JP2023043251A - Wafer storage container - Google Patents

Abstract

To provide a wafer storage container capable of preventing damage, etc., caused by wearing or eccentricity even if a resin pin is used, and further capable of improving a blocking effect between a container main body and a lid body by pulling and press-fitting the lid body into the container main body.SOLUTION: A wafer storage container comprises a lid body 10 fitted to an open front face of a container main body 1 for a semiconductor wafer and a lock mechanism 20 for the fitted lid body 10. The lock mechanism 20 consists of: an operation reel 21 which is rotated by an external operation; a connection bar 24 which is slid by the rotation of the operation reel 21; a lock claw 29 which is projected from the lid body 10 by sliding the connection bar 24; and a holder 37 with a plurality of groove cams for swinging the lock claw 29 and locking it to an inner periphery of the front face of the container main body 1. The lock claw 29 can be swung in a thickness direction of the lid body 10 by inserting a resin connection pin through the connection bar 24 and the lock claw 29, guide bosses are formed while protruding in both side parts of the lock claw 29, and both ends of the resin connection pin and the guide bosses are fitted into the groove cams in a slidable manner.SELECTED DRAWING: Figure 1

Description

The present invention relates to a substrate container used for transporting and storing semiconductor wafers in a semiconductor factory.

In a semiconductor factory, a substrate storage container called a FOUP (Front Opening Unified Pod) is used to transport and store semiconductor wafers of φ300 mm. and a locking mechanism for locking the lid fitted to the front of the container body, and the locking mechanism is installed in the lid, and this locking mechanism is standardized by SEMI standards. It is operated by the lid opener.

The lid body is formed in a substantially box-like shape that is detachably fitted to the open front of the container body, and has a plurality of openings for a locking mechanism perforated in the peripheral portion thereof. The locking mechanism consists of a pair of left and right operation reels that are supported by the lid and rotated by key operation from the outside of the lid opening and closing device, and a plurality of pairs of connecting bars that move forward and backward by the rotation of each operation reel. , and a plurality of locking claws that are interlocked with the advance of each connecting bar, protrude from the inlet and outlet of the peripheral edge of the lid body, and can be engaged with the locking holes on the inner periphery of the front surface of the container body (Patent Document 1). , 2, 3).

Each locking claw is bent into a curved, substantially L-shape, and the rear surface near the bent portion is rotatably supported by the tip of a connecting bar via a metal pin. A pressing roller is rotatably supported through a metal pin, which is slidably contacted in the locking hole of the lid. . For example, SUS pins having a diameter of 1.0 mm are used as the plurality of metal pins, which are strongly press-fitted into the hole at the tip of the connecting bar, the hole at the bent portion of the locking claw, the hole at the tip, and the hole at the end. Alternatively, it is inserted in a cantilever manner.

In the above, when the lid body is fitted to the opened front surface of the container body and locked, the lid opening and closing machine fits the lid body to the opened front surface of the container body, and the operation key of this lid opening and closing machine is used. rotates each operation reel of the locking mechanism at a predetermined angle. Then, as the operation reel rotates, a plurality of pairs of connecting bars advance toward the peripheral edge of the lid. At the same time, the protruding locking claws are engaged with the locking holes of the container body, and the engagement of the locking claws presses and locks the lid fitted to the front surface of the container body.

On the other hand, when the lid is to be unlocked and removed from the front of the container body, the operation key of the lid opening/closing device rotates each operation reel of the locking mechanism to the original reference position. Then, as the operation reel is returned to rotation, the plurality of pairs of connecting bars that have been advanced are returned to the original reference position of the lid body. The lid is returned to the interior of the lid by penetrating the entrance and exit from the locking hole, and the return of the locking claw enables the lid fitted to the front of the container body to be removed, and the lid opens and closes from the front of the container body. removed by pulling it out.

JP-A-2002-368074 JP-A-2005-306411 Japanese Patent Application Laid-Open No. 2006-303015

A conventional substrate storage container is constructed as described above, and a plurality of metal pins are press-fitted or inserted in a cantilever manner. As far as possible, it is desirable to use resin pins instead of metal pins. However, if the metal pin is simply changed to a resin pin, the resin pin and the inner peripheral surface of the hole may be worn, or the resin pin may be eccentric and damaged.

In the conventional substrate storage container, the locking pawl of the locking mechanism is engaged with the locking hole of the container body, so that the lid fitted to the front surface of the container body is press-fitted. If the lid can be pulled in and press-fitted to a specified position in the container body with good precision after the bodies are fitted together, the shielding effect between the container body and the lid can be enhanced, and the intrusion of particles can be prevented more effectively. becomes possible.

The present invention has been devised in view of the above problems. Even if a resin pin is used, wear and damage due to eccentricity can be prevented. It is an object of the present invention to provide a substrate storage container capable of enhancing the shielding effect between a main body and a lid.

In order to solve the above-mentioned problems, the present invention comprises a lid fitted to the opening of the container body for storing the substrates, and a locking mechanism for locking the lid fitted to the opening of the container body. There is
The locking mechanism includes an operation member that is supported by the lid and rotated by an external operation, a slide member that slides as the operation member rotates, and a locking member that can protrude from the periphery of the lid by sliding the slide member. and a plurality of grooved cams for locking (engaging and stopping) the inner periphery of the opening of the container body by rocking (rocking) the locking member,
A resin connecting pin is pierced through the front end of the slide member and the locking member to make the locking member swingable in the thickness direction of the lid body. Cams are provided on both sides of the slide member and the locking member, and both ends of the resin connecting pin and the plurality of guide projections of the locking member are slidably fitted in the plurality of grooved cams.

The container body is formed into a front open box capable of storing a plurality of semiconductor wafers in an aligned manner, and a locking hole for a locking member of a locking mechanism is provided in the inner peripheral portion of the opened front face,
The lid body includes a substantially box-shaped lid body that is detachably fitted to the open front surface of the container body, and a surface plate that covers the open surface of the lid body and is exposed to the outside. It is preferable that a locking mechanism is interposed between the cover body and the surface plate, and a retractable opening through which a locking member of the locking mechanism penetrates is provided in the peripheral portion of the lid body.

In the locking mechanism, the slide member is formed in a substantially plate shape, and a plurality of cylindrical portions are arranged and protruded from the distal end portion of the slide member. It's good to be passed.
Further, a holder member can be fitted to the slide member and the locking member of the locking mechanism, and grooved cams can be formed on both sides of the holder member.

Further, a plurality of cam plates sandwiching the slide member and the locking member may be formed on the lid body, and grooved cams may be formed on each of the plurality of cam plates.
In addition, the tip of the locking member of the locking mechanism is bifurcated into a substantially grooved shape, and between the bifurcated tips of the locking member, a pressing roller contacting the inner periphery of the opening of the container body is provided with a resin support pin. It can be erected rotatably through the
Further, at least one of the resin connecting pin and the resin supporting pin can be formed as a stepped pin having a diameter-reduced portion on its peripheral surface.

Further, the grooved cam of the locking mechanism includes a first grooved cam positioned closer to the slide member, and a second grooved cam connected to the tip portion of the first grooved cam and extending from the surface side of the lid body toward the back side of the lid body while being inclined. including a two-groove cam and a third grooved cam connected to the tip of the second grooved cam and inclined toward the surface of the lid,
Before the lid is locked by the locking mechanism, the guide projection of the locking member is positioned in the first grooved cam, the resin connecting pin is positioned in the vicinity of the connecting portion between the second grooved cam and the third grooved cam,
When the lid is locked by the locking mechanism, the guide projection of the locking member is positioned near the connecting portion of the first grooved cam and the second grooved cam, the resin connecting pin is positioned in the third grooved cam,
After the lid is locked by the locking mechanism, it is preferable that the guide projection of the locking member is positioned at the second grooved cam and the resin connecting pin is positioned at the tip of the third grooved cam.

Further, the guide projection of the locking member when the locking mechanism is locked is positioned near the connecting portion of the first grooved cam and the second grooved cam, and the guide projection of the locking member before locking of the locking mechanism is positioned on the first grooved cam. The end of the resin connecting pin before locking of the locking mechanism is positioned near the connecting portion of the second grooved cam and the third grooved cam, and the second grooved cam is positioned at the time of locking of the locking mechanism or after locking The guide projection of the locking member is positioned, the end of the resin connecting pin at the time of locking of the locking mechanism is positioned near the middle part of the third grooved cam, and the locking mechanism is positioned at the tip of the third grooved cam. It is preferable that the end of the resin connecting pin at the rear is located.

Here, the substrates in the claims include at least semiconductor wafers of φ300 mm and φ450 mm, glass substrates, mask substrates, and the like. Moreover, the container main body and lid may be transparent, opaque, or translucent. The container body is mainly a front-open box, but a top-open box or a bottom-open box may also be used. Moreover, it is preferable that the grooved cam of the locking mechanism is at least a long second grooved cam and a short third grooved cam to define a substantially V-shaped groove. Furthermore, the required number of diameter-reduced portions of the stepped pin can be formed on at least a portion of the peripheral surface of the stepped pin.

According to the present invention, since resin connecting pins are used instead of metal pins, it is possible to reduce sources of metal ions. Further, according to the present invention, when the cover is fitted to the opening of the container body and the operating member of the locking mechanism is rotated, the slide member slides in the direction of the peripheral edge of the cover. A locking member protrudes from the inside of the lid to the outside while being guided by the grooved cam. At this time, the locking member swings toward the rear surface of the lid while being guided by a portion of the grooved cam, thereby tilting toward the rear surface of the lid and protruding outside the lid, and then guided by the remaining portion of the grooved cam. While being pushed, the lid swings from the back surface side to the front surface side, and engages with the inner circumference of the front surface of the container body.

ADVANTAGE OF THE INVENTION According to this invention, even if it uses a pin made from resin, it is effective in being able to prevent damage by wear and eccentricity. Further, since both ends of the resin connecting pin and the plurality of guide projections of the locking member are slidably fitted into the plurality of grooved cams, the lid can be drawn into the container body and press-fitted into the container body. There is an effect that the shielding effect between the lid bodies can be enhanced.

According to the second aspect of the invention, the locking member can be swingably supported by the distal end portion of the sliding member by piercing the locking member with the resin connecting pin that penetrates the plurality of cylindrical portions of the sliding member. Moreover, even if the slide member slides repeatedly, it is possible to effectively prevent the locking member from being damaged.
According to the third aspect of the invention, if the holder member is fitted to the sliding member and the locking member of the locking mechanism, and grooved cams are formed on both sides of the holder member, the new lid body, A locking mechanism can also be installed on an existing lid.

According to the fourth aspect of the invention, the lid body is formed with a plurality of cam plates sandwiching the slide member and the locking member. It is possible to save the trouble of preparing a holder member separate from the locking member and fitting it.
According to the fifth aspect of the present invention, the opening of the container body is rotatably provided between the branched ends of the locking member by means of a resin support pin. It is possible to prevent the locking member from strongly contacting and rubbing against the inner circumference of the part and generating dust.

According to the sixth aspect of the invention, if the resin connecting pin is formed as a stepped pin, unevenness can be formed on the peripheral surface of the resin connecting pin. It becomes possible to prevent falling off. Similarly, if the resin support pin is formed as a stepped pin, unevenness can be formed on the peripheral surface of the resin support pin, thereby preventing the pressing roller from detaching from the tip of the locking member and falling off. be possible.

According to the seventh aspect of the invention, the tip portion of the locking member is moved by the first, second, and third grooved cams of the grooved cams in which the resin connecting pin and the guide projection of the locking member are fitted. It is possible to achieve swinging in two stages with a large movable distance, in which the lid is once tilted rearward on the back surface side, then tilted forward again on the surface side of the lid body, and locked to the inner periphery of the front surface of the container body. . Therefore, the lid body fitted into the container body can be drawn into and press-fitted to a prescribed position with high accuracy, and the effect of blocking between the container body and the lid body can be improved.

1 is an overall perspective view showing an embodiment of a substrate storage container according to the present invention; FIG. 1 is a perspective view showing a lid body and a locking mechanism in an embodiment of a substrate storage container according to the present invention; FIG. FIG. 2 is an exploded perspective view schematically showing the relationship between a connecting bar, a holder, and a resin connecting pin in an embodiment of the substrate storage container according to the present invention; FIG. 4 is a perspective view of a main part schematically showing the relationship between the assembled connecting bar, locking claw and holder in the embodiment of the substrate storage container according to the present invention; FIG. 4 is a rear perspective view schematically showing the relationship between a connecting bar, a locking claw, and a holder in the embodiment of the substrate storage container according to the present invention; FIG. 4 is a front explanatory view schematically showing the relationship between a connecting bar, locking claws, and holders in an embodiment of the substrate storage container according to the present invention; FIG. 4 is a perspective view schematically showing the relationship between a resin connecting pin and a locking claw in the embodiment of the substrate storage container according to the present invention; FIG. 4 is an explanatory view showing resin support pins in the embodiment of the substrate storage container according to the present invention; FIG. 2 is an exploded perspective view schematically showing locking claws in the embodiment of the substrate storage container according to the present invention; 1 is a perspective view schematically showing a holder in an embodiment of a substrate storage container according to the present invention; FIG. FIG. 4 is a cross-sectional explanatory view of a main part showing a state before locking of the locking mechanism in the embodiment of the substrate storage container according to the present invention; FIG. 12 is a cross-sectional explanatory view of a main part showing a locked state in which a locking pawl of the locking mechanism shown in FIG. 11 protrudes slightly; FIG. 13 is a sectional explanatory view of a main part showing a state after locking in which a protruding locking pawl of the locking mechanism shown in FIG. 12 is swung and fitted and locked in a locking hole of the container body; FIG. 7 is an overall perspective view showing a part of the front surface of the container body, the lid, and the locking mechanism in the second embodiment of the substrate storage container according to the present invention. FIG. 11 is a perspective view of a main part showing a locking mechanism in a second embodiment of the substrate storage container according to the present invention;

Preferred embodiments of the present invention will now be described with reference to the drawings. As shown in FIGS. and a locking mechanism 20 for locking the lid 10 fitted to the front of the container body 1. The locking mechanism 20 is A pair of operation reels 21 rotated by operation of the lid opening/closing machine, a plurality of pairs of connection bars 24 sliding by rotation of each operation reel 21, and a plurality of projections protruding from the peripheral edge of the lid 10 by sliding of each connection bar 24. , and a plurality of holders 37 for locking the locking claws 29 to the front inner periphery of the container body 1 by rocking them, the SDGs adopted at the United Nations Summit (United Nations Sustainable Development Goals) Contribute to the achievement of Goal 9 of the Sustainable Development Goals (SDGs), which are international goals for development and consist of 17 global goals and 169 targets (achievement criteria).

The semiconductor wafers, although not shown, are made of, for example, thin and fragile high-quality silicon wafers of φ300 mm, with a circuit pattern formed on the surface, housed inside the container body 1, and 25 in the vertical direction at predetermined intervals. Align with

The container main body 1 and the lid 10 are composed of a combination of a plurality of parts that are injection-molded from a molding material containing a required resin. Examples of resins contained in this molding material include polycarbonate (PC) resin, cycloolefin polymer (COP) resin, cycloolefin copolymer (COC) resin, polypropylene (PP) resin, polyetherimide (PEI) resin, polyether Thermoplastic resins such as ketone (PEK) resins, polyether ether ketone (PEEK) resins, polybutylene terephthalate (PBT) resins, polyacetal (POM) resins, liquid crystal polymers, and alloys of these resins can be used.

These resins are optionally added with conductive materials such as carbon fibers, carbon powders, carbon nanotubes, and conductive polymers, and various antistatic agents such as anions, cations, and nonionics. In addition, benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and hindered amine-based UV absorbers are added, and glass fibers, carbon fibers, and the like that improve rigidity are selectively added.

As shown in FIGS. 1 and 11 to 13, the container body 1 is injection-molded into a front-open box having an opening in the front. The pair of left and right support pieces are arranged vertically at predetermined intervals, and each support piece is formed as a long, thin plate extending in the front-rear direction. The front surface of the container body 1 is bent outward in the width direction from the peripheral wall of the container body 1 through a stepped portion, and the flat shoulder surface of the stepped portion defines a seal forming surface 2 for the lid body 10. - 特許庁Locking holes 3 for locking are recessed on both upper and lower sides of the front inner circumference of the container body 1, and each locking hole 3 is formed in a substantially rectangular shape.

As shown in FIGS. 1, 2, 11 to 13, the lid body 10 includes a substantially rectangular lid body 11 detachably fitted to the open front of the container body 1, and a horizontally elongated lid body 11. 11 is an existing type provided with a surface plate 15 that covers the partially recessed surface of the lid body 11 and is exposed to the outside. be done.

The lid body 11 is formed, for example, in a substantially box-shaped cross section (also a substantially tray-shaped cross section) with a shallow bottom. The entrances 12 are formed through the container body 1, and a vertical front retainer is attached to the central portion of the rear surface of the container body 1 facing the rear wall to horizontally hold the peripheral front portion of the semiconductor wafer with an elastic piece. be. A frame-shaped fitting groove 13 is provided around the periphery of the back surface of the lid body 11 , and an elastic seal gasket 14 is fitted into the fitting groove 13 to press against the seal forming surface 2 of the container body 1 . .

The surface plate 15 is formed, for example, as a horizontally long transparent or opaque plate, and is perforated with operation openings 16 for the locking mechanism 20 near both sides of the central portion. The T-shaped operation key of the lid opening/closing device is penetrated, and by rotating this operation key at a predetermined rotation angle, the locking mechanism 20 is operated to perform the locking or unlocking operation.

As shown in FIGS. 1 to 13, the locking mechanism 20 includes a pair of left and right operation reels 21 supported by the lid 10 and rotated by key operation from the outside of the lid opening/closing machine. A plurality of pairs of connecting bars 24 which move back and forth in the vertical direction, and each connecting bar 24 is interlocked with the advance of each connecting bar 24 to protrude from the inlet/outlet 12 at the periphery of the lid 10 and engage with the locking hole 3 at the inner periphery of the front surface of the container body 1. It comprises a possible plurality of locking claws 29 and a plurality of holders 37 with grooved cams 41 fitted to each connecting bar 24 and locking claws 29 .

The operating reel 21, connecting bar 24, locking claw 29, and holder 37 of the locking mechanism 20 are injection-molded from a molding material containing a required resin. Predetermined resins for this molding material include, for example, polyetheretherketone (PEEK) resin, polycarbonate (PC) resin, polybutylene terephthalate (PBT) resin, polyacetal (POM) resin, polyetherimide (PEI) resin, polyether Examples include sulfone (PES) resin, polyphenylene sulfide (PPS) resin, polyamideimide (PAI) resin, and alloys thereof.

As shown in FIGS. 1 and 2, the operating reel 21 is formed into a substantially convex disk in which a reel cover is attached to the center of the disk reel body via a rotary bearing. They are rotatably supported near the center on both sides of the surface. A central portion 22 formed of a reel lid protruding toward the surface plate 15 of the operation reel 21 faces the operation opening 16 of the surface plate 15, and is fitted with an operation key of a lid opening/closing device passing through the operation opening 16. Then, the operation reel 21 is automatically rotated at a predetermined rotation angle. A pair of curved grooves 23 are drilled at an interval of 180° in the vicinity of the peripheral edge of the operation reel 21. Each curved groove 23 is formed in a semicircular arc shape. The ends are ligated.

1 to 3, 5, and 11 to 13, the plurality of pairs of connecting bars 24 are slidably arranged on both sides of the surface of the lid body 11, and the pair of connecting bars 24 connect the operating reel 21. Located vertically. Each connecting bar 24 is formed in a substantially elongated plate shape with an elongated guide hole oriented in the vertical direction, and a pair of cylindrical portions 25 are formed side by side at the distal end portion to protrude, and each cylindrical portion 25 is formed in a cylindrical shape. , a resin connecting pin 26 passing through the locking claw 29 is inserted through the pair of cylindrical portions 25 .

As shown in FIGS. 3 to 5 and 7, unlike conventional metal pins, the resin connecting pin 26 is made of the same molding material as the locking mechanism 20 and is formed into a stepped pin with a diameter of 3 mm or 4 mm. A diameter-reduced portion 27 is formed on the peripheral surface between the central portion and the peripheral surface between the central portion and the terminal portion to prevent displacement and falling off.

A cylindrical latch boss 28 is integrally formed at the rear end of each connecting bar 24, and this latch boss 28 is slidably fitted into the curved groove 23 of the operation reel 21 with play. Due to the loose fitting of the latch boss 28, the connecting bar 24 is guided by the guide of the lid body 11 and moved back and forth in the vertical direction as the operation reel 21 rotates.

As shown in FIGS. 4 to 9 and 11 to 13, each locking claw 29 is formed into a substantially grooved block with a notched end, and is connected to the tip of the connecting bar 24 so that the lid body 10 can be secured. It is possible to swing in the thickness direction (front-rear direction). This locking claw 29 is formed with a width narrower than that of the conventional type from the viewpoint of improving rigidity, and a resin connecting pin 26 passing through a pair of cylindrical portions 25 of the connecting bar 24 is mounted between the two side portions near the center. Both ends of the resin connecting pin 26 are exposed.

Guide bosses 30 parallel to the ends of the resin connecting pins 26 are integrally formed at the ends of both sides of the locking claw 29, respectively, and each guide boss 30 is formed in a cylindrical shape. Further, a positioning guide 31 is protruded near the central portion of the locking claw 29 and is slidably contactable with the peripheral surface of the resin connecting pin 26 between the pair of cylindrical portions 25 .

In addition, on the inner peripheral surface of the hole of the locking claw 29 through which the resin connecting pin 26 penetrates, an enlarged diameter portion is formed in close contact with the reduced diameter portion 27 of the resin connecting pin 26 . It is preferable that the resin connecting pin 26 is prevented from being displaced by the close contact.

A tip portion 32 of the locking claw 29 is bifurcated and formed into a substantially groove-shaped recess. , the pressing roller 33 is supported by a resin support pin 34. As shown in FIG.

As shown in FIGS. 4, 5, 7 to 9, the resin support pin 34 is made of the same molding material as the locking mechanism 20, and has a diameter of 3 mm or 3 mm. It is formed as a stepped pin with a diameter of 4 mm. A flange 36 with a diameter is protruded to prevent misalignment and falling off. This resin support pin 34 is fixed to the tip portion 32 of the locking claw 29 and passes through the freely rotatable pressing roller 33 from the viewpoint of stress distribution. 32 may be rotatably pivoted.

In addition, on the inner peripheral surface of the hole through which the resin support pin 34 penetrates, the distal end portion 32 of the locking claw 29 is formed with an enlarged diameter portion closely contacting the reduced diameter portion 35 of the resin support pin 34 . It is preferable that the resin support pin 34 is prevented from being displaced by the close contact between the rim and the enlarged diameter portion.

As shown in FIGS. 1 to 6 and 10, the holder 37 has a front rectangular facing cover plate 38 that faces the surface of the connecting bar 24 and the terminal side of the locking claw 29, and both sides of the facing cover plate 38. A pair of left and right side plates 39 disposed on the front side and sandwiching the connecting bar 24 and the end portion side of the locking claw 29 from the left and right, and a pair of side plates 39 bridged between the pair of side plates 39 and positioned on the back side of the connecting bar 24. A drop-off prevention bar 40 is provided, and is fitted to the tip portion side of the connecting bar 24 and the locking claw 29 .

A pair of side plates 39 of the holder 37 are formed to be taller and longer than the opposing cover plate 38 . Groove cams 41 located on both sides of the connecting bar 24 and the locking claw 29 are notched in the pair of side plates 39, respectively, and the pair of grooved cams 41 extend from the connecting bar 24 toward the locking claw 29, respectively. Both ends of the resin connecting pin 26 and the pair of guide bosses 30 of the locking claw 29 are slidably fitted into the pair of grooved cams 41, respectively.

As shown in FIGS. 3 to 5, 10, etc., each grooved cam 41 includes a first grooved cam 42 extending in the longitudinal direction of the side plate 39 and positioned near the connecting bar 24, and a tip end of the first grooved cam 42. A long second grooved cam 43 connected to the portion and extending from the facing cover plate 38 side of the holder 37 (front surface side of the lid body 10) while being inclined toward the drop prevention bar 40 (back surface direction of the lid body 10); It is integrally formed with a third grooved cam 44 that is connected to the tip of the two-groove cam 43 and slightly inclined toward the facing cover plate 38 of the holder 37 .

The first grooved cam 42 is notched upright or slightly inclined toward the facing cover plate 38 side of the holder 37 . The guide boss 30 of the locking pawl 29 during locking of the locking mechanism 20 (during locking) is positioned near the connecting portion between the first grooved cam 42 and the second grooved cam 43 (see FIG. 12). The guide boss 30 of the locking claw 29 before locking of the locking mechanism 20 is positioned on the first grooved cam 42 (see FIG. 11).

The end of the resin connecting pin 26 before locking of the locking mechanism 20 is positioned near the connecting portion between the second grooved cam 43 and the third grooved cam 44 (see FIG. 11). The guide boss 30 of the locking pawl 29 is located on the second grooved cam 43 when or after the locking mechanism 20 is locked (see FIGS. 12 and 13). Further, the third grooved cam 44 is formed shorter than the second grooved cam 43, and the end of the resin connecting pin 26 when the locking mechanism 20 is locked is located near the intermediate portion (see FIG. 12). The end of the resin connecting pin 26 after locking of the locking mechanism 20 is positioned at the tip (see FIG. 13).

That is, before the lid 10 is locked by the locking mechanism 20, the guide boss 30 of the locking pawl 29 is positioned on the first grooved cam 42, and the second grooved cam 43 and the third grooved cam 44 are connected by resin near the connecting portion. The ends of the pins 26 are located. Further, when the lid body 10 is locked by the locking mechanism 20, the guide boss 30 of the locking claw 29 is positioned near the connecting portion between the first grooved cam 42 and the second grooved cam 43, and near the intermediate portion of the third grooved cam 44. The end of the resin connecting pin 26 is located. After the lid 10 is locked by the locking mechanism 20 , the guide boss 30 of the locking claw 29 is positioned on the second grooved cam 43 and the end of the resin connecting pin 26 is positioned on the tip of the third grooved cam 44 .

By guiding the resin connecting pin 26 and the guide boss 30 of the locking claw 29 to the first grooved cam 42, the second grooved cam 43, and the third grooved cam 44, the tip portion 32 of the locking claw 29 is The lid body 10 swings toward the back side of the lid body 11 and then swings toward the surface plate 15 . In other words, the tip portion 32 of the locking claw 29 once swings rearward of the lid 10 and then swings forward again from the rear of the lid 10 .

In the above configuration, when the lid body 10 is fitted to the open front surface of the container body 1 and locked, the lid opening/closing device fits the lid body 10 to the open front surface of the container body 1, and this lid body is locked. An operation key of the opening/closing machine rotates each operation reel 21 of the locking mechanism 20 in one direction at an angle of 90°. Then, due to the rotation of the operating reel 21 , the plurality of pairs of connecting bars 24 advance from the reference position toward the peripheral edge of the lid body 11 . and protrudes to the outside of the lid body 10 while swinging.

At this time, the tip 32 of the locking claw 29 protrudes from the reference position (see FIG. 11) to the outside of the lid 10 while being guided by the pair of grooved cams 41 of the holder 37 . That is, the tip portion 32 of the locking claw 29 is guided by a part of the first grooved cam 42, the second grooved cam 43, and the third grooved cam 44, and swings toward the rear side of the lid body 11 of the lid body 10. As a result, it slightly protrudes outside the lid body 10 (see FIG. 12) while tilting to the back side of the lid body 11, and is then guided to the vicinity of the tip portions, which are the remaining portions of the second grooved cam 43 and the third grooved cam 44. While the cover body 11 swings from the back side of the lid body 11 toward the surface plate 15, it is fitted and locked into the locking hole 3 of the container body 1 (see FIG. 13). Due to such fitting and locking of the locking claws 29, the lid body 10 fitted to the front surface of the container body 1 is pulled into a prescribed position with high precision, press-fitted, and locked.

On the other hand, when the lid 10 is unlocked and removed from the front of the container body 1, the operation key of the lid opening/closing device rotates each operation reel 21 of the locking mechanism 20 by 90° to the original reference position. . Then, the plurality of pairs of connecting bars 24, which had been advanced when the operation reel 21 returned to rotation, retracted and returned to the original reference position of the lid 10, and the locking claws 29 protruding due to the retraction of the connecting bars 24 returned to the container body. 1 through the opening 12 to return to the inside of the lid body 10. With the return of the locking claw 29, the lid body 10 fitted to the front surface of the container body 1 can be removed. The cover 10 is pulled out and removed from the front by a cover opening/closing device.

At this time, the tip portion 32 of the locking claw 29 is guided by the third grooved cam 44, the second grooved cam 43, and the first grooved cam 42 of the pair of grooved cams 41 of the holder 37 in order to return to the reference position. . That is, the tip portion 32 of the locking claw 29 swings from the locking hole 3 of the container body 1 toward the back side of the lid body 11 of the lid body 10, and then swings from the back side of the lid body 11 toward the inside of the lid body 10. retreat and return.

According to the above configuration, since the resin connecting pins 26 and the resin supporting pins 34 are used instead of the metal pins, metal ions are not generated and various adverse effects on the semiconductor wafer can be eliminated. In addition, instead of using the resin connecting pin 26 and the resin supporting pin 34 in a cantilever manner, the vicinity of both ends of the resin connecting pin 26 is supported between both sides of the locking claw 29, and the locking claw 29 is branched. Since the vicinity of both end portions of the resin support pin 34 is supported between the tip portions 32, it is possible to reduce wear between the resin pins and the inner peripheral surface of the hole. In addition, there is no possibility that these resin pins will tilt or be eccentric and damaged.

Also, if the resin connecting pins 26 and the resin support pins 34 are made of polyether ether ketone resin, polycarbonate resin, or the like, which are excellent in abrasion resistance, dust generation due to abrasion can be greatly suppressed. The pair of grooved cams 41 of the holder 37 swings the tip 32 of the locking claw 29 to the rear of the lid 10 and then to the front of the lid 10 again. A complicated two-step rocking motion with a large movable distance can be expected. Therefore, even if the lid 10 is located forward of the container body 1 and is difficult to push in by the lid opening/closing device, the lid 10 fitted into the container body 1 can be accurately enlarged to a prescribed position. It can be pulled in and press-fitted, and the shielding effect between the container body 1 and the lid 10 can be enhanced, making it possible to more effectively prevent particles from entering.

In addition, since the grooved cams 41 are formed on the pair of side plates 39 of the holder 37 respectively, if this holder 37 is used, the locking pawl 29 can be expected to perform a complicated two-step rocking motion. Therefore, there is no need to develop or manufacture a lid 10 having a new configuration, and the existing lid 10 can be used as it is. Further, since the locking claw 29 is narrower than the conventional locking claw, the strength of the locking claw 29 can be greatly improved.

In addition, since a flange that exhibits an identification function is provided around the peripheral surface of the end portion of the resin support pin 34, the mounting direction of the resin support pin 34 is not mistaken when the pressing roller 33 is mounted on the locking claw 29. Furthermore, since the pressing roller 33 that contributes to friction reduction is rotatably brought into sliding contact with the locking hole 3 of the container body 1, it is possible to effectively suppress the generation of particles.

Next, FIGS. 14 and 15 show a second embodiment of the present invention. In this case, a pair of left and right cams for sandwiching a connecting bar 24 and a locking claw 29 are provided on both sides of the surface of the lid body 11. A plurality of plates 50 are formed, and the groove cams 41 are formed on the plurality of cam plates 50, respectively.

Each cam plate 50 is formed vertically extending in the vertical direction of the lid body 11 . Further, each grooved cam 41 is connected to a first grooved cam 42 extending in the longitudinal direction of the cam plate 50 and positioned near the connecting bar 24 , and connected to the front end portion of the first grooved cam 42 so as to be connected to the surface side of the lid body 11 . A long second grooved cam 43 extending while being inclined from (the surface side of the lid body 10) toward the back surface of the lid body 11 (the back surface direction of the lid body 10), and a lid connected to the tip of the second grooved cam 43. It is integrally formed with a slightly inclined short third grooved cam 44 on the surface side of the main body 11 . Other parts are the same as those of the above embodiment, so description thereof will be omitted.

In this embodiment, the same effects as those of the above embodiment can be expected, and in addition, since a plurality of pairs of cam plates 50 are formed on both sides of the surface of the lid body 11, the dedicated holder 37 can be omitted. is clear.

A cylindrical roller having excellent wear resistance is rotatably fitted into the latch boss 28 of the connecting bar 24 in the above embodiment, and this roller is slidably and loosely fitted into the curved groove 23 of the operation reel 21 to generate dust. may be prevented. Further, the resin connecting pin 26 may be rotatably mounted instead of being fixed between the central portions of both sides of the locking claw 29 . Moreover, at least one of the resin connecting pin 26 and the resin supporting pin 34 may be formed into a straight pin or the like as long as there is no particular problem. Also, the reduced diameter portion 27 may be partially formed on a part of the peripheral surface between the tip portion 32 and the central portion of the resin connecting pin 26 .

In addition, if necessary, a flange having an identification function can be provided around the peripheral surface of the end portion of the resin connecting pin 26 to improve workability. Also, a diameter-reduced portion 35 can be partially formed on a portion of the peripheral surface between the tip portion and the central portion of the resin support pin 34 . Further, the locking claw 29 is formed in a block shape without a groove, and a connection cylinder portion adjacent to the cylinder portion 25 of the connection bar 24 is formed at the terminal end thereof. 26 can also be inserted. Further, in the above-described embodiment, the tip 32 of the locking claw 29 is bifurcated and formed into a substantially grooved shape. The pressing roller 33 may be omitted.

INDUSTRIAL APPLICABILITY The substrate storage container according to the present invention is used in manufacturing fields such as electricity, electronics, liquid crystals, precision instruments, and semiconductors.

1 Container body 3 Locking hole 10 Lid body 11 Lid body 12 Ejection opening 15 Surface plate 16 Operation opening 20 Locking mechanism 21 Operation reel (operation member)
24 connecting bar (slide member)
25 Cylindrical portion 26 Resin connecting pin 27 Reduced diameter portion 29 Locking claw (locking member)
30 guide boss (guide projection)
32 tip portion 33 pressing roller 34 resin support pin 35 reduced diameter portion 36 flange 37 holder 38 opposing cover plate 39 side plate 41 grooved cam 42 first grooved cam 43 second grooved cam 44 third grooved cam 50 cam plate

Claims (7)

A substrate storage container comprising: a lid fitted to an opening of a container body for storing substrates; and a locking mechanism for locking the lid fitted to the opening of the container body,
The locking mechanism includes an operation member that is supported by the lid and rotated by an external operation, a slide member that slides as the operation member rotates, and a locking member that can protrude from the periphery of the lid by sliding the slide member. and a plurality of grooved cams for locking the locking member to the inner periphery of the opening of the container body by rocking,
A resin connecting pin is pierced through the front end of the slide member and the locking member to make the locking member swingable in the thickness direction of the lid body, guide projections are formed on both sides of the locking member, respectively, and a plurality of grooves are formed. A circuit board storage characterized in that cams are provided on both sides of a slide member and a locking member, and both ends of a resin connecting pin and a plurality of guide projections of the locking member are slidably fitted in the plurality of grooved cams. container. In the locking mechanism, the slide member is formed in a substantially plate shape, and a plurality of cylindrical portions are arranged and protruded from the distal end portion of the slide member. The substrate storage container according to claim 1. 3. A substrate storage container according to claim 1, wherein a holder member is fitted to the sliding member and the locking member of the locking mechanism, and grooved cams are formed on both sides of the holder member. 3. A substrate storage container according to claim 1, wherein the lid is formed with a plurality of cam plates sandwiching the sliding member and the locking member, and the plurality of cam plates are formed with grooved cams. The tip of the locking member of the locking mechanism is bifurcated into a substantially groove shape, and between the bifurcated tips of the locking member, a pressing roller that contacts the inner circumference of the opening of the container body is rotated via a resin support pin. 4. The substrate storage container according to claim 1, 2 or 3, wherein the substrate storage container is constructed so as to be possible. 6. The substrate storage container according to claim 5, wherein at least one of the resin connecting pin and the resin supporting pin is formed as a stepped pin having a diameter-reduced portion on its peripheral surface. The grooved cam of the locking mechanism consists of a first grooved cam positioned closer to the slide member and a second groove connected to the tip of the first grooved cam and extending from the surface side of the lid body toward the back side of the lid body while being inclined. A cam and a third grooved cam connected to the tip of the second grooved cam and inclined toward the surface of the lid,
Before the lid is locked by the locking mechanism, the guide projection of the locking member is positioned in the first grooved cam, the resin connecting pin is positioned in the vicinity of the connecting portion between the second grooved cam and the third grooved cam,
When the lid is locked by the locking mechanism, the guide projection of the locking member is positioned near the connecting portion of the first grooved cam and the second grooved cam, the resin connecting pin is positioned in the third grooved cam,
7. The method according to any one of claims 1 to 6, wherein after the lid is locked by the locking mechanism, the guide projection of the locking member is positioned on the second grooved cam, and the resin connecting pin is positioned on the tip of the third grooved cam. board container.

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