JP2011091285A - Substrate-housing container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate-housing container wherein all of a plurality of hooking bodies do not retract into a lid body, even if a strong impact, or the like, acts thereon, and discouraging the lid body from coming off a container body, casting aside the possibility of contamination or damages to a substrate. <P>SOLUTION: The substrate-housing container includes a lid body 10, which engages with a front side opened on the container body that houses a semiconductor wafer, and a locking mechanism 30, which is built in the lid body 10 to lock the lid body 10 engaged with the front side of the container body. The locking mechanism 30 includes a rotating plate 31, which is rotated from outside the lid body 10; a pair of connection bars 36 which is swung by rotation of the rotating plate 31; a pair of hooking members 37, which protrude from the peripheral wall of the lid body 10 under swinging of the connection bars 36 are engaged with the inner periphery on the front side of the container body; and a link mechanism 34; which connects the rotating plate 31 with the connection bar 36. When the lid body 10 is locked, the pair of connection bars 36 are extended vertically, straight toward the hooking member 37; and when the lid body 10 is unlocked, the connection bars 36 are tilted in directions which respectively differ with respect to the hooking member 37. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a substrate storage container that supports a substrate such as a semiconductor wafer or a mask glass.

  A conventional substrate storage container is not shown, but a container body for horizontally aligning and storing a plurality of semiconductor wafers, a lid body detachably fitted to the front surface of the container body opened by a lid body opening and closing device, And a locking mechanism that locks the lid fitted in the front surface of the container body and is used for storing and storing semiconductor wafers, transporting and transporting in the process.

  The locking mechanism includes a pair of left and right rotating plates that are rotated from the outside of the lid by a lid opening / closing device, a pair of advancing and retracting plates that move up and down by the rotation of each rotating plate, and advancing of each advancing and retracting plate It is comprised from the several latching claw which can protrude from the surrounding wall of a cover body, and can be locked to the front inner periphery of a container main body. The rotating plate of the locking mechanism and the pair of advance / retreat plates are positioned on a straight line, and a plurality of locking claws project together and retract together (see Patent Documents 1, 2, 3, 4, 5, 6). .

Japanese Patent Laid-Open No. 2003-133405 JP 2008-98236 A JP 2007-19328 A JP 2006-303015 A JP 2007-142189 A Japanese Patent Laid-Open No. 2002-368074

  In the conventional substrate storage container, as described above, the rotation plate of the locking mechanism and the pair of advance / retreat plates are positioned in a straight line, and the plurality of locking claws are retracted together in the lid. When a strong impact is applied by dropping, the rotating plate may rotate to the anti-lock side. As a result, the plurality of locking claws are all retracted into the lid body, and the lid body may be detached from the front surface of the container body, leading to contamination or breakage of the semiconductor wafer.

  The present invention has been made in view of the above, and even if a strong impact or the like is applied, a plurality of locking bodies are not retracted into the lid body, and the lid body is detached from the container body to cause contamination or damage of the substrate. An object of the present invention is to provide a substrate storage container capable of wiping out the risk of incurring.

In order to solve the above-mentioned problems in the present invention, a lid that is fitted into the opening of the container body that houses the substrate, and a locking mechanism that locks the lid that is provided on the lid and fitted into the opening of the container body. With
The locking mechanism includes a rotating body that is rotated from the outside of the lid, a plurality of connecting bars that swing by the rotation of the rotating body, and an inner periphery of the opening of the container body that protrudes from the lid by the swing of each connecting bar. A plurality of latchable bodies that can be projected and retracted, and a link mechanism or a cam mechanism that couples a displacement part that is displaced radially outward from the center of the rotating body and a plurality of coupling bars, When locking, the plurality of connecting bars are extended substantially straight with respect to the locking body, and when the lid is unlocked, the plurality of connecting bars are inclined in different directions with respect to the locking body. It is said.

  The locking mechanism includes a rotating body that is supported by a lid and is rotated from the outside, and a link bar that is swingably supported by a displacement portion that is displaced radially outward from the center of the rotation body. , A plurality of connecting bars supported swingably on the link bar and spaced apart from each other, supported on each connecting bar so as to be swingable, and projecting from the peripheral wall of the lid to be locked to the inner periphery of the opening of the container body When the lid is locked, a plurality of connecting bars are extended substantially in a straight line between the link bar and the locking body, and between the link bar and the locking body when the lid is unlocked. The plurality of connecting bars can be inclined in different directions.

  In addition, the locking mechanism includes a rotating body that is supported by the lid and rotated from the outside, a cam formed on the rotating body, and a cam groove of the cam that is displaced radially outward from the center of the rotating body. A plurality of connecting bars that are swingably supported and spaced apart from each other, and a locking body that is swingably supported by each connecting bar and protrudes from the peripheral wall of the lid body and engages with the inner periphery of the opening of the container body. In addition, when the lid is locked, a plurality of connecting bars are extended substantially straight between the cam groove of the cam and the locking body, and when the lid is unlocked, a plurality of bars are connected between the cam groove of the cam and the locking body. The connecting bars can be inclined in different directions.

  Moreover, it is preferable to form a guide rib for the locking body on the lid body and arrange the plurality of locking bodies closer to the center line in the width direction of the lid body than the rotating body of the locking mechanism.

  Here, the substrate in the claims includes at least φ200, φ300, φ450 mm semiconductor wafer, glass substrate, mask glass, and the like. Further, the container body is not particularly limited to transparent, opaque, translucent, front open box type, top open box type, and bottom open box type. The lid is not questionable about transparency, opaqueness, or translucency.

  The rotating body of the locking mechanism and the plurality of connecting bars can be connected via, for example, a toggle link mechanism (also referred to as a toggle joint mechanism). The plurality of connecting bars extend in a substantially straight line, and the substantially straight line includes a substantially straight state in addition to the straight line. As a locking body of the locking mechanism, a flat plate, a bent claw, etc. can be used, and a rotatable roller for reducing friction can be selectively attached to a portion that contacts the inner periphery of the opening of the container body. is there. This locking body may swing in the front and back direction of the lid, or may not be, and may be supported rotatably in the peripheral wall of the lid.

  According to the present invention, when locking the lid fitted to the opening of the container body, the rotating body of the locking mechanism is rotated in the locking direction from the outside of the lid. Then, the link mechanism or the cam mechanism is operated by the rotation of the rotating body, the plurality of connecting bars swing to cause the locking bodies to protrude, and each locking body protrudes from the lid body to the inner periphery of the opening of the container body. It is caught and the lid is locked.

  On the other hand, when the lid covering the opening of the container body is unlocked and removed, the rotating body is rotated in the unlocking direction from the outside of the lid. Then, the link mechanism or the cam mechanism is operated by the rotation of the rotating body, each connecting bar swings to retract the locking body, and each locking body retracts from the container body into the lid body, The lid can be removed from the main body.

  In addition, when an impact or the like is applied to the substrate storage container and the rotating body of the locked locking mechanism tries to rotate in the unlocking direction, a plurality of connecting bars are connected to the link mechanism or cam mechanism at a position away from the rotation center of the rotating body. Since the connection bars are connected to each other and extend substantially in a straight line, even if some of the connection bars move back and swing into the lid body, the remaining connection bars move back and forth within the cover body. Less is. That is, since the plurality of connecting bars do not operate in the same direction, the plurality of locking bodies are less likely to be retracted into the lid body, thereby restricting the rotating body from rotating in the unlocking direction. it can.

  According to the present invention, even if a strong impact or the like acts on the substrate storage container, the plurality of locking bodies of the locking mechanism do not retract into the lid body, and the lid body comes off from the container body through this and the substrate There is an effect that the possibility of causing contamination or breakage can be effectively wiped out.

If a link mechanism or cam mechanism is used as the locking mechanism, the link mechanism or cam mechanism operates as a booster mechanism that increases the operating force of the rotating body, so that the rotating body can be rotated with a smaller rotational torque than in the past. A large locking force can be obtained simply by making it.
In addition, if the guide rib for the locking body is formed on the lid, the locking body can smoothly appear and disappear from the lid without being displaced. Furthermore, if a plurality of locking bodies are arranged closer to the center line in the width direction of the lid body than the rotating body of the locking mechanism, it is possible to prevent the center portion of the lid body from being swollen and deformed by being pushed by the substrate. Become.

It is an exploded perspective explanatory view showing typically an embodiment of a substrate storage container concerning the present invention. It is a disassembled perspective explanatory drawing which shows typically the cover body and locking mechanism in embodiment of the substrate storage container which concerns on this invention. It is a perspective explanatory view showing typically the lid and the unlocked locking mechanism in the embodiment of the substrate storage container according to the present invention. It is a perspective view showing typically a lid and a locking mechanism in a locked state in an embodiment of a substrate storage container concerning the present invention. It is a partial section explanatory view showing typically the locking mechanism of the locked state in the embodiment of the substrate storage container concerning the present invention. It is a partial section explanatory view showing typically the locking mechanism of the unlocking state in the embodiment of the substrate storage container concerning the present invention. It is a disassembled perspective explanatory view which shows typically the cover body and unlocking state locking mechanism in 2nd Embodiment of the substrate storage container which concerns on this invention. It is a disassembled perspective explanatory drawing which shows typically the cover body and the locking mechanism of a locking state in 2nd Embodiment of the substrate storage container which concerns on this invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 6, a substrate storage container in this embodiment includes a container main body 1 for storing a thin semiconductor wafer W, and the container main body. 1 is provided with a lid 10 that is fitted to the front face of the opening 1 and a locking mechanism 30 that locks the lid 10 that is built in the lid 10 and fitted to the container body 1. A rotating plate 31 that is rotated from the rotating plate 31, a plurality of connecting bars 36 that swing by the rotation of the rotating plate 31, and a projection that protrudes from the lid body 10 by the swinging of each connecting bar 36 and engages with the front inner periphery of the container body 1. A plurality of locking members 37, and a link mechanism 34 that connects each rotary plate 31 and the plurality of connecting bars 36. When the lid 10 is locked, the plurality of connecting bars 36 are connected to the locking member 37. Straighten out, When unlocking the body 10, and a plurality of connecting bars 36 so as to be inclined in different directions relative to the locking member 37.

  As shown in FIG. 1, the semiconductor wafer W is made of a flexible silicon wafer sliced to φ300 mm, for example, and is held by a dedicated robot (not shown) so that 25 wafers are aligned and stored horizontally in the container body 1. Is taken out.

  The container body 1, the lid body 10, and the locking mechanism 30 are each formed by combining a plurality of parts by injection molding a plurality of parts using a molding material containing a predetermined resin. Examples of the predetermined resin of the molding material include polycarbonate, cycloolefin, liquid crystal polymer, polyetheretherketone, polyetherimide, polybutylene terephthalate, polyacetal, and cyclic olefin resin, which have excellent mechanical properties and heat resistance. It is done. Carbon, carbon fiber, metal fiber, carbon nanotube, conductive polymer, antistatic agent, flame retardant or the like is selectively added to the predetermined resin as necessary.

  As shown in FIG. 1, the container body 1 is formed into a front open box type having a front opening made of a molding material, and a semiconductor processing apparatus or a gas replacement apparatus in a clean room with the opened horizontally long front faced in the horizontal horizontal direction. It is positioned and mounted on top, transported between processes, or transported. Separate support bodies 3 for supporting the stored semiconductor wafers W horizontally by the support teeth 2 are detachably attached to both inner sides of the container body 1, in other words, the inner surfaces of both side walls. . The support 3 can be integrally formed on the inner surfaces of both side walls of the container body 1.

  At the center of the top plate of the container main body 1, a top flange 4 for transport that is gripped by a ceiling transport mechanism in a factory is mounted. In addition, a rim flange 5 that fits with the lid body 10 is formed to bulge outward at the peripheral edge of the front of the container body 1 that is open, and the upper and lower sides of the inner peripheral surface of the rim flange 5 are The locking holes 6 for the lid 10 are respectively drilled.

  As shown in FIGS. 1 to 6, the lid 10 includes a horizontally long casing 11 that is detachably press-fitted into an open rim flange 5 of the container body 1 via an elastic gasket 22. A surface plate 23 that covers the opened surface (front surface) is provided, and a locking mechanism 30 is interposed between the housing 11 and the surface plate 23 and incorporated. The casing 11 of the lid body 10 is basically formed in a shallow bottom cross-sectional plate shape having a frame-shaped peripheral wall, and is used for the locking mechanism 30 between the central portion 12 and the left and right side portions of the peripheral wall. Each of the installation spaces 13 is partitioned, and a support rib 14 for the locking mechanism 30 and first and second guide ribs 15 and 16 are provided in each installation space 13.

  As shown in FIGS. 2 to 4, the support rib 14 is formed in a ring shape in front view at a substantially central portion of the installation space 13. The first guide rib 15 is formed by horizontally extending a pair of upper and lower ribs facing each other at an interval from the central portion 12 of the housing 11 to the vicinity of the support rib 14. The second guide rib 16 is formed by a pair of left and right ribs facing each other at an interval extending in the vicinity of the peripheral wall of the installation space 13, and functions to guide the forward and backward movement of the locking member 37.

  Through holes 17 for the locking mechanism 30 connected to the second guide rib 16 are formed in both upper and lower sides of the peripheral wall of the housing 11, and each through hole 17 is formed in the locking hole 6 of the rim flange 5 of the container body 1. opposite. Further, as shown in FIG. 1, a front retainer 18 that elastically holds the front periphery of the semiconductor wafer W is detachably attached to the center of the rear surface of the housing 11. The front retainer 18 includes a vertically long frame body 19, and a plurality of elastic pieces 20 are arranged vertically between a plurality of vertical crosspieces of the frame body 19, and each elastic piece 20 includes a semiconductor. A small holding block 21 for holding the front peripheral edge of the wafer W by the V-groove is integrally formed.

  The surface plate 23 is formed in a horizontally long flat plate so as to correspond to the open surface of the housing 11, and the operation ports 24 for the locking mechanism 30 facing the center portion of the support rib 14 are perforated in a rectangular shape on both the left and right sides. In addition, a rotatable operation key of the lid opening / closing device passes through each operation port 24 from the outside.

  As shown in FIGS. 2 to 6, the locking mechanism 30 includes a pair of left and right rotating plates 31 that are supported by the lid body 10 and rotated from the outside, and are pivotally supported on the peripheral surfaces of the rotating plates 31 so as to be swingable. The link bar 35 of the link mechanism 34, a pair of connection bars 36 pivotally supported by the link bar 35, and a pair of locking members 37 pivotally supported by the connection bars 36. The toggle link mechanism which is a booster mechanism is comprised.

  The rotating plate 31 is formed in a disc shape and is fitted and supported in the support rib 14 of the lid body 10, and an access recess 32 is linearly formed in the center of the surface, and the access recess 32 is a lid. The operation key 24 of the lid opening / closing device is rotated by facing the operation port 24 of the body 10. A projecting portion 33 is formed in a radially outward direction on the peripheral surface, which is a deviated portion displaced radially outward from the access recess 32 of the rotating plate 31, and the first guide rib 15 is formed at the tip of the projecting portion 33. The end portion of the link bar 35 fitted to the shaft is pivotally supported so that the link bar 35 slides in the horizontal direction while being guided by the first guide rib 15 as the link mechanism 34.

  The pair of connecting bars 36 are pivotally connected to the tip of the link bar 35 so as to be swingable, and are separated from each other in the vertical direction, and swing individually with the slide of the link bar 35 as the rotating plate 31 rotates. . Each connecting bar 36 extends longer than the link bar 35 and is pivotally supported so as to form an angle of 180 ° or less with the link bar 35.

  Each locking member 37 is pivotally supported at the distal end portion of each connecting bar 36, and is positioned closer to the center line in the width direction of the lid body 10 than the rotation plate 31, and gives rigidity to the housing 11. A friction-reducing rotatable roller 38 shown in FIGS. 5 and 6 can be provided at the distal end of the locking member 37 so that the roller 38 is engaged with the container body 1 in this case. Generation of particles is prevented by sliding in the blind hole 6.

  As shown in FIG. 4, when the lid 10 is locked, the locking member 37 protrudes from the through hole 17 in the peripheral wall of the lid 10 so as to protrude and retract while being fitted and guided by the second guide rib 16. When the lid 10 is unlocked and locked in the locking hole 6 of the container body 1, as shown in FIG. 3, the locking body 6 is inserted into the through hole 17 of the lid 10 from the locking hole 6 of the container body 1. The second guide rib 16 retreats while being fitted and guided.

  When the lid 10 is locked, such a locking mechanism 30 has a pair of connecting bars 36 vertically aligned between the tip of the link bar 35 and the pair of locking members 37, as shown in FIG. When the lid 10 is unlocked, as shown in FIG. 3, the pair of connecting bars 36 is located between the front end of the link bar 35 and the pair of locking members 37, and the center of the access recess 32. Inclined in different directions with respect to the passing Y-axis, a substantially horizontal V-shape is drawn.

  In the above configuration, when the lid 10 fitted to the front surface of the container body 1 is locked, the operation key of the lid opening / closing device passes through the operation port 24 of the lid 10 and enters the access recess 32 of the rotating plate 31. Interference occurs, and the operation key is inserted into the access recess 32 to rotate the rotary plate 31 by 90 ° to the lock side.

  Then, the rotation of the rotating plate 31 causes the link bar 35 of the link mechanism 34 to slide away from the central portion 12 of the housing 11, and the connecting bars 36 swing in a chain manner to project the locking member 37. While each locking member 37 is guided by the second guide rib 16, it protrudes from the through hole 17 of the lid body 10 and is locked to the locking hole 6 of the container body 1. The lid body 10 fitted in is firmly locked. At this time, since the first and second guide ribs 15 and 16 guide the link bar 35 and the locking member 37, respectively, the link bar 35 and the locking member 37 are smooth without being displaced or rattling. To work.

  On the other hand, when the lid body 10 fitted to the front surface of the container body 1 is unlocked and removed, the operation key of the lid body opening / closing device passes through the operation port 24 of the lid body 10 and accesses the rotary plate 31. Interfering with the recess 32, the rotating plate 31 is rotated 90 ° to the anti-lock side.

  Then, the rotation of the rotary plate 31 causes the link bar 35 to slide so as to approach the central portion 12 of the housing 11, and the standing connection bars 36 swing in a chain manner to retract the locking member 37. Each locking member 37 is retracted from the locking hole 6 of the container body 1 while being fitted and guided by the second guide rib 16 into the through hole 17 of the lid body 10, and this retracting action causes the container body 1 to be retracted. The lid 10 can be removed from the front.

  Next, when the substrate storage container storing the semiconductor wafer W falls and a strong impact acts and the rotating plate 31 tries to rotate to the anti-lock side, a pair of the rotating plate 31 is separated from the access recess 32. Since the connecting bar 36 is connected and extends in a straight line in the vertical direction, either the upper or lower connecting bar 36 moves backward in the lid body 10 and swings, but the other connecting bar 36 or the locking member 37 does not move. It does not retreat into the lid 10 by being pushed in a chain.

  That is, since the pair of connecting bars 36 operate in different directions and do not operate in the same direction, it is possible to effectively restrict the rotation plate 31 from rotating to the antilock side. Thereby, since the other locking member 37 does not retreat into the lid body 10, the lid body 10 is not detached from the front surface of the container body 1.

  According to the above configuration, even if the substrate storage container falls and a strong impact is applied, the pair of upper and lower locking members 37 do not retract together, so that the rotating plate 31 rotates to the anti-lock side. Suppression can be prevented. Therefore, it is possible to effectively wipe out the possibility of causing contamination and breakage of the semiconductor wafer W and to eliminate clean room contamination. Further, since the link mechanism 34 is used for the locking mechanism 30, a large locking force can be obtained only by rotating the rotating plate 31 with a small rotational torque, and a complicated motion can be obtained with a simple configuration. .

  Further, since the locking member 37 is disposed closer to the center line in the width direction of the lid body 10 than the rotating plate 31 and the strength of the lid body 10 is increased, the center of the lid body 10 is pressed against the front periphery of the semiconductor wafer W. It is possible to prevent the portion 12 from bulging and deforming.

  Next, FIGS. 7 and 8 show a second embodiment of the present invention. In this case, the locking mechanism 30 includes a deviated portion that is deviated radially outward from the access concave portion 32 of each rotating plate 31. A pair of connecting bars 36 are configured to be connected by a cam mechanism 40.

  The locking mechanism 30 is integrally formed on a pair of left and right rotating plates 31 that are fitted and supported by the support ribs 14 of the lid body 10 and rotated from the outside by operation keys of the lid body opening / closing device, and the peripheral portions of the respective rotating plates 31. A cam 41 of the cam mechanism 40, a pair of swingable connecting bars 36 that are pivotally supported in a cam groove 42 of the cam 41 and spaced apart from each other, and swingable at the tip of each connecting bar 36 A locking member 37 that is pivotally supported and protrudes from the through hole 17 in the peripheral wall of the lid body 10 to be locked in the locking hole 6 of the container body 1 is configured.

  The cam 41 is formed in, for example, a substantially elliptical plate larger than the rotating plate 31, and a semicircular arc-shaped cam groove 42 penetrates a portion away from the access recess 32 of the rotating plate 31 in the radially outward direction. The end portions of the pair of connecting bars 36 are slidably connected to the cam grooves 42 so as to be slidable.

  When the lid 10 is locked, such a locking mechanism 30 has a pair of connecting bars 36 vertically aligned between the end of the cam groove 42 and the pair of locking members 37 as shown in FIG. 7 and the lid 10 is unlocked, the pair of connecting bars 36 are located at the center of the access recess 32 between the end of the cam groove 42 and the pair of locking members 37 as shown in FIG. Inclined in different directions with respect to the passing Y-axis, a substantially horizontal V-shape is drawn.

  In the above configuration, when the lid 10 fitted to the front surface of the container body 1 is locked, the operation key of the lid opening / closing device passes through the operation port 24 of the lid 10 and enters the access recess 32 of the rotating plate 31. Interference occurs, and the operation key is inserted into the access recess 32 to rotate the rotary plate 31 by 90 ° to the lock side.

  Then, the cam 41 is rotated together with the rotating plate 31 and guided by the cam groove 42 of the cam 41, each connecting bar 36 is swung in a chain to project the locking member 37 and each locking member 37. Is guided by the second guide rib 16 and protrudes from the through hole 17 of the lid body 10 and engages with the engagement hole 6 of the container body 1. By this engagement action, the lid fitted to the front surface of the container body 1. The body 10 is firmly locked.

  On the other hand, when the lid body 10 fitted to the front surface of the container body 1 is unlocked and removed, the operation key of the lid body opening / closing device passes through the operation port 24 of the lid body 10 and accesses the rotary plate 31. Interfering with the recess 32, the rotating plate 31 is rotated 90 ° to the anti-lock side.

  Then, the cam 41 is rotated together with the rotating plate 31, and while being guided by the cam groove 42 of the cam 41, each of the standing connection bars 36 swings in a chain and retracts the locking member 37. The locking member 37 is retracted from the locking hole 6 of the container body 1 while being fitted and guided by the second guide rib 16 in the through hole 17 of the lid body 10, and this retracting action causes the front of the container body 1 to be retracted. The lid body 10 can be removed.

  Next, when the substrate storage container storing the semiconductor wafer W falls and a strong impact acts and the rotating plate 31 tries to rotate to the anti-lock side, at a place away from the access recess 32 of the rotating plate 31. Since the pair of connection bars 36 are connected by the cam 41 and extend in a straight line in the vertical direction, either the upper or lower connection bar 36 moves backward in the lid body 10 and swings, but the other connection bar 36 or The locking member 37 is not pushed back and forth in the lid body 10.

Therefore, the rotating plate 31 does not rotate to the antilock side, and the lid body 10 does not come off from the front surface of the container body 1. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.
In this embodiment, the same effect as that of the above embodiment can be expected, and since the cam mechanism 40 is used for the locking mechanism 30, it is clear that a really complicated motion can be easily obtained with a simple configuration. is there.

  Note that a rear retainer for holding the rear periphery of the semiconductor wafer W may be provided on the back wall of the container body 1 of the above embodiment. Further, the operation port 24 of the surface plate 23 may be formed in a circular shape or an arc shape. Moreover, in the said embodiment, although the link mechanism 34 or the cam mechanism 40 was used for the locking mechanism 30, it is not limited to this at all. For example, a crank mechanism may be used in combination. Further, the link bar 35 and the locking member 37 can be pivotally supported by friction reducing rollers that are in sliding contact with the ribs. Furthermore, the locking member 37 can be pivotally supported in the peripheral wall of the lid 10 so as to be swingable in the front and back direction, and can be fitted to the second guide rib 16.

DESCRIPTION OF SYMBOLS 1 Container body 5 Rim flange 6 Locking hole 10 Cover body 11 Housing | casing 12 Center part 13 Installation space 14 Support rib 15 First guide rib 16 Second guide rib (guide rib)
17 Through-hole 23 Surface plate 30 Locking mechanism 31 Rotating plate (rotating body)
32 Access recess (center)
33 Projection 34 Link Mechanism 35 Link Bar 36 Connection Bar 37 Locking Member (Locking Body)
40 Cam mechanism 41 Cam 42 Cam groove W Semiconductor wafer (substrate)

Claims (4)

A substrate storage container comprising a lid that is fitted into an opening of a container main body that accommodates a substrate, and a locking mechanism that is provided on the lid and locks the lid fitted into the opening of the container main body,
The locking mechanism includes a rotating body that is rotated from the outside of the lid, a plurality of connecting bars that swing by the rotation of the rotating body, and an inner periphery of the opening of the container body that protrudes from the lid by the swing of each connecting bar. A plurality of latchable bodies that can be projected and retracted, and a link mechanism or a cam mechanism that couples a displacement part that is displaced radially outward from the center of the rotating body and a plurality of coupling bars, When locking, the plurality of connecting bars are extended substantially straight with respect to the locking body, and when the lid is unlocked, the plurality of connecting bars are inclined in different directions with respect to the locking body. A substrate storage container.   The locking mechanism includes a rotating body that is supported by a lid and rotated from the outside, a link bar that is swingably supported by a displacement portion that is displaced radially outward from the center portion of the rotation body, A plurality of connecting bars that are swingably supported by the link bar and spaced apart from each other, and a lock that is swingably supported by each connecting bar and protrudes from the peripheral wall of the lid body and engages with the inner periphery of the opening of the container body A plurality of connecting bars between the link bar and the locking body when the lid is locked, and a plurality of connecting bars between the link bar and the locking body when unlocking the lid. 2. The substrate storage container according to claim 1, wherein the connecting bars are inclined in different directions.   The locking mechanism is supported by a lid and is rotated by an externally operated rotating body, a cam formed on the rotating body, and a cam groove of a cam displaced radially outward from the center of the rotating body. A plurality of connecting bars that are supported and spaced apart from each other, and a locking body that is swingably supported by each connecting bar and protrudes from the peripheral wall of the lid body and locks to the inner periphery of the opening of the container body, When the lid is locked, a plurality of connecting bars are extended in a straight line between the cam groove of the cam and the locking body. When the lid is unlocked, a plurality of connections are connected between the cam groove of the cam and the locking body. 2. The substrate storage container according to claim 1, wherein the bars are inclined in different directions.   4. A substrate storage container according to claim 1, wherein a guide rib for the locking body is formed on the lid, and a plurality of locking bodies are arranged closer to the center line in the width direction of the lid than the rotating body of the locking mechanism. .

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