid can be appropriately locked to the opening of the container body.

  According to the second aspect of the present invention, when a lid is fitted to the opening of the container body and locked by the locking mechanism, for example, the lid is shallowly fitted into the opening of the container body, The rotary operation body is rotated in the locking direction. Then, the rotating operation body of the locking mechanism rotates in the locking direction to advance the advancing / retracting body to the outside of the lid body, and the locking body which is the tip of the advancing / retreating body advances to the outside direction of the lid body, and locks from the lid body. The body protrudes into the locking hole of the container body.

  At this time, the first cam protrusion is guided to the inclined surface of the inclined protrusion and the distal end side of the advancing / retracting body is inclined toward the lid main body, and the second cam protrusion facing the tip of the protrusion is displaced from the protrusion, and is advanced and retracted. The tip of the moving body is inclined toward the cover plate opposite to the end. When the second cam protrusion contacts the protrusion, the inclination of the forward / backward moving body in the lid thickness direction is restricted, the locking body comes into contact with the wall surface that defines the locking hole, and the lid is in the opening of the container body. The lock body is finally pulled into the lock hole and the cover body is completely fitted into the lock hole so that the cover body is completely fitted, so that the cover body can be fitted into the opening of the container body and locked by the lock mechanism.

According to the first aspect of the present invention, there is an effect that the locking by the locking mechanism can be stabilized, and the risk of deformation or damage of the container body, the lid, and the locking mechanism can be eliminated.
According to the second aspect of the present invention, the storage enclosure wall for the locking mechanism prevents the rotation operating body, the advancing / retracting body, the locking body, and the guide reinforcing body of the locking mechanism from falling off, or smoothing these operations. The strength of the lid body can be improved.

  According to the invention of claim 4 or 7, at least deformation of the cam groove can be suppressed by the deformation preventing portion of the rotary operation body. In addition, when a strong load is applied to the locking body, there is a possibility that the advancing / retreating body may warp in the thickness direction of the lid, but a strong load acting on the locking body or a moving / retreating body is generated in the deformation prevention portion of the rotating operation body. When stress is applied, a load can be applied linearly from the rotary operation body to the locking body. Therefore, it is possible to prevent the advance / retreat body from warping in the thickness direction of the lid.

  In addition, according to the inventions of claims 4 and 5, the locking body rotates in the locking hole of the container body while projecting, and the locking body does not come into contact with the wall surface of the locking hole, but in the locking hole of the container body. Projecting linearly, and then the locking body first rotates and contacts the wall surface of the locking hole, thereby drawing the lid into the opening of the container body. It can be inserted.

  Furthermore, according to the second invention of the present invention, the locking by the locking mechanism can be stabilized, the risk of deformation or damage to the container body, the lid, and the locking mechanism can be eliminated. It is possible to simplify the configuration and reduce the number of parts by omitting the locking body and the guide reinforcement body.

It is a whole perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is front explanatory drawing which shows typically embodiment of the substrate storage container which concerns on this invention. It is the III-III sectional view taken on the line of FIG. It is a perspective explanatory view showing typically the lid body of the lid in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the locking mechanism in embodiment of the substrate storage container which concerns on this invention. It is side explanatory drawing which shows typically the locking mechanism in embodiment of the substrate storage container which concerns on this invention. It is a fragmentary perspective view which shows typically the rotation operation reel of the locking mechanism in the embodiment of the board | substrate storage container which concerns on this invention, and the terminal part of a forward / backward link. It is a perspective explanatory view showing typically the rotation operation reel of the locking mechanism in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically an advancing / retreating link of a locking mechanism in an embodiment of a substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the locking latch of the locking mechanism in the embodiment of the substrate storage container according to the present invention. It is a perspective explanatory view showing typically the guidance reinforcement block of the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically the inside of a guide reinforcement block of a locking mechanism in an embodiment of a substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the unlocking state of the locking mechanism which removed the cover plate from the cover main body in embodiment of the substrate storage container which concerns on this invention. It is a partial section explanatory view showing typically the unlocking state of the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is front explanatory drawing which shows typically the state which started rotating the rotation operation reel of the locking mechanism in embodiment of the board | substrate storage container which concerns on this invention in the locking direction. It is a partial cross section explanatory view showing typically the state where rotation operation reel of the locking mechanism in the embodiment of the substrate storage container concerning the present invention began to rotate in the locking direction. It is front explanatory drawing which shows typically the locking state of the locking mechanism in embodiment of the board | substrate storage container which concerns on this invention. It is a partial section explanatory view showing typically the locking state of the locking mechanism in the embodiment of the substrate storage container concerning the present invention. It is a perspective explanatory view showing typically a lid main part and a locking mechanism in an embodiment of a substrate storage container concerning the 2nd invention of the present invention. It is a perspective explanatory view showing typically the locking mechanism in the embodiment of the substrate storage container concerning the 2nd invention of the present invention. It is a fragmentary sectional explanatory view showing typically the state before locking of a locking mechanism in an embodiment of a substrate storage container concerning the 2nd invention of the present invention. It is a fragmentary sectional view showing typically the state after locking of a locking mechanism in an embodiment of a substrate storage container concerning the 2nd invention of the present invention.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 19, the substrate storage container in the present embodiment is capable of aligning and storing a plurality of semiconductor wafers. A container body 1, a lid body 10 fitted in a sealed state on the front surface 5 opened of the container body 1, and a locking mechanism 30 for locking the lid body 10 fitted on the front surface 5 of the container body 1 are provided. When the locking mechanism 30 is locked, the rotary operation reel 31 rotates in the locking direction to advance the forward / backward link 38 in the direction of the peripheral wall of the lid 10, and the locking latch 45 is guided from the lid 10 while being guided by the guide reinforcement block 51. The locking body 45 linearly enters the locking hole 7 of the container body 1, and swings in the thickness direction of the lid 10 while being guided by the guide reinforcing block 51, and contacts the front side wall surface 8 of the locking hole 7. To do.

  The semiconductor wafer is not particularly limited. For example, from the viewpoint of increasing the memory capacity, reducing the chip size accompanying the reduction of the minimum processing line width formed in the semiconductor component, and improving the productivity, the thickness of φ450 mm is thin. A brittle and easily warped silicon wafer is used.

  The container body 1 and the lid body 10 are each formed by a combination of a plurality of parts, each of which is injection-molded with a molding material containing a predetermined resin. Examples of the predetermined resin of the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polybutylene terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof. In order to ensure conductivity, these thermoplastic resins are added with a conductive substance such as carbon fiber, carbon powder, carbon nanotube, or conductive polymer.

  As shown in FIGS. 1 to 3, the container body 1 is formed into a front open box type in which the front surface 5 is opened horizontally, and the lid attached to the semiconductor processing apparatus with the opened front surface 5 oriented in the horizontal horizontal direction. It is positioned and mounted on the body opening / closing device, or washed with a washing liquid in a washing tank. The container body 1 is provided with a pair of left and right support pieces 2 for supporting the semiconductor wafer substantially horizontally on the inner sides of the container body 1, in other words, on the inner surfaces of the side walls 9. Arranged at a predetermined pitch in the direction, each support piece 2 is formed in an elongated plate shape that supports the peripheral side portion of the semiconductor wafer.

  Positioning tools for positioning the container body 1 are disposed on both sides of the front part and the center of the rear part of the bottom plate of the container body 1. Further, a separate bottom plate 3 is screwed horizontally to the bottom plate of the container body 1 via a screw tool, and a plurality of positioning tools are respectively exposed from the bottom plate 3. At the center of the top plate of the container main body 1, a transport top flange 4 gripped by a factory ceiling transport mechanism is detachably mounted.

  A peripheral portion of the front surface 5 of the container body 1 is formed to bulge through a holding rib on a rim flange 6 which is bent outward and extends, and a detachable lid body 10 is formed in the rim flange 6 by a lid body opening / closing device. Press fit to fit. Locking holes 7 for the locking mechanism 30 are respectively formed in the inner periphery of the front surface 5 of the container body 1, in other words, on both the upper and lower sides of the inner peripheral surface of the rim flange 6. The wall surface closest to the outside is the front side wall surface 8.

  The rear surface of the inner surface of both side walls 9 of the container body 1, specifically, the position located near the rear portion of the support piece 2 is the surface of the support piece 2 when the lid 10 is fitted to the front surface 5 of the container body 1. It contacts both sides of the peripheral edge of the semiconductor wafer levitated from the surface to effectively regulate the position of the semiconductor wafer and prevent rattling.

  As shown in FIGS. 1 to 4, the lid body 10 is a front rectangular lid body 11 fitted to the opened front surface 5 of the container body 1, and is covered with screws or the like on the opened front surface of the lid body 11. And a separate cover plate 19. The lid body 11 is formed in a substantially dish-shaped cross section, and its four corners are rounded and chamfered, and locking mechanisms 30 are disposed on both sides of the lid body 11 and a storage surrounding wall 12 for the locking mechanism 30 is defined. .

  The storage wall 12 is a pair of left and right arc ribs 13 that are opposed to each other at the center on both sides of the inside of the lid main body 11 and face each other at an interval, and the peripheral wall direction of the lid body 10 from the ends of the pair of arc ribs 13. And a pair of left and right linear ribs 14 extending linearly. A split structure support rib 15 and a pair of left and right alignment blocks 16 are disposed between the pair of arc ribs 13, and the alignment blocks 16 are disposed on both the left and right sides of the support rib 15 at intervals. (See FIG. 6).

  A plurality of guide bosses 17 are arranged at intervals in the longitudinal direction between the pair of linear ribs 14. Each guide boss 17 is formed in a substantially cylindrical shape and is selectively fitted with a rotatable roller or the like for reducing friction.

  On both the upper and lower sides of the peripheral wall of the lid main body 11, the recesses 18 that face the locking holes 7 of the container body 1 are respectively drilled, and the recesses 18 communicate with the open ends between the pair of linear ribs 14. Further, a front retainer that elastically presses and clamps the front edge of the semiconductor wafer housed in the container body 1 with an elastic piece is attached to the back surface of the lid body 11. A frame-shaped gasket that is deformed by being pressed against the inner periphery of the front surface 5 of the container body 1 is tightly fitted. This gasket is molded using, for example, a polyester-based, polystyrene-based, or polyolefin-based thermoplastic elastomer having excellent weather resistance, electrical insulation, compression characteristics, and the like.

  The cover plate 19 is formed in a substantially rectangular front shape with rounded chamfered corners, and an automatic operation hole 20 for the rotation operation reel 31 of the locking mechanism 30 and a pair of upper and lower manual operation holes 21 are respectively provided near the center of both sides. Perforated. The automatic operation hole 20 is formed in a front rectangular shape and is positioned between a pair of upper and lower manual operation holes 21, and each manual operation hole 21 is formed in a substantially fan-shaped front surface.

  As shown in FIG. 2, selective reinforcing ribs 22 that improve the strength of the lid 10 are formed vertically or horizontally on either the inside of the lid body 11 or the back surface of the cover plate 19. In this case, the reinforcing rib 22 is configured to have a structure in which a bar is combined with the storage wall 12, or is configured to have a structure in which a bar is combined with a storage wall having substantially the same structure as the storage wall 12. To be molded.

  As shown in FIGS. 2, 5 to 7, and the like, the locking mechanism 30 includes a pair of left and right rotation operation reels 31 that are supported by the storage enclosure wall 12 of the lid 10 and rotate by an external operation, and each rotation operation. A plurality of advancing and retracting links 38 that move forward and backward in the vertical direction of the lid body 10 by the rotation of the reel 31 and a plurality of contacts that are in contact with and separated from the locking holes 7 on the inner periphery of the front surface 5 of the container body 1 by the advancing and retracting movements of the respective advancing and retracting links 38. The locking latch 45 includes a plurality of guide reinforcing blocks 51 that are attached to the distal end portion of each forward / backward link 38 and the locking latch 45 to restrict the operation of the locking latch 45 and are configured not to deviate from the SEMI standard. The The locking mechanism 30 is formed using, for example, polybutylene terephthalate or polyacetal.

  As shown in FIGS. 5, 6, 8, 9, etc., each rotation operation reel 31 is surrounded by the arc rib 13 of the storage enclosure wall 12 via a gap and is operated from the automatic operation hole 20 of the cover plate 19. The key slot 32 is rotatable, and a pair of cam groove portions 33 connected to the distal end portion of the advance / retreat link 38 are eccentrically arranged on a part of the peripheral portion of the key slot 32. A pair of hollow manual operation portions 34 that are operated by a finger from the manual operation hole 21 of the cover plate 19 are paired with the remaining portion of the peripheral edge portion of the 32.

  The key slot 32 is formed in, for example, a cylindrical shape having a substantially U-shaped cross section that is rotatably fitted to and supported by the support rib 15 in the storage enclosure wall 12, and an elongated key groove 35 is formed on the surface of the key slot 32. An operation key of the lid opening / closing device that passes through the automatic operation hole 20 of the cover plate 19 is inserted into the groove 35.

  Each cam groove 33 is curved and formed in a substantially arc shape, and deformation preventing ribs 36 for the advance / retreat link 38 are integrally formed in the front and back direction in the vicinity of the inner peripheral side. On the outer peripheral side of the cam groove portion 33, a flexible interference piece 37 that interferes with the alignment block 16 in the storage enclosure wall 12 is bent and integrally formed. The interference piece 37 is formed in the groove of the alignment block 16. By fitting, excessive rotation of the rotary operation reel 31 more than necessary is restricted. The deformation prevention rib 36 is integrally formed in the height direction of the key slot 32 and functions to suppress and prevent deformation of at least the cam groove portion 33.

  As shown in FIG. 5 to FIG. 8, FIG. 10, etc., each forward / backward link 38 is sandwiched by a pair of linear ribs 14 of the storage enclosure wall 12 with a gap and directed from the vicinity of the center of the lid body 10 toward the peripheral wall. A plurality of long holes 39 are perforated on the center line in the longitudinal direction at intervals, and each long hole 39 is slidably fitted to the guide boss 17 of the storage enclosure wall 12. To regulate the amount of movement. Between these long holes 39 and the guide bosses 17, rollers, bearings and the like that reduce friction and resistance are selectively interposed.

  A substantially L-shaped receiving claw 40 is formed on both sides of the front and rear ends of the concave and convex portions of the advance / retreat link 38, and substantially L-shaped sections extending in the longitudinal direction are formed on both side surfaces near the front end portion of the advance / retreat link 38. Each of the pieces 41 is integrally formed, and the plurality of receiving claws 40 and the distal end portion of the partition piece 41 form a support groove 42 for the locking latch 45. A guide groove 43 for the guide reinforcing block 51 is formed in the longitudinal direction between the side surface of the forward / backward link 38 near the tip and the partition piece 41.

  A cylindrical connecting pin 44 protrudes from the narrowed end portion of the advance / retreat link 38. The connecting pin 44 is slidably fitted into the cam groove portion 33 of the rotary operation reel 31 from the back surface side to rotate the rotary operation reel. It functions to convert 31 rotational motion into linear motion. The peripheral surface of the connecting pin 44 is in sliding contact with the deformation preventing rib 36 of the cam groove 33, and transmits a load acting on the locking latch 45 during locking to the deformation preventing rib 36 (see FIG. 8). By this transmission, the deformation preventing rib 36 of the cam groove portion 33 prevents the forward / backward link 38 from being bent during locking.

  Each of the locking latches 45 is formed in a plate bent in a substantially L-shaped cross section, as shown in FIGS. 5 to 7, FIG. A support shaft 46 that is rotatably fitted and supported is integrally formed. The support shaft 46 linearly protrudes and retracts from the retracting hole 18 of the lid 10 and swings and presses against the locking hole 7 of the container body 1.

  The distal end portion of one bent side 47 of the locking latch 45 is formed in a substantially cylindrical shape, and first convex portions 48 for the guide reinforcing block 51 are integrally formed on both sides of the distal end portion in a cylindrical shape. In addition, second convex portions 50 for the guide reinforcing block 51 are formed on both side surfaces of the other bent side 49 so as to protrude in a columnar shape. Of the pair of bent sides 47, 49 of the locking latch 45, one bent side 47 slidably contacts the guide reinforcing block 51, and the other tapered bent side 49 protrudes from the front portion of the guide reinforcing block 51. It protrudes in the locking hole 7 of the container main body 1, and press-contacts (refer FIG. 6, FIG. 7).

  When the locking mechanism 30 is locked, the locking latch 45 moves forward from the rear of the guide reinforcing block 51 as the advance / retreat link 38 advances, and can swing when the advancement is restricted (see FIG. 6, when the locking mechanism 30 is unlocked, it swings as the forward / backward link 38 moves backward, and when it returns to its original position, it moves backward from the front of the guide reinforcing block 51.

  Each guide reinforcing block 51 is formed in a substantially U-shaped cross section in which side walls 57 are disposed on both sides of a flat bottom plate 52, as shown in FIGS. 5 to 7, FIG. 12, FIG. A plurality of positioning elastic members 54 for the locking latch 45 are juxtaposed in the left-right direction on the bottom plate 52 and are slidably fitted to the distal end portion of the advance / retreat link 38 and the locking latch 45, respectively. Between the end portions of the lid body 10, located near the intrusion hole 18 of the lid body 10, and contacts the cover plate 19 of the lid body 10.

  A rocking allowance groove 53 having a substantially semi-cylindrical cross section is formed in the left-right direction in front of the inner surface of the bottom plate 52, and one bent side 47 of the locking latch 45 that has passed the positioning elastic member 54 over the rocking allowance groove 53 is formed. The tip portion is fitted and can be rotated. Each positioning elastic member 54 is made of, for example, an elastically deformable leaf spring or an elastomer that is obtained by cutting out a part of the bottom plate 52, and is provided from the center to the rear of the bottom plate 52 to be adjacent to the swing allowable groove 53. The distal end portion of one bent side 47 fitted to the swing allowing structure 53 is positioned, and the locking latch 45 is allowed to swing around the distal end portion of the one bent side 47.

  On both sides of the rear portion of the bottom plate 52, substantially L-shaped extending pieces 55 are bent, and each extending piece 55 is engaged with the vicinity of the end portion of the partition piece 41 so as to be able to contact and separate. In the vicinity of the bent portion of the elongated piece 55, a locking notch 56 for elastically locking to the lid body 11 of the lid 10 is selectively formed.

  Both side walls 57 of the guide reinforcement block 51 are respectively pierced in the front-rear direction by slide grooves 58 that are slidably fitted to the first protrusions 48 of the locking latch 45. The second convex portions 50 are slidably supported. Each slide groove 58 is formed in an oval shape that extends in the front-rear direction of the guide reinforcing block 51, and the tip end portion is formed with an enlarged diameter by integrating with the end of the swing allowing groove 53 of the bottom plate 52. When the first convex portion 48 of the locking latch 45 comes into contact with the locking latch 45, the linear sliding of the locking latch 45 is restricted, and the locking latch 45 becomes swingable only in the thickness direction of the lid body 10. .

  Between the front portions of the side walls 57 of the guide reinforcement block 51, a front wall 59 that restricts excessive sliding of the locking latch 45 adjacent to the rocking allowance groove 53 of the bottom plate 52 is installed lower than the side wall 57. A plate-shaped receiving flange 60 is formed on the outer surface of each side wall 57 so as to slidably contact the partition piece 41 of the advance / retreat link 38, and the extension piece 55 is integrated with the rear portion of each side wall 57.

  Such a guide reinforcing block 51 is relatively close to the tip of the advance / retreat link 38 when the lock mechanism 30 is locked, and advances and retracts link when the lock mechanism 30 is unlocked. As the cover 38 moves backward, it moves away from the tip of the advance / retreat link 38 relatively.

  In the above configuration, when the lid body 10 is fitted to the open front surface 5 of the container body 1 and locked by the locking mechanism 30, the lid body 10 is shallowly fitted into the front surface 5 of the container body 1 to cover the cover plate 19. The key groove that protrudes slightly to the outside, and then inserts the operation key of the lid opening / closing device into each automatic operation hole 20 of the lid 10, and points in the lateral direction of each rotary operation reel 31 of the locking mechanism 30. The operation key of the lid opening / closing device is inserted into 35 and gradually rotated counterclockwise, that is, in the locking direction (see FIGS. 16 and 17).

  Then, each rotation operation reel 31 of the locking mechanism 30 is gradually rotated in the locking direction to advance the forward / backward link 38 in the direction of the peripheral wall of the lid 10, and the front end portion of each forward / backward link 38 and the guide reinforcing block 51 are connected. The locking latch 45 advances toward the peripheral wall direction of the lid 10 close to each other, and the other bent side 49 of each locking latch 45 protrudes from the retracting hole 18 of the lid 10 to lock the locking hole 7 of the container body 1. It protrudes linearly (see FIGS. 16 and 17).

  At this time, the locking latch 45 is linearly guided to the surfaces of the slide groove 58 and both side walls 57 of the guide reinforcing block 51, and one bent side 47 is formed on the inner surface of the bottom plate 52 of the guide reinforcing block 51 and the plurality of positioning elastic members 54. Slidably contact and advance relatively in the direction of the front wall 59 of the guide reinforcement block 51. Therefore, the locking latch 45 slides linearly in a state where the swinging of the lid body 10 in the thickness direction is restricted.

  The other bent side 49 of the locking latch 45 protrudes linearly into the locking hole 7 of the container body 1, and one bent side 47 of the locking latch 45 gets over the positioning elastic member 54 and fits into the swing allowing structure 53. When the locking latch 45 is in a swingable state for the first time, the linear slide of the locking latch 45 is restricted, and the locking latch 45 draws an arc around the tip of the one bent side 47 while drawing an arc. Swings in the thickness direction.

  Then, the other bent side 49 of the locking latch 45 is brought into rocking contact with the front side wall surface 8 that defines the locking hole 7, and the lid body 10 is gradually drawn into the front surface 5 of the container body 1. When 45 is finally firmly inserted and locked, and the lid 10 is completely tightly fitted, the lid 10 can be fitted to the front surface 5 of the container body 1 and locked by the locking mechanism 30 (FIG. 18). FIG. 19).

  At this time, a strong load acts on the other bent side 49 of the locking latch 45, but the rotary operation reel 31 and the locking latch 45 are stretched against each other via the forward / backward link 38, and are opposite in the height direction of the lid 10. Since the force acts, deformation of the lid 10 in the thickness direction is effectively prevented.

  Further, if a strong load is applied to the other bent side 49 of the locking latch 45, the forward / backward link 38 may be bowed in the thickness direction of the lid 10, but the deformation preventing rib 36 of the rotary operation reel 31 is not formed. Since a strong load acting on the locking latch 45 and a stress generated on the connecting pin 44 are received, the load can be applied linearly from the rotary operation reel 31 to the locking latch 45. Accordingly, the advance / retreat link 38 does not bow in the thickness direction of the lid 10.

  Next, when the locked locking mechanism 30 is unlocked and the lid 10 fitted to the front surface 5 of the container body 1 is removed, the operation key of the lid opening / closing device is inserted into each automatic operation hole 20 of the lid 10. The operation key of the lid opening / closing device is inserted into the key groove 35 directed to the vertical direction of each rotary operation reel 31 and is gradually rotated in the clockwise direction, that is, the unlocking direction.

  Then, each rotation operation reel 31 of the locking mechanism 30 is gradually rotated in the unlocking direction to retract the advance / retreat link 38 to the original position, and the distal end portion of each advance / retreat link 38 and the guide reinforcement block 51 mutually. The locking latch 45 moves away from the original position relative to the original position, and the other bent side 49 of the locking latch 45 swings away from the front side wall surface 8 of the locking hole 7. At this time, one bent side 47 of the locking latch 45 interferes with the end portion of the positioning elastic member 54, and thus swings in a state of being fitted in the swing allowance groove 53 of the bottom plate 52 without being displaced. .

  When the other bent side 49 of the locking latch 45 moves away from the front side wall surface 8 of the locking hole 7 and returns to the original position in the thickness direction of the lid body 10, the one bent side 47 of the locking latch 45 swings. The positioning elastic member 54 is passed from the permissible groove 53 and slid to the rear of the bottom plate 52, and the other bent side 49 of the upright locking latch 45 is straight from the locking hole 7 of the container body 1 into the protrusion / retraction hole 18 of the lid 10. By retreating, the lid body 10 fitted to the front surface 5 of the container body 1 becomes removable.

  According to the above configuration, the locking latch 45 is not projected and swung simultaneously, but after the locking latch 45 has sufficiently entered the locking hole 7 of the container body 1, the locking is performed on the front side wall surface 8 of the locking hole 7. Since the lid body 10 is gradually drawn into the front surface 5 of the container body 1 by making the other bent side 49 of the latch 45 contact for the first time, the contact force of the locking latch 45 with respect to the locking hole 7 is increased as compared with the prior art. 10 can be sufficiently pulled in, the locking by the locking mechanism 30 can be stabilized, and the locking hole 7 of the container body 1 and the locking latch 45 of the locking mechanism 30 can be effectively prevented from being damaged. In particular, it is possible to effectively prevent the rim flange 6 of the container body 1 from spreading outward and being damaged.

  Further, since the lid body 10 can be sufficiently pulled in, the lid body 10 that receives the reaction force of the front retainer can be fitted to the container body 1 with high accuracy. Further, since the locking latch 45 and the guide reinforcement block 51 exist in the vicinity of the intrusion hole 18 of the lid body 10, the strength in the vicinity of the intrusion hole 18 of the lid body 10 can be ensured, and a large locking force acts when locking. Even so, the possibility that the lid 10 and the advance / retreat link 38 of the locking mechanism 30 are deformed can be eliminated. Therefore, a safe and reliable operation of the locking mechanism 30 can be greatly expected.

  Further, the locking latch 45 or the like need not be elongated longer than the conventional one, and can be formed small and short to ensure rigidity. Therefore, even if a large locking force is applied during locking, the advance / retreat link 38 and the locking link There is no possibility that the latch 45 is easily deformed. Therefore, it is not necessary to prevent the deformation by forming the locking latch 45 and the like thick, and it is possible to prevent the pulling stroke amount of the locking latch 45 from being reduced.

  Next, FIGS. 20 to 23 show an embodiment of the second invention of the present invention. In this case, the inclined protrusion 23 and the spherical protrusion 26 for the forward / backward link 38 are formed on the lid 10. And a pair of left and right rotation operation reels 31 that are supported by the housing enclosure wall 12 of the lid body 10 and rotate by an external operation, and the rotation body reels 31 by rotation of the respective rotation operation reels 31. The forward / backward link 38 and the locking latch 45A are integrated with each other, and the inclined protrusion 23 and the spherical protrusion 26 of the lid 10 are formed on each forward / backward link 38. The first and second cam protrusions 62 and 63 that interfere with the guide reinforcement block 51 are formed, and the guide reinforcing block 51 is omitted.

  As shown in FIGS. 22 and 23, each inclined protrusion 23 is formed in a substantially concave shape with a shallow bottom cross section, and is integrated with the back surface of the cover plate 19 of the lid body 10. It is located near the end of the moving link 38. Of the pair of upper and lower opposing walls that define the flat recessed surface 24 of the inclined protrusion 23, the opposing wall located on the peripheral edge side of the cover plate 19 is a tapered inclined surface that gradually narrows in the direction toward the lid body 11. The inclined surface 25 functions to swing the forward / backward link 38 in the thickness direction of the lid body 10.

  Each spherical protrusion 26 is formed in a substantially round pin shape with a spherical tip, is integrated with the back surface of the cover plate 19, and protrudes in the inner direction of the lid body 11. The spherical protrusion 26 is located in the vicinity of the tip of the retracting hole 18 of the lid main body 11 and the advance / retreat link 38 and faces the vicinity of the tip of the advance / retreat link 38. In the vicinity of the spherical protrusion 26, a displacement prevention piece 27 that interferes with the second cam protrusion 63 of the advance / retreat link 38 and prevents the displacement in the vertical direction is formed to protrude adjacently.

  As shown in FIG. 20 and FIG. 21, each rotary operation reel 31 of the locking mechanism 30 is basically configured in substantially the same manner as in the first embodiment of the present invention, and a pair of opposed cam groove portions 33 are substantially each. A deformation preventing rib 36 for the advancing / retreating link 38 is formed in a substantially arc shape on the inner peripheral side or in the vicinity of the outer peripheral side of each cam groove portion 33.

  As shown in FIGS. 20 to 23, each forward / backward link 38 is a long rectangular shape that is sandwiched between a pair of linear ribs 14 of the storage enclosure wall 12 via a gap and is directed from the vicinity of the center of the lid 10 toward the peripheral wall. Reinforcing grid ribs 61 are formed on the opposing surface that is formed on the plate and faces the lid body 11, and the first and second cam protrusions 62 are arranged in the longitudinal direction of the opposing surface that faces the back surface of the cover plate 19. 63 are formed at intervals.

  The advancing / retreating link 38 is formed so as to gradually become thinner as it goes from the front end portion toward the end portion, and the front end portion is formed thinner than the other portions to constitute the locking latch 45A, and this front end portion is a locking latch. As shown in FIG. 45A, it linearly emerges from the intrusion hole 18 of the lid body 10 and is pressed into the locking hole 7 of the container body 1.

  A cylindrical connecting pin 44 protrudes from the narrowed end portion of the advance / retreat link 38, and the connecting pin 44 is slidably fitted into the cam groove 33 of the rotary operation reel 31 to rotate the rotary operation reel 31. Functions to convert motion to linear motion. The peripheral surface of the connecting pin 44 is in sliding contact with the deformation preventing rib 36 of the cam groove 33 and transmits a load acting on the locking latch 45A during locking to the deformation preventing rib 36.

  The first cam protrusion 62 is integrally formed with a substantially triangular cross section near the end of each forward / backward link 38 and interferes with the inclined protrusion 23 of the cover plate 19. When the locking mechanism 30 is locked, the first cam protrusion 62 is in sliding contact with the inclined surface 25 of the inclined protrusion 23 to slightly incline the end portion of the forward / backward link 38 toward the lid body 11 (see FIG. 23). The locking latch 45A is protruded into the locking hole 7 of the container body 1, and when the locking mechanism 30 is unlocked, the advancing / retreating link 38 tilted in the direction of the lid body 11 after returning to sliding contact with the recessed surface 24 of the inclined projection 23. The end portion of the lock is returned to the original position, and the lock latch 45A is separated from the lock hole 7 (see FIG. 22).

  The second cam projection 63 is integrally formed with a substantially polygonal shape with a tapered cross section near the tip of each forward / backward link 38 and interferes with the spherical projection 26 of the cover plate 19. When the locking mechanism 30 is locked, the second cam projection 63 is locked to the front side wall surface 8 that defines the locking hole 7 by straddling the spherical projection 26 and contacting the peripheral surface of the cover plate 19 on the peripheral side. 45A is rocked and contacted (see FIG. 23), and when the locking mechanism 30 is unlocked, the locking latch 45A is released from the front side wall surface 8 of the locking hole 7 by returning from the peripheral surface of the spherical protrusion 26 that is in contact to the tip. It functions to be separated (see FIG. 22).

  In the above configuration, when the lid body 10 is fitted to the opened front surface 5 of the container body 1 and locked by the locking mechanism 30, the lid body 10 is fitted into the front surface 5 of the container body 1 to cover the cover plate 19 side. The key groove 35 is directed to the lateral direction of each rotary operation reel 31 of the locking mechanism 30 by inserting a swinging key of the lid opening / closing device into each automatic operation hole 20 of the lid 10. The operation key of the lid opening / closing device is inserted into the door and gradually rotated counterclockwise, that is, in the locking direction.

  Then, each rotation operation reel 31 of the locking mechanism 30 gradually rotates in the locking direction to advance the forward / backward link 38 in the direction of the peripheral wall of the lid body 10, and the locking latch 45 </ b> A that is the tip of each forward / backward link 38 is closed. The locking latch 45 </ b> A protrudes from the intrusion hole 18 of the lid body 10 and protrudes into the locking hole 7 of the container body 1.

  At this time, the first cam projection 62 is slidably contacted with the inclined surface 25 from the recessed surface 24 of the inclined projection 23, and the end portion of the forward / backward link 38 is gradually inclined toward the lid body 11, and is opposed to the tip of the spherical projection 26. The second cam projection 63 that has been passed through the spherical projection 26 interferes with the misalignment prevention piece 27, and the distal end side of the forward / backward link 38 is slightly inclined toward the cover plate 19.

  When the second cam protrusion 63 straddles the spherical protrusion 26 and interferes with the displacement prevention piece 27, the forward / backward link 38 is restricted from swinging in the thickness direction of the lid 10, and the front side wall surface 8 of the locking hole 7 is restricted. The locking latch 45A comes into contact, the lid body 10 is gradually drawn into the front surface 5 of the container body 1, and the locking latch 45A is finally strongly fitted and locked into the locking hole 7 so that the lid body 10 is completely tightly fitted. Thus, the lid body 10 can be fitted to the front surface 5 of the container body 1 and locked by the locking mechanism 30.

  At this time, a strong load acts on the locking latch 45A, and the forward / backward link 38 may be bowed in the thickness direction of the lid 10, but the deformation prevention rib 36 of the rotary operation reel 31 acts on the locking latch 45A. Therefore, the load can be applied linearly from the rotary operation reel 31 to the locking latch 45A. Accordingly, the advance / retreat link 38 does not bow in the thickness direction of the lid 10.

  Next, when the locked locking mechanism 30 is unlocked and the lid 10 fitted to the front surface 5 of the container body 1 is removed, the operation key of the lid opening / closing device is inserted into each automatic operation hole 20 of the lid 10. The operation key of the lid opening / closing device is inserted into the key groove 35 directed to the vertical direction of each rotary operation reel 31 and is gradually rotated in the clockwise direction, that is, the unlocking direction.

Then, each rotation operation reel 31 of the locking mechanism 30 is gradually rotated in the unlocking direction to retract the forward / backward link 38 to the original position, and the locking latch 45A is separated from the front side wall surface 8 of the locking hole 7.
At this time, the first cam projection 62 slidably contacts the surface 24 recessed from the inclined surface 25 of the inclined projection 23, and the end portion of the forward / backward link 38 is gradually inclined toward the cover plate 19 and straddles the spherical projection 26. The second cam projection 63 returns to the tip of the spherical projection 26 and gradually inclines the tip of the forward / backward link 38 toward the lid body 11.

  When the locking latch 45 </ b> A is separated from the front side wall surface 8 of the locking hole 7, the locking latch 45 </ b> A is retracted from the locking hole 7 of the container body 1 into the intrusion hole 18 of the lid body 10 and is fitted to the front surface 5 of the container body 1. The lid 10 thus made becomes removable. Other parts are the same as those in the first embodiment of the present invention and will not be described.

  Also in this embodiment, the same effect as the embodiment of the first invention can be expected, and after the locking latch 45 </ b> A has sufficiently entered the locking hole 7 of the container body 1, the front side wall surface 8 of the locking hole 7. Since the lid 10 is brought into contact with the locking latch 45A for the first time and the lid 10 is pulled into the front surface 5 of the container body 1, the contact force of the locking latch 45A with respect to the locking hole 7 is increased more than before, and the lid 10 is sufficiently pulled in. be able to. Therefore, it is obvious that the locking by the locking mechanism 30 can be stabilized and the locking hole 7 of the container body 1 and the locking latch 45A of the locking mechanism 30 can be effectively prevented from being damaged.

  Further, since the lid body 10 can be sufficiently pulled in, the lid body 10 that receives the reaction force of the front retainer can be fitted to the container body 1 with high accuracy. Further, since the locking latch 45A is present in the vicinity of the in / out hole 18 of the lid 10, the strength in the vicinity of the in / out hole 18 of the lid 10 can be secured, and even if a large locking force is applied during locking, the lid body 10 and the advancing / retreating link 38 of the locking mechanism 30 can be eliminated. Therefore, a safe and reliable operation of the locking mechanism 30 can be greatly expected.

  Further, since the locking latch 45A can be formed to be small and short to ensure rigidity, even if a large locking force is applied during locking, there is no possibility that the forward / backward link 38 or the locking latch 45A is easily deformed. Accordingly, it is not necessary to prevent the deformation by forming the locking latch 45A and the like thick, and it is possible to prevent the pulling stroke amount of the locking latch 45A from being reduced. Furthermore, the separate locking latch 45 and the guide reinforcement block 51 can be omitted to simplify the configuration and reduce the number of parts.

  In the above embodiment, the storage enclosure wall 12 for the locking mechanism 30 is defined inside the lid body 11, but the storage enclosure wall 12 for the locking mechanism 30 is defined on the back surface of the cover plate 19 facing the lid body 11. Alternatively, the storage wall 12 of the cover plate 19 may be combined with the reinforcing rib 22.

  Moreover, in the said embodiment, although the deformation | transformation prevention rib 36 was integrally molded in the cam groove part 33 of the locking mechanism 30, it is not limited to this at all. For example, the deformation preventing rib 36 may be given elasticity to improve the drop resistance of the substrate storage container. Further, the cam groove portion 33 of the rotary operation reel 31 may be penetrated or a recess that is not penetrated. In addition, a pair of manual operation portions 34 can be provided in the partial thickness direction of the peripheral portion of the key slot 32. Furthermore, a roller that reduces the generation of particles can be rotatably supported at the tip of the other bent side 49 of the locking latch 45.

  The substrate storage container according to the present invention can be used in the field of manufacturing semiconductors and liquid crystals.

1 Container body 5 Front (opening)
6 Rim flange 7 Locking hole 8 Front side wall (wall surface)
10 Lid 11 Lid Main Body 12 Enclosure Wall 13 Arc Rib 14 Linear Rib 18 Recessed Hole 19 Cover Plate 23 Inclined Protrusion 24 Surface 25 Inclined Surface 26 Spherical Protrusion (Protrusion)
30 Locking mechanism 31 Rotating operation reel (Rotating operation body)
32 Key slot 33 Cam groove (second engaging part)
34 Manual operation part 36 Deformation prevention rib (deformation prevention part)
38 Advance / Retreat Link (Advance / Removal Body)
40 receiving claw 41 partitioning piece 42 support groove 43 guide groove 44 connecting pin (convex part, first engaging part)
45 Locking latch (locking body)
45A Locking latch (locking body)
46 Support shaft 47 One bent side 48 First convex portion 49 The other bent side 50 Second convex portion 51 Guide reinforcement block (guide reinforcement body)
52 Bottom plate 53 Oscillation allowance groove (rotation allowance recess)
54 Positioning elastic member 55 Extending piece 57 Side wall 62 First cam protrusion 63 Second cam protrusion

Claims (7)

A substrate storage container comprising a lid for closing the opening of the container body, and a locking mechanism provided on the lid,
The locking mechanism includes a rotary operation body that can be rotated by an external operation, and a first engagement portion that engages with the rotation operation body, and an advancement / retraction body that moves inward and outward of the lid by the movement of the rotation operation body, Have
The rotary operation body comes into contact with the second engagement portion that engages with the first engagement portion of the advance / retreat body, and the end portion on the rotation operation body side of the advance / retreat body, and the locking mechanism locks the lid body on the container body. A substrate storage container having a deformation preventing part for preventing bending of the forward / backward moving body. The locking mechanism is attached to the locking body that can be rotated in the thickness direction of the lid body that is in contact with and separated from the locking hole in the inner periphery of the opening of the container body by the advancement and retraction of the advancement / retraction body, Including a guide reinforcement for regulating the operation,
When locking the locking mechanism, the rotating operation body rotates in the locking direction to advance the advancing / retracting body to the outside of the lid, and the locking body is linearly guided from the lid into the locking hole of the container body while being guided by the guide reinforcement. The locking body that has entered into the locking hole of the container body rotates in the thickness direction of the lid while being guided by the guide reinforcing body, and contacts the wall surface that defines the locking hole.
When unlocking the locking mechanism, the rotary operation body rotates in the unlocking direction to move the forward / backward moving body inwardly of the lid, and the locking body is rotated and returned in the thickness direction of the lid while being guided by the guide reinforcement. 2. The substrate storage container according to claim 1, wherein the substrate storage container is separated from the wall surface of the locking hole and recedes linearly from the locking hole of the container body to the lid body while being guided by the guide reinforcing body.   The lid includes a lid main body fitted into the opening of the container main body and a cover plate that covers the opening surface of the lid main body, and one of the lid main body and the cover plate includes a storage enclosure wall for a locking mechanism. 3. The substrate according to claim 2, wherein the lid body is formed in a substantially dish-shaped cross section, a locking mechanism is disposed therein, and a surrounding hole for the locking body of the locking mechanism is provided in a peripheral wall of the lid body. Storage container. The rotation operating body of the locking mechanism is provided with a cam groove part for advancing and retreating of the advancing / retracting body, and the deformation preventing part is prevented from being deformed by the cam groove part,
The advancing / retracting body of the locking mechanism is formed in a plate that is directed from the vicinity of the center of the lid toward the circumferential wall, and a support groove for the locking body is formed at the tip of the plate. Each of the guide grooves is formed, and at the end of the plate, a convex portion that fits into the cam groove portion of the rotary operation body is formed, and the convex portion and the deformation preventing portion of the cam structure portion are brought into contact with each other,
The lock body is bent into a substantially L-shaped cross section, and a support shaft that is rotatably supported by the support groove of the advancing / retracting body is formed in the vicinity of the bent portion so that one bent side of the lock body can be slid into the guide reinforcement body. And the other bent side can be brought into and out of the locking hole of the container body, the first convex portions for the guide reinforcing body are respectively formed on both sides of the distal end of the bent side of the locking body, The substrate storage container according to claim 2 or 3, wherein second convex portions for guide reinforcement are formed on both sides of the bent side.   The guide reinforcing body of the locking mechanism is formed in a substantially U-shaped cross section that can be fitted to the locking body, and a rotation-permissible recess that is rotatably fitted to the distal end portion of one bent side of the locking body is formed inside the locking reinforcement body. In addition, a positioning elastic member for the locking body is provided in the inside of the guide reinforcing body so as to be adjacent to the rotation-permissible recess, and on both sides of the rear portion of the guide reinforcing body, extending pieces that are slidably fitted in the guide grooves of the advancing and retracting bodies are respectively provided. Formed on both side walls of the guide reinforcement body are formed slide grooves that are slidably fitted to the first convex portion of the locking body, and the second convex portion of the locking body is slidably supported. The substrate storage container according to claim 4. A substrate storage container comprising a container main body capable of storing a substrate, a lid fitted to the opening of the container main body, and a locking mechanism for locking the lid fitted to the opening of the container main body,
The lid includes a lid main body fitted into the opening of the container main body and a cover plate covering the opening surface of the lid main body, and the cover plate is formed with an inclined protrusion and a protrusion for the locking mechanism,
The locking mechanism is supported by the lid and is rotated by an external operation, and the rotary operating body moves forward and backward in the direction of the lid, and the tip of the locking hole on the inner periphery of the opening of the container body The first cam projection is formed on the advancement / retraction body to incline the tilting projection of the lid body and incline the distal end side of the advancement / retraction body in the thickness direction of the lid body. And forming a second cam projection that interferes with the projection of the lid body and inclines the distal end side of the advance / retreat body in the thickness direction of the lid body,
When locking the locking mechanism, the rotating operation body rotates in the locking direction to advance the advancing / retracting body outward of the lid, and the locking body enters the locking hole of the container body from the lid, and enters the locking hole of the container body. The approaching locking body inclines in the thickness direction of the lid and contacts the wall surface defining the locking hole,
When unlocking the locking mechanism, the rotary operation body rotates in the unlocking direction, the advancing / retracting body is retracted inward of the lid body, the locking body returns to the thickness direction of the lid body, and is separated from the wall surface of the locking hole, A substrate storage container, wherein a locking body separated from a wall surface of the locking hole is retracted from a locking hole of the container body to a lid.   7. The substrate storage container according to claim 6, wherein a cam groove portion for advancing / retreating the advancing / retracting body is provided on the rotary operation body of the locking mechanism, and a deformation preventing portion for preventing deformation of the cam groove portion is formed.

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